JPH06171799A - Original plate transporting device - Google Patents

Abstract

PURPOSE:To reduce an opportunity of the adhesion of foreign materials due to the working quantity and labor of workers by preventing the breakage of an original plate and the operation stop of a body device. CONSTITUTION:An original plate transporting device which takes out an original plate 2 from an original print accommodating container 5 for accommodating the original plate 2 and transports the original plate 2 to an original print receiving/delivery position between the used body device is equipped with a means 4 for detecting the size and/or direction of the original plate 2 to be transported.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for transferring an original such as a photomask or reticle for manufacturing a semiconductor element, and more particularly to an original transferring apparatus suitable for being incorporated in an exposure apparatus, a cleaning apparatus or the like.

[0002]

2. Description of the Related Art In recent years, demands for miniaturization of products and high reliability have been remarkably increased in manufacturing semiconductor devices.
In particular, a reticle is used to manufacture a highly integrated device such as a VLSI. A circuit pattern is drawn on the reticle, and several circuit patterns are required to make one semiconductor element. Actually, a plurality of reticles are exchanged, and a circuit pattern is superposed on the wafer and exposed and printed.

In order to prevent foreign matter from adhering to the reticle due to the miniaturization of the semiconductor element, the reticle is taken out from the case (reticle cassette) for accommodating the reticle in the semiconductor exposure apparatus, and the operator or operator is required to reach the exposure position. Conventionally, various types of devices for automatically transporting have been proposed. As an apparatus for automatically changing the reticles one after another as described above, for example, there is JP-A-59-186320. In this known example, a means for accommodating a plurality of cases for accommodating a reticle having an opening and a state in which the opening is closed, and an arbitrary case out of the plurality of cases are separated from the case accommodating means. Means for pulling out, means for moving the pulled out cases in the stacking direction of the cases and stopping at a predetermined position, means for opening the opening of the stopped case, and means for opening the stopped case. And means for withdrawing the reticle through the open opening.

By the way, in recent years, IC diversification and memory I
As the capacity of C increases, the area of the reticle also increases. Currently, the size of commonly used reticles is
There are two types, 5 inches and 6 inches, and these two types of reticles are used in the same factory. Conventionally, in order to confirm the size of the reticle in the reticle cassette, the reticle cassette containing the reticle is transported to a clean room or the like where there is little foreign matter adhered, and the operator or operator confirms the size of the reticle and the reticle It is determined whether the main body apparatus such as a semiconductor exposure apparatus to which the above is supplied can be used or not. Further, with respect to a device that needs adjustment depending on the size of the reticle, an operator or a worker adjusts the main body device so that each reticle can be used.

[0005]

However, in the above-mentioned conventional example, since the reticle is transported to a clean room or the like in which foreign matter is not attached at the time of checking the size of the reticle, a lot of work and a lot of work are required to check the size of the reticle. In addition, the operator and the operator are checking the size of the reticle.Therefore, the reticle size does not match the main unit and the reticle due to reticle check failure or reticle check error. However, problems such as reticle damage and device operation stop occurred. In addition, there was a problem of foreign matter adhesion during the reticle checking operation.

Further, in the conventional reticle transporting apparatus, when the reticle is not stored in the reticle storage case in the prescribed state, for example, when it is stored in a state rotated by 90 degrees, the reticle is transported in an incorrect state. However, there was a defect that it was carried into the next process. Especially when this conventional reticle transport apparatus is incorporated in an exposure apparatus, as a result of the above defects,
There are problems that the reticle is damaged, the reticle cannot be positioned, and the operation of the exposure apparatus is stopped. Further, if the operator corrects the direction of the reticle in order to prevent such a problem, there is a problem that the correction causes an opportunity for foreign matter to adhere.

In view of the problems in the above-described conventional example, an object of the present invention is to provide an original transport device for transporting an original such as a reticle from an original container to an original delivery position such as an exposure position of a semiconductor exposure apparatus and a main unit. , Prevents damage to the original plate, positioning failure, and operation stop of the main unit due to the mismatch between the main unit and the original plate or the original plate being stored in an unspecified direction, and the work load of the operator and operator is reduced. And to reduce the chances of foreign matter adhering through human hands.

