JPH10275438A - Head slider and recording and reproducing device using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress a floating amt. or fluctuation of contact force without utilizing dependence upon a yaw angle by providing at least two dynamic pressure generating parts on the head slider along the rotating direction of a disk and setting a shape of the forward dynamic pressure generating part without causing a change in pitching of the backward dynamic pressure generating part in the inner and outer circumferences of the disk. SOLUTION: This head slider 203a possesses the two dynamic pressure generating parts 2a and 2b across a deep groove 3, having their shapes on the surface opposite to the disk, formed with a length along the direction approximately orthogonal to the rotating direction of the disk longer than a length along the rotating direction respectively. The forward dynamic pressure generating part 2a is provided with a land part 5 formed with a 1st step 4 in the direction orthogonal to the rotating direction of the disk and extension land parts 60a and 60b extended in the vicinity of the side end parts of this land part 5. Consequently, since a side part of the step 4 is surrounded by extended steps 61a and 61b, a lateral leakage of an airflow is reduced, and a possitive pressure is efficiently generated, so that pitching fluctuation is prevented, and also a rolling preventing function by means of the steps 6a and 6b is properly adjusted.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a head slider capable of suppressing variations and fluctuations in the flying height or fluctuations in contact force, and a low flying or low load and stable load of the recording / reproducing head using the head slider. The present invention relates to a recording / reproducing apparatus capable of realizing contact and improving recording density.

[0002]

2. Description of the Related Art In recent years, in a recording / reproducing apparatus, technical development relating to a higher recording density has been actively carried out. In particular, a higher recording density in a magnetic disk apparatus has been required to reduce a bit density (a recording density in a disk circumferential direction). It is being promoted from both sides of increase in track density and increase in track density (recording density in the disk radial direction). Here, as a technique for increasing the bit density, it is essential to lower the flying height of a head slider (hereinafter, referred to as "slider") on which a recording / reproducing head (hereinafter, referred to as "head") is mounted. However, in the conventional slider, the dynamic fluctuation of the flying height at the time of seeking prevents the head from flying low. Hereinafter, the factors will be described in detail.

FIG. 27 shows an outline of a magnetic disk drive using a conventional slider. Conventional slider 101 typified by a so-called tapered flat slider
In most cases, the flying height difference due to the difference between the inner and outer peripheral speeds of the disk 102 as the recording medium is suppressed by using the yaw angle dependency. Here, the yaw angle is an angle (θ in the figure) between the disk rotation direction and the longitudinal direction of the slider 101.

As shown in FIG. 27, in a magnetic disk drive using a so-called rotary actuator 103, the arrangement of the slider 101 and the disk 102 is such that the yaw angle is small on the inner circumferential side X of the disk and the yaw angle on the outer circumferential side Y of the disk. Is set to be large.

FIG. 28 is a perspective view schematically showing a conventional tapered flat slider. As shown in the figure, the slider 101 has an elongated power generation unit 101a extending along the disk rotation direction A.
This structure is configured to float using a dynamic pressure generated between a and a rotating disk (not shown). The power generation unit 101a extending along the disk rotation direction A has a property that when a yaw angle is generated and the disk rotation direction changes from A to B, the pressure generation efficiency decreases. This is because when the yaw angle is small, the airflow flowing from the leading edge of the slider generates a dynamic pressure by flowing over a relatively long distance along the entire length of the slider, whereas when the yaw angle is large, the airflow is included in the airflow. The part flows out from the side edge before reaching the full length of the slider, and the other part flows in from the side edge and flows out from the rear end of the slider.
This is because it becomes difficult to secure a flow distance necessary for effectively increasing the dynamic pressure. Therefore, in the conventional tapered flat slider 101, when the yaw angle increases toward the outer peripheral side Y of the disk, the dynamic pressure generation efficiency acting on the slider 101 decreases due to the lateral leakage of the air flow. Therefore, even if the peripheral speed increases toward the outer peripheral side Y of the disk, the floating force acting on the slider 101 does not fluctuate, and the difference in the floating amount between the inner and outer circumferences of the disk 102 can be suppressed.

As shown in FIG. 29, when the slider 101 seeks, the peripheral speed component Vr (5 to 1) of the disk is used.
In addition to the peripheral speed component Vr, there is a seek speed component Vs (about 1 m / s at maximum) in a direction substantially orthogonal to the peripheral speed component Vr. Therefore, the composite vector V of these two velocity components is
An angle of about 5 to 10 ° is formed with respect to the longitudinal direction of the slider 101. That is, at the time of seeking, an equivalent yaw angle fluctuation (θ ′ in the figure) occurs. Therefore, according to the same principle as the above-described yaw angle dependency, the dynamic pressure generation efficiency is reduced due to the lateral leakage of the air flow at the time of seek, and a transient decrease in the flying height occurs. The amount is usually 10 nm
Has been experimentally confirmed to exceed the limit.To avoid collision between the disk and slider during seeking,
Spacing (flying gap) must be set in consideration of this decrease in flying height as a margin, and this is a major factor that hinders the low flying of the slider.

On the other hand, a contact recording technique for contacting a head with a disk and performing recording / reproduction with a substantially zero flying height has been studied with the aim of further improving the recording density. The biggest technical problem in this contact recording technology is to reduce head wear. For that purpose, it is necessary to maintain a low load and a stable contact force between the head and the disk. However, in the conventional slider, the contact force fluctuates due to the equivalent yaw angle fluctuation at the time of seeking, so that the contact force acting between the head and the disk cannot be stably maintained at a low load. Also, if the flying posture changes on the inner and outer circumferences of the disk when the wear of the head progresses, there is a possibility that the contact portion floats and spacing occurs.

Further, when employing a head using a magnetoresistive element, which has recently been put into practical use and considered to be the mainstream in the future, a so-called MR head, it is necessary to separately provide a recording head and a reproducing head, and usually two heads are used. Are arranged side by side in the track direction. In such a configuration,
If the yaw angle changes greatly on the inner and outer circumferences of the disk, a shift (track shift) in the track width direction occurs between the two heads. To solve this problem, a method of using a linear actuator or a method of optimizing the length of an actuator arm to reduce the fluctuation of the yaw angle (Japanese Patent Laid-Open No. 5-298615)
No.) are being considered. Therefore, there is a high possibility that a technique for suppressing the flying height difference between the inner and outer circumferences of the disk without using the yaw angle dependency is also required for the slider employing the MR head.

[0009]

As described above,
The conventional slider adopts a shape suitable for suppressing the flying height difference between the inner and outer peripheries of the disk by using the yaw angle dependency, so that the flying height decreases due to equivalent yaw angle fluctuation during seek. Or the contact force fluctuates. Therefore, it is difficult to realize a low flying height of the head or a low load and stable contact between the head and the disk.

[0010] In addition, if the head is worn out during contact recording and the flying attitude changes on the inner and outer circumferences of the disk, the contact portion may float and spacing may occur.

Further, in a slider employing an MR head, there is a strong demand for a technique for suppressing a flying height difference between the inner and outer circumferences of the disk without utilizing the yaw angle dependency. In view of the above, the present invention proposes a slider shape that solves the above-mentioned problem and can suppress a flying height difference or a contact force variation on the inner and outer circumferences of the disk without using the yaw angle dependency. It is an object of the present invention to provide a recording / reproducing apparatus capable of realizing a low flying height or a low load and a stable contact between a head and a disk and improving a recording density.

[0012]

According to the present invention, there is provided a head slider having a recording / reproducing head for recording / reproducing information on / from a disk which is a rotatable recording medium. Is provided on a surface facing the disk, and has a shape in which a length along a direction substantially perpendicular to the rotation direction is longer than a length along the rotation direction of the disk, and At least two dynamic pressure generating portions arranged along the deep groove along the groove, and among these dynamic pressure generating portions, the dynamic pressure generating portion located at the foremost position in the rotational direction of the disk has the rotational direction. A land portion provided by forming a first step along a direction substantially perpendicular to the first direction, and a second step provided along the rotation direction provided near a side end of the land portion. The times To provide a recording and reproducing apparatus using the head slider and which is characterized in that the extension land portion that extends in a direction along the direction are provided.

Further, according to the present invention, in a head slider equipped with a recording / reproducing head for recording / reproducing information on a disk which is a rotatable recording medium, the head slider is provided on a surface of the head slider facing the disk, The length along the direction substantially perpendicular to the rotation direction has a longer shape than the length along the rotation direction of the disk, and at least two of the grooves are arranged with deep grooves along the rotation direction of the disk. A dynamic pressure generating portion, a dynamic pressure generating portion located most rearward in the rotation direction of the disk among the dynamic pressure generation portions, has a first step substantially along the rotation direction and the rotation direction; A first notch forming a second step substantially along a direction substantially perpendicular to the first step, and a third step facing the first step and a front edge of the dynamic pressure generating section facing the deep groove. Form the opposing fourth step A second notch is provided to provide a recording and reproducing apparatus using the head slider and which is characterized in that the depth of the second notch substantially the same as the depth of the deep groove.

