JPH10241936A - Magnetic film and magnetic material - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a magnetic core which shows a high Q-value even in a high-frequency domain and is less in loss by forming a magnetic alloy thin film having an amorphous phase on a plastic substrate in a state where a no- film making area is left on the substrate. SOLUTION: Three magnetic alloy thin films 2 are formed on a plastic substrate 1. A no-film forming area 3 is formed by protecting the surface of the substrate 1 with an appropriate masking material before forming the thin films 2 and removing the masking material after forming the thin films 2. The area occupied by the thin films 2 on the substrate 1 is adjusted to about 50-100% of the whole area of the substrate 1. The thin films 2 are composed of a crystalline phase composed mainly of one or more kinds of elements selected out of Fe and Co and having an average crystal grain size of <=30nm and an amorphous phase containing a compound of M composed of one or more kinds of elements selected form among Ti, Zr, Hf, Nb, Ta, Mo, W, and rare-earth elements and O. Therefore, a magnetic core showing a high Q-value even in a high-frequency domain can be manufactured.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic alloy thin film having high magnetic permeability in a high frequency band, a magnetic film using the magnetic alloy thin film, and a magnetic material obtained by rolling the magnetic film into a rod shape.

[0002]

2. Description of the Related Art With the miniaturization and high performance of magnetic elements, a magnetic material having a high saturation magnetic flux density, a high magnetic permeability in a frequency band of several hundred MHz or more, and a high specific resistance is required. I have. Conventionally, as a magnetic material having a high saturation magnetic flux density, Fe or an alloy containing Fe as a main component is widely known. However, when a magnetic film of these Fe-based alloys is formed by a film forming technique such as a sputtering method, the Although the magnetic flux density is high, the coercive force is large and the specific resistance is low, and it has been difficult to obtain a magnetic film having good soft magnetic properties.

One of the causes of a decrease in magnetic permeability at a high frequency is a loss due to generation of an eddy current. In order to prevent eddy current loss, which is one of the causes of the decrease in the high-frequency magnetic permeability, it is desired to reduce the thickness and increase the resistance of the thin film. However, it is very difficult to increase the specific resistance while maintaining the magnetic characteristics, and the specific resistance of an alloy-based soft magnetic thin film such as sendust is as small as several tens to several hundreds μΩ · cm. Therefore, a soft magnetic alloy having an increased specific resistance while securing a saturation magnetic flux density of at least 0.5 T (tesla) is required. Further, when the alloy is obtained as a thin film, it is more difficult to obtain good soft magnetic characteristics due to the influence of generation of magnetostriction and the like.

[0004]

SUMMARY OF THE INVENTION From such a background, the present inventors have proposed an Fe-MO system (where the element M is 4A,
At least one element selected from the group 5A elements or rare earth elements or a mixture thereof, and 50 ≦ Fe ≦ 7
A soft magnetic material having a composition of 0, 5 ≦ M ≦ 30, and 10 ≦ O ≦ 30 was developed and a patent application was filed (Japanese Unexamined Patent Publication No. 6-316).
748). According to the soft magnetic material of this type, the specific resistance is high (215.3 to 133709 μΩ · cm),
Low eddy current loss in the high frequency region, high magnetic permeability in the high frequency region, high saturation magnetic flux density of 0.5T or more (around 0.7 to 1.5T), and coercive force Was also low (0.8 to 4.0 Oe). The rare earth element is Sc, Y, or La, Ce, Pr, Nd, P belonging to Group 3A of the periodic table.
m, Sm, Eu, Gd, Td, Dy, Ho, Er, T
It is a general term for lanthanoids such as m, Yb, and Lu.

[0005] In addition, as a bulk material of this type, B
a_ThreeCo_TwoFe₅₄O₄₁(Generally Co _TwoNotation such as Z
The magnetoplumbite represented by a composition formula such as
It is known to show a high Q value in the frequency domain.
As shown in FIG. 8, the value of Q at 1 GHz
1 and the loss increases at higher frequencies.
There is a title. In contrast, communication-related fields (personal
In handy phone systems (PHS), etc., GH
The z band tends to be more utilized. Also, the current
However, air-core inductors are used as parts
However, in the future there will be a demand for materials with higher Q values
Is thought to increase. Also, the antenna material
Is in a similar situation.

