JPH10217485A - Manufacture of print head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make a hole for printing stably with a high accuracy by a method wherein the hole is made by focusing a laser beam shaped circularly on two superposed working plates, and the working plate on the projected side by the laser beam out of the two plates is attached to the casing of a print head. SOLUTION: Two superposed metallic plates 25, 26 are placed on an XY table. A laser beam outputted from a laser oscillator is shaped into a circular beam by passing it through a beam shaping optical system, reflected by a mirror and projected on two superposed metallic plates 25, 26 by an imaging lens whereby respective tapered holes 27, 28 are made. Molten metal 11 is not adhered to the contact surface between the metallic plates 25, 26 whereby the molten metal 11 is not adhered to the metallic plate 25 where the laser beam is projected and the diameter of the hole 27 made in the metallic plate 25 is smaller than that of the other side, and, therefore, the hole 27 of the metallic plate 25 can be used as an orifice hole as it is.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a print head in which a reversely tapered hole, for example, an orifice hole of an ink jet printer is formed by irradiating a laser beam.

[0002]

2. Description of the Related Art In a head portion of such an ink jet printer, a metal orifice plate 3 having a plurality of orifice holes 2 is bonded to a plurality of ink chambers 1 as shown in FIG.

The partition 4 of each ink chamber 1 is made of PZT.
(Piezoelectric element). When a voltage is applied to the PZT, the partition wall 4 is deformed, and the ink is ejected from the orifice hole 2.

The orifice hole 2 of such an ink-jet printer is formed to have a diameter of about 30 μm, and a metal orifice plate 3 having a thickness of about 50 μm is used.

In manufacturing the metal orifice plate 3, a plating method called an electroforming method shown in FIG. 8 is usually used. This electroforming method uses a plating solution 5 as shown in FIG.
Inside, a part of the electrode 6 is masked with a resist 7,
A metal film 8 is formed in the plating solution 5 as shown in FIG.

The metal film 8 is formed from the exposed portion of the electrode 6 as shown in FIGS. 1B and 1C. The film 8 is formed.

As described above, on the resist film, the resist 7
The metal film 8 grows so as to cover the metal layer, so that a predetermined hole diameter can be obtained by interrupting the plating on the way. After this, FIG.
(e) By removing the resist 7 as shown in (f),
The metal orifice plate (orifice plate) 3 is completed.

[0008] However, in this electroforming method, FIG.
As shown in (1), there is a problem that the curvature is formed in the metal film 8 around the hole, and the diameter of the hole on the surface remote from the electrode 6 becomes large.

For this reason, the thickness of the metal film 8 between the holes becomes thinner due to the increase in the hole diameter, and in the subsequent bonding step of bonding the metal orifice plate 3 to the print head portion, factors such as poor adhesion and ink leakage are caused. Become.

In order to solve such a problem, a method has been proposed in which a laser beam shown in FIG. 9 is condensed by a lens 9 and irradiated on a metal plate 10 to form a hole. However, in the method of making a hole using such a laser beam, the molten metal 11 adheres to the periphery of the hole as shown in FIGS. In addition, the shape of the hole does not become circular, the size of the hole is not uniform, and the accuracy of the hole diameter decreases.

[0011]

As described above, in the electroforming method, a curvature is formed in the metal film 8 around the hole, and the hole diameter on the surface remote from the electrode 6 becomes large. In the method of drilling using a laser beam, the molten metal 11 adheres to the periphery of the hole during the drilling, and the shape of the hole does not become circular or the size of the hole is not uniform. Accuracy decreases. Accordingly, an object of the present invention is to provide a method of manufacturing a print head that can stably form holes for a printer with high accuracy.

[0012]

According to the first aspect of the present invention, at least two processing plates are superimposed, and a laser beam shaped into a circle is formed on the processing plates to form a hole. Then, a method of manufacturing a print head in which the processing plate on the laser beam irradiation side of the two processing plates that have been punched is attached to a print head housing.

According to the second aspect of the present invention, at least two processing plates are superimposed, and laser light shaped into a circular shape is formed on both surfaces of the processing plates to form holes. This is a method of manufacturing a print head in which, among the holes formed in these processing plates, holes formed on the side irradiated with the laser beam are used as ink ejection holes, and each processing plate is attached to a print head housing.

According to a third aspect of the present invention, in the method of manufacturing a print head according to the first or second aspect, the boring process is performed in a state in which the two processing plates that are superimposed on each other are in close contact with each other.

According to a fourth aspect of the present invention, in the method of manufacturing a print head according to the first or second aspect, after forming a laser hole in the processing plate, the surface to be processed of the processing plate is hydrochloric acid, sulfuric acid or phosphoric acid. A deburring process is performed using a system etchant.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION

(1) Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. A method for manufacturing a print head of the present invention,
That is, the method of forming an orifice hole of an ink jet printer is such that two processing plates are superimposed, and a laser beam shaped into a substantially circular shape is imaged on these processing plates to form holes. The processing plate on the laser beam incident side of the two processed processing plates is attached to the print head housing.