Further, according to the present invention, in a head slider equipped with a recording / reproducing head for recording / reproducing information on / from a disk which is a rotatable recording medium, the head slider is provided on a surface of the head slider facing the disk, The length along the direction substantially perpendicular to the rotation direction has a longer shape than the length along the rotation direction of the disk, and at least two of the grooves are arranged with deep grooves along the rotation direction of the disk. A dynamic pressure generating portion, a dynamic pressure generating portion located at the foremost position in the rotation direction of the disk among the dynamic pressure generation portions has a first step along a direction substantially perpendicular to the rotation direction. And a second step, which is provided forward of the first step in the rotational direction and is deeper than the step and along a direction substantially perpendicular to the rotational direction. The shape That a first notch which is provided to is provided to provide a recording and reproducing apparatus using the head slider and which is characterized in.

Further, according to the present invention, in a head slider mounted with a recording / reproducing head for recording / reproducing information on a disk which is a rotatable recording medium, the head slider is provided on a surface of the head slider facing the disk, At least two dynamic pressure generating portions arranged with a deep groove therebetween along the rotation direction of the disk, and a negative pressure generation step provided at least two rear portions of the dynamic pressure generating portions, At least one of the dynamic pressure generating units having a step for generation has an opposing surface that is grounded on the disk when the disk is stationary, and the other dynamic pressure generating unit has an opposing surface that retreats from the disk when the disk is stationary. A head slider and a recording / reproducing apparatus using the same are provided.

[0016]

Embodiments of the present invention will be described in detail with reference to the drawings. Here, a magnetic disk device will be described as an example of a recording / reproducing device. However, the present invention is not limited to this case, and can be applied to another recording / reproducing device having a mode in which a head is supported by a slider.

First, prior to describing an embodiment of the present invention,
An outline of the magnetic disk drive will be described. FIG. 1 schematically shows a magnetic disk drive using a rotary actuator. The disk 201 is mounted on a spindle 202 and rotated at a predetermined rotation speed. A slider 203 having a magnetic pole for recording and reproducing information while flying above or in contact with the disk 201 is attached to the tip of a thin plate-shaped suspension 204. The suspension 204 is connected to one end of an actuator arm 205 having a bobbin for holding a drive coil (not shown). On the other hand, the other end of the actuator arm 205 is provided with a voice coil motor 206 which is a kind of linear motor. Voice coil motor 206
Is composed of a drive coil (not shown) wound around the bobbin portion of the actuator arm 205, and a magnetic circuit including a permanent magnet and an opposing yoke, which are opposed to each other so as to sandwich the drive coil. Actuator arm 2
Numeral 05 is held by ball bearings (not shown) provided at two positions above and below the fixed shaft 207, and the voice coil motor 206 can freely rotate and swing.

Next, the flying attitude of the slider will be described with reference to FIG.
This will be briefly described with reference to FIG. The slider 203 is held by a suspension via a flexible member (gimbal) (not shown) for causing the posture of the slider 203 to follow the disk 201 during operation, and the dynamic pressure of the air flow generated with the rotation of the disk 201 is maintained. As a result, the whole or a part of the disk floats from the disk 201. The attitude of the slider 203 may slightly change due to some manufacturing error or fluctuation of dynamic pressure, and the change can be defined in the form of rolling and pitching. As shown in FIG. 2, rolling refers to a rotation R of the slider 203 around an axis 208 in a direction (longitudinal direction) substantially along the disk rotation direction A, and pitching refers to a direction orthogonal to the longitudinal direction of the slider 201. Means a rotation P about the axis 209.

First Embodiment A first embodiment of the present invention will be described with reference to FIG. 3A and 3B show a slider shape according to the first embodiment of the present invention, wherein FIG. 3A is a perspective view, FIG. 3B is a plan view, and FIG. 3C is a side view. Here, (b) shows the slider surface on the side facing the disk surface (not shown). The slider 203a mounts a recording / reproducing head 20 having a magnetic pole 21 on an end face located rearward in the disk rotation direction A.

As described above, the flying height and the like fluctuate due to the equivalent yaw angle fluctuation due to a decrease in the dynamic pressure generation efficiency due to the lateral leakage of the air flow, which is represented by a so-called tapered flat slider. This phenomenon is noticeable in a slider shape having a long dynamic pressure generating portion in the disk rotation direction A. In order to reduce the yaw angle dependency, as shown in the figure, the dynamic pressure generating portions 2a and 2b of the slider 203a are arranged along a direction substantially perpendicular to the rotation direction A rather than a length along the rotation direction A of the disk. It is desirable to have a horizontally long shape having a longer length. However, the slider 20
If the entire shape of 3a is made to be such a horizontally long shape, a decrease in pitching rigidity becomes a problem. Therefore, in the present embodiment, two horizontally long dynamic pressure generating units 2a and 2b are arranged in front and rear in the disk rotation direction A. Here, the front and rear dynamic pressure generating parts 2a and 2b are separated by a deep groove 3 where almost no dynamic pressure is generated by the air flow. The deep groove 3 is formed by machining or etching.

On the other hand, the dynamic pressure generating portions 2a, 2
If a slider having only a plurality of b's is used, transient flying height fluctuation can be suppressed by reducing the yaw angle dependency, but a flying height difference occurs on the inner and outer circumferences of the disk. Therefore, in the present embodiment, a part of the front dynamic pressure generating portion 2a is provided in a direction substantially perpendicular to the disk rotation direction A in order to suppress the difference in the flying height between the inner and outer circumferences of the disk regardless of the yaw angle dependency. By providing the step 4 along the land 5
Was formed. Here, the step 4 is a land 5
Is formed and formed by etching. It is desirable that the depth of the step 4 is substantially equal to the floating amount of the rear end of the front dynamic pressure generating portion 2a, and it is sufficient that the step 4 is formed very shallow. Easy. Further, the land portion 5 and the rear dynamic pressure generating portion 2b
Are formed so as to form the same plane (see FIG. 3C), the dynamic pressure generating portions 2a and 2b can be formed in one etching step, so that the production efficiency is improved and mass production is possible. A suitable structure can be provided.

Next, the reason why the present embodiment can suppress the difference in flying height between the inner and outer circumferences of the disk will be described. The rear dynamic pressure generating portion 2b is short in the disk rotation direction A,
This is a horizontally long flat surface that is long in a direction substantially perpendicular to the rotation direction A, and floats at a predetermined pitch as the front dynamic pressure generating portion 2a floats during operation.

FIG. 4 is a plot of the levitation force with respect to the pitching of the rear dynamic pressure generating section 2b when the spacing (flying gap) at the rear end of the rear dynamic pressure generating section 2b is constant. . In the figure, ○ represents the slider 203a.
Indicates the results when the disk is located on the outer periphery of the disk, and Δ indicates the results when the disk is located on the inner periphery of the disk. As shown in the drawing, if the pitching is constant, there is almost no difference between the inner and outer circumferences of the disk. That is, it can be seen that the fluctuation of the levitation force in the rear dynamic pressure generating section 2b is more largely caused by the fluctuation of the pitching than the peripheral speed difference between the inner and outer circumferences of the disk.

Therefore, in order to suppress the difference in the flying height between the inner and outer circumferences of the disk irrespective of the yaw angle dependence, the pitch of the rear dynamic pressure generating portion 2b should be made substantially constant at the inner and outer circumferences of the disk. Good. That is, by setting the shape of the front dynamic pressure generating section 2a so that the pitching of the rear dynamic pressure generating section 2b does not change on the inner and outer circumferences of the disk, the rear end of the rear dynamic pressure generating section 2b on which the magnetic pole 21 is provided is provided. Can be kept constant irrespective of the peripheral speed difference between the inner and outer circumferences of the disk.

FIG. 5 shows the total length L and the land portion of the dynamic pressure generating portion 2a in front of the slider 203a in the disk rotation direction A shown in FIG. 3 when the pitching and the rear end spacing of the slider 203a are fixed. 5 is a plot of the ratio of the levitation force acting on the front dynamic pressure generating portion 2a on the inner and outer circumferences of the disk with respect to the ratio of the length S to the length S in the same direction in FIG. Here, analysis results regarding four types of shapes in which conditions such as the total length L of the front dynamic pressure generating portion 2a and the depth of the step 4 are changed are shown. The analysis conditions for the four types of shapes are as follows.

Overall length L Depth of step □ 0.2 mm 0.1 μm ○ 0.3 mm 0.1 μm △ 0.4 mm 0.2 μm ０．４ 0.4 mm 0.3 μm The slider 203a has a spacing of 50 nm and a pitch of 100 μrad. And

According to this result, in the first region where the ratio of the length S of the land portion 5 to the total length L is 50% or more, the floating force on the outer peripheral side of the disk is higher than the floating force on the inner peripheral side of the disk. Power is greater. on the other hand,
In the second region where the ratio is larger than 10% and smaller than 50%, the change in the floating force at the inner and outer circumferences of the disk is relatively small. Further, in the third region where the ratio is 10% or less, the floating force on the outer peripheral side of the disk is smaller than the floating force on the inner peripheral side of the disk.

FIG. 6 shows the case where the front dynamic pressure generating section 2a belonging to the above-mentioned three areas is employed, and the pitch of the slider 203a with respect to the peripheral speed of the disk and the rear dynamic pressure generating section 2b provided with the head. It shows the change in spacing at the edges, respectively. here,
The vertical axis represents the ratio based on the pitching and spacing on the outer peripheral side of the disk.

