JPH10265973A - Production of copper alloy material for electronic parts having good silver plating property - Google Patents

Production of copper alloy material for electronic parts having good silver plating property

Info

Publication number
JPH10265973A
JPH10265973A JP7567997A JP7567997A JPH10265973A JP H10265973 A JPH10265973 A JP H10265973A JP 7567997 A JP7567997 A JP 7567997A JP 7567997 A JP7567997 A JP 7567997A JP H10265973 A JPH10265973 A JP H10265973A
Authority
JP
Japan
Prior art keywords
copper alloy
alloy material
silver plating
sulfuric acid
hydrogen peroxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7567997A
Other languages
Japanese (ja)
Inventor
Satoshi Maruo
聡 丸尾
Masaaki Isono
誠昭 磯野
Hiroshi Sakamoto
浩 坂本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP7567997A priority Critical patent/JPH10265973A/en
Publication of JPH10265973A publication Critical patent/JPH10265973A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)
  • ing And Chemical Polishing (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a copper alloy material capable of being directly and excellently plated with silver without applying a substrate plating by pickling the copper alloy material contg. Fe with an aq. acidic soln. contg. sulfuric acid, an oxidizing agent and ethylene glycol in specified concn. at least after final annealing. SOLUTION: The oxide of Fe is completely dissolved in an aq. acidic soln. contg. sulfuric acid, an oxidizing agent and 1 to 100 g/l ethylene glycol, and its redeposition is effectively prevented by the soln. Hydrogen peroxide and a persulfate are preferably used as the oxidizing agent. When sulfuric acid is combined with hydrogen peroxide, the sulfuric acid concn. is controlled to 100 to 500 g/l and the hydrogen peroxide concn. to 5 to 100 g/l from the standpoint of etching power and economy. While both concns. are controlled in such a range, the molar ratio (sulfuric acid/hydrogen peroxide) is adjusted to >=0.35. Meanwhile, pickling is preferably carried out in the aq. acidic soln. at 20 to 70 deg.C for 1 to 300 sec to sufficiently improve the silver plating property.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、良好な銀めっき性
を有する電子部品用銅合金材の製造方法に関し、詳細に
は、リードフレームや端子、コネクタ等の電子部品に用
いられるFe含有銅合金材を対象として良好な銀めっき性
を得るための表面処理方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a copper alloy material for electronic parts having good silver plating properties, and more particularly, to a Fe-containing copper alloy used for electronic parts such as lead frames, terminals and connectors. The present invention relates to a surface treatment method for obtaining good silver plating properties for a material.

【0002】[0002]

【従来の技術】IC、 LSIのアセンブリ工程においては銀
めっきしたリードフレームに半導体を搭載するダイボン
ディングが行われる。このダイボンディングでは、加温
した銀めっきアイランド部に置いたはんだを溶融させて
半導体チップを接合する。半導体チップをリードフレー
ムに完全に接合するには溶融したはんだが十分に拡がら
なければならない。つまり、はんだ濡れ性の良い銀めっ
きが必要となる。そしてそのためには、銀めっきの銀の
結晶粒が大きく粗い方が好ましい。これは、結晶粒が粗
い方が毛細管現象により、溶融したはんだが拡がりやす
いためである。このような結晶粒が大きくて粗い銀めっ
きを得るために、めっきメーカーではめっき条件を厳し
く制御している。
2. Description of the Related Art In the process of assembling ICs and LSIs, die bonding for mounting a semiconductor on a silver-plated lead frame is performed. In this die bonding, the semiconductor chip is joined by melting the solder placed on the heated silver plating island portion. In order to completely join the semiconductor chip to the lead frame, the molten solder must spread sufficiently. That is, silver plating having good solder wettability is required. For that purpose, it is preferable that the silver crystal grains of silver plating are large and coarse. This is because the molten solder tends to spread due to the capillary phenomenon when the crystal grains are coarse. In order to obtain such coarse silver plating with large crystal grains, plating manufacturers strictly control plating conditions.

【0003】一方、半導体リードフレームの材料には、
Fe, P, Ni, Si, Sn 等の元素を添加した銅合金が使われ
ている。中でもFeやFe2Pを析出させた銅合金は導電性や
強度に優れ、電子部品用として広く使用されている。こ
のFe含有銅合金材は、溶解鋳造、熱間圧延と言った工程
を経た後、冷間圧延と中間焼鈍を繰り返し、製造されて
いる。
On the other hand, materials for semiconductor lead frames include:
Copper alloys to which elements such as Fe, P, Ni, Si, and Sn are added are used. Among them, copper alloys on which Fe or Fe 2 P is precipitated have excellent conductivity and strength, and are widely used for electronic parts. This Fe-containing copper alloy material is manufactured by repeating cold rolling and intermediate annealing after passing through steps such as melting casting and hot rolling.

【0004】[0004]

【発明が解決しようとする課題】ところで、上述した銀
めっきは、通常銀めっき前に銅下地めっきを施して行わ
れているが、最近、コストダウンの目的から銀めっき前
の銅下地めっきを省くことが検討されている。ところ
が、銀めっきは下地の影響を受けやすく、特に、銅合金
表面に存在する微量元素、析出物、晶出物、酸化物など
の影響を受けて銀めっきの析出形態が変化することがあ
る。
By the way, the above-mentioned silver plating is usually performed by applying a copper base plating before the silver plating, but recently, for the purpose of cost reduction, the copper base plating before the silver plating is omitted. That is being considered. However, silver plating is susceptible to the influence of the underlayer, and in particular, the precipitation form of silver plating may change due to the influence of trace elements, precipitates, crystallization, oxides, and the like present on the copper alloy surface.

