JPH10203842A - Production of optical fiber base material - Google Patents

Production of optical fiber base material

Info

Publication number
JPH10203842A
JPH10203842A JP10008392A JP839298A JPH10203842A JP H10203842 A JPH10203842 A JP H10203842A JP 10008392 A JP10008392 A JP 10008392A JP 839298 A JP839298 A JP 839298A JP H10203842 A JPH10203842 A JP H10203842A
Authority
JP
Japan
Prior art keywords
gas
optical fiber
natural gas
quartz tube
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10008392A
Other languages
Japanese (ja)
Inventor
Shoken Go
承憲 呉
Chinkan Kin
鎭漢 金
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of JPH10203842A publication Critical patent/JPH10203842A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
    • C03B37/01815—Reactant deposition burners or deposition heating means
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
    • C03B2207/38—Fuel combinations or non-standard fuels, e.g. H2+CH4, ethane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

PROBLEM TO BE SOLVED: To perform improvement of quality and reduction in cost by heating a silica tube with a heat source generating a small amount of water component. SOLUTION: A natural gas 24 is charged to a burner 20 for heating a silica tube 10 in a flow rate of 60-70(L/min) by gas flow rate-regulating part 26b controlled by computer controlling part 28, and oxygen 22 is charged in an amount capable of completely burning the natural gas by the gas flow rate- regulating part 26a. One of LNG, LPG, methane gas and propane gas is used as the natural gas 24 for enabling the deposition and shrinking efficiency of the silica tube 10 to be increased by using the flow rate as small as it can and by using the smaller flow rate of the natural gas.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は光ファイバ母材製造
方法に係り、特に、ＭＣＶＤ法の石英管加熱手法に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an optical fiber preform, and more particularly to a quartz tube heating method of the MCVD method.

【０００２】[0002]

【従来の技術】現在では、石英を主材料とし、屈折制御
のために燐やゲルマニウムなどの酸化物を混入した石英
系光ファイバが広く用いられている。その光ファイバの
母材製造方法には、ＭＣＶＤ法(modified chemical vap
our deposition)、ＶＡＤ法(vapour phase axial depos
ition)、ＯＶＤ法(outside vapor phase deposition)が
あり、高品質を得やすいＭＣＶＤ法が主に用いられてい
る。2. Description of the Related Art At present, quartz optical fibers containing quartz as a main material and containing an oxide such as phosphorus or germanium for controlling refraction are widely used. The optical fiber preform manufacturing method includes an MCVD method (modified chemical vap).
our deposition), VAD method (vapour phase axial depos
), OVD method (outside vapor phase deposition), and the MCVD method that easily obtains high quality is mainly used.

【０００３】図１に示すようにＭＣＶＤ法は、石英管１
０の両端をガラス旋盤５０のチャック５２に固定させ、
その石英管１０の内部に原料ガス供給系５６から、酸素
を利用してＳｉＣｌ4、ＧｅＣｌ4、適正量の添加物質か
ら組成された原料ガスを輸送する。そして、石英管５０
を回転させながら、熱源として水素及び酸素を供給する
バーナー２０で石英管１０を加熱することにより石英管
１０の内部に高温領域(hot zone)を形成し、該高温領域
で原料ガスを反応させて粒子化する。このときの反応式
はＳｉＣｌ4＋Ｏ2→ＳｉＯ2＋２Ｃｌ2，ＧｅＣｌ4＋Ｏ2
→ＧｅＯ2＋２Ｃｌ2である。反応後の粒子は、高温領域
よりも先の温度の低い石英管１０の内側面に付着する。
この反応を実施しつつバーナー２０を原料ガス１２の流
れ方向へ適正速度で移動させると、石英管１０の内側面
に徐々に粒子が付着していく。またこのときに、バーナ
ー２０の通過部分はその高熱によって付着粒子が焼結(s
intering)し、ガラス状に変換される。[0003] As shown in FIG.
0 are fixed to the chuck 52 of the glass lathe 50,
A source gas composed of SiCl 4 , GeCl 4 , and an appropriate amount of an additive is transported from the source gas supply system 56 into the quartz tube 10 using oxygen. And the quartz tube 50
By rotating the quartz tube 10 with a burner 20 that supplies hydrogen and oxygen as a heat source, a high temperature zone (hot zone) is formed inside the quartz tube 10 and the source gas is reacted in the high temperature region. Particles. The reaction formula at this time is SiCl 4 + O 2 → SiO 2 + 2Cl 2 , GeCl 4 + O 2
→ GeO 2 + 2Cl 2 . The particles after the reaction adhere to the inner surface of the quartz tube 10 having a lower temperature than the high temperature region.
When the burner 20 is moved at an appropriate speed in the flow direction of the raw material gas 12 while performing this reaction, particles gradually adhere to the inner surface of the quartz tube 10. At this time, the passing portion of the burner 20 causes the adhered particles to sinter (s
intering) and converted to a glassy state.

