JPH10226875A - Vacuum arc deposition device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simply detect the defect of insulation and the detect of contact between the trigger electrode and cathode of an arc type evaporating source without any manual work. SOLUTION: An abormality diagnostic device 60a is provided. This abnormality diagnostic device 60a is provided with a vacuum gauge 62 measuring the pressure P in a vacuum vessel 2, an electric current measuring instrument 68 measuring an electric current I flowing through the trigger electrode 46 of an arc type evaporating source 10, a primary comparator 66a outputting an abnormality detecting signal S in the case the electric current I measured by the electric current measuring instrument 68 is larger than zero, a secondary comparator 67a outputting an abnormality detecting signal S in the case the electric current I is zero and a control circuit 64a having a primary function for driving the trigger electrode 46 to a state in which it is not brought into contact with the cathode 12 by controlling a driving device 52 of the trigger electrode 46 under the conditions in which the pressure P measured by the vacuum gauge 62 is several Torr or above, thereafter outputting voltage from an arc power source 24 and furthermore activating the comparator 66a and having a secondary function of driving the trigger electrode 46 to a state in which it is brought into contact with the cathode 12 by controlling the driving device 52, thereafter outputting voltage from the arc power source 24 and furthermore activating the comparator 67a.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an arc evaporation source for evaporating a cathode (cathode) material by vacuum arc discharge, wherein the cathode material is evaporated on a substrate to form a thin film. More particularly, the present invention relates to a device for easily detecting a poor insulation and a poor contact between a trigger electrode and a cathode of an arc-type evaporation source without requiring human intervention.

[0002]

2. Description of the Related Art FIG. 4 shows a conventional example of this kind of vacuum arc evaporation apparatus. A holder 32 for holding the substrate 30 is provided in the vacuum container 2 that is evacuated by the evacuation device 4. The holder 32 faces the substrate 30 on the holder 32.
In this example, the arc evaporation source 10 is provided on the side wall of the vacuum vessel 2.
Is attached. Arc type evaporation source 10 of this example
As described in detail below, the vacuum arc discharge between the cathode 12 and the vacuum vessel 2 also serving as the anode melts the cathode 12 and evaporates the cathode material 14 therefrom. 16 is a flange, 20 is an insulator. A direct-current arc power supply 24 is connected between the cathode 12 and the vacuum vessel 2 with the former being the negative electrode side. The vacuum vessel 2 is normally grounded.

The substrate 30 on the holder 32 is usually supplied from a direct current bias power supply 36, for example, from tens of volts to -100 volts.
A negative bias voltage of about 0 V is applied. 34 is an insulator. Further, in order to improve the uniformity of film formation on the substrate 30, the holder 32 holding the substrate 30 may be rotated in the direction of arrow B or in the opposite direction.

A gas 8 is usually introduced into the vacuum vessel 2 from, for example, a gas inlet 6. The gas 8 is, for example, a reactive gas (eg, nitrogen gas) that reacts with the cathode material 14 when a compound thin film is formed on the surface of the substrate 30, or a metal thin film of the cathode material 14 alone on the surface of the substrate 30. When it is formed, an inert gas (for example, argon gas) which does not react with the cathode material 14 is used.

[0005] Cathode material 1 evaporated by arc discharge
4 is ionized, and the ionized cathode material 14 is attracted to and collides with the substrate 30 to which the negative bias voltage is applied, and is combined with the reactive gas when a reactive gas is introduced. Thus, a thin film having high adhesion is formed on the surface of the substrate 30. Thereby, on the surface of the substrate 30,
For example, it is possible to form a thin film of a compound such as TiN or CrN having excellent wear resistance, or a thin film of a metal such as Ti or Cr.

FIG. 5 shows a detailed example of the arc type evaporation source 10. The arc evaporation source 10 is provided with the cathode 12 described above.
And a non-magnetic metal flange 16 for supporting the same, and an arc state controlling magnet (for example, a permanent magnet) 18 attached to the back surface thereof.
The mounting plate 42 is attached to the vacuum vessel 2 via an insulator 44. Between the cathode 12 and the vacuum vessel 2, the above-described arc power supply 24 is connected via the flange 16.
Therefore, for example, a DC voltage of about several tens V is applied.

