JPH10235358A - Apparatus and method for electrolytic water-making - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily regenerate an ion exchange membrane by providing a regenerating chemicals supply means supplying regenerating chemicals for regenerating the ion exchange membrane in an electrolytic cell to the electrolytic cell. SOLUTION: An electrolytic cell 1 has an anode chamber 3 equipped with an anode 2 and a cathode chamber 5 equipped with a cathode 4 and an ion exchange membrane 6 is provided between the anode chamber 3 and the cathode chamber 5. Chemicals in an acid tank 9 are sent by a pump 13 to be supplied to the anode chamber 3 by a raw water supply pipe 7a through an opening and closing valve 14 and chemicals in an alkali tank 10 are sent by a pump 15 to be supplied to the cathode chamber 5 by a raw water supply pipe 7b through an opening and closing valve 16 to perform electrolysis and, thereafter, alkali is supplied to one of the anode chamber 3 and the cathode chamber 5 from a regenerating chemicals tank 17 to regenerate the ion exchange membrane 6.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for producing electrolyzed water and a method for producing electrolyzed water, for example, a semiconductor substrate, a glass substrate, an electronic component, electronic component members such as these production apparatus components, or an optical lens. The present invention relates to an electrolyzed water production apparatus and an electrolyzed water production method which can be used for preparing oxidized electrolyzed water and reducible electrolyzed water used in wet treatment for washing.

[0002]

2. Description of the Related Art In the process of manufacturing electronic parts such as LSIs, it is sometimes required to make the surface extremely clean. For example, in LSI, a silicon oxide insulating film is formed on a silicon wafer, a resist layer is provided in a predetermined pattern on the silicon film, and the insulating film in a portion where the resist layer is not provided is removed by etching or the like to remove metal silicon. After exposing the surface and cleaning the surface, a step (lithography process) of introducing a p-type or n-type element according to the purpose and embedding a metal wiring such as aluminum is repeated to manufacture an element. When introducing an n-type element or embedding metal wiring, if foreign matter such as fine particles, metal, organic matter, natural oxide film, etc. adhere to the metal silicon surface, the metal silicon and the metal wiring may The characteristics of the element may be poor due to poor contact or increased contact resistance. For this reason, in the LSI manufacturing process, the step of cleaning the surface of the silicon wafer is a very important step in obtaining a high-performance device, and it is necessary to remove and remove impurities adhering to the silicon wafer as much as possible.

When manufacturing a liquid crystal display device, first, a gate metal wiring is formed on a glass substrate by, for example, chromium, then a gate insulating film is formed by silicon nitride, and an amorphous silicon i layer and an amorphous silicon n ⁺ layer are further formed. Then, a metal wiring is formed thereon by using aluminum / chromium or the like. After that, a predetermined pattern of windows is opened in the metal wiring and the amorphous silicon n ⁺ layer to expose the amorphous silicon i layer, and further, an operation of forming an interlayer insulating film of silicon nitride is repeatedly performed, whereby the liquid crystal display device is formed. can get. In the case of a liquid crystal display device obtained by such a process, foreign matter such as fine particles, metal, organic matter, and natural particles may be present at the interface between the gate metal wiring and the gate insulating film or the interface between the gate insulating film and the amorphous silicon i-layer. If an oxide film or the like remains, defective characteristics of the element may occur due to a wiring failure, an increase in contact resistance, and the like,
Even in the case of manufacturing a liquid crystal display device, it is necessary to remove and remove attached impurities as much as possible.

Conventionally, for example, when cleaning a silicon wafer (hereinafter referred to as wet processing), a mixed solution of sulfuric acid and hydrogen peroxide, a mixed solution of hydrochloric acid and hydrogen peroxide, a hydrofluoric acid solution, an ammonium fluoride solution and the like are used. Cleaning with ultrapure water to remove organic substances, fine particles, metals, natural oxide films, etc. adhering to the silicon wafer surface without impairing the atomic level flatness of the silicon wafer surface I have.

The following (1) to (13) are specific examples of conventional wet processing of a silicon wafer. (1) Sulfuric acid / hydrogen peroxide solution washing step; a mixed solution of sulfuric acid: hydrogen peroxide solution = 4: 1 (volume ratio) at 130 ° C.
Wash for 0 minutes. (2) Ultrapure water washing step; washing with ultrapure water for 10 minutes. (3) Hydrofluoric acid washing step; washing with 0.5% hydrofluoric acid for 1 minute. (4) Ultrapure water washing step; washing with ultrapure water for 10 minutes. (5) Ammonia / hydrogen peroxide water washing step; washing with a mixed solution of ammonia water / hydrogen peroxide / ultra pure water = 0.05: 1: 5 (volume ratio) at 80 ° C. for 10 minutes. (6) Ultrapure water washing step; washing with ultrapure water for 10 minutes. (7) Hydrofluoric acid washing step: washing with 0.5% hydrofluoric acid for 1 minute. (8) Ultrapure water washing step: washing with ultrapure water for 10 minutes. (9) Hydrochloric acid / hydrogen peroxide water washing step: a mixed solution of hydrochloric acid: hydrogen peroxide water: ultra pure water = 1: 1: 6 (volume ratio)
Wash at 80 ° C for 10 minutes. (10) Ultrapure water washing step; washing with ultrapure water for 10 minutes. (11) Hydrofluoric acid washing step; washing with 0.5% hydrofluoric acid for 1 minute. (12) Ultrapure water washing step; washing with ultrapure water for 10 minutes. (13) Spin drying or IPA vapor drying

The above-mentioned step (1) is a step mainly for removing organic substances adhering to the surface of the silicon wafer;
The step (5) is a step for mainly removing fine particles adhering to the silicon wafer surface, the step (9) is a step for mainly removing metal impurities on the silicon wafer surface, and Steps (3), (7) and (11) are steps for removing the natural oxide film on the surface of the silicon wafer. In addition, the cleaning liquid in each of the above steps often has a contaminant removing ability other than the above-mentioned main purpose. For example, the mixed solution of sulfuric acid and hydrogen peroxide used in the step (1) is not only organic but also organic substances. Since it also has a strong action of removing metal impurities, in addition to the above-described method of removing different impurities by each cleaning solution, there is also a method of removing a plurality of impurities with one type of cleaning solution.