【0005】上記Fe含有銅合金材においても、下地の銅
めっきを省略して素材に直接銀めっきを施すと、析出す
る銀粒子が細かくなり、その後のはんだ濡れ性が低下す
る問題が発生することがある。この場合、本来無光沢と
なるべき銀めっき後の表面に光沢が現れる。銀めっきを
行ったFe含有銅合金材のはんだ濡れ性が低下する原因に
ついて調査したところ、銀めっき前の銅合金材の表面に
Feの酸化物が残存すると、析出する銀粒子が細かくな
り、銀めっき後の表面に光沢が現れ、はんだが拡がりに
くいことがわかった。
[0005] Even in the case of the above-mentioned Fe-containing copper alloy material, if silver plating is directly applied to the material without occupying the underlying copper plating, there is a problem that the silver particles to be deposited become finer and the subsequent solder wettability decreases. There is. In this case, luster appears on the surface after silver plating, which should be dull. The cause of the decrease in solder wettability of the silver-containing Fe-containing copper alloy material was investigated.
When the oxide of Fe remained, it was found that the silver particles precipitated became finer, the surface after silver plating appeared glossy, and the solder was hardly spread.

【0006】電子部品用銅合金材はその製造過程におい
て上述したように焼鈍後酸洗処理が行われる。従来、焼
鈍後の酸洗には硫酸が用いられていた。しかし、硫酸で
酸洗したFe含有銅合金材は銀めっき性が悪かった。つま
り、素材表面のFeの酸化物の影響を受けて銀めっきの結
晶粒が微細化する。これは、硫酸では、焼鈍によって生
じた表面の銅酸化物層を除去できても、その下層に存在
する内部酸化層(Feの酸化物を多く含む層)が除去でき
ないためである。
As described above, the copper alloy material for electronic parts is subjected to pickling after annealing in the manufacturing process. Conventionally, sulfuric acid has been used for pickling after annealing. However, the Fe-containing copper alloy material pickled with sulfuric acid had poor silver plating properties. That is, the silver plating crystal grains are refined under the influence of the Fe oxide on the material surface. This is because, with sulfuric acid, even if a copper oxide layer on the surface generated by annealing can be removed, an internal oxide layer (a layer containing a large amount of Fe oxide) existing thereunder cannot be removed.

【0007】内部酸化層が生成しないように酸素が全く
存在しない不活性ガス雰囲気や水素などの還元ガス雰囲
気での焼鈍も考えられるが、前者は実際の操業上では困
難であり、後者は水素ガスを使用するためコストアップ
につながる。このため、焼鈍で内部酸化層を形成しない
ようにするのは困難である。そこで、この内部酸化層を
除去する必要がある。
[0007] Annealing in an inert gas atmosphere containing no oxygen or a reducing gas atmosphere such as hydrogen so as not to form an internal oxide layer can be considered, but the former is difficult in actual operation, and the latter is hydrogen gas. Using this leads to increased costs. For this reason, it is difficult to prevent the internal oxide layer from being formed by annealing. Therefore, it is necessary to remove this internal oxide layer.

【0008】内部酸化層を除去する方法として、機械的
に研磨する方法と化学的にエッチングする方法が考えら
れる。機械的な研磨は、ブラシで素材を研磨する方法で
あるが、厚い内部酸化層を除去するには研磨代を多くと
らなければならない。この場合、銅合金の最表面は研磨
の加工によって大きな応力を受け変形し、加工変質層が
形成される。この加工変質層は母材より化学的に活性で
ある。このため、加工変質層の上に銀めっきを行いアセ
ンブリ工程等で熱処理を受けると、加工変質層は銀めっ
き層中を拡散してきた酸素によって酸化され、銀めっき
の密着性が低下する。酸化が著しい場合は銀めっきのふ
くれを起こすこともある。また、研磨代は研磨ブラシの
劣化等で変化しやすく、管理が非常に難しい。その上、
実際の操業では研磨代を測定することは不可能である。
このため、研磨ブラシによって上記内部酸化層を除去す
ることは不適切である。
As a method of removing the internal oxide layer, a method of mechanically polishing and a method of chemically etching are considered. Mechanical polishing is a method of polishing a material with a brush. However, in order to remove a thick internal oxide layer, a large amount of polishing must be taken. In this case, the outermost surface of the copper alloy receives a large stress due to the polishing process and is deformed, thereby forming a damaged layer. This affected layer is more chemically active than the base material. For this reason, when silver plating is performed on the work-damaged layer and heat treatment is performed in an assembly process or the like, the work-damaged layer is oxidized by oxygen diffused in the silver plated layer, and the adhesion of the silver plating is reduced. When oxidation is remarkable, silver plating may be blistered. Further, the polishing allowance tends to change due to deterioration of the polishing brush and the like, and it is very difficult to control the polishing allowance. Moreover,
In actual operations, it is impossible to measure the polishing allowance.
For this reason, it is inappropriate to remove the internal oxide layer with a polishing brush.

【0009】一方、エッチングの場合、エッチング量は
エッチング液の組成、温度、エッチング時間でコントロ
ールでき、エッチング液中のCuイオン濃度を測定するこ
とによりエッチング量を知ることが可能である。このよ
うな理由から内部酸化層を除去するには化学的な方法で
行わなければならない。
On the other hand, in the case of etching, the amount of etching can be controlled by the composition, temperature, and etching time of the etching solution, and the amount of etching can be known by measuring the concentration of Cu ions in the etching solution. For this reason, removal of the internal oxide layer must be performed by a chemical method.

