JPH1019725A - Apparatus for inspecting optical member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect an optical defect objectively by constituting so that a relative position of an optical member and a knife edge in a direction of an optical axis is adjusted on the basis of an image photographed by an image pickup means. SOLUTION: An image-processing part 41 calculates a total of luminance values of an origin to a coordinate point Y1 on a Y axis of image data from a CCD camera 30 photographing an object to be detected. A control part 42 forms beforehand a position-adjusting table in a direction of an optical axis based on the total of the luminance values from the image-processing part 41. The total of the luminance values, the amount of a movement and a direction of the movement are made to correspond to each other in the adjusting table. The table is stored in an external memory 44. Every time the total is informed from the image-processing part 41, the amount and direction of the movement of a knife edge are obtained on the basis of the total with reference to the adjusting table. The control part 42 outputs the obtained amount and direction of the movement to a position control circuit 47 for controlling a position of the knife edge in the direction of the optical axis to instruct the rotation of a knife edge position-adjusting pulse motor 22 so that the total of the luminance values becomes a predetermined value.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical member inspection apparatus for detecting an optical defect such as a refractive index abnormality in an optical member.

[0002]

2. Description of the Related Art An optical member such as a lens is designed such that an incident light beam is refracted regularly and travels in parallel, or converges or diverges at one point or linearly. However, if the refractive power is irregularly changed due to abnormal molding of the optical member, or if dust or scratches are generated on the surface of the optical member due to human handling after molding, the incident light beam is disturbed. Desired performance cannot be obtained. Particularly, in an optical member such as a lens formed by injecting a resin into a mold and performing injection molding (hereinafter, referred to as a “resin molded optical member”), a sink mark (resin is separated from the mold surface due to molding abnormality). This phenomenon is likely to occur because of the occurrence of depressions, jetting (where the resin density is partially changed in the optical member), and flow marks (W-shaped wrinkles that occur on the surface of the optical member due to shrinkage of the resin). It is necessary to detect such defects efficiently.

For this reason, the present inventor has filed an application for an optical member inspection apparatus capable of automatically detecting an optical defect of an optical member set as Japanese Patent Application No. 7-229242. The optical member inspection apparatus captures light transmitted through the optical member, a knife edge rotatably disposed at a focal position of the optical member, a diffuser disposed behind the knife edge to emit illuminating light. And an imaging device for performing the operation. According to the optical member inspection apparatus having such a configuration, a portion where the refractive power (refractive index) is abnormal on the surface or inside of the optical member is observed as a portion where the light and dark density changes rapidly.

On the other hand, the resin molded optical member is integrally formed with the runner while being connected to the tip of the runner.
As shown in FIG. 41, a single runner L is integrally formed with a plurality of optical members A connected thereto. The plurality of optical members A and the runners L which are thus integrally formed are referred to as a "spool" S as a whole.
The runner L of the spool S shown in FIG. 41 has a rotationally symmetric plane shape, and has a center axis C at its center orthogonal to the plane where each optical member A exists, as shown in FIG. I have. Note that a portion where the boundary between the runner L and the optical member A is confined is called a “gate”. As described above, in the spool S, since a plurality of resin molded optical members A are integrally molded with one runner L, a configuration for efficiently inspecting the plurality of resin molded optical members A is required. Becomes

Therefore, the spool S is placed on a chuck that can be rotated in the horizontal direction, and
A configuration is conceivable in which each optical member A is sequentially set at a measurement position (a position where its optical axis coincides with the optical axis of the imaging apparatus) by rotating the optical member A by degrees (in the case of the spool S in FIG. 41). In the case of adopting this configuration, if the position of the knife edge in the optical axis direction is adjusted based on any one of the optical members A (the focal position of the optical member is adjusted to the position of the knife edge), the same spool S can be used. This means that the optical axis direction position adjustment of all the optical members A has been completed.

[0006]

However, since the runner L and the gate are parts that are not used as optical components, sufficient accuracy may not be obtained in some cases. For example,
As shown in FIG. 43, the runner L may bend midway. When such a spool S is mounted on the chuck, the positions of the optical members A in the spool S in the optical axis direction are shifted from each other. Therefore, even if the position of the knife edge in the optical axis direction is adjusted based on any of the optical members A, the position of the knife edge in the optical axis direction is shifted from the focal position with respect to the other optical members. Become. As a result, there arises a problem that the inspection of the other optical member becomes impossible, or a wrong product is erroneously determined as a defective product.

[0007] Since the bending of the runner L is mostly caused by the mold and the molding conditions of the resin molding, if the spool S is molded by the same molding die and molding conditions, it is completely the same. The runner L is bent.

Further, even when inspecting individual resin-molded optical members or glass-molded optical members separated from the runner, the conventional optical member inspection apparatus adjusts the position of the knife edge in the optical axis direction based on visual observation. Had to be done manually.

In view of the above problems, an object of the present invention is to provide an optical member inspection apparatus capable of appropriately adjusting a relative position between an optical member and a knife edge in an optical axis direction.
To provide.

[0010]

The invention described in each claim is
It has been made to solve the above problems. The invention according to claim 1 is an optical member inspection device that detects an optical defect of an optical member, and includes a diffusion plate illuminated by illumination light, and partially transmits light diffused by the diffusion plate, and Light shielding means in contact with the diffusion plate so as to partially shield light; imaging means for imaging light transmitted through the optical member; and the optical member on an optical axis between the imaging means and the light shielding means. And an adjusting unit that adjusts a relative position in the optical axis direction between the holding unit and the light shielding unit based on an image captured by the imaging unit. .

According to a second aspect of the present invention, there is provided an optical member inspection apparatus for detecting an optical defect of optical members connected to each other by a runner, wherein the diffuser is illuminated by illumination light, and the diffuser is diffused by the diffuser. Light blocking means in contact with the diffusion plate so as to partially transmit and partially block the light, image capturing means for capturing light transmitted through the optical member, and image capturing while holding the runner A holding unit that selectively disposes each optical member connected by the runner on the optical axis between the imaging unit and the light shielding unit by shifting in a plane orthogonal to the optical axis of the unit; An adjusting unit that adjusts a relative position in the optical axis direction between the holding unit and the light shielding unit based on an image captured by the imaging unit.

The optical member includes a positive lens and a negative lens. The optical defect of the optical member refers to a partial abnormality of the refractive index or the refractive power, a defect on the surface of the optical member, or the like. Examples of abnormalities in the refractive index and the refractive power include sink marks, jetting, and flow marks in resin-molded optical members, and poor surface processing in optical members made of glass. Defects on the surface of the optical member include surface scratches, dirt and dust,
Etc. are listed.

The diffusion plate may be a reflection member illuminated from the front side or a translucent member illuminated from the back side. The light blocking means may be a plate-like member separate from the diffusion plate, or may be an opaque paint applied to the surface of the diffusion plate. The light blocking unit may be configured to rotate around the optical axis of the imaging unit.

[0014] The image pickup means may be an image pickup means using a solid-state image pickup device or an image pickup means using an image pickup tube. The holding portion of the first aspect may directly hold the optical member or may hold the optical member via a relay such as a runner.

According to a second aspect of the present invention, there is provided a holding unit for inspecting an optical system in which one optical member is connected to each end of a substantially cross-shaped runner (ie, four cavities per spool). The means may be configured to be rotatable about a central axis parallel to the optical axis of the means. Further, when inspecting an optical device in which two or more optical members are connected to each end of the runner (ie, 8 cavities or the like per spool), the center of the runner should be centered on the central axis parallel to the optical axis of the imaging means. It may be configured to be rotatable and capable of being linearly moved in a direction perpendicular to the optical axis of the imaging unit.

The adjusting means is an optical system including an optical member, ie, the optical member itself as a positive lens, or the focal position of the entire positive lens group including the optical member as a negative lens is adjusted by the light of the light shielding means. The relative position in the optical axis direction between the holding unit and the light shielding unit is adjusted so as to match the position on the axis l. In this case, the adjusting unit may move the holding unit in the optical axis direction, or may move the light blocking unit in the optical axis direction. The adjustment unit may compare the distribution of the luminance values in the image captured by the imaging unit, or may compare the magnitude of the luminance value of the entire captured image.

According to a third aspect of the present invention, in the first or second aspect, the image processing apparatus further includes a luminance data extracting unit for extracting luminance data in a specific range in the image picked up by the image pickup unit, and the adjusting unit includes: It is specified by adjusting a relative position in the optical axis direction between the holding unit and the light shielding unit based on the luminance data extracted by the luminance data extracting unit.

The luminance data extracting means may extract a planar area in the image data, or may extract a linear area. This extraction range has a width in a direction orthogonal to a boundary line between a part that partially transmits light by the light shielding unit and a part that partially shields light,
More effective.

According to a fourth aspect of the present invention, the specific range in which the luminance data is extracted by the luminance data extracting means is a part of the light shielding part which partially transmits the light and a part of which is partially shielded. It is specified as being a range having a spread in a direction orthogonal to the boundary line with the portion to be overlapped.

According to a fifth aspect of the present invention, the brightness data extracted by the brightness data extracting means according to the third aspect is a boundary between a part of the light shielding means which partially transmits the light and a part which partially shields the light. This is specified by luminance data on the central axis of the image oriented in a direction perpendicular to the line.

According to a sixth aspect of the present invention, the luminance data extracted by the luminance data extracting means of the fifth aspect is specified as being luminance data in a range deviated from the center on the central axis. .

According to a seventh aspect of the present invention, the adjustment means according to any one of the third to fifth aspects is arranged such that the holding section causes the brightness data extracted by the brightness data extraction means to have uniform brightness over the entire area. It is specified by adjusting a relative position in the optical axis direction between the light shielding means and the light shielding means.

According to an eighth aspect of the present invention, the adjusting means of the sixth aspect is arranged such that the holding section and the light shielding means are arranged such that an integrated value of the luminance data extracted by the luminance data extracting means has a predetermined value. Are adjusted by adjusting the relative position in the optical axis direction between the two.

According to a ninth aspect of the present invention, the adjustment means of the eighth aspect is a table wherein the relative movement amount in the optical axis direction between the holding unit and the light-shielding means corresponds to the integral value in advance. And reads a corresponding relative movement amount with reference to this table based on an integrated value of the luminance data extracted by the luminance data extracting means, and based on the read relative movement amount, stores the relative movement amount. By relatively moving the portion and the light shielding means in the optical axis direction,
It is specified.

According to a tenth aspect of the present invention, the adjusting means of the second aspect moves the light-shielding means with respect to the holding part so that the relative position between the holding part and the light-shielding means in the optical axis direction is adjusted. It is specified by adjusting the position.

According to an eleventh aspect of the present invention, in the tenth aspect, for each of the optical members connected to each other by the runner, storage means for storing a position of the light shielding means at the time when the relative position is adjusted, When a runner of the same type as the runner is held by the holding portion,
A reading unit that reads, from the storage unit, a position of the light blocking unit corresponding to an optical member arranged on an optical axis between the imaging unit and the light blocking unit,
When the position of the light shielding unit is read by the reading unit, the adjusting unit moves the light shielding unit to the read position and specifies the position.

[0027]

Embodiments of the present invention will be described below with reference to the drawings.

[0028]

First Embodiment <Principle of Optical Defect Display> Before describing the configuration of an optical member inspection apparatus, first, the principle of detecting an optical defect of an optical member in the present embodiment will be described.

As shown in FIG. 4, the illumination unit 23 and the CCD camera 30 for imaging the test object are connected to the lens A to be inspected.
(Optical members) The optical members are arranged on the same optical axis l with A facing each other. The CCD camera 30 for imaging an object as an imaging unit includes an imaging lens 35 as a whole, which is a positive lens system, and an imaging device 36 including a CCD area sensor for imaging an image formed by light converged by the imaging lens 35. ,It is configured. This imaging lens 35
Can be moved in the optical axis l direction by rotating the lens barrel 31.

On the other hand, the lighting unit 23
It can move forward and backward on the optical axis l toward the CCD camera 30 for imaging the object. Inside the illumination unit 23, a disk-shaped diffusion plate 34 whose center is coaxial with the optical axis l is provided.
Are rotatably held about the optical axis l in a plane orthogonal to the optical axis l. A light shielding plate 28 as light shielding means is integrally attached to a surface of the diffusion plate 34 on the side of the CCD camera 30 for imaging an object. This light shielding plate 28
As shown in FIG. 5, which is a top view, this is a semicircular plate made of an opaque member, and a straight line in the radial direction passing through the center of the diffusion plate 34 is defined as a chord (knife edge) 28a.
4 has an arc of the same radius. On the other hand, an illumination lamp 32 for illuminating the diffusion plate 34 from behind is attached to the back side of the diffusion plate 34.

The lens A (positive lens) to be inspected is arranged at a position where the focal point on the illumination unit side coincides with the position of the knife edge 28a on the optical axis l. When the lens A to be inspected is a negative lens, the lens A to be inspected is placed between the lens A to be inspected and the illumination unit 23.
A correction lens (positive lens) having a larger absolute power than the (negative lens) is disposed. The lens group including the lens A to be inspected (negative lens) and the correction lens (positive lens) is a lens group having a positive power as a whole, and its combined focal position coincides with the position of the knife edge 28a on the optical axis l. The inspection target lens A (negative lens) and the correction lens (positive lens) are arranged so as to perform the inspection.

When the inspection lens A (and the correction lens) is arranged as described above, the light from the illumination lamp 32 transmitted through the inspection lens A becomes parallel light as long as the inspection lens A is a good product. . Therefore, the CC for subject imaging
When viewed from the D camera 30 side, this is equivalent to the knife edge 28a of the light shielding plate 28 being located at infinity.

On the other hand, the focal position of the lens A to be inspected (or the combined focal position of the optical system including the lens A to be inspected and the correction lens, hereinafter the same) is the knife edge 28a.
CCD camera 30 for imaging the test object more than the position on the optical axis l of
If it shifts to the side, the inspection target lens A and the CCD for imaging the test object
An inverted image (real image) of the knife edge 28a is formed in a space between the camera 30 and the imaging lens 35. The inverted image (real image) of the knife edge 28a is relayed by the imaging lens 35, and an erect image (real image) of the knife edge 28a is formed in a space on the imaging element 36 side of the imaging lens 35. Conversely, if the focal position of the lens A to be inspected deviates from the position on the optical axis l of the knife edge 28a toward the illumination lamp 32, an erect image of the knife edge 28a is provided in the space of the light shielding plate 28 on the illumination lamp 32 side. A virtual image is formed. The upright image (virtual image) of the knife edge 28a is relayed by the imaging lens 35, and an inverted image (real image) of the knife edge 28a is formed in the space on the imaging element 36 side of the imaging lens 35. That is, the focal position of the lens A to be inspected means that an image of the object (knife edge 28a) existing at this position is formed as an erect image or an inverted image in the space on the imaging element 36 side of the imaging lens 35. This is the boundary point of the image or the position where the optically unstable state is reached.

The lens A to be inspected and the imaging lens 35
Even if the focal position of the lens A to be inspected is slightly displaced toward the object imaging CCD camera 30 from the position of the knife edge 28a on the optical axis 1 (exactly between them) Is set as long as possible so that an inverted image (real image) of the knife edge 28a is formed between the two focal positions. Further, the image pickup device 36 and the image formation position (average position) of the upright image and the inverted image are formed so that these images can be captured to some extent clearly even if an upright image is formed or an inverted image is formed by the imaging lens 35. It is arranged at an intermediate point with the formation position (average position). This position is a position optically equivalent to the surface of the inspection target lens A with respect to the imaging lens 35.

Therefore, a real image (inverted image) α of the outer edge of the lens A to be inspected is always formed on the image pickup device 36, and an inspection image is formed around the real image α of the outer edge of the lens A to be inspected. The real image (inverted image) of the knife edge 28a that is directly visible without passing through the target lens A is slightly blurred (see FIGS. 13A to 13E).

Inside the real image α of the outer edge of the lens A to be inspected, the focal position of the lens A to be inspected is higher than the position on the optical axis l of the knife edge 28a.
If it is shifted to the D camera 30 side, the knife edge 2
The real image (erect image) of FIG. 8a is slightly blurred (FIG. 1).
3 (d) and FIG. 13 (e)). This knife edge 28
The real image (erect image) a becomes larger as the shift amount of the focal position becomes smaller (see FIG. 13D), and becomes clearer as the shift amount becomes larger. (See FIG. 13E).

On the contrary, when the focal position of the lens A to be inspected is shifted toward the illumination lamp 32 from the position of the knife edge 28a on the optical axis l, the real image α of the outer edge of the lens A to be inspected is obtained. Inside, the real image (inverted image) of the knife edge 28a is formed with a slight blur (FIG. 13B,
FIG. 13A). The real image (inverted image) of the knife edge 28a becomes larger as the shift amount of the focal position becomes smaller (see FIG. 13B), and becomes smaller as the shift amount becomes larger. Clarify (Fig. 13
(A)).

When the focal position of the lens A to be inspected coincides with the position of the knife edge 28a on the optical axis l, the amount of blur inside the real image α of the outer edge of the lens A to be inspected becomes maximum, and the brightness becomes uniform throughout. (FIG. 13C). That is, as long as there is no optical defect in the lens A to be inspected, the black portion (the portion where light is blocked) and the white portion (the portion where light is transmitted) of the knife edge 28a are completely mixed, and the knife edge 28a has a uniform density. Appears as a gray plane (for spherical lenses). When an aspherical lens is inspected as the inspection target lens A, an image having a very gentle change in luminance is obtained because the focal position is not only one point but changes gradually.

On the other hand, if there is a portion in the lens A to be inspected having an abnormal refractive index or a portion having an abnormal refractive power due to a shape defect on its surface, only the abnormal portion is normal. This is equivalent to having a focal length different from the focal length of the part. Therefore, as shown in FIG. 14, the knife edge image γ appears only in the abnormal portion. The degree of the refractive index (refractive power) abnormality (focal length shift amount) of the abnormal portion is reflected in the appearance of the knife edge image γ. That is, as the degree of the refractive index (refractive power) abnormality (the amount of shift of the focal length) increases, the density of the knife edge image γ appears more clearly.

When dust or dirt adheres or is scratched on the surface of the lens A to be inspected, a real image of the dust, dirt or scratch is formed on the image sensor 36 by the imaging lens 35. You. As a result, when the light is blocked by dust or dirt on the inner part of the outer edge α of the inspection target lens A in the image data, a darker shadow than the surroundings appears, and when the light diverges due to the scratch, Is a bright spot. <Mechanical Configuration of Optical Member Inspection Apparatus> Next, the configuration of the optical member inspection apparatus according to the first embodiment for realizing the above-described detection principle will be described. FIG. 1 is a front view of the optical member inspection apparatus according to the present embodiment, and its top and bottom coincide with the direction of gravity.

In FIG. 1, a single-axis robot 1 is a base of the entire apparatus, and includes therein a feed screw 2 and a moving stage 4 screwed to the feed screw 2.
Further, a pulse motor 3 for a uniaxial robot for rotating and driving the feed screw 2 in both forward and reverse directions is attached to the outer surface of the side end. Therefore, by rotating the feed screw 2 in either the forward or reverse direction by the uniaxial robot pulse motor 3, the moving stage 4 can be slid in the left-right direction in FIG. The attitude of the moving stage 4 is regulated by a rail (not shown) so that the upper surface thereof remains horizontal regardless of the movement.

An X stage 5 is fixed on the upper surface of the moving stage 4. The X stage 5 is a device that slides the Y stage 9 in the X direction (the left-right direction in FIG. 1) with respect to the moving stage 4. Specifically, this X
A feed screw 6 is hung inside the stage 5,
An X-stage pulse motor 7 for rotating the feed screw 6 in both forward and reverse directions is mounted on the outer surface thereof. The feed screw 6 is screwed with a Y stage drive unit 8 fixed to a Y stage 9. Therefore, X
By rotating the feed screw 6 in either the forward or reverse direction by the stage pulse motor 7, the Y stage 9
Can be slid in any direction.

On the other hand, the Y stage 9 is
Is a device that slides in the Y direction (a direction orthogonal to the paper surface of FIG. 1) with respect to the X stage 5. Specifically, a feed screw (not shown) is wound around the inside of the Y stage drive unit 8 fixed to the Y stage 9, and the feed screw (not shown) is mounted on the outer surface thereof in both forward and reverse directions. The Y-stage pulse motor 10 for rotationally driving is attached. A feed nut (not shown) attached to the work table 11 is screwed to the feed screw (not shown). Accordingly, the work table 11 can be slid in the Y direction by rotating the feed screw (not shown) in either the forward or reverse direction by the Y stage pulse motor 10.

At the center of the upper surface of the work table 11, a chuck 12 having a substantially flat rivet shape shown in FIG.
Is rotatably mounted. As shown in FIG. 2, the chuck 12 as the holding portion has a relatively small-diameter and long shaft portion 12 a and a relatively large-diameter and short boss portion 1.
2b. An annular gear 12e is formed in a belt shape around the shaft portion 12a. In the center of the upper surface of the boss portion 12b, a shaft hole 1 into which the central axis C of the spool S including the lens A to be inspected (see FIG. 42) is inserted.
2d is pierced. A cross groove 12c for accommodating a branch of the runner L extending in the cross direction from the center axis C is cut in the cross direction centered on the shaft hole 12d. The spool S held by the chuck 12 is as shown in FIGS. 41 and 42. In the spool S, an identification number (cavity (Cav.) Number) is assigned to each lens A in a clockwise order as viewed from the top. Then, on the runner L near each lens A, the same number of marks as the cavity number of the lens A (hereinafter, referred to as the marks).
“Cavity number mark”) is engraved.
In FIG. 41, the cavity numbers in each lens A are indicated by Arabic numerals for convenience.

A pulse motor 13 for rotating the spool is fixed to the upper surface of the work table 11. A pinion gear 14 that meshes with an annular gear 12 e of the chuck 12 is attached to a rotation shaft of the spool rotation pulse motor 13. Therefore, by rotating the spool rotation pulse motor 13, both gears 14 and 12 are rotated.
The chuck 12 is driven to rotate via e.

On the other hand, a column 15 oriented in the vertical direction is fixed to the intermediate portion of the uniaxial robot 1 so as not to move. At the upper end of the support 15, a transmitted illumination device 18 for cavity number recognition that emits illumination light downward is attached. When the movable stage 4 comes to the position (cavity number identification position) shown in FIG. 24, the lens A (the lens hidden by the central axis C) A located at the position shown in FIG. The nearby runner L is illuminated.

A CCD camera 16 for recognizing a cavity number is attached to an intermediate portion of the column 15 in opposition to the transmission illumination device 18 for recognizing a cavity number. The cavity number recognizing CCD camera 16 captures an image of the cavity number mark illuminated by the cavity number recognizing transmission illumination device 18 from below. The imaging lens 17 of the cavity number recognizing CCD camera 16 is a pan focus lens that can form a cavity number mark even if the runner L to be imaged is slightly shifted in the optical axis direction.

On the other hand, at the other end of the single-axis robot 1, a vertical support 19 is fixed immovably, and a shaft 21 is rotatably extended in parallel with the support 19. . The shaft 21 is supported by the support 19
Is rotated by a pulse motor 22 for adjusting the position of the knife edge in the optical axis direction attached to the upper end of the knife edge. Also,
A feed screw 21a is formed in a substantially lower half of the shaft 21.

In the vicinity of the upper end of the column 19, a fixed stay 29 for holding the above-described CCD camera 30 for imaging an object is fixed immovably. In the CCD camera 30 for imaging an object, the optical axis l of the imaging lens 35 is oriented vertically, and when the moving stage 4 comes to the position (inspection position) shown in FIG. The lens is positioned so as to penetrate the optical center of a lens (a lens that appears to overlap the central axis C) located on the front side.
Note that this inspection position is only one when inspecting the spool S having four lenses A. However, when inspecting the spool S having eight lenses A as shown in FIG. There are two positions: a position for inspecting a lens corresponding to an odd cavity number (odd cavity inspection position) and a position for inspecting a lens corresponding to an even cavity number (even cavity inspection position). In addition, the object imaging C
An imaging lens 35 and an imaging element 36 in the CD camera 30;
The relative positional relationship of the lens A on the optical axis 1 of the imaging lens 35 is as described above.

A movable stay 20 holding an illumination unit 23 is slidably and non-rotatably mounted along the longitudinal direction of the support 19 between the uniaxial robot 1 and the fixed stay 29. A female screw (not shown) for screwing with the feed screw 21 a of the shaft 21 is formed at the base end of the moving stay 20. Therefore, the rotation of the shaft 21 by the knife edge optical axis direction position adjustment pulse motor 22 causes the illumination unit 2 to rotate.
3 can be moved in the vertical direction. These pillars 1
9, the moving stay 20, the shaft 21, and the pulse motor 22 for adjusting the position of the knife edge in the optical axis direction constitute adjusting means.

The above-described knife edge illumination lamp 32 is built in the illumination unit 23. Further, the above-mentioned light shielding plate 28
A rotating cylinder 27 having a diffusion plate 34 fitted at its upper end is rotatably mounted. An annular gear 26 is formed in a belt shape around the lower end of the rotary cylinder 27. Also,
A pulse motor 24 for rotating the knife edge is attached to a side surface of the lighting unit 23. An annular gear 2 is provided on a rotating shaft of the knife edge rotating pulse motor 24.
The pinion gear 25 that meshes with the pinion 6 is fixed. Therefore, by rotating the knife edge rotation pulse motor 24, the light shielding plate 28 and the diffusion plate 34 can be rotationally driven via both the gears 25 and 26 and the rotary cylinder 27. In the illumination unit 23, the rotation center of the light shielding plate 28 and the diffusion plate 34 is set so that the CCD camera 30
Is positioned so as to coincide with the optical axis l of the imaging lens 35 of FIG. <Circuit Configuration of Optical Member Inspection Apparatus> Next, a circuit configuration of the optical member inspection apparatus according to the present embodiment will be described with reference to FIG. As shown in FIG. 3, the CPU 40 that controls the entire optical member inspection apparatus executes the programs shown by the flowcharts in FIGS. 6 to 12 to execute the functions of the image processing unit 41 and the functions of the control unit 42. Is generated. The CCD camera 30 (imaging element 36) for imaging the test object and the CCD camera 16 for recognizing the cavity number
It is connected to the image processing unit 41 in U40. The control unit 42 connected to the image processing unit 41 also includes a keyboard 43, an external memory 44, a monitor device 45, a cavity number recognizing transmitted illumination driving circuit 46 connected to the cavity number recognizing transmitted illumination device 18, Knife edge optical axis direction position control circuit 47 connected to knife edge optical axis direction position adjustment pulse motor 22, knife edge rotation control circuit 4 connected to knife edge rotation pulse motor 24
8, the single-axis robot control circuit 49 connected to the single-axis robot pulse motor 3, the X / Y stage control circuit 50 connected to the X-stage pulse motor 7 and the Y-stage pulse motor 10, and the spool rotation pulse motor 13 Spool rotation control circuit 51 connected, knife edge illumination drive circuit 5 connected to knife edge illumination lamp 32
2 are connected to each other.

The image processing section 41 is a section for performing various image processing on images input from the cameras 30 and 16, and the control section 42 is a section for controlling each section based on the image processing results. is there. For example, the image processing section 41 extracts the video of the cavity number mark from the image captured by the cavity number recognition CCD camera 16, recognizes the corresponding cavity number, and notifies the control section 42. The control unit 42 determines the position on the optical axis 1 of the imaging lens 35 when the moving stage 4 moves to the inspection position (odd cavity inspection position or even cavity inspection position) shown in FIG. 25 based on the notified cavity number. The cavity number of the lens to be inspected (the lens A to be inspected) is calculated.

Further, the image processing section 41 includes the lighting unit 2
When the operator adjusts the position in the optical axis direction and focuses the imaging lens 35 manually, the control unit 42 notifies the control unit 42 of the image captured by the CCD camera 30 for imaging the object. The control unit 42 displays this image on the monitor device 45 as it is.

When the centering operation of the lens A to be inspected using the X stage 5 and the Y stage 9 is performed, the image processing section 41 converts the image picked up by the CCD camera 30 for picking up an object into an image. Based on this, the movement amount of the inspection target lens A with respect to the optical axis of the imaging lens 35 is calculated. When calculating the movement amount, the control unit 42 appropriately gives a rotation instruction to the knife edge rotation control circuit 48, and when the movement amount is calculated, the control unit 42 drives the X / Y stage control circuit 50. Give instructions.

The principle of this movement amount calculation will be described below. FIG. 15 shows a field imaged by the image sensor 36 of the CCD camera 30 for imaging an object. This figure 1
As shown in FIG. 5, in the field imaged by the image sensor 36, the center position of this field is set to the origin “0”, and the X-axis central axis extending in the X-direction and the Y-axis central axis extending in the Y-direction are: Each is defined. Further, on X-direction central axis, the coordinate points x ₁ and x ₂ for defining a predetermined range around the origin "0", are defined. Similarly, on the center axis in the Y direction, coordinate points y ₁ and y ₂ for defining a certain range around the origin “0” are
Is defined. These coordinate points x ₁ , x ₂ , y ₁ , and y ₂ are coordinate points existing inside the outer edge image α of the inspection target lens A.

By the way, when the optical axis of the lens A to be inspected coincides with the optical axis l of the imaging lens 35, that is, the optical axis and the focal position of the lens A to be inspected are the center of rotation of the knife edge 28a of the light shielding member 28. In this case, the knife edge 28a is enlarged while being blurred, so that the brightness within the outer edge α captured by the image sensor 36 is constant regardless of the direction of the knife edge 28a. FIG.
In this state, when the knife edge 28a is oriented in the X direction and the diffusion plate 34 is arranged on the near side in FIG.
FIG. 7 is a graph plotting a luminance distribution on the Y-direction central axis of FIG. 7) and a luminance distribution on the Y-direction central axis when the knife edge 28a is rotated by 180 degrees (180 °) therefrom.

However, when the optical axis of the lens A to be inspected deviates from the optical axis 1 of the imaging lens 35, when the knife edge 28a is at 0 ° or 180 °, the optical axis of the lens A to be inspected is changed. The relative positional relationship between the focal point and the light shielding plate 28 and the diffusion plate 34 changes. That is, when the knife edge 28a faces a certain direction, the optical axis of the lens A to be inspected is located on the light shielding plate 28 while the knife edge 28a
Is rotated by 180 °, the optical axis of the lens A to be inspected is positioned on the diffusion plate 34. Therefore, when the optical axis of the lens A to be inspected is located on the light-shielding plate 28, the light-shielding plate 28 itself is enlarged, so that the luminance within the outer edge α imaged by the image sensor 36 decreases. On the other hand, when the optical axis of the lens A to be inspected is located on the diffusion plate 34, the diffusion plate 34 itself is enlarged.
As a result, the brightness within the outer edge α captured becomes higher. FIG.
18 shows a luminance distribution when the optical axis of the lens A to be inspected is shifted by −0.2 mm in the Y direction compared to the state of FIG. FIG. 17 shows a luminance distribution when the optical axis of the lens A to be inspected is shifted by −0.1 mm in the Y direction compared to the state of FIG. FIG. 19 shows a luminance distribution when the optical axis of the lens A to be inspected is shifted by +0.1 mm in the Y direction compared to the state of FIG. FIG. 20 shows a luminance distribution when the optical axis of the lens A to be inspected is shifted by +0.2 mm in the Y direction as compared with the state shown in FIG. The image processing unit 41 determines the y in the image when the direction of the knife edge 28a is 0 °.
_{1 ~y 2 (x 1 ~x 2} ) integrated luminance value in the range of (luminance _{sum), y 1 ~y 2 (x} 1 ~x in image when the direction of the knife edge 28a and 180 ° ₂ ) The “brightness difference” is calculated by subtracting the integral value of the brightness (sum of brightness values) within the range of ₂ ). As is clear from the comparison between FIGS. 16 to 20, the value of the “brightness difference” calculated as described above and the shift amount are in inverse proportion to the simple decrease, and the shift amount is “0”. "", The value of "luminance difference" is also "0". The amount of movement for canceling the amount of deviation is obtained by reversing the polarity of the amount of deviation. Therefore, the relationship between the shift amount and the “brightness difference” is directly proportional to the simple increase. Therefore, the image processing unit 41 multiplies the calculated luminance value (both positive and negative values) by a predetermined proportionality constant (positive value) obtained in advance to cancel the deviation amount in the Y direction. The movement amount is calculated. Similarly, the image processing unit 41 calculates a movement amount for canceling the amount of displacement in the X direction.

The image processing unit 41 and the control unit 42
Knife edge 28a (illumination unit 23) based on an image captured by CCD camera 30 for capturing an object.
Is adjusted in the optical axis direction.

The principle of the position adjustment in the optical axis direction will be described below. As described above, the CCD camera 3 for imaging the test object
The luminance distribution on the inner side of the outer edge α of the inspection target optical member A in the image captured by 0 depends on the relative distance between the focal position of the inspection target lens A and the position of the knife edge 28a on the optical axis l. The pattern changes. That is,
When the knife edge 28a is arranged at the origin position (the position where the light shielding plate 28 is located on the near side in FIG. 1 and the knife edge 28a faces the X direction, the position of 0 °), the inspection is performed on the central axis in the Y direction of the image. larger the target lens a becomes closer to the position on the optical axis l of the knife edge 28a, y ₂ side becomes brighter with y ₁ side is dark, as the test object lens a is far from the position on the optical axis l of the knife edge 28a , y ₂ side becomes darker with y ₁ side becomes brighter. FIG.
(E) is a graph showing the luminance distribution on the center axis in the Y direction in the images in FIGS. 13 (a) to (e). FIG.
2 is the origin 0 in each of the graphs of FIGS.
Integral value of luminance values in the range of ~ coordinate point y ₁ (luminance value total)
(The horizontal axis in FIG. 22 indicates the knife edge 28a whose origin is the focal position of the lens A to be inspected.
The negative polarity is given when the lens is closer to the lens A to be inspected than the origin, and the positive polarity is given when the lens is farther than the origin. ).

As is apparent from FIG.
Range coordinate point y ₁ integrated value of luminance values in the (specific range, a range with a spread in a direction perpendicular to the boundary line between the portion and partially shielding portion for partially transmitting light in the light blocking means) ( Luminance value sum, luminance data on the central axis of the image oriented in a direction orthogonal to the boundary line between the part where the light is partially transmitted and the part where the light is partially shielded, deviated from the center on the central axis (Luminance data in the range) is proportional to the relative distance between the lens A to be inspected and the knife edge 28a on the optical axis l. Is short, and if the integral value is large, the relative distance on the optical axis 1 between the lens A to be inspected and the knife edge 28a is long. Therefore, the integrated value of the luminance value (total luminance value) is calculated based on the image taken at the time of adjusting the position in the optical axis direction, and the graph of FIG. 22 can be reversed based on the calculated integrated value (total luminance value). For example, it is possible to know the shift amount and the shift direction of the knife edge 28a with respect to the origin (appropriate position) at that time. Actually, the control unit 42 precisely associates the total luminance value with the movement amount and the movement direction as shown in FIG. 23 based on the integral value (the total luminance value) calculated by the image processing unit 41. The created optical axis direction position adjustment table is created in advance and stored in the external memory 44, and each time there is a notification of the total brightness value from the image processing unit 41 as the brightness data extracting means, the table is calculated based on the total brightness value. The moving amount and moving direction of the knife edge 28a (the lighting unit 23) are obtained with reference to the optical axis direction position adjustment table. Then, the control unit 42 notifies the knife edge optical axis direction position control circuit 47 of the obtained moving amount and moving direction, and adjusts the knife edge optical axis direction position so that the integrated value of the luminance becomes a predetermined value. The rotation of the pulse motor 22 is instructed (corresponding to an adjusting means).

The position adjustment table in the optical axis direction is
It is created and stored for each type of spool S. This is because the correlation between the deviation amount and the total luminance value differs for each spool type. For example, FIG.
When an image as shown in (e) is obtained (in the case of an aspherical lens), the luminance distribution on the center axis in the Y direction in each image is as shown in FIGS. 27 (a) to 27 (e). , FIG.
When images as shown in (e) are obtained, Y in each image is obtained.
The luminance distribution on the central axis of the direction is as shown in FIGS. 29A to 29E, and is created as a separate optical axis direction position adjustment table. When the identification number corresponding to the type of the spool S placed on the chuck 12 is input via the keyboard 43, the control unit 42
The optical axis direction position adjustment table corresponding to the identification number is
It is read from the external memory 44 and used.

The image processing unit 41 performs a process of determining whether the lens A to be inspected is a non-defective or defective product. Therefore, the image processing unit 41 performs predetermined image processing on the image data input from the CCD camera 30 for imaging the object, quantifies the degree of the optical defect of the inspection target lens A, and Is a certain judgment reference value (allowable value)
Then, it is determined whether or not this numerical value is within or exceeds the determination reference value. In order to perform this determination process,
The image processing section 41 has a first memory 41a and a second memory 41b. The controller 42 instructs the knife edge rotation control circuit 48 to rotate the knife edge rotation pulse motor 24 in accordance with the execution of this determination process. The control unit 42 also sends the determination result to the monitor 4
5 is displayed.

The keyboard 43 informs that the spool S has been mounted on the chuck 12, the identification number of the type of the spool S mounted on the chuck 12, and the knife edge 28a.
This is an input device for inputting information such as notification of completion of position adjustment in the optical axis direction and focusing of the imaging lens 35 and necessity of continuation of inspection to the control unit 45. Also, the keyboard 43
Is also provided with a main power-on key (not shown) for giving an instruction to turn on the main power to the entire apparatus.

The external memory 44 is a non-volatile memory (EEPROM) that stores the above-described optical axis direction position adjustment table for each identification number of each spool type. Monitor device 4
Reference numeral 5 denotes a display for displaying the video information notified from the control unit 42.

The transmitted illumination driving circuit 4 for cavity number recognition
6 supplies a drive current for lighting the cavity number recognition transmission illumination lamp 18 in accordance with an instruction from the control unit 42.

Knife edge optical axis direction position control circuit 47
Supplies a drive pulse to the knife edge optical axis direction position adjustment pulse motor 22 in accordance with an instruction from the control unit 42,
The position of the knife edge 28a in the optical axis direction is the lens A to be inspected.
The illumination unit 23 is moved in the direction of the optical axis l so as to coincide with the focal position of.

The knife edge rotation control circuit 48 supplies a driving pulse to the knife edge rotation pulse motor 24 in accordance with an instruction from the control section 42, and rotates the knife edge 28a to an appropriate rotation position.

The uniaxial robot control circuit 49 includes a control unit 42
A drive pulse is supplied to the single-axis robot pulse motor 3 in response to an instruction from the robot, and the moving stage 4 is moved to the inspection object supply / discharge position shown in FIG. 1, the cavity number recognition position shown in FIG. Move to a position (odd cavity inspection position or even cavity inspection position).

The X / Y stage control circuit 50 controls the control unit 4
2 to supply a drive pulse to the pulse motor 7 for the X stage and the pulse motor 10 for the Y stage in accordance with the instruction from
The work table 11 is moved in a plane orthogonal to the optical axis l so that the optical axis of the inspection target lens A matches the optical axis l of the imaging lens 35.

The spool rotation control circuit 51 includes a controller 42
A drive pulse is supplied to the spool rotation pulse motor 13 in response to an instruction from the controller, and at the time of inspection and creation of the optical axis direction position adjustment table, each lens A in the spool S placed on the chuck 12 is sequentially turned on. Optical axis l of the imaging lens 35
The chuck 12 is rotated 90 degrees at a time so as to be inserted therein.

The knife edge illumination driving circuit 52 is controlled by the knife edge illumination lamp 32 in accordance with an instruction from the control unit 42.
Is supplied with a drive current for turning on. <Control Processing> Next, the contents of the control processing for the optical member inspection executed in the CPU 40 (the image processing section 41 and the control section 42) will be described with reference to the flowcharts of FIGS.

The main routine of the control processing shown in FIGS. 6 and 7 is a main power-on key (not shown) on the keyboard 43.
Is started by inputting. In the first step S0001, the control unit 42 instructs the uniaxial robot control circuit 49 to move the moving stage 4 to the test object supply / discharge position shown in FIG. When the moving stage 4 moves to the specimen supply / discharge position based on this instruction, the operator:
The spool S can be mounted on the chuck 12 (if the spool S is already mounted on the chuck 12, the spool S can be replaced).

When the operator finishes placing the spool S on the chuck 12, the operator inputs the fact to the control unit 42 via the keyboard 43. The control unit 42 waits for the input of this notification in S0002, and if there is an input, executes the process in S0.
Proceed to 003.

In S0003, the control unit 42 instructs the uniaxial robot control circuit 49 to move the moving stage 4 to the cavity number recognition position shown in FIG. When the moving stage 4 moves to the cavity number recognition position based on this instruction, the image processing section 41 takes an image near the cavity number mark by the cavity number recognition CCD camera 16 in S0004.

In the next S0005, the image processing unit 41
Only the cavity number mark is extracted from the image captured in S0003. In the next S0006, the image processing unit 41 calculates the cavity number of the lens that comes to the inspection position (the position on the near side of the center axis C in FIG. 24) based on the number of cavity number marks extracted in S0005. That is, the cavity number of the lens located at a point symmetric position with respect to the lens having the same cavity number as the number of the extracted cavity number marks with respect to the center axis C is calculated.

In the next S0007, the control unit 42 instructs the uniaxial robot control circuit 49 to move the moving stage 4 to the odd-number cavity inspection position. Next S00
At 08, the control unit 42 waits for the operator to input the identification number of the spool S placed on the chuck 12 via the keyboard 43. The same identification number is assigned to the same type of spool formed from the same mold, but a new identification number is assigned when the mold changes.

In the next S0009, the control unit 42
At 008, it is checked whether the input identification number has already been registered in the external memory 44. If not registered, the control unit 42 determines that the new type of spool S has been placed on the chuck 12, and executes an optical axis direction position adjustment table creation process in S0012. .

FIG. 8 is a flowchart showing an optical axis direction position adjustment table creation processing subroutine executed in S0012. In the first step S0101 after entering this subroutine, the control unit 42 causes the spool rotation control circuit 51 to set the lens corresponding to the cavity number 1 in the optical axis l of the imaging lens 35. That is, the control unit 42 determines the cavity number 1 based on the cavity number of the lens to be inspected (the lens set in the optical axis l of the imaging lens 35) A at the current time recognized in S0006.
, The rotation angle from this position to the optical axis l of the imaging lens 35 is calculated, and an instruction to rotate the chuck 12 by the calculated rotation angle is given to the spool rotation control circuit 51. When the spool rotation control circuit 51 sets the lens A corresponding to the spool number 1 in the optical axis l of the imaging lens 35 based on this instruction, the operator determines the position of the knife edge 28a in the optical axis direction with respect to the lens A. The adjustment and the focusing of the imaging lens 35 are manually performed. To manually adjust the position of the knife edge 28a in the optical axis direction, the operator manually rotates the shaft 21 to move the illumination unit 23.

When the operator completes the adjustment of the position of the knife edge 28a in the optical axis direction and the focusing of the image pickup lens 35, the operator informs the control unit 42 of the fact via the keyboard 43.
To enter. The control unit 42 waits for the input of this notification in S0102, and when there is an input, executes the process in S01.
Proceed to 03.

In step S0103, the control unit 42 executes an automatic centering process. FIG. 9 and FIG.
6 is a flowchart showing an automatic centering processing subroutine executed in step S1. The first S after entering this subroutine
At 0201, the control unit 42 issues an origin return command to the knife edge rotation control circuit 48. The origin is defined as the knife edge 2 in which the light shielding plate 28 itself comes to the near side in FIG.
8a and the rotation position of the light shielding plate 28. Upon receiving this origin return command, the knife edge rotation control circuit 48 drives the knife edge rotation pulse motor 24 to return the rotational position of the knife edge 28a to the origin.

In the next S0202, the control unit 42
It waits for the rotation of the knife edge 28a in response to the origin return command in 201 to end. In the next step S0203, the image processing unit 41 inputs data of an image captured by the subject imaging CCD camera 30 at this time.

In the next S0204, the control unit 42 issues a 90-degree rotation command to the knife edge rotation control circuit 48. Upon receiving the 90-degree rotation command, the knife-edge rotation control circuit 48 drives the knife-edge rotation pulse motor 24 to rotate the knife edge 28a clockwise by 90 degrees.
Start turning degrees.

In the next step S0205, the image processing section 41
Based on the data of the image input at S0203, the sum of the luminance values of all the pixels arranged in the Y-direction between the coordinate position y ₁ and the coordinate position y ₂ (integrated value) determining the Y _A.

In the next step S0206, the control unit 42
Knife edge 28a according to the 90-degree rotation command at 204
Wait for the rotation to finish. When this rotation is completed, the knife edge 28a faces in the direction (Y direction) orthogonal to the paper surface of FIG. 1, and the light shielding plate 28 itself is positioned on the left side of FIG.

In the next step S0207, the image processing section 41
At this point, data of an image captured by the CCD camera 30 for capturing an object is input. Next S0208
Then, the control unit 42 issues a 90-degree rotation command to the knife edge rotation control circuit 48.

In the next step S0209, the image processing unit 41
Based on the data of the image input at S0207, the sum of the luminance values of all the pixels arranged in the X direction between the coordinate position x ₁ and the coordinate position x ₂ (integral value) obtaining the X _A.

In the next S0210, the control unit 42
Knife edge 28a according to the 90-degree rotation command at 208
Wait for the rotation to finish. When this rotation is completed, the knife edge 28a faces in the left-right direction (X direction) on the paper surface of FIG. 1, and the light shielding plate 6 itself is located on the far side of FIG.

In the next step S0211, the image processing section 41
At this point, data of an image captured by the CCD camera 30 for capturing an object is input. Next S0212
Then, the control unit 42 issues a 90-degree rotation command to the knife edge rotation control circuit 48.

In the next step S0213, the image processing section 41
Based on the data of the image input at S0211, the sum of the luminance values of all the pixels arranged in the Y-direction between the coordinate position y ₁ and the coordinate position y ₂ (integrated value) determining the Y _B.

In the next S0214, the image processing section 41
From the luminance sum Y _A calculated at S0205 S0213
Calculates the "luminance difference" by subtracting the calculated brightness sum Y _B at the control was calculated "luminance difference" 4
Notify 2.

In the next step S0215, the control unit 42 applies the following function to the “brightness difference” notified from the image processing unit 41 to determine the movement amount ΔY for canceling the optical axis shift in the Y direction. Ask.

ΔY [μm] = − brightness difference / 250 The polarity of the amount of movement ΔY obtained in this manner indicates the direction in which the lens A to be inspected should be moved in order to cancel the optical axis deviation (“+” indicates The direction toward the back side in FIG. 1 is shown, and “−” indicates the direction toward the near side in FIG. 1). Note that the knife edge rotation control circuit 48 keeps the knife edge rotation pulse motor 24 even during the execution of the processing from S0213 to S0215.
Continue driving.

In the next step S0216, the control unit 42
It waits until the rotation of the knife edge 28a according to the 90-degree rotation command of 212 is completed. When this rotation is completed, the knife edge 28a is moved in a direction (Y direction) perpendicular to the plane of FIG.
And the light shielding plate 28 itself is located on the right side in FIG.

In the next S0217, the image processing section 41
At this point, data of an image captured by the CCD camera 30 for capturing an object is input. Next S0218
In the image processing unit 41, based on the data of the image input at S0217, the sum of the luminance values of all the pixels arranged in the X direction between the coordinate position x ₁ and the coordinate position x ₂ (integral value)
Determine the X _B.

In the next S0219, the image processing section 41
From the luminance sum X _A calculated at S0209 S0218
Calculates the "luminance difference" by subtracting the calculated brightness sum X _B in the control was calculated "luminance difference" 4
Notify 2.

In the next step S 0220, the control unit 42 applies the following function to the “brightness difference” notified from the image processing unit 41 to determine the movement amount ΔX for canceling the optical axis shift in the X direction. Ask.

.DELTA.X [.mu.m] =-luminance difference / 250 The polarity of the amount of movement .DELTA.X thus obtained indicates the direction in which the lens A to be inspected should be moved in order to offset the optical axis deviation ("+" indicates The direction to the right of FIG. 1 is shown, and “−” indicates the direction to the left of FIG. 1).

In the next S0221, the control unit 42
The movement amount ΔY in the Y direction obtained in 215 is 0 and S
It is determined whether or not the movement amount ΔX in the X direction obtained at 0220 is 0. If any one of them is not 0, the control unit 42 causes the X / Y stage control circuit 50 to move the inspection target lens A by ΔX in the X direction and by ΔY in the Y direction in S0222. To order. When the X / Y stage control circuit 50 completes moving the work table 11 in a plane orthogonal to the optical axis l in response to this command, the control unit 42 executes the processing in S0201.
Return to

As a result of repeating the loop processing from S0201 to S0222, if both movement amounts become 0, it is determined that the centering has been completed, the process exits from this loop from S0221, and the subroutine is terminated. I do. Then, the process returns to the routine of FIG.

In the routine of FIG. 8, the control unit 42 issues an origin return command to the knife edge rotation control circuit 48 in the next S0104. Upon receiving this home return command, the knife edge rotation control circuit 48 drives the knife edge rotation pulse motor 24 to cause the knife edge 2 to rotate.
The rotational position of 8a is returned to the origin.

In the next S0105, the image processing section 41
At that time, data of an image picked up by the CCD camera 30 for picking up an object is input, and brightness cross-section data consisting of brightness values of all pixels arranged on the Y-axis central axis is extracted.

In the next S0106, the image processing section 41
Based on the luminance section data acquired in S0105,
Calculating the sum of brightness values above the origin (between the coordinate position y ₁ and the origin 0), and notifies the luminance value sum calculated in the control unit 42 (corresponding to luminance data extraction means).

In the next S0107, the number of executions of S0105 and S0106 after the processing in FIG.
Check if the times have been reached. If the number has not reached 50 yet, the control unit 42 instructs the knife edge optical axis direction position control circuit 47 to move the illumination unit 23 by +10 μm in the optical axis direction in S0108. Upon receiving this instruction, the knife edge optical axis direction position control circuit 47 drives the knife edge optical axis direction position adjustment pulse motor 22 to move the illumination unit 23 downward by 10 μm along the optical axis 1 of the imaging lens 35. Let it. When this movement is completed, the image processing unit 41 executes the processing of S0105 and S0106 on the image captured by the CCD camera 30 for capturing an object at that time.

If the number of executions of S0105 and S0106 reaches 50 as a result of repeating the loop processing of S0105 to S0108, the control unit 42
At 109, the knife edge optical axis direction position control circuit 4
7, the illumination unit 23 is set to −500 μm in the optical axis direction.
An instruction to move m is issued. Upon receiving the instruction, the knife edge optical axis direction position control circuit 47 drives the knife edge optical axis direction position adjustment pulse motor 22 to move the illumination unit 23 upward by 500 μm along the optical axis 1 of the imaging lens 35.
Move m and return to the origin.

In the next step S0110, the control unit 42 instructs the knife edge optical axis direction position control circuit 47 to move the illumination unit 23 by −10 μm in the optical axis direction. Upon receiving the instruction, the knife edge optical axis direction position control circuit 47 drives the knife edge optical axis direction position adjustment pulse motor 22 to move the illumination unit 23 to the imaging lens 35.
Is moved upward by 10 μm along the optical axis l.

In the next step S0111, the image processing section 41
At that time, data of an image picked up by the CCD camera 30 for picking up an object is input, and brightness cross-section data consisting of brightness values of all pixels arranged on the Y-axis central axis is extracted.

At the next step S0112, the image processing section 41
Based on the luminance section data acquired in S0111,
Calculating the sum of brightness values above the origin (between the coordinate position y ₁ and the origin 0), and notifies the luminance value sum calculated in the control unit 42 (corresponding to luminance data extraction means).

In the next S0113, the number of executions of S0110 to S0112 since the processing in FIG.
Check if the times have been reached. If the number has not reached 50 yet, the process returns to S110.

If the number of executions of S0110 to S0112 reaches 50 as a result of repeating the above loop processing of S0110 to S0113, the control unit 42
At 114, the knife edge optical axis direction position control circuit 4
7, the illumination unit 23 is moved by +500 μm in the optical axis direction.
An instruction to move m is issued. Upon receiving this instruction, the knife edge optical axis direction position control circuit 47 drives the knife edge optical axis direction position adjustment pulse motor 22 to move the illumination unit 23 downward by 500 μm along the optical axis 1 of the imaging lens 35.
Move m and return to the origin.

At the next step S0115, the control unit 42
The values of the total of 100 luminance values calculated in 106 and S0112 are plotted on a graph (see FIG. 22) in correspondence with the deviation amount from the origin.

In the next step S0116, the control unit 42
Based on the graph created in 115, the movement amount (deviation from the origin) corresponding to each luminance value sum is obtained. Then, each movement amount [unit: μm] is converted into a pulse number.
That is, the pulse motor 22 for adjusting the position of the knife edge optical axis direction in the present embodiment moves the illumination unit 23 by 10 μm in the optical axis direction every time one drive pulse is received from the knife edge optical axis direction position control circuit 47. . Therefore, by reducing the value of each movement amount [unit: mm] to 1/10, the corresponding pulse number [unit: pulses] can be obtained.

In the next step S0117, the control unit 42
The combination of the total luminance value, the number of pulses, and the moving direction obtained in 116 are summarized in a table format. In the next S0118, the control unit 42 stores the table (optical axis direction position adjustment table) created in S0117 in S000.
The information is registered in the external memory 44 in association with the identification number input in 8. When this registration is completed, the process returns to the main routine of FIG. 6, and S0013 is executed.

On the other hand, if it is determined in S0009 that the identification number has been registered in the external memory 44, the control unit 42 determines in S0010 that the optical axis direction position adjustment table corresponding to the identification number has been registered. To the external memory 44
Read from

In the next step S0011, the control section 42 causes the spool rotation control circuit 51 to set the lens A corresponding to the cavity number 1 in the optical axis l of the imaging lens 35. In other words, the control unit 42 checks the current lens to be inspected (the optical axis l of the imaging lens 35) recognized in S0006.
(The lens set therein) The current position of the lens with the cavity number 1 is recognized based on the cavity number of A, and the rotation angle from this position to the optical axis l of the imaging lens 35 is calculated. An instruction to rotate 12 is given to the spool rotation control circuit 51. When the rotation of the chuck 12 according to this instruction is completed, the control unit 42 advances the processing to S0013.

In S0013, the control unit 42 determines in S010
Similarly to 3, the automatic centering process (FIGS. 9 and 10) is executed. S executed after completion of the automatic centering process
In 0014, the control unit 42 executes an automatic optical axis direction position adjustment process 1. FIG. 11 is a flowchart showing a subroutine of the automatic optical axis direction position adjustment processing 1 executed in S0014.

