JPH10203809A - Aluminum nitride powder improved in fluidity - Google Patents
Aluminum nitride powder improved in fluidityInfo
- Publication number
- JPH10203809A JPH10203809A JP9006359A JP635997A JPH10203809A JP H10203809 A JPH10203809 A JP H10203809A JP 9006359 A JP9006359 A JP 9006359A JP 635997 A JP635997 A JP 635997A JP H10203809 A JPH10203809 A JP H10203809A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- nitride powder
- fluidity
- powder
- modifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、窒化アルミニウム
粉末又は窒化アルミニウム粉末を燐酸化合物で処理した
後、流動性改質剤を添加し、流動性が改良された窒化ア
ルミニウム粉末に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an aluminum nitride powder having improved fluidity by treating an aluminum nitride powder or an aluminum nitride powder with a phosphate compound and then adding a fluidity modifier.
【０００２】[0002]
【従来の技術】半導体デバイス、ＩＣ等の半導体素子は
パッケージにより外部より保護されている。そのパッケ
ージとしては、高分子材料が使用されており、高分子材
料自身は熱伝導性が低いため、半導体素子を使用した回
路から発生した熱を外部に放散・除去を行うため、熱伝
導性に優れた無機微粒子（シリカ、窒化ほう素、窒化ア
ルミニウム等）を樹脂用のフィラーとして使用してい
る。近年、より高い熱伝導性を有する窒化アルミニウム
粉末がフィラーとして用いられるようになってきた。し
かし、窒化アルミニウム粉末は無機物であるために樹脂
との馴染みが悪い上に、流動性も悪いので、樹脂に均一
に分散させることが困難である。2. Description of the Related Art Semiconductor devices such as semiconductor devices and ICs are protected from the outside by a package. The package is made of a polymer material, which has a low thermal conductivity.Hence, the heat generated from the circuit using the semiconductor element is radiated and removed to the outside. Excellent inorganic fine particles (silica, boron nitride, aluminum nitride, etc.) are used as filler for resin. In recent years, aluminum nitride powder having higher thermal conductivity has been used as a filler. However, since aluminum nitride powder is an inorganic substance, it has poor compatibility with a resin, and also has poor fluidity, so that it is difficult to uniformly disperse the powder in the resin.
【０００３】また、窒化アルミニウム粉末は空気中の水
分で加水分解し、水酸化アルミニウムとアンモニアを生
成し、本来の特性である熱伝導性を損なうので、加水分
解を抑制する必要がある。その一つの方法として、燐酸
化合物で表面を処理し、窒化アルミニウム粉末に加水分
解を抑制（以下、耐水性と記す）する（特願平８−２８
６７８０号公報）方法が開示されている。この方法によ
り樹脂用フィラーとして広く応用できる。しかし、燐酸
化合物で処理をすると、表面状態が変化し、未処理のも
のと比べると流動性が著しく低下してしまう。そのた
め、樹脂との混練時、窒化アルミニウム粉末が凝集体を
形成し樹脂に均一に分散させることが困難である。例え
ば、そのため、窒化アルミニウム粉末を樹脂と混練する
際、篩で分級しながら混練することが必要となり、工程
が増えコストアップにつながる。[0003] Further, aluminum nitride powder is hydrolyzed by moisture in the air to produce aluminum hydroxide and ammonia, which impairs the original property of thermal conductivity. Therefore, it is necessary to suppress the hydrolysis. As one of the methods, the surface is treated with a phosphoric acid compound to suppress hydrolysis of the aluminum nitride powder (hereinafter referred to as water resistance) (Japanese Patent Application No. 8-28).
No. 6780). This method can be widely applied as a resin filler. However, when treated with a phosphate compound, the surface state changes and the fluidity is significantly reduced as compared with the untreated one. Therefore, at the time of kneading with the resin, it is difficult for the aluminum nitride powder to form an aggregate and to be uniformly dispersed in the resin. For example, therefore, when kneading aluminum nitride powder with a resin, it is necessary to knead the aluminum nitride powder while classifying it with a sieve, which increases the number of steps and leads to an increase in cost.
【０００４】[0004]
【発明が解決しようとする課題】本発明の目的は、窒化
アルミニウム粉末が凝集体を形成することなく、樹脂中
に均一に分散することができる流動性を改良した窒化ア
ルミニウム粉末を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide an aluminum nitride powder having improved fluidity, which allows the aluminum nitride powder to be uniformly dispersed in a resin without forming an aggregate. is there.