In the wet processing of a silicon wafer, a method of bringing a cleaning liquid or ultrapure water into contact with the surface of the silicon wafer generally includes a batch cleaning method in which a plurality of silicon wafers are immersed in a cleaning tank containing the cleaning liquid or ultrapure water. A method called washing is performed while circulating and filtering the cleaning liquid to prevent contamination of the cleaning liquid, and as a cleaning method using ultrapure water after treatment with the cleaning liquid, ultrapure water is supplied from the bottom of the cleaning tank. An overflow cleaning method that overflows from the top of the cleaning tank, and then stores the ultrapure water in the cleaning tank until the entire surface of the wafer is immersed in the ultrapure water, and then quickly discharges the ultrapure water from the bottom of the cleaning tank at once. Laws have also been adopted. In recent years, in addition to the batch cleaning method, a method of spraying a cleaning liquid or ultrapure water on a wafer surface in a shower shape or cleaning the wafer by rotating the wafer at a high speed and spraying a cleaning liquid or ultrapure water on the center thereof. A so-called single wafer cleaning method such as a method is also employed.

The cleaning with the ultrapure water is performed to rinse (rinse) a cleaning liquid or the like remaining on the wafer surface. Therefore, the ultrapure water used for rinsing is high purity ultrapure water from which fine particles, colloidal substances, organic substances, metal ions, anions, dissolved oxygen and the like have been removed to an extremely low level. This ultrapure water is also used as a solvent for the cleaning liquid.

In the step (5) of removing fine particles in the above-mentioned silicon wafer wet processing step, ammonia / hydrogen peroxide solution is used as a cleaning liquid. For removing fine particles, it is effective that the cleaning liquid is reducing. It has become clear that, for example, if a reducing cleaning solution in which a reducing gas such as hydrogen is dissolved is used, fine particles can be easily removed without performing high-temperature treatment using a high-concentration cleaning solution. Become. Further, in the metal removing step (9) in the wet processing step of the silicon wafer, hydrochloric acid / hydrogen peroxide solution is used as a cleaning liquid, but it is clear that oxidizing the cleaning liquid is effective for removing the metal. For example, if an oxidizing cleaning liquid obtained by dissolving an oxidizing gas such as ozone is used, metal can be easily removed without using a high-concentration cleaning liquid and performing high-temperature treatment.

[0010]

An electrolytic water producing apparatus is used as one of methods for obtaining a reducing cleaning solution in which hydrogen is dissolved or an oxidizing cleaning solution in which ozone is dissolved.
As such an electrolyzed water production apparatus, for example, a two-chamber structure in which an ion exchange membrane is provided between an anode chamber having an anode electrode and a cathode chamber having a cathode electrode,
There is known a three-tank structure in which an intermediate chamber filled with an ion exchange resin is provided between a pair of ion exchange membranes between an anode chamber and a cathode chamber.

An anode chamber of such an electrolyzed water producing apparatus,
When neutral raw water (usually, ultrapure water is used as raw water) is supplied to each of the cathode chambers to perform electrolysis, oxidized electrolytic water (anode water) in which oxygen or ozone is dissolved from the anode chamber side. ) Is obtained, and reducing electrolytic water (cathode water) in which hydrogen is dissolved is obtained from the cathode chamber side. In addition, when an acidic raw water to which an acid, for example, hydrochloric acid is added, is supplied to the anode chamber side, and an alkali, for example, an alkaline raw water to which ammonium hydroxide is added, is supplied to the cathode chamber side for electrolysis, the high oxidation from the anode chamber side. Strong chlorine water (anode water) is obtained, and reducing ammonia water (cathode water) is obtained from the cathode chamber side. Whether the anode chamber and the cathode chamber are supplied with neutral raw water to which no acid or alkali is added to perform electrolysis, or whether the above-described acidic raw water or alkaline raw water is supplied to perform electrolysis, the anode obtained by electrolysis is used. It is appropriately selected according to the purpose of use of water and cathode water.

In the case of using a cation exchange type ion-exchange membrane in the above-described two-tank electrolyzed water producing apparatus, an ion-exchange membrane in a three-tank electrolyzed water producing apparatus, and an ion exchange resin, for example, Electrolysis is performed by supplying acidic raw water with hydrochloric acid added to the chamber side and supplying alkaline raw water with ammonia added to the cathode chamber side, and then supplying neutral raw water to which no acid or alkali is added. Is carried out, the pH of the cathode water obtained when the neutral raw water is electrolyzed is about 6.50 to 8.00, whereas the pH of the actually obtained cathode water is 8.50 to 1
0.00, resulting in a problem that cathode water having a pH higher than a desired pH can be obtained. When an anion exchange type is used as the ion exchange membrane or ion exchange resin, an acidic raw water containing hydrochloric acid is supplied to the anode chamber side,
After supplying alkaline raw water to which ammonia is added to the cathode chamber side and performing electrolysis, when supplying neutral raw water to which no acid or alkali is added and performing electrolysis, the neutral raw water is obtained by electrolysis. The pH of the anode water is 6.00 to 7.50.
PH of the anode water actually obtained
Was from 4.50 to 5.50, and there was a problem that anode water having a lower pH than desired was obtained.

[0013] The present invention solves the above-mentioned conventional problems, and after supplying an acidic raw water or an alkaline raw water for electrolysis and then performing an electrolysis of neutral raw water to which no acid or alkali is added, a desired pH can be obtained. It is an object of the present invention to provide an electrolyzed water production apparatus and an electrolyzed water production method capable of obtaining the above anode water and cathode water.

[0014]

