JPH10227655A - Sensor and method for correcting it - Google Patents

Abstract

PROBLEM TO BE SOLVED: To extend the life of a sensor and to improve a measurement accuracy by automatically correcting a sensitivity and a baseline constantly using the detection value of a detection element without any change in, for example, the sensitivity. SOLUTION: A detection value calculation means 42 performs the operation processing of the output voltage of detection elements 3-1 and 3-5 and calculates a detection concentration value. An average value operation means 43 calculates an average value mX of the detection concentration value of each detection element, an average value mX' of the detection concentration value of a detection element excluding the detection element that deviates from the average value, and an average value Xs of the detection concentration value after correction. A comparison means 44 compares the detection concentration value of each detection element with the average value mX, performs judgment, and outputs the data and the difference data of the detection element exceeding a specific range to a correction means 45, and at the same time reports to the average value operation means 43. The correction means 45 outputs a correction output for performing a specific correction to detection element output where a difference exceeds a specific range to a detection value calculation means 42. A display means 5 displays the average value of the detection concentration that is calculated from the output of all detection elements after correction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor having a plurality of detecting elements for detecting gas concentration and the like, and a method of correcting the sensor, and more particularly to extending the life of a sensor having a plurality of detecting elements.

[0002]

2. Description of the Related Art Generally, a gas concentration detecting sensor using a gas concentration detecting element has an output characteristic as shown in FIG. That is, FIG. 9 shows the gas concentration X on the horizontal axis and the output Y of the gas concentration detecting element on the vertical axis. The gas concentration detection element is
An output voltage Y (V) proportional to the gas concentration X (ppm) shown by the solid line in FIG. Y = aX + b (1) The coefficient a indicates the sensitivity of the detection element, and the constant b indicates the baseline of the detection element. When the coefficient a or the constant b in the above equation changes, the output characteristic of the detection element changes.
That is, when the sensitivity a of the detection element decreases, the change in the output with respect to the change in the density decreases as indicated by the broken line. This means that the measured gas concentration is indicated by a value lower than the actual gas concentration.

[0003] The decrease in the sensitivity a of the detection element is considered to be caused, for example, by the deterioration of the sensitive film or the formation of a thin film that impedes the passage of gas by impurities in the measurement gas adhering to the surface of the detection element. When the constant b changes, the output characteristic curve moves up and down in parallel as indicated by the dashed line. This change also results in outputting a measured gas concentration different from the actual gas concentration. The change in the constant b, that is, the drift of the baseline is considered to be a change with time of the characteristic inherent to the detection element.

If the output characteristics of the detecting element change over time, a normal output cannot be obtained as a sensor.
When the sensor output deviates from the normal range, the service life of the sensor is over. As described above, when an attempt is made to extend the life of a sensor whose output characteristics change over time, a change in the output characteristics of the detection element is detected from outside using a standard gas or a sample gas, and the desired output characteristics are obtained. Calibration is done to obtain. Further, the surface of the sensor is washed with an aqueous solution to recover the deteriorated sensitivity.

That is, in order to perform high-precision measurement using such a sensor over a long period of time, it is necessary to periodically calibrate the baseline and sensitivity from the outside, and it takes time and effort to maintain performance. Problem. Further, in order to calibrate from outside, a standard gas and a sample gas are required. Furthermore, in order to clean the surface of the sensor, a foreign substance such as an aqueous solution must be put into the space to be measured, and cannot be used for a continuously operating target. In order to extend the life of the sensor without such troublesome external calibration, it is necessary to increase the size of the detection element to reduce the influence of contamination on the sensor surface, or use a high-precision expensive detection element material. However, there is a problem that the cost increases.

In a sensor using a single detection element, the atmosphere to be measured is not always uniform, and there is a fear that an error may occur depending on the measurement location. In order to reduce such an error, it is conceivable to configure a sensor using a plurality of detection elements and use the average value of the outputs of the detection elements as the sensor output. As described above, in a sensor in which a gas concentration detection sensor is configured by combining a plurality of detection elements such as a gas concentration detection element, and the output of each detection element is calculated to obtain a sensor output, the plurality of detection elements are the same. In this case, an accurate output can be obtained by correcting an output error based on unevenness of the measurement atmosphere or variation in output characteristics of each detection element. The concept of the configuration of a sensor in which a plurality of detection elements are combined will be described with reference to FIG. The sensor 1 in which a plurality of detection elements are combined includes, for example, five detection elements 3-1 to 3 arranged on the array 2.
-5, and a calculating means 9 for calculating the output of each detection element and outputting it as a sensor output.

