JPH10289862A - Carrying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To execute independently a readout of information from an original sheet and the like by a control of a second control unit even in such a case that other controls can not be executed by a first control unit by a method wherein the second control unit controls an original sheet housing unit when the first control unit is at least executing a control of a processing unit. SOLUTION: If a first control unit is performing a prescribed processing, reticels R in housing containers 30 and 45 can not be made also the movement to housing and separating units 11 by a vertically moving mechanism 12 during the processing and a readout of the bar codes of another reticles R and the like also can not be executed. Therefore, a second control unit is used so that the reticles R in the containers 30 and 35 are moved to the units 11 by the mechanism 12 on the basis of the instruction of an operator and the readout of the bar codes of the reticles R can be executed. That is, the second control unit carries the reticles R to reticle position correction units 53 by a reticle carrying system 50 and readouts the bar codes of the reticles R carried by first bar code readers 54.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer apparatus, and more particularly, to a transfer apparatus for transferring an original (exposure original) such as a reticle and a photomask in an exposure apparatus.

[0002]

2. Description of the Related Art In an exposure apparatus (stepper), a pattern formed on the surface of a reticle is exposed on a wafer coated with a photoresist to form a circuit pattern on the wafer. By the way, in such an exposure apparatus, a circuit pattern is often formed by exposing a plurality of layers on a wafer, and in such a case, a plurality of types of patterns are formed using a plurality of types of reticles. Therefore, the exposure is performed while sequentially changing a plurality of types of reticles.

[0003] In order to use a plurality of types of reticles while efficiently exchanging them as described above, conventionally, there have been proposed various transport apparatuses for efficiently transporting original plates (reticles and the like). As an example, there is a transfer device disclosed in Japanese Patent Application Laid-Open No. Hei 7-32179. The transfer device is configured to carry in and out an original sheet from a storage container provided in an exposure apparatus and containing one or more original sheets. And transports the original carried in and out to and from the exposure processing stage.

In order to perform error-free exposure in such a transport apparatus, it is necessary to check in advance what kind of original plate is stored and where. On the other hand, a bar code including information for identification is usually formed on the original plate. Therefore, a reading device is provided to read the barcode of the stored original plate so that the control device can recognize in advance what type of original plate is stored in which storage place, thereby automatically controlling the transport. Is to be done.

[0005]

By the way, in the prior art, a plurality of storages for originals are provided for convenience of operation, and an original storage container capable of storing a plurality of originals can be set for each storage. It has become. When an operator designates a necessary storage location by using an operation panel for controlling a series of operations of the exposure apparatus, the original sheet is moved from the set original sheet storage container to the storage place, and a bar of the original sheet is read by the reading device. The code is read, and the type and storage position are confirmed by the operator.

Further, when the operator decides which of the confirmed originals is to be used for the exposure processing and designates the required original using the operation panel, the specified original is transported to the exposure position, and the exposure operation is performed. Is performed. When the exposure operation is completed, the unnecessary original plate is transported to the original container via the original storage.

Here, during the exposure operation, the operation panel cannot be used for any purpose other than the exposure operation. Therefore, while the original is being conveyed from one of the plurality of storages and the exposure operation is being performed, even if the original storage is set in another storage, the bar code of the original in the original storage is stored. Could not be commanded to be read.

Therefore, conventionally, when an exposure operation is completed, another storage is designated using the operation panel, and a new original is transferred from the original storage container set in the storage to the storage. Then, it was necessary to read the barcode of the original plate by a reading device. However, in such a procedure, it is necessary to wait at least for a time to read a barcode of a new original plate before performing the next exposure operation, thereby reducing the work efficiency of the exposure operation.

The present invention has been made in view of the above problems, and provides a transport apparatus capable of preparing for the next exposure operation in advance even during the exposure operation, thereby improving the work efficiency of the exposure operation. With the goal.

