JPH1026523A - Diameter measuring method, diameter working and measuring method and instrument, and work centering device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure the diameter of an inject with accuracy of measurement of about 0.1μm. SOLUTION: While a outer periphery reference receiving member 7 supports the outer peripheries of a discoid measurement reference member 9 for measurement and an object M to be measured at two points, the radial displacement of a measurement reference to the outer peripheral surface of the member 9 from the original position of the measurement reference set on the opposite side of the member 7 and the radial displacement of the object M to the outer peripheral surface of the object M are measured by means of a displacement gauge 21. Then the diameter of the object M is calculated from the deviation of the displacement of the object from the displacement of the measurement reference.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for measuring diameter,
Diameter processing / measuring method and apparatus, and work centering apparatus, particularly diameter measuring method, diameter processing / measuring method and apparatus in diameter processing requiring accuracy of about 0.1 μm, and work centering apparatus It is about.

[0002]

2. Description of the Related Art Conventionally, when measuring the diameter of a workpiece, such as a disk, a cylinder, or a column, the diameter is measured using a length measuring instrument such as a micrometer or a three-dimensional measuring instrument. This is done by direct measurement.

[0003] In diameter machining for cutting the outer peripheral surface of a workpiece, a vacuum chuck face plate is attached to a main spindle, and the outer peripheral surface of the workpiece adsorbed to the workpiece suction surface of the vacuum chuck face plate is rotated by the main spindle. This is done by cutting with a cutting tool such as a tool bit.

The centering of a workpiece adsorbed on the workpiece suction surface of a vacuum chuck face plate is generally performed by measuring the diameter of the workpiece using a dial gauge, an electric micrometer, or the like. It is performed manually by adjusting the suction position of the workpiece by hitting the workpiece with a hammer or the like with reference to the measurement information.

[0005]

In a diameter measurement using a length measuring device such as a micrometer or a three-dimensional measuring device, a diameter of 0.1 mm is required.
The measurement accuracy of about 5 to 1.0 μm is the limit, and therefore, conventionally, it has been impossible to perform the diameter measurement in the processing line in the diameter processing requiring the accuracy of about 0.1 μm.

The vacuum chuck face plate is made of copper, aluminum, invar, or the like. In the case of copper or aluminum, the cutting (self-cutting) at the time of reworking the surface of the face plate is high due to the free cutting property of the constituent material. Can be done with precision,
There is a disadvantage that thermal expansion deformation easily occurs. On the other hand, those made of Invar do not have a problem of thermal expansion deformation because they are low thermal expansion materials, but it is difficult to obtain high-precision machining accuracy due to difficulty in cutting. For these reasons, conventionally, any one cannot perform the diameter processing which requires an accuracy of about 0.1 μm.

In order to center the workpiece by hand,
Experience is required and accuracy varies, and it takes a lot of time to perform high-precision centering.

The present invention has been made in view of the above problems, and has a diameter measuring method and apparatus capable of obtaining a measuring accuracy of about 0.1 μm, and a processing and measuring accuracy of about 0.1 μm. With the aim of providing a method and an apparatus for machining and measuring diameters, and a centering apparatus for workpieces that can perform high-precision centering with good reproducibility and quickness in these diameter machining and measuring apparatuses. I have.

[0009]

In order to achieve the above object, the invention according to claim 1 provides a method for measuring diameter, comprising:
The disk-shaped measurement reference member and the object to be measured are supported at two points by an outer circumference reference receiving member with respect to the outer peripheral surface, and the outer circumference of the measurement reference member is measured from a measurement reference position installed on the side facing the outer circumference reference receiving member. The measurement reference displacement amount in the radial direction up to the surface and the displacement amount of the measurement object in the radial direction up to the outer peripheral surface of the measurement object are each measured by a displacement meter, and the deviation of the measurement object displacement amount with respect to the measurement reference displacement amount is calculated. It is characterized in that the diameter of the measured object is calculated.

In this diameter measuring method, the outer peripheral surface of the measuring reference member is moved from the measuring reference position by the displacement meter while the measuring reference member and the object to be measured are both supported by the outer peripheral reference receiving member at two points with respect to the outer peripheral surface. Measure the radial displacement of the DUT to the outer peripheral surface of the DUT, and measure the displacement of the DUT to the outer peripheral surface of the DUT. Is calculated, and the diameter of the object to be measured is compared and measured based on the diameter of the measurement reference member (reference piece). Some displacement gages have a measurement accuracy of about 0.01 μm, such as a non-contact capacitance type micro displacement meter, so that a diameter measurement accuracy of about 0.1 μm can be sufficiently ensured.

According to a second aspect of the present invention, in the diameter measuring method according to the first aspect, a material having the same thermal expansion characteristic as that of the object to be measured is used as the measurement reference member. Features.