A trigger electrode 46 for arc firing is attached to the tip of a shaft 48 that penetrates the mounting plate 42 through a feedthrough 50. The trigger electrode 46 is driven by the driving device 52 in the front-rear direction of the cathode 12 as shown by the arrow A, that is, in a state of contact with the cathode 12 and a state of not contacting the same. A resistor 3 for limiting current at the time of arc ignition is provided between the shaft 48 and thus the trigger electrode 46 and the vacuum vessel 2.
8 are connected. The value of the resistor 38 is, for example, 1
Ω to about several tens Ω.

An annular shield is provided around the side of the cathode 12 in order to spread the arc, that is, to maintain an arc discharge between the cathode 12 and the vacuum vessel 2 which also serves as an anode at a certain distance from the annular shield. A plate 26 is arranged so as to surround the cathode 12, and the shield plate 26 covers the side periphery of the cathode 12. This shield plate 2
The cathode 6 is electrically insulated from the cathode 12, and a gap 25 is provided between the cathode 6 and the cathode 12. This shield plate 26 is connected to the vacuum vessel 2 via a conductive column 27 and a current limiting resistor 28. In this example, the shield plate 26 is also made of non-magnetic metal in order to avoid disturbing the magnetic field of the magnet 18. The value of the resistor 28 is, for example, about 1 Ω to several tens Ω.

When the trigger electrode 46 is moved by the driving device 52 to come into contact with the cathode 12 to which a DC voltage is applied from the arc power supply 24 and then released, a spark is generated between the trigger electrode 46 and the cathode 12. Although this triggers an arc discharge between the cathode 12 and the shield plate 26 at first, the current flowing through the shield plate 26 is limited by the resistor 28, so that the arc discharge is immediately performed for both the cathode 12 and the anode. It shifts to the discharge between the vacuum vessel 2 and spreads,
The arc discharge continues between the two, so that the cathode 1
2 is dissolved and the cathode material 14 evaporates. After the arc discharge has shifted between the cathode 12 and the vacuum vessel 2, no current flows through the trigger electrode 46.

In some cases, an anode for the arc-type evaporation source 10 is provided separately from the vacuum vessel 2. In this case, the positive electrode of the arc power source 24, the resistor 28 and the resistor 38 are connected to the anode. The vacuum vessel 2 is normally grounded (see FIG. 6).

[0011]

When the trigger electrode 46 is driven, the trigger electrode 46 is improperly fixed, so that the trigger electrode 46 does not separate from the cathode 12 with the trigger electrode 46 kept in contact with the cathode 12 from the beginning. In addition, the trigger electrode 46 cannot contact the cathode 12 despite the fact that the cathode 12 has decreased and the trigger electrode 46 has been in contact with the trigger electrode 46.
In the case of No. 2, arc discharge does not occur, and the vapor deposition may not be performed normally. This takes a long time,
When it becomes clear only when vapor deposition is started after the inside of the vacuum evacuation is started, the inside of the vacuum vessel 2 must be returned to the atmospheric pressure again to repair a defective portion of the trigger electrode 46 of the arc evaporation source 10. Instead, time loss is increased.

In order to avoid this, conventionally, an operator actually drives the trigger electrode 46 every time before evacuating the vacuum chamber 2 to bring the trigger electrode 46 into contact with the cathode 12 and the trigger electrode. An operation of separating the trigger electrode 46 from the cathode 12 was performed, and the operation state of the trigger electrode 46 at that time was visually confirmed. Such a method requires manual labor to check the operation, and thus becomes an obstacle to automatic operation of the vacuum arc evaporation apparatus. Further, it takes time to check the operation by the operator, and thus the productivity is reduced. In particular, when a plurality of arc evaporation sources 10 are provided, or when the arc evaporation sources 10 are arranged in a high place in a large vacuum vessel 2 or in a place hard to reach by an operator, etc.
Since a particularly long time is required for the operation check, the productivity is greatly reduced.

Therefore, the present invention mainly aims at easily detecting the above-mentioned poor insulation and poor contact between the trigger electrode and the cathode of the arc-type evaporation source without requiring any human intervention. Aim.