In this case, the two processing plates which are superimposed on each other are in close contact with each other, and after laser drilling, the surface to be processed of the processing plate is treated with hydrochloric acid, sulfuric acid or phosphoric acid. A deburring process is performed using a system etchant.

FIG. 1 is a configuration diagram of an orifice hole processing apparatus for realizing such an orifice hole processing method. As the laser oscillator 20, for example, a Q-switched YAG laser having a high peak output and a high pulse repetition number is used.

A beam shaping optical system 21 is arranged on the optical axis of the laser light output from the laser oscillator 20. The beam shaping optical system 21 includes a laser oscillator 20
This is to shape the beam shape of the laser light output from the laser beam into a substantially circular shape.

On the optical axis of the laser beam passing through the beam shaping optical system 21, an image forming lens 23 is
Is arranged. On the other hand, an XY table 24 is provided, and two processing plates, ie, two metal plates 25 and 26 serving as a material of the metal orifice plate 3 of the ink jet printer are superposed on the XY table 24.
Is placed.

These two metal plates 25, 26
It may be adhered, or two sheets may be fixed at the processing point where the image passing through the beam shaping optical system 21 is transferred by the imaging lens 23.

Next, a method for forming an orifice hole using the processing apparatus having the above-described configuration will be described. When the two metal plates 25 and 26 are bonded, for example, X
It is placed on a Y table 24.

When a laser beam such as a YAG laser is output from the laser oscillator 20, the laser beam is shaped into a circular beam by passing through a beam shaping optical system 21.

The laser light is reflected by the mirror 22 and is irradiated by the imaging lens 23 onto the two metal plates 25 and 26 which are superposed. That is, the image that has passed through the beam shaping optical system 21 is transferred by the imaging lens 23 onto the two metal plates 25 and 26 that are superimposed.

By transferring the image of the beam shaping optical system 21 onto each of the metal plates 25 and 26, the metal plates 25 and 26 have tapered holes 27 and 28 as shown in FIG. Are formed to penetrate.

The holes 27 and 28 have a larger taper shape in the hole 27 formed in the metal plate 25 on the laser irradiation side, and a smaller hole 28 formed in the other metal plate 26. .

Thereafter, the XY table 24 sequentially moves in the Y direction, for example, in accordance with the distance between the orifice holes. Each time, the laser beam is output from the laser oscillator 20, and the two metal plates 25 and 26 are tapered in the same manner as described above. Are formed through the holes.

The molten metal 11 adheres to the contact surfaces of the metal plates 25 and 26 among the holes 27 and 28 of the two metal plates 25 and 26 formed in this manner. I haven't.

Thus, when the two metal plates 25 and 26 thus superposed are irradiated with laser light to form the tapered holes 27 and 28, one of the metal plates 25 disposed on the laser irradiation side is formed. It was found that the shape of the hole 27 formed in the hole and the accuracy of the hole diameter became high.

FIG. 3 shows the data of the hole diameter accuracy. Among the two metal plates 25 and 26, the hole diameter variation formed in the metal plate 25 on the laser irradiation side is ± 2.5 μm. In addition, it can be seen that the accuracy is higher than the variation of the hole diameter formed by irradiating a single metal plate with a laser beam ± 12 μm.

Of the holes 27, 28 of the metal plates 25, 25 formed in this manner, what is important as the orifice hole is the accuracy of the tapered shape with the smaller diameter. Then, as described above, each metal plate 25
As shown in FIG. 2B, the molten metal 11 does not adhere to the contact surface portion between the metal plate 25 and the metal plate 25 on the laser irradiation side. The metal 11 does not adhere, and the hole 2
7 is used as an orifice hole.

The metal plate 2 thus laser-processed
The hole 27 of 5 can be used as it is as an orifice hole. However, in order to stabilize the ejection of the ink, the burrs of the molten metal 11 attached around the hole 27 are removed.

The removal of the molten metal burr is performed by weak light etching using a hydrochloric acid, sulfuric acid or phosphoric acid type etching solution. FIG. 2C shows the metal plate 25 after the removal of the molten metal burr.

As described above, in the first embodiment, the two metal plates 25 and 26 are superimposed, and a laser beam shaped into a circle is formed on the metal plates 25 and 26 to form an aperture. Since the metal plate 25 on the side irradiated with the laser beam is employed among the two metal plates 25 and 26 which have been punched, a contact surface portion between the two metal plates 25 and 26 which are superposed. The hole 27 formed in the metal plate 25 on the laser irradiation side, which utilizes the fact that the molten metal 11 does not adhere to the metal plate 25 and can secure the accuracy of the small diameter side of the tapered shape which is important as the orifice hole, is used for the ink jet print head. Can be used as an orifice hole.

With such a method of forming an orifice hole, the orifice hole can be formed stably and with high precision. Further, after laser drilling, burrs of the molten metal 11 adhering to the periphery of the hole 27 can be removed by light etching, and the ink ejection can be stabilized when the ink is used in an ink jet printer. And
An orifice hole with a highly accurate shape can be formed by processing without etching the metal plate 25 itself by light etching. (2) Next, a second embodiment of the present invention will be described with reference to the drawings.

The method of forming an orifice hole of an ink-jet printer to which the method of manufacturing a print head according to the present invention is applied is such that at least two metal plates are overlapped, and each laser formed into a circular shape on both sides of these metal plates. Each hole is formed by forming an image of light, and two metal plates are used as orifice holes, of the holes formed in the metal plate, formed on the side irradiated with the laser beam.

FIG. 4 is a diagram showing a manufacturing process of such an orifice hole. In the first step A, the two metal plates 30 and 31 are superimposed, and each of the metal plates 30 and 31 is irradiated with a laser beam at a different position from the upper and lower directions.

At this time, the two metal plates 30, 31
On the other hand, the irradiation of the laser beam on the metal plate 30 side is performed from above as a right column in the drawing, and the irradiation of the laser beam on the metal plate 31 side is performed from below as a left column in the drawing.

In this case, as the processing device, for example, FIG.
A laser oscillator 32 such as a Q-switched YAG laser is provided on the metal plate 30 side as shown in FIG.
A beam shaping optical system 33 for shaping the beam into a circular shape, a mirror 34, and an imaging lens 35 are arranged on the optical axis of the laser light output from the laser beam 2.

On the other hand, on the metal plate 31 side, similarly to the metal plate 30 side, a laser oscillator 36 such as a Q-switch YAG laser is provided. A beam shaping optical system 37, a mirror 38, and an imaging lens 39 for shaping the lens into a circle are arranged.

As another processing device, a Q switch Y
A laser oscillator such as an AG laser may be provided, the laser light output from the laser oscillator may be branched in two directions, and these laser lights may be applied to the metal plates 30 and 31, respectively.

Then, the metal plates 30, 31 are sequentially moved, for example, by a moving mechanism in accordance with the distance between the orifice holes, and each time, the laser light is output from each of the laser oscillators 32, 36, and the two metal plates 30, 31 are output. Irradiate 31.

When the two metal plates 30 and 31 are irradiated with the respective laser beams, tapered holes are formed in the metal plates 30 and 31 as shown in FIG. .

The molten metal does not adhere to the contact surfaces between the metal plates 30 and 31, and each of the holes formed in the metal plates 30 and 31 on the laser irradiation side is processed.
That is, in one metal plate 30, as shown in step B, the shape of the holes 40 formed in the right column and the hole diameter accuracy are increased.

In the other metal plate 31, the process C
As shown in (1), the shape of the hole 41 formed in the left column and the accuracy of the hole diameter are improved. Therefore, in one metal plate 30, the holes 40 formed in the right column are used as orifice holes, and in the other metal plate 31, the holes 41 formed in the left column are used as orifice holes.

The holes 40 and 41 of the metal plates 30 and 31 thus laser-processed can be used as they are as orifice holes. However, in order to stabilize the ink ejection, the holes 40 and 41 are used. To remove the burrs of the molten metal adhering to the surrounding area.

The removal of the molten metal burr is performed in step D by light etching using a hydrochloric acid, sulfuric acid or phosphoric acid-based etchant as described above. Although FIG. 4 shows only the etching process for the metal plate 31, the etching process is similarly performed for the metal plate 30.

Thereafter, the two etched metal plates 30, 31, for example, the metal plate 31, are adhered to the ink jet print head side 43 as a metal orifice plate 42 as shown in a step E. In this case, the holes 41 of the metal orifice plate 42 are aligned as the orifice holes with the respective ink chambers 44 of the ink jet print head side 43 and bonded.

As described above, in the second embodiment, the two metal plates 30 and 31 are overlapped,
Since each laser beam shaped into a circle is imaged from both sides of these metal plates 30 and 31 and each hole is drilled, not only the same effects as in the first embodiment, but also these effects can be obtained. Of the holes formed in the metal plates 30 and 31, each of the holes 40 and 41 formed on the side irradiated with the laser beam can be used together as orifice holes of the ink jet print head.
31 can be used as a metal orifice plate of an ink jet print head without waste. (3) Next, a third embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIG. 1 are denoted by the same reference numerals.