[0008]

In order to achieve the above object, according to the first aspect of the present invention, an original is taken out from an original container for accommodating the original, and the original is delivered to a main body apparatus using the original. In the original transport device for transporting to the position, an original dimension detecting means for detecting the size of the original to be transported is provided. As the original plate size detecting means, for example, an optical detecting means that optically detects the size of the original plate can be used.

In a preferred embodiment of this aspect, the original plate transport device is incorporated in a semiconductor exposure apparatus. That is, this semiconductor exposure apparatus includes a reticle cassette that stores a reticle in a substantially sealed state, a transport unit that takes out the reticle from the reticle cassette and transports it, and an optical detection unit that is arranged in the transport path and detects the size of the reticle. And a means for automatically adjusting the semiconductor exposure apparatus according to the size of the reticle on the basis of the output information of the detection means.

In this structure, the reticle taken out from the reticle cassette passes through the optical detection means during conveyance, and the size of the reticle is judged by the optical detection means. Then, the reticle size information output from the optical detection means is sent to the information processing means, and the information processing means determines the adjustment item and the adjustment information of the device depending on the size of the reticle.

By using this configuration, the size of the reticle can be automatically judged during the transportation of the reticle during the transportation of the reticle from the reticle cassette. In addition, the work can be omitted.In addition, since the size of the reticle is automatically determined, problems such as omission of the reticle, damage to the reticle due to reticle confirmation error, and device stoppage can be prevented. .

A second aspect of the present invention for achieving the above object.
In the aspect of, in the original plate transporting device for taking out the original plate from the original plate container for storing the original plate and carrying the original plate to the original plate delivery position with the main body device using the original plate, the presence or absence of a specific pattern of the original plate stored in the container is checked. It is characterized in that a means for determining the orientation of the original plate or whether the orientation is correct by optically detecting is provided. As the determining means, for example, a means for detecting the presence or absence of the specific pattern by using reflected light or transmitted light of laser light can be used.

In a preferred embodiment of this aspect, the original plate is re-stored in the correct orientation according to the determination result of the orientation determining means. According to this embodiment, specifically, the direction of the reticle stored in the reticle storage container is determined by providing a function of determining the presence or absence of a specific pattern on the reticle using reflection or transmission of laser light. However, a function of determining whether or not the orientation is correct is provided to eliminate the drawbacks of the conventional example. Further, by providing a reticle or cassette rotating mechanism and combining it with the reticle orientation discriminating function, the reticle can be carried into the next process at the correct angle.

[0014]

As described above, according to the first aspect of the present invention, when the original plate is conveyed, the dimension of the original plate is detected during the conveyance. Therefore, it is possible to determine whether the original plate and the main body device are matched or unmatched. Therefore, it is possible to prevent the original plate from being damaged and the operation of the device from being stopped. Further, it is not necessary for the operator or the worker to check the original plate, the work amount of the operator or the worker can be reduced, and the confirmation work by man can be eliminated, and the adhesion of foreign matter at that time can be prevented.

Further, according to the second aspect of the present invention, since the orientation of the original stored in the original storage container is discriminated, the original is prevented from being supplied to the main body device in the wrong orientation. It is possible to prevent the original plate from being damaged or the operation of the device from being stopped. In addition, since it is not necessary for the worker or the like to correct the orientation of the original plate, the work amount of the worker or the like can be reduced, and since the manual correction work is eliminated, it is possible to prevent foreign substances from adhering by the manual work.

[0016]

Embodiment 1 An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view showing the structure of a reticle transport device portion of a semiconductor exposure apparatus according to an embodiment of the present invention. The semiconductor manufacturing apparatus shown in FIG. 1 includes a storage shelf (library) 8 for storing a plurality of reticle cassettes (reticle storage cases) 5 for storing reticles in a substantially sealed state, and a reticle cassette 5 selected on the storage rack 8 for feeding a hand. The elevator unit 6 is moved up and down to a transfer position with the vehicle 1.

The cassette opening / closing portion 9 is a cassette door 5a of the reticle cassette 5 on a position where the cassette hand is delivered to and from the sending hand 1.
Open and close.