According to the present invention, there are provided (1) an anode chamber provided with an anode electrode, a cathode chamber provided with a cathode electrode, and a cation exchange ion exchange membrane provided between both chambers. Having an electrolytic cell, raw water supply means for supplying raw water to each of the anode chamber and the cathode chamber, alkali supply means for adjusting the pH of the raw water supplied to the cathode chamber to alkaline, and anode water obtained in the anode chamber An anode water transfer pipe for discharging the anode water from the anode chamber, a cathode water transfer pipe for discharging the cathode water obtained in the cathode chamber from the cathode chamber, and a regeneration chemical supply means for supplying an acid for regenerating the ion exchange membrane; And (2) acid supply means for adjusting the pH of raw water supplied to the anode chamber side to acidic. 1) electrolyzed water production apparatus according, (3)
Raw water is supplied to each of the anode chamber and the cathode chamber, and an electrolytic cell having an anode chamber equipped with an anode electrode, a cathode chamber equipped with a cathode electrode, and an anion exchangeable ion exchange membrane provided between the two chambers. Raw water supply means, an acid supply means for adjusting the pH of the raw water supplied to the anode chamber to acidic, an anode water transfer pipe for discharging the anode water obtained in the anode chamber from the anode chamber, and a raw water supply pipe obtained in the cathode chamber. (4) an electrolyzed water producing apparatus, comprising: a cathode water transfer pipe for discharging the collected cathode water from the cathode chamber; and a regenerating chemical supply unit for supplying an alkali for regenerating the ion exchange membrane. The apparatus for producing electrolyzed water according to (3), further comprising an alkali supply means for adjusting the pH of the raw water supplied to the cathode chamber side to alkaline. Regeneration chemical discharge pipes for discharging the regeneration chemical used for regeneration of the exchange membrane from the anode chamber and the cathode chamber are provided separately from the anode water transfer pipe and the cathode water transfer pipe, respectively (1) to (4). (6) An anode chamber provided with an anode electrode, a cathode chamber provided with a cathode electrode, and a pair of cations provided between the anode chamber and the cathode chamber. An electrolytic cell having an intermediate chamber filled with a cation exchange ion exchange resin inside an exchangeable ion exchange membrane, an anode chamber, a cathode chamber, and raw water supply means for supplying raw water to each of the intermediate chambers; An alkali supply means for adjusting the pH of raw water supplied to the cathode chamber side to alkaline, and an anode water transfer pipe for discharging anode water obtained in the anode chamber from the anode chamber. A cathode water transfer pipe for discharging cathode water obtained in the cathode chamber from the cathode chamber, an intermediate chamber water discharge pipe for draining raw water supplied to the intermediate chamber from the intermediate chamber, an ion exchange resin and an ion exchange membrane. (7) a device for producing electrolyzed water, comprising: a regenerating chemical supply means for supplying an acid for regeneration.
An electrolytic water production apparatus according to (6), further comprising an acid supply unit for adjusting the pH of the raw water supplied to the anode chamber to acidic, (8) an anode chamber having an anode electrode, A cathode chamber provided with a cathode electrode, and a pair of anion exchange ion exchange membranes provided between the anode chamber and the cathode chamber, which are filled with an anion exchange ion exchange resin. An electrolytic cell having a chamber, raw water supply means for supplying raw water to each of an anode chamber, a cathode chamber, and an intermediate chamber; acid supply means for adjusting the pH of the raw water supplied to the anode chamber side to acidic; The anode water transfer pipe for discharging the anode water obtained in the anode chamber from the anode chamber, the cathode water transfer pipe for discharging the cathode water obtained in the cathode chamber from the cathode chamber, and the raw water supplied to the intermediate chamber. (9) an electrolyzed water producing apparatus comprising: an intermediate chamber water discharge pipe for draining water from the interchamber; and a regenerating chemical supply unit for supplying an alkali for regenerating the ion exchange resin and the ion exchange membrane. The apparatus for producing electrolyzed water according to (8), further comprising an alkali supply means for adjusting the pH of raw water supplied to the cathode chamber side to alkaline, (10) Regeneration of ion exchange resin and ion exchange membrane. A regenerating chemical discharge pipe for discharging the regenerating chemical used in the above from the anode chamber, the cathode chamber, and the intermediate chamber is provided separately from the anode water drain pipe, the cathode water drain pipe, and the intermediate chamber water discharge pipe (6). The electrolytic water production apparatus according to any one of (1) to (9), wherein the regenerating chemical supply means is provided in common with an acid supply means for adjusting the pH of raw water supplied to the anode chamber side to acidic. (12) The apparatus for producing electrolyzed water according to (2) or (7), wherein (12) a chemical supply means for regeneration is provided in common with an alkali supply means for adjusting the pH of raw water supplied to the cathode chamber to alkaline. Electrolyzed water production apparatus according to (4) or (9),
3) Supplying alkaline raw water with alkali added to the cathode chamber side of the electrolyzed water producing apparatus according to the above (1) or (2), or supplying alkaline raw water with alkali added to the cathode chamber side and the anode chamber After performing electrolysis by supplying acid raw water with acid added to the side, the anode chamber,
A method for producing electrolyzed water, comprising supplying an acid from a regenerating chemical supply means to at least one of the cathode chambers to regenerate the ion exchange membrane, and then supplying neutral raw water to at least the cathode chamber to perform electrolysis; (14) An acidic raw water to which an acid is added is supplied to the anode chamber side of the electrolyzed water producing apparatus according to the above (3) or (4), or an acidic raw water to which the acid is added is supplied to the anode chamber side and the cathode is supplied. After supplying alkaline raw water to which alkali is added to the chamber side and performing electrolysis, an alkali is supplied from at least one of the anode chamber and the cathode chamber from a regenerating chemical supply means to regenerate the ion exchange membrane, and then at least the anode chamber A method for producing electrolyzed water, characterized in that neutral raw water is supplied to perform electrolysis,
(15) The alkaline raw water to which alkali is added is supplied to the cathode chamber side of the electrolyzed water producing apparatus according to (6) or (7), or the alkaline raw water to which alkali is added is supplied to the cathode chamber side, and the anode is supplied. After supplying an acidic raw water to which an acid is added to the chamber side to perform electrolysis, an acid is supplied from a regenerating chemical supply unit to at least the intermediate chamber of the anode chamber, the cathode chamber, and the intermediate chamber to perform ion exchange with the ion exchange membrane. (16) The method for producing electrolyzed water according to the above (8) or (9), wherein the electrolysis is performed by regenerating the resin and then supplying neutral raw water to at least the cathode chamber. An acidic raw water to which an acid is added is supplied to the anode chamber side, and an alkaline raw water to which an alkali is added is supplied to the cathode chamber side to perform electrolysis, and then the anode chamber, the cathode chamber, and the intermediate chamber are supplied. At least in the intermediate chamber, an alkali is supplied from a regenerating chemical supply means to regenerate the ion exchange membrane and the ion exchange resin, and then neutral raw water is supplied to at least the anode chamber to perform electrolysis. A summary of the water production method.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings when ultrapure water is used as raw water. FIG. 1 shows an example of an electrolyzed water producing apparatus having a two-tank structure as an embodiment of the present invention. In the figure, reference numeral 1 denotes an electrolytic cell, and the electrolytic cell 1 has an anode chamber 3 having an anode electrode 2 and a cathode chamber 5 having a cathode electrode 4, and an ion chamber is provided between the anode chamber 3 and the cathode chamber 5. An exchange membrane 6 is provided. 7a and 7b are raw water supply pipes, and ultrapure water produced by the ultrapure water production device 8 is supplied to the anode chamber 3 and the cathode chamber 5 by the raw water supply pipes 7a and 7b.