First, in the case where the front dynamic pressure generating section (the ratio is 50%) belonging to the first area is employed, as the peripheral speed of the disk increases at the inner and outer peripheries of the disk (toward the outer peripheral side of the disk). Since the pitching increases (△ in the figure), the spacing also increases (black triangles in the figure), and it is not possible to realize a constant flying height on the inner and outer circumferences of the disk.

When the front dynamic pressure generating portion (the ratio is 10%) belonging to the third area is employed, the inner peripheral circumference of the disk increases as the peripheral speed of the disk increases (as the disk moves toward the outer peripheral side of the disk). Since the pitching is reduced (□ in the figure), the spacing is also reduced accordingly (black squares in the figure), and it is not possible to realize a constant flying height on the inner and outer circumferences of the disk.

On the other hand, when the front dynamic pressure generating portion (the ratio is 30%) belonging to the second area is employed, pitching (o in the figure) and spacing (black circle in the figure) are performed on the inner and outer circumferences of the disk. ) Is substantially constant irrespective of the difference in peripheral speed of the disk, so that the flying height at the inner and outer circumferences of the disk can be made constant.

Accordingly, the length of the land portion 5 formed on the front dynamic pressure generating portion 2a in the disk rotation direction A is larger than 10% and smaller than 50% of the total length of the dynamic pressure generating portion 2a in the same direction A. By doing so, it is possible to realize a constant flying height at the inner and outer circumferences of the disk (a variation in flying height of about ± 10% is tolerable).
Furthermore, if the length of the land portion 5 is approximately 30% of the total length of the dynamic pressure generating portion 2a, the floating amount on the inner and outer circumferences of the disk can be made almost completely constant.

The length of the land portion 5 is equal to the dynamic pressure generating portion 2a.
It is generally known that, in the case of about 30% of the total length of the bearing, the so-called step bearing in which a land portion is formed by providing a step has the highest dynamic pressure generation efficiency. Therefore, in this case, it is possible to effectively generate a sufficient dynamic pressure within a limited slider area, in addition to the effect of stabilizing the flying height on the inner and outer circumferences of the disk.

As described above, according to the first embodiment of the present invention, it is possible to suppress the transient fluctuation of the flying height by reducing the yaw angle dependency, and to keep the flying height constant at the inner and outer circumferences of the disk. Can be realized.

By the way, when the disk is stopped, the slider may be attracted to the disk due to water coagulation between the slider and the disk, and it may be difficult to smoothly float the slider when the disk is started. Conventionally, in order to avoid this problem, a minute gap called a texture is provided on the surface of the disk 31 to maintain a gap between the stopped disk and the slider. However, this texture causes an increase in the risk of collision between the slider and the disk, which occurs due to a variation in the flying height during operation, and may hinder lowering the flying height of the slider.

Therefore, in order to prevent such an adsorption phenomenon, it is most effective to reduce the contact area of the slider on the disk. According to the present embodiment, in the front dynamic pressure generating section 2a, only the land 5 is grounded on the disk, so that the ground area of the front dynamic pressure generating section 2a is reduced to the ground area of the rear dynamic pressure generating section 2b. And the adsorption phenomenon described above can be effectively prevented.

In the embodiment described above, the step 4 is provided only in the front dynamic pressure generating section 2a. However, as shown in FIG. 7, the steps 4 and 4 'are provided in the front and rear dynamic pressure generating sections 2a and 2b.
The same operation and effect as those of the present embodiment can be expected also in the configuration in which. According to this configuration, the rear dynamic pressure generating unit 2
b also obtains the same levitation force as the front dynamic pressure generating section 2a, so that the area of the entire rear dynamic pressure generating section 2b can be reduced, and the entire slider can be reduced in size. The adsorption phenomenon can be further reduced.

Second Embodiment A second embodiment of the present invention will be described with reference to FIG. 8A and 8B show a slider shape according to a second embodiment of the present invention. FIG. 8A is a perspective view, FIG. 8B is a plan view, and FIG. 8C is a side view. In the drawing, the same portions or portions having the same functions as those shown in FIG. 2 are denoted by the same reference numerals, and duplicate description is omitted (the same applies to the following embodiments).

As described above, as in the first embodiment, the slider 20 having the horizontally long dynamic pressure generating portions 2a and 2b
3a, when the yaw angle is formed on the outer peripheral side of the disk, the pressure center of the dynamic pressure generated with the air flow is changed to the slider 203.
a to the disk inner peripheral side Sin. Therefore, when the yaw angle is formed on the outer peripheral side of the disk, the airplane flies in a rolled attitude such that the inner peripheral side Sin of the disk is high and the outer peripheral side Sout of the disk is low. Therefore, in the present embodiment, the dynamic pressure generating portions 2a and 2b of the slider 203a are arranged in two stages in front and rear along the disk rotation direction A, and the front dynamic pressure generating portion 2a is provided with a difference in the flying height between the inner and outer circumferences of the disk. In order to suppress this, a step 4 is provided to form the land portion 5, and notches 25 a and 25 b are formed on the inner and outer sides of the disk of the rear dynamic pressure generating portion 2 b in the disk rotation direction A. The steps 6a and 6b are provided substantially along.

Strictly speaking, the rotation direction of the disk differs by the variation of the yaw angle between the inner and outer circumferences of the disk (see FIG. 8B). Here, the direction of rotation of the disk when the slider 203a is located on the inner peripheral side of the disk is indicated by an arrow A, and the rotational direction of the disk when the slider 203a is located on the outer peripheral side of the disk is shown in FIG. Shown by arrow B. In this case, the slider 203 is located at the step 6a on the outer peripheral side of the disk.
While a pressure (positive pressure) is generated in a direction in which a is separated from the disk, a pressure (negative pressure) is generated in the step 6b on the inner peripheral side of the disk in the opposite direction. For this reason, the slider 203a tends to take a rolled position such that the inner peripheral side Sin of the disk is low and the outer peripheral side Sout of the disk is high. That is, when the yaw angle is formed on the outer peripheral side of the disk, the pressure center of the dynamic pressure generated by the air flow shifts to the inner peripheral side of the disk. By providing the steps 6a and 6b, an effect of trying to take the opposite posture is obtained by providing the steps 6a and 6b for the effect of trying to take a rolled posture so that Sout becomes low. Therefore, by canceling both functions, it is possible to prevent rolling on the outer peripheral side of the disk.

The anti-rolling function is also effective when equivalent yaw angle fluctuation occurs during the seek of the slider 203a. In other words, even if transient rolling occurs due to equivalent yaw angle fluctuation occurring during the seek of the slider 203a, it can be adjusted by the action of the steps 6a and 6b, and the slider side end collides with the disk. It is possible to avoid the danger of doing.

According to the present embodiment, as in the first embodiment described above, transient flying height fluctuation can be suppressed by reducing the yaw angle dependency, and the flying height at the inner and outer circumferences of the disk is constant. In addition to the above, it is possible to prevent the dynamic pressure generating unit 2b from colliding with the disk because the dynamic fluctuation can be prevented from being performed at the time of rolling and seeking of the styler 203a on the outer peripheral side of the disk.

Here, the step 4 in the front dynamic pressure generating section 2a and the steps 6a and 6b newly provided in the present embodiment have the same depth and are formed by one etching. If this is the case, the production efficiency can be improved.

Third Embodiment A third embodiment of the present invention will be described with reference to FIG. 9A and 9B show a slider shape according to the third embodiment of the present invention, wherein FIG. 9A is a perspective view, FIG. 9B is a plan view, and FIG. 9C is a side view.

According to the above-described second embodiment, the rolling of the styler 203a on the outer peripheral side of the disk can be prevented, but the notches 25a, 2b are formed on the side of the rear dynamic pressure generating section 2b.
The provision of 5b lowers the dynamic pressure at that portion, so that the rolling rigidity of slider 203a is slightly reduced. Thus, in the present embodiment, steps 6a, 6b substantially along the disk rotation direction A are provided on the side of the rear dynamic pressure generating portion 2b.
Steps 7a and 7b along a direction substantially perpendicular to the rotation direction A
Notches 26a and 26b are formed so as to be provided. According to this configuration, the same effect as in the above-described second embodiment is generated, and a positive pressure is generated by the steps 7a and 7b, so that a predetermined dynamic pressure in the rear dynamic pressure generation unit 2b is secured. In addition, the pressure distribution near both sides can be increased, and the rolling rigidity of the slider 203a can be maintained high.

FIG. 10 shows a pressure distribution in a direction substantially perpendicular to the rotating direction of the disk (slider width direction) in the rear dynamic pressure generating section. In the figure, D1 is a pressure distribution when the dynamic pressure generating portion having the single flat surface shown in the first embodiment is shown, and D2 is a pressure distribution when the dynamic pressure generating portion according to the present embodiment is provided. It shows the respective distributions.