However, even in such a sensor using a plurality of detection elements, in order to know the occurrence of an error due to a change in the sensitivity a or the baseline b of each detection element, it is necessary to set the detection elements at predetermined intervals. The output must be calibrated, and the above problem remains unsolved.

[0008]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has been made in consideration of the above problem. In a sensor configured by combining a plurality of detection elements, a baseline of the sensor is used during operation of the sensor without using a standard gas or the like. To provide a sensor that automatically corrects a change in sensitivity and sensitivity based on a detected value and keeps the sensor always in a normal state, and that enables highly accurate measurement, and to provide a correction method for the sensor. With the goal.

[0009]

A plurality of detection elements are provided,
In a sensor using the average value of the detection values calculated from the outputs of these detection elements as a measurement value, output change detection means for periodically detecting a change in the output of each detection element, and detecting the detection value from the output of each detection element. A detection value calculation means for calculating; an average value calculation means for calculating an average value of the detection values calculated from outputs of the plurality of detection elements; and an average value detection value calculated from the outputs of the plurality of detection elements and a sensor. Comparing means for comparing the detection value calculated from the output of each detection element, and correction means for correcting the detection value calculated from the output of the detection element when the difference obtained by the comparison exceeds a predetermined range, Display means for displaying an average value of the detection values calculated from the corrected outputs of the plurality of detection elements.

[0010] By constructing the sensor as described above, the output of the detection element which has changed using the detection value calculated from the output of the detection element in which the baseline and the sensitivity have not changed among the plurality of detection elements. Characteristics can be corrected. That is, a detection element that originally deviates from the usable range due to a change in sensitivity a or baseline b with time can be kept in a normal state at all times, and periodic correction from the outside is necessary. It is possible to extend the life of the sensor without having to do so.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The structure of a sensor according to the present invention will be described below with reference to FIG. The sensor 1 includes a plurality of detection elements 3-1 to 3-5 provided on the array 2 and an automatic correction circuit 4
And display means 5. Detection element 3-1 to 3
Reference numeral -5 denotes, for example, a gas concentration detecting element, which can be formed on a substrate by using a semiconductor manufacturing technique.

The automatic correction circuit 4 includes an output change detecting means 41 for periodically detecting a change in the output of each detecting element, and a detecting value calculating means 42 for calculating a detected value from the output of each detecting element.
And average value calculating means 43 for calculating an average value of the detected density values obtained from the outputs of the respective detecting elements, and comparing means 44 for comparing the average value with the detected density values obtained from the outputs of the respective detecting elements. Correction means 45 for correcting the detected density obtained from the output of the detection element when the value is equal to or more than a predetermined value; and determining the number of the detection elements whose output has changed when the output of the detection element has changed. And a control unit 47 for controlling each of the above means.

The output change detecting means 41 has a storage means and a comparing means. The outputs of the respective detecting elements are individually inputted, and the outputs of the respective detecting elements are periodically monitored. The output of the detection element is compared with the current detection element output to determine whether or not the output has changed.

The detection value calculation means 42 is provided for each of the detection elements 3-1.
Calculation processing is performed on the output voltages Yn to 3-5, and the detected density values (Xn = (Yn−bn) / a)
n) is calculated.

The average value calculating means 43 receives the detected density value Xn obtained from the output of each detecting element and inputs the corrected detected density value Xn 'obtained from the output of the detecting element to the comparison result of the comparing means. Is entered. The average value calculating means 43 calculates an average value mX of the detected density values Xn obtained from the outputs of the respective detection elements,
Average value mX 'of the detected density value obtained from the output of the detection element obtained by excluding the detection element deviating from the average value based on the comparison result
And an average value Xs of the detected density values using the corrected detected density value Xn '.

The comparing means 44 compares the detected density value Xn obtained from the output of each detecting element with the average value mX from the average value calculating means, and judges whether or not the difference is within a predetermined range.
The data relating to the detection elements whose difference exceeds a predetermined range and the difference data are output to the correction means 45, and the data relating to the detection elements whose difference exceeds the predetermined range are notified to the average value calculation means 43.

