JPH10245743A - Glass fiber woven fabric for printed circuit board - Google Patents

Glass fiber woven fabric for printed circuit board

Info

Publication number
JPH10245743A
JPH10245743A JP9058622A JP5862297A JPH10245743A JP H10245743 A JPH10245743 A JP H10245743A JP 9058622 A JP9058622 A JP 9058622A JP 5862297 A JP5862297 A JP 5862297A JP H10245743 A JPH10245743 A JP H10245743A
Authority
JP
Japan
Prior art keywords
glass fiber
weft
woven fabric
fiber woven
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9058622A
Other languages
Japanese (ja)
Other versions
JP3765151B2 (en
Inventor
Ryota Koyanagi
亮太 小柳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Boseki Co Ltd
Original Assignee
Nitto Boseki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Boseki Co Ltd filed Critical Nitto Boseki Co Ltd
Priority to JP05862297A priority Critical patent/JP3765151B2/en
Publication of JPH10245743A publication Critical patent/JPH10245743A/en
Application granted granted Critical
Publication of JP3765151B2 publication Critical patent/JP3765151B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To obtain a glass fiber woven fabric for printed circuit boards, capable of preventing a phenomenon called a waving phenomenon generated on the production of a prepreg from a glass fiber woven fabric produced by the use of an air jet loom, and capable of producing the prepreg free from wrinkles, splits, etc. SOLUTION: In this glass fiber woven fabric for printed circuit boards, the diameter of each of filaments constituting a weft is larger by 20-80% than the diameter of each of filaments constituting the warp, and the number of the filaments constituting the weft is smaller by 30-70% than the number of the filaments constituting the warp.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はプリント配線板用ガ
ラス繊維織物に関し、詳しくはガラス繊維織物に樹脂を
塗工し、プリプレグを製造する際に発生する波打ちと呼
ばれる現象を抑え、しわ、及び亀裂などの欠点の無いプ
リプレグを得る事が出来るガラス繊維織物に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass fiber woven fabric for a printed wiring board, and more particularly to a method of applying a resin to a glass fiber woven fabric to suppress a phenomenon called waviness that occurs when a prepreg is manufactured, to reduce wrinkles and cracks. The present invention relates to a glass fiber fabric from which a prepreg free from defects such as the above can be obtained.

【0002】[0002]

【従来の技術】従来、プリント配線板用ガラス繊維織物
にエポキシ樹脂などの熱硬化性樹脂を塗工しプリプレグ
を製造する際、ガラス繊維織物の中央部に波打ちと呼ば
れる現象が発生する。これは乾燥炉でキュアされた熱硬
化性樹脂の収縮により、引張りテンションで保持される
経方向に対し、保持されていないガラス繊維織物の緯方
向が収縮するためである。この波打ちを防ぐためには熱
硬化性樹脂の急激な収縮を防ぐために、塗工スピードを
低下させ徐冷する方法が有効であるが生産性は低下する
ことになる。ガラス繊維織物側からの対策としては緯方
向の織密度を増やす、又は太番手のガラスヤーンを用い
てガラス繊維織物の緯方向の剛性を上げる方法を挙げる
ことが出来るが、いずれもクロス厚みが大きくなるた
め、最終的には積層板の厚みが大きくなってしまうとい
う欠点がある。
2. Description of the Related Art Conventionally, when a thermosetting resin such as an epoxy resin is applied to a glass fiber fabric for a printed wiring board to produce a prepreg, a phenomenon called waving occurs at the center of the glass fiber fabric. This is because the shrinkage of the thermosetting resin cured in the drying furnace shrinks the weft direction of the glass fiber woven fabric that is not held with respect to the warp direction held by the tensile tension. In order to prevent this waving, a method of slowing down the coating speed and slow cooling is effective in order to prevent a rapid shrinkage of the thermosetting resin, but the productivity is reduced. As measures from the glass fiber fabric side, we can increase the weaving density in the weft direction, or increase the weft direction rigidity of the glass fiber fabric by using a glass yarn with a large count, but in any case, the cloth thickness is large Therefore, there is a drawback that the thickness of the laminate eventually increases.