In the figure, 9 is an acid tank, 10 is an alkali tank, and the acid supply pipe 11 connected to the acid tank 9 is connected to the raw water supply pipe 7a on the anode chamber 3 side and connected to the alkali tank 10. The alkali supply pipe 12 is connected to the raw water supply pipe 7b on the cathode chamber 5 side. Acid tank 9
The chemical inside is supplied by a pump 13 and added to ultrapure water transferred by a raw water supply pipe 7a via an on-off valve 14. The chemical in the alkaline tank 10 is pump 1
5 and the raw water supply pipe 7 b via the on-off valve 16.
Added to the ultrapure water transported by

Reference numeral 17 denotes a regenerating chemical tank for regenerating the ion exchange membrane 6. The regenerating chemical tank 17 is connected to regenerating chemical supply pipes 18a and 18b. The ends are raw water supply pipes 7a, respectively.
7b. 19a and 19b are pumps for transferring chemicals for regeneration, and 20a and 20b are on-off valves.

On the other hand, the water discharged from the anode chamber 3 is the anode water generated by electrolysis,
The wastewater containing the regenerating chemical is transferred to the regenerating chemical discharge pipe 23 by switching the transfer destination by the three-way valve 21,
As for the water discharged from the cathode chamber 5, the cathode water generated by the electrolysis is transferred to the cathode water transfer pipe 25, the wastewater containing the regenerating chemical is transferred to the regenerating chemical discharge pipe 23, and the transfer destination is switched by the three-way valve 24 and transferred. Is done.

The ultrapure water producing apparatus 8 includes a pretreatment apparatus for treating raw water with a coagulating sedimentation apparatus, a sand filtration apparatus, and an activated carbon filtration apparatus, and a reverse osmosis membrane apparatus, a two-bed three-column ion exchange apparatus. Equipment, mixed bed type ion exchange equipment, primary pure water production equipment that obtains primary pure water by processing with a precision filter, primary ultraviolet light irradiation, mixed bed polisher, ultrafiltration membrane treatment, and primary pure water A secondary pure water production apparatus is provided for removing fine particles, colloidal substances, organic substances, metal ions, anions, and the like remaining in water, and a degassing apparatus is provided if necessary (none of them is shown). ).

The ultrapure water produced by the ultrapure water producing apparatus 8 is used for coagulating sedimentation, filtration, coagulation filtration, activated carbon treatment or the like of raw water such as industrial water, clean water, well water, river water, lake water and the like. By treating with a pretreatment device, coarse suspended substances and organic matter in the raw water are removed, and then treated with a primary pure water production device mainly including a desalination device such as an ion exchange device and a reverse osmosis membrane device. By removing most of impurities such as fine particles, colloidal substances, organic substances, metal ions, anions, etc., this primary pure water is equipped with an ultraviolet irradiation device, mixed bed polisher, ultrafiltration membrane and reverse osmosis membrane Circulating treatment in a secondary pure water production device consisting of a membrane treatment device
High-purity pure water from which impurities such as colloidal substances, organic substances, metal ions, and anions have been removed as much as possible. Examples of the water quality include electric resistivity of 17.0 MΩ · cm or more and total organic carbon of 100 μgC / 1 liter or less, the number of fine particles (particle size 0.07 μm or more) is 50 / ml or less, the number of viable bacteria is 50 / l or less, and silica is 10 μg
SiO ₂ / liter or less, sodium 0.1 μg Na /
Refers to one or less liters. For example, those having the water quality shown in the following Table 1 are preferable, and it is said that if the water quality is ultrapure water, contaminants in the ultrapure water will not adhere to the wafer surface.

[0021]

[Table 1]

On the other hand, the acids supplied from the acid tank 9 include hydrochloric acid (HCl), nitric acid (HNO ₃ ), sulfuric acid (H ₂ SO ₄ ).
₄ ) is used, but hydrochloric acid is preferably used because hypochlorous acid having strong oxidizing power is generated by electrolysis. As the alkali supplied from the alkali tank 10, ammonium hydroxide (NH ₄ OH), sodium hydroxide (NaOH) or the like is used. However, ammonium hydroxide, which is relatively safe and easy to handle, is preferable.

When the ion exchange membrane 6 is a cation exchange type, an acid such as hydrochloric acid or nitric acid is used as the regeneration chemical supplied from the regeneration chemical tank 17, and the ion exchange membrane 6 is an anion exchange type. In the case of ammonium hydroxide,
An alkali such as sodium hydroxide is used.

FIG. 2 shows an electrolyzed water producing apparatus having an electrolytic cell 1 having a three-cell structure having an intermediate chamber 26 between the anode chamber 3 and the cathode chamber 5. 6 is filled with an ion exchange resin.
The difference between the electrolytic water production apparatus shown in FIG. 2 and the electrolytic water production apparatus shown in FIG. 1 is that the electrolytic cell 1 has an intermediate chamber 26 and that the ultrapure water produced by the ultrapure water production apparatus 8 is used. A raw water supply pipe 7c for supplying the intermediate chamber 26 together with the anode chamber 3 and the cathode chamber 5 is further provided.
, A pump 19c, one end of a regenerating chemical supply pipe 18c having an on-off valve 20c, and an intermediate chamber water discharge pipe 27 for discharging raw water supplied to the intermediate chamber 26 from the intermediate chamber 26. In addition, a three-way valve 28 is provided so as to be able to switch between a regenerating chemical discharge pipe 23 for discharging wastewater containing a regenerating chemical.