【０００５】[0005]
【課題を解決するための手段】本発明者らは、鋭意検討
を重ねた結果、窒化アルミニウム粉末にある種の流動性
改質剤を混合することによって、窒化アルミニウム粉末
の流動性を向上させるとともに樹脂への分散性が向上す
ることを見いだし本発明の完成に至った。 すなわち、
本発明は窒化アルミニウム粉末と流動性改質剤を混合し
てなる流動性が改良された窒化アルミニウム粉末、又は
窒化アルミニウム粉末を燐酸化合物で処理した後、流動
性改質剤を混合してなる流動性が改良された窒化アルミ
ニウム粉末に関する。Means for Solving the Problems As a result of intensive studies, the present inventors have improved the fluidity of aluminum nitride powder by mixing a certain fluidity modifier with aluminum nitride powder. The inventors have found that the dispersibility in a resin is improved, and have completed the present invention. That is,
The present invention relates to an aluminum nitride powder having improved fluidity obtained by mixing an aluminum nitride powder and a fluidity modifier, or a fluidized fluid obtained by treating an aluminum nitride powder with a phosphate compound and then mixing the fluidity modifier. The present invention relates to an aluminum nitride powder having improved properties.
【０００６】[0006]
【発明の実施の形態】以下、本発明を詳細に説明する。
本発明で用いる窒化アルミニウム粉末は通常用いられる
窒化アルミニウム粉末である。例えば、これの製造方法
の一例としては、アルキルアルミニウムとアンモニアを
反応させた後、加熱する気相法、アルミナと炭素の混合
物を窒素中で加熱するアルミナ還元法等の方法で製造し
た窒化アルミニウム粉末が用いられる。ここで用いる窒
化アルミニウム粉末の粒度としては、平均粒径が０．１
〜４μｍが好ましい。BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described in detail.
The aluminum nitride powder used in the present invention is a commonly used aluminum nitride powder. For example, as an example of the production method, aluminum nitride powder produced by a method such as a gas phase method in which alkyl aluminum is reacted with ammonia and then heating, or an alumina reduction method in which a mixture of alumina and carbon is heated in nitrogen is used. Is used. As the particle size of the aluminum nitride powder used here, the average particle size is 0.1
４4 μm is preferred.
【０００７】本発明でいうところの窒化アルミニウム粉
末を燐酸化合物で処理するとは、窒化アルミニウム粉末
と燐酸化合物を接触させ、窒化アルミニウム粉末に耐水
性を付与する操作である。この操作方法としては、例え
ば窒化アルミニウム粉末を燐酸化合物溶液中で分散させ
る方法や燐酸化合物溶液を窒化アルミニウム粉末にまぶ
し練り込みペースト状にする方法（特願平８−２８６７
８０号公報）等が挙げられる。The treatment of the aluminum nitride powder with a phosphate compound in the present invention is an operation of bringing the aluminum nitride powder into contact with the phosphate compound to impart water resistance to the aluminum nitride powder. As the operation method, for example, a method of dispersing aluminum nitride powder in a phosphate compound solution or a method of spraying and kneading the phosphate compound solution on aluminum nitride powder to form a paste (Japanese Patent Application No. 8-2867)
No. 80 publication).
【０００８】本発明でいう燐酸化合物とは、窒化アルミ
ニウム粉末表面のアルミニウムと反応して燐酸アルミニ
ウム結合（Ａｌ−Ｏ−Ｐ結合）を形成し、最終的には窒
化アルミニウムを燐酸アルミニウムの層で被覆する能力
を有する燐酸化合物を意味する。例えば、オルソ燐酸、
メタ燐酸、ピロ燐酸、ポリ燐酸、ホスホン酸等の無機燐
酸化合物やメチルアシッドホスフェート、エチルアシッ
ドホスフェート、ブチルアシッドホスフェート、２−エ
チルヘキシルアシッドホスフェート、ラウリルアシッド
ホスフェート、パルミチルアシッドホスフェート、ステ
アリルアシッドホスフェート、オレイルアシッドホスフ
ェート、フェニルアシッドホスフェート、ノニルフェニ
ルアシッドホスフェート等の酸性燐酸エステル類、ジ−
２−エチルヘキシルピロホスフェート等のピロ燐酸又は
ポリ燐酸のモノ若しくはジアルキル、アルケニル又はア
リールエステル類、メチレンホスホン酸、アミノメチレ
ンホスホン酸等のホスホン酸類及びそのエステル類等の
有機燐酸化合物等がその例として挙げられる。また、こ
れらの燐酸化合物の混合物を用いてもかまわない。In the present invention, the phosphoric acid compound reacts with aluminum on the surface of the aluminum nitride powder to form an aluminum phosphate bond (Al-OP bond), and finally coats the aluminum nitride with an aluminum phosphate layer. Means a phosphoric acid compound having the ability to For example, orthophosphoric acid,
Inorganic phosphate compounds such as metaphosphoric acid, pyrophosphoric acid, polyphosphoric acid, and phosphonic acid, and methyl acid phosphate, ethyl acid phosphate, butyl acid phosphate, 2-ethylhexyl acid phosphate, lauryl acid phosphate, palmityl acid phosphate, stearyl acid phosphate, oleyl acid Acid phosphates such as phosphate, phenyl acid phosphate and nonylphenyl acid phosphate,
Mono- or dialkyl, alkenyl or aryl esters of pyrophosphoric acid or polyphosphoric acid such as 2-ethylhexyl pyrophosphate, phosphonic acids such as methylenephosphonic acid and aminomethylenephosphonic acid, and organic phosphoric acid compounds such as esters thereof are mentioned as examples. Can be Further, a mixture of these phosphoric acid compounds may be used.