【０００４】光ファイバ母材では、上記反応によって石
英管１０の内側面にクラッド層を形成した後、原料ガス
の成分を変えてコア層を形成する。そして、石英管１０
の外側から２３００℃以上で加熱して石英管１０を収縮
させるコラプス(collapse)過程を経た後、クローズ(clo
se)過程を行うことにより、光ファイバ母材は製造され
る。In the optical fiber preform, after forming a cladding layer on the inner surface of the quartz tube 10 by the above reaction, a core layer is formed by changing the components of the raw material gas. And the quartz tube 10
After a collapse process in which the quartz tube 10 is shrunk by being heated at 2300 ° C. or more from the outside, the quartz tube 10 is closed.
The optical fiber preform is manufactured by performing the process (se).

【０００５】[0005]

【発明が解決しようとする課題】上記のような光ファイ
バ母材製造方法において、石英管を加熱する熱源のバー
ナーは水素と酸素を利用している。したがって、バーナ
ーによる石英管加熱過程で水素と酸素の反応からかなり
の水が発生し、製造設備に錆びが発生して寿命に影響す
る。また、発生する水が多いと、石英管表面の水酸基
（ＯＨ-）含有量を増加させるので、光ファイバの伝送
損失にも影響してくる。さらに、水素は高価なので高コ
ストであるし、爆発の危険性から取り扱いにも注意を要
する。In the above optical fiber preform manufacturing method, a burner as a heat source for heating the quartz tube uses hydrogen and oxygen. Therefore, during the heating of the quartz tube by the burner, considerable water is generated from the reaction between hydrogen and oxygen, and rust is generated in the manufacturing equipment, which affects the life. Further, when a large amount of water is generated, the hydroxyl group (OH − ) content on the surface of the quartz tube is increased, which also affects the transmission loss of the optical fiber. Furthermore, hydrogen is expensive and therefore expensive, and requires careful handling due to the danger of explosion.

【０００６】[0006]

【課題を解決するための手段】水の発生を抑制するため
に本発明では、天然ガスを熱源に使用する光ファイバ母
材製造方法とする。これにより、水酸基（ＯＨ-）を最
小限に抑え、より安価な天然ガスの使用でコストを減ら
すものである。また天然ガスは、水素に比べ危険性が少
なく取り扱いが容易である。SUMMARY OF THE INVENTION In order to suppress the generation of water, the present invention provides a method for manufacturing an optical fiber preform using natural gas as a heat source. This minimizes hydroxyl groups (OH − ) and reduces costs by using cheaper natural gas. Natural gas is less dangerous than hydrogen and is easier to handle.

【０００７】より具体的には、ＭＣＶＤ法による光ファ
イバ母材製造方法において、光ファイバ母材となる石英
管の内部に原料ガスを送りつつ、ガス流量制御部により
流量を調整して酸素及び天然ガスを熱源に供給し加熱す
ることにより、前記石英管の内壁にクラッド層及びコア
層を形成する過程と、該コア層形成後の石英管を、前記
ガス流量制御部により流量を調整して酸素及び天然ガス
を熱源に供給し加熱することにより、収縮させる過程
と、を実施することを特徴とする。クラッド層及びコア
層を形成する過程では、天然ガスの流量を６０〜７０リ
ットル／分に調整して熱源に供給する。このときの酸素
は、天然ガスを完全燃焼させられる流量に調整して熱源
に供給する。また、コア層形成後の石英管を収縮させる
過程では、天然ガスの流量を１００リットル／分に調整
して熱源に供給する。More specifically, in a method for manufacturing an optical fiber preform by the MCVD method, while feeding a raw material gas into a quartz tube serving as an optical fiber preform, the flow rate is adjusted by a gas flow rate control unit to control oxygen and natural gas. The process of forming a clad layer and a core layer on the inner wall of the quartz tube by supplying a gas to a heat source and heating the same, and adjusting the flow rate of the quartz tube after the core layer is formed by the gas flow control unit so that And shrinking by supplying natural gas to a heat source and heating the heat source. In the process of forming the clad layer and the core layer, the flow rate of the natural gas is adjusted to 60 to 70 l / min and supplied to the heat source. The oxygen at this time is adjusted to a flow rate at which natural gas can be completely burned and supplied to the heat source. In the process of shrinking the quartz tube after the core layer is formed, the flow rate of natural gas is adjusted to 100 liter / min and supplied to the heat source.