[0010]

In order to achieve the above object, a transport device according to the present invention comprises a first storage section (30, 3).
5) an original plate storage device (30, 35, 11, 12) having an original plate (R) having a second storage portion (11) provided below the first storage portion (30, 35); A processing device (90) for performing a predetermined process using the original plate (R), a first control device (100) for controlling the original plate storage devices (30, 35, 11, 12) and the processing device (90); A transport device (50) for transporting an original plate (R) between an original plate storage device (30, 35, 11, 12) and a processing device (90), wherein at least the first control device (100) is provided. Processing equipment (9
0), the original sheet storage device (3)
0, 35, 11 and 12).
1) is provided.

According to the transfer device of the present invention, the second control device (101) controls the original plate storage device (30) when at least the first control device (100) controls the processing device (90). , 35, 11, and 12), the first control device (100) executes the control of the processing device (90).
The original storage device (30, 3) is operated by the second control device (101).
5, 11, 12) are controlled, whereby, for example, reading of information from the original plate (R) can be performed independently.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a front view of a chamber of an exposure apparatus using the transport device according to the present embodiment. In FIG. 1, an exposure apparatus main body, which will be described later, is built in a chamber 200. At the front of the chamber 200, three doors 201, 202, and 203, which are usually formed of an acrylic plate, are arranged. An operator of the exposure apparatus can replace a reticle as an original plate by opening each door.

The main operation panel 204 is located adjacent to the main body of the exposure apparatus.
Is arranged. When the operator inputs predetermined data from the main operation panel 204, the operation of the exposure apparatus is controlled. On the front of the chamber 200,
A sub operation panel 204a is provided, and reading of a reticle described later can be performed using the sub operation panel 204a.

FIG. 2 is a view showing the internal structure of an exposure apparatus main body provided with a transfer apparatus according to the present invention. The entire apparatus configuration shown here is a chamber 200 (FIG. 1) in which a clean atmosphere is maintained. ). In this figure, directions indicated by arrows X, Y, and Z are X direction, respectively.
The description will be made as the Y direction and the Z direction.

In this exposure apparatus, basically, a reticle storage system 10, a reticle transport system 50, and an exposure system 90 installed on a base 1 are installed on an anti-vibration table (not shown). It is composed.

The first controller 100 (FIG. 3) controls the entire exposure apparatus, and particularly controls the exposure system 90, the reticle transport system 50, and the reticle storage system 10. Further, the reticle storage system 10 supplies the outputs of the below-described vertical movement mechanism 12, the reticle storage determination sensor 15, and the container size detection sensors 17a and 17b to the first control device 100.

Returning to FIG. 2, the reticle storage system 10 includes three storage separation units 11 (from the front side in the drawing) arranged side by side on the base 1 at predetermined intervals in the X direction. I,
II and III), and storage containers 30 and 35 detachably mounted on the unit 11, respectively. Note that the storage separation unit 11 (I) on the foremost side in the figure is disposed on a foreign substance inspection device 40 that detects a foreign substance on the reticle R. Storage separation unit 1
1 functions as a reticle temporary storage.

SMIF (Standard Mecha)
The storage containers 30 and 35 of the first type include a single reticle R made of a transparent glass plate having a predetermined pattern formed on the surface thereof. In the example, 6
Two types of storage containers, a storage container 30 that can store one reticle R and a storage container 35 that can store one reticle R, are used. The storage containers 30 and 35 store the reticle R as it is without interposing a case (so-called reticle case) for sealing the reticle R one by one. In addition, any of the storage containers 30 and 35 can be detachably attached to all the storage separation units 11.

The storage container 30 has a bottom plate and six-stage holding shelves provided on the bottom plate, and the reticle R can be inserted and held in each shelf. On the other hand, the storage container 35 has the same configuration as the storage container 30, but a single-stage shelf is provided on the holding shelf of this container, and only one reticle R can be held. Therefore, the overall height of the storage container 35 is
Lower than 0. In this example, only one and six storage containers are used. However, a container that stores another number of reticles may be used. Are different.