FIG. 6 is a configuration diagram of an orifice hole processing apparatus to which the orifice hole processing method is applied. Q switch Y
A laser oscillator 20 such as an AG laser is provided, and a beam shaping optical system 21 for shaping a beam shape into a circular shape and two XY deflection mirrors 50 and 51 are provided on an optical axis of laser light output from the laser oscillator 20. And its drive systems 52, 5
3, and an Fθ lens 54 is disposed in the reflection direction of the XY deflection mirrors 50 and 51.

With such a configuration, the laser oscillator 2
When a laser beam such as a YAG laser is output from 0, the laser beam is shaped into a circular beam by passing through the beam shaping optical system 21.

The beam-shaped laser light is deflected by two XY deflecting mirrors 50 and 51, and is further deflected by Fθ.
By transmitting through the lens 54, the beam shaping optical system 2
The image that has passed through 1 is transferred by the imaging lens 23 onto the two superposed metal plates 25 and 26.

By transferring the image of the beam shaping optical system 21 onto each of the metal plates 25 and 26, the metal plates 25 and 26 have tapered holes 27, as shown in FIG. 28 is formed through it.

Subsequently, the two XY deflection mirrors 5
By the drive of 0 and 51 and the combination with the Fθ lens 54, the laser light is sequentially irradiated on the two metal plates 25 and 26 in accordance with the interval between the orifice holes, and the respective tapered holes 27 and 28 are processed and formed. .

In such a laser drilling process, similarly to the above, the molten metal does not adhere to the small-diameter side of the hole formed in the metal plate 25 on the laser irradiation side. Used as an orifice hole.

The metal plate 2 thus laser-processed
The hole 5 can be used as it is as the orifice hole. However, in order to stabilize the ejection of the ink, burrs of the molten metal adhering around the hole are removed.

The removal of the molten metal burr is performed in the same manner as described above.
The etching is performed by light etching using a hydrochloric acid, sulfuric acid or phosphoric acid-based etchant. As described above, in the third embodiment, laser light is scanned and irradiated onto the two metal plates 25 and 26 in combination with the two XY deflection mirrors 50 and 51 and the Fθ lens 54. Therefore, not only the same effects as those of the first embodiment can be obtained, but also it is possible to collectively and speed up the forming of a plurality of holes without having to move the two metal plates 25 and 26.

The present invention is not limited to the first to third embodiments, but may be modified as follows.
For example, although two metal plates are stacked, a plurality of metal plates may be stacked. For example, if three metal plates are superimposed, after irradiating a laser beam, the amount of molten metal burrs adhering to the tapered holes formed in the metal plate located in the middle is set to two metal plates. It can be reduced compared to the case of superposition.

[0059]

As described above, according to the present invention, it is possible to provide a method of manufacturing a print head capable of stably forming a hole for a printer with high precision.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a first embodiment of an orifice hole processing apparatus for realizing a print head manufacturing method according to the present invention.

FIG. 2 is a view showing a manufacturing process of an orifice hole.

FIG. 3 is a diagram showing data of hole diameter accuracy.

FIG. 4 is a view showing a manufacturing process which is a second embodiment of the printer hole processing method according to the present invention.

FIG. 5 is a configuration diagram showing an example of a processing apparatus for realizing the method.

FIG. 6 is a configuration diagram showing a third embodiment of an orifice hole processing apparatus for embodying a method of manufacturing a print head according to the present invention.

FIG. 7 is a configuration diagram of a head portion of the inkjet printer.

FIG. 8 is a diagram showing a manufacturing process of an orifice hole by an electroforming method.

FIG. 9 is a view showing a method of forming a hole using a laser beam.

FIG. 10 is a diagram showing adhesion of a molten metal by a perforation processing method using a laser beam.

[Explanation of symbols]

 20, 32, 36 laser oscillator 21, 33, 37, beam shaping optical system, 23, 35, 39 imaging lens, 24 XY table, 25, 26, 30, 31 metal plate, 50, 51 ... XY deflection mirror, 54 ... Fθ lens.

Claims (4)

[Claims] At least two processing plates are superimposed on each other, a circularly shaped laser beam is formed on these processing plates to form an image, and holes are formed. A method of manufacturing a print head, comprising: mounting a processing plate on the laser beam irradiation side among the processing plates to a print head housing. 2. At least two processing plates are superimposed on each other, laser light shaped into a circle is formed on both surfaces of each of the processing plates, and holes are formed by forming images. A method of manufacturing a print head, wherein the processing plate is attached to a print head housing, with the holes formed on the laser beam irradiation side among the formed holes as ink ejection holes. 3. The method for manufacturing a print head according to claim 1, wherein the boring process is performed in a state in which the two processing plates stacked one on the other are in close contact with each other. 4. After the laser drilling process on the processing plate, a deburring process using a hydrochloric acid, a sulfuric acid, or a phosphoric acid based etching solution is performed on a surface to be processed of the processing plate. 3. The method for manufacturing a print head according to 1 or 2.