JPH10264014A - Grinding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a grinding device for attempting the long life of a lower surface plate and the reduction of a cooling facility cost by cooling the lower surface plate without adding a processing to the lower surface plate and without using a special cooling instrument. SOLUTION: Plural seats 43 provided on the lower surface plate receiving body 4 placing and rotating a lower surface plate 1 are formed in a blade shape and an intake hole 33 and exhaust hole 13 communication to the clearance C of the seats 43 are bored on a sun gear 3 and a box body. Thereby, when the lower surface plate 4 is rotated, the cold air G of an outside is inhaled in the clearance C of the seats 43 from the intake hole 33 by the rotation of the seats 43 and discharged from the exhaust hole 13b to the outside through the clearance C. Consequently, the lower surface plate 1 is cooled by the cold air through the clearance C.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing apparatus having a function of cooling a lower surface plate for polishing a work.

[0002]

2. Description of the Related Art In a polishing apparatus, a work is pressurized on a lower platen with an upper platen, and both surfaces of the work are simultaneously polished by rotating the upper platen and the lower platen in opposite directions while pouring a polishing liquid. There are a double-side polishing apparatus and a single-side polishing apparatus for polishing a single surface of a work by pressing a work to a lower surface plate with a head and rotating the lower surface plate while pouring a polishing liquid. In these polishing apparatuses, since the work is polished while being pressed against the lower surface plate, the lower surface plate is heated by friction, which may adversely affect the work in contact with the lower surface plate. Therefore, these polishing apparatuses are provided with a cooling mechanism for cooling the lower platen. Conventionally, there is the following mechanism as this kind of cooling mechanism. The first mechanism is a technique in which a passage through which a liquid can flow is provided in the lower platen, and the lower platen is cooled through cooling water in this passage. The second mechanism is a technique in which a lower polishing plate is cooled with a cooled polishing liquid by polishing a work while pouring a cooled polishing liquid onto the lower polishing plate.

[0003]

However, the above-mentioned prior art has the following problems. In the first technique in which the lower surface plate is provided with a passage for passing the cooling water, the passage needs to be processed, and the strength of the lower surface plate may be reduced. In addition, special equipment for pre-cooling the water supplied to the passage is required. Also, in the second technique of pouring the cooled polishing liquid into the lower platen, a special device for cooling the polishing liquid is required as in the first technique.

[0004] The present invention has been made to solve the above-mentioned problems, and it is possible to cool the lower stool without processing the lower stool and without using a special cooling device. It is an object of the present invention to provide a polishing apparatus that achieves a longer life of a lower stool and a lower cost of cooling equipment.

[0005]

In order to achieve the above object, the inventor paid attention to the following points. FIG. 9 is a schematic perspective view showing a lower stool receiver used in the polishing apparatus. FIG.
As shown in the figure, the lower platen 100 of the polishing device is
The lower platen 100 is integrally rotated by rotating the lower platen receiver 200. Specifically, the lower surface plate receiver 200 is a disk having substantially the same shape as the lower surface plate 100, and has a plurality of seats 210 on its surface.
Are provided radially. The lower surface plate 100 is placed on such a seat 210 and rotates integrally with the lower surface plate receiver 200. FIG. 10 is a plan view of the lower surface plate receiver 200. As shown in FIG. 10, each seat portion 210 is
00, so that even if the lower platen receiver 200 is rotated, the external air is supplied to the center hole 100a of the lower platen 100.
Although it is not possible to inhale air from the lower surface plate receiver 42 (see FIG. 9), it is considered that the lower surface plate 100 can be cooled by inhaling external air by using the shape of the lower surface plate receiver 42.

In view of the above, the invention according to claim 1 provides a lower surface plate receiver having a central portion fixed to a rotating shaft and a plurality of seats radially disposed on the surface thereof, and a lower surface plate receiver mounted on the lower surface plate receiver. In a polishing apparatus characterized by comprising a lower platen,
A first opening for communicating the outside of the apparatus with the gaps between the plurality of seats is provided at the center of the lower platen, and a second opening for communicating the gap between the seats and the outside of the apparatus is provided outside the lower surface plate receiver. And the seat is formed in a blade shape that allows air outside the apparatus to be sucked in from the first opening by rotation and discharged from the second opening through the gap between the seats. According to this configuration, when the lower platen receiver is rotated, the lower platen rotates integrally. At this time, since the blade-shaped seat also rotates, air outside the apparatus is sucked in from the first opening, flows through the gap between the seats, and is discharged from the second opening. As a result, cool air outside the apparatus always flows through the gap between the seats, and this air cools the lower platen.