[0014]

According to one aspect of the present invention, there is provided a vacuum arc vapor deposition apparatus comprising: a vacuum gauge for measuring a pressure in the vacuum vessel; a current measuring device for measuring a current flowing through the trigger electrode; First comparing means for outputting an abnormality detection signal when the current measured by the current measuring device is larger than 0;
A second comparing means for outputting an abnormality detection signal when the current measured by the current measuring device is 0, and controlling the driving device under a condition in which the pressure measured by the vacuum gauge is several Torr or more. After the trigger electrode is driven so as not to contact the cathode, a voltage is output from the arc power source and a first function for activating the first comparison means and the driving device are controlled to set the trigger electrode to the cathode. And a control unit having a second function of outputting a voltage from the arc power supply and activating the second comparison unit after driving to a state of contact with the control unit. Claim 1).

According to the above arrangement, when the pressure in the vacuum vessel is several Torr or more,
After driving the trigger electrode so that it does not touch the cathode,
Applying a voltage from the arc power supply to the cathode, applying a voltage to the cathode from the arc power supply after driving the trigger electrode in a first step of activating the first comparing means and bringing the trigger electrode into contact with the cathode; And a second step of activating the second comparing means.

In the first step, if normal, the insulation between the trigger electrode and the cathode is maintained, but the trigger electrode is in contact with the cathode due to some abnormality, and the insulation between the two is maintained. Otherwise, some (ie, greater than 0) current will flow through the trigger electrode, which will be detected by the first comparing means activated at that time, and an abnormal detection signal will be output from the comparing means. Is done.

In the second step, if the trigger electrode is in contact with the cathode if it is normal, no current flows through the trigger electrode if the trigger electrode is not in contact with the cathode due to some abnormality. Therefore, it is detected by the second comparing means activated at that time, and the abnormality detecting signal is output from the comparing means.

In this manner, defective insulation and poor contact between the trigger electrode and the cathode of the arc-type evaporation source can be easily detected without requiring human intervention.

The above-described abnormality diagnosis is performed when the pressure in the vacuum chamber is several Torr or more.
Since vacuum arc discharge does not continue under such pressure, even if a spark is generated between the trigger electrode and the cathode at the time of abnormality diagnosis, this becomes a seed and arc discharge occurs between the cathode and the shield plate or vacuum vessel. This is because generation and persistence can be prevented.

Insufficient insulation and poor contact between the trigger electrode and the cathode may be detected based on the voltage applied to the trigger electrode instead of the current flowing through the trigger electrode.

[0021]

FIG. 1 is a sectional view showing an example of the vicinity of an arc evaporation source and an abnormality diagnosis apparatus of a vacuum arc evaporation apparatus according to the present invention. 4 and FIG. 5 are denoted by the same reference numerals as those of the conventional example, and differences from the conventional example will be mainly described below. The configuration of the entire vacuum arc evaporation apparatus is, for example, the same as that described above with reference to FIG.

In this embodiment, an abnormality diagnosis device 6 for diagnosing the abnormality by the current I flowing through the trigger electrode 46
0a is provided. The abnormality diagnosis device 60a includes a vacuum gauge 62 that measures the pressure P in the vacuum vessel 2 and a current I that is connected in series with the resistor 38 and flows through the trigger electrode 46 via the resistor 38. And a current I measured by the current measuring device 68 is compared with a predetermined reference value E ₁ (0 A in this example), and the current I is larger than the reference value E _1, that is, 0. A first comparator 66a which outputs an abnormality detection signal S, a current I measured by the current measuring device 68 and the reference value E ₁ (that is, 0).
When it is compared with the A) the current I is the reference value E ₁ or less, when specifically the current I is zero, and the second comparator 67a which outputs an abnormality detection signal S, the gauge Under the condition that the pressure P measured at 62 is equal to or more than several (1-3) Torr,
After giving a non-contact command C ₁ to the driving device 52 of the trigger electrode 46 to drive the trigger electrode 46 so as not to contact the cathode 12, a voltage output command C is sent to the arc power supply 24.
₃ gives to output the voltage from the arc power source 24 to apply a voltage to the cathode 12, to perform the comparison by activated the comparator 66a gives a comparison instruction C ₄ to the first comparator 66a First function and the driving device 52
To give contact command C ₂ after driving in a state of contact with the trigger electrode 46 to the cathode 12, giving a voltage output command C ₃ to output a voltage from the arc power source 24 to the arc power supply 24 voltage to the cathode 12 It applies a is given a comparison instruction C ₅ to the second comparator 67a and a control circuit 64a having a second function to perform the comparison by activated the comparator 67a.