The feeding hand 1 can be moved up and down, rotated and horizontally by the drive unit 3. The end face of the reticle 2 is fixed and the reticle 2 is taken out from the reticle cassette 5 and placed on a reticle transfer table (not shown). The reticle 2 can be moved.

Since the feeding hand 1 fixes the end surface of the reticle 2, both 5 inch and 6 inch reticles can be taken out regardless of the size of the reticle.

An optical detector 4 for detecting the size of the reticle is located between the feeding hand 1 and the reticle cassette 5, and the size of the reticle is determined at the same time when the feeding hand 1 takes out the reticle 2 from the reticle cassette 5. Detect. An information processing unit 7 that processes reticle size information is connected to the optical detection unit 4, and the information processing unit 7 processes the reticle size information sent from the optical detection unit 4.

FIG. 2 is a flow chart showing the processing of reticle size information in the apparatus of FIG.

Next, the operation of the apparatus shown in FIG. 1 will be described with reference to FIG.

When the reticle is supplied to the semiconductor exposure apparatus, the reticle cassette 5 selected by the elevator 6 moves to the delivery position with the sending hand 1.
When the reticle cassette 5 moves to the delivery position, the cassette opening / closing unit 9 opens the cassette door of the reticle cassette 5 selected on the delivery position. When the cassette door of the selected reticle cassette 5 is opened, the feeding hand 1 moves in the horizontal direction (direction A in FIG. 1), enters the reticle cassette 5, and fixes the reticle 2 in the reticle cassette 5.

When the sending hand 1 fixes the reticle 2, the information processing section 7 issues an operation start command to the optical detection section 4 (step S1 in FIG. 2). The optical detection unit 4 starts reticle detection according to a command from the information processing unit 7. Optical detector 4
Is started, the feeding hand 1 moves the reticle 2
Is fixed, and the reticle cassette 5 is moved horizontally (direction B).
Move to. When the feeding hand 1 moves under the optical detection unit 4, the optical detection unit 4 detects the size of the reticle 2. The optical detection unit 4 sends the reticle size information to the information processing unit 7, and stops the operation. Further, the feeding hand 1 stops its operation while fixing the reticle 2.

The information processing section 7 determines, based on the information from the optical detection section 4, whether or not the semiconductor exposure apparatus can use the reticle 2 (step S).
2). When the information processing unit 7 determines that the hand cannot be used, the feeding hand 1 moves in the horizontal direction (direction A),
The reticle 2 taken out is stored in the reticle cassette 5, and the cassette opening / closing unit 9 closes the cassette door of the reticle cassette 5 (step S7).

If the information processing unit 7 determines that the reticle can be used, is there a change item depending on the size of the reticle (for example, the position of the transfer table of the reticle 2 and the reference position for positioning) in the semiconductor exposure apparatus? If there is no change item, the feeding hand 1 further performs rotational movement, vertical movement and horizontal movement operation, and moves the reticle 2 to a reticle transfer table (not shown) (step S6). If there are any changes,
Information about change items depending on the size of the reticle is sent to the control unit of the semiconductor exposure apparatus (not shown) (step S4).

The semiconductor exposure apparatus automatically changes the change item depending on the size of the reticle of the semiconductor exposure apparatus according to the information sent from the information processing unit 7 (step S5).

When the change of the semiconductor manufacturing apparatus is completed, the feeding hand 1 further performs the rotational movement, the vertical movement and the horizontal movement operation to move the reticle 2 to the reticle transfer table (not shown) (step S6).

In this embodiment, a non-contact optical sensor is used to detect the size of the reticle, but it is also possible to use a contact sensor.
Further, in the present embodiment, the non-contact optical sensor is arranged vertically to the reticle surface, but even if it is arranged horizontally to the reticle surface, the same operation as in the present embodiment can be performed.

According to the present embodiment, when the reticle is conveyed from the reticle cassette, the size of the reticle is judged during the conveyance, the unmatch between the apparatus and the reticle is automatically detected, and the size of each reticle is adjusted. The apparatus can be automatically adjusted, the reticle confirmation work, which is a pre-operation for mounting the cassette on the apparatus, can be omitted, the work efficiency of the operator can be improved, and the work amount of the operator can be reduced. In addition, since the size of the reticle is checked during transportation, it is possible to prevent foreign matter from being attached due to the checking action.