【0003】更に、製織時の織機条件により緯糸の織縮
みの無いガラス繊維織物とすることで熱硬化性樹脂の収
縮に対し、ガラス繊維織物緯方向の寸法安定効果を最大
限に引き出すことで波打ちを防ぐ事も考えられている。
しかし、生産性の面から現在、主流となっているエアー
ジェット織機においてはエアーだけの力で緯糸にテンシ
ョンをかけ、織縮みを無くすことは非常に難しい。又、
エアー量を増大させ緯方向の織縮みを無くすことが出来
ても、それにより毛羽が増加し、ガラス繊維織物の品質
が低下することになる。
[0003] Furthermore, by using a glass fiber woven fabric in which the weft does not shrink due to the weaving conditions of the weaving machine, the shrinkage of the thermosetting resin maximizes the dimensional stabilizing effect in the weft direction of the glass fiber woven fabric. It is also thought to prevent.
However, in terms of productivity, it is very difficult for air jet looms, which are currently the mainstream, to apply tension to the weft using only air and eliminate shrinkage. or,
Even if it is possible to eliminate the weft shrinkage by increasing the amount of air, the fluff is increased and the quality of the glass fiber fabric is reduced.

【0004】[0004]

【発明が解決しようとする課題】本発明は、プリント配
線板用の基材として現在多用されているガラス繊維織
物、特にエアジェット織機により製織されたガラス繊維
織物によるプリプレグ製造時に発生する波打ちと呼ばれ
る現象を防ぎ、シワ等の欠点の無いプレプレグを容易に
製造することができるプリント配線板用ガラス繊維織物
を提供することを目的とする。
SUMMARY OF THE INVENTION The present invention is referred to as waving generated during the production of a prepreg from a glass fiber fabric which is currently frequently used as a substrate for a printed wiring board, particularly a glass fiber fabric woven by an air jet loom. An object of the present invention is to provide a glass fiber fabric for a printed wiring board, which can prevent a phenomenon and can easily produce a prepreg free from defects such as wrinkles.

【0005】[0005]

【課題を解決するための手段】本発明者は、前記課題を
解決するため鋭意研究の結果、プリント配線板用ガラス
繊維織物であって、緯糸を構成するフィラメントの直径
が経糸を構成するフィラメントの直径に比べ20〜80
%大きく、なおかつ緯糸のフィラメント数が、経糸のフ
ィラメント数より30〜70%少ないプリント配線板用
ガラス繊維織物とすることにより課題の解決が可能であ
ることを見出だしたものである。緯糸に経糸より大きい
径のフィラメントを少ない集束本数でストランドとして
製織したガラス繊維織物であり、このような構成とする
ことによりガラス繊維織物の厚みを変えずに、緯方向の
剛性を向上させることで課題の解決を図ろうとするもの
である。
Means for Solving the Problems The inventors of the present invention have conducted intensive studies to solve the above-mentioned problems, and as a result, the present invention has been made on a glass fiber fabric for a printed wiring board, wherein the diameter of the filament constituting the weft is the diameter of the filament constituting the warp. 20-80 compared to diameter
It has been found that the problem can be solved by using a glass fiber woven fabric for a printed wiring board in which the number of filaments of the weft is 30% to 70% smaller than the number of filaments of the warp. It is a glass fiber woven fabric in which wefts are woven as strands with a smaller number of filaments having a diameter larger than the warp, and by adopting such a configuration, the rigidity in the weft direction is improved without changing the thickness of the glass fiber woven fabric. It is intended to solve the problem.