When the pressure P in the vacuum vessel 2 is several Torr or more, the control circuit 64a issues the above-mentioned commands C _{1 to} C ₅ to perform the abnormality diagnosis. Since the arc discharge does not continue, even if a spark occurs between the trigger electrode 46 and the cathode 12 at the time of abnormality diagnosis,
This serves as a seed, which can prevent an arc discharge from being generated and sustained between the cathode 12 and the shield plate 26 or the vacuum vessel 2, and can prevent undesired film formation on the substrate 30. It is. Atmospheric pressure can be said to be the simplest and preferable among the pressures of several Torr or more.

According to the abnormality diagnosing device 60a, when the pressure P in the vacuum vessel 2 is equal to or higher than several Torr (for example, atmospheric pressure), the trigger is activated by the control of the control circuit 64a as shown in the flowchart of FIG. Connect electrode 46 to cathode 1
2 is driven so as not to touch the second electrode, a voltage is applied from the arc power supply 24 to the cathode 12, and the comparator 66a is activated to perform a first step (steps 81 to 8).
4) and following this first step, the trigger electrode 4
6 is driven to contact the cathode 12, a voltage is applied to the cathode 12 from the arc power supply 24 and the comparator 67 is driven.
A second step of activating a (step 8)
5 to 88). The current measurement shown in steps 83 and 87 in FIG. 3 is performed by the current measurement device 68, and the voltage measurement in parentheses is performed by the voltage measurement device 70 in the embodiment shown in FIG. It is.

In the first step, if normal, the insulation between the trigger electrode 46 and the cathode 12 is maintained. If the insulation is not maintained, the arc power supply 2
Some current (ie, greater than 0) flows from 4 to the trigger electrode 46 via the cathode 12. For example, the arc power supply 24 operates when the cathode 12
In the case where a power of 50 V and 30 A can be supplied to the trigger electrode 46, a maximum of 3
A current I of 0 A flows. The current I is measured by the current measuring device 68, and the measured current I is compared with the reference value E ₁ by the comparator 66a activated at that time.
(Here, 0A), and since I> 0, the comparator 66a outputs the abnormality detection signal S. Trigger electrode 4
When the contact between the cathode 6 and the cathode 12 is not made and the insulation between them is maintained, the current I flowing through the trigger electrode 46 is 0, and the abnormality detection signal S is not output from the comparator 66a.
In this manner, insulation failure between the trigger electrode 46 and the cathode 12 can be automatically detected.

In the second step, if the trigger electrode 46 is in contact with the cathode 12 if it is normal, but if the trigger electrode 46 is not in contact with the cathode 12 due to some abnormality, the trigger electrode 46 Does not flow. That is, I = 0, which is detected by the comparator 67a activated at that time, and the abnormality detection signal S
Is output. When the trigger electrode 46 is in contact with the cathode 12, a current I flows through the trigger electrode 46 (that is, more than 0 and at most about 30A), and the abnormality detection signal S is output from the comparator 67a. Not done. In this manner, a contact failure between the trigger electrode 46 and the cathode 12 can be automatically detected.

As described above, the abnormality diagnosis device 60
According to a, poor insulation and poor contact between the trigger electrode 46 and the cathode 12 of the arc-type evaporation source 10 can be easily detected without requiring human intervention. As a result, it is possible to cope with automatic operation of the vacuum arc evaporation apparatus. Further, even when a plurality of arc type evaporation sources 10 are provided, or when the arc type evaporation source 10 is arranged in a place where the operator cannot easily reach, for example, a high place, the operation confirmation time may be reduced. , The productivity is improved.

The control means having the same function as the control circuit 64a, the comparing means having the same function as the comparator 66a, and the comparing means having the same function as the comparator 67a may be constituted by using a computer. Good (same for the control circuit 64b, the comparator 66b, and the comparator 67b in the embodiment of FIG. 2).