【０００８】[0008]

【発明の実施の形態】以下、本発明の実施形態につき添
付図面を参照して詳細に説明する。Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

【０００９】図２は、図１のようなＭＣＶＤ法のバーナ
ー２０部分を拡大して示した説明図である。図２に示す
ように、熱源のバーナー２０に天然ガス２４を供給する
ようにしている。FIG. 2 is an explanatory view showing an enlarged view of the burner 20 of the MCVD method as shown in FIG. As shown in FIG. 2, the natural gas 24 is supplied to the burner 20 as a heat source.

【００１０】石英管１０はガラス旋盤５０のチャック５
２によって両端を固定されている。その石英管１０の内
部へ原料ガス供給系５２から、酸素をキャリアとしてＳ
ｉＣｌ4、ＧｅＣｌ4、ＰＯＣｌ3、フレオン(freon)など
の適正量の添加物質から組成された原料ガス１２を流
す。そして、石英管５０を５０ｒｐｍで回転させながら
バーナー２０により加熱し、高温領域１４を形成する。The quartz tube 10 is a chuck 5 of a glass lathe 50.
Both ends are fixed by 2. From the raw material gas supply system 52 to the inside of the quartz tube 10, oxygen is used as a carrier and S
A source gas 12 composed of an appropriate amount of an additive substance such as iCl 4 , GeCl 4 , POCl 3 , freon, etc. is flowed. Then, the quartz tube 50 is heated by the burner 20 while rotating at 50 rpm to form the high temperature region 14.

【００１１】バーナー２０は石英管１０を表面温度１９
００℃程度に加熱するものであるが、その際、コンピュ
ータ制御部２８に従うガス流量制御部２６ｂにより、天
然ガス２４は６０〜７０（リットル／分）の流量で供給
され、また、コンピュータ制御部２８に従うガス流量制
御部２６ａにより、酸素２２は天然ガス２４を完全燃焼
させる量だけ供給される。このように天然ガス２４はで
きるだけ流量を少なくしてあり、その少ない流量で石英
管１０の蒸着や収縮効率を高めるために、液化天然ガス
（ＬＮＧ）、液化石油ガス（ＬＰＧ）、特に、メタンガ
ス、プロパンガスのいずれかを使用する。The burner 20 sets the quartz tube 10 at a surface temperature 19.
At this time, the natural gas 24 is supplied at a flow rate of 60 to 70 (liter / minute) by the gas flow control unit 26b according to the computer control unit 28. The oxygen 22 is supplied in such an amount as to completely burn the natural gas 24 by the gas flow control unit 26a according to the following. As described above, the flow rate of the natural gas 24 is reduced as much as possible. In order to increase the efficiency of vapor deposition and shrinkage of the quartz tube 10 at the low flow rate, liquefied natural gas (LNG), liquefied petroleum gas (LPG), particularly methane gas, Use any of the propane gases.

【００１２】このバーナー２０を熱源として石英管１０
の長手方向に適切な速度で移動させることにより高温領
域１４を移動させ、前述のようにしてクラッド層１６と
コア層１８を形成していく。Using the burner 20 as a heat source, the quartz tube 10
By moving the high-temperature region 14 in the longitudinal direction at an appropriate speed, the clad layer 16 and the core layer 18 are formed as described above.