【0006】即ちフィラメント径を太くする事により緯
糸の硬さ、つまり剛性が向上する。この緯糸を製織時に
用いることでガラス繊維織物の緯方向の剛性も向上す
る。このことはプリプレグ製造の際、冷却により生ずる
熱硬化性樹脂の収縮応力で生ずる波打ちをガラス繊維織
物の剛性で打ち消すことが可能となる。更に、緯糸の剛
性が向上することでガラス繊維織物における緯糸の織縮
みが減少する。このことは先に述べた熱硬化性樹脂の収
縮応力に対し補強材である緯糸の補強効果が正対するこ
とで熱硬化性樹脂の収縮、つまり波打ちを更に減少させ
るものである。
That is, by increasing the filament diameter, the hardness of the weft, that is, the rigidity, is improved. By using this weft at the time of weaving, the rigidity of the glass fiber fabric in the weft direction is also improved. This makes it possible to cancel the waving caused by the contraction stress of the thermosetting resin caused by cooling during the production of the prepreg by the rigidity of the glass fiber fabric. Furthermore, the improvement in the rigidity of the weft reduces the shrinkage of the weft in the glass fiber fabric. This is to further reduce the shrinkage of the thermosetting resin, that is, the waving, by the reinforcing effect of the weft as the reinforcing material directly facing the shrinkage stress of the thermosetting resin described above.

【0007】[0007]

【発明の実施の形態】プリント配線板用のガラス繊維織
物に用いられるガラスヤーンのフィラメント径は、一般
に5〜9μmである。本発明のガラス繊維織物に用いる
緯糸のフィラメント径は、経糸のフィラメント径に対し
20%から80%大きくしたものである。例えば、厚さ
200μmのガラス繊維織物では通常フィラメント径9
μmのガラスヤーンが経糸緯糸に用いられるが、本発明
では緯糸のガラスヤーンのフィラメント径は11μmを
用いることができる。経糸のフィラメント径は9μmで
ある。厚さ100μmのガラス繊維織物の場合は、フィ
ラメント径7μmのガラスヤーンが用いられるが、本発
明では9μmのフィラメント径のガラスヤーンを緯糸に
用いることができる。経糸のフィラメント径は7μmで
ある。厚さ20〜50μmのガラス繊維織物ではフィラ
メント径5μmが用いられるが、本発明のガラス繊維織
物では、緯糸に7〜9μm、より好ましくは9μmのフ
ィラメント径のガラスヤーンを用いることができる。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The filament diameter of a glass yarn used for a glass fiber fabric for a printed wiring board is generally 5 to 9 μm. The filament diameter of the weft used in the glass fiber fabric of the present invention is 20% to 80% larger than the filament diameter of the warp. For example, a glass fiber woven fabric having a thickness of 200 μm usually has a filament diameter of 9 μm.
Although a glass yarn of μm is used for the warp weft, the filament diameter of the glass yarn of the weft can be 11 μm in the present invention. The filament diameter of the warp is 9 μm. In the case of a glass fiber fabric having a thickness of 100 μm, a glass yarn having a filament diameter of 7 μm is used. In the present invention, a glass yarn having a filament diameter of 9 μm can be used for the weft. The filament diameter of the warp is 7 μm. In a glass fiber fabric having a thickness of 20 to 50 μm, a filament diameter of 5 μm is used. In the glass fiber fabric of the present invention, a glass yarn having a filament diameter of 7 to 9 μm, more preferably 9 μm, can be used for the weft.

【0008】上記より太いフィラメント径の緯糸を用い
ると剛性が高過ぎ、製織の際、毛羽が発生しやすく、ガ
ラス繊維織物の品質が低下する。一方、上記よりフィラ
メント径が細いガラスヤーンを用いると織物の緯方向の
剛性が不十分であり、波打ちを押さえる事が出来ない。
本発明において緯糸の集束本数は緯糸のテックス番手、
即ち単位長さ当たりの質量が従来品の緯糸の番手と同じ
となればよい。具体的には9μmから11μmとする場
合は33%集束本数を低下させる。ECG75 1/0
というガラスヤーンは9μの径を有するフィラメントを
408本集束し、テックス番手が67.5のガラスヤー
ンである。このECG75 1/0に代えてフィラメン
ト径を11μとする場合、フィラメントの集束本数は、
テックス番手を67.5に合わせるためには273本と
する必要がある。7μmから9μmにする場合は40%
集束本数を低下させる。5μmから7μmにする場合は
50%、5μmから9μmにする場合は70%低下させ
る。
[0008] If weft yarns having a larger filament diameter are used, the rigidity is too high, fuzzing is liable to occur during weaving, and the quality of the glass fiber fabric deteriorates. On the other hand, if a glass yarn having a smaller filament diameter is used, the stiffness of the woven fabric in the weft direction is insufficient, and it is impossible to suppress waving.
In the present invention, the number of bundles of the weft is the tex count of the weft,
That is, the mass per unit length may be the same as the count of the conventional weft. Specifically, when the thickness is from 9 μm to 11 μm, the number of focused beams is reduced by 33%. ECG75 1/0
Is a glass yarn having a tex number of 67.5 and 408 filaments having a diameter of 9 μ are bundled. When the diameter of the filament is set to 11 μ instead of the ECG75 1/0, the number of bundled filaments is
In order to match the tex number to 67.5, it is necessary to use 273. 40% when changing from 7 μm to 9 μm
Decrease the number of focusing lines. When the thickness is changed from 5 μm to 7 μm, the reduction is 50%, and when the thickness is changed from 5 μm to 9 μm, the reduction is 70%.