The correcting means 45 receives the detected density value Xn obtained from the output of each detecting element, the difference data from the comparing means 44, and the data relating to the detecting element whose difference exceeds a predetermined range, and inputs from the judging means 46. Is input. The correction unit 45 outputs a correction output for performing a predetermined correction to the detection element output having a difference exceeding a predetermined range to the detection value calculation unit 42.

The judging means 46 judges whether the number of detecting elements whose output detected by the output change detecting means 41 has changed is large or small, and outputs the result to the correcting means 45.

The display means 5 displays the average value mXs of the detected density calculated using the average value of the detected values calculated from the outputs of all the detection elements after correction.

Hereinafter, a method of correcting a detection element will be described by taking a sensor using five detection elements as an example. FIG.
Shows a correction procedure when there is a change in either the sensitivity of the detection element or the baseline. When the periodic measurement is started, the output change detecting means 41 takes in the output Yn of each detecting element and determines whether or not the output has changed (S1). The presence or absence of a change in the detection output is determined by comparing the previous measurement value of each detection element with the current measurement value. When there is a change in the output of the detecting element,
It is determined whether the number of detection elements whose output has changed is large or small (S2). That is, as shown in FIG. 3, when the number of detection elements whose outputs have changed at the measurement points is small, it is determined that the output change is based on the constant b of the detection elements, that is, the change of the baseline. Also, as shown in FIG.
When the number of detection elements whose outputs have changed at the measurement point is large, it is determined that the detection elements have changed their outputs due to changes in the detection target, that is, changes in the gas concentration.

When the number of detection elements whose output has changed is large, it is determined that the sensitivity a needs to be corrected, assuming that a change has occurred in the detection target. First, the detection value calculation means 42
Calculates the respective detected densities Xn using the outputs Yn of the respective detecting elements (S3). The average value calculating means 43 calculates an average value mX of the detected densities Xn of all the detection elements (S
4).

Next, the comparison means 44 sequentially compares the obtained density average value mX with the detected density Xn of each element (S
5) The difference is within a predetermined range, for example, ± 3 of the average value mX.
It is determined for each detection element whether it is within 0% (S
6). When the difference between the detection elements is within the predetermined range (No), there is no change in the sensitivity a in any of the detection elements, and thus the obtained average density value mX is determined as the detection density Xs (S7). ), The density is displayed as an output of the sensor 1 to the display means 5 (S8).

On the other hand, as a result of the determination in step S6, when the difference between any one of the detection elements is out of the predetermined range (Y
es), the average value calculating means 43 excludes the output of the detecting element (outlier detecting element), and detects the average value mX ′ of the detected density.
Is calculated (S9). The obtained density average value mX 'is determined as the detected density Xs (S10). Next, the correcting means 45 determines the sensitivity an ′ before correction and the density average value m used before.
Using the X ′ and the detected concentration Xn, the corrected sensitivity an of the deviation detecting element is applied to the following equation (2), sent to the detection value calculating means 42, and the sensitivity an of the deviation detecting element is corrected.

[0024]

(Equation 1)

The average value calculating means 43 outputs the detected density Xs obtained in step S10 to the display means 5 as an output of the sensor 1, and displays the density (S8). With the above processing, the change in the sensitivity a of the detection element when the output of many detection elements changes can be corrected in the normal density detection processing.

If it is determined in step S2 that the number of detecting elements whose output has changed is small, it is determined that no change has occurred in the detection target and that the output of only a specific detecting element has changed, and that the constant It is determined that the change of b, that is, the base drift has occurred, and the following drift correction processing is executed. First, each detected density value Xn is calculated from the output Yn of each detecting element (S12). Next, an average value mX 'of the detected density values of the remaining detection elements excluding the drifted detection element is calculated (S13). The average value mX 'of the calculated detection densities of the remaining detection elements is determined as the detection density Xs (S7), and the obtained detection density Xs is output to the display means 5 as the output of the sensor 1 to display the density (S8). ).

On the other hand, the obtained density average value mX 'is compared with the detected density Xn of each detecting element (S14), and whether or not the difference is within a predetermined range, for example, within ± 30% of the average value mX. Is determined for each detection element (S15). If the difference is not within the predetermined range (Yes), the constant b of the output change detecting element is obtained by adding the difference Δb to the previous constant b ′, and the output change detecting element is corrected (S16). , End the measurement. Here, the difference Δb is represented by the following equation (3). Δb = ΔYn = Yn (current) −Yn (previous) (3) By the above processing, the change in the constant b of the detection element when the number of the detection elements whose output has changed is small, that is, the drift of the base line is calculated as the normal density It can be corrected during the detection process.

