JPH1029059A - Thermo compression bonding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To keep the positional precision of a heated tool to high by thermally shutting off a movable block from a high temp. heating tool in a specific method. SOLUTION: In a thero compression bonding device, at the time of executing the thero compression bonding, the heated tool 25 becomes such high temp. as handreds of deg.C by the heat generated with a heater 27. At this time, when the compressed air is supplied from an air supplying source 31, this compressed air is exhausted to the outer part after passing a porous material 29 through a piping 32, joint 30 and flow passage 33. Therefore, even if the heat intending to transfer from the heated tool 25 side to a shifting block 20 side is passed through a heat insulating material 28, since the heat is conducted to the compressed air flowed out to the outer part in succession from the porous material 29 and exhausted to the outer part, the heat is scarcely transferred to the shifting block 20. Therefore, the shifting block 20 can be kept to the condition of holding to the low temp. and the reliability of measured value of a pressure sensor 34 is improved and further, the positional precision of the pressured surface 25a can be kept to high.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermocompression bonding apparatus for thermocompression bonding a plurality of works.

[0002]

2. Description of the Related Art In a circuit module manufacturing process, an ACF (anisotropic conductor) or TCP
A thermocompression bonding apparatus is used to thermocompression-bond other workpieces such as (Tape Carrier Package).

FIG. 4 is a partial sectional view of a conventional thermocompression bonding apparatus. In FIG. 4, reference numeral 1 denotes a moving block that moves up and down in the vertical direction N1. Reference numeral 2 denotes a heating tool that is supported below the moving block 1 and has a built-in heater 3 as a heat source. Pressurizing surface 2a
It has become.

Here, in order to perform thermocompression with high accuracy,
High positional accuracy of the pressing surface 2a is indispensable. On the other hand, the heating tool 2 has a built-in heater 3 and has a high temperature of about 400 ° C. When this heat is transmitted to the moving block 1 side, the moving block 1 causes thermal distortion, and the positional accuracy of the pressing surface 2a is reduced. Therefore, in a conventional thermocompression bonding apparatus, a heat insulating material 4 is provided between the high-temperature heating tool 2 and the moving block 1.
The heat transfer to the moving block 1 was suppressed.

[0005]

However, even if such a configuration is adopted, if the heat insulating material 4 is thermally saturated,
Heat transfer to the moving block 1 side occurs. In addition, the moving block 1 generally has a large heat capacity, and once heat transfer to the moving block 1 starts, it takes a very long time until the moving block 1 becomes in a thermal steady state. Further, while the temperature of the moving block 1 changes, the thermal distortion of the moving block 1 also changes, and as a result, the position of the pressing surface 2a also changes every moment. In such a state, it is extremely difficult to obtain sufficient positional accuracy.

[0006] Therefore, an object of the present invention is to provide a thermocompression bonding apparatus which can suppress a thermal adverse effect caused by a heating tool.

[0007]

The thermocompression bonding apparatus according to the present invention comprises:
A moving block that advances and retreats toward each work, a heating tool supported at one end of the moving block and provided with a heat source, a porous material interposed between the moving block and the heating tool, and a porous material. A gas supply unit for supplying a gas and flowing the gas from the porous material to the outside.

[0008]

According to a first aspect of the present invention, there is provided a thermocompression bonding apparatus, comprising: a moving block which advances and retreats toward each work; a heating tool supported at one end of the moving block and provided with a heat source;
A porous material is interposed between the moving block and the heating tool, and a gas supply unit that supplies gas to the porous material and circulates gas from the porous material to the outside. Therefore, the gas supplied from the gas supply unit is discharged to the outside from the porous material between the moving block and the high-temperature heating tool. Here, even if the temperature of the heating tool becomes high, the heat of the heating tool is transferred to this gas, and the gas receiving the heat is immediately discharged to the outside, and new gas is supplied one after another. Most of the water is taken away by the gas discharged to the outside, and is hardly transmitted to the moving block. That is,
The moving block is thermally shielded from the high-temperature heating tool by the gas discharged from the inside of the porous material to the outside. For this reason, the moving block hardly generates thermal distortion, and can maintain high positional accuracy of the heating tool.

Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a thermocompression bonding apparatus according to an embodiment of the present invention. In FIG. 1, reference numeral 5 denotes a base, and an X table 6, a Y table 7, and a θ table 8 provided on the base 5 allow the holding unit 9 to move in the XYθ directions. The holding section 9 sucks a central portion of a lower surface of a substrate (liquid crystal panel) 10 as a first work. Therefore, X table 6, Y table 7, θ
By driving the table 8, the substrate 10 can be positioned freely. An electronic component 11 as a second work is mounted on the edge of the substrate 10, and this thermocompression bonding apparatus is for thermocompression bonding the electronic component 11 to the substrate 10.

A pair of upper and lower pedestals 12 are provided at the rear of the base 5 in parallel with the X direction.
A lower support 13 that supports the lower surface of the edge of the substrate 10 is provided upright. In addition, a cylinder 15 as an advancing / retracting mechanism for raising and lowering the pressure bonding head 14 is disposed above the upper base 12. When the cylinder 15 is driven, the pressure bonding head 14 is lowered toward the electronic component 11, and the electronic component 11 can be thermocompression bonded to the substrate 10.

Next, the detailed structure of the pressure bonding head 14 will be described with reference to FIGS. In FIG. 3, 16
Is a support plate vertically provided on the upper base 12 (see also FIG. 1), and a vertical guide rail 17 is fixed to the front surface of the support plate 16. Then, the slider 1 provided on the back surface of the frame 19 that holds the entire crimping head 14
8 is slidably engaged with the guide rail 17. Further, a rod 15 a of the cylinder 15 is connected to the top of the frame 19.

Therefore, when the cylinder 15 is driven,
The entire crimping head 14 together with the frame 19 can be raised and lowered.

Reference numeral 20 denotes a moving block provided inside the frame 19 with the intermediate plate 21 interposed therebetween. Reference numeral 22 denotes a hollow bolt for fixing the upper part of the moving block 20 to the frame 19 via the intermediate plate 21, and reference numeral 23 denotes a fixing bolt for fixing the lower part of the moving block 20 to the lower part of the intermediate plate 21. A spherical bearing 24 is mounted between the fixing bolt 23 and the intermediate plate 21. By adjusting the intermediate plate 21, the hollow bolt 22, the fixing bolt 23, and the spherical bearing 24, the vertical position of the moving block 20 with respect to the frame 19 and the inclination in the horizontal and vertical directions can be finely adjusted. ing.

A heating tool 25 is supported below the moving block 20 in a state where it is positioned by a positioning pin 26. 25a is a pressing surface of the heating tool 25, and 27 is a heater as a heat source. Also, between the lower surface of the moving block 20 and the upper surface of the heating tool 25,
A member for shutting off heat is provided in the order of the porous material 29 and the heat insulating material 28 from above. As the porous material 29,
Those made of stainless steel, ceramics and the like are preferred.

Reference numeral 30 denotes a joint which penetrates the intermediate plate 21 and is mounted in the middle of the front surface of the moving block 20. The joint 30 has an air supply source 31 as a gas supply unit.
Compressed air is supplied through a pipe 32. And
Inside the moving block 20, a flow path 33 is formed from the tip of the joint 30 to the boundary between the lower surface of the moving block 20 and the upper surface of the porous material 29. The lower end of the flow channel 33 is an enlarged diameter portion 33 a, so that compressed air is evenly supplied into the porous material 29.

When the thermocompression bonding is performed, the heat generated by the heater 27 causes the heating tool 25 to reach a high temperature of several hundred degrees Celsius. At this time, when compressed air is supplied from the air supply source 31, the compressed air passes through the porous material 29 via the pipe 32, the joint 30, and the flow path 33,
It is discharged outside.