In general, there are two values for expressing magnetic permeability, a real part (μ ') of magnetic permeability and an imaginary part (μ'') of magnetic permeability. It is desired that the real part has a high value and the imaginary part has a low value.
Several hundred MHz for Fe-MO based soft magnetic alloy thin film
In the above high frequency band, the value of the real part (μ ′) of the magnetic permeability can be set to a high value, but the imaginary part of the magnetic permeability exceeds the value of the real part of the magnetic permeability, and the (real part of the magnetic permeability) / The value of (the imaginary part of the magnetic permeability), that is, the value of Q expressed by (μ ′) / (μ ″) becomes smaller than 1, and there is a problem that the loss increases.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and a thin film made of a soft magnetic alloy having a high specific resistance as a magnetic material for high frequencies and having a high magnetic permeability in a high frequency band is used. It is an object of the present invention to provide a magnetic film having good soft magnetic properties formed on a substrate of the above, and to provide an antenna and the like using the same.

[0008]

The magnetic film of the present invention contains one or two elements selected from Fe and Co as main components, and has a crystal phase composed of crystal grains having an average crystal grain size of 30 nm or less; A magnetic alloy thin film made of an amorphous phase containing a compound of O and one or two or more elements selected from Zr, Hf, Nb, Ta, Mo, W and a rare earth element is made of a flexible material. The film is formed on the substrate in a state where a non-film formation region is left. According to the present invention, there is provided the magnetic film according to claim 1, wherein the amorphous phase of the magnetic alloy thin film further contains a large amount of elements T and O composed of one or two elements selected from B and C. It is. The composition formula of the magnetic film of the present invention is represented by Fe _a M ′ _b O _c , and the element M ′ represents one or more elements selected from rare earth elements, and the composition ratios a, b, and c are In atomic%,
50 ≦ a ≦ 70, 5 ≦ b ≦ 30, 10 ≦ c ≦ 30, a +
A magnetic alloy thin film satisfying the relationship of b + c = 100 is formed on a flexible substrate while leaving a non-film forming region. The magnetic film of the present invention has a composition formula of F
'indicated by _e O _f, the element M' e _d M '' is, Ti, Zr, H
represents one or more elements selected from f, V, Nb, Ta, and W, and the composition ratios d, e, and f are atomic% and 45 ≦
d ≦ 70, 5 ≦ e ≦ 30, 10 ≦ f ≦ 40, d + e + f
= 100 is formed by forming a magnetic alloy thin film satisfying the relationship of = 100 on a flexible substrate while leaving a non-film forming region.

The magnetic film of the present invention has a composition formula of F
indicated by _{e g M h O i T j} , the element M, Ti, Zr, Hf,
Represents one or more elements selected from Nb, Ta, Mo, W and rare earth elements, and the element T represents one or two elements selected from B and C, and has a composition ratio g, h,
i and j are atomic%, 50 ≦ g ≦ 75, 5 ≦ h ≦ 30, 1
A magnetic alloy thin film satisfying the relationship of 5 ≦ i ≦ 25, 0 <j ≦ 6, and 15 ≦ i + j ≦ 30 is formed on a flexible substrate while leaving a non-film formation region. is there. The magnetic film of the present invention has a composition formula of (Co _1-k R _k ) _m M ″ ′ _n
Indicated by _{Q p} X _q Z _r, element R, Fe, Ni, Pd, M
represents one or more elements selected from n and Al, and the element M ″ ′ is Ti, Zr, Hf, Nb, Ta, M
o, W and one or more elements selected from rare earth elements; element Q represents one or more elements selected from O, N, C and B; element X represents Si,
Represents one or two elements selected from Cr,
Represents one or more elements selected from Au, Ag and platinum group elements, and the composition ratio k is 0.05 ≦ k
≦ 0.5, composition ratio n, p, q, r is atomic% and 3 ≦ n ≦
30, 7 ≦ p ≦ 40, 0 ≦ q ≦ 20, 0 ≦ r ≦ 20, the remainder being m and a magnetic alloy thin film as an unavoidable impurity, and a non-film formation region on a flexible substrate. The film is formed in a state where it is left. According to the present invention, in the magnetic film described in any one of the above, the non-film-forming region is formed in a stripe shape or a lattice shape on a flexible substrate. According to the present invention, in the magnetic film according to any one of the above, the ratio of the area occupied by the region where the magnetic alloy thin film is formed to 50% or more and 100% of the total area of the flexible substrate
Less than.