【0010】銅合金のエッチング液としては、硫酸に酸
化剤として硝酸(HNO3)を加えたキリンス液が従来より知
られている。硫酸は銅の酸化物を溶解する能力を有し、
HNO3は金属の銅を酸化する能力がある。つまり、キリン
ス液は銅表面を酸化させながら、溶解(エッチング)す
ることが可能である。しかし、キリンス液は亜硝酸ガス
などの有害気体を発生させる。このため、電子部品用銅
合金材の酸洗液としては使用できない。
[0010] As a copper alloy etching solution, there has been conventionally known a rinsing solution obtained by adding nitric acid (HNO 3 ) as an oxidizing agent to sulfuric acid. Sulfuric acid has the ability to dissolve copper oxides,
HNO 3 has the ability to oxidize metallic copper. That is, the rinsing solution can be dissolved (etched) while oxidizing the copper surface. However, the rinsing liquid generates harmful gases such as nitrous acid gas. Therefore, it cannot be used as a pickling solution for a copper alloy material for electronic components.

【0011】一方、近年、上述したような問題点を解決
するため、酸に酸化剤として過酸化水素(H2O2)や過硫酸
塩等の過酸化物又は三酸化クロム(CrO3)を加えたエッチ
ング液が開発された。しかし、これらのエッチング液で
内部酸化層を除去しても、後記する理由によりFe含有銅
合金材の銀めっき性は完全には改善できなかった。
On the other hand, in recent years, in order to solve the above-mentioned problems, a peroxide such as hydrogen peroxide (H 2 O 2 ) or a persulfate or chromium trioxide (CrO 3 ) is used as an oxidizing agent in an acid. Added etchants have been developed. However, even if the internal oxide layer was removed with these etchants, the silver plating property of the Fe-containing copper alloy material could not be completely improved for the reasons described below.

【0012】本発明は、上述した問題点に鑑み、導電性
や強度に優れるFe含有銅合金に下地めっきを施すこと無
く直接良好な銀めっきを施し得る電子部品用銅合金材の
製造方法を提供することを目的とするものである。
In view of the above-mentioned problems, the present invention provides a method for producing a copper alloy material for electronic parts, which can be directly plated with a good silver without plating an Fe-containing copper alloy having excellent conductivity and strength. It is intended to do so.

【0013】[0013]

【課題を解決するための手段】上記の目的を達成するた
め、本発明に係る良好な銀めっき性を有する電子部品用
銅合金材の製造方法は、Feを含有する電子部品用銅合金
材を、少なくとも最終焼鈍後に硫酸、酸化剤及び 1〜10
0g/lのエチレングリコールを含む酸性水溶液で酸洗する
ものである。
In order to achieve the above object, a method for producing a copper alloy material for electronic components having good silver plating properties according to the present invention comprises the steps of: , At least after final annealing, sulfuric acid, oxidizing agent and 1-10
Pickling is performed with an acidic aqueous solution containing 0 g / l of ethylene glycol.

【0014】そして、上記良好な銀めっき性を有する電
子部品用銅合金材の製造方法においては、酸性水溶液の
液温を20〜70℃とし 1〜 300秒間酸洗することが望まし
い。また、酸化剤としては過酸化水素を用いることが望
ましい。更に、硫酸と過酸化水素とのモル比(硫酸/過
酸化水素)は0.35以上に調整することが望ましい。
In the above-mentioned method for producing a copper alloy material for electronic parts having good silver plating properties, it is desirable to set the liquid temperature of the acidic aqueous solution to 20 to 70 ° C. and perform acid pickling for 1 to 300 seconds. It is desirable to use hydrogen peroxide as the oxidizing agent. Further, it is desirable to adjust the molar ratio of sulfuric acid to hydrogen peroxide (sulfuric acid / hydrogen peroxide) to 0.35 or more.

【0015】以下、本発明の構成並びに作用について詳
細に説明する。本発明者等は、良好な銀めっき性を有す
るFe含有銅合金材の製造方法について研究を重ねて来
た。その結果、焼鈍後の酸洗において、酸化剤と 1〜10
0g/lのエチレングリコールを含む酸性水溶液であれば内
部酸化層を化学的に除去することができ、良好な銀めっ
き性を有するFe含有銅合金材が得られることを見出し、
本発明を完成させたものである。
Hereinafter, the configuration and operation of the present invention will be described in detail. The present inventors have repeated research on a method for producing a Fe-containing copper alloy material having good silver plating properties. As a result, in the pickling after annealing, the oxidant and 1 to 10
If it is an acidic aqueous solution containing 0 g / l of ethylene glycol, the internal oxide layer can be chemically removed, and it has been found that an Fe-containing copper alloy material having good silver plating properties can be obtained.
The present invention has been completed.

【0016】後記実施例の比較例として説明されている
ように、硫酸と酸化剤のみの酸性水溶液(エッチング
液)でFe含有銅合金材の内部酸化層を除去しても銀めっ
き性は改善できなかった。これに対して、本発明に係る
硫酸と酸化剤及び 1〜100g/lのエチレングリコールを含
む酸性水溶液でFe含有銅合金材の内部酸化層を除去する
と、良好な銀めっき性を有するFe含有銅合金材が得られ
る。これは、一定量のエチレングリコールを含む酸性水
溶液でなければ、内部酸化層をエッチングしても、Feの
酸化物を完全に溶解できないか、又は一度溶解したFeの
酸化物が最表面に再付着するためと考える。つまり、エ
チレングリコールを含む酸性水溶液はFeの酸化物を完全
に溶解させ、かつその再付着を防止する効果があると推
定される。
As described as a comparative example of the embodiment described later, the silver plating property can be improved even if the internal oxide layer of the Fe-containing copper alloy material is removed with an acidic aqueous solution (etching solution) containing only sulfuric acid and an oxidizing agent. Did not. On the other hand, when the internal oxide layer of the Fe-containing copper alloy material is removed with an acidic aqueous solution containing the sulfuric acid and the oxidizing agent according to the present invention and 1 to 100 g / l of ethylene glycol, the Fe-containing copper having good silver plating property is obtained. An alloy material is obtained. This is because, unless an acidic aqueous solution containing a certain amount of ethylene glycol, the oxide of Fe cannot be completely dissolved even if the internal oxide layer is etched, or the Fe oxide once dissolved re-adheres to the outermost surface. Think to do. That is, it is presumed that the acidic aqueous solution containing ethylene glycol has an effect of completely dissolving the Fe oxide and preventing its re-adhesion.