【０００９】本発明でいう流動性改質剤としてはシリ
カ、アルミナ、チタニア、窒化ほう素及び表面に親油性
基を有する無機粉末が挙げられる。また、２種類以上の
流動性改質剤の混合物でもかまわない。これらの流動性
改質剤の粒径は１μｍ以下が好ましい。The fluidity modifier referred to in the present invention includes silica, alumina, titania, boron nitride and inorganic powder having a lipophilic group on the surface. Also, a mixture of two or more fluidity modifiers may be used. The particle size of these fluidity modifiers is preferably 1 μm or less.
【００１０】本発明の表面に親油性基を有する無機粉末
とは、無機粉末の表面を樹脂、シリコーンやフッ素化合
物等で被覆して、無機粉末の表面を親油性基で覆われた
無機粉末のことを意味する。例えば、表面に親油性基を
有するシリカ（以下、撥水性シリカと記す）等が挙げら
れる。これらの窒化アルミニウム粉末と流動性改質剤、
又は窒化アルミニウム粉末を燐酸化合物で処理した後混
合することにより、流動性の向上と樹脂への分散性の向
上を図ることができる。The inorganic powder having a lipophilic group on the surface of the present invention refers to an inorganic powder whose surface is covered with a resin, silicone or a fluorine compound, and the surface of the inorganic powder is covered with a lipophilic group. Means that. For example, silica having a lipophilic group on the surface (hereinafter referred to as water-repellent silica) and the like can be mentioned. These aluminum nitride powder and fluidity modifier,
Alternatively, by mixing the aluminum nitride powder after treating it with a phosphate compound, it is possible to improve the fluidity and the dispersibility in the resin.
【００１１】特に、流動性改質剤として表面に親油性基
を有する無機粉末を用いた場合、窒化アルミニウム粉末
の流動性が著しく改善され、更に窒化アルミニウム粉末
と表面に親油性基を有する無機粉末が混合することで、
樹脂との馴染みも他のものより向上するので、樹脂への
分散性も著しく向上する。In particular, when an inorganic powder having a lipophilic group on the surface is used as the fluidity modifier, the fluidity of the aluminum nitride powder is remarkably improved, and the aluminum powder and the inorganic powder having a lipophilic group on the surface are further improved. By mixing
Since the familiarity with the resin is improved as compared with the others, the dispersibility in the resin is also significantly improved.
【００１２】流動性改質剤の添加量は窒化アルミニウム
粉末に対して０．１〜２０重量％の範囲であることが好
ましく、更に好ましくは０．５〜１０重量％が好適であ
る。流動性改質剤の添加量が０．１重量％未満では、所
望の流動性を有する窒化アルミニウム粉末を得ることが
できないので好ましくない。また、その添加量が２０重
量％を超えると、所望の流動性を有する窒化アルミニウ
ム粉末を得ることができるが、窒化アルミニウム粉末の
熱伝導性を損なうので好ましくない。The addition amount of the fluidity modifier is preferably in the range of 0.1 to 20% by weight, more preferably 0.5 to 10% by weight, based on the aluminum nitride powder. If the addition amount of the fluidity modifier is less than 0.1% by weight, it is not preferable because an aluminum nitride powder having a desired fluidity cannot be obtained. If the addition amount exceeds 20% by weight, an aluminum nitride powder having a desired fluidity can be obtained, but it is not preferable because the thermal conductivity of the aluminum nitride powder is impaired.