[0010] The magnetic material of the present invention contains one or two elements selected from Fe and Co as main components, and has a crystal phase composed of crystal grains having an average crystal grain size of 30 nm or less;
an element M composed of one or more elements selected from r, Hf, Nb, Ta, Mo, W and rare earth elements;
A magnetic film obtained by forming a magnetic alloy thin film composed of an amorphous phase containing a compound of O on a flexible substrate while leaving a non-film-forming region, and rounding the obtained magnetic film into a rod shape. . According to the present invention, in the above magnetic material, the amorphous phase of the magnetic alloy thin film further contains a large amount of elements T and O composed of one or two elements selected from B and C.
The composition of the magnetic material of the present invention is represented by Fe _a M ′ _b O _c , and the element M ′ represents one or more elements selected from rare earth elements, and the composition ratios a, b, and c are Atomic%, 5
0 ≦ a ≦ 70, 5 ≦ b ≦ 30, 10 ≦ c ≦ 30, a + b
A magnetic film obtained by depositing a magnetic alloy thin film satisfying the relationship of + c = 100 on a flexible substrate while leaving a non-deposition area is rounded into a rod shape. Magnetic body of the present invention, its composition formula 'indicated by _e O _f, the element M' Fe _d M '' is, Ti, Zr, Hf, V , Nb, Ta, one or two or more selected from W And the composition ratio d,
e and f are atomic%, 45 ≦ d ≦ 70, 5 ≦ e ≦ 30, 1
A magnetic film obtained by forming a magnetic alloy thin film satisfying the relationship of 0 ≦ f ≦ 40 and d + e + f = 100 on a flexible substrate while leaving a non-film forming region is rounded into a rod shape. Things.

The magnetic material of the present invention has a composition formula of Fe _g M _h
O _i T _j , and the element M is composed of Ti, Zr, Hf, Nb,
Represents one or two or more elements selected from Ta, Mo, W and rare earth elements; the element T represents one or two elements selected from B and C; and the composition ratio g, h, i, j
Is atomic%, 50 ≦ g ≦ 75, 5 ≦ h ≦ 30, 15 ≦ i
≦ 25, 0 <j ≦ 6, 15 ≦ i + j ≦ 30 A magnetic alloy thin film formed by forming a magnetic alloy thin film on a flexible substrate while leaving a non-film-forming region is formed. It is rolled into a bar. The magnetic material of the present invention has a composition formula of (Co _1-k R _k ) _m M ″ ′ _n Q _p X _q Z _r , wherein the element R is
Represents one or more elements selected from Fe, Ni, Pd, Mn, and Al, and the element M ″ ′ is Ti, Zr, H
represents one or more elements selected from f, Nb, Ta, Mo, W and rare earth elements;
Represents one or more elements selected from N, C, and B; the element X represents one or two elements selected from Si and Cr; and the element Z represents one of Au, Ag, and platinum group elements. Represents one or more selected elements, and the composition ratio k is 0.05 ≦ k ≦ 0.5, the composition ratio n, p, q, r
Is atomic%, 3 ≦ n ≦ 30, 7 ≦ p ≦ 40, 0 ≦ q ≦ 2
The relationship 0, 0 ≦ r ≦ 20 is satisfied, and the remainder is obtained by forming a film of a magnetic alloy thin film, which is an unavoidable impurity, on a flexible substrate while leaving a non-film formation region. The film is rolled into a rod. The present invention provides the magnetic material according to any one of the above, wherein a magnetic alloy thin film is formed in a stripe shape on a flexible substrate, or the non-film-forming region is formed in a grid shape. is there. According to the present invention, in the magnetic material according to any one of the above, the ratio of the area occupied by the region where the magnetic alloy thin film is formed to the entire area of the flexible substrate is 50% or more and less than 100%. .

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in more detail with reference to the drawings. The gist of the present invention resides in that thin films made of various magnetic alloys are formed on a flexible substrate while leaving a non-film forming region. Depositing a film without leaving a non-deposition region means that a thin film on the substrate is divided into several thin films instead of forming one large thin film on the substrate. Means that an area where no film is formed is left.

When only one large thin film is formed on a substrate, eddy currents are liable to be generated in the thin film, which causes a decrease in high-frequency magnetic permeability. By reducing the area per thin film, generation of eddy current can be suppressed, and a decrease in high-frequency magnetic permeability can be suppressed.