【００１３】その後は、原料ガス供給系５６からＣ
ｌ2、Ｏ2を石英管１０へ送り、そして、ガス流量制御部
２６ｂの制御により天然ガス２４を１００（リットル／
分）の流量でバーナー２０へ供給する。これによる最適
条件で、バーナー２０は２２５０〜２３５０℃の温度を
保持しつつ、石英管１０の長手方向に毎分８ｃｍの速度
で移動し、石英管１０の内径が２〜３ｍｍとされる。こ
のときに、石英管１０の内部圧力は１.１気圧で一定に
保持する。なお、バーナー２０は、石英管１０へ送る原
料ガス１２の成分によっては毎分４ｃｍや毎分１.５ｃ
ｍの速度で移動させることもできる。Thereafter, C is supplied from the raw material gas supply system 56 to C
l 2 and O 2 are sent to the quartz tube 10 and the natural gas 24 is controlled to 100 (liter / liter) under the control of the gas flow controller 26b.
Minute) to the burner 20. Under the optimum conditions, the burner 20 moves at a speed of 8 cm per minute in the longitudinal direction of the quartz tube 10 while maintaining the temperature of 2250 to 2350 ° C., and the inner diameter of the quartz tube 10 is set to 2 to 3 mm. At this time, the internal pressure of the quartz tube 10 is kept constant at 1.1 atm. Note that the burner 20 may be 4 cm / min or 1.5 c / min depending on the composition of the raw material gas 12 sent to the quartz tube 10.
It can also be moved at a speed of m.

【００１４】次いで、反対側から石英管１０の端部を長
く加熱して完全に密封した後、石英管１０を３０ｒｐｍ
で回転させながらバーナー２０を毎分０.８ｃｍの速度
で徐々に移動させる最適条件で石英管１０全体を完全に
収縮させ、光ファイバ母材が製造される。Next, after heating the end of the quartz tube 10 from the opposite side for a long time to completely seal it, the quartz tube 10 is cooled to 30 rpm.
The entirety of the quartz tube 10 is completely shrunk under the optimal conditions in which the burner 20 is gradually moved at a speed of 0.8 cm per minute while rotating at a speed of, and an optical fiber preform is manufactured.

【００１５】以上の過程で製造された光ファイバ母材の
表面には炭素成分と硫黄成分が残る場合も考えられ、従
来ではこれが問題となって天然ガスの使用はできなかっ
た。本実施形態ではこれを、上記のような天然ガス及び
酸素の供給条件により天然ガスの完全燃焼を実現するこ
とで解決し、また、炭素成分と硫黄成分が残った場合で
もフッ酸エッチングにより除去することで解決する。It is considered that a carbon component and a sulfur component may remain on the surface of the optical fiber preform manufactured in the above process, and this has been a problem so far, and natural gas cannot be used. In the present embodiment, this is solved by realizing complete combustion of the natural gas under the supply conditions of the natural gas and oxygen as described above, and even if the carbon component and the sulfur component remain, they are removed by hydrofluoric acid etching. To solve it.

【００１６】[0016]

【発明の効果】本発明によれば、熱源に天然ガスを使用
するようにしたことにより、ガス費用を１／５ほどに減
らすことができ、光ファイバ母材の製造コストを節減し
且つ製造時間も短縮させることができるうえ、取り扱い
も容易となる。また、従来の酸素／水素バーナーのよう
な点火時の爆発音がなくなるので快適な作業環境を具現
することができ、さらに、水の発生が抑えられて設備の
劣化を防止することができる。そして、石英管表面の水
酸基含有量が最小限に抑えられ、光ファイバの伝送損失
を良好に保つことができる。According to the present invention, by using natural gas as the heat source, the gas cost can be reduced to about 1/5, the production cost of the optical fiber preform can be reduced, and the production time can be reduced. Can be shortened, and handling becomes easy. Further, since the explosion sound at the time of ignition as in a conventional oxygen / hydrogen burner is eliminated, a comfortable working environment can be realized, and furthermore, the generation of water can be suppressed and the deterioration of the equipment can be prevented. Then, the hydroxyl group content on the surface of the quartz tube is minimized, and the transmission loss of the optical fiber can be kept good.

【図面の簡単な説明】[Brief description of the drawings]

【図１】ＭＣＶＤ法による光ファイバ母材製造過程の説
明図。FIG. 1 is an explanatory diagram of an optical fiber preform manufacturing process by an MCVD method.