According to the diameter measuring method of the present invention, when there is a temperature change, the measurement reference member and the object to be measured are thermally deformed equally,
The comparative measurement of the diameter of the object to be measured based on the diameter of the measurement reference member is performed without including a thermal deformation error regardless of the temperature state.

According to a third aspect of the present invention, in the diameter measuring apparatus, an outer peripheral reference receiving member for supporting the disk-shaped measuring reference member and the object to be measured at two points with respect to the outer peripheral surface, and facing the outer peripheral reference receiving member. A displacement meter for measuring a radial measurement reference displacement amount from a measurement reference position installed on a side to be measured to an outer peripheral surface of the measurement reference member and a radial measurement object displacement amount to an outer peripheral surface of the measurement object, respectively. Wherein the diameter of the measured object is calculated from the deviation of the measured object displacement amount from the measurement reference displacement amount.

In the diameter measuring apparatus according to the present invention, the displacement reference is used to move the measurement reference member from the measurement reference position by the displacement meter in a state where both the measurement reference member and the object to be measured are supported by the outer reference surface receiving member at two points with reference to the outer peripheral surface. The measured reference displacement amount in the radial direction to the outer peripheral surface and the measured displacement amount of the measured object in the radial direction to the outer peripheral surface of the measured object are each measured, and the measured object displacement is calculated from the deviation of the measured object displacement amount from the measured reference displacement amount. Is calculated, and the diameter of the measured object is compared and measured based on the diameter of the measurement reference member.

According to a fourth aspect of the present invention, in the diameter measuring device according to the third aspect, the outer peripheral reference receiving member is constituted by two support pins having a circular cross section fixed and arranged at a predetermined interval from each other. It is characterized by having.

In the diameter measuring apparatus according to the present invention, the measurement reference member and the object to be measured are completely supported at two points by two support pins having a circular cross section.

The invention according to claim 5 is the invention according to claim 3 or 4.
In the diameter measuring device described in the above, the front displacement meter is fixedly arranged at a position separated by a predetermined amount in the radial direction of the measurement reference member with respect to the outer circumference reference receiving member, and the outer circumference reference receiving member is The displacement meter is provided on a movable table that can move linearly in the radial direction, and the displacement meter selectively faces the outer peripheral surface of the measurement reference member or the outer peripheral surface of the object to be measured by the linear movement of the outer peripheral reference receiving member by the movable table. It is characterized by doing.

In the diameter measuring apparatus according to the present invention, the displacement gauge is selectively opposed to the outer peripheral surface of the measurement reference member or the outer peripheral surface of the object to be measured by the linear movement of the outer peripheral reference receiving member by the movable table, thereby providing a displacement. The measurement reference displacement and the measured object displacement are measured by the meter.

According to a sixth aspect of the present invention, in the diameter measuring device according to any one of the third to fifth aspects, the displacement meter is a non-contact type capacitive minute displacement meter.

In the diameter measuring apparatus according to the present invention, the measurement reference displacement amount and the measured object displacement amount are measured by a non-contact capacitance type minute displacement meter. Since the non-contact capacitance type micro displacement meter has a measurement accuracy of about 0.01 μm,
A diameter measurement accuracy of about 0.1 μm can be sufficiently ensured.

The invention according to claim 7 is characterized in that, in the diameter measuring device according to any one of claims 3 to 6, the outer peripheral reference receiving member is made of the same material as the object to be measured.

In the diameter measuring apparatus according to the present invention, when there is a temperature change, the measurement reference member and the object to be measured are thermally deformed equally, and the comparative measurement of the diameter of the object to be measured based on the diameter of the measurement reference member is performed. This operation is performed without including a thermal deformation error regardless of the temperature state.

According to an eighth aspect of the present invention, in the diameter machining / measuring method, a disk-shaped measurement reference member and a vacuum chuck face plate are mounted on a main shaft, and the main shaft is rotated to form an outer peripheral surface of the measurement reference member on the machine. The workpiece chucking surface of the vacuum chuck face plate is cut to obtain concentricity with respect to the main axis of the measurement reference member and verticality setting with respect to the main axis of the workpiece chucking surface. Attach things,
The outer periphery of the workpiece is cut by rotating the spindle, and a measured reference displacement amount in a radial direction from a predetermined measurement reference position to an outer peripheral surface of the measurement reference member and a radial measured displacement amount to an outer peripheral surface of the workpiece are measured. Each of the workpiece displacements is measured by a displacement meter, and the diameter of the workpiece is calculated from a deviation of the workpiece displacement from the measured reference displacement.

In the diameter machining / measuring method according to the present invention,
Since the spindle is rotated and the outer peripheral surface of the measurement reference member and the workpiece chucking surface of the vacuum chuck face plate are cut on the machine, the concentricity of the measurement reference member with respect to the spindle is determined, and the workpiece suction surface is aligned with the spindle. Verticality determination is performed accurately without including a large error component.