According to a second aspect of the present invention, in the polishing apparatus according to the first aspect, the side surface of the seat portion facing the rotation direction of the lower surface plate receiver is formed in a shape curved in the rotation direction. There is. The invention of claim 3 is based on claim 1
Alternatively, the polishing apparatus according to claim 2, wherein the polishing apparatus is a double-side polishing apparatus for polishing a workpiece held by a carrier meshed with a sun gear and an internal gear by sandwiching the workpiece between an upper surface plate and a lower surface plate. And a hole formed in the sun gear. Further, the invention of claim 4 is based on claim 1
Alternatively, in the polishing apparatus according to claim 2, the polishing apparatus is a single-side polishing apparatus for polishing a work placed on the lower platen while pressing with a head, and the first opening is a center hole of the lower platen. .

[0008]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a front view showing a polishing apparatus according to an embodiment of the present invention, partially cut away. The polishing apparatus of the present invention is a double-sided lapping apparatus, which includes a lower platen 1 and an upper platen 2, and sandwiches the work 11 held by the carrier 10 between the lower platen 1 and the upper platen 2 from above and below, By rotating in the opposite direction, both surfaces of the work 11 are polished simultaneously. In particular,
The driver 12 and the sun gear 3 are mounted on the lower device body.
And the internal gear 14 and the lower stool 1.

The driver 12 is a member for rotating the upper stool 2 and is mounted above a central shaft 12a rotatably supported. Sun Gear 3 is Carrier 1
This sun gear 3 is a gear for rotating 0.
It is fixed to the upper end of a cylindrical shaft body 3a rotatably mounted outside the center shaft 12a via a bearing 3b. FIG. 2 is a plan view of the sun gear 3. As shown in FIG. 2, the sun gear 3 is a pin gear, and the
A support shaft 31 is erected on the upper surface of the support shaft 31, and a cylindrical body 32 is rotatably fitted to the support shaft 31. As shown in FIG. 1, the internal gear 14 is also a pin gear, and has a structure in which a support shaft 14a is erected on the upper surface of the outer peripheral portion of a housing 13 of the apparatus main body, and a cylinder 14b is rotatably fitted to the support shaft 14a. Has become.

The lower platen 1 is disposed between the sun gear 3 and the internal gear 14 as described above. The lower surface plate 1 is a disk having a center hole 1a including a sun gear 3 therein, and a lower surface plate receiver 4 assembled inside the apparatus main body.
Is placed on top. The lower surface plate receiver 4 has a bearing 40
, A cylindrical rotating shaft 41 rotatably attached to the outside of the shaft body 3a, a receiving body 42 fixed to the upper end of the rotating shaft 41, and a sun gear fixed to the center of the receiving body 42 And a cylindrical shielding ring 49 fitted in the third concave portion 34. The rotating shaft 41 has a tooth portion 41a on a lower outer periphery, and the worm gear 15 is meshed with the tooth portion 41a. The worm gear 15 includes a pulley 16
The pulley 16 transmits the rotational force from the motor 19 to the worm gear 15 via the belt 17 wound around the pulley 18. The receiver main body 42 is a tapered disk body whose lower surface is horizontal and whose thickness increases from the outer peripheral edge toward the center, and a plurality of seats 43 are radially arranged on the inclined upper surface. Have been. Each seat 43 has a length from the edge of the center hole 1a of the lower stool 1 to the outer edge of the lower stool 1, and the upper surface 43a is formed horizontally. The lower platen 1 is provided with such a seat 43
Is horizontally mounted on the upper surface 43a of the camera, and is locked to the seat 43 by a pin or the like (not shown).

On the other hand, the upper stool 2 is a disk having substantially the same shape as the lower stool 1 and is held by a suspension plate 20 attached to the lower end of the piston rod 50 of the cylinder 5. Specifically, the lower end of the support shaft 21 on the lower surface of the suspension plate 20 is attached to the inner plate 22, and the upper stool 2 is fixed to the inner plate 22. The inner plate 22 has a center hole 22a having substantially the same diameter as the driver 12 and a hole 22b around the center hole 22a. The center hole 22a can be engaged with the vertical groove 12b of the driver 12 near the center hole 22a. Hook 23 is provided. The tube 24 extending from the suspension plate 20 to the inside of the upper platen 2 is for injecting the polishing liquid toward the lower platen 1 so that the polishing liquid is supplied to the tube 24 from a pump (not shown). Has become. The polishing liquid injected into the lower stool 1 falls from the center hole 1a of the lower stool 1 and travels along the upper surface of the receiver main body 42 to receive the polishing liquid.
Flows from the outer peripheral edge of the lower platen 1 to the outer peripheral edge of the receiver main body 42, so that a tray portion 13 a for receiving these polishing liquids is provided inside the housing 13. Then, the polishing liquid in the tray section 13a is returned to the pump side (not shown), and is supplied to the tube 24 again.