【００１３】窒化アルミニウム粉末と流動性改質剤の混
合には、ヘンシェルミキサー、Ｖブレンダー等を用い
て、粉体同士を混合する方法とボールミルを用いて、粉
砕混合する方法がある。後者の方が流動性の改善の効果
が大きい。The mixing of the aluminum nitride powder and the fluidity modifier includes a method of mixing the powders using a Henschel mixer, a V blender, or the like, and a method of pulverizing and mixing using a ball mill. The latter has a greater effect of improving liquidity.
【００１４】[0014]
【実施例】以下、本発明を実施例にて詳細に説明する。
なお、部及び％は特記しない限り、それぞれ重量部及び
重量％を示す。 実施例１ 窒化アルミニウム粉末に撥水性シリカを５％添加し、容
量５Ｌのヘンシェルミキサーを用いて３０分間混合し、
流動性窒化アルミニウム粉末を得た。該流動性窒化アル
ミニウム粉末の流動性試験を行ったところ、表１のよう
な結果を得た。The present invention will be described below in detail with reference to examples.
Parts and% indicate parts by weight and% by weight, respectively, unless otherwise specified. Example 1 5% of water-repellent silica was added to aluminum nitride powder and mixed for 30 minutes using a 5 L Henschel mixer.
A fluid aluminum nitride powder was obtained. When a fluidity test was performed on the fluid aluminum nitride powder, the results shown in Table 1 were obtained.
【００１５】尚、窒化アルミニウム粉末の流動性試験は
下記の方法で行った。窒化アルミニウム粉末５０ｇを１
００メッシュの篩で篩い、篩下の窒化アルミニウム粉末
の回収量と篩下の粉体が凝集しているか否かにより流動
性の評価を行った。The fluidity test of the aluminum nitride powder was performed by the following method. 50 g of aluminum nitride powder
Fluidity was evaluated by sieving with a 00 mesh sieve, and determining whether or not the recovered amount of aluminum nitride powder under the sieve was agglomerated.
【００１６】実施例２〜３ 撥水性シリカを添加量を１０％と１５％にした以外は実
施例１と同様の方法で行い、流動性窒化アルミニウム粉
末を得た。実施例１と同様の方法で、流動性試験を行っ
た結果を表１に示す。Examples 2 to 3 A fluid aluminum nitride powder was obtained in the same manner as in Example 1 except that the amount of water-repellent silica was changed to 10% and 15%. Table 1 shows the results of a fluidity test performed in the same manner as in Example 1.
【００１７】実施例４ 撥水性シリカを１％添加した窒化アルミニウム粉末とア
ルミナ製のボールを容量１Ｌの磁製ポットに入れ、１２
０回転で１時間混合粉砕を行い、流動性窒化アルミニウ
ム粉末を得た。実施例１と同様の方法で、流動性試験を
行った結果を表１に示す。Example 4 Aluminum nitride powder containing 1% of water-repellent silica and alumina balls were placed in a 1-L porcelain pot, and
The mixture was pulverized at 0 rotation for 1 hour to obtain a fluid aluminum nitride powder. Table 1 shows the results of a fluidity test performed in the same manner as in Example 1.
【００１８】実施例５ 撥水性シリカを添加量を２％にした以外は実施例４と同
様の方法で行い、流動性窒化アルミニウム粉末を得た。
実施例１と同様の方法で、流動性試験を行った結果を表
１に示す。Example 5 A fluid aluminum nitride powder was obtained in the same manner as in Example 4 except that the amount of water-repellent silica was changed to 2%.
Table 1 shows the results of a fluidity test performed in the same manner as in Example 1.
【００１９】実施例６〜８ ５Ｌのニーダーを使用して、窒化アルミニウム粉末（平
均粒径１μｍ）１００部に２．１％オルト燐酸水溶液１
０３部（オルト燐酸２．２部、水１００．８部）を加え
て練り込みペースト状とし、３０℃で３０分間処理を行
った。この混合物を１２０℃で乾燥し、乾燥後、ジェッ
トミルで粉砕し、耐水性窒化アルミニウム粉末を得た。
該耐水性窒化アルミニウム粉末を用いて、撥水性シリカ
の添加量を５％、１０％、１５％とし実施例１と同様の
方法で流動性窒化アルミニウム粉末を得た。実施例１と
同様の方法で、流動性試験を行った結果を表１に示す。Examples 6 to 85 Using a 5-liter kneader, 100 parts of aluminum nitride powder (average particle size: 1 μm) was added to a 2.1% orthophosphoric acid aqueous solution.