【0009】本発明のガラス繊維織物は、通常、Eガラ
ス繊維に適用されるが、必ずしもこれに限定されるもの
ではなく、低誘電率ガラス繊維であるDガラス繊維や、
高強度ガラス繊維であるSガラス繊維、熱膨張率の小さ
いクォーツガラス繊維などにも適用することができる。
また、本発明のガラス繊維織物は、製織後脱油処理をさ
れ集束剤を除去され、さらにその後でシランカップリン
グ剤による表面処理が行われる。本発明のガラス繊維織
物に適用されるシランカップリング剤は、プリント配線
板用ガラス繊維織物に一般に使用されているものであれ
ば使用可能である。
The glass fiber fabric of the present invention is usually applied to E glass fiber, but is not necessarily limited to this. D glass fiber, which is a low dielectric constant glass fiber,
The present invention can also be applied to S glass fiber, which is a high-strength glass fiber, and quartz glass fiber having a small coefficient of thermal expansion.
Further, the glass fiber woven fabric of the present invention is subjected to a deoiling treatment after weaving to remove the sizing agent, and thereafter, a surface treatment with a silane coupling agent is performed. The silane coupling agent applied to the glass fiber fabric of the present invention can be used as long as it is generally used for glass fiber fabrics for printed wiring boards.

【0010】例えば、ビニルトリス(β−メトキシエト
キシ)シラン、γ−メタクリロキシプロピルトリメトキ
シシラン、γ−アミノプロピルトリエトキシシラン、N
−β−(アミノエチル)γ−アミノプロピルトリメトキ
シシラン、N(ビニルベンジル)−アミノエチル−γ−
アミノプロピルトリメトキシシラン(塩酸塩)、γ−グ
リシドキシプロピルトリメトキシシラン、β−(3,4
−エポキシシクロヘキシル)エチルトリメトキシシラ
ン、γ−メルカプトプロピルトリメトキシシランなどを
挙げることができる。これらのシランカップリング剤の
中から相手樹脂の種類に応じて適宜選択することができ
る。
For example, vinyl tris (β-methoxyethoxy) silane, γ-methacryloxypropyltrimethoxysilane, γ-aminopropyltriethoxysilane, N
-Β- (aminoethyl) γ-aminopropyltrimethoxysilane, N (vinylbenzyl) -aminoethyl-γ-
Aminopropyltrimethoxysilane (hydrochloride), γ-glycidoxypropyltrimethoxysilane, β- (3,4
-Epoxycyclohexyl) ethyltrimethoxysilane, γ-mercaptopropyltrimethoxysilane, and the like. It can be appropriately selected from these silane coupling agents according to the type of the partner resin.