As described above, in the conventional detection element, the life of the sensor is determined when the drift of the sensitivity “a” or the baseline “b” deviates from the allowable range. The life of each element can be extended, and the life of the entire sensor can be dramatically extended.

By the way, even when the outputs of the detection elements change simultaneously as shown in FIG. 4, there is a possibility that the change of the baseline and the change of the sensitivity occur simultaneously. When both the sensitivity a and the baseline b change in this way, if only the sensitivity a is corrected, FIG.
As shown by the broken line a in FIG.
There is a possibility that the influence on the high-concentration region becomes extremely large as compared with the solid line A. On the other hand, if only the base line b is corrected, the correction amount of the base line b is increased as shown by the broken line b in FIG. 5, and there is a possibility that the error in the low density region becomes larger as compared with the solid line A in FIG.

[0030]

As described above, it is necessary to perform correction processing by changing the sensitivity a of the detection element and the degree of correction of the base line b in accordance with the state of the output change of the detection element. An example of such correction will be described with reference to FIG. That is,
A step of determining whether or not a change has occurred in the output of each detection element shown in FIG. 2. A step of determining a density average value mX ′ obtained from the detection density based on the output of the remaining detection elements excluding the deviation detection element as the detection density Xs. The processing up to S10 is not different from the above embodiment. In the present embodiment, when the number of detection elements whose output has changed is large, the correction processing of the detection elements whose detection density exceeds the predetermined range from the average value mX shown in step S11 is executed as follows. Are different.

In this embodiment, instead of the sensitivity correction in step S11 of FIG. 2, the correction of the sensitivity a and the baseline b of the deviation detecting element is performed by the following equations (4), (5), and (6).
This is performed using an equation.

[0032]

(Equation 2) Here, an is the sensitivity after the correction, an ′ is the sensitivity before the correction used last time, bn is the baseline after the correction, bn ′ is the baseline used before the correction used last time, Xn is the detected density of the off detection element, mX ′ represents the average value of the detected densities of the remaining detection elements excluding the off detection element, and δ and δ ′ represent coefficients, respectively. The coefficient δ indicates the degree of correction of the sensitivity a, and the coefficient δ
'Indicates the degree of correction of the baseline b.

In this calculation, the detected density is
It is determined whether the image is in the low-density area or the high-density area. If the detected density is in the low-density area, the coefficient δ ′ is increased to increase the degree of correction by the baseline b, and Reduce the effect of sensitivity correction error. On the other hand, when the detected density is in the high density area,
By increasing the coefficient δ to increase the degree of correction of the sensitivity a,
The effect of the baseline correction error in the low density region is reduced.

As described above, in this embodiment, when both the sensitivity a and the baseline b are corrected, the correction error can be optimized by adaptively changing the degree of weighting.

The change over time of the output when the correction method according to the present invention is applied to an actual sensor will be described with reference to FIGS. FIG. 6 shows a case of a hydrogen sensor using an FET. A hydrogen sensor is constituted by using eight FETs whose gate portions are exposed to a hydrogen atmosphere of 30 ppm.
The broken line plotted with a triangle indicates the case without correction, the broken line plotted with a square indicates the case where only the sensitivity a was corrected, and the broken line plotted with a circle indicates the case where both the sensitivity a and the baseline b were corrected. ing. FIG. 6 shows the hydrogen gas concentration (ppm) obtained by calculating the time (minutes) on the horizontal axis and the vertical axis, and shows the results of an acceleration test performed at a sensor temperature of 200 ° C. As is clear from the figure, when the sensitivity and the baseline are corrected, the life of the sensor is 50,000 minutes or more, and the standard deviation of the detected value is 20 pp.
m. When only the sensitivity is corrected, the life of the sensor is about 20,000 minutes, and the standard deviation of the detection value is
It was 124 ppm. Without correction, the life of the sensor was approximately 20,000 minutes and the standard deviation of the detected values was 684 ppm.