The storage separation unit 11, which is a SMIF type reticle storage generally known as an indexer (registered trademark), constitutes a second storage portion, and receives and holds storage containers 30, 35 on its upper surface. An attachment portion is provided, and the attachment portion is provided with an opening for receiving the bottom plates and holding shelves of the storage containers 30 and 35 therein.
The mounting portion has a mechanism for releasing the lock between the cover and the bottom plate in the storage container mounted here. Further, in each storage separation unit 11, a vertical movement mechanism 12 is provided.
(Only one is shown). The vertical movement mechanism 12 supports the bottom plate unlocked with the storage container and the holding shelf thereon, and moves the storage plate into the storage separation unit 11 (downward). Movement). The configuration and operation of the vertical movement mechanism 12 are described in, for example, Japanese Patent Application No. 8-3.
No. 11518. The storage containers 30 and 35, the storage separation unit 11, and the vertical movement mechanism 12 constitute an original plate storage device.

The front side of the storage separation unit 11 is open, and as shown in FIG.
5 are provided. The reticle storage determination sensor 15 includes an irradiation system for irradiating the detection light and a light receiving system for detecting the reflected light, and irradiates the detection light from the irradiation system to the object and reflects the reflected light reflected from the object. Light is received by the light receiving system. The first control device 100 detects the presence or absence of an object based on the presence or absence of a signal from the light receiving system.

The reticle R, for example, has a thickness of about 3 mm for a 5-inch size, and about 6 mm for a 6-inch size. For this reason, using the thickness of the end surface of the reticle, the irradiation system irradiates the end surface of the reticle R with light in an oblique direction, and the light receiving system receives light reflected from the end surface of the reticle R.

The reticle storage discrimination sensor 15 is disposed at a position facing the holding shelf moved into the unit 11 by the vertical movement mechanism 12, and as described above, the reticle R received and held by the holding shelf. The front end face is irradiated with detection light to detect whether the reticle R is received on the holding shelf.

The reticle R is a transparent member made of a quartz glass plate or the like, and transmits light. Therefore, it is difficult to detect the presence or absence of the reticle with a light transmission type sensor. Here, a light reflection type sensor is used. Thus, the presence or absence of the reflected light from the reticle end surface can be detected, so that the presence or absence of the transparent reticle R can be reliably detected. The reticle storage sensor 1
Reference numeral 5 denotes a reticle storage sensor 15 which is disposed in the middle of the movement path of the holding shelf and when the holding shelf is completely moved down by the up-down moving mechanism 12 (at the position shown in FIG. 2). Is located above the holding shelf, and the front side of the holding shelf is completely open.

The first control device 100 of the exposure apparatus stores a reticle R in any of the holding shelves 33 based on a signal relating to the vertical position from the vertical moving mechanism 12 and an output signal from the reticle storage determining sensor 15. It is possible to determine which shelf is empty.

Although one reticle storage sensor 15 is provided for each of the storage containers 30 and 35, a plurality of reticle storage sensors 1 are provided along the vertical (vertical) direction.
5 may be provided. In this case, the first control device 100
Can determine which shelf of the holding shelf contains the reticle R and which shelf is empty only by the outputs of the plurality of reticle storage determination sensors 15. Further, the reticle storage determination sensor 15 may be of a movable type, and the reticle storage determination sensor 15 may be retracted out of the way when the reticle transport arm 52 enters the holding shelf 33.

A container size detecting sensor comprising a light emitting device 17a and a light receiving device 17b is mounted on the upper surface side of the storage separation unit 11. This container size detection sensor is a light transmission sensor that irradiates detection light from the light emitter 17a to the light receiver 17b and detects the presence or absence of light reception by the light receiver 17b, and is attached so as to sandwich the attachment portion. Further, this container size detection sensor has such a height that the optical path 18 from the light emitter 17a to the light receiver 17b is blocked when the storage container 30 is attached, but the optical path 18 is not blocked even when the storage container 35 is attached. It is located at the location. For this reason, when the light from the light emitting device 17a cannot be received by the light receiving device 17b, the first control device 100 attaches the storage container 30 to the light emitting device 1b.
When the light from 7a can be received, it can be determined that the storage container 35 is attached.

