JPH10223151A - Coaxial-type current lead-in terminal - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coaxial-type current lead-in terminal, which does not cause vacuum leak at the time of replacement of filament and does not require dismantling the entire ion source. SOLUTION: A terminal 35 to connect one end of a filament is coupled with a coaxial conductor pipe 32, and a coolant lead-in hole to serve also as electric terminal 42 is provided for supplying both the current and the cooling water to the conductor pipe 32, so that an outer current terminal 30 is formed. A terminal 58 to connect the other end of the filament is coupled with another conductor pipe 55, and from a coolant lead-in hole to serve also as electric terminal 51 both the current and cooling water are supplied to the conductor pipe 55, so that an inner current terminal 50 is formed. The two current terminals 30 and 50 are insulated electrically and arranged coaxially, and an insulating spacer 60 is mounted on the conductor pipe 55, and the spacer 60, a conductor block 53, and a third conductor pipe 33 are coupled together by fixing members 61 and 62.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to two cooling water inlet ports and an electric terminal which are connected to a filament which is housed in a chamber of an ion generator of an ion source and emits thermoelectrons. The present invention relates to a coaxial current introduction terminal which is coaxially inserted and connects two cooling water introduction ports and electric terminals via an insulating spacer.

[0002]

2. Description of the Related Art A filament is disposed in a chamber of an ion generating section of an ion source, a cooling water inlet and an electric terminal are connected to both ends of the filament, and the filament is heated to emit thermoelectrons from the filament. There is known an ion source in which the thermoelectrons are confined in the chamber by a multipolar magnetic field disposed in the chamber, thereby ionizing the gas in the chamber by the thermoelectrons and extracting negative ions by an ion extraction electrode. In this case,
Cooling water is circulated through the cooling water inlet and the electric terminal to cool the terminal connecting the filament.

As shown in FIG. 8, the cooling water inlet / electric terminal is provided at a predetermined interval on the flange 2 so that terminals are individually connected to both ends of the filament. The electric terminal 1A and the second cooling water inlet / electric terminal 1B are attached, and the terminal portions 1a and 1b of the first cooling water inlet / electric terminal 1A and the second cooling water inlet / electric terminal 1B are attached to the filament 3. Connected. Further, in order to prevent overheating of the first cooling water inlet / electric terminal 1A and the second cooling water inlet / electric terminal 1B, the first cooling water inlet / electric terminal 1A and the second cooling water inlet are combined. Electric terminal 1B
Cooling water is circulated inside.

In the case where the first cooling water inlet / electric terminal 1A and the second cooling water inlet / electric terminal 1B are used, the filament 3 is attached to the chamber as shown in FIG. Mounting hole 4 must be machined. Processing of the oblong mounting hole 4 is troublesome, and the number of the filaments 3 to be mounted on the chamber tends to be limited because the size of the mounting hole increases.

Therefore, the first cooling water inlet and electric terminal 1A
And the second cooling water inlet / electric terminal 1B are formed coaxially so as to facilitate the processing of a hole for mounting the filament to the chamber and to increase the number of filaments mounted to the chamber. Current introduction terminals have been proposed. FIG. 10 is a cross-sectional view showing the configuration of a conventional coaxial current introduction terminal. In FIG. 10, an outer terminal 11a is connected to one end of a filament (not shown), and the outer terminal 11a is formed integrally with a lower end of the outer current terminal 11A formed by a conductor tube. A flange 11b is formed integrally with the outer current terminal 11A at the upper end of the outer current terminal 11A.

The outer current terminal 11A is connected to the cooling water supply pipe 1
2 has been inserted. At the upper end of the cooling water supply pipe 12,
The water supply port 12a is connected. The lower end of the cooling water supply pipe 12 is connected to the lower end of the drain pipe 13. The upper end of the drain pipe 13 is connected to the drain 13a. A partition pipe 14 is disposed between the cooling water supply pipe 12 and the drain pipe 13, and the cooling water supplied to the cooling water supply pipe 12 from the water supply port 12 a flows out to the discharge port 13 a of the drain pipe 13. And The cooling water supply pipe 12 and the drain pipe 13 are coaxial, so that the cooling water supply pipe 12 and the drain pipe 1
3 and the outer current terminal portion 11A are also formed coaxially.

[0007] The drain pipe 13 is inserted into the insulating pipe 15 from the portion of the outer terminal portion 11a to a portion near the drain port 13a. The insulating tube 15 and the outer terminal portion 11a are sealed by an O-ring sealing material 16a. Insulation tube 15
A portion near the drain port 13a has a cap nut-shaped flange 15a, which is screwed to the fixing member 17. The fixing member 17 fixes the upper ends of the partition pipe 14 and the insulating pipe 15. Fixing member 17 and insulating tube 15
Is also sealed by the sealing material 16b.
Similarly, the space between the fixing member 17 and the upper end of the partition pipe 14 is also sealed by the sealing material 16c.

Further, an upper end of the cooling water supply pipe 12 is fixed to a flange 11b of the outer current terminal portion 11A by a fixing member 18. The space between the fixing member 18 and the flange 11b is also sealed by the sealing material 16d. These sealing materials 1
Reference numerals 6a to 16d are for holding a vacuum at the fixing members 17, 18 of the insulating tube 15 in the outer current terminal portion 11A.

Next, the configuration of the inner current terminal section 44 will be described. The conductor block 19 of the inner current terminal portion 44 has a bottomed cylindrical shape, an insertion hole is formed at the center of the bottom, and a flange 19a is provided at an end of the cylindrical portion. At the base of the flange 19a, a conductor tube 20 having the same diameter as the conductor block 19 is formed integrally with the flange 19a. The lower end of the conductor tube 20 is connected to the terminal 21. The terminal portion 21 is for connecting to the other end of the filament. Thus, the conductor block 19 of the inner current terminal portion 44 is electrically connected to the other end of the filament via the flange 19a, the conductor tube 20, and the terminal portion 21. An insulating tube 22 is connected to the outer peripheral surface of the conductor tube 20 so as to be coaxial with the conductor tube 20 to the flange 19a. After the conductor block 19 of the inner current terminal 44 is assembled into the outer current terminal 11A, the conductor tube 20 and the outer current terminal 11A are electrically insulated via the insulating tube 22.

The conductor tube 23 is inserted into the axial center portion of the conductor tube 20 through the insertion hole of the conductor block 19 of the inner current terminal portion 44. That is, the conductor tube 23 is
And coaxial. The conductor tube 23 is a conductor block 19
And has the same potential as the conductor block 19. The conductor pipe 23 is for supplying cooling water to the inside of the conductor pipe 20, and the upper end side in FIG. 10 is a water supply port 23a. The cooling water supplied from the water supply port 23a flows through the conductor pipe 23, further flows from the conductor pipe 23 into the conductor pipe 20, and is drained from the drain port 20a provided on the upper end side of the conductor pipe 20. Has become.

When the inner current terminal portion 44 is coaxially incorporated into the outer current terminal portion 11A, the inner current terminal portion 4
4 is inserted into the outer current terminal portion 11A, and the outer current terminal portion 11A and the conductor block 19 of the inner current terminal portion are electrically insulated by the insulating tube 22 from the outer current terminal portion 11A. And the inner current terminal 44 are coaxially assembled. In this state, an insulating spacer 24 is interposed between the flange 11b of the outer current terminal portion 11A and the flange 19a of the conductor block 19, and the insulating spacer 24 and the flange 11b, and the insulating spacer 24 and the flange 1
9a, sealing materials 16e and 16f are arranged to seal each other. Further, the flange 19
a and the flange 11b are fixed with the fixing member 25, and the outer peripheral surface of the fixing member 25 and the outer peripheral surface of the flange 11b are screwed together with the insulating retainer 26 using the cap nut, and the end of the insulating retainer 26 is brought into contact with the flange 19a. Then, the second current terminal 44 is fixed to the outer current terminal portion 11A. In this way, a coaxial current introduction terminal composed of the inner current terminal and the outer current terminal is formed.

At the time of energizing the filament, an electric current flows through an energizing path from the flange 19a of the conductor block 19 of the inner current terminal portion 44, the conductor tube 20, the terminal portion 21, the filament, the terminal portion 11a of the outer current terminal portion, and the flange 11b. Flow and the filament is energized. At this time, the cooling of the outer current terminal portion 11A is performed by flowing cooling water from the water supply port 12a through the flow path of the cooling water supply pipe 12, the drain pipe 13, and the drain port 13a to cool the outer current terminal section 11A. The inner current terminal portion 44 is cooled by the water supply port 23a through the conductor tube 2.
3-Space between conductor tube 23 and conductor tube 20-drain port 2
The cooling water flows in the flowing water path of the inner current terminal portion 4a.
4 is cooled.

[0013]

Since the conventional coaxial type current introduction terminal is constructed as described above, the seal members 16a to 16f are arranged at a plurality of locations to seal them. There is a possibility that a vacuum leak may occur from the seal portion due to deterioration with time or breakage of the seal materials 16a to 16f. Also, when the method of assembling the coaxial current introduction terminal is not appropriate, there is a possibility that a vacuum leak occurs. If a vacuum leak occurs due to such a cause,
There is a problem that the coaxial current introduction terminal cannot be used.

The present invention has been made to solve the above-mentioned problems of the prior art, and can simplify the assembly of the current introduction terminal itself and eliminate the occurrence of vacuum leak.
The mounting holes on the chamber side can be easily machined, the number of filaments installed in the chamber can be increased, and the filament can be replaced without dismantling the ion source and without vacuum leakage of the entire ion source. It is an object of the present invention to provide a coaxial type current introduction terminal that can be used.

[0015]

In order to solve the above-mentioned problems, a coaxial current introducing terminal according to the present invention is connected to a filament housed in a chamber of an ion generator of an ion source and one end of the filament. And forming an electric current path, and an outer current terminal portion for circulating cooling water therein, electrically insulated from the outer current terminal portion and connected to the other end of the filament to form a current path. An inner current terminal portion for circulating cooling water therein, an insulating spacer for electrically insulating the outer current terminal portion and the inner current terminal portion inserted coaxially, an outer current terminal portion and an inner current terminal portion. And a fixing member for connecting the above via the insulating spacer.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of a coaxial current introducing terminal according to the present invention will be described with reference to the drawings.
FIG. 1 is a sectional view showing the configuration of the embodiment. Reference numeral 30 in the figure denotes a first terminal portion having an overall shape formed in a tubular shape. The outer current terminal portion 30 serves as an outer first cooling water inlet and electric terminal of the coaxial current introducing terminals. The inner diameter portion of the outer current terminal portion 30 having the smallest diameter is an insulating tube 31.
This is to electrically insulate the conductor tube of the cooling water inlet and electric terminal.

The insulating tube 31 is coaxially inserted into a conductor tube 32 made of metal. The conductor tube 32 is formed slightly shorter than the insulating tube 31. Therefore, the insulating tube 31 protrudes from both ends of the conductor tube 32. A thick metal conductor tube 33 is attached from the upper end of the outer peripheral surface of the conductor tube 32 to the center. In the vicinity of the lower end of the outer peripheral surface of the conductor tube 32, a metal conductor tube 34 is connected. The thickness of the lower end of the conductor tube 34 is reduced, and a thread groove is formed on the outer peripheral surface thereof, and is screwed to the inner peripheral surface of the metal terminal portion 35. Terminal 35
Is for connecting to one end of the filament which is not shown. The outer peripheral surface near the upper end of the conductive tube 34 is connected to a metallic conductive tube 37 by a conductive connecting member 36. The conductor tube 37 is located substantially at the center of the conductor tube 32. The vicinity of the upper end of the conductor tube 33 has a step portion having a reduced thickness, and the step portion and the vicinity of the upper end of the conductor tube 37 are connected by a conductive connecting member 38.

As described above, the first terminal portion 30 is formed in a tubular shape as a whole with the conductor tube 33 together with the connection member 38, the conductor tube 37, the connection member 36, the conductor tube 34, and the terminal portion 35. The thickness of the conductor tube 33 is reduced in three steps substantially at the center of the inner surface thereof, and a partition tube 39 is in contact with the middle portion thereof. The partition tube 39 includes the partition tube 39 and the conductor tube 3.
2 to form a cooling water passage 40 for introducing cooling water and a drain passage 41 between the partition pipe 39 and the conductor pipes 33 and 37.

In the vicinity of the upper end of the thick portion of the conductor tube 33, a cooling water inlet / electric terminal 42 is connected. The cooling water inlet / electric terminal 42 is for introducing cooling water to the outer current terminal portion 30 and for connecting a power source (not shown) to supply current from the outer current terminal portion 30 to the filament. . In the thick portion of the conductor tube 33, the cooling water inlet / electric terminal 43 is connected to the cooling water inlet / electric terminal 42 at a position shifted from the axial line. Further, the cooling water supplied from the cooling water inlet / electric terminal 42 is drained from the cooling water inlet / electric terminal 43 through the cooling water passage 40 and the drain passage 41.

Next, the configuration of the inner current terminal portion 50 will be described. As is clear from the exploded view of FIG. 2, the inner current terminal 50 has a structure different from that of the outer current terminal 30, and can be assembled separately from the outer current terminal 30. ing. The inner current terminal 50 serves as an inner second cooling water inlet and electric terminal of the coaxial current introducing terminal. A portion around the cooling water inlet / electrical terminals 51 and 52 of the inner current terminal portion 50 is shown in a side view in FIG. 3 and an enlarged side view in which a part of FIG. In FIGS. 1 to 4, the cooling water inlet / electric terminal 51 is connected to a power supply, and also serves as a water inlet for supplying cooling water to the inner second cooling water inlet / electric terminal. The cooling water inlet / electric terminal 51 is bent in an “L” shape, and its vertical portion is inserted into an insertion hole formed at the center of the bottom of the thick bottomed tubular conductor block 53. Are connected by Therefore, the cooling water inlet / electric terminal 51 and the metal conductive block 53 are in an electrically conductive state.

In the conductor block 53, the upper end of the metal conductor tube 54 is connected to the cooling water inlet / electric terminal 51. The lower end of the conductor tube 54 penetrates the conductor block 53. The inner diameter near the opening edge of the conductor block 53 is formed slightly larger, and the upper end of the metal conductor tube 55 is connected to the inner peripheral surface having the larger diameter. A flange 53 a is integrally formed on the outer peripheral surface side of the large diameter conductor block 53. The lower end of the conductor tube 55 is the conductor block 5
3 and extends longer than the conductor tube 54. Accordingly, the conductor tube 54 is coaxially inserted into the conductor tube 55. The lower end of the conductor tube 55 is connected to the conductor block 57. The other end of the conductor block 57 is provided with a thread groove in the axial center portion. The terminal portion 58 is screwed into this screw groove. The terminal portion 58 is for connecting to the other end of the filament.

Further, a gap is formed between the inner peripheral surface of the conductor tube 55 and the outer peripheral surface of the conductor tube 54 by the diameter of the inner peripheral surface of the conductor block 53. . This gap serves as a drain passage 59 communicating with the cooling water inlet and the drain of the electric terminal 52 shown in FIGS. As shown in FIG. 4, the drainage channel 59 communicates with the cooling water / electrical terminal 52 connected to the conductor tube 55 at the portion of the conductor block 53. Therefore, the cooling water inlet and electric terminal 51
After flowing into the conductor tube 54, the cooling water supplied from the cooling water inlet is drained from a cooling water introduction port and a drain port of the electric terminal 52 through a drain passage 59. During the flow of the cooling water, the conductor tubes 54 and 55 are cooled.

Next, as described above, the outer current terminal portion 30 and the inner current terminal portion 50 which are individually incorporated are incorporated to complete a coaxial current introduction terminal. In this case, the conductor tube 55 of the inner current terminal portion 50 is
In this state, the conductor tube 55 of the inner current terminal portion 50 is inserted into the insulating tube 31 of the outer current terminal portion 30 so that the outer peripheral surface of the conductor tube 55 is in contact with the outer tube. As a result, the outer current terminal 30
The conductor tubes 32, 33, 34, 37 and the insulating tube 31 are coaxially arranged with the conductor tubes 54, 55 of the outer current terminal portion 50. In this manner, the inner current terminal portion 50 is coaxially inserted into the outer current terminal portion 30 and incorporated, and as shown in FIGS. 1, 3, and 4, the upper end of the insulating spacer 60 is So that it contacts the upper end of the insulating tube 31 of
The insulating spacer 60 is positioned. In this state, the vertical portion of the fixing member 61 formed in an “L” shape is fixed to the outer peripheral surface of the insulating spacer 60 by welding, and the fixing member 61
Is welded to the horizontal portion of the inner current terminal portion 50 and the flange portion 53a of the conductor block 53 of the inner current terminal portion 50 by welding. Accordingly, the conductor block 53 is
Are fixed to each other by a fixing member 61.

A fixing member 62 is also fixed by welding to a welding portion 101 on the outer peripheral surface near the lower end of the insulating spacer 60. The vicinity of the lower end of the fixing member 62 is near the upper end of the conductor tube 33 of the outer current terminal portion 30.
2 is fixed by welding. Therefore, the conductor tube 33 is fixed to the insulating spacer 60 via the fixing member 62. Thus, the outer current terminal 30 and the inner current terminal 50 are electrically insulated and fixed via the insulating spacer 60. Further, vacuum is secured between the conductor block 53 and the insulating spacer 60 and between the insulating spacer 60 and the conductor tube 33.

As described above, by forming the outer current terminal portion 30 and the inner current terminal portion 50 coaxially, the coaxial current introducing terminal of the present invention is completed. This coaxial type current introduction terminal is attached to the flange 63 shown in FIG. 5, and a filament 66 is connected between the terminal portion 35 of the outer current terminal portion 30 and the terminal portion 58 of the inner current terminal portion 50, and the ion source shown in FIG. When the ion generating unit 103 is attached to the chamber 65 of the ion generating unit, the inner and outer current terminals are formed coaxially. Therefore, as shown in FIG. It will be a circle,
Its processing becomes easy. After processing the chamber hole 64 in the chamber 65 of the ion generation unit, a coaxial current introduction terminal is attached to the chamber 65 of the ion generation unit, and the test is performed for ion generation.

FIG. 7 is a sectional view of the chamber of the negative ion generator of the ion source 103. This FIG.
2 shows a state in which two coaxial current introduction terminals are attached to the chamber holes formed in the above, and the filaments 66 and 67 are connected to the respective end terminals to perform a test of ion generation in the chamber 65. . In the chamber 65 in FIG. 7, a large number of permanent magnets 68 are arranged at regular intervals,
A cusp magnetic field is generated, and filaments 66 and 67 (only two filaments are shown in FIG. 7) are arranged at the positions of the zero magnetic field of the cusp magnetic field. Further, gas is introduced into the chamber 65 through the gas introduction pipe 69 at a degree of vacuum suitable for plasma generation from the gas introduction port 69a.
The gas introduced into the chamber 5 is exhausted from the exhaust pipe 70 to the outside of the chamber 65 via the exhaust port 70a.

Regarding the ionization phenomenon, for example, the chamber 6
5 and the inner current terminal 5
0 from the cooling inlet / electric terminal 51 to the conductor block 53
-A conductor tube 55-a conductor block 57-a terminal portion 58-a filament 66-a terminal portion 35 of the outer current terminal portion 30-a conductor tube 34-a conductor tube 32-a conductor tube 33-a current flow path of the cooling water inlet and electric terminal 42. When the current is supplied to the filament 66, the filament 66 is heated, and the filament 66 emits thermoelectrons. These thermoelectrons are confined in the chamber 65 by the magnetic field of the permanent magnet 68. The gas introduced into the chamber 65 is discharged by the confined thermoelectrons and the magnetic field to generate plasma.

The plasma in the chamber 65 is confined in the chamber 65 by the plasma electrode 71, the current is suppressed from being extracted from the chamber 65 by the electron suppression electrode 72, and negative ions are extracted from the ion extracting portion 73. Reference numeral 74 denotes a vacuum seal for maintaining a vacuum with the mounting base 75 to which the chamber 65 is mounted.

[0029]

As described above, according to the coaxial current introducing terminal of the present invention, the filament accommodated in the chamber of the ion generator of the ion source and the current path connected to one end of the filament are connected. An outer current terminal portion for circulating cooling water therein, and electrically insulated from the outer current terminal portion, connected to the other end of the filament to form a current path, and a cooling water inside. The inner current terminal portion, the outer current terminal portion and the inner current terminal portion, which are coaxially inserted, electrically insulating the outer current terminal portion and the inner current terminal portion, and the outer current terminal portion and the inner current terminal portion are connected to the insulating spacer. With a fixed member connected via a cable, vacuum leakage from the coaxial current introduction terminal is eliminated, and the mounting location can be circular processing, making it possible to install even in narrow places. That. Accordingly, it is possible to simplify the work of attaching the filament to the chamber and increase the number of filaments to be attached.

The coaxial current introduction terminal can be easily taken out of the chamber by simplifying the work of attaching the coaxial current introduction terminal to the chamber. Since the filament can be exchanged without dismantling, the vacuum leak of the chamber can be prevented.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a configuration of an embodiment of a coaxial current introduction terminal according to the present invention.

FIG. 2 is an exploded view showing a state before inserting an inner current terminal portion into an outer current terminal portion in an embodiment of the coaxial current introducing terminal according to the present invention;

FIG. 3 is a side view showing a configuration of a connecting portion of a cooling water introduction port and an electric terminal of an outer current terminal portion and an inner current terminal portion in an embodiment of a coaxial current introduction terminal of the present invention.

FIG. 4 is an enlarged side view showing a cross section of a part of the connecting portion of FIG. 3;

FIG. 5 is a side view showing a state in which a filament is connected between an outer current terminal portion and an inner current terminal portion in an embodiment of the coaxial current introduction terminal of the present invention.

FIG. 6 is a plan view of a mounting hole formed in the chamber when the embodiment of the coaxial current introducing terminal of the present invention shown in FIG. 5 is mounted on the chamber.

FIG. 7 is a cross-sectional view showing a state in which a coaxial type current introducing terminal according to an embodiment of the present invention to which a filament is connected is mounted on a chamber of a negative ion generator of an ion source and a test is being performed.

FIG. 8 is a side view showing a state where current is supplied to a filament using two conventional current introduction terminals.

FIG. 9 is a plan view showing the shape of a mounting hole to be machined in the chamber when the current introduction terminal of FIG. 8 is mounted in the chamber.

FIG. 10 is a cross-sectional view illustrating a configuration of a conventional coaxial current introduction terminal.

[Explanation of symbols]

 REFERENCE SIGNS LIST 30 outer current terminal portion 31 insulating tube 32 to 34, 37, 54, 55 conductor tube 35, 58 terminal portion 40 cooling water channel 41, 59 drainage channel 42, 43, 51, 52 cooling water inlet / electric terminal 50 inner current terminal Parts 53, 57 Conductor blocks 61, 62 Fixing member 65 Chamber 66, 67 Filament 100 to 192 Welding site 103 Ion source

Claims (1)

[Claims] A filament housed in a chamber of an ion generator of an ion source; an outer current terminal connected to one end of the filament to form a current path and circulating cooling water therein; An inner current terminal that is electrically insulated from the outer current terminal and is connected to the other end of the filament to form a current path and circulates cooling water therein; and an outer current that is coaxially inserted. A coaxial current introduction terminal comprising: an insulating spacer for electrically insulating the terminal portion from the inner current terminal portion; and a fixing member connecting the outer current terminal portion and the inner current terminal portion via the insulating spacer. .