【0017】上記作用効果を得るにはエチレングリコー
ルの量は 1〜100g/lの範囲添加する必要がある。エチレ
ングリコールの量が1g/l未満では、Feの酸化物の再付着
を防止する効果が不十分であり、またエチレングリコー
ルの量が100g/lを越えての添加は再付着の防止効果はあ
るものの、効果の向上は無く経済的に無駄である。
In order to obtain the above effects, the amount of ethylene glycol must be added in the range of 1 to 100 g / l. When the amount of ethylene glycol is less than 1 g / l, the effect of preventing the redeposition of the Fe oxide is insufficient, and when the amount of ethylene glycol exceeds 100 g / l, the effect of preventing the redeposition is provided. However, the effect is not improved and it is economically useless.

【0018】また、酸化剤としては過酸化水素(H2O2)や
過硫酸塩が望ましい。酸はりん酸,塩酸,フッ酸,硝酸
などのいずれの酸でも同様の効果が得られるが、排水規
制や有害ガスの発生を考えると、硫酸が望ましい。硫酸
とH2O2の組合せの場合、エッチング力と経済性の観点か
ら硫酸濃度は100 〜500g/l、H2O2濃度は5 〜100g/lが望
ましい。H2O2濃度が100g/lを越えると、酸洗後銅合金表
面に酸化物が残り、5g/l未満ではエッチング力が低下す
る。また、硫酸濃度が100g/l未満ではエッチング力が低
下し、500g/lを越えると銀めっき性の改善効果は飽和し
てしまい、経済的に無駄である。そして、硫酸および過
酸化水素(H2O2)を前記範囲内で、かつそのモル比(硫
酸/H2O2)を0.35以上とすることが望ましい。このモル
比が0.35未満では、H2O2の量が多くなるため酸化が懸念
され、Feの酸化物の除去効果(エッチング力)が充分期
待できなくなることが懸念されるためである。
The oxidizing agent is preferably hydrogen peroxide (H 2 O 2 ) or persulfate. The same effect can be obtained with any acid such as phosphoric acid, hydrochloric acid, hydrofluoric acid and nitric acid, but sulfuric acid is preferred in view of wastewater regulations and generation of harmful gases. If the combination of sulfuric acid and H 2 O 2, the sulfuric acid concentration in terms of etching power and economy is 100 ~500g / l, H 2 O 2 concentration of 5 to 100 g / l is desired. If the H 2 O 2 concentration exceeds 100 g / l, an oxide will remain on the copper alloy surface after pickling, and if it is less than 5 g / l, the etching power will decrease. On the other hand, if the sulfuric acid concentration is less than 100 g / l, the etching power is reduced, and if it exceeds 500 g / l, the effect of improving the silver plating property is saturated, which is economically useless. It is desirable that the sulfuric acid and hydrogen peroxide (H 2 O 2 ) be within the above range and the molar ratio (sulfuric acid / H 2 O 2 ) be 0.35 or more. If the molar ratio is less than 0.35, the amount of H 2 O 2 is increased, so that oxidation is a concern, and there is a concern that the effect of removing Fe oxide (etching power) cannot be sufficiently expected.

【0019】内部酸化層の厚さは表面の酸素濃度,合金
中のFe含有量,熱処理条件(温度、時間)によって異な
るが、銀めっき性にとって内部酸化層は完全に除去しな
ければならない。つまり、本発明に係る酸化剤と 1〜10
0g/lのエチレングリコールを含む酸性水溶液で化学的に
除去した後、銅合金の表面のX線光電子分光分析装置
(ESCA)による分析を行っても、Feの酸化物が検出され
てはならない。
Although the thickness of the internal oxide layer varies depending on the oxygen concentration on the surface, the Fe content in the alloy, and the heat treatment conditions (temperature and time), the internal oxide layer must be completely removed for silver plating. That is, the oxidizing agent according to the present invention and 1 to 10
After chemical removal with an acidic aqueous solution containing 0 g / l of ethylene glycol, analysis of the surface of the copper alloy by X-ray photoelectron spectroscopy (ESCA) should not result in the detection of Fe oxides.

【0020】銀めっき性を充分に改善するため、酸洗
(エッチング)は本発明に係る酸性水溶液で20〜70℃の
液温で 1〜 300秒間処理するのが望ましい。液温が20℃
未満ではエッチング時間が非常に長くなる。また、70℃
を越えるとH2O2の分解が激しく、エッチング反応も激し
くなり、エッチング量のコントロールが困難となる。酸
洗(エッチング)処理時間は液温や内部酸化層の厚みに
よって最適な条件があるが、処理時間 1〜 300秒間が望
ましい。処理時間 1秒未満では、液温を上げなければな
らずエッチング量のコントロールが難しくなる。処理時
間が 300秒を越えると銀めっき性に対する改善効果はあ
るが、生産性が悪くなる。
In order to sufficiently improve the silver plating property, it is desirable that the pickling (etching) be performed with the acidic aqueous solution according to the present invention at a solution temperature of 20 to 70 ° C. for 1 to 300 seconds. Liquid temperature is 20 ℃
If it is less than 1, the etching time becomes very long. 70 ℃
When H exceeds 2, the decomposition of H 2 O 2 is severe, the etching reaction is also intense, and it is difficult to control the etching amount. The pickling (etching) processing time has optimum conditions depending on the liquid temperature and the thickness of the internal oxide layer, but the processing time is preferably 1 to 300 seconds. If the processing time is less than 1 second, the liquid temperature must be increased, and it is difficult to control the etching amount. When the treatment time exceeds 300 seconds, the silver plating property is improved, but the productivity is deteriorated.