In this embodiment, since only the storage containers 30 and 35 are used, only one set of container size detection sensors is provided. However, when there are many types of storage containers, a plurality of storage containers corresponding to the height of each container are provided. A set of sensors is used. Note that an optical sensor having a continuous width in the height direction may be used. Further, a light reflection type sensor may be used instead of the above light transmission type sensor.

The reticle transport system 50 includes a first transport system 51 having a reticle transport arm 52, a second transport system 55 having a reticle transport unit 56, and a third transport system having a load arm 61 and an unload arm 62. And a transport system 60.

The first transport system 51 is provided with each storage / separation unit 1
The reticle transport arm 52 and the arm 52 are moved in the Y direction (front and rear) as shown by an arrow A, and are moved in the Z direction (up and down) as shown by an arrow B. ) Is provided. A reticle position correction unit 53 and a first barcode reader 54 as an original plate identification device that reads a barcode provided on the reticle R are provided in the middle of such a movement path.

The second transfer system 55 moves the reticle transfer unit 56 in the upper part of the chamber as indicated by arrow C in FIG.
It has a second moving mechanism for moving in the direction (left-right direction). The reticle transport unit 56 has a vacuum suction mechanism, and can hold the reticle R by suction using the vacuum suction mechanism.

The third transfer system 60 moves the load arm 61 and the unload arm 62, which are positioned so as to overlap one another, independently in the Z direction as indicated by an arrow D, and moves the Y and Y arms as indicated by an arrow E. And a third moving mechanism for moving in the Z direction as shown by arrow F. A second barcode reader 65 for reading the barcode of the reticle R conveyed along this path is provided in the movement path indicated by the arrow E.

The exposure system 90 includes an illumination system (not shown), a reticle stage 91 on which a reticle R is mounted, a projection lens system 92, and a wafer stage on which a wafer W is mounted. Here, the reticle R positioned and mounted on the reticle stage 91 is irradiated with light from the illumination system, and the pattern of the reticle R is reduced via the projection lens system 92 and irradiates a predetermined position on the wafer W. The operation of the exposure system 90 is not directly connected to the present invention, so that
Detailed description is omitted.

FIG. 3 is a block diagram showing a schematic configuration of the present embodiment. The first control device (CPU) 100 operated by the main operation panel 204 (FIG. 1) is the first control device (CPU) shown in FIG.
The bar code reader 54, the reticle transport system 50, the vertical movement mechanism 12, and all the mechanisms of the exposure apparatus (not shown) are controlled. On the other hand, the second control device 101 controls the first barcode reader 54, the reticle transport system 50, and the vertical movement mechanism 12 independently of the first control device 100.

FIG. 4 is a view showing a sub-operation panel 204a for operating the second control device 101.
4a is each storage separation unit 11 (I, II, III)
, A LOAD switch and an UNLOAD switch are provided (I, II, III), respectively. Note that L
The OAD switch requests the second control device 101 to drive the vertical movement mechanism 12 to lower the reticle R when the switch is turned on. On the contrary, the UNLOAD switch raises the reticle R when the switch is turned on. It is something that demands. Both switches are of a type having both a switch and a lamp.

The operation of the exposure apparatus having the above configuration based on the control of the first controller 100 will be described below. First, a worker mounts the storage containers 30 and 35 in a state where a predetermined reticle R is stored in the holding shelf and the bottom plate and the cover are locked, and is mounted on the mounting portion of the storage separation unit 11. In addition,
At this time, it is desirable to provide a sensor, a switch, and the like for detecting that the storage separation unit 11 is mounted, and to detect whether or not the storage container is mounted. Up to this point, the work performed by the worker in the chamber 200 has been completed.
Then, the doors 201 to 203 of FIG. 00 are closed to be in a sealed state, and thereafter, the operator only issues a command from the main operation panel 204, and the first in the chamber 200 based on the command.
Automatic conveyance and exposure work by the control device 100 are performed.

When a command to start the work is issued from the main operation panel 204 by an operator's switch operation or the like, the first control device 100 is attached to each storage separation unit 11 by the container size detection sensors 17a and 17b. By detecting the size of the storage container, it is determined whether the storage container is the storage container 30 or the storage container 35.