The double-sided lapping apparatus having the above structure is provided with an air-cooling type cooling mechanism which is a main part of this embodiment. The cooling mechanism is configured using the sun gear 3, the lower platen receiver 4, and the housing 13. That is, FIG.
As shown in FIG. 1, a plurality of intake holes 33 (first openings) are circumferentially formed in the flange portion 30 of the sun gear 3, and as shown in FIG. The gap C of the portion 43 communicates with the outside of the device. In the lower stool 4, the seat 43 is formed in a blade shape. FIG. 3 shows a receiver main body 4 for showing the blade shape of the seat 43.
FIG. 4 is a side sectional view of the receiver main body 42, and FIG. 5 is a plan view of the receiver main body 42. Receiver body 4
2 is set to rotate in the direction of arrow B shown in FIGS. 3 and 5, and each seat 43 is curved in the rotation direction. Specifically, the rotation side surface 43b of the seat portion 43 is largely curved in the rotation direction, and the opposite side surface 43c is substantially flat. That is, the entire seat 43 has a shape similar to a propeller such as an airplane or a helicopter. Thus, when the lower platen receiver 4 is rotated in the direction of arrow B, outside air is sucked in from the intake hole 33 of the sun gear 3 shown in FIG. 1 (and FIG. 2),
Through the gap C of the seat 43, it can be sent to the outer peripheral side of the receiver main body 42. An exhaust hole 13b (second opening) is formed in a portion of the housing 13 located on the outer peripheral side of the receiver main body 42, that is, near the tray portion 13a, and the seat portion 4 is formed.
3 and the outside of the apparatus. Exhaust hole 13b
Are formed along the side surface of the housing 13 so that air sent out from the gap C of the seat 43 can be efficiently exhausted to the outside of the apparatus.

Next, the operation of the double-sided lapping apparatus of this embodiment will be described. When polishing the work 11, as shown in FIG. 6, the piston rod 50 of the cylinder 5 is extended, and the work 11 on the lower platen 1 is pressed by the upper platen 2 while the driver 12 and the sun gear 3 are pressed. , The lower platen receiver 4 is driven to rotate. Specifically, by rotating the central axis 12a, the driver 12 is rotated, and the driver 1 is rotated.
The upper platen 2 is rotated via the hook 23 engaged with the second vertical groove 12b (see FIG. 1). Further, by rotating the shaft body 3a, the sun gear 3 is rotated and the motor 1 is rotated.
The lower surface plate receiver 4 is rotated in a direction opposite to that of the upper surface plate 2 using 9. As a result, the carrier 10 meshed with the sun gear 3 and the internal gear 14 revolves around the sun gear 3 while rotating, and the lower stool 1 and the upper stool 2 rotate in opposite directions with the work 11 interposed therebetween. 11 are simultaneously polished on both sides. When the polishing liquid is injected from the tube 24 toward the lower platen 1 during such polishing, the polishing liquid contributes to polishing of the work 11. Then, the polishing liquid scattered toward the center hole 1a of the lower platen 1 falls onto the lower platen receiver 4 from the center hole 1a, passes through the inclined gap C of the seat 43, and the tray portion 13
a, and the polishing liquid scattered on the outer peripheral side of the lower stool 1 falls directly onto the tray 13a. These polishing liquids
The liquid is returned to a pump (not shown) and injected again from the tube 24 toward the lower platen 1.

During such a polishing operation, several hundred kg
The work 11 is pressurized on the lower surface plate 1 by such pressure, and the lower surface plate 1 and the upper surface plate 2 rotate at a high speed, so that the lower surface plate 1 may be heated by frictional heat. Further, the polishing liquid injected onto the lower surface plate 1 is also heated by the lower surface plate 1, and when the polishing liquid is again injected into the lower surface plate 1, the heating of the lower surface plate 1 may be increased. However, in the double-sided lapping apparatus of this embodiment, the cooling mechanism operates automatically during the above-mentioned polishing operation, and suppresses heating of the lower platen 1 and the polishing liquid.

Hereinafter, this cooling operation will be specifically described.
FIG. 7 is a partially broken plan view showing the operation of the cooling mechanism. As shown in FIG. 7, the receiver body 42 of the lower stool receiver 4
When the plurality of seats 43 of the receiver main body 42 rotate in the direction of arrow B, the rotating side surface 43b of each seat 43 has a blade shape curved in the rotating direction. As shown, cold air G outside the device is sucked into the device from the intake hole 33 of the sun gear 3 through the hole 22b by the rotation of the seat 43. And the air G that has reached the inside of the device
Is the gap C of the seat 43 due to the hydrodynamic action of the seat 43.
Flows toward the outer peripheral side of the receiver main body 42, and is discharged out of the apparatus from the exhaust hole 13b of the housing 13. As a result, during the polishing operation, the cold air G outside the apparatus circulates in the path of the intake hole 33, the gap C, and the exhaust hole 13b, and the lower platen 1 located above the gap C causes the cold air flowing through the gap C to flow. G cools from below. Also,
The polishing liquid flowing through the gap C is cooled by the air G, and the polishing liquid in the tray 13 a is cooled by the air G sent out from the seat 43.