【0021】上述した本発明に係る酸性水溶液による酸
洗(エッチング)は、FeあるいはFe 2Pの析出焼鈍後から
銀めっきを施す前までに行えばよい。例えば、析出焼鈍
直後や、その後の最終冷間圧延後に行っても良く、銀め
っきの前処理(酸洗)として行っても良い。また、機械
的なブラシ研磨を本発明に係る酸性水溶液による化学的
なエッチングの補助として、エッチングの前あるいは後
に行ってもかまわない。
The acid with the above-mentioned acidic aqueous solution according to the present invention
Washing (etching) is Fe or Fe TwoAfter precipitation annealing of P
It may be performed before silver plating. For example, precipitation annealing
Immediately after or after the final cold rolling,
It may be performed as a pretreatment (pickling). Also machinery
Brush polishing is chemically performed by the acidic aqueous solution according to the present invention.
Before or after etching to assist in proper etching
You can go to

【0022】なお、本発明で対象とするFeを含有する電
子部品用銅合金とは、C19200(Cu-0.1Fe-0.03P)、C19700
(Cu-0.6Fe-0.2P-0.1Zn) 、C194(Cu-2.3Fe-0.03P-0.15Z
n) 、C195(Cu-1.5Fe-0.8Co-0.4Zn-0.4Sn)などの他にFe
を0.01%以上含む銅合金などが挙げられ、これらは焼鈍
時に内部酸化によってFeの酸化物が形成される。
The Fe-containing copper alloy for electronic parts which is the object of the present invention is C19200 (Cu-0.1Fe-0.03P), C19700
(Cu-0.6Fe-0.2P-0.1Zn), C194 (Cu-2.3Fe-0.03P-0.15Z)
n), C195 (Cu-1.5Fe-0.8Co-0.4Zn-0.4Sn)
And the like. Copper alloys containing 0.01% or more of these include Fe oxides formed by internal oxidation during annealing.

【0023】[0023]

【発明の実施の形態】以下、本発明の実施形態について
説明する。常法により溶解鋳造、熱間圧延を行い、更に
冷間圧延と中間焼鈍を繰り返した後、最終析出焼鈍後に
硫酸、酸化剤及び 1〜100g/lのエチレングリコールを含
む酸性水溶液を用いて酸洗処理し、Feを含有する電子部
品用銅合金材を製造した。なお、この製造過程で中間焼
鈍後の酸洗は、常用する酸洗液あるいは前記最終析出焼
鈍後の酸性水溶液の何れを用いてもよい。
Embodiments of the present invention will be described below. Melt casting, hot rolling and cold rolling and intermediate annealing are repeated in the usual manner, and after the final precipitation annealing, pickling is performed using an acidic aqueous solution containing sulfuric acid, an oxidizing agent and 1 to 100 g / l ethylene glycol. This was processed to produce a copper alloy material for electronic components containing Fe. In this production process, the pickling after the intermediate annealing may be performed using any of a commonly used pickling solution or an acidic aqueous solution after the final precipitation annealing.

【0024】[0024]

【実施例】【Example】

〔実施例1〕表1に示す化学成分組成のFe含有銅合金に
対し熱間圧延、冷間圧延および中間焼鈍を行い厚さ0.15
mmの各成分組成の銅合金板を得た。これら各銅合金板を
窒素ガス(酸素50ppm)雰囲気で温度 500℃で 2時間の条
件で析出焼鈍した。この後、得られた各成分組成の銅合
金板を供試材として、焼鈍によって生成された酸化物層
を表2に示す酸洗液でエッチング処理した。この酸洗の
際、液温を50℃とし、処理時間を変えてエッチング量を
0.5μm とした。
Example 1 A Fe-containing copper alloy having a chemical composition shown in Table 1 was subjected to hot rolling, cold rolling and intermediate annealing to a thickness of 0.15.
A copper alloy plate having each component composition of mm was obtained. Each of these copper alloy sheets was subjected to precipitation annealing in a nitrogen gas (50 ppm oxygen) atmosphere at a temperature of 500 ° C. for 2 hours. Thereafter, using the obtained copper alloy plates of the respective component compositions as test materials, the oxide layer generated by annealing was subjected to an etching treatment with a pickling solution shown in Table 2. During this pickling, the liquid temperature was set to 50 ° C, and the etching amount was changed by changing the processing time.
It was 0.5 μm.

【0025】[0025]

【表1】 [Table 1]

【0026】[0026]

【表2】 [Table 2]

【0027】上記で得られた酸洗後の各成分組成の供試
材に対し、AgCN:50g/l, KCN:115g/lを含む銀めっき浴
を用いて電流密度1.0A/dm2で 500秒の条件で銀めっきを
施し、銀めっき結晶状態を評価することを目的として光
沢度を測定した(粗大な結晶が成長しているほど光沢度
は低くなり、銀めっき前の表面にFeの酸化物が無かった
ことを意味する)。光沢度はグラフィックアート社のデ
ンシトメーターGAM MODEL RD-144を用いて測定した。こ
の光沢度の測定結果を表3に示す。
The test material of each component composition after pickling obtained above was applied to a silver plating bath containing 50 g / l of AgCN and 115 g / l of KCN at a current density of 1.0 A / dm 2 for 500 times. In order to evaluate the silver plating crystal state, the gloss was measured for the purpose of evaluating the crystal state of the silver plating (the larger the coarse crystals were, the lower the gloss was. Means that there was nothing). The glossiness was measured using a densitometer GAM MODEL RD-144 manufactured by Graphic Art. Table 3 shows the measurement results of the glossiness.

