JP3246340B2 - Thermocompression bonding equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermocompression bonding apparatus for thermocompression bonding a plurality of works.

[0002]

2. Description of the Related Art In a circuit module manufacturing process, an ACF (anisotropic conductor) or TCP
A thermocompression bonding apparatus is used to thermocompression-bond other workpieces such as (Tape Carrier Package).

[0003] In a conventional thermocompression bonding apparatus,
The heating tool was supported in the following manner. FIG.
FIG. 4 is a cross-sectional view illustrating a support structure of a heating tool in a conventional thermocompression bonding apparatus.

In FIG. 4, reference numeral 1 denotes a moving block which moves up and down in the vertical direction N1. Reference numeral 2 denotes a heating tool which is supported below the moving block 1 and has a built-in heater 3 as a heat source. Is a pressing surface 2a for thermocompression bonding.

[0005] A pressing force is applied to the heating tool 2 from the moving block 1 side by a reciprocating means such as a cylinder.
This acts on the work from the pressing surface 2a, and the heating tool 2 must be always in close contact with the moving block 1 and lifted to the moving block 1 side with a considerable holding force. Therefore, in the conventional thermocompression bonding apparatus, the head of the bolt 4 is tightened with a strong torque, and the screw portion 4b at the lower portion of the bolt 4 is securely screwed into the heating tool 2 with a strong tightening force.

[0006]

However, FIG.
As shown in FIG. 4A, even if the bolt 4 is tightened at room temperature, the heating tool 2 becomes high temperature (several hundred degrees Celsius) as shown in FIG.
Is reduced in the moving block 1, causing looseness. This is because the temperature of the heating tool 2 becomes high, and the bolt 4 extends from the original length L by the deformation amount α. As described above, the conventional thermocompression bonding apparatus has a problem that the holding power of the heating tool is insufficient.

Accordingly, an object of the present invention is to provide a thermocompression bonding apparatus capable of holding a heating tool on a moving block with a sufficient holding force even when the temperature of the heating tool becomes high.

[0008]

The thermocompression bonding apparatus according to the present invention comprises:
A moving block that advances and retreats toward the workpiece, a heating tool provided at an end of the moving block and provided with a heat source, connecting means for connecting the heating tool and the moving block provided with a screw portion, and heating via the connecting means; Elastic means for generating a holding force in the direction of urging the block to the moving block,
The amount of deformation of the elastic means is set such that a holding force equal to or greater than the minimum holding force acts on the heating tool even when the connecting means is extended by the heat generated by the heating tool.

[0009]

According to a first aspect of the present invention, there is provided a thermocompression bonding apparatus comprising: a moving block which moves toward and away from a workpiece; a heating tool provided at an end of the moving block and provided with a heat source; And a connecting means for connecting the moving block and the moving block, and an elastic means for generating a holding force in a direction for urging the heating block to the moving block via the connecting means, and when the connecting means is extended by heat generated by the heating tool. Also, the amount of deformation of the elastic means is set so that a holding force equal to or greater than the minimum holding force acts on the heating tool. That is, since the amount of deformation is set to be sufficiently larger than the amount of thermal expansion of the connecting means, the heating tool can be sufficiently held by the spring force of the elastic means.

Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a thermocompression bonding apparatus according to an embodiment of the present invention. In FIG. 1, reference numeral 5 denotes a base, and an X table 6, a Y table 7, and a θ table 8 provided on the base 5 allow the holding unit 9 to move in the XYθ directions. The holding section 9 sucks a central portion of a lower surface of a substrate (liquid crystal panel) 10 as a first work. Therefore, X table 6, Y table 7, θ
By driving the table 8, the substrate 10 can be positioned freely. An electronic component 11 as a second work is mounted on the edge of the substrate 10, and this thermocompression bonding apparatus is for thermocompression bonding the electronic component 11 to the substrate 10.

At the rear of the base 5, a pair of upper and lower pedestals 12 parallel to the X direction is provided.
A lower support 13 that supports the lower surface of the edge of the substrate 10 is provided upright. In addition, a cylinder 15 as an advancing / retracting mechanism for raising and lowering the pressure bonding head 14 is disposed above the upper base 12. When the cylinder 15 is driven, the pressure bonding head 14 is lowered toward the electronic component 11, and the electronic component 11 can be thermocompression bonded to the substrate 10.