The workpiece is attached to the workpiece suction surface which has been set vertically by the above-described cutting, and the outer periphery of the workpiece is cut by rotating the main shaft. The radially measured reference displacement to the outer peripheral surface of the measurement reference member and the radially measured workpiece displacement to the outer peripheral surface of the workpiece are measured, and the measured displacement relative to the measured reference displacement is measured. The diameter of the workpiece is calculated from the deviation of the workpiece displacement, and the diameter of the workpiece is compared and measured based on the diameter of the measurement reference member (reference piece). Also in this case, since some displacement meters have a measurement accuracy of about 0.01 μm, such as a non-contact capacitance type minute displacement meter, a diameter measurement accuracy of about 0.1 μm can be sufficiently ensured.

According to a ninth aspect of the present invention, in the diameter machining / measuring method according to the eighth aspect, the measurement reference member and the vacuum chuck face plate are formed of a low thermal expansion material such as invar, and an outer periphery of the measurement reference member is provided. A free-cutting material layer made of copper, aluminum, or the like is provided on the surface and the workpiece suction surface of the vacuum chuck face plate, and the free-cutting material layer is cut on a machine.

The thickness of the free-cutting material layer may be about 0.3 to 1.0 mm, and it can be formed by a thick film forming technique such as plating and thermal spraying.

In the diameter machining / measuring method according to the present invention,
Since the outer peripheral surface of the measurement reference member and the workpiece chucking surface of the vacuum chuck face plate are cut on the free-cutting material layer, the required cutting accuracy, which is higher than that of invar or the like, can be obtained. Since the main body (base body) of the vacuum chuck face plate is made of a low thermal expansion material such as invar, errors due to these thermal deformations are small.

According to a tenth aspect of the present invention, there is provided a disk-shaped measurement reference member attached to a main shaft and a vacuum chuck face plate, and an outer peripheral surface of the measurement reference member and a workpiece suction surface of the vacuum chuck face plate are connected to each other. By rotating the main shaft and cutting on the machine, the concentricity of the measurement reference member with respect to the main shaft and the perpendicularity of the workpiece suction surface with respect to the main shaft are performed, and the main shaft is rotated to fix the workpiece suction surface. The outer peripheral cutting of the attached workpiece is performed, a radial measurement reference displacement amount from a predetermined measurement reference position to an outer peripheral surface of the measurement reference member, and a radial workpiece to the outer peripheral surface of the workpiece. In a diameter machining / measuring device for measuring a displacement amount by a displacement meter and calculating a diameter of the workpiece from a deviation of the workpiece displacement amount from the measurement reference displacement amount, the measurement reference member and the vacuum chuck The plate is made of a low thermal expansion material such as Invar, and a free-cutting material layer made of copper, aluminum, or the like is provided on an outer peripheral surface of the measurement reference member and a workpiece suction surface of the vacuum chuck face plate. It is characterized in that the layer is cut on machine.

In the diameter machining / measuring device according to the present invention,
Since the outer peripheral surface of the measurement reference member and the workpiece chucking surface of the vacuum chuck face plate are cut on the free-cutting material layer, the required cutting accuracy, which is higher than that of invar or the like, can be obtained. Since the main body (base body) of the vacuum chuck face plate is made of a low thermal expansion material such as invar, errors due to these thermal deformations are small.

According to an eleventh aspect of the present invention, in the diameter machining / measuring apparatus according to the tenth aspect, a cylindrical movable shutter for selectively shielding an outer peripheral surface of the measurement reference member is provided. I have.

In the diameter machining / measuring device according to the present invention,
The outer peripheral surface of the measurement reference member is selectively shielded by the movable shutter, and the outer peripheral surface of the measurement reference member is not contaminated by cutting chips or the like.

According to a twelfth aspect of the present invention, there is provided a centering device for centering a workpiece suction surface of a vacuum chuck face plate and a workpiece being sucked, the centering device being provided movably in a radial direction of the workpiece. An apparatus having an outer peripheral reference centering receiving member for supporting the outer peripheral surface of the workpiece at two points, and a servo-type shaft driving device for positioning and driving the outer peripheral reference centering receiving member in the radial direction of the workpiece. It is.

In the centering apparatus according to the present invention, the outer peripheral reference centering receiving member for supporting the outer peripheral surface of the workpiece at two points is driven in the radial direction of the workpiece by the servo-type shaft driving device to drive the workpiece. The centering of things is performed.

[0035]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 shows an embodiment of the diameter measuring apparatus according to the present invention. This diameter measuring device is provided with a movable base 3 on a base 1 which can be moved linearly (horizontally) with high precision in the horizontal direction as viewed in FIG. 5, two support pins 7, 7 having a circular cross-section are horizontally implanted as outer peripheral reference receiving members.