【0028】上記銀めっき後の供試材をN2雰囲気中でホ
ットプレートにより 370℃に加熱し、銀めっきの上には
んだボールを置いた。溶融したはんだの拡がり面積(mm2
)にて銀めっきのはんだ濡れ性を評価した。尚、はんだ
ボールはPb-3Sn-1.5Agの組成で直径 1.4mmφのものを使
用した。このはんだ濡れ性(拡がり面積)の測定結果及
び上記光沢度を加味した総合評価を表3に併せて示す。
総合評価の○、△、×は次の様な基準による。すなわ
ち、○:はんだ拡がり面積80mm2 以上、△:はんだ拡が
り面積50〜80mm2 、×:はんだ拡がり面積50mm2 未満で
ある。
The test material after the silver plating was heated to 370 ° C. by a hot plate in an N 2 atmosphere, and a solder ball was placed on the silver plating. Spread area of molten solder (mm 2
)), The solder wettability of silver plating was evaluated. The solder balls used had a composition of Pb-3Sn-1.5Ag and a diameter of 1.4 mmφ. Table 3 shows the measurement results of the solder wettability (spread area) and the overall evaluation in consideration of the glossiness.
○, Δ, and × in the overall evaluation are based on the following criteria. ○: Solder spread area of 80 mm 2 or more, Δ: Solder spread area of 50 to 80 mm 2 , ×: Solder spread area of less than 50 mm 2 .

【0029】[0029]

【表3】 [Table 3]

【0030】表3より明らかなように、本発明例では、
いずれの銅合金と酸洗液の組み合わせでも銀めっきの光
沢度は 0.1以下と低く、酸洗により供試材表面のFe酸化
物が除去されており、またはんだ拡がり面積が100mm2
後と大きくはんだ濡れ性に優れていた。これに対して、
エチレングリコールの量が1g/l未満と低い酸洗液を用い
た比較例では、各合金A,B,C,D,E共、光沢度の
上昇が見られ、またはんだ拡がり面積が比較的小さくは
んだ濡れ性も低下した。更に、硫酸のみあるいは硫酸に
H2O2を添加しただけの酸洗液の従来例では、各合金A,
B,C,D,E共、光沢度の上昇が見られ、またはんだ
拡がり面積が小さくはんだ濡れ性も悪かった。
As is clear from Table 3, in the present invention,
Glossiness of silver plating a combination of any of the copper alloy and pickling solution is as low as 0.1 or less, pickling by being Fe oxides test piece surface removal, also large and is 100 mm 2 before and after solder spreading area Solder Excellent wettability. On the contrary,
In the comparative example using the pickling solution having a low ethylene glycol content of less than 1 g / l, the gloss of each of the alloys A, B, C, D and E was increased, or the spread area was relatively small. Solder wettability also decreased. In addition, only sulfuric acid or sulfuric acid
In the conventional example of the pickling solution to which only H 2 O 2 is added, each alloy A,
In all of B, C, D and E, an increase in gloss was observed, or the spread area was small and solder wettability was poor.

【0031】〔実施例2〕上記実施例1で得た析出焼鈍
後の供試材を用い、焼鈍によって生成された酸化物層を
表4に示す酸洗液でエッチング処理した。この酸洗の
際、液温を30℃とし、処理時間を変えてエッチング量を
0.5μm とした。この酸洗後の各成分組成の供試材に対
し、実施例1と同様に、AgCN:50g/l, KCN:115g/lを含
む銀めっき浴を用いて電流密度1.0A/dm2で 500秒の条件
で銀めっきを施し、銀めっき結晶状態を評価することを
目的として光沢度を測定し、更に溶融したはんだの拡が
り面積(mm2 )にて銀めっきのはんだ濡れ性を評価した。
これら光沢度の測定結果とはんだ濡れ性(拡がり面積)
の測定結果及び上記光沢度を加味した総合評価を表5に
併せて示す。
Example 2 Using the test material after precipitation annealing obtained in Example 1 above, the oxide layer formed by annealing was subjected to etching treatment with a pickling solution shown in Table 4. During this pickling, the solution temperature was set to 30 ° C, and the etching time was changed by changing the processing time.
It was 0.5 μm. In the same manner as in Example 1, the test material of each component composition after pickling was subjected to a current density of 1.0 A / dm 2 using a silver plating bath containing 50 g / l of AgCN and 115 g / l of KCN. The silver plating was performed under the conditions of seconds, the glossiness was measured for the purpose of evaluating the silver plating crystal state, and the solder wettability of the silver plating was evaluated based on the spread area (mm 2 ) of the molten solder.
These gloss measurement results and solder wettability (spread area)
Table 5 also shows the measurement results and the overall evaluation in consideration of the glossiness.