Next, the detailed structure of the pressure bonding head 14 will be described with reference to FIGS. In FIG.
Is a support plate vertically provided on the upper base 12 (see also FIG. 1), and a vertical guide rail 17 is fixed to the front surface of the support plate 16. Then, the slider 1 provided on the back surface of the frame 19 that holds the entire crimping head 14
8 is slidably engaged with the guide rail 17. Further, a rod 15 a of the cylinder 15 is connected to the top of the frame 19.

Therefore, when the cylinder 15 is driven,
The entire crimping head 14 together with the frame 19 can be raised and lowered.

Reference numeral 20 denotes a moving block provided inside the frame 19 with the intermediate plate 21 interposed therebetween. Reference numeral 22 denotes a hollow bolt for fixing the upper part of the moving block 20 to the frame 19 via the intermediate plate 21, and reference numeral 23 denotes a fixing bolt for fixing the lower part of the moving block 20 to the lower part of the intermediate plate 21. A spherical bearing 24 is mounted between the fixing bolt 23 and the intermediate plate 21. By adjusting the intermediate plate 21, the hollow bolt 22, the fixing bolt 23, and the spherical bearing 24, the vertical position of the moving block 20 with respect to the frame 19 and the inclination in the horizontal and vertical directions can be finely adjusted. ing.

A heating tool 25 is supported below the moving block 20 in a state where the heating tool 25 is positioned by a positioning pin 26. 25a is a pressing surface of the heating tool 25, and 27 is a heater as a heat source. Also, between the lower surface of the moving block 20 and the upper surface of the heating tool 25,
A member for shutting off heat is provided in the order of the porous material 29 and the heat insulating material 28 from above. As the porous material 29,
Those made of stainless steel, ceramics and the like are preferred.

Reference numeral 30 denotes a joint which penetrates the intermediate plate 21 and is mounted in the middle of the front surface of the moving block 20. The joint 30 has an air supply source 31 as a gas supply unit.
Compressed air is supplied through a pipe 32. And
Inside the moving block 20, a flow path 33 is formed from the tip of the joint 30 to the boundary between the lower surface of the moving block 20 and the upper surface of the porous material 29. The lower end of the flow channel 33 is an enlarged diameter portion 33 a, so that compressed air is evenly supplied into the porous material 29.

When the thermocompression bonding is performed, the heat generated by the heater 27 causes the heating tool 25 to reach a high temperature of several hundred degrees centigrade. At this time, when compressed air is supplied from the air supply source 31, the compressed air passes through the porous material 29 via the pipe 32, the joint 30, and the flow path 33, and is discharged to the outside.

Therefore, even if the heat which is going to be transmitted from the heating tool 25 side to the moving block 20 side passes through the heat insulating material 28, it is taken away by the compressed air which flows out one after another from the porous material 29 and is discharged to the outside. Therefore, it is hardly transmitted to the moving block 20. At this time, even if the heat insulating material 28 is thermally saturated, the heat is still shut off by the compressed air, which can be dealt with without any problem. Therefore, the state in which the moving block 20 is kept at a low temperature can be maintained, and the positional accuracy of the pressing surface 25a can be kept high.

The reason why the heat insulating material 28 is interposed between the porous material 29 and the heating tool 25 has the following meaning. As described above, there is a considerable temperature difference between the moving block 20 and the heating tool 25 due to the flow of the compressed air. For this reason, the heat insulating material 28 is disposed as described above, and the heat insulating material 28 has a temperature gradient due to the temperature difference. As a result, thermal deformation of the heating tool 25 is suppressed as much as possible.
It should be noted that, when the compressed air is circulated, noise is usually generated. However, in the present embodiment, since the compressed air is discharged through the porous material 29, the porous material 29 plays a role as a kind of silencer. In addition, the working environment can be prevented from deteriorating.

In FIG. 2, reference numeral 34 denotes a pressure sensor for measuring the pressure acting on the moving block 20 from the rod 15a. As described above, since the moving block 20 is kept at a low temperature, the reliability of the measurement value of the pressure sensor 34 is also improved.

Next, referring to FIG.
Porous material 29, heat insulating material 28 and heating tool 2
The support mechanism 5 will be described. As shown in FIG. 3, concave portions 20a and 20b are formed on the side of the moving block 20.