The support pins 7, 7 are provided with a disk-shaped measurement reference member 9 and an object M to be measured, and both of them are supported at two points with reference to the outer peripheral surface, as shown in FIG. As described above, the measurement reference member 9 and the center vertical line Cb of the DUT M
With a rotation angle θ of about 30 degrees with respect to the center vertical line Cb.
Are arranged symmetrically on both sides.

The measurement reference member 9 has a high degree of cylindricality and roundness, and is made of a material having the same thermal expansion characteristics as the thermal expansion characteristics of the DUT M. And the same material as above, for example, oxygen-free copper.

The moving table 3 is driven in the left-right direction (Z-axis direction) as viewed in FIG. 1 by a feed screw 11, and the feed screw 11 is driven to rotate by a servomotor 15 having a rotary encoder 13. An axis drive / control device 17 is connected to the servo motor 15.

The axis drive / control device 17 is a servo controller, which receives a position signal output from the rotary encoder 13 and feedback-controls the Z-axis position of the movable base 3 by controlling the current of the servo motor 15.

On the side facing the support pins 7, 7 with the measurement reference member 9 interposed therebetween, that is, on the upper side, the measuring element 21 of the non-contact type capacitive micro displacement meter 19 is mounted on the base 1 by the mount member 23.
It is fixedly attached to. The measuring element 21 is connected to the displacement calculating means 25 of the non-contact capacitance type micro displacement meter 19, and the displacement calculating means 25 determines the measuring element 21 based on the capacitance between the measuring element 21 and the opposing surface. The amount of displacement between the opposing surfaces is measured with an accuracy of about 0.01 μm.

In this case, the tracing stylus 21 is fixedly disposed at a predetermined distance in the radial direction of the measurement reference member with respect to the support pins 7 and 7, and the tracing stylus is linearly moved by the movable base 3. Reference numeral 21 selectively faces the outer peripheral surface of the measurement reference member 9 or the outer peripheral surface of the device under test M.

The displacement calculating means 25 causes the tracing stylus 21 to face the measurement reference member 9 mounted on the support pins 7 or the outer peripheral surface of the object M by the Z-axis movement of the movable base 3. Accordingly, the diameter from the measurement reference position (uniformly determined by the fixed position of the tracing stylus 13) to the outer peripheral surface of the measurement reference member 9 is set on the side facing the support pins 7, 7 with the measurement reference member 9 interposed therebetween. The measurement reference displacement amount Lo in the direction or the measured object displacement amount Lm in the radial direction up to the outer peripheral surface of the measured object M is measured.

Information on the measurement reference displacement Lo and the measured object displacement Lm measured by the displacement calculator 25 is input to the diameter calculator 27. The diameter calculating means 27 calculates Lm
The calculation of -Lo is performed, and the diameter of the measured object M is calculated from the deviation ΔL of the measured object displacement amount Lm with respect to the measured reference displacement amount Lo because the diameter of the measured reference member 9 is known. Incidentally, it is also possible to output 1/2 of the deviation ΔL as a cutting allowance.

Thus, the diameter of the object to be measured M is 0.1 μm.
Measurement can be performed with an accuracy of about a degree, and a shaving allowance can be set with an accuracy of about 0.1 μm.

Since the measurement reference member 9 and the object M are completely supported at two points by the two support pins 7, 7 having a circular cross section, the measurement is carried out as compared with the case where the outer peripheral reference receiving member is a V-block or the like. The measurement of the reference displacement Lo and the measured object displacement Lm is performed with high accuracy without including an error component on the outer peripheral reference receiving side. This also allows the diameter of the object M to be measured with high accuracy.

Further, since the outer peripheral reference receiving member 9 is made of the same material as the object to be measured M, the measuring reference member 9 and the object to be measured M are equally thermally deformed, and the diameter of the measuring reference member 9 is set as a reference. The comparative measurement of the diameter of the object M can be performed without including the thermal deformation error irrespective of the temperature state, and the diameter of the object M can be measured with high accuracy. become.

FIGS. 3 to 5 show an embodiment of the diameter machining / measuring device and the centering device according to the present invention.

In this diameter measuring apparatus, a Z-axis moving table 33 is provided on a base 31, which can be linearly moved (moved horizontally) with high precision in the horizontal direction as viewed in FIG. A headstock 35 is mounted on the shaft moving base 33.

On the headstock 35, a spindle 37, a spindle motor 3
9 are provided. A disk-shaped measurement reference member 41 and a vacuum chuck face plate 43 are attached to the spindle 37. The measurement reference member 41 and the vacuum chuck face plate 43 are attached to the spindle 3.
7 is driven to rotate.