【図２】本発明の光ファイバ母材製造方法を示した説明
図。FIG. 2 is an explanatory view showing a method for producing an optical fiber preform according to the present invention.

【符号の説明】[Explanation of symbols]

１０ 石英管 １２ 原料ガス １４ 高温領域（ホットゾーン） １６ クラッド層 １８ コア層 ２０ バーナー ２２ 酸素 ２４ 天然ガス ２６ａ，２６ｂ ガス流量制御部 ２８ コンピュータ制御部 DESCRIPTION OF SYMBOLS 10 Quartz tube 12 Source gas 14 High temperature area (hot zone) 16 Cladding layer 18 Core layer 20 Burner 22 Oxygen 24 Natural gas 26a, 26b Gas flow control unit 28 Computer control unit

Claims (10)

【特許請求の範囲】[Claims] 【請求項１】 光ファイバ母材となる石英管を加熱する
熱源に天然ガスを使用するようにしたことを特徴とする
光ファイバ母材製造方法。1. A method for manufacturing an optical fiber preform, wherein natural gas is used as a heat source for heating a quartz tube serving as an optical fiber preform. 【請求項２】 天然ガスとして液化天然ガス又は液化石
油ガスを用いる請求項１記載の光ファイバ母材製造方
法。2. The optical fiber preform manufacturing method according to claim 1, wherein liquefied natural gas or liquefied petroleum gas is used as the natural gas. 【請求項３】 天然ガスとしてメタンガス又はプロパン
ガスを用いる請求項１記載の光ファイバ母財製造方法。3. The method according to claim 1, wherein methane gas or propane gas is used as natural gas. 【請求項４】 ＭＣＶＤ法による光ファイバ母材製造方
法において、 光ファイバ母材となる石英管の内部に原料ガスを送りつ
つ、ガス流量制御部により流量を調整して酸素及び天然
ガスを熱源に供給し加熱することにより、前記石英管の
内壁にクラッド層及びコア層を形成する過程と、該コア
層形成後の石英管を、前記ガス流量制御部により流量を
調整して酸素及び天然ガスを熱源に供給し加熱すること
により、収縮させる過程と、を実施するようにしたこと
を特徴とする光ファイバ母材製造方法。4. A method for producing an optical fiber preform by an MCVD method, wherein a raw material gas is fed into a quartz tube serving as an optical fiber preform, and a flow rate is adjusted by a gas flow rate control unit to supply oxygen and natural gas to a heat source. By supplying and heating, a step of forming a clad layer and a core layer on the inner wall of the quartz tube, and adjusting the flow rate of the quartz tube after the core layer is formed by the gas flow rate control unit to reduce oxygen and natural gas. A process of contracting by supplying to a heat source and heating, thereby performing an optical fiber preform manufacturing method. 【請求項５】 天然ガスとして液化天然ガス又は液化石
油ガス、あるいはメタンガス又はプロパンガスのいずれ
かを用いる請求項４記載の光ファイバ母材製造方法。5. The method for producing an optical fiber preform according to claim 4, wherein one of liquefied natural gas or liquefied petroleum gas, methane gas and propane gas is used as the natural gas. 【請求項６】 クラッド層及びコア層を形成する過程
で、天然ガスの流量を６０〜７０リットル／分に調整し
て熱源に供給する請求項４又は請求項５記載の光ファイ
バ母材製造方法。6. The method for producing an optical fiber preform according to claim 4, wherein in the step of forming the clad layer and the core layer, the flow rate of the natural gas is adjusted to 60 to 70 l / min and supplied to the heat source. . 【請求項７】 コア層形成後の石英管を収縮させる過程
で、天然ガスの流量を１００リットル／分に調整して熱
源に供給する請求項６記載の光ファイバ母材製造方法。7. The method of manufacturing an optical fiber preform according to claim 6, wherein in the step of shrinking the quartz tube after forming the core layer, the flow rate of the natural gas is adjusted to 100 liter / min and supplied to the heat source. 【請求項８】 クラッド層及びコア層を形成する過程
で、天然ガスを完全燃焼させられる流量に調整して酸素
を熱源に供給する請求項４〜７のいずれか１項に記載の
光ファイバ母材製造方法。8. The optical fiber mother according to claim 4, wherein in the step of forming the cladding layer and the core layer, the flow rate of the natural gas is adjusted to a value at which the natural gas can be completely burned, and oxygen is supplied to the heat source. Material manufacturing method. 【請求項９】 熱源の温度を２２５０〜２３５０℃に維
持するとともに毎分８cm、４cm又は１．５cmのいずれか
の速度で移動させながら石英管を収縮させる請求項４〜
８のいずれか１項に記載の光ファイバ母材製造方法。9. The quartz tube is shrunk while maintaining the temperature of the heat source at 2250-2350 ° C. and moving at a speed of 8 cm, 4 cm or 1.5 cm per minute.
9. The method for producing an optical fiber preform according to any one of items 8 to 8. 【請求項１０】 コア層形成後の石英管を収縮させる過
程で、石英管を３０ｒｐｍで回転させながら熱源を毎分
０．８cmの速度で移動させて前記石英管内部を密閉する
請求項４〜９のいずれか１項に記載の光ファイバ母材製
造方法。10. A process for shrinking the quartz tube after the core layer is formed, wherein the heat source is moved at a speed of 0.8 cm per minute while rotating the quartz tube at 30 rpm to seal the inside of the quartz tube. 10. The method for producing an optical fiber preform according to any one of items 9 to 9.
JP10008392A 1997-01-20 1998-01-20 Production of optical fiber base material Pending JPH10203842A (en)