When producing electrolyzed water in the electrolyzed water producing apparatus shown in FIG. 1, ultrapure water produced by the ultrapure water producing apparatus 8 is supplied to the anode chamber 3 and the cathode chamber 5 for electrolysis. In order to obtain acidic anode water and alkaline cathode water, the on-off valve 14 is opened and the pump 13 is operated to add the acid supplied from the acid tank 9 to the ultrapure water supplied to the anode chamber side. At the same time, the on-off valve 16 is opened, the pump 15 is operated, and the alkali supplied from the alkali tank 10 is added to the ultrapure water supplied to the cathode chamber side to perform electrolysis. Oxidizing anode water is obtained from the cathode chamber side, and alkaline and reducing cathode water is obtained. The acid in the acid tank 9 preferably has a concentration of about 1 M to 5 M, and the amount of the acid added to the ultrapure water is preferably about 5 mM to 100 mM. The alkali in the alkali tank 10 is 100 mM.
A concentration of about 1 to about 1 M is preferable, and the amount of alkali added to ultrapure water is preferably about 0.1 mM to 10 mM. At the time of the electrolysis, the three-way valve 21 is switched to the anode water transfer pipe 22 side, and the three-way valve 24 is switched to the cathode water transfer pipe 25 side. The anode water and the cathode water are switched by the anode water transfer pipe 22 and the cathode water transfer pipe 25, respectively. , For example, in a wet processing step for a silicon wafer or the like.

In the above electrolyzed water producing apparatus, when the ion exchange membrane 6 is of a cation exchange type, for example, when ammonium hydroxide is supplied from the alkali tank 10, H ⁺ of the cation exchange group of the ion exchange membrane 6 becomes hydroxylated. Ammonium is gradually replaced by NH ^+, and the ion exchange membrane 6 has NH ⁺
Is adsorbed. Therefore, when electrolysis of neutral ultrapure water without adding acid or alkali is performed after electrolysis of alkaline ultrapure water, NH ⁺ adsorbed on the ion exchange membrane 6 is liberated from the ion exchange membrane 6. As a result, the pH of the ultrapure water increases, and it becomes impossible to obtain cathode water having a desired pH. Therefore, when performing electrolysis of ultrapure water to which acid or alkali is added and then electrolysis of ultrapure water to which acid or alkali is not added, first, the regenerating chemical (ion When the exchange membrane 6 is a cation exchange type, the regenerating chemical is an acid)
Thus, the ion exchange membrane 6 is regenerated. As the acid supplied from the regenerating chemical tank 17, hydrochloric acid having a concentration of about 1M is preferable. The time for supplying the acid for regenerating the ion exchange membrane 6 is preferably about 0.5 hour.

The regenerating chemicals are anode compartment 3 and cathode compartment 5
To one or both. When the regeneration chemical is supplied to only one of the anode chamber 3 and the cathode chamber 5, the regeneration chemical supply pipe 18 is used in the case of the apparatus shown in FIG.
The opening / closing valves 20a and 20b provided on the a and 18b may be opened and closed appropriately, but a configuration in which a regenerating chemical supply pipe is connected to only the necessary side of the anode chamber and the cathode chamber may be adopted. . When the ion exchange membrane 6 is regenerated, both the three-way valve 21 and the three-way valve 24 are switched to the regenerating chemical discharge pipe 23, and the wastewater containing the chemical used for the regeneration is supplied to the anode water transfer pipe 21 and the cathode water transfer pipe 25. Is discharged without being sent to the wet processing step.

After the regeneration of the ion-exchange membrane 6 in this way, by supplying ultrapure water to which no acid or alkali is added and performing electrolysis, it is possible to obtain cathode water having a desired pH. . When the ion exchange membrane 6 is an anion exchange type, an alkali is used instead of an acid as a regenerating chemical. When the ion exchange membrane 6 is an anion exchange type and an alkali is used as a regenerating chemical, ammonium hydroxide having a concentration of about 1M is preferable as the alkali. The alkali supply time for regenerating the ion exchange membrane is
About 0.5 hour is preferable.

On the other hand, the production of electrolyzed water by the electrolyzed water production apparatus shown in FIG. 2 is substantially the same as that of the apparatus shown in FIG. 1, but ultrapure water is supplied to the intermediate chamber 26 during electrolysis. Is done. The ultrapure water supplied to the intermediate chamber 26 is discharged via the intermediate chamber water discharge pipe 27 during electrolysis. In this apparatus, in order to regenerate the ion exchange resin in the ion exchange membrane 6 and the intermediate chamber 26, a regeneration chemical is supplied to at least the intermediate chamber 26. By supplying the regeneration chemical to the intermediate chamber 26, the ion exchange resin in the intermediate chamber 26 is effectively regenerated and the ion exchange membranes 6, 6 are also regenerated. The wastewater containing the regenerating chemical supplied at the time of regeneration is discharged from the regenerating chemical discharge pipe 23 via the three-way valve 27. Also in the case of the apparatus shown in FIG. 2, when the ion exchange resin in the ion exchange membrane 6 and the intermediate chamber 26 is a cation exchange type, an acid is used as a regenerating chemical, and the ion exchange membrane 6 and the ion exchange resin are anion exchanged. In the case of a mold, an alkali is used as a regenerating chemical. In the apparatus shown in FIG. 2, when the regenerating chemical is not supplied to the anode chamber 3 and the cathode chamber 5, the on-off valves 20a and 20b may be closed, but the regenerating chemical supply pipe 18a on the anode chamber side and the cathode chamber A configuration in which only the regeneration chemical supply pipe 18c on the intermediate chamber 26 side is provided without providing the regeneration chemical supply pipe 18b on the side. Ion exchange membrane 6
And alkali used for regenerating the ion exchange resin in the intermediate chamber 26 are higher in concentration than the acid and alkali used for pH adjustment of the ultrapure water. Transfer pipe 21 and cathode water transfer pipe 2
As shown in FIG. 5, the anode water transfer pipe 22 and the cathode water transfer pipe 2
It is preferable to provide a regeneration chemical discharge pipe 23 branched to 5, and to discharge wastewater containing a chemical used for regeneration from the regeneration chemical discharge pipe 23.

In the apparatus shown in FIGS. 1 and 2, the case where the regenerating chemical tank 17 is provided separately from the acid tank 9 and the alkaline tank 10 is shown. When the membrane 6 or the ion exchange resin is a cation exchange type, an acid is supplied. When the ion exchange membrane 6 or the ion exchange resin is an anion exchange type, an alkali is supplied. The acid tank 9 can be shared with the acid tank 9 when the acid is used, and the alkali tank 10 when the regenerating chemical is the alkali. When one of the acid tank 9 and the alkaline tank 10 is shared with the chemical tank 17 for regeneration, the apparatus is simplified. On the other hand, if the acid tank 9, the alkaline tank 10, and the regenerating chemical tank 17 are separately provided as described above, the concentration of the regenerating chemical may be higher than the acid concentration of the acid tank 9 or the alkali concentration of the alkaline tank 10. As a result, the ion exchange resin and the ion exchange membrane 6 can be efficiently regenerated. When the concentration of the acid or alkali used for adjusting the pH is significantly different from the concentration of the acid or alkali used for regenerating the ion exchange membrane or the ion exchange resin, the regenerating chemical tank 17 is replaced with the acid tank 9 or the alkali tank. It is preferable to provide it separately from 10 because the adjustment of pH and the regeneration treatment of the ion exchange membrane 6 and the ion exchange resin become easy.