【0032】[0032]

【表4】 [Table 4]

【0033】[0033]

【表5】 [Table 5]

【0034】表5より明らかなように、本発明例では、
いずれの銅合金と酸洗液の組み合わせでも銀めっきの光
沢度は 0.1以下と低く、酸洗により供試材表面のFe酸化
物が除去されており、またはんだ拡がり面積が100mm2
後と大きくはんだ濡れ性に優れていた。これに対して、
エチレングリコールの量が1g/l未満と低い酸洗液を用い
た比較例では、各合金A,B,C,D,E共、光沢度の
上昇が見られ、またはんだ拡がり面積が比較的小さくは
んだ濡れ性も低下した。更に、硫酸のみあるいは硫酸に
過硫酸塩を添加しただけの酸洗液の従来例では、各合金
A,B,C,D,E共、光沢度の上昇が見られ、または
んだ拡がり面積が小さくはんだ濡れ性も悪かった。
As is clear from Table 5, in the present invention,
Glossiness of silver plating a combination of any of the copper alloy and pickling solution is as low as 0.1 or less, pickling by being Fe oxides test piece surface removal, also large and is 100 mm 2 before and after solder spreading area Solder Excellent wettability. On the contrary,
In the comparative example using the pickling solution having a low ethylene glycol content of less than 1 g / l, the gloss of each of the alloys A, B, C, D and E was increased, or the spread area was relatively small. Solder wettability also decreased. Furthermore, in the conventional examples of the pickling solution containing only sulfuric acid or only a persulfate added to sulfuric acid, each of the alloys A, B, C, D, and E shows an increase in glossiness or a small spread area. Solder wettability was also poor.

【0035】〔実施例3〕上記実施例1で得た析出焼鈍
後の表1に示す銅合金Aの供試材を用いるとともに、焼
鈍によって生成された酸化物層を表2に示す酸洗液No.4
を用い、表6に示すエッチング条件(温度×時間)でエ
ッチング処理した。この酸洗後の供試材を、実施例1と
同様に、AgCN:50g/l, KCN:115g/lを含む銀めっき浴を
用いて電流密度1.0A/dm2で 500秒の条件で銀めっきを施
し、銀めっき結晶状態を評価することを目的として光沢
度を測定し、更に溶融したはんだの拡がり面積(mm2 )に
て銀めっきのはんだ濡れ性を評価した。これら光沢度の
測定結果とはんだ濡れ性(拡がり面積)の測定結果及び
上記光沢度を加味した総合評価を表6に併せて示す。
Example 3 Using the test materials of the copper alloy A shown in Table 1 after the precipitation annealing obtained in Example 1 above, the oxide layer formed by annealing was pickled as shown in Table 2. No.4
And etching was performed under the etching conditions (temperature × time) shown in Table 6. The test material after the pickling was subjected to silver plating at a current density of 1.0 A / dm 2 for 500 seconds in a silver plating bath containing AgCN: 50 g / l and KCN: 115 g / l in the same manner as in Example 1. The plating was applied, the glossiness was measured for the purpose of evaluating the crystal state of the silver plating, and the solder wettability of the silver plating was evaluated based on the spread area (mm 2 ) of the molten solder. Table 6 shows the measurement results of the glossiness, the measurement results of the solder wettability (spread area), and the overall evaluation in consideration of the glossiness.

【0036】[0036]

【表6】 [Table 6]

【0037】表6より明らかなように、本発明例では、
いずれのエッチング条件でも銀めっきの光沢度が低く、
良好なはんだ濡れ性を示した。これに対し、比較例とし
て示す液温10℃の場合は、液温が低いためエッチング時
間を長くとらなければ良好なはんだ濡れ性が得られず、
生産性が非常に低い。また液温80℃の場合は、液温が高
く良好なはんだ濡れ性が得られるが、H2O2の分解が激し
く酸洗液の性能維持の面で実用的でない。一方、液温を
50℃、70℃としても、その酸洗時間が 0.5秒と短い場合
には、光沢度の上昇が見られ、またはんだ拡がり面積が
比較的小さくはんだ濡れ性も低く、銀めっきの改善効果
が無かった。これは、内部酸化層を完全に除去できなか
ったためと考える。
As is clear from Table 6, in the present invention,
The glossiness of silver plating is low under any of the etching conditions,
Good solder wettability was exhibited. On the other hand, in the case of the liquid temperature of 10 ° C. shown as a comparative example, good solder wettability cannot be obtained unless the etching time is long because the liquid temperature is low,
Very low productivity. In the case of a liquid temperature of 80 ° C., the liquid temperature is high and good solder wettability can be obtained, but H 2 O 2 is strongly decomposed and is not practical in terms of maintaining the performance of the pickling liquid. On the other hand,
Even at 50 ° C and 70 ° C, if the pickling time is as short as 0.5 seconds, the glossiness is increased, or the spread area is relatively small, the solder wettability is low, and there is no effect of improving silver plating. Was. This is because the internal oxide layer could not be completely removed.

【0038】[0038]

