JPH10213699A - Ultraviolet irradiation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultraviolet irradiation device which hardly get degradation in light absorption member even though the temperature of the light absorption member elevates fairly high due to absorption of infrared from a flash discharge lamp, and is capable of obtaining long life of use because the damage of reflection member due to adhesion of the degraded material is prevented. SOLUTION: Constituted are a flash discharge lamp 20 emitting light containing ultraviolet, a light reflection member 30 reflecting the ultraviolet in the light emitted from the flash discharge lamp 20 toward an irradiated object W and transmitting infrared and ultraviolet, and a light absorption member 40 absorbing the light having penetrated the light reflection member 30. The light absorption member 40 is constituted of black heat resistive inorganic matter. The black heat resistive inorganic matter constituting the light absorption member 40 is desired to be graphite.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultraviolet irradiation device provided with a flash discharge lamp, and more particularly to an ultraviolet irradiation device suitable as a light source device used for curing a photocurable resin material.

[0002]

2. Description of the Related Art Conventionally, an ultraviolet irradiation device has been used for curing a photocurable resin material. Such an ultraviolet irradiation device includes a lamp house in which a light source lamp that emits light including ultraviolet light and a light reflecting member that reflects light from the light source lamp toward an object to be irradiated are arranged.

[0003] In such an ultraviolet irradiation device, of the light emitted from the light source lamp, it is sufficient that the object to be irradiated is irradiated with ultraviolet light, and other light, particularly infrared light, is basically unnecessary. In addition, since it acts as a heat ray, when it is irradiated on an object to be irradiated, the object to be irradiated may be heated and deteriorated or deformed.
For this reason, as a light reflecting member in the ultraviolet irradiation device, a cold mirror having a function of reflecting necessary ultraviolet light and transmitting unnecessary infrared light and visible light among light emitted from a light source lamp is generally used. Used. This cold mirror has a multilayer interference film formed on the inner surface of a glass base. Also,
When such a cold mirror is used as a light reflecting member, in order to absorb infrared light and visible light transmitted through the light reflecting member, behind the light reflecting member, for example, on the surface of a metal plate such as steel or aluminum. And a light absorbing member on which a coating film made of a black paint is formed. The coating film of this light absorbing member is one in which metal oxides such as iron oxide and chromium oxide are contained in an organic silicone resin.

According to such a configuration, infrared light and visible light emitted from the light source lamp toward the light reflecting member pass through the light reflecting member and are absorbed by the light absorbing member. Irradiated infrared and visible light,
Substantially, only the direct light from the light source lamp is generated, and as a result, the object to be irradiated can be suppressed from being heated.

[0005] Recently, CD (Com)
DVD (Dig) which has attracted attention as a next-generation type optical disk having a storage capacity of 6 to 8 times that of a disc (Dig.
In the manufacturing process of the ital Video Disc, an ultraviolet irradiation device is used. That is, in this DVD, a disk material having a sandwich structure is formed by arranging two disk pieces having an information recording film on at least one side thereof with a gap therebetween and forming a photocurable resin layer (adhesive layer) in the gap. Is manufactured by irradiating the photocurable resin layer of the disk material with ultraviolet rays by an ultraviolet irradiation device to cure the photocurable resin layer.

[0006] In the above DVD manufacturing process, the irradiation of ultraviolet rays to the photo-curable resin layer of the disk material must be performed through the metal deposition film of the disk material. In order to cure, it is necessary to irradiate the disk material with ultraviolet light of considerably high intensity. For this reason, in the DVD manufacturing process, an ultraviolet irradiation device equipped with a flash discharge lamp as a light source lamp is used. The energy intensity per unit time of this flash discharge lamp is 300 times or more as compared with that of the steady light emission lamp having the same rated input power. By using such a flash discharge lamp as a light source lamp, the intensity of the disk material can be improved. The photocurable resin layer can be reliably cured.

[0007]

However, it has been found that the ultraviolet irradiation device provided with the flash discharge lamp has the following problems. The light absorbing member is usually cooled by cooling air from an appropriate cooling air generating means.However, since the flash discharge lamp irradiates very high intensity infrared and visible light in a short time, the light absorbing member The surface temperature rises to a considerably high temperature, and there is a problem that the resin component, which is an organic substance constituting the coating film of the light absorbing member, deteriorates, and as a result, the light absorbing function of the light absorbing member decreases. In addition, a deteriorated product in which the resin component of the coating film of the light absorbing member is scattered due to thermal shock adheres to the outer surface of the light reflecting member, and the attached deteriorated product absorbs infrared rays. There is a problem that the surface of the light reflecting member is locally raised at a position where the object is attached, thereby damaging the multilayer interference film of the light reflecting member, and as a result, the function as a cold mirror is reduced. Due to the above problems, it has been difficult to obtain a long service life in an ultraviolet irradiation device provided with a flash discharge lamp.

The present invention has been made in view of the above circumstances, and has as its object to absorb infrared rays and visible rays from a flash discharge lamp so that the temperature of the light absorbing member is considerably high. Accordingly, it is an object of the present invention to provide an ultraviolet irradiation device in which the light absorbing member is hardly deteriorated even when the light absorbing member is raised, and the reflective member is prevented from being damaged due to the adhesion of the deteriorated material, thereby obtaining a long service life.

[0009]

SUMMARY OF THE INVENTION An ultraviolet irradiation apparatus according to the present invention comprises a flash discharge lamp which emits light containing ultraviolet light, and of the light emitted from the flash discharge lamp, the ultraviolet light is reflected toward an object to be irradiated. And a light reflecting member that transmits infrared light and visible light, and a light absorbing member that is provided behind the light reflecting member and absorbs light transmitted through the light reflecting member. Is characterized by being composed of a black heat-resistant inorganic substance.

[0010] In the ultraviolet irradiation apparatus of the present invention, the black heat-resistant inorganic substance constituting the light absorbing member is preferably graphite.

In the present invention, there is further provided a lamp house for accommodating a flash discharge lamp, a light reflecting member and a light absorbing member, wherein the lamp house is provided with ultraviolet light out of the light emitted from the flash discharge lamp. It is preferable to provide a window member that transmits and absorbs a part of infrared rays and reflects visible light.

[0012]

According to the above construction, even if the temperature of the light absorbing member rises to a considerably high temperature by absorbing infrared light and visible light from the flash discharge lamp, the light absorbing member is hardly deteriorated. In addition, the deteriorated product does not adhere to the light reflecting member or is extremely small. In addition, since the light absorbing member is made of graphite, which is an isotropic carbon crystal, the light absorbing member is hardly deteriorated. Even if oxidized, the oxide is carbon dioxide, and does not solidify and adhere to the light reflecting member at all.

[0013]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory view schematically showing the structure of an example of an ultraviolet irradiation apparatus according to the present invention. In this ultraviolet irradiation device, for example, a flash discharge lamp 20 that emits light containing ultraviolet light is provided in a rectangular box-shaped lamp house 10, and above the flash discharge lamp 20,
Of the light emitted from the flash discharge lamp 20, a light reflecting member 30 that reflects ultraviolet light toward an irradiation object W disposed below the lamp house 10 and transmits infrared light and visible light is provided. A plate-shaped light absorbing member 40 that absorbs light transmitted through the light reflecting member 30 is provided above the light reflecting member 30.

The lamp house 10 has an opening 1 on its lower surface.
1 is formed, and a window member 12 is provided so as to close the opening 11. The window member 12 is formed of a cold filter that transmits ultraviolet light, absorbs a part of infrared light, and reflects visible light. This cold filter is formed by forming a multilayer interference film on the surface of a substrate made of, for example, quartz glass. The light reflecting member 30 is formed of a cold mirror in which a multilayer interference film 32 is formed on an inner surface of a base 31 made of, for example, hard glass.

In the present invention, the light absorbing member 40 is made of a black heat-resistant inorganic substance. As such a black heat-resistant inorganic substance, it is preferable to use graphite. When the light absorbing member 40 is made of graphite, for example, a gas phase method (CVD)
It is preferable that a carbon film made of crystalline carbon is formed by (method). By forming such a carbon film, it is possible to prevent carbon powder from being generated from graphite constituting the light absorbing member 40.

An example of the specifications of the above-mentioned ultraviolet irradiation device is as follows. [Lamp house 10] Dimensions: 220 mm × 470 mm × 160 mm, Material of window member 12: A structure in which a multilayer interference film made of zirconia and magnesium fluoride is formed on the surface of a substrate made of quartz glass, [Flash discharge lamp 20] Enclosure: Xenon, Rated input power: 4 kW, total of four, [Light reflecting member 30] Dimensions: 150 mm × 200 mm × 3 mm, Material of base 31: Borosilicate glass, Material of multilayer interference film 32: Titanium oxide, Silicon oxide [Light absorbing member 40] Material: graphite (carbon film formed on the surface), dimensions: 150 mm x 200 mm x 4 mm