Therefore, even if the heat that is going to be transmitted from the heating tool 25 side to the moving block 20 side passes through the heat insulating material 28, it is taken away by the compressed air that flows out one after another from the porous material 29 and is discharged to the outside. Therefore, it is hardly transmitted to the moving block 20. At this time, even if the heat insulating material 28 is thermally saturated, the heat is still shut off by the compressed air, which can be dealt with without any problem. Therefore, the state in which the moving block 20 is kept at a low temperature can be maintained, and the positional accuracy of the pressing surface 25a can be kept high.

The reason why the heat insulating material 28 is interposed between the porous material 29 and the heating tool 25 has the following meaning. As described above, there is a considerable temperature difference between the moving block 20 and the heating tool 25 due to the flow of the compressed air. For this reason, the heat insulating material 28 is disposed as described above, and the heat insulating material 28 has a temperature gradient due to the temperature difference. As a result, thermal deformation of the heating tool 25 is suppressed as much as possible.
In addition, when the compressed air is circulated, normal noise is generated. However, in the present embodiment, the compressed air is discharged through the porous material 29, so that the porous material 29 plays a role as a kind of silencer. In addition, the working environment can be prevented from deteriorating.

In FIG. 2, reference numeral 34 denotes a pressure sensor for measuring a pressure acting on the moving block 20 from the rod 15a. As described above, since the moving block 20 is kept at a low temperature, the reliability of the measurement value of the pressure sensor 34 is also improved.

Next, referring to FIG.
Porous material 29, heat insulating material 28 and heating tool 2
The support mechanism 5 will be described. As shown in FIG. 3, concave portions 20a and 20b are formed on the side of the moving block 20.

The recesses 35 and 36 are recessed portions 20a and 20b.
Is a collar that penetrates through the porous material 29 and the heat insulating material 28. Bolts 37, 38 are slidably inserted through the collars 35, 36, and the lower portions of the bolts 37, 38 are screwed to the upper portion of the heating tool 25. Also, bolt 3
The washer 4 is sandwiched between the disc springs 39 and 40 at the top of
At the top of the washers 41 and 42, nuts 43 and 44 are screwed to the tops of the bolts 37 and 38, respectively.

Thus, the heating tool 25 is supported below the moving block 20 with the porous material 29 and the heat insulating material 28 interposed therebetween.

[0023]

According to the thermocompression bonding apparatus of the present invention, a moving block which moves forward and backward toward each work, a heating tool supported at a lower portion of the moving block and provided with a heat source, and an interposition between the moving block and the heating tool. Since it is equipped with a porous material to be mounted and a gas supply unit that supplies gas to the porous material and circulates gas from the porous material to the outside, the moving block is discharged by the gas discharged from the porous material to the outside. Thermal isolation from hot heating tools can be achieved, resulting in reduced thermal distortion and high positioning accuracy of the heating tools.

[Brief description of the drawings]

FIG. 1 is a perspective view of a thermocompression bonding apparatus according to an embodiment of the present invention.

FIG. 2 is a sectional view of a thermocompression bonding apparatus according to an embodiment of the present invention.

FIG. 3 is a sectional view of a thermocompression bonding apparatus according to an embodiment of the present invention.

FIG. 4 is a partial cross-sectional view of a conventional thermocompression bonding apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Substrate 11 Electronic component 20 Moving block 25 Heating tool 29 Porous material 31 Air supply source

Claims (3)

[Claims] 1. A thermocompression bonding apparatus for thermocompression-bonding a first work and a second work, comprising: a moving block that moves toward and away from each of the works; and a heat source that is supported by one end of the moving block and has a heat source. A heating tool provided, a porous material interposed between the moving block and the heating tool, and a gas supply unit for supplying gas to the porous material and flowing gas from the porous material to the outside. A thermocompression bonding device comprising: 2. A thermocompression bonding apparatus according to claim 1, wherein a heat insulating material is interposed between said porous material and said heating tool. 3. A flow path for sending a gas supplied from the gas supply unit to the porous material is opened at a boundary between the porous material and the moving block. Thermocompression bonding equipment.