FIG. 7 shows a solid electrolyte type carbon monoxide (C
O) The case of a gas sensor is shown. Solid electrolyte type CO
A CO gas sensor is configured using eight detection elements.
Measurement gas atmosphere is 1000ppm, 2000ppm, 3
000 ppm, and the broken line plotted with triangles shows the case without correction, and the broken line plotted with circles shows the case where only the sensitivity a was corrected. FIG. 7 shows time (te) on the horizontal axis.
rm) on the vertical axis represents the CO gas concentration (ppm) obtained by turning on the heater for 40 seconds and turning off the heater for 40 seconds.
Repeat the cycle to change to F for 1000 cycles, 1te
rm (8000 seconds) is a result of a durability test. As is clear from the figure, when the sensitivity is corrected,
The standard deviation of the detected value was 328 ppm. Without correction, the standard deviation of the detected values was 600 ppm. Regardless of the concentration, the detection error tends to increase when no composition is formed from about 10 term.

In the above embodiment, it is assumed that even if the outputs of the detection elements change at the same time, there is a possibility that a change in the baseline and a change in the sensitivity may occur simultaneously. Even when the number of detection elements in which has changed is small, there is a possibility that a change in the baseline and a change in sensitivity occur simultaneously. Hereinafter, an example in which both the sensitivity a and the baseline b are corrected even when the number of detection elements whose outputs have changed is small will be described with reference to FIG.

First, the output change detecting means 42 monitors the occurrence of a change in the output of each detection element by comparing the previous detection result with the current detection result (S20). When there is a change in the detection results, the respective detection densities Xn are calculated from the outputs Yn of the respective detection elements (S21). Next, the average value mX of the detected densities Xn of all the detecting elements is calculated (S22).
The average value mX is compared with the detected concentration Xn of each detection element (S23), and it is determined whether or not the difference is within a predetermined width (for example, 30%) (S24). Steps S23 and S24 are executed for all the detection elements.

As a result of the determination, if there is an element whose difference exceeds a predetermined width, it is determined that a change in the sensitivity a and a change in the baseline b have occurred in the detection element, and the remaining elements other than the detection element are excluded. An average value mX 'of the detection values of the detection elements is calculated (S25). Further, coefficients δ and δ ′, which are the correction ratio of the sensitivity a and the baseline b, are determined in accordance with the detection density region of the detection element (S26). Then, (4)
After applying the coefficient δ determined in step S26 to the equation to correct the sensitivity an of the deviation detecting element (S27), (5)
By applying the coefficient δ ′ determined in step S26 to the equation, the baseline b of the deviation detecting element is corrected (S28), and the correction of the detecting element is completed.

If the result of determination in step S24 is that there is no detection element whose difference exceeds a predetermined range, the average value mX
Is determined as the detected value Xs (S29), the detected value Xs is displayed as the density on the display device 5 (S30), and the process is terminated.

In step S25, when the average value Xm 'of the detection values of the remaining detection elements excluding the deviation detection element is calculated, the average value Xm' is determined as the density (S3).
1), end the process.

As described above, in this embodiment, when correcting both the sensitivity a and the baseline b, the correction error can be optimized by adaptively changing the degree of weighting.

In the above embodiment, the shapes and characteristics of the respective detecting elements are described as being equal. However, the operating temperature of each of the detecting elements, the size of each of the detecting elements, the material of the sensitive film, and the like are changed so as to be different from the baseline. By causing a change in sensitivity at random, it is possible to refer to these conditions and to easily detect the change. This method can be applied to a sensor having such a characteristic that changes over time of each detection element occur simultaneously. In the embodiment, the sensitivity characteristic of each detection element is described as being linear. However, the present invention is not limited to this, and the invention can be applied to a detection element having a sensitivity characteristic such as a logarithmic function or an exponential function. Furthermore, although the embodiment has been described with respect to a gas concentration sensor, the present invention is not limited to this, and various concentration sensors, pressure sensors, flow rate sensors, various types of sensors having a plurality of detection elements such as a temperature sensor may be used. Naturally, it can be applied to sensors.

[0044]

As described above, according to the present invention, in a sensor composed of a plurality of detection elements, sensitivity and baseline can always be automatically corrected, and the life of the sensor can be extended. The measurement accuracy can be maintained for a long time.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a configuration of a sensor including a plurality of detection elements according to the present invention.

FIG. 2 is a flowchart showing an outline of a sensor correction method according to the present invention.

FIG. 3 is an output state diagram (part 1) for explaining a state of an output change of a detection element.