[0032]

Second Embodiment FIG. 3 is a schematic view of a reticle orientation determining mechanism and a reticle storage case rotating mechanism in a reticle transporting apparatus according to another embodiment of the present invention. In the figure,
31 is a reticle, 32 is a reticle storage case upper lid, 3
Reference numeral 3 is a lower plate of the reticle storage case. In a normal reticle storage state, the reticle 31 is mounted on the lower plate 33 of the reticle storage case, and the reticle storage case upper lid 32 is mounted to protect the reticle 31 from contamination of foreign matter. Reference numeral 34 denotes a laser projector for irradiating the surface of the reticle, which is positioned so that an alignment mark 40, which will be described later, on the surface of the reticle is irradiated with the laser light 46. Reference numeral 35 denotes a light receiver for detecting reflected light 47 emitted from the light projector 34 and reflected on the surface of the reticle 31, reference numeral 36 denotes a vertical drive unit for lifting the upper lid 32 of the reticle storage case,
Reference numeral 37 is a protrusion formed on the reticle storage case upper lid 32 for hooking the reticle storage case upper lid 32 on the vertical drive unit 36. 38 is a holding table for holding the reticle storage case including the parts 31 to 37,
Reference numeral 39 is a rotary table for rotating the holding table 38. Reference numeral 48 denotes a base on which the turntable 39 is mounted, and the laser projector 34
The light receiver 35 is fixed to the base 48.

FIG. 4 shows a part of the pattern of the reticle 31 drawn on the surface of the reticle 31. Usually, a different circuit pattern is drawn on each reticle and they are exchanged one after another for use. However, the marks 40 called alignment marks used in the exposure process are formed commonly for all reticles.

FIG. 5 is a perspective view of the entire reticle transport apparatus equipped with the reticle orientation determining mechanism and the reticle storage case rotating mechanism shown in FIG. In FIG. 5, reference numeral 41 is a library for storing a plurality of upper lids 32 of the reticle storage case on the lower tray 33, 42 is a fork for transferring to the holding table 38, and 43 is a vertical fork 42. A vertical movement mechanism for moving, 44 is a fork 42
Mechanism for pulling out the fork 42 from the library 41 and pushing the fork 42 toward the library 41.
Reference numeral 5 denotes a reticle hand for carrying out the reticle 31 on the reticle storage case lower plate 33 and transferring it to the next process, or conversely, transferring the reticle 31 to the reticle storage case lower plate 33 from the next process.

Next, the operation of the above configuration will be described step by step. First, the library 41 stores a reticle storage case in which the reticle storage case upper lid 32 is placed on the reticle storage case lower plate 33, and the reticle 31 is stored therein. Next, the fork 42 is moved below the reticle storage case lower tray 33 by the forward / backward moving mechanism 44, the reticle storage case lower tray 33 is lifted by the up / down mechanism 43, and the reticle storage case is pulled out from the library by the forward / backward moving mechanism 44. It is moved upward by 43, the reticle storage case is mounted on the holding table 38, and it is retracted by the forward / backward moving mechanism 44 to a position where it does not interfere with the rotation of the holding table 38.

Next, on the holding table 38, the vertical drive unit 36 hooks the protruding portion 37 of the reticle storage case upper lid 32 and moves to the upper portion, and lifts the reticle upper lid 32 from the reticle lower tray 33. In this state, laser light 46 is emitted from the laser projector 34, and while the reflected light 47 is detected by the light receiver 35, the holding table 38 is slightly rotated by using the rotating table 39. At this time, when the orientation of the reticle in the reticle storage case is as specified, a specific reflected light is obtained.

If the specific reflected light cannot be obtained, it is determined that the reticle is not stored in the reticle storage case in the prescribed state, the rotary table 39 is rotated 90 degrees, and the reflected light 47 is emitted in the same manner as described above. To detect. This operation is repeated until the specific reflected light is obtained, and when the specific reflected light is obtained, the reticle 31 on the lower tray 33 of the cassette storage case is held by the reticle hand 45 and carried out to the next step.