Applications Claiming Priority (2)

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KR1997P1473 1997-01-20
KR1019970001473A KR100288739B1 (en) 1997-01-20 1997-01-20 Optical preform manufacturing method

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JP4742429B2 (en) * 2001-02-19 2011-08-10 住友電気工業株式会社 Method for producing glass particulate deposit
KR100398070B1 (en) * 2001-10-30 2003-09-19 엘지전선 주식회사 Water bocking method in the interfacing surface during the joining of core and clad
KR100490135B1 (en) * 2001-11-12 2005-05-17 엘에스전선 주식회사 Method of making optical fiber preform having ultimate low PMD
US20050180723A1 (en) * 2004-02-12 2005-08-18 Panorama Flat Ltd. Apparatus, method, and computer program product for structured waveguide including holding bounding region
US20050180675A1 (en) * 2004-02-12 2005-08-18 Panorama Flat Limited, A Western Australia Corporation Apparatus, method, and computer program product for structured waveguide including performance_enhancing bounding region
US20050180722A1 (en) * 2004-02-12 2005-08-18 Panorama Flat Ltd. Apparatus, method, and computer program product for structured waveguide transport
CN104129915A (en) * 2014-08-18 2014-11-05 苏州新协力环保科技有限公司 Novel manufacturing method of optical fiber performs

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US4230472A (en) * 1979-02-22 1980-10-28 Corning Glass Works Method of forming a substantially continuous optical waveguide
JPS5614443A (en) * 1979-07-17 1981-02-12 Nippon Telegr & Teleph Corp <Ntt> Manufacture of preform for optical fiber
US4280829A (en) * 1980-05-12 1981-07-28 Corning Glass Works Apparatus for controlling internal pressure of a bait tube
US4310339A (en) * 1980-06-02 1982-01-12 Corning Glass Works Method and apparatus for forming an optical waveguide preform having a continuously removable starting member
JPS60122740A (en) * 1983-12-07 1985-07-01 Furukawa Electric Co Ltd:The Manufacture of soot for optical fiber
JPS6117432A (en) * 1984-07-02 1986-01-25 Sumitomo Electric Ind Ltd Manufacture of optical fiber preform
JP3118822B2 (en) * 1990-09-07 2000-12-18 住友電気工業株式会社 Method for manufacturing glass articles
US5397372A (en) * 1993-11-30 1995-03-14 At&T Corp. MCVD method of making a low OH fiber preform with a hydrogen-free heat source

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GB2321243B (en) 1999-08-25
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FR2758549A1 (en) 1998-07-24
DE19800935A1 (en) 1998-07-30
GB2321243A (en) 1998-07-22
CN1195110A (en) 1998-10-07
KR100288739B1 (en) 2001-05-02
FR2758549B1 (en) 1999-10-08

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