FIG. 1 is a plan view showing an example of the embodiment of the present invention. In the drawing, reference numeral 1 denotes a substrate, reference numeral 2 denotes a magnetic alloy thin film, and reference numeral 3 denotes a non-film formation region. The non-film formation region 3 can be formed by, for example, protecting the relevant portion with a suitable masking material before performing film formation and removing the masking material after film formation. FIG. 1A shows a structure in which three magnetic alloy thin films 2 each having a width of 10 mm are formed on a flexible substrate 1. Non-film formation region 3 sandwiched between two magnetic alloy thin films 2 and 2
Was obtained by using a polyimide tape having a width of 1 mm as a masking material. Similarly, FIG. 1B shows six magnetic alloy thin films 2 having a width of 5 mm, and FIG. 1C shows thirteen magnetic alloy thin films 2 having a width of 2 mm. In the present invention, these series of film formation patterns are referred to as a vertical stripe type.

FIG. 2 is a plan view showing another example of the embodiment of the present invention. In FIG. 2, reference numeral 1 denotes a substrate, reference numeral 2 denotes a magnetic alloy thin film, and reference numeral 3 denotes a non-film formation region. FIG. 2D shows a case where a total of nine magnetic alloy thin films 2 each measuring 10 mm in length and width are formed on a flexible substrate 1. The non-film formation region 3 was obtained by using a polyimide tape having a width of 1 mm as a masking material, as described in the description of FIG. Similarly, FIG.
(E) shows a magnetic alloy thin film 2 of 5 mm in length and width and 36 mm in total.
FIG. 2 (f) shows a total of 121 magnetic alloy thin films 2 of 2 mm × 2 mm square. In the present invention, these series of film formation patterns are referred to as a lattice type.

FIG. 3 is a plan view showing still another example of the embodiment of the present invention, wherein reference numeral 1 denotes a substrate, reference numeral 2 denotes a magnetic alloy thin film, and reference numeral 3 denotes a non-film formation region. FIG. 3 (g)
Is to deposit a 10 mm-wide magnetic alloy thin film 2 on a flexible substrate.
It is one formed. The non-film-forming region 3 sandwiched between the two magnetic alloy thin films 2 and 2 was obtained by using a polyimide tape having a width of 1 mm as a masking material as described in the description of FIG. Similarly, FIG. 3H shows six magnetic alloy thin films 2 having a width of 5 mm, and FIG. 3I shows thirteen magnetic alloy thin films 2 having a width of 2 mm. In the present invention, these series of film formation patterns are referred to as a horizontal stripe type.

The shape of the subdivided thin film and the arrangement on the substrate are arbitrary. That is, the thin films may be arranged regularly on the substrate, or may be formed at irregular shapes and intervals. For example, as shown in FIGS. 1 and 3,
A rectangular thin film may be formed on a flexible substrate so as to be arranged in stripes, or a rectangular thin film may be formed so that the non-film formation region looks like a lattice as shown in FIG. May be regularly arranged vertically and horizontally.

The ratio of the area occupied by the region where the magnetic alloy thin film is formed to the total area of the flexible substrate is preferably in the range of 50% or more and less than 100%, and more preferably in the range of 60% or more and 95% or less. More preferably in the range, 70%
Most preferably, it is in the range of at least 90%. If the above ratio is less than 50%, the ratio of the magnetic film to the entire film becomes small, resulting in a disadvantage that the effective magnetic flux density and the magnetic permeability become small.

Next, magnetic alloys that can be suitably used in the present invention will be described with reference to composition examples. Composition Example 1
The magnetic alloy of the present invention is mainly composed of one or two elements selected from Fe and Co, and has a crystal phase composed of crystal grains having an average crystal grain size of 30 nm or less, Ti, Zr, Hf, Nb, Ta,
An amorphous phase containing a compound of O and one or two or more elements selected from Mo, W and rare earth elements. In the composition example 1, the amorphous phase may contain a large amount of the elements T and O composed of one or two elements selected from B and C. In the magnetic alloy of Composition Example 2, the composition formula is represented by Fe _a M ' _b O _c , and the element M'
Represents one or more elements selected from rare earth elements, and the composition ratios a, b, and c are atomic%, and 50 ≦ a ≦ 7.
0, 5 ≦ b ≦ 30, 10 ≦ c ≦ 30, a + b + c = 10
0 is satisfied. Magnetic alloy having the composition Example 3, the composition formula is 'indicated by _e O _f, the element M' Fe _d M '' is T
represents one or more elements selected from i, Zr, Hf, V, Nb, Ta, and W, and the composition ratios d, e, and f are atomic% and 45 ≦ d ≦ 70, 5 ≦ e ≦ 30, 10 ≦ f ≦ 4
0, d + e + f = 100.