When the regenerating chemical in the regenerating chemical tank 17 is an acid (when the ion exchange membrane 6 or the ion exchange resin is a cation exchange type), the regenerating chemical tank 17 and the acid tank 9 may be shared. When the regenerating chemical in the regenerating chemical tank 17 is alkali (when the ion exchange membrane 6 or the ion exchange resin is an anion exchange type), the regenerating chemical tank 17 is used.
And the alkaline tank 10 can be shared. As one example of this, in FIG. 3, when the ion exchange membrane 6 of the electrolytic water production apparatus having a two-tank structure is of a cation exchange type, the acid tank 29 in which the regenerating chemical tank 17 and the acid tank 9 are integrated into one is used.
FIG. 4 shows an example in which the regenerating chemical tank 17 and the alkaline tank 10 are combined into one when the ion exchange membrane 6 and the ion exchange resin of the electrolytic water production apparatus having a three-tank structure are of an anion exchange type. An example in the case of providing an alkaline tank 30 is shown.

In the apparatus shown in FIG. 3, the concentration of the acid in the acid tank 29 is preferably about 1M to 5M. In order to produce electrolyzed water using this apparatus, first, the on-off valve 16 and the on-off valve 20a are opened and the on-off valve 20b is closed, and the acid supplied from the acid tank 29 is added to the anode chamber side. Ultrapure water is supplied, and alkaline ultrapure water to which alkali supplied from the alkaline tank 10 is added is supplied to the cathode chamber side for electrolysis. The ratio of the acid added from the acid tank 29 to the ultrapure water supplied to the anode chamber side during electrolysis is:
About 1/100 of the supply amount of ultrapure water is preferable. Then, when performing electrolysis of neutral ultrapure water without adding acid or alkali,
First, the on-off valve 16 is closed, and the on-off valves 20a, 20
b is opened, and an acid is supplied from at least one of the anode chamber 3 and the cathode chamber 5 from the acid tank 29 to regenerate the ion exchange membrane 6. After regenerating the ion exchange membrane 6 in this manner, the on-off valves 16, 20a, 20b
Is closed, and ultrapure water containing no acid or alkali is supplied to the anode chamber 3 and the cathode chamber 5 to perform electrolysis, whereby anode water and cathode water having desired pH can be obtained.

On the other hand, in the apparatus shown in FIG. 4, the alkali concentration in the alkali tank 30 is 100 mM to 1M.
The degree is preferred. In order to produce electrolyzed water using this apparatus, first, the on-off valve 14 and the on-off valve 20b are opened, and the on-off valves 20a and 20c are closed. Pure water is supplied, and alkaline ultrapure water to which alkali supplied from the alkaline tank 30 is added is supplied to the cathode chamber side to perform electrolysis.
The ratio of the alkali added from the alkali tank 30 to the ultrapure water supplied to the cathode chamber side during the electrolysis is preferably about 1/100 of the supply amount of the ultrapure water. Next, when electrolysis is performed by supplying neutral ultrapure water to which no acid or alkali is added, first, the on-off valve 14 is closed, and the on-off valves 20a and 20b are opened as necessary together with the on-off valve 20c.
Is supplied from the alkaline tank 30 to the intermediate chamber 2
The ion exchange membranes 6 and 6 are regenerated together with the ion exchange resin in 6. After regeneration of the ion exchange resin and the ion exchange membranes 6 in the intermediate chamber 26 in this manner, the on-off valve 1
4, 20a, 20b and 20c are closed, and electrolysis of ultrapure water containing no acid or alkali can obtain anode water and cathode water of desired pH.

In the apparatus for producing electrolyzed water of the present invention, acid supply means for adjusting the pH of raw water supplied to the anode chamber 3 to acidic, and the pH of raw water supplied to the cathode chamber 5
It is not always necessary to have both of the alkali supply means for adjusting the alkalinity, and it may have only one of them. That is, when the ion exchange membrane 6 and the ion exchange resin are of the cation exchange type, those without the acid tank 9 and the supply pipe 11 may be used, and the ion exchange membrane 6 and the ion exchange resin may be of the anion exchange type. In this case, it is not necessary to have the alkali tank 10 or the supply pipe 12 thereof.

FIG. 5 shows an electrolyzed water producing apparatus having an electrolytic cell 1 having a three-cell structure, in which the ion exchange resin in the ion exchange membrane 6 and the intermediate chamber 26 is of a cation exchange type, and is supplied to the anode chamber 3 side. A case is shown in which there is no acid supply means for adjusting the pH of raw water to be acidic, but an alkali supply means for adjusting the pH of raw water supplied to the cathode chamber 5 side to alkaline. The ion exchange membrane 6 and the ion exchange resin are of a cation exchange type and have an alkali supply means for adjusting the pH of the raw water supplied to the cathode chamber 5 side to alkaline. When producing electrolyzed water using a device that does not have an acid supply means for adjusting the acidity of the solution, first, neutral raw water is supplied to the anode chamber 3 side, and alkaline raw water is supplied to the cathode chamber 5 side. After the electrolysis, a method of supplying an acid as a regenerating chemical to regenerate the ion exchange membrane 6 and the ion exchange resin, and then supplying neutral raw water to both the anode chamber 3 and the cathode chamber 5 for electrolysis is adopted. Is done.

On the other hand, the ion exchange membrane 6 and the ion exchange resin are of an anion exchange type and have acid supply means for adjusting the pH of the raw water supplied to the anode chamber 3 to acidic.
When producing electrolyzed water using a device having no alkali supply means for adjusting the pH of the raw water supplied to the cathode chamber 5 to alkaline, first, the acidic raw water is supplied to the anode chamber 3 side and the cathode chamber 5 is supplied. After supplying neutral raw water to the side to perform electrolysis, an alkali as a regenerating chemical is supplied to regenerate the ion exchange membrane 6 and the ion exchange resin, and then the neutral raw water is supplied to both the anode chamber 3 and the cathode chamber 5. And a method of performing electrolysis by supplying the same.