Next, the operator designates the storage position of the storage container (shelf position of the holding shelf 33) and issues a command to transport the reticle R received there. In response to this, the first control device 100 releases the lock of the bottom plate in the designated storage container 30 or 35, supports the bottom plate and the holding shelf by the up-down moving mechanism 12, and lowers them, and moves them to the storage separation unit. Move into 11.

The first control device 100 includes a vertical movement mechanism 12
When the holding shelf is moved down, the reticle storage determination sensor 15 detects the presence or absence of the reticle R in the holding shelf. Further, the first control device 100 includes a vertical movement mechanism 12.
, The position of the holding shelf is detected, and it is determined which number of shelves is used and which of the holding shelves receives the reticle R. At this time, when the first control device 100 determines that there is no reticle R at the shelf position designated by the operator, it displays this on a monitor (not shown), stops the operation, and waits for an instruction from the operator.

When it is determined that reticle R is received at the shelf position designated by the operator, first control device 100 continues the transport operation. Vertical movement mechanism 12
When the bottom plate and holding shelf are completely moved down by
The front surface of the holding shelf is open and faces the first transport system 51. In this state, the reticle transport arm 52 is moved forward by the first moving mechanism, enters a designated shelf position in the holding shelf, and receives and holds the reticle R on the arm 52. Then, the arm 52 is moved backward while receiving and holding the reticle R, and is moved to above the reticle position correction unit 53.

At this time, the bar code of the reticle R is read by the first bar code reader 54, and the type of the reticle R to be conveyed is checked and registered. The reticle position correction unit 53 includes a reticle transfer arm 5.
2 is a device that corrects the holding position of the reticle R held by the reticle 2, where the alignment of the holding position of the reticle R with respect to the arm 52 (pre-alignment) is performed.

After the pre-alignment of the holding position, the arm 52 is moved upward in the direction of arrow B while holding the reticle R to approach the reticle transfer unit 56 constituting the second transfer system 55, and the reticle R is transferred. Delivered to the unit 56. The reticle transport unit 56 has a vacuum suction mechanism, and the reticle R transferred from the reticle transport arm 52 to the reticle transport unit 56.
Is held by the reticle transport unit 56 by the vacuum suction mechanism.

The second transfer system 55 moves the reticle transfer unit 56 in the X direction (left and right direction) as shown by the arrow C in the upper portion of the chamber 200, and moves to a predetermined intermediate position. Then, up to the position vertically opposed to the reticle transport unit 56 located at the predetermined intermediate position as described above,
The load arm 61 and the unload arm 62 of the third transfer system 60 are moved.

Next, the load arm 61 thus moved to the vertically opposed position is moved up by the third moving mechanism, approaches the reticle transport unit 56, and receives the reticle R. The unit 56 is provided with a mechanism for pre-aligning the mounting position of the reticle R while the reticle R is mounted on the load arm 61. Here, the pre-alignment is also performed.

After the reticle R is received on the load arm 61 in this manner, the load arm 61
The reticle R is sequentially moved in the directions of E and F,
The reticle stage 91 is placed on the reticle stage 91. At this time, the barcode of the reticle R is read by the second barcode reader 65, and collation as to whether the correct reticle R is being conveyed is performed. Note that, as described above, the unit 5
Since the pre-alignment of the reticle is performed by the reticle 6, the bar code of the reticle R can be passed through a position readable by the second bar code reader 65 without displacement, and accurate reading is possible.

After the reticle R is mounted on the reticle stage 91, the load arm 61 retreats. Thereafter, after the reticle R is accurately aligned on the reticle stage 91, exposure light is applied to the reticle R from an illumination system (not shown), and this light is applied to the wafer W via the projection lens system 92, and The R pattern is reduced and exposed at a predetermined position on the wafer W.

When the exposure is completed, reticle stage 91
The reticle R placed on the reticle stage 91 is transferred to the unload arm 62, and follows the movement path reverse to the movement of the load arm 61, so that the reticle transport unit 56 And then transferred from the reticle transport unit 56 to the reticle transport arm 52.