As described above, according to the double-sided lapping apparatus of this embodiment, since the cold external air G is circulated to cool the lower platen 1 and the polishing liquid, the lower platen 1 and the polishing liquid are prevented from being heated. be able to. As a result, there is no need to form the cooling water passage by processing the lower platen 1 as in the related art.
The strength of the lower platen 1 can be maintained by that much,
Deterioration of the lower stool 1 due to heating can also be prevented, and the life of the lower stool 1 can be extended. In addition, since no special device for cooling the air G is required, the facility cost can be reduced.

The present invention is not limited to the above-described embodiment, and various modifications and changes can be made within the scope of the present invention. In the above embodiment, the seat 43
Is simply a blade shape in which the rotation side surface 43b is curved in the rotation direction, but a twist may be added to the seat portion. Further, in the above-described embodiment, the apparatus to which the sun gear 3 of the pin gear is applied has been described. However, as shown in FIG. 8, in the apparatus to which the sun gear 3 'having the tooth portion 3a' is applied, the sun gear 3 '
Are provided with a plurality of intake holes 33 on the board surface. Further, in the above embodiment, the example in which the cooling mechanism is applied to the double-sided lapping device for polishing both surfaces of the work 11 with the lower platen 1 and the upper platen 2 has been described.
The present invention can also be applied to a single-sided lapping apparatus that grinds only the lower surface of the lower surface plate 1 while pressing the work 11 on the lower surface plate 1 with a head. In this case, since there is no sun gear, the center hole 1a of the lower stool 1 can be used as the first opening. Further, it goes without saying that the present invention can be applied not only to a lapping device but also to a grinder device having a grindstone on a lower platen.

[0018]

As described above in detail, according to the polishing apparatus of the present invention, the lower surface plate receiver is used, the seat portion is shaped like a blade, and the first and second openings are provided. The lower platen can be cooled with a simple structure, so that special equipment for cooling water etc. is not required unlike conventional technology, and the cost of cooling equipment can be reduced accordingly. Has an excellent effect. Further, since the lower platen is not processed, the strength of the lower platen can be maintained. As a result, it is possible to extend the life of the lower platen.

[Brief description of the drawings]

FIG. 1 is a partially cutaway front view showing a polishing apparatus according to an embodiment of the present invention.

FIG. 2 is a plan view of a sun gear.

FIG. 3 is a perspective view of a receiver main body for showing a blade shape of a seat.

FIG. 4 is a side sectional view of a receiver main body.

FIG. 5 is a plan view of a receiver main body.

FIG. 6 is a cross-sectional view showing the state of the apparatus when polishing a workpiece.

FIG. 7 is a partially broken plan view of an apparatus for showing the operation of the cooling mechanism.

FIG. 8 is a plan view of a sun gear applied to a modification.

FIG. 9 is a schematic perspective view showing a lower stool receiver used in the polishing apparatus.

FIG. 10 is a plan view of a lower surface plate receiver of FIG. 9;

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Lower surface plate, 2 ... Upper surface plate, 3 ... Sun gear, 4 ... Lower surface plate receiver, 13b ... Exhaust hole,
33 ... intake hole, 42 ... receiver body, 43 ...
Seat, C: gap, G: air.

Claims (4)

[Claims] 1. A lower surface plate receiver having a central portion fixed to a rotating shaft and a plurality of seats radially arranged on the surface thereof; and a lower surface plate mounted on a seat of the lower surface plate receiver. In the polishing apparatus, a first opening for communicating the outside of the apparatus and the gap between the plurality of seats is provided at a central portion of the lower platen, and the gap between the seat and the outside of the apparatus is provided. A second opening for communication is provided on an outer portion of the lower surface plate receiver, and the seat is rotated to suck air outside the apparatus from the first opening, and the second opening is passed through the gap. A polishing apparatus characterized in that the polishing apparatus is formed into a blade shape that can be discharged from the blade. 2. The polishing apparatus according to claim 1, wherein, among the side surfaces of the seat portion, a side surface of the lower surface plate receiver facing the rotation direction is formed in a shape curved in the rotation direction. Polishing equipment. 3. The double-side polishing apparatus according to claim 1, wherein the work held by a carrier meshed with a sun gear and an internal gear is sandwiched between an upper surface plate and the lower surface plate. The polishing apparatus according to claim 1, wherein the first opening is a hole formed in the sun gear. 4. The polishing apparatus according to claim 1 or 2, wherein the polishing apparatus is a single-side polishing apparatus for polishing a work placed on the lower platen while pressing the work with a head, wherein the first opening is A polishing apparatus, wherein the polishing apparatus is a center hole of the lower platen.