As shown in the figure, when a dynamic pressure generating portion having a single flat surface is provided, the pressure is highest at the center in the slider width direction, and the pressure gradually approaches the atmospheric pressure as approaching both ends. It becomes a pressure distribution. On the other hand, when the dynamic pressure generating unit according to the present embodiment is provided, the pressure distribution is high near the steps 7a and 7b and low near the center in the slider width direction. Therefore, the rear power generation unit 2
Even if the lifting force at b is the same, the shape of the dynamic pressure generating portion according to the present embodiment can obtain higher rolling rigidity.

On the other hand, compared to the single flat surface as shown in the first embodiment, the steps 7a, 7b
In the configuration according to the present embodiment, the rear dynamic pressure generating portion 2b can be formed shorter in the disk rotation direction, and the entire slider can be reduced in size. In addition to the above, it is possible to reduce the contact area of the rear dynamic pressure generating portion when the disk is stopped, so that it is possible to prevent the slider from sticking.

According to the present embodiment, the second
Similarly to the embodiment, the variation of the flying height can be suppressed by reducing the yaw angle dependency, and the flying height can be stabilized at the inner and outer circumferences of the disk. In this case, the rolling of the styler 203a can be prevented, and the rolling rigidity can be maintained high. Therefore, there is no possibility that the rear dynamic pressure generating portion 2b collides with the disk.

The step 4 in the front dynamic pressure generating section 2a and the step 6a newly provided in the present embodiment,
If the depths 6b, 7a, and 7b are the same and are formed by one etching, the production efficiency can be improved.

Fourth Embodiment A seventh embodiment of the present invention will be described with reference to FIG. FIGS. 11A and 11B show a slider shape according to a seventh embodiment of the present invention, wherein FIG. 11A is a perspective view, and FIG.
Is a plan view, and (c) is a side view.

The first feature of this embodiment resides in the adjustment of the anti-rolling function when the yaw angle is applied. In the slider shape according to the third embodiment described above, as one measure for realizing a desired spacing or contact force between the head and the disk, the slider is provided near the both sides of the rear dynamic pressure generating portion 2b. There is a method of adjusting the width (length in a direction substantially perpendicular to the disk rotation direction) of the steps 7a and 7b for generating the positive pressure. That is, if the width of the steps 7a and 7b is reduced, the spacing is reduced and the contact force is increased. On the other hand, if the width of the steps 7a and 7b is increased, the spacing is increased and the contact force is reduced.

However, when the widths of the steps 7a and 7b are adjusted, the steps 6a and 6b substantially in the disk rotation direction A from the center axis in the slider longitudinal direction (slider center axis) are inevitably.
The distance to the position where b is provided fluctuates, and such a step 6
A change occurs in the anti-rolling function (see the description of the third embodiment) provided by a and 6b. Therefore, when the width of the steps 7a and 7b is set to obtain a predetermined spacing or contact force, the effect of preventing the rolling becomes too remarkable, and the slider 203a has a larger diameter inside the disk on the outer peripheral side where the yaw angle becomes large. In some cases, the outer peripheral side Sin approaches the disk and the outer peripheral side Sout of the disk rolls away from the disk.

In particular, when the magnetic poles 21 are arranged close to the side of the slider 203a as in the present embodiment, there is a large problem of rolling variations due to torsion of the suspension (not shown) and errors in the pivot position. Therefore, it is necessary to improve the rolling rigidity of the slider 203a.
It is desirable that the steps 7a and 7b for generating the positive pressure be formed as close to the side end of the slider 203a as possible. Therefore, steps 6a, which exhibit a rolling prevention function,
6b inevitably tends to move away from the center axis of the slider, and the effect of preventing rolling tends to be remarkable.

Therefore, in the present embodiment, as a solution in such a case, in the rear dynamic pressure generating portion 2b, a step is taken between the steps 6a and 6b substantially along the disk rotation direction A.
In order to form the steps Xa and Xb disposed opposite to each other, a cutout portion 81 is newly provided. The notches 81a and 81b are formed by, for example, etching.

As described above, when the yaw angle is applied on the outer peripheral side of the disk, a positive pressure is generated at the step 6a and a negative pressure is generated at the step 6b due to the air flow. The rolling moment determined by the product of the pressure and the distance from the center axis of the slider to the position where the steps 6a and 6b are provided, causes the slider 203a to have a disk outer side Sou.
Rolling occurs so that t departs from the disk and the disk inner peripheral side Sin approaches the disk.

On the other hand, the steps Xa and Xb have the opposite effect. That is, the negative pressure is applied to the step Xa,
b, a positive pressure is generated, and the slider 203a
Rolling occurs such that the outer peripheral side Sout of the disk approaches the disk and the inner peripheral side Sin of the disk moves away from the disk.

Therefore, steps Xa, X
By appropriately selecting the distance to the position where b is provided, an appropriate rolling moment can be generated, so that the above-described anti-rolling function can be adjusted.

Next, the second feature of the present embodiment, that is, improvement in rigidity due to the effect of negative pressure will be described. In the present embodiment, the provision of the cutout 81 forms a step W facing the front edge of the rear dynamic pressure generating portion 2b. As a result, a negative pressure is generated in a region surrounded by the steps Xa, W, and Xb. Since the rear dynamic pressure generating section 2a has a small floating amount, the negative pressure can be effectively generated even if the step W is shallow.

The following effects are produced by the action of the negative pressure. First, the positive pressure generated by the steps 7a and 7b can be further increased without changing the spacing in the vicinity of the magnetic pole 21, and the rolling rigidity can be improved.

Further, if the positive pressure can be increased as described above, the spring rigidity (rigidity for supporting the slider in the direction perpendicular to the disk) can inevitably be improved. As described above, if the spring rigidity in the rear dynamic pressure generating portion 2b provided with the magnetic poles 21 is increased, it is advantageous in the following points. First, if the load applied to the slider 203a from the suspension varies due to a manufacturing error of the suspension or the like, the flying height of the slider 203a fluctuates. If the spring rigidity is high, the fluctuation of the flying height can be suppressed to a small value. Also, as the atmospheric pressure fluctuates due to changes in the use environment, etc., the slider 2
Although the flying height of 03a fluctuates, if the spring stiffness is high, the fluctuation of the flying height can be suppressed small.

According to the present embodiment described above, similarly to the third embodiment described above, it is possible to suppress the transient fluctuation of the flying height by reducing the yaw angle dependency, and to reduce the variation in the inner and outer circumferences of the disk. The constant flying height can be realized, the rolling of the styler 203a on the outer peripheral side of the disk can be more effectively prevented, the rolling rigidity can be maintained high, and the spacing or spacing between the slider and the disk can be improved. It is possible to stabilize the contact force.

Further, in the present embodiment, when forming the deep groove 3 after forming a step or the like, the size of the land portion 5 formed in the front dynamic pressure generating portion 2a varies, The dynamic pressure generation unit 2
A margin 10 is set near the deep groove 3 of FIG. In this configuration, the margin 10 is not included in the total length of the front dynamic pressure generating portion 2a in the disk rotation direction A. Here, a main cause of the dimensional error generated when forming the deep groove 3 is a thickness error of a blade used for processing. On the other hand, among the front and rear dynamic pressure generating units 2a and 2b, the rear dynamic pressure generating unit 2b has a small influence of the flying height variation due to the dimensional error, and therefore the front end and the blade end of the rear dynamic pressure generating unit 2b. If you accurately position the part
It is sufficient that the margin 10 is provided only at the rear end of the front dynamic pressure generating section 2a. However, a margin may be similarly provided at the front edge of the rear dynamic pressure generating portion 2b (not shown).

A plurality of sliders 203a are usually formed at the same time with their side surfaces connected to each other, and are finally divided by cutting the side surfaces. Therefore, in the present embodiment, the margin 11 is also set near the side of each dynamic pressure generating portion so that a defect such as a chip does not occur at the edge of the land portion 5 when cutting is performed.

In this embodiment, the steps Xa, X
If b and W are set to the same depth as the steps 6a, 6b, 7a, 7b, the notches 81a, 81b can be formed simultaneously with the notches 26a, 26b, etc. in one step, thereby improving the manufacturing efficiency. It is possible to do.

Fifth Embodiment A fifth embodiment of the present invention will be described with reference to FIG. FIGS. 12A and 12B show a slider shape according to a fifth embodiment of the present invention. FIG. 12A is a perspective view, and FIG.
Is a plan view, and (c) is a side view.

This embodiment shows a slider having a crown provided in the fourth embodiment. In the present embodiment, the entire surface is formed to be convex toward the disk so that the surfaces of the front dynamic pressure generating portion 2a and the rear dynamic pressure generating portion 2b do not come on the same plane. It is characterized by the following (see FIG. 12 (c)). That is, the crown is formed by curving the shape of the surface of the slider 203a facing the disk, for example, in accordance with an elliptical cylindrical or cylindrical locus.

As means for realizing such a structure,
There are methods used for ordinary sliders, that is, selecting conditions for attaching a suspension, and releasing a surface tension by providing a scratch on the abdominal surface of the slider.

Although not shown, the front dynamic pressure generating section 2
By laminating a film on the rear part of a and on the front part of the dynamic pressure generating part 2b on the rear side, it is also possible to make the shape convex toward the disk.