The magnetic alloy of Composition Example 4 has a composition formula of Fe _g M _h
O _i T _j , and the element M is composed of Ti, Zr, Hf, Nb,
Represents one or two or more elements selected from Ta, Mo, W and rare earth elements; the element T represents one or two elements selected from B and C; and the composition ratio g, h, i, j
Is atomic%, 50 ≦ g ≦ 75, 5 ≦ h ≦ 30, 15 ≦ i
≦ 25, 0 <j ≦ 6, and 15 ≦ i + j ≦ 30. The magnetic alloy of Composition Example 5 has a composition formula of (Co _1-k R _k ) _m M ″ ′ _n Q _p X _q z _r where the element R is
Represents one or more elements selected from Fe, Ni, Pd, Mn, and Al, and the element M ″ ′ is Ti, Zr, H
represents one or more elements selected from f, Nb, Ta, Mo, W and rare earth elements;
Represents one or more elements selected from N, C, and B; element X represents one or two elements selected from Si and Cr; and element Z represents one from Au, Ag, and platinum group elements. Represents one or more selected elements, and the composition ratio k is 0.05 ≦ k ≦ 0.5, the composition ratio n, p, q, r
Is atomic%, 3 ≦ n ≦ 30, 7 ≦ p ≦ 40, 0 ≦ q ≦ 2
The relationship of 0, 0 ≦ r ≦ 20 is satisfied, and the remainder consists of m and unavoidable impurities.

In order to form a thin film made of these magnetic alloys, existing thin film forming techniques such as sputtering and vapor deposition may be used as appropriate. As the sputtering apparatus, an existing apparatus such as RF bipolar sputtering, DC sputtering, magnetron sputtering, tripolar sputtering, ion beam sputtering, and facing target type sputtering can be used. In addition, the non-film formation region on the substrate can be obtained by covering the portion with a masking material such as a polyimide tape or a resist material before forming a thin film, and removing the masking material after forming the thin film. That is, the magnetic film of the present invention can be obtained by forming a thin film made of these magnetic alloys on a flexible substrate while leaving a non-film forming region.

Since the magnetic film thus obtained is flexible, its shape can be freely changed. For example, the film can be rolled into a cylindrical shape, or the film can be bent, whereby the size of an electronic device can be reduced. Applications of this magnetic film include rod-shaped antennas, planar inductors,
A transformer and the like can be exemplified.

When this magnetic film is rolled or bent, the stress applied to the thin film can be reduced because the thin film is subdivided. When the magnetic film is bent, the thin film is also bent at the same time, but when only one thin film is used, all the bending force is applied to the thin film as well.
When the thin film is divided into a plurality of thin films, the force is dispersed for each thin film, and the force is received even in the non-film-formed portion, so that the force applied to the thin film as a whole can be reduced.

[0024]

EXAMPLES Hereinafter, the present invention will be described specifically with reference to examples, but the present invention is not limited to these examples.

As an example of the magnetic alloy of the present invention, Fe--Co
When a magnetic film obtained by forming a magnetic film on a flexible film using an Hf-O-based alloy is rolled into a cylindrical shape, the degree of subdivision of the thin film, the inner diameter of the cylinder Changes in the characteristics of the magnetic material due to factors such as the above were investigated. First,
PET (polyethylene terephthalate) film with F
A sample obtained by sputtering a thin film made of an e-Co-Hf-O-based alloy was prepared as follows. Sputtering was performed in a mixed gas atmosphere of Ar + O ₂ using an RF conventional sputtering apparatus as a sputtering apparatus and a composite target obtained by attaching an Fe chip and an Hf chip to a Co target as a target. The sputtering was performed in a magnetic field of about 50 Oe, the output was 200 W, and the gas pressure was 6 × 10 ⁻³ To.
rr.

As shown in FIGS. 1 to 3, there are three types of subdivided patterns of the magnetic film: a vertical stripe type, a lattice type, and a horizontal stripe type.
Three samples of m and 2 mm, a total of nine types of samples, were prepared two by two. At this time, the PET film was masked in advance by using a polyimide tape having a width of 1 mm in the portion where the film was not formed. The composition of the thin film thus obtained was Co ₄₄
Fe ₁₄ Hf ₂₀ O ₂₂ . By winding the substrate 1 in the direction of the arrow (winding direction) in the figure for a total of nine types of samples shown in FIGS.
And two cylinders having an inner diameter of 2.0 mm, for a total of 18 tubes.
The relationship between magnetic permeability (μ) and frequency (f) was measured for each of them using a network analyzer.
The magnetic field application direction was the direction of the arrow (excitation direction) in FIGS.