In the ultraviolet irradiation apparatus as described above,
Of the light emitted from the flash discharge lamp 20, the ultraviolet light emitted toward the window member 12 of the lamp house 10 is:
The light passes through the window member 12. The ultraviolet rays radiated toward the light reflecting member 30 are transmitted through the window member 12 of the lamp house 10 after being reflected by the light reflecting member 30. Then, the ultraviolet light transmitted through the window member 12 is applied to the irradiation target W arranged below the lamp house 10.
On the other hand, of the light emitted from the flash discharge lamp 10, infrared light and visible light emitted toward the light reflecting member 30 pass through the light reflecting member 30 and are absorbed by the light absorbing member 40. In addition, part of the infrared radiation emitted toward the window member 12 of the lamp house 10 is part of the infrared ray.
And the remaining infrared rays are transmitted through the window member 12. Further, the window member 12 of the lamp house 10
Is reflected by the window member 12 of the lamp house 10, passes through the light reflecting member 30, and is absorbed by the light absorbing member 40. Here, when a part of the infrared light emitted from the flash discharge lamp 10 passes through the window member 12, the object to be irradiated W is still irradiated with the infrared light. An increase in the temperature of the irradiation target W is sufficiently suppressed. Above, by appropriate cooling air generating means (not shown),
Cooling air flows through the lamp house 10, and the light absorbing member 40 is cooled by the cooling air. Here, the reason why the light absorbing member 40 is cooled is that the light absorbing member 40 absorbs infrared rays and visible light and becomes high temperature to act as a heating element, and radiated heat from the light absorbing member 40 causes the object W to be irradiated. This is to prevent the heating of the. In addition, the window member 12 of the lamp house 10 is also cooled by the cooling air from the above-described cooling air generating means.
Is suppressed by absorbing infrared rays, whereby it is possible to prevent the irradiation target W from being heated by radiant heat from the window member 12.

According to the above-described ultraviolet irradiation device, since the light absorbing member 40 is made of a black heat-resistant inorganic material, the light absorbing member 40 absorbs infrared light and visible light from the flash discharge lamp 20 so that the light absorbing member 40 can be used. Even if the temperature rises to a considerably high temperature, the light absorbing member 40 is hardly deteriorated, and the light reflecting member 30 is damaged because the deteriorated product does not adhere to the light reflecting member 30 or is extremely small. Can be prevented, and as a result, a long service life can be obtained.

Further, by using graphite, which is a crystal of isotropic carbon, as the black heat-resistant inorganic substance constituting the light absorbing member 40, the light absorbing member 40 is hardly deteriorated. In addition, even if the temperature of the light absorbing member 40 rises and is oxidized, the oxide is carbon dioxide, and therefore does not solidify and adhere to the light reflecting member 30 at all. The reflection member 30 can be reliably prevented from being damaged, and as a result,
A longer service life is obtained.

Since the lamp house 10 is provided with the window member 12 which transmits ultraviolet rays and absorbs a part of infrared rays and reflects visible light, the flash discharge lamp 2 is provided.
0 is prevented from directly irradiating the object W with visible light, and the intensity of infrared rays emitted from the flash discharge lamp 20 to the object W is reduced. As a result, the object W Can be further suppressed from being heated.

The embodiment of the ultraviolet irradiation apparatus of the present invention has been described above. However, the present invention is characterized in that the light absorbing member is made of a black heat-resistant inorganic substance. The present invention is not limited to the embodiment, and various configurations can be adopted.

[0022]

According to the ultraviolet irradiation apparatus of the present invention, since the light absorbing member is made of a black heat-resistant inorganic substance, the light absorbing member absorbs infrared rays and visible light from the flash discharge lamp, and thus the light absorbing member is made of a material. Even if the temperature rises to a considerably high temperature, the light absorbing member is hardly deteriorated, and the light reflecting member is prevented from being damaged because the deteriorated product does not adhere to the light reflecting member or is extremely small. Resulting in a long service life.

Further, by using graphite, which is a crystal of isotropic carbon, as the black heat-resistant inorganic substance constituting the light absorbing member, the light absorbing member is hardly deteriorated. Even if the light absorbing member rises in temperature and is oxidized, the oxide is carbon dioxide, so that it does not solidify and adhere to the light reflecting member at all, thereby damaging the light reflecting member. Can be reliably prevented, resulting in a longer service life.

[0024] Further, by providing a window member that transmits ultraviolet rays and absorbs infrared rays and reflects visible light in a lamp house that houses the flash discharge lamp, the light reflecting member and the light absorbing member, The emitted visible light is prevented from directly irradiating the object W, and the intensity of infrared rays emitted from the flash discharge lamp to the object is reduced, and as a result, the object is heated. This can be further suppressed.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing a schematic configuration of an example of an ultraviolet irradiation device of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Lamp house 11 Opening 12 Window member 20 Flash discharge lamp 30 Light reflecting member 31 Base 32 Multilayer interference film 40 Light absorbing member W Irradiated object

Claims (3)

[Claims] 1. A flash discharge lamp that emits light containing ultraviolet light, and a light reflection that reflects ultraviolet light out of light emitted from the flash discharge lamp toward an object to be irradiated and transmits infrared light and visible light. A light absorbing member provided behind the light reflecting member and absorbing light transmitted through the light reflecting member, wherein the light absorbing member is made of a black heat-resistant inorganic material. An ultraviolet irradiation device, characterized in that: 2. The black heat-resistant inorganic substance constituting the light absorbing member is graphite.
3. The ultraviolet irradiation device according to claim 1. 3. A lamp house for accommodating a flash discharge lamp, a light reflecting member and a light absorbing member, wherein the lamp house includes light emitted from the flash discharge lamp.
The ultraviolet irradiation device according to claim 1 or 2, further comprising a window member that transmits ultraviolet light and absorbs a part of infrared light to reflect visible light.