JPH10287338A - Stacked structure of pellicle container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pellicle container which prevents mutual contact without a separate member such as a clip and makes it possible to mutually stack covers or container bodies which do not generate scratches or abrasion powder and mutually stack the pellicle containers. SOLUTION: A cover 1 provided with a fitting male part 8 bent to make a nearly U-shaped form at the whole periphery of the end edge and a swelled flat top face part and further, projected ribs A1 at the nearby positions of the peripheral edge of the top face part, and a container body 2 provided with a fitting female part 3 bent upward at the whole periphery of the end edge and a swelled flat loading part 5 of pellicles and further, projected ribs A2 formed at positions corresponding to the projected ribs A1 at the bottom face of the recessed part 7 formed at the rear face of the loading part 5 of pellicles, are combined to form the pellicle container. The top face part is contained in the recessed part 7 and projected ribs A1, A2 are mutually fitted and the pellicle containers are stacked one after another without mutual contact except for the fitting parts.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention has been developed to prevent foreign matter from adhering to the surface of a photomask or reticle (hereinafter, collectively referred to as a mask) used in the manufacture of ICs and LSIs. The present invention relates to a pellicle storage container for storing a pellicle.

[0002]

2. Description of the Related Art In a semiconductor manufacturing process, when a circuit pattern drawn on a mask is transferred onto a wafer by ultraviolet rays, if there is even a small amount of foreign matter on the mask, the foreign matter is transferred onto the wafer together with the circuit pattern. And cause defects. In order to prevent such defects, it is necessary to prevent foreign matters from being present on the wafer. As a countermeasure, a dust-proof film called a pellicle has been developed and used.

A pellicle is a thin film having a thickness of several microns to several tens of microns formed of nitrocellulose or the like, and is provided on a pellicle frame made of aluminum or the like. By mounting the pellicle frame on which the pellicle is stretched on the mask, adhesion of foreign matter to the mask is prevented. Also, even if foreign matter adheres to the pellicle, the thickness of the pellicle frame causes a distance between the pellicle surface and the circuit pattern of the mask, and the focal position of the ultraviolet light with respect to the foreign matter on the pellicle shifts. It is not transferred onto the wafer. However, the transfer accuracy of the circuit pattern is not completely free. For this reason, it is required that no foreign matter adheres to the pellicle itself. For transportation and the like, the pellicle is stored in a pellicle storage container to prevent foreign matter from adhering to the pellicle.

Conventionally, as the pellicle storage container described above,
The one shown in FIG. 7 is known. FIG. 7 (a)
FIG. 3 is a plan view, in which the upper side of the line YY shows the container body 2 with the lid 1 removed, and the lower side of the line YY shows a state in which the lid 1 is set. FIG. 7B is a cross-sectional view along the line YY. The container main body 2 has a fitting female portion 3 whose edge is bent upward over the entire circumference, and a mounting portion 5 on which a pellicle frame 4 (shown by a broken line) is mounted at a central portion, and a peripheral edge. A plurality of locking projections 6 for locking the pellicle frame 4 to the portion
Is provided. The mounting portion 5 has a rectangular shape in plan view and has a size corresponding to the pellicle frame 4, and a concave portion 7 is formed on a lower surface side of the mounting portion 5.

[0005] The lid 1 has a male fitting portion 8 whose end edge is bent in a substantially U-shape over the entire circumference thereof. The male part 8 is fitted. A tapered step portion having a step surface 9 is formed inside the fitting male portion 8. When storing the pellicle in the pellicle storage container, the pellicle frame 4 to which the pellicle 10 (indicated by a two-dot chain line) is adhered is set inside each of the locking projections 6 provided on the peripheral edge of the mounting portion 5, The pellicle frame 4 is pressed by the stepped surface 9 of the lid 1 to prevent the pellicle frame 4 from rattling. . Note that a leg 13 is provided on the lower surface of the container body 2.

[0006]

The lid 1 and the container body 2 of the above-mentioned conventional pellicle container are individually injection-molded and taken out of the mold. At the time of collection, when these formed products are stacked, as shown in FIG. 8 (showing the stacked state of the container bodies 2) and FIG. 9 (showing the stacked state of the lids 1), they come into contact with each other at the contact point 14. In addition, scratches and abrasion powder are generated. When the lid 1 and the container body 2 are stacked, as shown in FIG. 10, the top surface of the lid 1 and the bottom surface of the concave portion 7 (contact portion 14) on the lower surface of the container body 2 come into contact with each other, and Occurs. For this reason, after injection molding, cargo is collected without being stacked. Further, when stacking the pellicle storage container in which the lid 1 and the container main body 2 are fitted, the four corners of the pellicle storage container are sandwiched by clips provided with convex ribs on the upper and lower surfaces, and the convex ribs are fitted together. Stack, lid 1
And the bottom surface of the concave portion 7 are not in contact with each other.