FIG. 4 shows the magnetic permeability (μ) when three kinds of vertical stripe type samples were wound into a cylinder having an inner diameter of 3.5 mm.
And measurement results of frequency (f). In the figure, graph (a)
Is a width of a magnetic alloy thin film of 10 mm, and the graph (b) is a width of 5 m.
m, the graph (c) has a width of 2 mm. From the graph, the numerical values of the real part (μ ′) of the magnetic permeability and the imaginary part (μ ″) of the magnetic permeability at a frequency of 100 MHz are read, and (μ ′) /
The value Q of (μ ″) was determined.

FIG. 5 shows the magnetic permeability (μ) when three kinds of vertical stripe type samples were wound into a cylinder having an inner diameter of 2.0 mm.
And measurement results of frequency (f). In the figure, graph (d)
Indicates the width of the magnetic alloy thin film of 10 mm, and the graph (e) indicates the width of 5 m.
m, the graph (f) has a width of 2 mm. Similarly to the above, the numerical values of the real part (μ ′) of the magnetic permeability and the imaginary part (μ ″) of the magnetic permeability at a frequency of 100 MHz are read from the graph, and the value Q of (μ ′) / (μ ″) is read. I asked. Q was similarly determined for the other samples. From the obtained results, the relationship between Q and the fragmentation size of each sample was summarized in a graph.

FIG. 6 is a graph showing the measurement results when each sample was wound into a cylinder having an inner diameter of 3.5 mm. In any of the vertical stripe type, the lattice type, and the horizontal stripe type, the Q value increases as the thin film is subdivided, and almost all data exceed the Q value (about 11) of the undivided magnetic film. Regarding the Q value, the lattice type is the highest in any size, and the horizontal stripe type is a number approaching that of the lattice type.

The Q value of the vertical stripe type is lower than that of the other two patterns. This is due to the relationship between the longitudinal direction of the vertical stripe band-shaped thin film and the winding direction. In the case of the horizontal stripe type, the longitudinal direction of the strip-shaped thin film and the winding direction match, and stress is applied to the thin film by making the magnetic film cylindrical, and each stripe has an induction difference in a direction perpendicular to the excitation direction. It is considered that anisotropy is provided, the excitation direction becomes the direction of the hard magnetization axis, and the Q value increases. On the other hand, in the vertical stripe type, the longitudinal direction of the strip-shaped thin film and the winding direction are orthogonal, and even if the magnetic film is cylindrical, stress is not easily applied to the thin film, and the anisotropy of each stripe is further reduced. In this case, an axis of easy magnetization is provided in the same direction as the excitation direction, resulting in easy axis excitation.

FIG. 7 is a graph showing the measurement results when each sample was wound into a cylindrical shape having an inner diameter of 2.0 mm. In any of the vertical stripe type, the lattice type, and the horizontal stripe type, the Q value tends to increase as the thin film is subdivided, and all data exceed the Q value (about 11) of the non-subdivided magnetic film. . Regarding the Q value, the lattice type is the highest in any size, and is in the order of the horizontal stripe type and the vertical stripe type.

From FIGS. 6 and 7, it can be seen that, in order to exceed the Q value of the undivided magnetic film, at least the size of the fragmentation should be 10 mm or less and the Q value of 15 or more at 100 MHz.
It can be seen that in order to obtain a value, the subdivision size must be 5 mm or less. The subdivision pattern is most preferably a vertical stripe. If the subdivision size is 5 mm or less, a Q value of 20 or more can be obtained.

[0033]

As described above, the magnetic alloy thin film of the present invention has a specific composition and a specific composition ratio described above.
e, Co or a magnetic film made of an alloy mainly composed of Fe and Co, and obtained by forming a film of this magnetic alloy on a flexible substrate while leaving a non-film forming region. ,
Since a magnetic core having a high Q value and a low loss can be provided even in a high frequency region, it contributes to a reduction in the size, weight, and performance of magnetic elements such as an antenna, a planar inductor, and a transformer. In particular, an excellent rod-shaped antenna or the like is provided from a magnetic material formed by rolling a magnetic film into a rod shape.

When a magnetic alloy is formed on a substrate, the generation of an eddy current can be suppressed by forming the thin film into smaller pieces as compared with the case where only one large thin film is formed. , The decrease in high-frequency permeability can be suppressed, and Q
A high value magnetic film can be obtained. The ratio of the area of the magnetic alloy thin film to the entire area of the substrate is 50% or more and 10% or more.
When the content is less than 0%, a high-performance magnetic film can be obtained. When the magnetic film is rolled or bent, the stress applied to the thin film can be reduced because the thin film is subdivided.