03 parts (2.2 parts of orthophosphoric acid, 100.8 parts of water) were added and kneaded to form a paste, which was then treated at 30 ° C. for 30 minutes. This mixture was dried at 120 ° C., and after drying, pulverized with a jet mill to obtain a water-resistant aluminum nitride powder.
Using the water-resistant aluminum nitride powder, the amount of water-repellent silica was adjusted to 5%, 10%, and 15% to obtain a fluid aluminum nitride powder in the same manner as in Example 1. Table 1 shows the results of a fluidity test performed in the same manner as in Example 1.
【００２０】実施例９〜１０ 実施例６で得た耐水性窒化アルミニウム粉末を用いて、
撥水性シリカの添加量を１％、２％とし実施例４と同様
の方法で流動性窒化アルミニウム粉末を得た。実施例１
と同様の方法で、流動性試験を行った結果を表１に示
す。Examples 9 to 10 Using the water-resistant aluminum nitride powder obtained in Example 6,
A fluid aluminum nitride powder was obtained in the same manner as in Example 4 except that the amount of water-repellent silica added was 1% and 2%. Example 1
Table 1 shows the results of the fluidity test performed in the same manner as described above.
【００２１】実施例１１ 撥水性シリカの代わりにアルミナを用い、添加量を６％
に変更した以外は実施例４と同様の方法で流動性窒化ア
ルミニウム粉末を得た。実施例１と同様の方法で、流動
性試験を行った結果を表１に示す。Example 11 Alumina was used in place of water-repellent silica, and the added amount was 6%.
A fluid aluminum nitride powder was obtained in the same manner as in Example 4 except that the powder was changed to. Table 1 shows the results of a fluidity test performed in the same manner as in Example 1.
【００２２】実施例１２ 撥水性シリカの代わりに窒化ほう素を用い、添加量を４
％に変更した以外は実施例４と同様の方法で流動性窒化
アルミニウム粉末を得た。実施例１と同様の方法で、流
動性試験を行った結果を表１に示す。Example 12 Boron nitride was used in place of water-repellent silica, and the added amount was 4
%, And a fluid aluminum nitride powder was obtained in the same manner as in Example 4. Table 1 shows the results of a fluidity test performed in the same manner as in Example 1.
【００２３】比較例１ 流動性改質剤を用いない窒化アルミニウム粉末で流動性
試験を行った。結果を表１に示す。Comparative Example 1 A fluidity test was performed on aluminum nitride powder without a fluidity modifier. Table 1 shows the results.
【００２４】比較例２ 流動性改質剤用いないで実施例６で得た耐水性窒化アル
ミニウム粉末で流動性試験を行った。結果を表１に示
す。Comparative Example 2 A fluidity test was performed on the water-resistant aluminum nitride powder obtained in Example 6 without using a fluidity modifier. Table 1 shows the results.
【００２５】実施例１３〜１７ 珪素樹脂１００部に対し、アルミナ粒子とシリカ粒子を
それぞれ１５０部、実施例１、５、６及び７の操作で得
られた流動性窒化アルミニウム粉末１００部を混合し、
ニーダーで１０分間混練して、窒化アルミニウム含有の
珪素樹脂組成物を得た。得られた樹脂組成物を、１５０
メッシュのストレーナーを通して押し出し成形したが、
ストレーナーを通らない凝集物は認められなかった。Examples 13 to 17 150 parts each of alumina particles and silica particles were mixed with 100 parts of a silicon resin, and 100 parts of the fluid aluminum nitride powder obtained by the operations of Examples 1, 5, 6 and 7 were mixed. ,
The mixture was kneaded with a kneader for 10 minutes to obtain a silicon resin composition containing aluminum nitride. The obtained resin composition was mixed with 150
Extruded through a mesh strainer,
Aggregates that did not pass through the strainer were not observed.
【００２６】比較例３〜４ 流動性改質剤を用いない窒化アルミニウム粉末及び耐水
性窒化アルミニウム粉末を用いた以外は実施例１０と同
様の方法で窒化アルミニウム含有の珪素樹脂組成物を得
た。得られた樹脂組成物を、１５０メッシュのストレー
ナーを通して押し出し成形したが、ストレーナーを通ら
ない凝集物が大量に認められた。凝集物の同定をＸ線回
折法で行ったところ、窒化アルミニウムであることを確
認した。Comparative Examples 3 and 4 A silicon resin composition containing aluminum nitride was obtained in the same manner as in Example 10 except that aluminum nitride powder without a fluidity modifier and water-resistant aluminum nitride powder were used. The obtained resin composition was extruded through a 150-mesh strainer, and a large amount of aggregates not passing through the strainer was observed. When the aggregate was identified by an X-ray diffraction method, it was confirmed that the aggregate was aluminum nitride.
