JPH10296972A - Ink jet head - Google Patents

Ink jet head

Info

Publication number
JPH10296972A
JPH10296972A JP10704597A JP10704597A JPH10296972A JP H10296972 A JPH10296972 A JP H10296972A JP 10704597 A JP10704597 A JP 10704597A JP 10704597 A JP10704597 A JP 10704597A JP H10296972 A JPH10296972 A JP H10296972A
Authority
JP
Japan
Prior art keywords
ink
plate
chamber
diaphragm
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10704597A
Other languages
Japanese (ja)
Inventor
Yoshio Ouchi
義男 大内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10704597A priority Critical patent/JPH10296972A/en
Publication of JPH10296972A publication Critical patent/JPH10296972A/en
Pending legal-status Critical Current

Links

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a manufacturing method excellent in productivity by bonding the barrier wall of an ink chamber through metal diffusion bonding and ensuring the dimensions of channel thereby making constant the characteristics among a plurality of channels. SOLUTION: Ink is passed through a plate 5 and the channel 9 in a chamber plate 7 by the differential head between the ink and a head and the capillarity and a pressurization chamber 11 comprising a diaphragm 6, the chamber plate 7 and an orifice plate is filled with the ink. The diaphragm 6 is connected with an electrostrictive element 2 fixed to a board 1 being held through a spacer 19. A drive circuit applies an electric signal to the electrostrictive element 2 in order to generate a mechanical displacement for deforming the diaphragm 6 through a foot 3. The pressurization chamber 11 is deformed in the direction for reducing the volume thereof and an ink droplet is jetted through an orifice made in an orifice plate 12.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はインクジェットヘッ
ドに関する。
The present invention relates to an ink jet head.

【0002】[0002]

【従来の技術】従来のインクジェットヘッドは、隔壁を
接合するために、例えば、エポキシ系の接着剤を用いて
接合を行っていたため、接着剤の塗布量の管理が必要で
あり、量が多すぎた場合にはインクの流路を狭めたり、
塞いだりする弊害があった。特に一つのインクジェット
ヘッドで多数のオリフィスを有するものの場合は、何処
か一箇所のオリフィスで、所要の性能が得られないため
に、インクジェットヘッドとしては、不良になってしま
うという不具合があった。
2. Description of the Related Art Conventional ink jet heads use, for example, an epoxy-based adhesive to join barrier ribs, so that it is necessary to control the amount of adhesive applied, and the amount is too large. In such a case, narrow the ink flow path,
There was an evil to block. In particular, in the case of a single ink jet head having a large number of orifices, the required performance cannot be obtained with one orifice at any one place, so that the ink jet head is defective.

【0003】[0003]

【発明が解決しようとする課題】本発明は接着剤等の接
合手段を用いずに、インクチャンバの隔壁を接合し、目
的とする流路寸法を確保することにより、複数あるチャ
ンネル間の特性を一定にし、生産性の良いインクジェッ
トヘッドの製法を提供することにある。
SUMMARY OF THE INVENTION According to the present invention, the characteristics between a plurality of channels can be improved by bonding the partition walls of the ink chamber without using a bonding means such as an adhesive and securing a desired flow path size. An object of the present invention is to provide a method of manufacturing an inkjet head which is constant and has good productivity.

【0004】[0004]

【課題を解決するための手段】インクチャンバの隔壁を
構成する部材を金属で構成することにより、金属同士の
分子間結合力による接合、所謂金属拡散接合が可能にな
る。
By forming the members constituting the partition walls of the ink chamber from metal, it is possible to perform bonding by intermolecular bonding force between metals, so-called metal diffusion bonding.

【0005】[0005]

【発明の実施の形態】以下、本発明の実施例を図1を参
照して説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG.

【0006】図1は本発明になるインクジェットヘッド
の断面図である。図示していないインク供給タンクから
押さえ板4に設けられた共通インク室10にインクが供
給され、インクとヘッドの水頭差と毛細管現象によりイ
ンクはプレート5とチャンバプレート7の流路9を通っ
てダイヤフラム6,チャンバプレート7及びオリフィス
プレート12で構成される加圧室11に充填される。ダ
イヤフラム6にはフット3を介し、スペーサ19で保持
する基板1に取り付けられた電歪素子2に接続してお
り、図示はしていない駆動回路により、電気信号が電歪
素子2に加えられることにより、機械的な変位が電歪素
子2に生じ、剛体であるフット3を介しダイヤフラム6
を変形させる。加圧室11の変形はその体積を縮小する
方向に生じ、オリフィスプレート12に設けられたオリ
フィス8よりインク滴が噴出する。図1は良く知られて
いる所謂オン・デマンド型のインクジェットヘッドであ
る。図2は図1で説明したオン・デマンドヘッドの各部
品の平面図である。オリフィスプレート12にはオリフ
ィス8が所望の数だけ設けられている。チャンバプレー
ト7には加圧室11を構成するための貫通孔13及びイ
ンク供給の流路9を形成するための流路溝14が掘りこ
まれている。ダイヤフラム6には流路9を構成するため
の流路孔15が開けられている。プレート5にはフット
3及び電歪素子2が入るための貫通孔16及び流路9を
形成するための流路溝17が掘りこまれている。押さえ
板4には共通インク室10となる共通インク室溝18が
掘りこまれている。
FIG. 1 is a sectional view of an ink jet head according to the present invention. Ink is supplied from a not-shown ink supply tank to a common ink chamber 10 provided on the holding plate 4, and the ink passes through the flow path 9 of the plate 5 and the chamber plate 7 due to the head difference between the ink and the head and the capillary phenomenon. The pressure is filled in the pressurizing chamber 11 composed of the diaphragm 6, the chamber plate 7 and the orifice plate 12. The diaphragm 6 is connected to the electrostrictive element 2 attached to the substrate 1 held by the spacer 19 via the foot 3 via the foot 3, and an electric signal is applied to the electrostrictive element 2 by a drive circuit (not shown). As a result, a mechanical displacement is generated in the electrostrictive element 2, and the diaphragm 6 is moved through the rigid foot 3.
To transform. The deformation of the pressurizing chamber 11 occurs in the direction of reducing its volume, and ink droplets are ejected from the orifice 8 provided in the orifice plate 12. FIG. 1 shows a well-known so-called on-demand type ink jet head. FIG. 2 is a plan view of each component of the on-demand head described in FIG. The orifice plate 12 is provided with a desired number of orifices 8. In the chamber plate 7, a through hole 13 for forming the pressurized chamber 11 and a flow channel 14 for forming the ink supply flow channel 9 are dug. The diaphragm 6 has a passage hole 15 for forming the passage 9. In the plate 5, a through hole 16 for the foot 3 and the electrostrictive element 2 to enter and a flow channel groove 17 for forming the flow channel 9 are dug. A common ink chamber groove 18 serving as the common ink chamber 10 is dug into the holding plate 4.