[Brief description of the drawings]

FIG. 1 is a plan view showing an example of an embodiment of the present invention.

FIG. 2 is a plan view showing another example of the embodiment of the present invention.

FIG. 3 is a plan view showing still another example of the embodiment of the present invention.

FIG. 4 is a graph showing measurement results of magnetic permeability (μ) and frequency (f) when three kinds of vertical stripe type samples are wound into a cylinder having an inner diameter of 3.5 mm.

FIG. 5 is a graph showing measurement results of magnetic permeability (μ) and frequency (f) when three types of vertical stripe type samples are wound into a cylindrical shape having an inner diameter of 2.0 mm.

FIG. 6: 100 MH of a cylindrical magnetic material having an inner diameter of 3.5 mm
7 is a graph showing the relationship between the Q value at z and the subdivided size of the thin film.

FIG. 7: 100 MH of a cylindrical magnetic body having an inner diameter of 2.0 mm
7 is a graph showing the relationship between the Q value at z and the subdivided size of the thin film.

FIG. 8 is a graph showing the frequency dependence of the magnetic permeability of a conventional material.

[Explanation of symbols]

 1 Substrate 2 Magnetic alloy thin film 3 Non-film formation area

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Akihiro Makino 1-7 Yukiya Otsukacho, Ota-ku, Tokyo Alps Electric Co., Ltd.

Claims (16)