The front surface of the vacuum chuck face plate 43 is a workpiece suction surface 45, and the workpiece W is suction-held on the workpiece suction surface 45.

The measurement reference member 41 has a high degree of cylindricality and roundness, is made of a low thermal expansion material such as invar, and has a free-cutting material layer 47 made of copper, aluminum or the like on its outer peripheral surface.
Is formed. Further, the vacuum chuck face plate 45 is made of a low thermal expansion material such as invar, and
A free-cutting material layer 49 made of copper, aluminum, or the like is formed. The thickness of the free-cutting material layers 47 and 49 is 0.3 to 1.0 mm
It can be formed by a thick film forming technique such as plating and thermal spraying.

The headstock 35 is provided with a cylindrical movable shutter 51 for selectively shielding the outer peripheral surface of the measurement reference member 41. The movable shutter 51 prevents foreign matter such as chips from adhering to the outer peripheral surface of the measurement reference member 41 at a position indicated by a virtual line in FIG. In cooperation therewith, a duct is formed to guide the air discharged from the hydrostatic bearing of the main shaft 37 to the outer peripheral surface of the measurement reference member 41 as air for blowing off foreign matter.

The Z-axis moving table 33 is driven in the left-right direction (Z-axis direction) as viewed in FIG.
5 is rotationally driven by a Z-axis servo motor 59 having a rotary encoder 57. The shaft drive / control device 61 is connected to the servo motor 59.

The axis drive / control device 61 is a servo controller to which an axis movement command is given from an NC device (not shown). The axis drive / control device 61 receives a position signal output from the rotary encoder 57 and controls the current by a Z-axis servo motor 59. The Z-axis position of the Z-axis moving table 33 is feedback-controlled.

In front of the vacuum chuck face plate 43, there is an X-axis (moving in the direction perpendicular to the plane of FIG. 3) which is movable in the X-axis direction.
An axis moving stand 63 and a tool rest 65 mounted on the X-axis moving stand 63 are provided, and a tool bit 67 is attached to the tool rest 65 as a cutting tool. Similar to the Z-axis moving table 33, the X-axis moving table 63 is controlled by an X-axis servomotor (not shown) by a current being controlled by a servo controller which receives an axis moving command from the NC device. The position is feedback controlled.

On the base 31, Y which is the radial direction of the workpiece W
An outer peripheral reference centering pedestal 69 is provided so as to be movable in the axial direction (the vertical direction in FIG. 3). The outer peripheral reference centering pedestal 69 is provided with a cylindrical pin 7 that supports the outer peripheral surface of the workpiece W at two points.
1, 71 are provided, and are driven in the Y-axis direction by a feed screw 73.

The feed screw 73 is driven to rotate by a Y-axis servomotor 79 having a rotary encoder 77.
An axis drive / control device 81 is connected to the Y-axis servo motor 79.

The axis drive / control device 81 is a servo controller to which an axis movement command is given from an NC device (not shown). The axis drive / control device 81 receives a position signal output from the rotary encoder 79 and controls the current by the Y-axis servo motor 79. The Y-axis position of the outer peripheral reference centering pedestal 69 serving as the Y-axis moving table is feedback-controlled.

On the upper side of the measuring reference member 41, a measuring element 85 of a non-contact type capacitance type minute displacement meter 83 is mounted.
Fixedly attached to the base 1. The measuring element 85 has a displacement calculating means 8 of the non-contact type capacitive minute displacement meter 83.
9 is connected, and the displacement amount calculating means 89 is
Is measured with an accuracy of about 0.01 [mu] m from the capacitance with the opposing surface.

In this case, the tracing stylus 85 selectively faces the outer peripheral surface of the measurement reference member 41 or the outer peripheral surface of the workpiece W by the Z-axis movement by the Z-axis moving table 33.

The displacement calculating means 89 causes the tracing stylus 85 to face the outer peripheral surface of the workpiece W attached to the measurement reference member 41 or the vacuum chuck face plate 43 by the Z-axis movement of the Z-axis moving table 33. As a result, the measurement reference displacement amount in the radial direction from the measurement reference position uniformly determined by the fixed position of the tracing stylus 85 to the outer peripheral surface of the measurement reference member 41 or the radial measurement to the outer peripheral surface of the workpiece W Each object displacement is measured.

The information on the measured reference displacement and the workpiece displacement measured by the displacement calculating means 89 is calculated by the diameter calculating means 9.
1 is input. The diameter calculating means 91 performs an operation of (measurement reference displacement amount)-(working displacement amount), and since the diameter of the measurement reference member 41 is known, the deviation of the workpiece displacement amount with respect to the measurement reference displacement amount is calculated. The diameter of the workpiece W is calculated. In this case, it is also possible to output 1/2 of the deviation as a cutting allowance.