【0011】[0011]

【実施例】以下、実施例により本発明を具体的に説明す
る。プリント配線板用ガラス繊維織物を以下の方法で製
織した。整経機で織地部用の経糸にECD450−1/
0 ヤーン(フィラメント径5μm、集東本数200
本)を使用してウィバースビームに巻き取った。このウ
ィバースビームをエアージェント織機に仕掛け、緯糸に
ECG450−1/0 ヤーン(フィラメント径9μ
m,集束本数70本)を使用して製織した。上記織物を
常法によりヒートクリ−ニングした後でN(ビニルベン
ジル)−アミノエチル−γ−アミノプロピルトリメトキ
シシラン塩酸塩(SZ−6032東レダウコ−ニングシ
リコーン社製)の0.5%水溶液で処理し、乾燥した。
次に上記ガラス繊維織物にFR−4タイプのエポキシ樹
脂ワニスを含浸させ130℃で15分加熱した後、室温
に急冷した。
The present invention will be described below in detail with reference to examples. A glass fiber fabric for a printed wiring board was woven by the following method. ECD450-1 /
0 Yarn (filament diameter 5 μm, 200 east
Using a book). The whiverse beam is set on an air-gent loom, and ECG450-1 / 0 yarn (filament diameter 9μ) is applied to the weft.
m, 70 bundles). After heat-cleaning the woven fabric by a conventional method, it is treated with a 0.5% aqueous solution of N (vinylbenzyl) -aminoethyl-γ-aminopropyltrimethoxysilane hydrochloride (SZ-6032, manufactured by Toray Downconing Silicone Co., Ltd.). And dried.
Next, the glass fiber fabric was impregnated with an FR-4 type epoxy resin varnish, heated at 130 ° C. for 15 minutes, and then rapidly cooled to room temperature.

【0012】<比較例>緯糸にECD450−1/0
(フィラメント径5μm、集束本数200本)を用いた
他は実施例と同様にしてプリプレグを得た。実施例比較
例について得られたガラス繊維織物の1m2 当たりの質
量、およびプリプレグの厚みを測定した。また、プリプ
レグについてJIS C 64815.4と同様の方法
で波打ち率を測定した。以上、得られた結果について表
1に示した。本発明のガラス繊維織物はクロス単重、プ
リプレグ厚み、が比較例とまったく同じ値を示し、プリ
プレグ波打ちについては比較例より低く抑えられてい
た。
<Comparative Example> ECD450-1 / 0 was added to the weft.
A prepreg was obtained in the same manner as in Example except that (diameter of filament: 5 μm, number of bundles: 200) was used. Example The mass per 1 m 2 of the glass fiber fabric obtained for the comparative example and the thickness of the prepreg were measured. The undulation rate of the prepreg was measured in the same manner as in JIS C 64815.4. Table 1 shows the obtained results. In the glass fiber fabric of the present invention, the unit weight of the cloth and the thickness of the prepreg showed exactly the same values as those of the comparative example, and the prepreg waving was suppressed to be lower than that of the comparative example.

【0013】[0013]

【表1】 クロス単重 プリプレグ厚み 波打ち率 実施例 48g/m2 70μm 0.8% 比較例 48g/m2 70μm 12.0% 波打ち率は次式により求めた。 波打ち率=D×100/1000 D=d/L2 ×10002 d 最大波打ち(mm) L:試験片の長さ(mm) なお、最大波打ちは、最も大きい波打ち部分の波の頂部
と底部の差を表し、試験片の長さは、試験片の幅方向の
うち波打ちがある部分の長さを表す。
[Table 1] Cloth single weight prepreg thickness Wavy ratio Example 48 g / m2 70 µm 0.8% Comparative example 48 g / m2 70 µm 12.0% The wavy ratio was determined by the following equation. Rippling rate = D × 100/1000 D = d / L 2 × 1000 2 d Maximum waving (mm) L: Length of test piece (mm) The maximum waving is the top and bottom of the largest wavy part. The difference represents the length of the test piece, and the length of the test piece represents the length of the wavy portion in the width direction of the test piece.