[Claims] 1. A crystal phase mainly composed of one or two elements selected from Fe and Co and having an average crystal grain size of 30 nm or less, and Ti, Zr, Hf, Nb, Ta,
A magnetic alloy thin film composed of an amorphous phase containing a compound of O and an element M composed of one or two or more elements selected from Mo, W and rare earth elements is formed on a flexible substrate by a non-film formation region. A magnetic film characterized by being formed in a state where it is left. 2. The magnetic material according to claim 1, wherein the amorphous phase of the magnetic alloy thin film further contains a large amount of elements T and O comprising one or two elements selected from B and C. the film. 3. The composition formula is represented by Fe _a M ′ _b O _c , wherein the element M ′ represents one or more elements selected from rare earth elements, and the composition ratios a, b, and c are atomic percent. , 50 ≦ a ≦
70, 5 ≦ b ≦ 30, 10 ≦ c ≦ 30, a + b + c = 1
A magnetic film, wherein a magnetic alloy thin film satisfying the relationship of 00 is formed on a flexible substrate while leaving a non-film formation region. 'Indicated by _e O _f, the element M' wherein a composition formula Fe _d M '' is, Ti, Zr, Hf, V , Nb, Ta, and one or more elements selected from W And the composition ratio d,
e and f are atomic%, 45 ≦ d ≦ 70, 5 ≦ e ≦ 30, 1
A magnetic film, wherein a magnetic alloy thin film satisfying a relationship of 0 ≦ f ≦ 40 and d + e + f = 100 is formed on a flexible substrate while leaving a non-film formation region. 5. The composition formula is represented by Fe _g M _h O _i T _j , and the element M is one or more elements selected from Ti, Zr, Hf, Nb, Ta, Mo, W and rare earth elements. And the element T represents one or two elements selected from B and C, and the composition ratios g, h, i, and j are atomic% and 50 ≦ g
≦ 75, 5 ≦ h ≦ 30, 15 ≦ i ≦ 25, 0 <j ≦ 6,
A magnetic film, wherein a magnetic alloy thin film satisfying a relationship of 15 ≦ i + j ≦ 30 is formed on a flexible substrate in a state where a non-film formation region is left. 6. The composition formula is (Co _1-k R _k ) _m M ″ ′ _n Q _p X _q
Represented by Z _r, element R, Fe, Ni, Pd, Mn , A
l represents one or more elements selected from l, the element M '''' represents one or more elements selected from Ti, Zr, Hf, Nb, Ta, Mo, W and rare earth elements, The element Q represents one or more elements selected from O, N, C, and B, the element X represents one or two elements selected from Si and Cr, and the element Z represents A
u, Ag, and one or more elements selected from platinum group elements, and the composition ratio k is 0.05 ≦ k ≦ 0.
5, composition ratio n, p, q, r is atomic%, 3 ≦ n ≦ 30,
The relationship of 7 ≦ p ≦ 40, 0 ≦ q ≦ 20, 0 ≦ r ≦ 20 is satisfied, and the remainder is m and a magnetic alloy thin film which is an unavoidable impurity, and a non-film formation region is left on a flexible substrate. A magnetic film characterized by being formed in a state. 7. The magnetic film according to claim 1, wherein the non-film-forming region is formed in a stripe shape or a lattice shape on a flexible substrate. 8. The method according to claim 1, wherein a ratio of an area occupied by the region where the magnetic alloy thin film is formed to the entire area of the flexible substrate is 50% or more and less than 100%.
The magnetic film according to any one of the above. 9. A crystal phase mainly composed of one or two elements selected from Fe and Co and having an average crystal grain size of 30 nm or less, and Ti, Zr, Hf, Nb, Ta,
A magnetic alloy thin film composed of an amorphous phase containing a compound of O and an element M composed of one or two or more elements selected from Mo, W and rare earth elements is formed on a flexible substrate by a non-film formation region. A magnetic material characterized in that a magnetic film obtained by forming a film in a state where it is left is rounded into a rod shape. 10. A magnetic film in which the amorphous phase of the magnetic alloy thin film further contains a large amount of elements T and O composed of one or two elements selected from B and C, and is rounded into a rod shape. The magnetic body according to claim 9, wherein 11. The composition formula is represented by Fe _a M ′ _b O _c , wherein the element M ′ represents one or more elements selected from rare earth elements, and the composition ratios a, b, and c are expressed in atomic%. , 50 ≦ a ≦
70, 5 ≦ b ≦ 30, 10 ≦ c ≦ 30, a + b + c = 1
A magnetic material obtained by forming a magnetic alloy thin film satisfying the relationship of No. 00 on a flexible substrate while leaving a non-film forming region, and rounding the magnetic film into a rod shape. 12. A composition formula is 'indicated by _e O _f, the element M' Fe _d M '' is, Ti, Zr, Hf, V , Nb, Ta, and one or more elements selected from W And the composition ratio d,
e and f are atomic%, 45 ≦ d ≦ 70, 5 ≦ e ≦ 30, 1
A magnetic film obtained by forming a magnetic alloy thin film satisfying a relationship of 0 ≦ f ≦ 40 and d + e + f = 100 on a flexible substrate while leaving a non-film forming region, and rounding the obtained magnetic film into a rod shape. A magnetic material characterized by the following. 13. The composition formula is represented by Fe _g M _h O _i T _j , and the element M is one or more elements selected from Ti, Zr, Hf, Nb, Ta, Mo, W and rare earth elements. And the element T represents one or two elements selected from B and C, and the composition ratios g, h, i, and j are atomic% and 50 ≦
g ≦ 75, 5 ≦ h ≦ 30, 15 ≦ i ≦ 25, 0 <j ≦
6. A magnetic film obtained by forming a magnetic alloy thin film satisfying a relationship of 15 ≦ i + j ≦ 30 on a flexible substrate while leaving a non-film forming region, and rounding the magnetic film into a rod shape. Magnetic material. 14. The composition formula is (Co _1-k R _k ) _m M ″ ′ _n Q _p X
represented by _q Z _r, element R, Fe, Ni, Pd, Mn , A
l represents one or more elements selected from l, the element M '''' represents one or more elements selected from Ti, Zr, Hf, Nb, Ta, Mo, W and rare earth elements, The element Q represents one or more elements selected from O, N, C, and B, the element X represents one or two elements selected from Si and Cr, and the element Z represents A
u, Ag, and one or more elements selected from platinum group elements, and the composition ratio k is 0.05 ≦ k ≦ 0.
5, composition ratio n, p, q, r is atomic%, 3 ≦ n ≦ 30,
The relationship of 7 ≦ p ≦ 40, 0 ≦ q ≦ 20, 0 ≦ r ≦ 20 is satisfied, and the remainder is m and a magnetic alloy thin film which is an unavoidable impurity, and a non-film formation region is left on a flexible substrate. A magnetic material characterized in that a magnetic film obtained by forming a film in a state is rounded into a rod shape. 15. The magnetic body according to claim 9, wherein the non-film-forming region is formed in a stripe shape or a lattice shape on a flexible substrate. 16. The flexible substrate according to claim 9, wherein the ratio of the area occupied by the region where the magnetic alloy thin film is formed to the entire area of the flexible substrate is 50% or more and less than 100%. A magnetic material according to claim 1.