【発明の効果】以上説明したように、本発明に係る良好
な銀めっき性を有する電子部品用銅合金材の製造方法に
よれば、導電性や強度に優れるFe含有銅合金材を、下地
めっきを施すことなく直接銀めっきを施して電子部品用
銅合金材として用いることができる。
As described above, according to the method for producing a copper alloy material for electronic parts having good silver plating property according to the present invention, a Fe-containing copper alloy material having excellent conductivity and strength can be plated by undercoating. It can be used as a copper alloy material for electronic components by performing silver plating directly without performing the above.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 Feを含有する電子部品用銅合金材を、少
なくとも最終焼鈍後に硫酸、酸化剤及び 1〜100g/lのエ
チレングリコールを含む酸性水溶液で酸洗することを特
徴とする良好な銀めっき性を有する電子部品用銅合金材
の製造方法。
1. Good silver, characterized in that a copper alloy material for electronic parts containing Fe is pickled with an acidic aqueous solution containing sulfuric acid, an oxidizing agent and 1 to 100 g / l of ethylene glycol at least after final annealing. A method for producing a copper alloy material for electronic components having plating properties.
【請求項2】 請求項1記載の良好な銀めっき性を有す
る電子部品用銅合金材の製造方法において、酸性水溶液
の液温が20〜70℃で 1〜 300秒間酸洗する、良好な銀め
っき性を有する銅合金材の製造方法。
2. The method for producing a copper alloy material for electronic parts having good silver plating properties according to claim 1, wherein the acidic aqueous solution is pickled at a liquid temperature of 20 to 70 ° C. for 1 to 300 seconds. A method for producing a copper alloy material having plating properties.
【請求項3】 Feを含有する電子部品用銅合金材が、リ
ードフレームである請求項1又は2記載の良好な銀めっ
き性を有する銅合金材の製造方法。
3. The method for producing a copper alloy material having good silver plating properties according to claim 1, wherein the Fe-containing copper alloy material for electronic components is a lead frame.
【請求項4】 酸化剤が過酸化水素である請求項1、2
又は3記載の良好な銀めっき性を有する銅合金材の製造
方法。
4. The method according to claim 1, wherein the oxidizing agent is hydrogen peroxide.
4. The method for producing a copper alloy material having good silver plating properties according to item 3.
【請求項5】 硫酸100 〜500g/l、過酸化水素 5〜100g
/lで、硫酸と過酸化水素とのモル比(硫酸/過酸化水
素)が0.35以上である請求項4記載の良好な銀めっき性
を有する銅合金材の製造方法。
5. Sulfuric acid 100-500 g / l, hydrogen peroxide 5-100 g
The method for producing a copper alloy material having good silver plating properties according to claim 4, wherein the molar ratio of sulfuric acid to hydrogen peroxide (sulfuric acid / hydrogen peroxide) is 0.35 or more at / l.
JP7567997A 1997-03-27 1997-03-27 Production of copper alloy material for electronic parts having good silver plating property Pending JPH10265973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7567997A JPH10265973A (en) 1997-03-27 1997-03-27 Production of copper alloy material for electronic parts having good silver plating property

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7567997A JPH10265973A (en) 1997-03-27 1997-03-27 Production of copper alloy material for electronic parts having good silver plating property

Publications (1)

Publication Number Publication Date
JPH10265973A true JPH10265973A (en) 1998-10-06

Family

ID=13583137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7567997A Pending JPH10265973A (en) 1997-03-27 1997-03-27 Production of copper alloy material for electronic parts having good silver plating property

Country Status (1)

Country Link
JP (1) JPH10265973A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002094130A (en) * 1999-01-05 2002-03-29 Nichia Chem Ind Ltd Light emitting diode, its manufacturing method and indicating device using the same
JP2005206859A (en) * 2004-01-21 2005-08-04 Ebara Udylite Kk Method of producing member for electronic component
US7946022B2 (en) 2005-07-05 2011-05-24 The Furukawa Electric Co., Ltd. Copper alloy for electronic machinery and tools and method of producing the same
JP2017179558A (en) * 2016-03-31 2017-10-05 古河電気工業株式会社 Metallic material for thin film plating and method for producing the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002094130A (en) * 1999-01-05 2002-03-29 Nichia Chem Ind Ltd Light emitting diode, its manufacturing method and indicating device using the same
JP2005206859A (en) * 2004-01-21 2005-08-04 Ebara Udylite Kk Method of producing member for electronic component
US7946022B2 (en) 2005-07-05 2011-05-24 The Furukawa Electric Co., Ltd. Copper alloy for electronic machinery and tools and method of producing the same
JP2017179558A (en) * 2016-03-31 2017-10-05 古河電気工業株式会社 Metallic material for thin film plating and method for producing the same

Similar Documents

Publication Publication Date Title
JP3417395B2 (en) Lead frame for semiconductor device, method of manufacturing the same, and semiconductor device using the same
US7946022B2 (en) Copper alloy for electronic machinery and tools and method of producing the same
US7488408B2 (en) Tin-plated film and method for producing the same
US3147547A (en) Coating refractory metals
JP2007039804A (en) Copper alloy for electronic apparatus and method of producing the same
JP2007039804A5 (en)
JP3481392B2 (en) Electronic component lead member and method of manufacturing the same
JPH10265973A (en) Production of copper alloy material for electronic parts having good silver plating property
CN114807918A (en) Metal replacement treatment liquid, and surface treatment method for aluminum or aluminum alloy
JP4642701B2 (en) Cu-Ni-Si alloy strips with excellent plating adhesion
JP2766605B2 (en) Copper alloy lead frame for bare bonding
JP2594250B2 (en) Copper base alloy for connector and method of manufacturing the same
JP2687195B2 (en) Anti-tarnish solution for copper
JP2587258B2 (en) Method for producing reflow tin or tin alloy plated material using copper or copper alloy as base material
JP3232529B2 (en) Fe-Ni alloy for lead frame and method of manufacturing the same
JP2743342B2 (en) Copper base alloy for connector and method of manufacturing the same
JPH0368788A (en) Production of copper bar for lead frame
JP2537301B2 (en) Electronic component manufacturing method
JP2594249B2 (en) Copper base alloy for connector and method of manufacturing the same
JPH0344454A (en) Production of lead wire for electronic parts and equipment
JPS58191456A (en) Lead frame for semiconductor and manufacture thereof
JP3500239B2 (en) Electrolytic etching solution and electrolytic etching method for precipitation strengthened copper alloy products
JPS63105941A (en) High strength conductive copper alloy and its production
CN117248215A (en) Etching treatment liquid, aluminum or aluminum alloy surface treatment method
KR20230173025A (en) Etching solution, method for surface treatment of aluminum or aluminum alloy

Legal Events

Date Code Title Description
A621 Written request for application examination

Effective date: 20040113

Free format text: JAPANESE INTERMEDIATE CODE: A621

A977 Report on retrieval

Effective date: 20040722

Free format text: JAPANESE INTERMEDIATE CODE: A971007

A131 Notification of reasons for refusal

Effective date: 20040803

Free format text: JAPANESE INTERMEDIATE CODE: A131

A02 Decision of refusal

Effective date: 20041130

Free format text: JAPANESE INTERMEDIATE CODE: A02