Further, the front dynamic pressure generating section 2a is inclined from the front to the rear so as to approach the disk, and the rear dynamic pressure generating section 2b is inclined from the front to the rear and away from the disk. Thereby, it is also possible to make the shape convex to the disk side as a whole.

According to such a configuration, the angle of attack is formed on the front dynamic pressure generating portion 2a, so that the effect as a dynamic pressure bearing is increased and the pitching is increased. If the pitching is large, even if dust enters the gap between the slider 203a and the disk during the rotation of the disk, the dust hardly adheres to the front dynamic pressure generating portion 2a, and even if it adheres to the rear dynamic pressure generating portion 2b. Thus, there is little danger that the slider 203a will bend forward, and stable flying or contact can be achieved.

Further, according to such a configuration, the contact portion between the slider 203a and the disk when the disk is stopped becomes the rear end of the front dynamic pressure generating portion 2a and the front end of the rear dynamic pressure generating portion 2b. Also, there is an advantage that the adsorption is less likely to occur.

Further, according to such a configuration, it is possible to suppress the fluctuation of the flying height caused by the load fluctuation and the atmospheric pressure fluctuation described above. When the load pressing the slider 203a in the disk direction is larger than a predetermined value or when the atmospheric pressure is reduced, the flying height of the front dynamic pressure generating unit 2a is reduced, and the pitching is also reduced. Accordingly, the flying height of the rear dynamic pressure generating portion 2b is reduced due to the pitching dependency (the property that the floating force acting on the slider depends on the pitching difference). However, when the angle of attack is attributable to the crown, the rate of decrease in pitching is small, so that the floating amount in the rear dynamic pressure generating portion 2b is unlikely to decrease, and the floating amount can be stabilized. .

Sixth Embodiment A sixth embodiment of the present invention will be described with reference to FIG. FIGS. 13A and 13B show a slider shape according to a sixth embodiment of the present invention. FIG. 13A is a perspective view, and FIG.
Is a plan view, and (c) is a side view.

This embodiment is a modification of the above-described fifth embodiment, and includes the front and rear dynamic pressure generating sections 2a,
The disk is characterized in that the entire surface of the slider 203a facing the disk, including the deep groove 3 partitioning 2b, is processed by milling. In each of the above embodiments, since the deep groove 3 is formed by machining, the rear edge of the front dynamic pressure generating portion and the front edge of the rear dynamic pressure generating portion are formed flush with each other. According to this, such a shape can be arbitrarily formed.

In this embodiment, in particular, by providing the convex portion 31 at the front edge of the rear dynamic pressure generating portion, the steps Xa, W,
The area of the notch 81 surrounded by Xb is expanded.
Here, the area of the notch 81 is an element that determines the value of the negative pressure generated behind the step W. Therefore, by appropriately adjusting the shape of the convex portion 31, the value of the negative pressure can be adjusted independently of the value of the positive pressure generated at the steps 7a and 7b, and the degree of freedom in design is greatly improved. be able to. That is, if the area of the notch 81 can be expanded as in the present embodiment, it is possible to generate a larger negative pressure, so that it is possible to design the steps 7a and 7b to generate a larger positive pressure. In addition, the rolling rigidity and the spring rigidity of the rear dynamic pressure generating portion 2b can be improved.

In this embodiment, the slider 203a
Are chamfered by milling. This makes it easy to avoid the danger of the slider 203a colliding with the disk even if rolling fluctuations, pitching fluctuations or flying height fluctuations due to various factors occur. Further, an impact may be applied to the device, and the slider 203a may be once separated from the disk and damaged when the disk is grounded again. In particular, if the attitude at the time of grounding is not parallel to the disk, any one of the four corners 32 of the slider 203a may cause a sharp scratch on the disk. Therefore, chamfering the four corners 32 of the slider 203a also has the effect of preventing such damage to the disk.

In this embodiment, the steps 4, 6a,
If 6b, 7a, 7bXa, Xb, and W have the same depth and the chamfers of the deep groove 3 and the four corners 32 have the same depth, a notch or the like can be formed by milling twice, thereby improving manufacturing efficiency. It becomes possible.

Seventh Embodiment A seventh embodiment of the present invention will be described with reference to FIG. 14A and 14B show a slider shape according to a seventh embodiment of the present invention. FIG. 14A is a perspective view, and FIG.
Is a plan view, and (c) is a side view.

This embodiment is a modification of the above-described sixth embodiment. By providing a convex portion 31 at the front edge of the rear dynamic pressure generating portion, the present embodiment can reduce the steps Xa, W, and Xb. By enlarging the area of the notch 81 surrounded and providing the convex portions 41a and 41b together, the step 7
cutouts 26a, 2 provided to form a, 7b
6b is extended. Here, the notches 26a, 2
The area 6b is an element that determines the value of the positive pressure generated in the vicinity of the steps 7a and 7b, or the behavior of the positive pressure accompanying a change in the peripheral speed of the disk or the pitching of the slider. Therefore, the ability to appropriately adjust the shape of the front edge of the rear dynamic pressure generating portion 2b is effective in the following points.

First, by appropriately adjusting the shapes of the convex portions 41a and 41b provided on the front edge of the rear dynamic pressure generating portion 2b, the lengths of the steps 6a and 6b in the disk rotation direction and the steps 7a and 7b are formed. Notch 2 provided for
The areas 6a and 26b can be set independently. That is, the rolling prevention function obtained by the steps 6a and 6b and the positive pressure generating function by the steps 7a and 7b can be independently adjusted, and the degree of freedom in design can be greatly improved.

Also, the value of the positive pressure generated at the steps 7a and 7b can be adjusted independently from the relationship with the negative pressure generated behind the step W. Eighth Embodiment An eighth embodiment of the present invention will be described with reference to FIG.

FIG. 15 shows a slider shape according to an eighth embodiment of the present invention.
(B) is a plan view, and (c) is a side view. In the present embodiment, steps 51a and 51b are formed along the rotation direction of the disk by providing the lands 50a and 50b near the rear side end of the front dynamic pressure generating section 2a. In the notch 52 which is surrounded by the steps 51a and 51b and the rear edge of the front dynamic pressure generating portion 2a and opened to the deep groove 3 side,
Negative pressure is generated by the action of the airflow generated as the disk rotates. Here, the notch 52 is formed in the land 50.
Since both sides are formed so as to be surrounded by a and 50b, the negative pressure is efficiently generated without being reduced by being released to the atmospheric pressure at the side of the slider 203a.

The land portions 50a and 50b are formed flush with the land portion 5 provided in the front dynamic pressure generating portion 2a by the step 4.
Since the negative pressure can be effectively generated without increasing the surface area of the disk 03a against the disk surface, a general negative pressure slider is inferior in the suction effect, but is very advantageous in preventing such suction. .

On the other hand, when the deep groove 3 is formed by milling as in the sixth or seventh embodiment described above, the depth of the deep groove 3 is smaller than that of the machining, so that the rear dynamic pressure generating portion is formed. In some cases, the positive pressure generated at the leading edge of 2b cannot be ignored. For example, when the depth of the deep groove 3 by milling is set to 10 μm or less, as the peripheral speed increases from the inner circumference to the outer circumference of the disk, the positive pressure generated at the front edge of the rear dynamic pressure generating portion 2b increases, and There is a possibility that stabilization of the flying height in the circumference may be hindered.

Even in such a case, according to the configuration in which the negative pressure is generated behind the front dynamic pressure generating section 2a as in the present embodiment, it is possible to realize a constant flying height on the inner and outer circumferences of the disk. That is, the negative pressure generated in the notch 53 behind the front dynamic pressure generating portion 2a also has a property of increasing as the peripheral speed increases from the inner circumference to the outer circumference of the disk. It acts to cancel the positive pressure generated at the leading edge of the portion 2b, thereby realizing a constant flying height on the inner and outer circumferences of the disk.

Further, according to the configuration of the present embodiment, it is easy to set a small suspension load, which is the sum of the positive pressure and the negative pressure. Ninth Embodiment A ninth embodiment of the present invention will be described with reference to FIG.

FIG. 16 shows a slider shape according to a ninth embodiment of the present invention. FIG.
(B) is a plan view, and (c) is a side view. In the present embodiment, the extension lands 60a and 60b extending in the direction opposite to the disk rotation direction are provided near the side ends of the lands 5 formed in the front dynamic pressure generating portion 2a, so that the disk can be rotated in the disk rotation direction. Steps 61a and 61b are formed.

As described above, the magnetic pole 21 is
In the case where the slider 203a is arranged close to the side of 3a, variation in rolling caused by torsion of a suspension (not shown) or an error in the pivot position poses a serious problem. Therefore, it is necessary to improve the rolling rigidity of the slider 203a. Therefore, the steps 7a and 7b for generating the positive pressure in the rear dynamic pressure generating section 2b are
It is desirable to form it in the vicinity of the side end of 03a. Therefore, the steps 6a and 6b exhibiting the anti-rolling function (see the description of the third embodiment) necessarily tend to be farther from the center axis of the slider, and the anti-rolling effect tends to be remarkable.

According to this embodiment, when the disk has a yaw angle on the outer peripheral side, a negative pressure is generated at the step 61a and a positive pressure is generated at the step 61b. It can be adjusted.