FIG. 4 is an output state diagram (part 2) for explaining a state of an output change of a detection element.

FIG. 5 is an output characteristic diagram showing a correction state of a sensor according to the second embodiment.

FIG. 6 is an output characteristic diagram (part 1) showing the results of a temporal change test by the correction method of the present invention.

FIG. 7 is an output characteristic diagram (part 2) showing the results of a temporal change test by the correction method of the present invention.

FIG. 8 is a flowchart showing an outline of a correction method of a sensor according to a second embodiment of the present invention.

FIG. 9 is an output characteristic diagram illustrating a change in the sensitivity of a sensor and a situation of a baseline drift.

FIG. 10 is a block diagram showing a configuration concept of a conventional sensor including a plurality of detection elements.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 sensor 2 array 3 detection element 4 automatic correction circuit 41 output change detection means 42 detection value calculation means 43 average value calculation means 44 comparison means 45 correction means 46 determination means 47 control means 5 display means 9 calculation means

Claims (7)

[Claims] An output change detection device comprising a plurality of detection elements, wherein an average value of detection values calculated from output values of the detection elements is used as a measurement value, and a change in the output of each detection element is periodically detected. Means, detection value calculation means for calculating a detection value from the output of each detection element, average value calculation means for calculating the average value of the detection values calculated from the outputs of the plurality of detection elements, and outputs of the plurality of detection elements Comparing means for comparing the average value of the detection values calculated from the detection values calculated from the outputs of the respective detection elements constituting the sensor, and when the difference obtained by the comparison exceeds a predetermined range, A sensor comprising: correction means for correcting an output value; and display means for displaying an average value of detection values calculated from corrected outputs of a plurality of detection elements. 2. The sensor according to claim 1, further comprising: a judging means for judging the number of the detecting elements whose output has changed when the output of the detecting element has changed. 3. A baseline correction method for a sensor having a plurality of detection elements and using an average value of detection values calculated from outputs of the detection elements as a measurement value, wherein outputs of the plurality of detection elements are monitored, and When the output of only a small number of the detection elements changes, it is determined that the baseline of the detection element has changed, and the baseline is corrected so as to cancel the change. Baseline correction method. 4. A method for correcting sensitivity of a sensor having a plurality of detection elements and using an average value of detection values calculated from outputs of the detection elements as a measurement value, wherein outputs of the plurality of detection elements are monitored, and When the outputs of a large number of detection elements among the detection elements change, it is determined that the sensitivities of a small number of detection elements having different detection value changes calculated from the output have changed, and the difference in the detection value change amount is canceled. And correcting the sensitivity of the sensor as described above. 5. A method for correcting the output of a detection element of a sensor comprising a plurality of detection elements and using an average value of detection values calculated from outputs of the detection elements as a measurement value, wherein outputs of the plurality of detection elements are monitored, When there is a change in the output of only a small number of the detection elements among the plurality of detection elements, the baseline is corrected so as to cancel the change in the detection elements, and the outputs of a large number of the detection elements among the plurality of detection elements are changed. A sensor output correction method, wherein when a change occurs, the sensitivity is corrected so as to cancel out the difference in the amount of change in the detected value of a small number of detection elements having different amounts of change in the detected value calculated from the output. 6. A method for correcting an output of a detection element of a sensor comprising a plurality of detection elements and using an average value of detection values calculated from outputs of the detection elements as a measurement value, wherein outputs of the plurality of detection elements are monitored. When the output of at least one of the plurality of detection elements changes, the amount of change in the detection value calculated from the output is different from the average value of the detection values. A sensor output correction method, wherein the correction is performed, and the weighting ratio of the sensitivity and the baseline correction is changed according to the magnitude of the detected value. 7. A method for correcting an output of a detection element of a sensor comprising a plurality of detection elements and using an average value of detection values calculated from outputs of the detection elements as a measured value, wherein outputs of the plurality of detection elements are monitored, When there is a change in the output of only a small number of the detection elements among the plurality of detection elements, the baseline is corrected so as to cancel the change in the detection elements, and the outputs of a large number of the detection elements among the plurality of detection elements are changed. When the detection value changes, the sensitivity and the baseline of a small number of detection elements having different amounts of change in the detection value calculated from the output are weighted and corrected, and the weighting ratio of the sensitivity and the baseline correction is changed according to the magnitude of the detection value. An output correction method for a sensor, comprising: