KR102346196B1 - Ion Beam Generating Device - Google Patents

Abstract

The present invention relates to a casing having an inner space and an open upper surface, having gas supply holes for supplying gas to the inner space, a cathode disposed on the upper surface of the casing, and having an opening through which the casing exposes the inner space, and the interior of the casing It is arranged to be spaced apart from the cathode in space, and is configured to include an anode having an upper surface opposite to the bottom surface of the cathode, and ionizes a gas supplied by an electric field formed by the cathode and an electric field between the anode and the cathode to ionize the ion beam through the opening An ion beam generating device for emitting radiation, wherein the anode has a first anode portion having an upper surface opposite to a bottom surface of a cathode, and a cooling channel through which cooling water flows, and is disposed under the first anode portion and a second anode part which becomes will be placed

Description

Ion Beam Generating Device

The present invention relates to an ion beam generating device. Specifically, an electric field is formed between a pair of cathodes and an anode facing each other, and a magnetic field is formed between the pair of cathodes, and the gas injected into this space is ionized to release ions between the cathodes. It relates to an ion beam generating device configured to emit an ion beam into a gap.

Ion beams are widely used in implanting, sputtering, reactive ion etching, deposition, and surface treatment. Process technology is being developed.

An ion beam generating device consists of electrodes for forming a structure in which an electric field and a magnetic field intersect vertically. A magnetic field generated by a permanent magnet disposed in the ion beam generator or a coil to which a current is applied crosses perpendicularly to an electric field generated between an anode to which a voltage is applied and a cathode to be grounded.

In an electromagnetic field that intersects vertically, charged particles move under the force of the Lorentz force. If the path through which the charged particles move can make a closed drift, the charged particles can be confined in a certain space. In general, electrons with a small mass are bound by an electromagnetic field and, while rotating, collide with neutral particles to generate ions and electrons.

The generated electrons contribute to ionization again to maintain the discharge, and the generated ions are accelerated and extracted by the electric field without being constrained by the magnetic field, compared to the electrons. Among the methods for generating a linear ion beam, various linear ion beam generating devices using the closed-loop motion principle have been developed and used.

For such an ion beam generating device, the applicant of this application applied and registered the electrode in various documents such as Korean Patent No. 1188604 (Document 1), Korean Patent No. 1495424 (Document 2), and US Patent No. 7718983 (Document 3). structure and the like are disclosed.

However, the ion beam generator using the closed-loop motion principle has a problem in that, when used for a long time, the cathode is etched by the extracted ion beam and the surface of the anode facing the cathode is contaminated. Therefore, the anode needs to be replaced, and the anode needs to be disassembled from the device after use for a certain period of time to clean contaminants.

However, in the ion beam generating apparatus, a refrigerant for suppressing a temperature increase due to heat generated during generation of the ion beam circulates and conduits for supplying the refrigerant are connected to the cathodes, the anodes, and the casing in which they are accommodated.

For example, in the ion beam source disclosed in Document 2, the refrigerant is supplied to the refrigerant circuit formed in the anode through the support structure supporting the anode to the casing. When the anode structure is disassembled, the anode is separated from the casing so that cleaning can be performed.

Since such separation and reassembly takes a considerable amount of time, it becomes difficult to maintain the ion beam generator and increases the maintenance cost.

Document 1: Korean Patent No. 1188604 Document 2: Korean Patent No. 1495424 Document 3: US Patent No. 7718983

An object of the present invention is to provide an ion beam generating device having a configuration that facilitates maintenance of an anode in consideration of the problems of the ion beam generating device of the prior art.

Specifically, the present invention intends to provide an ion beam generating device having a configuration that is easy to disassemble and assemble so as to facilitate cleaning of the surface of the anode to which contaminants are attached during operation, that is, the surface of the anode facing the cathode and forming a discharge space. will be.

The above-described problem to be solved by the present invention is a casing having an inner space and an open upper surface, a casing having gas supply holes for supplying gas to the inner space, disposed on the upper surface of the casing, and the casing is an opening exposing the inner space is arranged to be spaced apart from the negative electrode in the inner space of the casing, and is configured to include an anode having an upper surface opposite to the bottom surface of the negative electrode, and is supplied by an electric field formed by the negative electrode and an electric field between the positive electrode and the negative electrode This is achieved by the ion beam generating apparatus according to the present invention, which ionizes the gas and emits an ion beam into the opening.

The ion beam generator of the present invention comprises:

The anode includes a first anode part having the upper surface opposite to the bottom surface of the cathode, a cooling channel through which cooling water flows, and a second anode part disposed under the first anode part,

The first anode portion and the second anode portion are decomposedly coupled to each other, and an inlet through which the refrigerant flows into the cooling channel through the casing and an outlet through which the refrigerant flows out from the cooling channel are disposed in the second anode portion.

In the ion beam generating device according to this configuration, gas supplied to the inner space is ionized by an electric field and a magnetic field formed between the anode and the cathode, and is emitted as an ion beam through the opening.

In the process of generating the ion beam, a material resulting from etching of the cathode is deposited and contaminated on the upper surface of the anode facing the cathode. Therefore, after use for a certain period of time, maintenance such as removing and washing the positive electrode must be performed.

In order to clean the positive electrode, first, the negative electrode covering the upper surface of the positive electrode is separated, the coupling between the first positive electrode part and the second positive electrode part is released, the first positive electrode part is separated and washed, and then the negative electrode part is connected to the second positive electrode part again.

A cooling channel is formed in the second anode part, and an outlet and an inlet of a refrigerant are disposed in the cooling channel. Therefore, only the first anode part is separated in the work for cleaning the anode, so that it is not necessary to separate the configuration for the circulation of the refrigerant. 1 Only the positive electrode can be removed and washed.

As an additional feature of the present invention, in the ion beam generating apparatus of the present invention,

Complementary grooves and protrusions are formed on the surfaces of the first anode part and the second anode part facing each other, and the first anode part and the second anode part are aligned with each other by coupling the grooves and the protrusions. .

According to this configuration, when the first anode part and the second anode part are coupled to each other, there is no work for accurate positioning, and the alignment is achieved by simply coupling the grooves and the protrusions of the first anode part and the second anode part.

As an additional feature of the present invention, the ion beam generating apparatus of the present invention comprises:

A groove extending downward from the surface facing the first anode part is formed in the second anode part in the longitudinal direction, the cooling channel is made of a first tube disposed in the groove, and the first anode part is inserted into the groove The protrusion may be provided to close the groove, and the first anode portion and the second anode portion may be aligned by the combination of the protrusion and the groove.

According to this additional feature, a groove is machined on the upper surface of the second anode part, and the groove becomes a space in which the first tube serving as the cooling channel is disposed and at the same time becomes an element engaged with the protrusion of the first anode part, so that the cooling channel is configured and a configuration for matching the first anode portion is achieved by one element.

In addition, by separating the first anode part and the second anode part, the space for arranging the cooling channel in the second anode part, that is, forming a groove, consists only of machining the groove from the upper surface of the second anode part to the lower side. Therefore, it is easy to form a cooling channel.

In this configuration, it is preferable that the second tube connected to the external refrigerant supply source is fixedly coupled to the inlet and outlet of the cooling channel.

With this configuration, the first tube serving as the cooling channel and the second tube serving as the inlet and outlet of the refrigerant are fixedly coupled to each other to form an integral body, so that the second tube is separately fixed or separated when assembling and disassembling the device. It can be assembled and disassembled together with the first tube without this, and in particular, the second tube can be inserted or removed from the upper surface of the second anode part, so assembly and disassembly are easy.

As another feature of the present invention, the cooling channel may be formed as a through hole formed by penetrating the second anode in the longitudinal direction without configuring the cooling channel as a separate tube.

In this configuration, a cooling channel is formed without using a separate tube, thereby simplifying the configuration of the device.

In addition, even in this configuration, the second tube connected to the external refrigerant supply source may be fixedly coupled to the inlet and outlet of the cooling channel.

According to this configuration, since the second tube is fixedly coupled to the second anode part, the second tube can be assembled or disassembled together with the casing together with the second anode part, so that the disassembly and assembly of the second tube is very easy.

1 and 2 are a perspective view and an exploded perspective view of an ion beam generating device having a conventional configuration to which the present invention is applied, and only a casing, a cathode, and an anode are schematically shown.
3 and 4 are longitudinal cross-sectional views of the ion beam generating apparatus according to the first embodiment of the present invention taken along lines AA and BB in FIG. 1 .
5 and 6 are longitudinal cross-sectional views of the ion beam generating apparatus according to the second embodiment of the present invention taken along lines AA and BB in FIG. 1 .

Hereinafter, the configuration and operation of the ion beam generating apparatus of the embodiments according to the present invention will be described as specific content for carrying out the present invention.

First, the overall configuration and operation of the ion beam generating apparatus according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 3 .

The ion beam source 100 is roughly composed of a casing 10 , cathodes 21 , 22 , and an anode 30 .

The casing 10 has an internal space 11 and has a substantially rectangular parallelepiped shape with an open upper surface. The inner space 11 extends along the extending direction of the casing 10 and has a ring shape having a linear portion and a curved portion as a whole.

The casing 10 is provided with a side wall 12 and a center wall 13 placed in the center of the inner space 11 and a bottom wall 14 placed on the bottom surface, and bolts 151 on the lower side of the bottom wall 14. The support panel 15 is coupled to each other.

A gas supply hole 131 is formed in the center wall 13 . The gas supply hole 131 is formed through the bottom wall 14 of the casing 10 , and supplies gas to the inner space 11 of the casing 10 . A plurality of gas supply holes 131 are arranged to be spaced apart by a predetermined interval along the extending direction of the casing 10 , and gas is uniformly supplied to the internal space 11 through the gas supply holes 131 .

As the cathodes 21 and 22, there are provided a first cathode 21 and a second cathode 22 arranged concentrically with each other, the first cathode 21 is provided along the upper edge of the sidewall 12 of the casing, It is composed of a ring shape as a whole with a straight area and a curved area. The second negative electrode 22 has an overall bar shape with both ends having a semicircular shape to match the curved shape of the first negative electrode 21 , and is placed on the upper surface of the central wall 13 of the casing. The first negative electrode 21 and the second negative electrode 22 are screwed to the casing 10 by bolts 24, respectively.

The first cathode 21 and the second cathode 22 are spaced apart from each other by a predetermined distance, and an opening 23 through which the ion beam is radiated from the inner space 11 of the casing is formed therebetween. Like the first cathode 21 , the opening 23 is formed in a ring shape having a curved portion and a straight portion.

The anodes 31 and 32 are disposed through the casing 110 to be supported by a plurality of anode supporters 40 which are support structures supporting the anodes 31 and 32 and are disposed in the inner space 11 . The positive electrodes 31 and 32 are spaced apart from the inner surface of the casing 10 and the bottom surface of the negative electrode 20 to maintain a predetermined distance.

The anodes 31 and 32 have a rectangular cross-section as a whole and are configured in a ring shape extending in the same direction as the extending direction of the casing 10 .

A plurality of anode support portions 40 are provided along the bottom wall 14 of the casing. In this embodiment, the anode support 40 is disposed along the bottom wall 14 of the casing 110 , but may also be provided on the side wall 12 of the casing.

Each of the positive electrode supports 40 is disposed through the bottom wall 14 and the top surface is inserted into the groove provided on the bottom surface of the positive electrode 110, the first block 41, the first block 41 surrounding the inner space The first block 41 is passed through from the outside of the second block 42 and the casing 10 arranged in 11, the lower surface is in contact with the bottom wall 14, and the upper surface is in contact with the anode 30. It is composed of a bolt 43 screwed to the anode 30 .

The first and second blocks 41 and 42 are made of an insulating material such as ceramic or PEEK (Poly-Ether Ether Ketone) to support the anode 30 with respect to the casing 10 in an insulated state, and to be electrically conductive. Power may be supplied to the anodes 31 and 32 through the bolt 43 .

Channels 112 and 132 through which refrigerant for cooling the casing 10 and the cathodes 21 and 22 are formed are formed on the sidewall 12 and the center wall 13 of the casing 10 . In addition, cooling channels 33 are also formed in the anodes 31 and 32 . Refrigerant flows in from the outside and circulates in these channels to prevent temperature rise due to electric power applied during generation of the ion beam.

On the other hand, the anodes 31 and 32 are provided with a first anode part 31 having upper surfaces opposite to the bottom surfaces of the cathodes 21 and 22 and a cooling channel 33 through which cooling water flows, and the first anode part 31 . It consists of a second anode part 32 disposed under the.

The second anode part 32 has a rectangular cross section and is provided with a groove 321 formed downward from the center of the width direction of the upper surface, and a first tube 34 through which the refrigerant flows is disposed in the groove 321. have.

The first anode part 31 is configured in the form of a flat panel as a whole to cover the upper surface of the second anode part 32 , and protrudes into the groove 321 of the second anode part 32 at the center of the bottom surface. A projection 311 is formed.

The protrusion 311 of the first anode part is inserted into the groove 321 of the second anode part so that the first anode part 31 and the second anode part 32 are aligned, and the groove 321 is closed. A fastening bolt 312 is inserted from the upper surface of the first anode part 31 and is screwed to the second anode part 32 so that both are coupled.

With this configuration, the first anode part 31 and the second anode part 32 are aligned and fastened, and when the cathodes 21 and 22 are separated from the casing 10 to expose the upper surface of the casing 10 , , the first anode part 31 is separated from the second anode part 32 by a simple operation of loosening the fastening bolt 312 and separated from the ion beam generating device to perform a cleaning operation or the like.

In addition, since the groove 321 in which the first tube 34 as a cooling channel is disposed is formed downward from the upper surface of the second anode part 32 , the processing of the groove 321 is easy. In addition, since the protrusion 311 of the first anode part is inserted into the groove 321 to be matched, the configuration for closing the space in which the first tube 34 is disposed and the first and second anode parts 31 and 32 A configuration for position matching is implemented at the same time.

Next, a configuration in which the refrigerant flows into and out of the first tube 34 as a cooling channel will be described with reference to FIG. 4 .

Two first tubes 34 extending from one end in the longitudinal direction to the other end in the second anode part 32 are arranged in parallel, and at a position where both ends of each of the first tubes 34 are disposed, the A through hole 322 extending downwardly and penetrating the second anode part 32 is formed in the groove 321 of the second anode part 32 .

A supply source (not shown) of a refrigerant and a second tube 35 through which the refrigerant flows are inserted into each through hole 322 . The second tube 35 is welded to both ends of each first tube 34 so that the refrigerant flows between the first tube 34 and the second tube 35 without leakage of the refrigerant from the first tube 34 . are distributed

The refrigerant is supplied to the second tube 35 on one side and flows into the first tube 34 , and the refrigerant flows out through the second tube 35 on the other side, so that the refrigerant circulates in the first tube 34 .

The second tube 35 extends downward through the bottom wall 14 and the support panel 15 of the casing, and extends to the coolant supply source (not shown) through the support structure 50 of the casing.

Although the two first tubes 34 are disposed on the second anode part 32 in this first embodiment, the first tube is configured in an annular shape overlying the entire second anode part 32, and is formed at both ends, respectively. By connecting the second tube, the refrigerant supplied from the second tube on one side and the second tube on the other side may be connected so that the refrigerant supplied from the one side circulates through the entire second anode and then flows out.

Like the first tube 34 , the second tube 35 is made of a metal with high thermal conductivity, and an insulating structure surrounding the second tube 35 for electrical insulation from the casing 10 and the support structure 50 . (36) is provided.

The insulating structure 36 is configured in the form of a tube made of an insulating resin such as PEEK, and is disposed from the bottom of the second anode part 32 through the elements including the bottom wall 14 and the support panel 15 of the casing. 2 The tube 35 is insulated from other structures.

The lower end 361 of the insulating structure 36 is configured to extend in a radial direction by contacting the support structure 50, and an insulating pad 362 is placed under the lower end of the lower end 361 to the support structure ( 50) and the insulating structure 36 is supported.

The first tube 34 and the second tube 35 are pre-welded to form a single structure, and are disposed in the groove 321 of the second anode part 32, and then the first anode part 31 is formed. It covers the upper surface of the second anode part 32 and is coupled. At this time, the second tube 35 is disposed by being inserted into the second anode part 32 and the insulating structure 36 previously installed in the casing 10 .

In the ion beam generating device of the first embodiment configured as described above, positive voltage is applied to the anodes 31 and 32 and the cathodes 21 and 22 are grounded to form an electric field between the anode and the cathode, and a magnetic field is generated between the cathodes. formed, gas is supplied to the inner space 11 of the casing through the gas supply hole 131 , and the ion beam is emitted from the opening 23 .

Next, a configuration of an ion beam generating apparatus according to a second embodiment of the present invention will be described with reference to FIGS. 5 and 6 .

In the following description, only configurations different from those of the first embodiment will be described, and in the drawings, identical components are assigned the same numbers.

In the ion beam generating apparatus according to the second embodiment, a through-hole penetrating the second anode part in the longitudinal direction is provided as a cooling channel 34' in the second anode part 32'. This cooling channel 34' is to process a hole passing through the second anode part 32' by drilling or the like, but as in the first embodiment, a groove is machined from the upper surface of the second anode part to the lower side, and the first The hole may be formed by closing the groove with the protrusion of the anode.

At the end of the cooling channel 34', a through hole 322 passing through the bottom of the second anode part 32' is formed, and at a position where the end of the through hole 322 is placed, it is connected to an external refrigerant supply source. The second tube 35' is coupled to the bottom surface of the second anode part 32' by welding or the like.

Accordingly, the refrigerant is supplied through the second tube 35' coupled to the through-hole 322 formed at one end of the cooling channel 34' flows along the cooling channel 34', and then flows to the other side. It returns to the refrigerant supply source through the other second tube 35' through the through hole 322 formed at the end.

According to the configuration of this second embodiment, the second tube 35' is combined with the second anode part 32 and is treated as an integral part, and when assembling, the second anode part 32' is formed in the inner space 11 of the casing. ) is inserted into the insulating structure 36 disposed through the casing 10 when disposed to extend to the outside.

In the configuration of the ion beam generating apparatus of the first and second embodiments as described above, the anode is divided into a first anode part 31 and a second anode part 32 and 32' which are configured separately from each other and are coupled to each other. Consists of.

The first anode part 31 includes an upper surface disposed in a discharge space where ions are generated under a plasma environment, that is, in a discharge space where the cathode and the anode face each other, and the second anode part 32 is placed under the first anode part and the anode Cooling channels (34, 34') for cooling are provided.

Therefore, when cleaning the upper surface of the anode contaminated by various erosions during the operation of the ion beam generator, the cathodes 21 and 22 are separated from the casing 10 and the second anode parts 32 and 32' are When the fastened bolt 312 is loosened, only the first anode part 31 can be removed and washed.

Accordingly, in order to separate the second anode parts 32 and 32' in which the cooling channels 34 and 34' are formed, the support structure 40 supporting the anode is separated and the second tube 35 for supplying the refrigerant is separated. Since only the first anode part 31 can be removed and washed without doing so, the maintenance work of the anode becomes very easy.

In addition, in the first embodiment, the second tube 35 for inflow and outflow of the refrigerant is coupled to the first tube 34 as a cooling channel inserted into the groove in the second anode part 32, and in the second embodiment In the example, since the second tube 35' is coupled to the second anode part 32', after assembling the anode, the second tube is inserted from the bottom to assemble, or the second tube is disassembled before the cathode is disassembled. Since cumbersome work is omitted, disassembly and assembly of the device is facilitated.

As described above, the configuration and operation of the embodiments of the present invention have been described, and the present invention is not limited to the configuration of these embodiments, and various changes, modifications, modifications and additions of components are possible within the scope described in the claims. .

10: casing 21: first negative electrode
22: second negative electrode 31: first positive electrode part
32: second anode part 40: support structure

Claims (6)

A casing having an inner space and an open upper surface and having gas supply holes for supplying gas to the inner space, a cathode disposed on the upper surface of the casing and having an opening through which the casing exposes the inner space, and a cathode in the inner space of the casing An ion beam disposed to be spaced apart from the cathode and configured to include an anode having an upper surface opposite to the lower surface of the cathode, and ionizes gas supplied by an electric field formed by the cathode and an electric field between the anode and the cathode to emit an ion beam through an opening A generating device comprising:
The anode includes a first anode part having the upper surface opposite to the bottom surface of the cathode, and a second anode part provided with a cooling channel through which cooling water flows and disposed under the first anode part,
The first anode part and the second anode part are decomposedly coupled to each other, and an inlet through which the refrigerant flows into the cooling channel through the casing and an outlet through which the refrigerant flows out of the cooling channel are disposed in the second anode part, for maintenance The contamination on the upper surface of the first anode part can be cleaned by separating only the first anode part without separating the second anode part provided with the cooling channel,
Complementary grooves and protrusions are formed on the surfaces of the first anode part and the second anode part facing each other, and the first anode part and the second anode part are aligned with each other by coupling the grooves and the protrusions. Beam generator. delete The method according to claim 1,
The cooling channel is composed of a through hole formed by penetrating the second anode in the longitudinal direction, the ion beam generating device. The method according to claim 1,
A groove extending downward from the surface facing the first anode part is formed in the second anode part in the longitudinal direction, the cooling channel is made of a first tube disposed in the groove, and the first anode part is inserted into the groove The ion beam generating apparatus according to claim 1, wherein the protrusion is provided to close the groove, and the first anode portion and the second anode portion are aligned by the combination of the protrusion and the groove. 5. The method according to claim 3 or 4,
A second tube connected to an external refrigerant supply source is fixedly coupled to the inlet and outlet of the cooling channel. The method according to any one of claims 1, 3, 4,
A positive voltage is applied to the anode and the cathode is grounded to form an electric field between the anode and the cathode, and the cathode consists of a first cathode and a second cathode disposed concentrically with each other, so that the opening between the first cathode and the second cathode is provided, and the opening is disposed above the upper surface of the anode, the ion beam generating device.

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