The present invention has been made in view of the above problems, and prevents contact without using a separate member such as the above-mentioned clip, so that lids, container bodies, and pellicle storage containers are free from generation of scratches and abrasion powder. An object of the present invention is to provide a pellicle storage container capable of stacking each other.

[0008]

The stacked structure of a pellicle container according to the present invention has a fitting male portion formed by bending an edge in a substantially U-shape over the entire periphery thereof. A lid having a flat top surface, a convex rib A1 provided in the vicinity of the periphery of the top surface, and a fitting female portion whose end edge bulges upward over the entire circumference. Pellicle storage container having a flexible pellicle mounting portion, and a container body provided with a convex rib A2 at a position corresponding to the convex rib A1 on a bottom surface of a concave portion formed on the back surface of the pellicle mounting portion. Wherein the top surface portion is housed in the concave portion, and the convex rib A1 is provided.
And the convex ribs A2 are fitted together to stack the pellicle storage containers, and the pellicle storage containers are sequentially stacked without contacting each other except at the fitting positions.

The top surface of the lid is formed by providing a tapered step, a convex rib B1 is provided on the upper surface of the step surface of the tapered step, and a convex rib B2 is provided on the lower surface of the step surface.
A convex rib B1 and a convex rib B2 provided separately from each other.
And the lids are stacked without contacting each other except for the fitting locations. By providing the convex rib B2 provided on the lower surface of the step surface of the tapered step portion of the lid at a position in contact with the peripheral side of the pellicle frame mounted on the pellicle mounting portion of the container main body, Rattling is prevented. A convex rib C1 is formed on an upper surface of a flat portion formed along the fitting female portion of the container body.
By providing a convex rib C2 on the lower surface of the flat portion and fitting the convex rib C1 and the convex rib C2 provided separately from each other, the container body does not come into contact with each other except at the fitting position. Each other is stacked.

Further, by forming the top surface of the lid with a tapered step, the pellicle frame mounted in the container body can be pressed and fixed on the lower surface of the step surface of the tapered step. . The material of the pellicle container of the present invention is preferably a resin having antistatic properties such as polypropylene, polystyrene, acrylic, or acrylonitrile-butadiene-styrene, and may be appropriately selected and molded by injection molding.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a stacked structure of a pellicle container according to the present invention will be described with reference to FIGS.
This will be described in detail with reference to FIG.

[0012]

1 shows a pellicle storage container, FIG. 1 (a) is a plan view, and the upper side of the line XX shows the container body 2 with the lid 1 removed, and the lower side of the line XX The side shows a state where the lid 1 is fitted. (B) is sectional drawing which followed the XX line. The container body 2 has a fitting female part 3 whose edge is bent upward, a mounting part 5 on which a pellicle frame 4 (shown by a broken line) is mounted at a central part, and a pellicle frame along this peripheral edge. Locking projections 6 for locking the lock 4 are provided at several places. The mounting portion 5 has a shape and a size corresponding to the pellicle frame 4, and the mounting portion 5 forms a concave portion 7 on the lower surface side of the container body 2.

The lid 1 has a male fitting portion 8 whose peripheral edge is bent in a U-shape. The female fitting portion 3 and the male fitting portion 8 are fitted to the container body 2. A tapered step portion having a step surface 9 is formed inside the fitting male portion 8. When storing the pellicle 10 (indicated by a two-dot chain line) in the pellicle storage container, the pellicle frame 4 to which the pellicle 10 is adhered is placed inside each of the locking projections 6 provided on the peripheral edge of the mounting portion 5. , Lid 1
Is fitted to the fitting male part 8 and the fitting female part 3 of the container body 2 to cover the container. At this time, the lower surface of the step surface 9 of the lid 1 abuts on the upper surface of the pellicle frame 4 and the pellicle frame 4
Is pressed against the mounting portion 5 and is fixed without rattling.

FIG. 2 is a bottom view of the container body 2 shown in FIG. 1, and FIG. 3 shows a state where the container bodies 2 are stacked. A concave portion 7 surrounded by an inclined surface 11 is formed at the center of the container body 2. The upper surface of the concave portion 7 corresponds to the mounting portion 5. Further, a flat portion 12 is formed along the fitting female portion 3, and on the upper surface side of the flat portion 12, a convex rib C1 is formed.
Is provided on the lower surface side, and a convex rib C2 that fits with the convex rib C1 of the separate container main body 2 is provided, and the convex rib C2 and the convex rib C1 of the separate container main body 2 are provided. Mated with
The container main bodies 2 are stacked, and the container main bodies 2 do not come into contact with each other except for the fitting locations. In addition, 13 is a leg.

A convex rib A2 is provided near the corner of the bottom surface of the concave portion 7. The convex rib A2 is fitted with a convex rib A1 provided on a top surface portion of the lid 1 described later,
The pellicle storage containers are sequentially stacked.

FIG. 4 is a bottom view of the lid 1 shown in FIG. 1, and FIG. 5 is a lid fitted with a convex rib B1 of the lid 1 and a convex rib B2 of a separate lid 1. FIG. 2 is a partially enlarged cross-sectional view illustrating a stacked state of No. 1; Even when the lids 1 are stacked in this way, the lids 1 do not come into contact with each other except for the fitting locations.