As a result, the diameter of the object to be measured M is set to 0.1 μm.
Measurement can be performed with an accuracy of about a degree, and a shaving allowance can be set with an accuracy of about 0.1 μm.

In this diameter machining / measuring apparatus, prior to diameter measurement, the main shaft 37 is rotated and the free-cutting material layer 47 forming the outer peripheral surface of the measurement reference member 41 is brought to a predetermined diameter by the cutting tool 67 on the machine. The main shaft 3 of the measuring reference member 41 after cutting
7 is completed, the spindle 37 is rotated, and the free-cutting material layer 49 forming the workpiece suction surface 45 of the vacuum chuck face plate 43 is cut by the cutting tool 67 on the machine. The verticality of the suction surface 45 with respect to the main shaft 37 is completely set.

As a result, the diameter measurement as described above can be accurately performed without including a large error component.

The outer peripheral surface of the measurement reference member 41 and the workpiece suction surface 45 of the vacuum chuck face plate 43 are cut by the free-cutting material layer 47,
Since this is performed for 49, the required cutting accuracy that is higher than that of cutting such as Invar can be obtained, and the main body of the measurement reference member 41 and the vacuum chuck face plate 43 is made of a low thermal expansion material such as Invar. In addition, errors due to these thermal deformations are small. This also allows the diameter measurement to be performed accurately without including a large error component.

In the case where the attachment of the workpiece W to the vacuum chuck face plate 43 is turned upside down to cut the uncut portion on the back side, the vacuum chuck face plate 43 of the workpiece W is cut.
Strict attention must be paid to the installation of In this centering, the diameter information of the workpiece W is given to the Y axis drive / control means 81 from the diameter calculation 91, and the outer reference centering pedestal 69 is driven in the Y axis direction by the Y axis servo motor 79. This is done automatically. The Y-axis direction driving of the outer peripheral reference centering pedestal 69 is performed according to an axis movement command of the NC device, and the resolution of the NC device is usually 0.01 μm.
m, the centering accuracy is also 0.1 μm.
The required accuracy of about m can be reliably obtained.

Although the present invention has been described in detail with reference to specific embodiments, the present invention is not limited to these embodiments, and various embodiments may be made within the scope of the present invention. The possibilities will be clear to the skilled person.

[0070]

As can be understood from the above description, according to the diameter measuring method of the first aspect, both the measuring reference member and the object to be measured are supported at two points on the outer peripheral surface by the outer peripheral reference receiving member. In this state, the displacement meter measures the radial measurement reference displacement from the measurement reference position to the outer peripheral surface of the measurement reference member and the radial measurement object displacement from the measurement object to the outer peripheral surface of the measurement object. Since the diameter of the object to be measured is calculated from the deviation of the amount of displacement of the object to be measured with respect to the amount of displacement, and the diameter of the object to be measured is compared and measured with reference to the diameter of the measurement reference member, the measurement accuracy of the displacement meter is about 0.01 μm. In conjunction with this, highly accurate diameter measurement with a diameter measurement accuracy of about 0.1 μm is performed.

According to the diameter measuring method according to the second aspect, the measurement reference member and the object to be measured are thermally deformed equally, and the comparative measurement of the diameter of the object to be measured based on the diameter of the measurement reference member is performed in a temperature state. Irrespective of the temperature, the measurement is performed without any thermal deformation error, so that the diameter measurement can be performed with high accuracy regardless of the temperature change.

According to the diameter measuring apparatus of the third aspect, the measurement is performed from the measurement reference position by the displacement meter in a state in which both the measurement reference member and the object to be measured are supported by the outer reference surface receiving member at two points with respect to the outer peripheral surface. The measured reference displacement amount in the radial direction up to the outer peripheral surface of the reference member and the measured object displacement amount in the radial direction up to the outer peripheral surface of the measured object are each measured, and the deviation of the measured object displacement amount from the measured reference displacement amount is calculated. Since the diameter of the object to be measured is calculated and the diameter of the object to be measured is compared and measured based on the diameter of the measurement reference member, the measurement accuracy of the displacement meter is approximately 0.01 μm, and the accuracy of the diameter measurement is reduced. High-precision diameter measurement of about 0.1 μm is performed.

According to the diameter measuring apparatus of the fourth aspect, the measuring reference member and the object to be measured are completely supported at two points by the two support pins having a circular cross section. The comparative measurement of the diameter of the measured object is performed with higher accuracy.

According to the diameter measuring apparatus according to the fifth aspect, the displacement meter selectively opposes the outer peripheral surface of the measurement reference member or the outer peripheral surface of the object to be measured by the linear movement of the outer peripheral reference receiving member by the movable table. Since the displacement of the measurement reference and the displacement of the object to be measured are each performed by the displacement meter, the comparative measurement of the diameter of the object to be measured based on the diameter of the measurement reference member is reliably performed.