【００２７】[0027]
【表１】 [Table 1]
【００２８】[0028]
【発明の効果】本発明による窒化アルミニウム粉末は流
動性が優れ、凝集体を形成することがなく、樹脂への混
練の際樹脂中に均一に分散することができる。また、本
発明の窒化アルミニウム粉末は放熱が要求される電子部
品の封止材、電子部品の接着材料や積層基板の成形材料
等の樹脂材料用のフィラーとして有用である。The aluminum nitride powder according to the present invention has excellent fluidity, does not form agglomerates, and can be uniformly dispersed in the resin when kneaded into the resin. Further, the aluminum nitride powder of the present invention is useful as a sealing material for electronic components requiring heat dissipation, a filler for resin materials such as an adhesive material for electronic components and a molding material for laminated substrates.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 原田 功 山口県下関市彦島迫町七丁目１番１号 三 井東圧化学株式会社内 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Isao Harada 7-1-1, Hikoshimasako-cho, Shimonoseki-shi, Yamaguchi Pref.
Claims (5)
を混合してなる流動性が改良された窒化アルミニウム粉
末。1. An aluminum nitride powder having improved fluidity obtained by mixing an aluminum nitride powder and a fluidity modifier.
処理した後、流動性改質剤を混合してなる流動性が改良
された窒化アルミニウム粉末。2. An aluminum nitride powder having improved fluidity, obtained by treating an aluminum nitride powder with a phosphate compound and then mixing a fluidity modifier.
タニア、窒化ほう素よりなる群から選ばれる１種以上で
ある請求項１又は２記載の流動性が改良された窒化アル
ミニウム粉末。3. The aluminum nitride powder having improved fluidity according to claim 1, wherein the fluidity modifier is at least one selected from the group consisting of silica, alumina, titania, and boron nitride.
る無機粉末である請求項１又は２記載の流動性が改良さ
れた窒化アルミニウム粉末。4. The aluminum nitride powder having improved fluidity according to claim 1, wherein the fluidity modifier is an inorganic powder having a lipophilic group on the surface.
ウム粉末に対して０．１〜２０重量％である請求項１又
は２記載の流動性が改良された窒化アルミニウム粉末。5. The aluminum nitride powder having improved fluidity according to claim 1, wherein the amount of the fluidity modifier added is 0.1 to 20% by weight based on the aluminum nitride powder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9006359A JPH10203809A (en) | 1997-01-17 | 1997-01-17 | Aluminum nitride powder improved in fluidity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9006359A JPH10203809A (en) | 1997-01-17 | 1997-01-17 | Aluminum nitride powder improved in fluidity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10203809A true JPH10203809A (en) | 1998-08-04 |
Family
ID=11636180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9006359A Pending JPH10203809A (en) | 1997-01-17 | 1997-01-17 | Aluminum nitride powder improved in fluidity |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10203809A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005320479A (en) * | 2004-05-11 | 2005-11-17 | Kyocera Chemical Corp | Liquid epoxy resin composition |
| CN111886216A (en) * | 2018-03-22 | 2020-11-03 | 3M创新有限公司 | Modified aluminum nitride particles and method for preparing same |
| CN112142474A (en) * | 2020-09-28 | 2020-12-29 | 西华大学 | Preparation method of water-based tape casting high-thermal-conductivity aluminum nitride ceramic substrate |
-
1997
- 1997-01-17 JP JP9006359A patent/JPH10203809A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005320479A (en) * | 2004-05-11 | 2005-11-17 | Kyocera Chemical Corp | Liquid epoxy resin composition |
| CN111886216A (en) * | 2018-03-22 | 2020-11-03 | 3M创新有限公司 | Modified aluminum nitride particles and method for preparing same |
| US11492495B2 (en) | 2018-03-22 | 2022-11-08 | 3M Innovative Properties Company | Modified aluminum nitride particles and methods of making the same |
| CN112142474A (en) * | 2020-09-28 | 2020-12-29 | 西华大学 | Preparation method of water-based tape casting high-thermal-conductivity aluminum nitride ceramic substrate |
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