【0014】[0014]

【発明の効果】本発明のガラス繊維織物は、プリプレグ
製造時に発生しやすい波打ちと呼ばれる現象を防ぎ、シ
ワや裂け等の欠点のないプリプレグを製造することがで
きる。
The glass fiber woven fabric of the present invention can prevent a phenomenon called waving which tends to occur during the production of a prepreg, and can produce a prepreg free from defects such as wrinkles and tears.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 プリント配線板用ガラス繊維織物であっ
て、緯糸を構成するフィラメントの直径が経糸を構成す
るフィラメントの直径に比べ20〜80%大きく、なお
かつ緯糸のフィラメント数が、経糸のフィラメント数よ
り30〜70%少ないことを特徴とするプリント配線板
用ガラス繊維織物。
1. A glass fiber fabric for a printed wiring board, wherein the diameter of a filament constituting a weft is 20 to 80% larger than the diameter of a filament constituting a warp, and the number of filaments of the weft is the number of filaments of the warp. 30 to 70% less than the glass fiber fabric for printed wiring boards.
JP05862297A 1997-02-27 1997-02-27 Glass fiber fabric for printed wiring boards Expired - Lifetime JP3765151B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP05862297A JP3765151B2 (en) 1997-02-27 1997-02-27 Glass fiber fabric for printed wiring boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05862297A JP3765151B2 (en) 1997-02-27 1997-02-27 Glass fiber fabric for printed wiring boards

Publications (2)

Publication Number Publication Date
JPH10245743A true JPH10245743A (en) 1998-09-14
JP3765151B2 JP3765151B2 (en) 2006-04-12

Family

ID=13089681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05862297A Expired - Lifetime JP3765151B2 (en) 1997-02-27 1997-02-27 Glass fiber fabric for printed wiring boards

Country Status (1)

Country Link
JP (1) JP3765151B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011024870A1 (en) * 2009-08-26 2011-03-03 旭化成イーマテリアルズ株式会社 Glass cloth for printed wiring board
JP2014009239A (en) * 2012-06-27 2014-01-20 Asahi Kasei E-Materials Corp Transparent composite substrates
WO2020130008A1 (en) * 2018-12-18 2020-06-25 日立化成株式会社 Composite material, method of manufacturing same, prepreg, laminated board, printed wiring board, and semiconductor package
JP2021004424A (en) * 2019-06-26 2021-01-14 旭化成株式会社 Glass cloth, prepreg, and printed wiring board
JP2022003692A (en) * 2017-12-11 2022-01-11 旭化成株式会社 Glass cloth, prepreg, and printed circuit board
US20220246516A1 (en) * 2021-02-02 2022-08-04 Kioxia Corporation Semiconductor device and substrate

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WO2011024870A1 (en) * 2009-08-26 2011-03-03 旭化成イーマテリアルズ株式会社 Glass cloth for printed wiring board
CN102482809A (en) * 2009-08-26 2012-05-30 旭化成电子材料株式会社 Glass cloth for printed wiring board
JP5027335B2 (en) * 2009-08-26 2012-09-19 旭化成イーマテリアルズ株式会社 Glass cloth for printed wiring boards
KR101251141B1 (en) * 2009-08-26 2013-04-05 아사히 가세이 이-매터리얼즈 가부시키가이샤 Glass cloth for printed wiring board
TWI414655B (en) * 2009-08-26 2013-11-11 Asahi Kasei E Materials Corp Printed wiring board with glass cloth
US9161441B2 (en) 2009-08-26 2015-10-13 Asahi Kasei E-Materials Corporation Glass cloth for printed wiring board
JP2014009239A (en) * 2012-06-27 2014-01-20 Asahi Kasei E-Materials Corp Transparent composite substrates
JP2022003692A (en) * 2017-12-11 2022-01-11 旭化成株式会社 Glass cloth, prepreg, and printed circuit board
WO2020130008A1 (en) * 2018-12-18 2020-06-25 日立化成株式会社 Composite material, method of manufacturing same, prepreg, laminated board, printed wiring board, and semiconductor package
JPWO2020130008A1 (en) * 2018-12-18 2021-10-28 昭和電工マテリアルズ株式会社 Composite materials and their manufacturing methods, prepregs, laminated boards, printed wiring boards and semiconductor packages
JP2021004424A (en) * 2019-06-26 2021-01-14 旭化成株式会社 Glass cloth, prepreg, and printed wiring board
US20220246516A1 (en) * 2021-02-02 2022-08-04 Kioxia Corporation Semiconductor device and substrate

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