In the embodiment shown in FIG. 2, the trigger electrode 4
An abnormality diagnosis device 60b for performing an abnormality diagnosis based on the voltage V applied to 6 is provided. The abnormality diagnosis device 60b is connected to the same vacuum gauge 62 as described above and the resistor 38 in parallel, and the voltage V across the resistor 38, that is, the voltage V between the trigger electrode 46 and the vacuum vessel 2 Is measured, and a voltage V measured by the voltage measuring device 70 is compared with a predetermined reference value E ₂ (here, 0 V), and the voltage V is larger than the reference value E _2, that is, 0. A first comparator 66b for outputting an abnormality detection signal S to the voltage measuring device 7
The voltage V measured at 0 is compared with the reference value E ₂ (that is, 0 V), and when the voltage V is equal to or less than the reference value E ₂ , specifically, when the voltage V is 0, the abnormality detection signal is output. A second comparator 67b that outputs S and a control circuit 64b having the same function as the control circuit 64a are provided.

According to the abnormality diagnosing device 60b, when the pressure P in the vacuum vessel 2 is equal to or more than several Torr (for example, atmospheric pressure), the trigger is activated by the control of the control circuit 64b, as shown in the flowchart of FIG. Connect electrode 46 to cathode 1
2 is driven so as not to touch the second electrode 2 and then a voltage is applied from the arc power supply 24 to the cathode 12 and the comparator 66b is activated to perform the first step (steps 81 to 8).
4) and following this first step, the trigger electrode 4
6 is driven to contact the cathode 12, a voltage is applied to the cathode 12 from the arc power supply 24 and the comparator 67 is driven.
a second step (step 8
5 to 88).

In the first step, if normal, the insulation between the trigger electrode 46 and the cathode 12 is maintained, but the trigger electrode 46 is in contact with the cathode 12 due to some abnormality and the trigger electrode 46 is in contact with the cathode 12. Is not maintained, some (ie, greater than zero) voltage V is applied from the cathode 12 to the trigger electrode 46. For example, when the arc power supply 24 can supply 50 V, 30 A power to the cathode 12 as described above, the trigger electrode 46 is used at the time of the abnormality diagnosis.
Is applied with a voltage V of 50 V at the maximum. And this voltage V
Is measured by a voltage measuring device 70, and the measured voltage V is compared with a reference value E ₂ (here, 0 V) by a comparator 66b activated at that time. Since V> 0, the measured voltage V is output from the comparator 66b. An abnormality detection signal S is output.
When the trigger electrode 46 and the cathode 12 are not in contact with each other and the insulation between them is maintained, the voltage V applied to the trigger electrode 46 is 0, and the abnormality detection signal S is not output from the comparator 66b. Thus, the trigger electrode 46 and the cathode 12
Can be automatically detected.

In the second step, if the trigger electrode 46 is in contact with the cathode 12 if normal, but if the trigger electrode 46 is not in contact with the cathode 12 due to some abnormality, the trigger electrode 46 No voltage V is applied. That is, V = 0
Which is the comparator 67b which is then activated
And the comparator 67b outputs an abnormality detection signal S. When the trigger electrode 46 is in contact with the cathode 12, some voltage V (that is, more than 0 and at most about 50 V) is applied to the trigger electrode 46, so that the abnormality detection signal S is output from the comparator 67b. Not done. In this manner, a contact failure between the trigger electrode 46 and the cathode 12 can be automatically detected.

As described above, the abnormality diagnosis device 60
According to b, the insulation failure and the contact failure between the trigger electrode 46 and the cathode 12 of the arc-type evaporation source 10 can be easily detected without requiring any human intervention.

FIG. 6 shows an anode 76 for the arc evaporation source 10.
This embodiment shows a case in which is provided separately from the vacuum container 2.
This corresponds to the embodiment shown in FIG. In this case, the positive electrode of the arc power supply 24, the resistor 28 and the resistor 38 are connected to the anode 76, and the vacuum vessel 2 is usually grounded. The same applies to the embodiment shown in FIG.

[0035]

As described above, according to the present invention, since the abnormality diagnosis apparatus as described above is provided, the insulation failure and the contact failure between the trigger electrode and the cathode of the arc type evaporation source require manual operation. It can be easily detected without the need. As a result, it is possible to cope with automatic operation of the vacuum arc evaporation apparatus. In addition, when multiple arc evaporation sources are provided, or when the arc evaporation source is located in a location that is difficult to reach by an operator, such as a high place, the operation confirmation time is reduced. The productivity is improved.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing one example of an arc evaporation source and an abnormality diagnosis device of a vacuum arc evaporation apparatus according to the present invention.