Next, the present invention will be described in more detail with reference to specific examples. Example 1 An apparatus shown in FIG. 1 having an electrolytic cell 1 provided with a cation exchange type ion exchange membrane 6 was provided on the anode chamber 3 side with acidic ultrapure water (pH
= 1.14), and alkaline ultrapure water (pH = 10.8) to which ammonium hydroxide is added, which is supplied from the alkaline tank 10, is supplied to the cathode chamber 5 side, and the flow rate of water is 100 L / hr. Electrolysis was performed continuously at 10 A for 2 hours. Due to this electrolysis, pH = 1.0 from the anode chamber side.
5. Anode water having an oxidation-reduction potential of 1310 mV vs NHE was obtained, and cathode water having a pH of 11.2 and an oxidation-reduction potential of -401 mV vs NHE was obtained from the cathode chamber side. Next, hydrochloric acid (1M) in the regenerating chemical tank 17 is supplied to the cathode chamber side for 0.5 hour to regenerate the ion exchange membrane 6, and then both the anode chamber 3 and the cathode chamber 5 are neutral ultrapure water. Was supplied to perform electrolysis. At this time, from the anode chamber side, pH = 6.54, oxidation-reduction potential 420 mV vs.
NHE anode water is obtained, and pH is
= 7.22, cathode water with redox potential -200 mV vs NHE.

Comparative Example 1 The same procedure as in Example 1 was carried out except that electrolysis of acidic ultrapure water and alkaline ultrapure water was performed immediately after neutralization of neutral ultrapure water without regenerating the ion exchange membrane. The operation was performed. Anode water obtained from the anode chamber side by electrolysis of neutral ultrapure water has a pH of 6.37 and an oxidation-reduction potential of 419 mV vs. NHE, and cathode water obtained from the cathode chamber has a pH =
9.09, oxidation-reduction potential -253 mV vs NHE.

Example 2 An electrolytic water producing apparatus shown in FIG. 2 having an electrolytic cell 1 having an intermediate chamber 26 filled with a cation exchange resin between a pair of cation exchange type ion exchange membranes 6 was used to produce a solution on the anode chamber 3 side. Is supplied with acidic ultrapure water (pH = 1.25) to which hydrochloric acid added from the acid tank 9 is added, and the alkaline ultrapure water with ammonium hydroxide added from the alkaline tank 10 is supplied to the cathode chamber 5 side. Water (pH = 9.40) was supplied, and electrolysis was continuously performed at a flow rate of 100 L / hr and 10 A for 2 hours. By this electrolysis, p from the anode chamber 3 side
H = 1.20, anode water having an oxidation-reduction potential of 1320 mV vs. NHE was obtained, and pH = 9 from the cathode chamber 5 side.
94, cathode water of oxidation-reduction potential -451 mV vs NHE was obtained. Next, hydrochloric acid (1M) in the regenerating chemical tank 17 is supplied to the intermediate chamber 26 for 0.5 hour to regenerate the ion exchange membrane 6 and the cation exchange resin in the intermediate chamber 26. When electrolysis was performed by supplying neutral ultrapure water to both the chambers 5, p from the anode chamber side
H = 6.81, anodic water having an oxidation-reduction potential of 384 mV vs. NHE was obtained, and pH = 7.0 was obtained from the cathode chamber side.
1. Cathode water having an oxidation-reduction potential of -206 mV vs NHE was obtained.

COMPARATIVE EXAMPLE 2 Example 2 was repeated except that the electrolysis of the acidic ultrapure water and the alkaline ultrapure water was performed without regenerating the ion exchange membrane and the ion exchange resin, and then the electrolysis of the neutral ultrapure water was immediately performed. The same operation as in Example 2 was performed. Anode water obtained from the anode chamber side by electrolysis of neutral ultrapure water has a pH of 5.88 and an oxidation-reduction potential of 49.
8 mV vs. NHE, and the cathode water obtained from the cathode chamber side was pH = 8.92, and the oxidation-reduction potential was −345 mV.
vs NHE.

[0041]

The apparatus for producing electrolyzed water of the present invention is provided with a regenerating chemical supply means for supplying a regenerating chemical for regenerating an ion exchange membrane or an ion exchange resin in the electrolytic cell to the electrolytic cell. After the electrolysis of acidic raw water or alkaline raw water, the regeneration chemical is supplied into the electrolytic cell, so that the ion exchange membrane and ion exchange resin can be easily regenerated. Thus, even when the electrolysis of neutral raw water is performed following electrolysis of acidic raw water or alkaline raw water, electrolyzed water of a desired property can be obtained smoothly.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing an example of an electrolyzed water production apparatus of the present invention including an electrolytic cell having a two-cell structure.

FIG. 2 is a configuration diagram showing an example of an electrolyzed water production apparatus of the present invention including an electrolytic cell having a three-cell structure.

FIG. 3 is a configuration diagram showing a different example of an electrolyzed water producing apparatus including an electrolytic cell having a two-cell structure.

FIG. 4 is a configuration diagram showing a different example of an electrolyzed water producing apparatus including an electrolytic cell having a three-cell structure.

FIG. 5 is a configuration diagram showing still another example of an electrolyzed water producing apparatus including an electrolytic cell having a three-cell structure.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Electrolyzer 2 Anode electrode 3 Anode chamber 4 Cathode electrode 5 Cathode chamber 6 Ion exchange membrane 8 Ultrapure water production apparatus 9 Acid tank 10 Alkaline tank 17 Regeneration chemical tank 22 Anode water transfer pipe 23 Regeneration chemical discharge pipe 25 Cathode water Transfer piping 26 Intermediate chamber 27 Intermediate chamber water discharge pipe 29 Acid tank 30 Alkaline tank 31 Acid tank

Claims (16)