Further, the extension land is extended in the direction opposite to the rotation direction of the disk, and the sides of the step 4 are connected to the steps 61a, 61a.
By surrounding with b, the horizontal leakage of the air flow is reduced and the positive pressure can be efficiently generated at the step 4, so that the pitching of the slider 203a can be increased.

Tenth Embodiment FIGS. 17 and 18 show a tenth embodiment of the present invention.
This will be described with reference to FIG.

FIGS. 17A and 17B show a slider shape according to a ninth embodiment of the present invention. FIG.
(B) is a plan view, and (c) is a side view. This embodiment is a combination of the eighth and ninth embodiments. According to such a configuration, it is also possible to form the slider 203a that satisfies the effects of both embodiments at the same time.

FIG. 18 shows a modification of the slider shape according to the tenth embodiment of the present invention.
(A) is a perspective view, (b) is a plan view, and (c) is a side view. In the present embodiment, the extension land portions 60a and 60b are
It extends in the rotation direction of the disk so as to overlap the negative pressure generating lands 50a and 50b provided behind the front dynamic pressure generating portion 2a.

With such a structure, the slider 2 simultaneously satisfying the effects of the eighth and ninth embodiments described above.
03a can also be formed. The length of the negative pressure generating lands 50a, 50b in the disk rotation direction is an element that determines the value of the generated negative pressure, and the length of the extended lands 60a, 60b in the same direction is: This is a factor that determines the degree of adjustment of the anti-rolling effect.
Therefore, each length is appropriately determined according to each function.

Eleventh Embodiment An eleventh embodiment of the present invention will be described with reference to FIG. FIGS. 19A and 19B show a slider shape according to an eleventh embodiment of the present invention. FIG.
(B) is a plan view, and (c) is a side view.

The present embodiment is characterized in that the depths of the steps Xa, W, and Xb are the same as or similar to the depth of the deep groove 3. The negative pressure generated by such a deep step W is relatively small on the inner peripheral side of the disk and increases as it goes toward the outer peripheral side of the disk.

As described above, when the deep groove 3 is formed by milling, since the depth of the deep groove 3 is smaller than that of the machining, the positive pressure generated at the front edge of the rear dynamic pressure generating portion 2b is reduced. May not be ignored. For example, when the depth of the deep groove 3 by milling is set to 10 μm or less, as the peripheral speed increases from the inner circumference to the outer circumference of the disk, the positive pressure generated at the front edge of the rear dynamic pressure generating portion 2b increases, and There is a possibility that stabilization of the flying height in the circumference may be hindered.

However, according to the present embodiment, the negative pressure generated behind the step W also has the property of increasing as the peripheral speed increases from the inner circumference to the outer circumference of the disk. It acts so as to cancel the positive pressure generated at the leading edge of the generating portion 2b, thereby realizing a constant flying height on the inner and outer circumferences of the disk.

Further, according to the present embodiment, in the low peripheral speed region at the time of starting the disk, since the generated negative pressure is small, it is expected that the slider 203a can take off from the disk relatively quickly.

If the depths of the steps Xa, W, Xb are the same as the depth of the deep groove 3, a cutout or the like can be formed by milling twice as in the other embodiments, and the production efficiency is improved. It becomes possible.

Twelfth Embodiment A twelfth embodiment of the present invention will be described with reference to FIG. FIG. 20 shows a slider shape according to a twelfth embodiment of the present invention, where (a) is a perspective view,
(B) is a plan view, and (c) is a side view.

This embodiment is a modification of the above-described eleventh embodiment, in which the rear dynamic pressure generation unit 2b
The notch 70 is formed by applying shallow milling to a portion sandwiched between the front edge of the step S and the step W. According to such a configuration, it is possible to optimize the negative pressure generating efficiency of both the negative pressure generating section provided behind the front dynamic pressure generating section 2a and the negative pressure generating section provided on the rear dynamic pressure generating section 2b. Becomes possible.

Here, the generation efficiency of the negative pressure will be described with reference to FIG. FIGS. 21A and 21B are diagrams illustrating the generation efficiency of a negative pressure. FIG. 21A illustrates the case of the slider shape according to the eleventh embodiment, and FIG. 21B illustrates the case of the slider shape according to the present embodiment. Is shown.

In general, the efficiency of generating the negative pressure depends on the narrow gap (S1, S3) between the front surface of the step W, 71 for generating the negative pressure and the disk surface, and the steps W, 71 for generating the negative pressure.
Wide gap between the rear surface of the disk and the disk surface (S2, S
4). Therefore, as shown in FIG. 21A, in the slider shape according to the eleventh embodiment, when pitching occurs in the slider 203a,
Since the above ratio in the negative pressure generating section behind the front dynamic pressure generating section 2a and the same ratio in the negative pressure generating section provided in the rear dynamic pressure generating section 2b are different, any one of the negative pressure generating sections is different. If the efficiency is optimized, the other negative pressure generation efficiency cannot be optimized.

On the other hand, as shown in FIG. 21 (b), according to the present embodiment, even if pitching occurs in the slider 203a, the forward movement can be achieved by appropriately adjusting the depth of the notch 70. The above ratio can be the same in both the negative pressure generating section provided behind the pressure generating section 2a and the negative pressure generating section provided in the rear dynamic pressure generating section 2b. Therefore, according to the present embodiment, it is possible to optimize the negative pressure generation efficiency in both the negative pressure generating units. As a result, the characteristics of the negative pressure slider, such as high air film rigidity and quick takeoff from the disk, can be maximized.

Further, the provision of the notch 70 makes it difficult to generate a positive pressure dependent on the peripheral speed at the leading edge of the rear dynamic pressure generating portion 2b, so that the flying height on the outer peripheral side of the disk tends to increase. It can also be suppressed.

Note that the depth of the notch 70 is adjusted by the steps 4, 6a, 6
If it is the same as b, 7a, and 7b, the cutout portion 70 can be formed by milling twice as in the other embodiments, and the manufacturing efficiency can be improved.

Thirteenth Embodiment A thirteenth embodiment of the present invention will be described with reference to FIG. FIG. 22 shows a slider shape according to a thirteenth embodiment of the present invention.
(B) is a plan view, and (c) is a side view.

In the present embodiment, a notch 75 for forming a step Z deeper than the step 4 is formed in front of the step 4 of the front dynamic pressure generating portion 2a. The effect obtained by providing such a deep step Z will be described with reference to FIG. FIGS. 23A and 23B show the rising characteristics of the slider when the disk is started by pitching and spacing of the rear end of the slider. FIG. 23A shows the case of a slider shape without a deep groove Z, and FIG. Each of such slider shapes is shown.

As shown in FIG. 23 (a), when the deep step Z is not provided, a large levitation force is generated in the front dynamic pressure generating portion while the peripheral speed of the disk is extremely low.
Sufficiently large pitching is realized at a relatively early stage from the start of the disk, which is very effective in preventing instability of the slider due to pitching fluctuation. On the other hand, if the pitching is sufficiently large at an early stage, the front of the slider is lifted while the rear end of the slider is in contact, so that the gap between the disk and the front edge of the rear dynamic pressure generating portion increases. Therefore, the timing at which the rear end of the slider takes off from the disk is slightly delayed.

As shown in FIG. 23 (b), when a deep step Z is provided as in this embodiment, the levitation force generated in the front dynamic pressure generating portion gradually changes according to the peripheral speed of the disk. Characteristics. Accordingly, although the time until sufficient pitching is realized is somewhat delayed, the timing at which the slider rear end takes off from the disk can be advanced accordingly.

Here, in order to appropriately adjust the time until sufficient pitching is realized and the timing at which the rear end of the slider takes off from the disk, the area of the notch 70 forming the step Z may be adjusted. . That is, if the area of the notch 75 is large, a gentle pitching rise and a quick takeoff of the rear end of the slider are realized, and if the area of the notch 75 is small, a rapid rise of pitching is realized.

When the notches 75 are provided, if the steps 76a and 76b are formed as shown in FIG. 22, it is possible to adjust the rolling prevention effect as described in the ninth embodiment. The effect of increasing pitching can also be exhibited.

If the depths of the steps Z, 76a, 76b and the depth of the deep groove 3 are the same, the cutout portion 75 can be formed by milling twice as in the other embodiments, and the production efficiency can be reduced. It can be improved.

Fourteenth Embodiment A fourteenth embodiment of the present invention will be described with reference to FIG. FIGS. 24A and 24B show a slider shape according to a fourteenth embodiment of the present invention. FIG.
(B) is a plan view, (c) is a side view, and (d) is a side view when the slider is grounded on the disk.

In this embodiment, a protruding portion 2c is provided between the front dynamic pressure generating portion 2a and the rear dynamic pressure generating portion 2b. The disk facing surface of the protruding portion 2c has a configuration in which both sides are retracted so that the ground pad 90 is formed substantially at the center in a direction substantially perpendicular to the disk rotation direction A. Here, the protruding portion 2c is formed by providing the deep grooves 3a and 3b by machining or etching. In addition, the ground pad 90 is formed by masking that portion and retreating both sides by etching.