In the embodiment described above, the presence or absence of a specific pattern on the reticle is used to determine the orientation of the reticle stored in the reticle storage case by using the reflected light of the laser light. As shown in FIG. The presence or absence of the specific pattern may be detected using the transmitted light of the laser beam to determine the orientation of the reticle stored in the reticle storage case. Further, when the upper lid 32 and the lower plate 33 of the reticle storage case are transparent, the configuration may be made as shown in FIG. 7 and the determination may be made without opening the upper lid 32 of the reticle storage case.

As described above, according to this embodiment, by providing the function of determining the presence or absence of a specific pattern on the reticle by using the reflection or transmission of the laser light, the reticle stored in the reticle storage container can be detected. The reticle is conveyed to the next process in an incorrect state by the function that determines the orientation and whether the orientation is correct or not, and the reticle may be damaged or the reticle cannot be positioned. It has the effect of preventing an accident where the car stops.

Furthermore, by providing a reticle or cassette rotating mechanism and combining it with the reticle orientation discriminating function, it becomes possible to automatically carry in the reticle to the next process at the correct angle, and the operator corrects the reticle direction. There is no need to do so, there is no chance of foreign matter adhering, and the downtime of the device is reduced.

[Brief description of drawings]

FIG. 1 is a perspective view showing a configuration of a reticle transport device portion of a semiconductor exposure apparatus according to an embodiment of the present invention.

FIG. 2 is a flow chart of the operation of the apparatus of FIG. 1 after checking the size of the reticle.

FIG. 3 is a schematic view of a reticle orientation determination mechanism and a reticle storage case rotation mechanism in a reticle transport device according to another embodiment of the present invention.

FIG. 4 is a diagram showing a part of a reticle pattern drawn on the surface of the reticle in FIG.

FIG. 5 is an overall perspective view of a reticle transport device equipped with the reticle orientation determination mechanism and the reticle storage case rotation mechanism shown in FIG.

6 and 7 are views similar to FIG. 3, showing another embodiment of the reticle orientation determining mechanism according to the present invention.

[Explanation of symbols]

1: feeding hand, 2: reticle, 3: feeding hand drive unit, 4: optical detection unit, 5: reticle cassette,
6: Elevator section, 7: Information processing section, 8: Storage rack, 9:
Cassette opening / closing part, 31: reticle, 32: reticle storage case upper lid, 33: reticle storage case lower plate, 3
4: laser projector, 35: light receiver, 36: vertical drive unit,
37: protrusion, 38: holding table, 39: rotary table, 40: alignment mark, 41: library, 42: fork, 43: fork vertical movement mechanism, 44: fork forward / backward movement mechanism, 45: reticle hand, 46: laser Light, 4
7: reflected light, 48: base.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification code Office reference number FI technical display location H01L 21/027 21/304 341 S 8831-4M 21/68 A 8418-4M

Claims (7)

[Claims] 1. An original transport device for taking out an original from an original storage container for storing the original and transporting the original to an original delivery position with a main body apparatus using the original, the original detecting apparatus detecting the size of the original to be transported. An original plate transporting device comprising a dimension detecting means. 2. The original conveying apparatus according to claim 1, wherein the original size detecting means is an optical detecting means for optically detecting the size of the original. 3. The original conveying apparatus according to claim 1, wherein the main body device automatically adjusts each part of the apparatus according to the size of each original based on the detection output of the original size detecting means. 4. An original transport device for taking out an original from an original storage container for storing the original and transporting the original to an original delivery position with a main body apparatus using the original, and a specific pattern of the original stored in the container. An original transport device, comprising an orientation correctness determination unit that determines whether the orientation of the original is correct by optically detecting the presence or absence of the presence or absence. 5. The original transporting apparatus according to claim 4, wherein the correctness determination unit detects the presence or absence of the specific pattern by using reflected light or transmitted light of laser light. 6. An original transport device for taking out an original from an original storage container for storing the original and transporting the original to an original delivery position with a main body apparatus using the original, wherein a specific pattern of the original stored in the container is provided. An original transporting device comprising an orientation determining means for optically determining the orientation of the original by optically detecting the presence or absence of the original. 7. According to the determination result of the orientation determining means,
The original transport apparatus according to claim 6, further comprising means for re-storing the original in a correct orientation.