According to the diameter measuring apparatus of the present invention, the measurement reference displacement amount and the measured object displacement amount are measured by the non-contact type capacitive minute displacement meter, and the non-contact type capacitive minute displacement meter is used. Has a measurement accuracy of about 0.01 μm,
A diameter measurement accuracy of about 0.1 μm is sufficiently ensured.

According to the diameter measuring apparatus of the present invention, the measurement reference member and the object to be measured are thermally deformed equally, and the comparative measurement of the diameter of the object to be measured with respect to the diameter of the measurement reference member is performed in a temperature state. Irrespective of the temperature, the measurement is performed without any thermal deformation error, so that the diameter measurement can be performed with high accuracy regardless of the temperature change.

According to the diameter machining / measuring method of the present invention, the outer peripheral surface of the measurement reference member and the workpiece suction surface of the vacuum chuck face plate are cut on the machine by rotating the main shaft.
The concentricity with respect to the main axis of the measurement reference member and the perpendicularity with respect to the main axis of the workpiece suction surface are accurately performed without including a large error component. The workpiece is mounted on the workpiece, the main shaft is rotated, the outer circumference of the workpiece is cut, and the displacement gauge measures the radial measurement standard from the measurement reference position to the outer peripheral surface of the measurement reference member that has already been concentrically set by cutting. Displacement amount,
Measure the amount of workpiece displacement in the radial direction up to the outer peripheral surface of the workpiece, calculate the diameter of the workpiece workpiece from the deviation of the workpiece displacement from the measurement reference displacement, and calculate the diameter of the measurement reference member. Since the diameter of the object to be measured is compared and measured with reference to the above, it is possible to measure the diameter with high accuracy of about 0.1 μm in combination with the measurement accuracy of the displacement meter being about 0.01 μm. become.

According to the diameter machining / measuring method and the apparatus according to the ninth and tenth aspects, the cutting of the outer peripheral surface of the measurement reference member and the suction surface of the workpiece of the vacuum chuck face plate are performed on the free cutting material layer. The required cutting accuracy, which is higher than the required cutting accuracy, is obtained.The measurement reference member and the main body of the vacuum chuck face plate are made of a low thermal expansion material such as invar. As a result, highly accurate diameter measurement can be performed.

According to the diameter machining / measuring device according to the eleventh aspect, the outer peripheral surface of the measurement reference member is selectively shielded by the movable shutter, and the outer peripheral surface of the measurement reference member is contaminated by cutting chips or the like. Instead, this also enables highly accurate diameter measurement.

According to the apparatus for centering a workpiece according to the twelfth aspect of the present invention, an outer peripheral reference receiving member that supports two points on the outer peripheral surface of the workpiece is positioned in the radial direction of the workpiece by a servo-type shaft driving device. Since the workpiece is centered by being driven, high-precision centering is repeatedly performed with good reproducibility and quickly.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram showing one embodiment of a diameter measuring device according to the present invention.

FIG. 2 is an explanatory view showing a main part of a diameter measuring device according to the present invention.

FIG. 3 is a schematic configuration diagram showing one embodiment of a diameter / working measuring device and a centering device according to the present invention.

FIG. 4 is an explanatory view showing a main part of a diameter / working measuring apparatus according to the present invention.

FIG. 5 is an explanatory view showing a main part of a centering device according to the present invention.

[Description of Signs] 1 Base 3 Moving stand 7 Support pin 9 Measurement reference member 15 Servo motor 17 Axis drive / control device 19 Non-contact capacitance type minute displacement meter 21 Measuring element 25 Displacement amount calculating means 27 Diameter calculating means Reference Signs List 31 base 33 Z-axis moving table 35 headstock 37 main shaft 39 main shaft motor 41 measurement reference member 43 vacuum chuck face plate 45 workpiece suction surface 47, 49 free-cutting material layer 51 movable shutter 59 Z-axis servomotor 61 axis drive / control Apparatus 63 X-axis moving table 65 Tool post 67 Tool holder 69 Outer reference centering pedestal 79 Y-axis servo motor 81 Axis drive / control device 85 Non-contact type capacitive minute displacement meter 85 Measuring element 89 Displacement amount calculating means 91 Diameter calculation means

Claims (12)