FIG. 2 is a cross-sectional view showing another example around the arc evaporation source and the abnormality diagnosis device of the vacuum arc evaporation apparatus according to the present invention.

FIG. 3 is a flowchart showing an example of control contents by a control circuit constituting the abnormality diagnosis device in FIGS. 1 and 2;

FIG. 4 is a schematic view showing an example of a conventional vacuum arc evaporation apparatus.

FIG. 5 is a sectional view showing an example of the vicinity of an arc evaporation source in FIG.

FIG. 6 is a cross-sectional view showing an embodiment in which an anode of an arc evaporation source is provided separately from a vacuum vessel.

[Explanation of symbols]

 2 Vacuum container 10 Arc evaporation source 12 Cathode 14 Cathode material 24 Arc power supply 30 Base material 32 Holder 38 Resistor 46 Trigger electrode 52 Drive device 60a, 60b Abnormal diagnostic device 62 Vacuum gauge 64a, 64b Control circuit (control means) 66a, 66b first comparator (first comparing means) 67a, 67b second comparator (second comparing means) 68 current measuring device 70 voltage measuring device 76 anode

Claims (2)

[Claims] 1. A vacuum vessel, an arc-type evaporation source for evaporating a cathode material from a cathode by vacuum arc discharge, and said arc-type evaporation source between said cathode and said vacuum vessel serving also as an anode or an anode. An apparatus for depositing the cathode material on a substrate in the vacuum vessel, comprising: an arc power supply connected to the cathode with the cathode on the negative electrode side, wherein the arc-type evaporation source has a trigger electrode for arc discharge ignition. A vacuum arc having a driving device for driving the trigger electrode to contact the cathode and a state not contacting the cathode, and a resistor connected between the trigger electrode and the anode or the vacuum vessel serving also as the anode. In the vapor deposition device, a vacuum gauge that measures the pressure in the vacuum container, a current measuring device that measures a current flowing through the trigger electrode, and a current measured by the current measuring device is zero. First comparing means for outputting an abnormality detection signal when the current is large, second comparing means for outputting an abnormality detection signal when the current measured by the current measuring device is 0, and a pressure measured by the vacuum gauge. Under the condition of several Torr or more, controlling the driving device to drive the trigger electrode so as not to contact the cathode, and then outputting a voltage from the arc power supply and activating the first comparing means. And a second function of controlling the driving device to drive the trigger electrode into contact with the cathode, and then outputting a voltage from the arc power supply and activating the second comparing means. A vacuum arc vapor deposition apparatus provided with an abnormality diagnosis device having control means. 2. A vacuum vessel, an arc evaporation source for evaporating a cathode material from a cathode by vacuum arc discharge, and said arc evaporation source between said cathode and said vacuum vessel serving also as an anode or anode for said cathode. An apparatus for depositing the cathode material on a substrate in the vacuum vessel, comprising: an arc power supply connected to the cathode with the cathode on the negative electrode side, wherein the arc-type evaporation source has a trigger electrode for arc discharge ignition. A vacuum arc having a driving device for driving the trigger electrode to contact the cathode and a state not contacting the cathode, and a resistor connected between the trigger electrode and the anode or the vacuum vessel serving also as the anode. In the vapor deposition device, a vacuum gauge that measures the pressure in the vacuum vessel, a voltage measuring device that measures a voltage applied to the trigger electrode, and a voltage measured by the voltage measuring device is zero. A first comparison means for outputting an abnormality detection signal when the voltage is large, a second comparison means for outputting an abnormality detection signal when the voltage measured by the voltmeter is 0, and a pressure measured by the vacuum gauge. Under the condition of several Torr or more, controlling the driving device to drive the trigger electrode so as not to contact the cathode, and then outputting a voltage from the arc power supply and activating the first comparing means. And a second function of controlling the driving device to drive the trigger electrode into contact with the cathode, and then outputting a voltage from the arc power supply and activating the second comparing means. A vacuum arc vapor deposition apparatus provided with an abnormality diagnosis device having control means.