Here, the operator designates a predetermined shelf position of the holding shelf of the storage container as a return destination of the reticle R, and accordingly, the reticle transport arm 52 transports the reticle R to the designated position and returns it. . At this time, even if the operator erroneously designates the shelf position where another board is already contained as the return destination, the reticle R is received at the designated return destination by the reticle storage determination sensor 15 as described above. Is displayed on the monitor (not shown) indicating that it cannot be returned to the return destination, and waits for a correction instruction for the return destination. This eliminates the risk of colliding the reticles and damaging the expensive reticle when trying to store another reticle on the shelf where the reticle has already been received.

Since a plurality of storage containers and a plurality of first transfer systems 51 are provided, a plurality of reticles (original plates) required for manufacturing a semiconductor (such as an IC) are set in an exposure apparatus in advance. Since it is possible to replace the storage container during the manufacturing process, the work load on the operator can be reduced, and the automation of the manufacturing process can be further promoted.

Further, since the foreign matter inspection device 40 is provided below the storage separation unit 11 on the left side as viewed from the operator,
By inspecting foreign matter (dust) attached to the reticle surface before transporting the reticle R to the reticle stage 91,
Productivity can be improved. The reticle R taken out of the storage / separation unit 11 by the reticle transport arm 52 is held by the reticle transport arm 52 and transported into the foreign substance inspection device 40, where foreign substance inspection is performed. As described above, since the foreign substance inspection can be performed during the transfer of the reticle R by the first transfer system 51, the productivity is high. Note that the foreign substance inspection device 40 may be disposed below each of the storage separation units 11.

Next, an operation based on the control of the second control device 101 according to the present embodiment will be described. As described above, the first control device 100 drives the vertical movement mechanism 12 based on the operation of the main operation panel 204 to
Is lowered from the designated storage container 30 or 35 to the storage separation unit 11 together with the holding shelf, and then the reticle transport system 50 is driven to transport the specific reticle R to the reticle position correction unit 53, and the transport is performed. On the way,
The first barcode reader 54 is driven to read a barcode formed on the reticle R and store information (for example, the type of the reticle) contained therein. Thereafter, the reticle R is transported to a required place for a predetermined process such as exposure under the control of the first control device 100.

By the way, while the first control device 100 is performing a predetermined process, the reticle R in the storage containers 30 and 35 is moved by the vertical movement mechanism 12 to the storage separation unit 1 during the predetermined processing.
1 cannot be read, and the bar code of another reticle R cannot be read. Therefore, in the present embodiment, the reticle R in the storage containers 30 and 35 can be moved to the storage separation unit 11 by the vertical movement mechanism 12 and the barcode of the reticle R can be read by an operator's instruction. I have to.

More specifically, the operator places the storage container 30 or 35 in either storage separation unit 11 (I, I
I, III), the LOAD switch of the corresponding portion of the sub-control board 204a in FIG. That is, the lighting of the LOAD switch indicates that the reticle R in the storage container 30 or 35 can be lowered by the vertical movement mechanism 12. Therefore,
Even if the operator presses the LOAD switch that is off,
The second control device 101 does not drive the vertical movement mechanism 12.

Further, when the operator presses one of the lit LOAD switches (for example, III), the second control device 101 causes the vertical moving mechanism 12 to move the reticle from the specified storage container 30 or 35 to the reticle. R is lowered to the storage separation unit 11 (III), at which point the LOAD switch is turned off.

Further, the second controller 101 transports the reticle R to the reticle position correcting unit 53 by the reticle transport system 50, and reads the bar code of the reticle R transported by the first bar code reader 54. When the reticle R is transported from the storage separation unit 11,
The UNLOAD switch flashes to inform the operator that the reticle R is currently being processed and cannot be returned to the storage container. In this case, the worker ignores the blinking and UNL
Even when the OAD switch is pressed, the second control device 101 does not drive the vertical movement mechanism 12.

The information of the bar code read by the first bar code reader is stored in the second control device 101. The reticle R from which the barcode has been read is stored in the first controller 1
By the control of 00, a standby state is set until the exposure processing is performed. According to the present embodiment, the barcode cannot be read until after the normal exposure operation is completed. However, during the exposure processing of the preceding reticle, the barcode of another reticle is read and the next exposure processing is performed. Preparations can be made, thereby speeding up the exposure operation.

The reticle R that has been subjected to the exposure processing is again stored in the storage / separation unit 11 (II
Returned to I). At this point, the corresponding UNLOAD switch on the sub operation panel 204a changes from the blinking state to the continuous lighting state. The operator knows that the corresponding reticle R can be raised to the storage container at any time by turning on the UNLOAD switch. Therefore, when the operator presses the lit UNLOAD switch, the second control device 101 drives the vertical movement mechanism 12 to raise the corresponding reticle R to the storage container.

According to the above-described embodiment, the second
Although the control device 101 controls the barcode reading of the reticle R in accordance with the instruction of the operator, the control device 101 may control the foreign substance inspection of the reticle R. In this case, the second control device 101 controls the first barcode reader 54
Instead, the foreign matter inspection machine 40 is controlled.

Further, under the control of the first control device 100, the reticle R performs a collective processing operation from barcode reading to transport and exposure based on the input from the main operation panel 204. For the storage separation unit designated by 204, a LOAD switch,
It can be said that there is no need to provide an UNLOAD switch.
However, another embodiment in which the exposure process is started after reading the barcode of the reticle R in all the storage separation units designated by the operator is also possible. Therefore, in this embodiment, the LOAD switch, UNLOA
It is necessary to provide a D switch.

In this embodiment, the operator presses the lit LOAD switch to read and register all necessary bar codes of the reticle R, and then inputs a collective processing command for exposure processing from the main operation panel. Is enough. As in the previous embodiment, during the exposure process, the corresponding UNLOAD switch blinks, but when the reticle R for which the exposure process has been completed returns, the UNLOAD switch is continuously lit, so that the operator can be at any time. Reticle R
Can be returned to the storage container.

[0061]

As described above, according to the transfer device of the present invention, the second control device controls the original plate storage device when at least the first control device controls the processing device. Therefore, even when other control cannot be performed because the first control device controls the processing device,
The original storage device is controlled by the second control device, so that, for example, reading of information from the original can be performed independently.

[Brief description of the drawings]

FIG. 1 is a front view of a chamber of an exposure apparatus that uses a transport device according to the present embodiment.

FIG. 2 is a diagram showing an internal structure of an exposure apparatus (stepper) including a transport device according to the present embodiment.

FIG. 3 is a block diagram showing a schematic configuration of the present embodiment.

FIG. 4 is a diagram showing a sub operation panel 204a for operating the second control device 101.

[Explanation of symbols]

 Reference Signs List 10 reticle storage system 11 storage division unit 12 vertical movement mechanism 30, 35 storage container 50 reticle transport system 54 first barcode reader 100 first control device 101 Second control device 204 {main operation panel 204a} sub operation panel

──────────────────────────────────────────────────の Continued on front page (51) Int.Cl. ⁶ Identification code FI H01L 21/30 502J

Claims (3)

[Claims] 1. An original plate storage device having a first storage portion and a second storage portion provided below the first storage portion for storing an original plate, and a processing device for performing a predetermined process using the original plate. And a first control device for controlling the original plate storage device and the processing device, and a transport device for transporting the original plate between the original plate storage device and the processing device, wherein at least the first control device is A transport device, further comprising a second control device for controlling the original plate storage device when controlling the processing device. 2. The transfer device according to claim 1, wherein the second control device lowers the original plate into the second storage unit when the original plate is stored in the first storage unit, and 2. The transport device according to claim 1, wherein the original plate is lifted to the first storage portion when the original plate is stored in the storage portion. 3. The transfer device according to claim 1, further comprising an original plate identification device for identifying the original plate, wherein the second control device controls the original plate identification device to identify the original plate. Characteristic transport device.