FIG. 6 is a partially enlarged sectional view showing a stacked state of the pellicle storage containers in which the lid 1 and the container body 2 are fitted. The pellicle storage containers are sequentially stacked by fitting with the convex rib A2 provided in the concave portion 7 of the container main body 2 and the convex rib A1 provided in the lid 1 of the pellicle storage container of another combination. be able to. in this way,
Even in the case where the pellicle storage containers are stacked, the pellicle storage containers do not come into contact with each other, except for where the convex ribs A1 and A2 are fitted.

The shape of the convex ribs is not limited to the L-shape in plan view shown in FIGS. 1 to 6. For example, at least one convex rib is provided on each side to form a pair. If any one of the convex ribs is provided so as to be located inside or outside the other convex rib, even if the shape of the convex rib is a rectangular parallelepiped (rectangular shape in plan view), the ribs are stacked without any trouble. And various aspects are possible.

[0019]

According to the stacked structure of the pellicle storage container of the present invention, since the convex ribs are provided at the above-described locations, the pellicle storage container is not affected and the scratches and abrasion powder due to contact are not generated without affecting the pellicle storage. Pellicle storage containers, lids,
Stacking of container bodies became possible, and work efficiency became possible. Furthermore, by providing the convex rib B2 used for stacking the lids on the lower surface of the lid so as to abut the side surface of the pellicle frame, rattling of the pellicle frame is prevented, and storage and transportation can be performed without any trouble. it can.

[Brief description of the drawings]

FIG. 1 shows a pellicle storage container of the present invention, in which (a) is a plan view, the upper side of the line XX shows the container body with the lid removed, and the lower side of the line XX is a lid. Indicates a state in which is set. (B) is sectional drawing which followed the XX line.

FIG. 2 is a bottom view of the container main body shown in FIG.

FIG. 3 is a partially enlarged sectional view showing a stacked state of container bodies.

FIG. 4 is a bottom view of the lid shown in FIG.

FIG. 5 is a partially enlarged cross-sectional view showing a state in which lids are stacked.

FIG. 6 is a partially enlarged cross-sectional view showing a stacked state of pellicle storage containers in which a lid and a container body of the present invention are fitted.

7A and 7B show a conventional pellicle storage container, wherein FIG. 7A is a plan view, and the upper side of the line YY shows the container body with the lid removed, and the lower side of the line YY shows the lid. FIG. 3B shows a set state, and FIG. 4B is a cross-sectional view taken along line YY.

FIG. 8 is a partially enlarged sectional view showing a stacked state of conventional container bodies.

FIG. 9 is a partially enlarged cross-sectional view showing a state in which conventional lids are stacked.

FIG. 10 is a partially enlarged cross-sectional view illustrating a state of contact between pellicle storage containers when a conventional pellicle storage container in which a lid and a container body are fitted is stacked.

[Explanation of symbols]

 1 ············································································· ··········································································· 8 ···································································································· 11 ····· Slope, 12 ········································································· A1 , A2, B1, B2, C1, C2 ... convex ribs.

Claims (4)

[Claims] An end edge has a fitting male portion formed by being bent in a substantially U-shape over the entire periphery thereof, and a flat top surface portion bulging out, and near the periphery of the top surface portion. It has a lid provided with the convex rib A1, a fitting female part whose edge is bent upward over the entire circumference thereof, and a flat pellicle mounting part bulging out. A pellicle container in which a convex main body provided with a convex rib A2 at a position corresponding to the convex rib A1 on a bottom surface of a concave part formed on a back surface, wherein the top surface part is housed in the concave part, The pellicle storage container is stacked by fitting the convex rib A1 and the convex rib A2,
A pellicle storage container stacking structure wherein pellicle storage containers are sequentially stacked without contact with each other except for a fitting position. 2. A top surface portion of the lid is formed by providing a tapered step portion, a convex rib B1 is provided on an upper surface of the step surface of the tapered step portion, and a convex rib B2 is provided on a lower surface of the step surface.
A convex rib B1 and a convex rib B2 provided separately from each other.
2. The stacking structure of the pellicle storage container according to claim 1, wherein the lids are stacked without contacting each other except at a fitting position. 3. A convex rib B2 provided on a lower surface of a step surface of a tapered step portion of the lid is provided at a position in contact with a peripheral side of a pellicle frame placed on a pellicle placing portion of a container body, The pellicle storage container stacking structure according to claim 2, wherein rattling of the pellicle frame is prevented. 4. A convex rib C1 is provided on the upper surface of a flat portion formed along the female fitting portion of the container body, and a convex rib C2 is provided on a lower surface of the flat portion. Rib C
The pellicle storage container stacking structure according to claim 1, wherein the first and second convex ribs (C2) are fitted to each other, and the container bodies are stacked without contacting each other except at the fitting positions.