【0007】これらのヘッド構成部品の表面に付着して
いる油脂等を取り除くために洗浄をした後、図3に示す
ように配置し、金属拡散接合のための真空炉にいれる。
炉内を高温,高圧の状態にすることにより各部品の接続
部は合金状態となり、確実な接合ができる。この時、接
合のために接着剤等を用いる必要はなく、微細な加工を
施した、流路9を予定外に塞いでしまうことはない。
After cleaning to remove oils and the like adhering to the surface of these head components, they are arranged as shown in FIG. 3 and placed in a vacuum furnace for metal diffusion bonding.
By setting the inside of the furnace at a high temperature and a high pressure, the connection portion of each component becomes an alloy state, and reliable joining can be performed. At this time, it is not necessary to use an adhesive or the like for joining, and the finely processed channel 9 will not be blocked unexpectedly.

【0008】[0008]

【発明の効果】本発明によれば、接着剤等の接合手段を
用いずに、チャンネル間特性の揃ったインクジェットヘ
ッドの製作をすることができる。
According to the present invention, it is possible to manufacture an ink jet head having uniform characteristics between channels without using a bonding means such as an adhesive.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明のインクジェットヘッドの断面図。FIG. 1 is a sectional view of an inkjet head according to the present invention.

【図2】本発明のインクジェットヘッドの説明図。FIG. 2 is an explanatory diagram of an inkjet head according to the present invention.

【図3】本発明のインクジェットヘッドの配置図。FIG. 3 is a layout diagram of an inkjet head according to the present invention.

【符号の説明】[Explanation of symbols]

1…基板、2…電歪素子、3…フット、4…押さえ板、
5…プレート、6…ダイヤフラム、7…チャンバプレー
ト、8…オリフィス、9…流路、10…共通インク室、
11…加圧室、12…オリフィスプレート、19…スペ
ーサ。
DESCRIPTION OF SYMBOLS 1 ... board, 2 ... electrostrictive element, 3 ... foot, 4 ... holding plate,
5: plate, 6: diaphragm, 7: chamber plate, 8: orifice, 9: flow path, 10: common ink chamber,
11: pressurized chamber, 12: orifice plate, 19: spacer.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】複数のオリフィス部を有するオリフィスプ
レートと上記オリフィス部に対応する数のインクチャン
バを有するチャンバプレートとインク流路を構成するプ
レートと上記インクチャンバ内に保持されたインクに圧
力を加えるためのダイヤフラムプレートからなるインク
ジェットヘッドにおいて、金属拡散接合によりヘッドの
構成部材を接合したことを特徴とするインクジェットヘ
ッド。
1. A pressure is applied to an orifice plate having a plurality of orifices, a chamber plate having a number of ink chambers corresponding to the orifices, a plate forming an ink flow path, and ink held in the ink chamber. Ink jet head comprising a diaphragm plate for joining the components of the head by metal diffusion bonding.
JP10704597A 1997-04-24 1997-04-24 Ink jet head Pending JPH10296972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10704597A JPH10296972A (en) 1997-04-24 1997-04-24 Ink jet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10704597A JPH10296972A (en) 1997-04-24 1997-04-24 Ink jet head

Publications (1)

Publication Number Publication Date
JPH10296972A true JPH10296972A (en) 1998-11-10

Family

ID=14449132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10704597A Pending JPH10296972A (en) 1997-04-24 1997-04-24 Ink jet head

Country Status (1)

Country Link
JP (1) JPH10296972A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100620286B1 (en) * 1999-11-04 2006-09-07 삼성전자주식회사 Ink jetting apparatus and a method for manufacturing a nozzle part of the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100620286B1 (en) * 1999-11-04 2006-09-07 삼성전자주식회사 Ink jetting apparatus and a method for manufacturing a nozzle part of the same

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