[Claims] 1. A disk-shaped measurement reference member and an object to be measured are supported by an outer peripheral reference receiving member at two points with respect to an outer peripheral surface, and the measurement reference position is set from a measurement reference position provided on a side facing the outer peripheral reference receiving member. The displacement of the measured reference displacement in the radial direction up to the outer peripheral surface of the measurement reference member and the displacement of the measured object in the radial direction up to the outer peripheral surface of the measured object are measured by a displacement meter, and the measured object with respect to the measured reference displacement is measured. A diameter measuring method, wherein a diameter of the object is calculated from a deviation of a displacement amount. 2. The method according to claim 1, wherein the measurement reference member is made of a material having the same thermal expansion characteristic as that of the object to be measured. 3. A disc-shaped measurement reference member and an object to be measured,
An outer peripheral reference receiving member that supports two points with respect to the outer peripheral surface, and a radial measurement reference displacement amount from a measurement reference position installed on a side facing the outer peripheral reference receiving member to an outer peripheral surface of the measurement reference member, and A displacement meter for measuring the amount of displacement of the measured object in the radial direction up to the outer peripheral surface of the measured object, and calculating a diameter of the measured object from a deviation of the measured object displacement from the measured reference displacement amount. A diameter measuring device characterized by the above-mentioned. 4. The diameter measuring apparatus according to claim 3, wherein the outer peripheral reference receiving member is constituted by two support pins having a circular cross section fixedly arranged at a predetermined interval from each other. 5. The displacement meter is fixedly arranged at a position radially away from the outer peripheral reference receiving member by a predetermined distance from the outer peripheral reference receiving member, and the outer peripheral reference receiving member is linearly arranged in a radial direction of the outer peripheral reference receiving member. The displacement gauge is provided on a movable movable table, and the displacement meter selectively faces the outer peripheral surface of the measurement reference member or the outer peripheral surface of the object to be measured by the linear movement of the outer peripheral reference receiving member by the movable table. Claim 3
Or the diameter measuring device according to 4. 6. The diameter measuring device according to claim 3, wherein the displacement meter is a non-contact type capacitance type minute displacement meter. 7. The diameter measuring device according to claim 3, wherein the outer peripheral reference receiving member is made of the same material as the object to be measured. 8. A disk-shaped measurement reference member and a vacuum chuck face plate are mounted on a spindle, and the spindle is rotated to cut an outer peripheral surface of the measurement reference member and a workpiece suction surface of the vacuum chuck face plate on a machine. Then, the concentricity of the measurement reference member with respect to the main axis and the perpendicularity of the workpiece suction surface with respect to the main axis are obtained, the workpiece is attached to the workpiece suction surface, and the main shaft is rotated to perform the processing. Cutting the outer periphery of the object,
Measuring a radial measurement reference displacement amount from a predetermined measurement reference position to an outer peripheral surface of the measurement reference member and a radial workpiece displacement amount from the predetermined reference position to the outer peripheral surface of the workpiece using a displacement meter; A diameter machining / measuring method, wherein a diameter of the workpiece is calculated from a deviation of the workpiece displacement from a reference displacement. 9. The measurement reference member and the vacuum chuck face plate are made of a low thermal expansion material such as invar, and the outer peripheral surface of the measurement reference member and the workpiece suction surface of the vacuum chuck face plate are made of copper, aluminum or the like. 9. A free-cutting material layer is provided by cutting the free-cutting material layer on a machine.
Diameter processing and measuring method described in. 10. A disk-shaped measurement reference member attached to a main shaft and a vacuum chuck face plate, wherein the main shaft is rotated by rotating an outer peripheral surface of the measurement reference member and a workpiece suction surface of the vacuum chuck face plate. Cutting on the machine, the concentricity of the measurement reference member with respect to the main axis and the perpendicularity of the workpiece suction surface with respect to the main axis are performed, and the main shaft is rotated to process the workpiece attached to the workpiece suction surface. Cutting the outer periphery of the object,
Measuring a radial measurement reference displacement amount from a predetermined measurement reference position to an outer peripheral surface of the measurement reference member and a radial workpiece displacement amount from the predetermined reference position to the outer peripheral surface of the workpiece using a displacement meter; In a diameter machining / measuring device that calculates a diameter of the workpiece from a deviation of the workpiece displacement amount with respect to a reference displacement amount, the measurement reference member and the vacuum chuck face plate are formed of a low thermal expansion material such as Invar, Copper on the outer peripheral surface of the measurement reference member and the workpiece suction surface of the vacuum chuck face plate,
A diameter machining / measuring device, wherein a free-cutting material layer made of aluminum or the like is provided, and the free-cutting material layer is cut on a machine. 11. The diameter machining / measuring device according to claim 10, further comprising a cylindrical movable shutter for selectively shielding an outer peripheral surface of the measurement reference member. 12. A centering device for centering a workpiece suction surface of a vacuum chuck face plate and a workpiece being sucked, wherein the centering device is provided so as to be movable in a radial direction of the workpiece and an outer periphery of the workpiece. An outer peripheral reference centering receiving member that supports two points of a surface; and a servo-type shaft driving device that drives the outer peripheral reference centering receiving member in a radial direction of the workpiece. Workpiece centering device.