And 35, 36 are recesses 20a, 20b.
Is a collar that penetrates through the porous material 29 and the heat insulating material 28. Bolts 37, 38 are slidably inserted through the collars 35, 36, and the lower portions of the bolts 37, 38 are screwed to the upper portion of the heating tool 25. Also, bolt 3
Disc springs 39, 4 as elastic means are provided on the upper portions of 7, 38.
And the washers 41 and 42 are attached with the washers 41 and 42 therebetween.
At the top of the nuts, nuts 43, 4 are attached to the tops of bolts 37, 38.
4 is screwed. Collars 35, 36 are nuts 43,
44, the amount of screwing is limited.
When the screw 44 is screwed to a position where screwing is restricted by the collars 35 and 36, the disc springs 39 and 40 are compressed and deformed to an initial set deformation amount δ described later. The elastic force of the deformed disc springs 39 and 40 is
It becomes a holding force for urging the heating tool 25 toward the moving block 20 via 38.

As a result, the heating tool 25 is held at the lower part of the moving block 20 with a minimum holding force or more with the porous material 29 and the heat insulating material 28 interposed therebetween. In this embodiment, the bolts 37 and 38 correspond to the connecting member, and the nuts 43 and 44 correspond to the deformation amount setting means.
The two members 4 correspond to the connecting means. The connecting means may be a bolt having a head as shown in FIG.

Next, a description will be given of the initial deformation δ set in the disc springs 39 and 40 at room temperature. Here, the combined spring constant of the disc springs 39 and 40 is K, and the heating tool 2
The minimum holding force of No. 5 is Fmin. Then, assuming that the set temperature of the heating tool 25 is T, the amount of deformation α from the room temperature at the set temperature T of the bolts 37, 38 is determined by the bolts 37, 38.
Is determined with reference to the expansion coefficient (known).

From the above values, the initially set deformation amount δ is determined so as to satisfy the following equation.

[0026]

(Equation 1)

Then, at room temperature, the nuts 43, 44 may be tightened and the washers 41, 42 may be lowered so that the disc springs 39, 40 contract by the initially set deformation amount δ. In the present embodiment, by screwing the nuts 43 and 44 to the positions where the screwing is prevented by the collars 35 and 36, the operator can confirm that the disc springs 39 and 40 have been contracted by the initial set amount δ. As a result, the workability of the assembly adjustment is improved.

[0028]

According to the thermocompression bonding apparatus of the present invention, there is provided a moving block which advances and retreats toward a work, a heating tool provided at an end of the moving block and provided with a heat source, a heating tool provided with a screw portion and a heating tool and a moving block. And a resilient means for generating a holding force in a direction for urging the heating block to the moving block via the connecting means. Since the amount of deformation of the elastic means is set so that a holding force equal to or more than the minimum holding force acts, a sufficient holding force can be obtained by the spring force of the elastic means even if the connecting means expands during heating.

[Brief description of the drawings]

FIG. 1 is a perspective view of a thermocompression bonding apparatus according to an embodiment of the present invention.

FIG. 2 is a sectional view of a thermocompression bonding apparatus according to an embodiment of the present invention.

FIG. 3 is a sectional view of a thermocompression bonding apparatus according to an embodiment of the present invention.

FIG. 4 is a sectional view showing a supporting structure of a heating tool in a conventional thermocompression bonding apparatus.

[Explanation of symbols]

 Reference Signs List 20 moving block 25 heating tool 37, 38 bolt 39, 40 disc spring 43, 44 nut

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-63-169731 (JP, A) JP-A-3-136343 (JP, A) JP-A-4-324950 (JP, A) JP-A-10-108 29059 (JP, A) Japanese Utility Model Hei 6-82878 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01L 21/60 H01L 21/52 H05K 3/34 H05K 13/04 B23P 19/00 B23P 21/00 B25J 15/00

Claims (3)

(57) [Claims] 1. A moving block which advances and retreats toward a workpiece, a heating tool provided at an end of the moving block and provided with a heat source, and a connecting means provided with a screw portion and connecting the heating tool and the moving block. And an elastic means for generating a holding force in a direction for urging the heating block to the moving block via the connecting means, and the heating tool is also provided when the connecting means is extended by the heat generated by the heating tool. The amount of deformation of the elastic means is set such that the holding force equal to or more than the minimum holding force acts on the thermocompression bonding device. 2. A moving block which advances and retreats toward a work, a heating tool provided at an end of the moving block and provided with a heat source, and a connecting member having one end integrally connected to the heating tool; An elastic means for generating a holding force in a direction for urging the heating block to the moving block via the connecting member, and provided at the other end of the connecting member;
Deformation amount setting means for setting an amount of deformation of the elastic means so that the holding force equal to or more than the minimum holding force acts on the heating tool even when the connecting member is extended by the heat generated by the heating tool. A thermocompression bonding device. 3. The thermocompression bonding apparatus according to claim 2, wherein the deformation amount setting means is a nut screwed into a thread formed at the other end of the connecting member.