JPH10223576A - 膜平坦化方法および膜平坦化装置 - Google Patents

膜平坦化方法および膜平坦化装置

Info

Publication number
JPH10223576A
JPH10223576A JP2152797A JP2152797A JPH10223576A JP H10223576 A JPH10223576 A JP H10223576A JP 2152797 A JP2152797 A JP 2152797A JP 2152797 A JP2152797 A JP 2152797A JP H10223576 A JPH10223576 A JP H10223576A
Authority
JP
Japan
Prior art keywords
film
polishing
grindstone
semiconductor substrate
polished
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2152797A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10223576A5 (enExample
Inventor
Kojirou Sugane
小二郎 数金
Masaaki Fujishima
正章 藤島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP2152797A priority Critical patent/JPH10223576A/ja
Publication of JPH10223576A publication Critical patent/JPH10223576A/ja
Publication of JPH10223576A5 publication Critical patent/JPH10223576A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
JP2152797A 1997-02-04 1997-02-04 膜平坦化方法および膜平坦化装置 Pending JPH10223576A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2152797A JPH10223576A (ja) 1997-02-04 1997-02-04 膜平坦化方法および膜平坦化装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2152797A JPH10223576A (ja) 1997-02-04 1997-02-04 膜平坦化方法および膜平坦化装置

Publications (2)

Publication Number Publication Date
JPH10223576A true JPH10223576A (ja) 1998-08-21
JPH10223576A5 JPH10223576A5 (enExample) 2004-12-24

Family

ID=12057436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2152797A Pending JPH10223576A (ja) 1997-02-04 1997-02-04 膜平坦化方法および膜平坦化装置

Country Status (1)

Country Link
JP (1) JPH10223576A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009269147A (ja) * 2008-05-09 2009-11-19 Fujitsu Ltd 研磨体及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009269147A (ja) * 2008-05-09 2009-11-19 Fujitsu Ltd 研磨体及びその製造方法

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