In this embodiment, of the ground pads 90 provided on the land portions 5 and 9 provided on the front and rear dynamic pressure generating portions 2a and 2b and the protruding portion 2c located therebetween, the ground pad 90 is the most common. It is configured to protrude toward the disk. To achieve such a configuration, a surface other than the ground pad 90 is retracted by etching or the like, and a crown (the disk-facing surface of the slider is formed in a convex shape toward the disk so that the ground pad 90 is located near the vertex thereof). )
Or a means such as forming a thick protective film only on the portion of the ground pad 90 may be applied.

Here, as shown in FIG. 24D, if a load P is applied between the front dynamic pressure generating portion 2a and the protruding portion 2c by a suspension (not shown), the front dynamic pressure is generated. A land portion 5 provided on the portion 2a;
Only the contact pad 90 provided on the disk C is grounded on the disk 201 when the disk is stopped. Therefore, the rear dynamic pressure generating portion 2b provided with the magnetic pole 21 can be kept in a non-contact state with the disk 201, and
3a and the disk 201 can be reduced in contact area, and consequently the slider 203a and the disk 201 can be reduced.
Can be prevented from being adsorbed. In addition, if the rear dynamic pressure generating portion 2b can be kept in a non-contact state with the disk 201, dust such as abrasion powder generated at the time of starting the disk can be prevented from adhering near the magnetic pole 21.

The position where the load P is applied is not limited to the above case. For example, if a load P is applied between the rear dynamic pressure generating portion 2b and the protruding portion 2c, the front dynamic pressure generating portion 2a can be kept in a non-contact state with the disk 201. Disk 201
And the contact area between the slider 203a and the disk 201 can be prevented. If the position to which the load P is applied is appropriately selected, only the ground pad 90 can be grounded.

Here, the step 4 in the front dynamic pressure generating portion 2a and the retreat depth of the protrusion 2c newly provided for providing the ground pad 90 are set to the same depth, and are formed by one etching. By doing so, the manufacturing efficiency can be improved. Further, the present embodiment is not limited to the case shown in FIG. 24, and can be appropriately combined with the slider shapes shown in the above-described first to thirteenth embodiments. It is possible.

Fifteenth Embodiment A fifteenth embodiment of the present invention will be described with reference to FIG. FIGS. 25A and 25B show a slider shape according to an eighth embodiment of the present invention. FIG.
(B) is a plan view, and (c) is a side view.

In the present embodiment, the ground pad 90 is directly provided without providing the structure corresponding to the protrusion 2c provided in the fourteenth embodiment. Ground pad 90
Is formed by masking and leaving the portion when forming the deep groove 3 by milling. Further, the position at which the ground pad 90 is provided is not limited to the case shown in FIG. 25, and can be changed as appropriate, and the number of the ground pads 90 can be changed as appropriate. Also, the shape of the ground pad 90 can be arbitrarily designed.

For example, as shown in FIG. 26, a hollow semi-cylindrical shape may be used. According to such a configuration, as shown in FIG. 26 (d), it is possible to enlarge the grounding region without increasing the grounding area, to enable stable grounding, and to ground only the grounding pad 90. Also becomes easier. Therefore, according to such a configuration, the adsorption prevention effect can be further improved.

In the above, various embodiments have been described. In any case, the land 9 formed on the rear dynamic pressure generating portion 2b of the slider 203a has a symmetrical shape about the center axis in the longitudinal direction of the slider. Does not necessarily have to be symmetrical, but may be asymmetrical depending on the situation. Further, the combination of the front dynamic pressure generating section and the rear dynamic pressure generating section can be appropriately selected according to the design specifications of the slider, and is not limited to the above-described embodiment.

On the other hand, each of the above-described embodiments has a function of maintaining a constant flying height or contact force on the inner and outer circumferences of the disk irrespective of the yaw angle dependency.
The slider shape can be said to be a very suitable slider shape even when an R head is employed and seek is performed so that yaw angle fluctuation does not occur in order to prevent track deviation on the inner and outer circumferences of the disk.

[0127]

As described above, according to the present invention,
A head slider capable of suppressing the transient fluctuation of the flying height by reducing the yaw angle dependence and realizing the constant flying height at the inner and outer circumferences of the disk or the constant contact force between the head and the disk. Can be provided.

Also, by using the head slider according to the present invention, the flying height of the head slider can be reduced, or a low load and stable contact between the head and the disk can be achieved, so that the recording density can be improved. A possible recording / reproducing device can be provided.

[Brief description of the drawings]

FIG. 1 is a schematic diagram of a magnetic disk device as an example of a recording / reproducing device.

FIG. 2 is an explanatory diagram relating to a flying attitude of a slider.

FIG. 3 is a view showing the shape of a head slider according to the first embodiment of the present invention.

FIG. 4 is a diagram plotting the levitation force when the spacing at the rear end of the dynamic pressure generating section is constant with respect to the pitching of the rear dynamic pressure generating section.

FIG. 5 shows the ratio between the total length L of the front dynamic pressure generating portion in the disk rotation direction and the length S of the land portion in the same direction in the disk inner and outer circumferences when the spacing at the rear end of the slider is constant. The figure which plotted the ratio of levitation force.

FIG. 6 is a diagram showing the pitching of a slider with respect to the peripheral speed of a disk and a change in spacing at the rear end of a rear dynamic pressure generating portion provided with a head.

FIG. 7 is a diagram showing a shape of a modified example of the head slider according to the first embodiment of the present invention.

FIG. 8 is a diagram showing a shape of a head slider according to a second embodiment of the present invention.

FIG. 9 is a view showing a shape of a head slider according to a third embodiment of the present invention.

FIG. 10 is a diagram illustrating a pressure distribution in a direction (slider width direction) substantially perpendicular to a rotation direction of a disk in a rear dynamic pressure generating unit.

FIG. 11 is a view showing a shape of a head slider according to a fourth embodiment of the present invention.

FIG. 12 is a view showing the shape of a head slider according to a fifth embodiment of the present invention.

FIG. 13 is a view showing a shape of a head slider according to a sixth embodiment of the present invention.

FIG. 14 is a view showing the shape of a head slider according to a seventh embodiment of the present invention.

FIG. 15 is a view showing the shape of a head slider according to an eighth embodiment of the present invention.

FIG. 16 is a view showing the shape of a head slider according to a ninth embodiment of the present invention.

FIG. 17 is a diagram showing a shape of a head slider according to a tenth embodiment of the present invention.

FIG. 18 is a view showing a shape of a modified example of the head slider according to the tenth embodiment of the present invention.

FIG. 19 is a view showing the shape of a head slider according to an eleventh embodiment of the present invention.

FIG. 20 is a view showing the shape of a head slider according to a twelfth embodiment of the present invention.

FIG. 21 is a diagram illustrating the generation efficiency of a negative pressure.

FIG. 22 is a view showing the shape of a head slider according to a thirteenth embodiment of the present invention.

FIG. 23 is a diagram showing the rising characteristics of the slider at the time of starting the disk by pitching and spacing at the rear end of the slider.

FIG. 24 is a view showing a shape of a head slider according to a fourteenth embodiment of the present invention.

FIG. 25 is a view showing the shape of a head slider according to a fifteenth embodiment of the present invention.

FIG. 26 is a view showing a shape of a modified example of the head slider according to the fifteenth embodiment of the present invention.

FIG. 27 is a schematic diagram of a magnetic disk drive employing a conventional slider.

FIG. 28 is a perspective view schematically showing a conventional tapered flat slider.

FIG. 29 is an explanatory diagram of equivalent yaw angle fluctuation during seek.

[Explanation of symbols]

203a Head slider 2a, 2b Dynamic pressure generating part 3 Deep groove 4, 6a, 6b, 7a, 7b, 51a, 51b, 61
a, 61b, 76a, 76b, Xa, Xb, W, Z Steps 5, 9, 50a, 50b, Lands 60a, 60b Extended Lands 10, 11, Margins 20 Recording / Reproducing Head 21 Magnetic Poles 25a, 25b, 26a, 26b, 27a, 27b, 5
2,75,81 Notch

Claims (24)