[Claims] An electrolytic cell having an anode chamber having an anode electrode, a cathode chamber having a cathode electrode, and a cation exchange ion exchange membrane provided between the two chambers; A raw water supply means for supplying raw water to each, an alkali supply means for adjusting the pH of the raw water supplied to the cathode chamber to alkaline, an anode water transfer pipe for discharging anode water obtained in the anode chamber from the anode chamber, And a cathode water transfer pipe for discharging cathode water obtained in the cathode chamber from the cathode chamber, and a regenerating chemical supply unit for supplying an acid for regenerating the ion exchange membrane. apparatus. 2. The apparatus for producing electrolyzed water according to claim 1, further comprising acid supply means for adjusting the pH of the raw water supplied to the anode chamber side to acidic. 3. An electrolytic cell having an anode chamber provided with an anode electrode, a cathode chamber provided with a cathode electrode, and an anion-exchangeable ion exchange membrane provided between the two chambers. A raw water supply means for supplying raw water to each, an acid supply means for adjusting the pH of raw water supplied to the anode chamber to acidic, an anode water transfer pipe for discharging anode water obtained in the anode chamber from the anode chamber, Characterized by comprising a cathode water transfer pipe for discharging cathode water obtained in the cathode chamber from the cathode chamber, and a regenerating chemical supply means for supplying alkali for regenerating the ion exchange membrane. apparatus. 4. The apparatus for producing electrolyzed water according to claim 3, further comprising an alkali supply means for adjusting the pH of the raw water supplied to the cathode chamber side to alkaline. 5. A regenerating chemical discharge pipe for discharging a regenerating chemical used for regenerating an ion exchange membrane from an anode chamber and a cathode chamber is provided separately from the anode water transfer pipe and the cathode water transfer pipe, respectively. Item 5. The apparatus for producing electrolyzed water according to any one of Items 1 to 4. 6. An anode chamber having an anode electrode, a cathode chamber having a cathode electrode, and a pair of cation exchange ion exchange membranes provided between the anode chamber and the cathode chamber. , An electrolytic cell having an intermediate chamber filled with a cation-exchangeable ion exchange resin, raw water supply means for supplying raw water to each of the anode chamber, the cathode chamber, and the intermediate chamber, and raw water supplied to the cathode chamber side PH
Alkaline supply means for adjusting the alkalinity, an anode water transfer pipe for discharging the anode water obtained in the anode chamber from the anode chamber, a cathode water transfer pipe for discharging the cathode water obtained in the cathode chamber from the cathode chamber, It is characterized by comprising an intermediate chamber water discharge pipe for draining raw water supplied to the intermediate chamber from the intermediate chamber, and a regeneration chemical supply means for supplying an acid for regenerating the ion exchange resin and the ion exchange membrane. Electrolyzed water production equipment. 7. The apparatus for producing electrolyzed water according to claim 6, further comprising acid supply means for adjusting the pH of the raw water supplied to the anode chamber side to acidic. 8. An anode chamber having an anode electrode, a cathode chamber having a cathode electrode, and a pair of anion exchange ion exchange membranes provided between the anode chamber and the cathode chamber. , An electrolytic cell having an intermediate chamber filled with an anion exchangeable ion exchange resin, raw water supply means for supplying raw water to each of the anode chamber, the cathode chamber, and the intermediate chamber, and raw water supplied to the anode chamber side PH
Acid supply means for adjusting the acidity, an anode water transfer pipe for discharging anode water obtained in the anode chamber from the anode chamber, a cathode water transfer pipe for discharging cathode water obtained in the cathode chamber from the cathode chamber, An intermediate chamber water discharge pipe for draining raw water supplied to the intermediate chamber from the intermediate chamber,
An electrolyzed water producing apparatus comprising: an ion exchange resin; and a regenerating chemical supply unit for supplying an alkali for regenerating an ion exchange membrane. 9. The apparatus for producing electrolyzed water according to claim 8, further comprising an alkali supply means for adjusting the pH of the raw water supplied to the cathode chamber side to alkaline. 10. A regenerating chemical discharge pipe for discharging a regenerating chemical used for regenerating an ion exchange resin and an ion exchange membrane from an anode chamber, a cathode chamber, and an intermediate chamber includes an anode water drain pipe, a cathode water discharge pipe, and an intermediate pipe. The electrolyzed water production apparatus according to any one of claims 6 to 9, wherein the apparatus is provided separately from the room water discharge pipe. 11. The electrolyzed water producing apparatus according to claim 2, wherein the regeneration chemical supply means is provided in common with an acid supply means for adjusting the pH of the raw water supplied to the anode chamber side to acidic. . 12. The regeneration chemical supply means is provided in common with the alkali supply means for adjusting the pH of raw water supplied to the cathode chamber to alkaline.
The electrolyzed water production apparatus according to the above. 13. The alkaline raw water to which an alkali is added is supplied to the cathode chamber side of the electrolyzed water producing apparatus according to claim 1 or 2, and the alkaline raw water to which the alkali is added is supplied to the cathode chamber side, and the anode chamber is supplied. After performing the electrolysis by supplying the acidic raw water to which the acid is added on the side, the acid is supplied from at least one of the anode chamber and the cathode chamber from the regenerating chemical supply means to regenerate the ion exchange membrane, and then at least to the cathode chamber. A method for producing electrolyzed water, comprising supplying neutral raw water to perform electrolysis. 14. An acidic raw water to which an acid is added is supplied to the anode chamber side of the apparatus for producing electrolyzed water according to claim 3 or 4,
Alternatively, an acidic raw water to which an acid is added is supplied to the anode chamber side, and an alkaline raw water to which an alkali is added is supplied to the cathode chamber side to perform electrolysis, and then a regenerating chemical supply means is supplied to at least one of the anode chamber and the cathode chamber. A method for producing electrolyzed water, comprising supplying an alkali from the reactor to regenerate the ion exchange membrane, and then supplying at least neutral raw water to the anode chamber to perform electrolysis. 15. An alkaline raw water to which an alkali is added is supplied to the cathode chamber side of the electrolyzed water producing apparatus according to claim 6 or 7, and an alkaline raw water to which an alkali is added is supplied to the cathode chamber side, and the anode chamber is supplied. After supplying the acid raw water to which the acid is added to the side and performing electrolysis, the acid is supplied from the regenerating chemical supply means to at least the intermediate chamber of the anode chamber, the cathode chamber, and the intermediate chamber to supply the ion exchange membrane and the ion exchange resin. And then supplying neutral raw water to at least the cathode chamber to perform electrolysis. 16. The electrolysis is performed by supplying acidic raw water to which an acid has been added to the anode chamber side of the electrolyzed water producing apparatus according to claim 8 or 9 and supplying alkaline raw water to which an alkali has been added to the cathode chamber side. Thereafter, at least the intermediate chamber of the anode chamber, the cathode chamber, and the intermediate chamber is supplied with alkali from a regenerating chemical supply means to regenerate the ion exchange membrane and the ion exchange resin, and then neutral raw water is supplied to at least the anode chamber. A method for producing electrolyzed water, wherein electrolysis is performed.