[Claims] 1. A head slider equipped with a recording / reproducing head for recording / reproducing information on / from a disk which is a rotatable recording medium, the head slider being provided on a surface of the head slider facing the disk, and a rotating direction of the disk. At least two dynamic pressure generating portions having a shape that is longer in a direction substantially perpendicular to the rotation direction than a length along the rotation direction, and that are arranged with a deep groove therebetween in the rotation direction of the disk. A first step along a direction substantially perpendicular to the rotation direction is formed in the dynamic pressure generation section among the dynamic pressure generation sections that is located at the forefront in the rotation direction of the disk. A land portion provided near the side end of the land portion, and an extended land portion extending in the direction along the rotation direction to form a second step along the rotation direction. Provided Head slider, wherein the Rukoto. 2. A dynamic pressure generating section which is located rearmost in the rotational direction of the disk among the dynamic pressure generating sections,
2. The head according to claim 1, further comprising a first notch portion forming a third step substantially along the rotation direction and a fourth step substantially along a direction substantially perpendicular to the rotation direction. Slider. 3. A dynamic pressure generating portion located rearmost in the rotational direction of the disk among the dynamic pressure generating portions,
3. The head slider according to claim 2, further comprising a second notch that forms a fifth step facing the third step. 4. A dynamic pressure generating section which is located rearmost in the rotation direction of the disk among the dynamic pressure generating sections,
A fifth step facing the third step and a third notch forming a sixth step facing a front edge of the dynamic pressure generating portion facing the deep groove are provided. Item 2
The head slider as described in the above. 5. The length of the land portion in the rotation direction of the disk is greater than 10% and smaller than 50% of the total length in the rotation direction of the dynamic pressure generating portion located forward in the rotation direction. The head slider according to any one of claims 1 to 4, wherein: 6. The length of the land portion in the rotation direction of the disk is approximately 30% of the total length in the rotation direction of the dynamic pressure generating portion located forward in the rotation direction.
The head slider according to any one of claims 1 to 4, wherein the head slider has a length. 7. A head slider on which a recording / reproducing head for recording / reproducing information on / from a disk which is a rotatable recording medium is provided. The head slider is provided on a surface of the head slider facing the disk, and a rotation direction of the disk. At least two dynamic pressure generating portions having a shape that is longer in a direction substantially perpendicular to the rotation direction than a length along the rotation direction, and that are arranged with a deep groove therebetween in the rotation direction of the disk. A dynamic pressure generating portion which is located most rearward in the rotation direction of the disk among these dynamic pressure generation portions, has a first step substantially along the rotation direction and substantially perpendicular to the rotation direction. A first notch forming a second step substantially along the direction, a third step facing the first step, and a fourth step facing a front edge of the dynamic pressure generating section facing the deep groove. Notch forming step Doo is provided, the head slider, characterized in that the depth of the second notch substantially the same as the depth of the deep groove. 8. A negative pressure generating area is provided behind at least one trailing edge of at least one of the dynamic pressure generating sections other than the dynamic pressure generating section located rearmost in the rotation direction of the disk. 8. The head slider according to claim 7, wherein the head slider is provided. 9. A portion sandwiched between a front edge of the dynamic pressure generating portion, which is located rearmost in the rotational direction of the disk, of the dynamic pressure generating portion and the fourth step facing the front edge. And a third notch.
Or a head slider according to claim 8. 10. A fifth step along a direction substantially perpendicular to the rotation direction of the disk is formed in the dynamic pressure generation unit located at the foremost position in the rotation direction of the disk among the dynamic pressure generation units. A land portion is provided, and the length of the land portion in the rotation direction is set to a length greater than 10% and smaller than 50% of the total length of the dynamic pressure generating portion in the rotation direction. Item 10. A head slider according to any one of Items 9 to 13. 11. A fourth step along a direction substantially perpendicular to the rotation direction of the disk is formed in the dynamic pressure generation unit located at the foremost position in the rotation direction of the disk among the dynamic pressure generation units. 10. A land portion is provided, and a length of the land portion in the rotation direction is set to be approximately 30% of a total length of the dynamic pressure generating portion in the rotation direction. A head slider according to any of the claims. 12. A head slider equipped with a recording / reproducing head for recording / reproducing information on / from a disk which is a rotatable recording medium, the head slider being provided on a surface of the head slider facing the disk, and a rotating direction of the disk. At least two dynamic pressure generating portions having a shape that is longer in a direction substantially perpendicular to the rotation direction than a length along the rotation direction, and that are arranged with a deep groove therebetween in the rotation direction of the disk. A first step along a direction substantially perpendicular to the rotation direction is formed in the dynamic pressure generation section among the dynamic pressure generation sections that is located at the forefront in the rotation direction of the disk. And a second step provided in the rotation direction ahead of the first step and deeper than the step and along a direction substantially perpendicular to the rotation direction. Set in First head slider, characterized in that a notch is provided for. 13. A dynamic pressure generating portion located rearmost in the rotational direction of the disk among the dynamic pressure generating portions,
13. The head according to claim 12, further comprising a first notch that forms a third step substantially along the rotation direction and a fourth step substantially along a direction substantially perpendicular to the rotation direction. Slider. 14. A dynamic pressure generating portion located rearmost in the rotational direction of the disk among the dynamic pressure generating portions,
14. The head slider according to claim 13, further comprising: a second notch that forms a fifth step facing the third step. 15. A dynamic pressure generating unit located rearmost in the rotation direction of the disk among the dynamic pressure generating units,
A fifth step facing the third step and a third notch forming a sixth step facing a front edge of the dynamic pressure generating portion facing the deep groove are provided. Item 1
3. The head slider according to 3. 16. The length of the land portion in the rotation direction of the disk, which is greater than 10% and less than 50% of the total length in the rotation direction of the dynamic pressure generating portion located forward in the rotation direction. The head slider according to any one of claims 12 to 15, wherein: 17. The length of the land in the rotation direction of the disk is set to be approximately 30 times the total length in the rotation direction of the dynamic pressure generating portion positioned most forward in the rotation direction.
The head slider according to any one of claims 12 to 15, wherein the length of the head slider is set to be 0.1%. 18. A head slider on which a recording / reproducing head for recording / reproducing information on / from a disk which is a rotatable recording medium is provided. The head slider is provided on a surface of the head slider facing the disk, and a rotation direction of the disk. At least two dynamic pressure generating portions arranged with a deep groove therebetween along with, and a negative pressure generating step provided at least two behind these dynamic pressure generating portions, wherein the negative pressure generating step Wherein at least one of the dynamic pressure generating units has an opposing surface that contacts the disk when the disk is stationary, and the other dynamic pressure generating unit has an opposing surface that retreats from the disk when the disk is stationary. And head slider. 19. A disk as a rotatable recording medium, a recording / reproducing head for recording / reproducing information on / from the disk, a head slider mounting the recording / reproducing head, and a head slider supporting the head slider and supporting the head slider. A recording / reproducing apparatus comprising: an actuator for moving the disk, wherein the head slider has a length along a direction substantially perpendicular to the rotational direction of the disk more than a length along the rotational direction of the disk on a surface facing the disk. The disk has a longer shape, and has at least two dynamic pressure generating portions arranged with a deep groove therebetween along the rotation direction of the disk. And a land portion provided by forming a first step along a direction substantially perpendicular to the rotation direction, And an extension land portion provided at a side end of the door portion and extending in a direction along the rotation direction to form a second step along the rotation direction. Playback device. 20. A disc which is a rotatable recording medium, a recording / reproducing head for recording / reproducing information on / from the disc, a head slider on which the recording / reproducing head is mounted, and A recording / reproducing apparatus comprising: an actuator for moving the disk, wherein the head slider has a length along a direction substantially perpendicular to the rotational direction of the disk more than a length along the rotational direction of the disk on a surface facing the disk. The groove has a longer shape, and has at least two dynamic pressure generating portions arranged with a deep groove therebetween along the rotational direction of the disk, and among these dynamic pressure generating portions, the most with respect to the rotational direction of the disk. A first step substantially along the rotation direction and a second step substantially along a direction substantially perpendicular to the rotation direction are formed in the dynamic pressure generation unit located rearward. Second forming a first notch, a fourth step facing the third step and the front edge of the animal pressure generating portion in which the facing deep groove which faces the first step
Wherein the depth of the second notch is substantially equal to the depth of the deep groove. 21. A negative pressure generating area behind at least one trailing edge of at least one of the dynamic pressure generating units except for the dynamic pressure generating unit located rearmost in the rotation direction of the disk among the dynamic pressure generating units. 3. The device according to claim 2, wherein
0. The recording / reproducing apparatus according to 0. 22. A portion sandwiched between a front edge of a dynamic pressure generating portion located most rearward in the rotation direction of the disk in the dynamic pressure generating portion and the fourth step facing the front edge. 22. The recording / reproducing apparatus according to claim 20, wherein a third notch is provided. 23. A disk which is a rotatable recording medium, a recording / reproducing head for recording / reproducing information on / from the disk, a head slider mounting the recording / reproducing head, and a head slider supporting the head slider and supporting the head slider. A recording / reproducing apparatus comprising: an actuator for moving the disk, wherein the head slider has a length along a direction substantially perpendicular to the rotational direction of the disk more than a length along the rotational direction of the disk on a surface facing the disk. The disk has a longer shape, and has at least two dynamic pressure generating portions arranged with a deep groove therebetween along the rotation direction of the disk. And a land portion provided by forming a first step along a direction substantially perpendicular to the rotation direction; And a first notch provided to form a second step deeper than the step and along a direction substantially perpendicular to the rotation direction. A recording / reproducing device, which is provided. 24. A disk which is a rotatable recording medium, a recording / reproducing head for recording / reproducing information on / from the disk, a head slider on which the recording / reproducing head is mounted, and A recording / reproducing apparatus comprising: an actuator for moving the head slider; and at least two dynamic pressure generating units provided on a surface of the head slider facing the disk, and arranged with a deep groove therebetween in a rotation direction of the disk. A step for generating a negative pressure provided at least two behind these dynamic pressure generating sections, and at least one of the dynamic pressure generating sections having the step for generating the negative pressure is provided on the disk when the disk is stationary. Wherein the other dynamic pressure generating portion has an opposing surface which is receded from above the disk when the disk is stationary. Reproducing apparatus.