The first S030 after entering this subroutine
In 1, the controller 42 controls the knife edge rotation control circuit 48
Issue a home return command to Upon receiving this origin return command, the knife edge rotation control circuit 48 drives the knife edge rotation pulse motor 24 to return the rotational position of the knife edge 28a to the origin.

In the next step S0302, the image processing section 41
At that time, data of an image picked up by the CCD camera 30 for picking up an object is input, and brightness cross-section data consisting of brightness values of all pixels arranged on the Y-axis central axis is extracted.

In the next step S0303, the image processing section 41
Based on the luminance section data acquired in S0302,
Calculating the sum of brightness values above the origin (between the coordinate position y ₁ and the origin 0), and notifies the luminance value sum calculated in the control unit 42 (corresponding to luminance data extraction means).

At the next step S0304, the control unit 42
Optical axis direction position adjustment table created in step 117 or S0
With reference to the optical axis direction position adjustment table read in 010, the moving amount and moving direction of the illumination unit 23 corresponding to the value of the total luminance value calculated in S0303 are read.

In the next S0305, the control unit 42 sends a signal to the knife edge optical axis direction position control circuit 47 in S030.
An instruction is given to move the lighting unit 23 in accordance with the movement amount and the movement direction read out in step 4 (corresponding to an adjusting means). When the knife edge optical axis direction position control circuit 47 gives a driving pulse to the knife edge optical axis direction position adjustment pulse motor 22 in response to this instruction to move the illumination unit 34, the position of the knife edge 28a becomes the lens to be inspected. A coincides with the focal position of A.

When the movement of the illumination unit 23 in S0305 is completed, the control section 42 ends the subroutine of FIG. 11, and returns the processing to the main routine of FIG. In the main routine of FIG. 7, the control unit 42 next proceeds to S0015
Through S0019. In the first step S0015 after entering this loop processing, the control unit 42 converts the luminance of each pixel (pixel) constituting the image data input from the CCD camera 30 for imaging the object into numerical information of 256 gradations. Then, each is written to the first memory 41a.

In the next step S0016, the image processing section 41
Each piece of numerical information written in the first memory 41a is sequentially scanned to perform a differentiation process. That is, the numerical value of each pixel is checked in order from the upper left pixel to the lower right pixel in the image. Then, the numerical value of the check target pixel is compared with the numerical value of the pixel on the left side thereof and the numerical value of the pixel adjacent on the upper side, and the absolute value of the difference between the numerical values is calculated as the differential value [0-255] And In the image data converted into the differential value obtained in this manner, the contour of the portion of the inspection target lens A having the optical defect and the knife edge 28a
Only the edge of becomes an image with high density.

In the next step S0017, the image processing section 41
Perform image synthesis processing. That is, each differential value obtained in S0016 is written in the second memory 41b. On this occasion,
If the differential value of the previous image has been written in the second memory 41b as a result of S0017 in the previous loop processing, each differential value already written in the second memory 41b is extracted, and the current loop processing is performed. After adding the respective differential values obtained in S0016 in the second memory 41b
Overwrite

In the next S0018, the control unit 42
It is checked whether or not the number of image data input since the start of the loop processing of 015 or less has reached 16 images. If the number of input image data has not reached 16 images yet, in S0019, a command to rotate the knife edge 28a by 22.5 degrees is issued to the knife edge rotation control circuit 48. When the rotated image data is input from the object imaging CCD camera 30, the process returns to S0015, and the process for the new image data is executed.

The reason why the knife edge 28a is rotated by a small amount (S0019) to accumulate the obtained image data (S0017) is as follows.
That is, when the linear knife edge 28a is inserted into the optical path, the abnormal component in the direction parallel to the direction of the knife edge 28a can be detected best, but the knife edge 28a
The abnormal component in the direction orthogonal to the direction is not detected very well. Therefore, the knife edge 28a itself is rotated in a plane orthogonal to the optical axis l to detect all abnormal components in all directions and combine them on the same image.

As a result of repeating the loop processing as described above, when the number of input image data reaches 16 images,
The process exits from the loop processing from S0018 and proceeds to S00.
Go to 20.

FIG. 12 is a flowchart showing the contents of the inspection target area extraction processing subroutine executed in S0020. In the first step S0401 after entering this subroutine, the image processing section 41 performs a binarization process. This binarization process means that if the numerical information corresponding to each pixel of the image data in the second memory 41b exceeds a predetermined threshold, the numerical information is replaced with 255 (white), and if not, 0 ( (Black). This threshold value is set to a value such that the outer edge α of the inspection target lens A can be left as a white (255) closed curve without interruption.

In the next S0402, the image processing section 41
Execute a closed region extraction process. This closed area extraction processing
This is a process of extracting only an area surrounded by a closed white line. Specifically, among the black pixels [0] constituting the image data binarized in S0401, those surrounded by white pixels [255] are regarded as pixels in the closed area. Then, the numerical values of all pixels regarded as being within this closed area are set to 255, and the numerical values of all other pixels are set to 0.

In the next step S0403, the image processing section 41
Execute fill-in processing. This filling process is a process for erasing black pixels [0] left in white pixels [255]. Specifically, among the black pixels [0] constituting the image data obtained in S0402, the numerical value of a pixel surrounded by white pixels [255] is set to 255.

In the next S0404, the image processing section 41
Execute the area selection process. The region selection process is a process for validating only a region originally required and deleting other closed regions extracted based on a part of a gate or the like. Specifically, the image processing unit 41
Of the closed areas included in the image data obtained in S0403, the closed area located at the center of the screen is left as it is, and the numerical values of all the pixels constituting the other closed areas are set to 0. The image data obtained as a result of this area selection processing is hereinafter referred to as a “mask image”.

At the next step S0405, the image processing section 41
Execute the extraction operation process. That is, the luminance of the mask image is inverted (pixels of luminance [255] are set to luminance [0], and pixels of luminance [0] are set to luminance [255]), and each pixel of the image data in the second memory 41b. Is subtracted from the value (luminance) of the corresponding pixel in the mask image after the inversion. As a result of this extraction operation processing, of the image data in the second memory 41b, a white pixel [25] in the original mask image
Only the part corresponding to the area of [5] is left as it is, and the numerical values of the pixels of the other parts are all [0].

As described above, the image data used for determining the non-defective or defective product is obtained. This subroutine is terminated, and the process returns to the main routine of FIG. In S0021 executed after S0020 in FIG. 7, the image processing unit 41 compares the numerical value of each pixel constituting the image data extracted as a result of S0020 with a threshold value set to a level at which no eye noise is extracted. Then, binarization (255: white or 0: black) is performed. That is, if the numerical value of each pixel forming the image data is larger than the threshold value (if it is bright), the numerical value is replaced with 255, and if the numerical value of each pixel making up the image data is smaller than the threshold value (if it is dark), the numerical value is changed. Replace with 0.

At the next step S0022, the image processing section 41 executes a pass / fail judgment process. That is, the image processing unit 41 performs S0
For each white part in the image after the binarization process at 021, the graphical feature amount (the area of the white part, the maximum width, the center of gravity,
Filet diameter, etc.). For example, white [255]
The number of pixels is counted to determine the area. Then, the calculated graphical feature value is compared with each of the preset pass / fail judgment reference values. If at least one of the graphical feature values exceeds the corresponding pass / fail judgment reference value, it is rejected (defective product). ), And if all the graphical feature values fall within the corresponding pass / fail judgment reference values, it is judged as pass (non-defective). Which of the graphic feature amounts used for the determination is used for the pass / fail determination is determined depending on the type of the lens A to be inspected. The result of the pass / fail judgment is displayed on the monitor device 45 by the control unit 42.

In the next step S0023, the control unit 42 checks whether or not the inspection of steps S0013 to S0022 has been completed for all the lenses A in the spool S currently mounted on the chuck 12. If the inspections for all the lenses have not been completed, the control unit 42
In S0026, the spool rotation control circuit 51 is instructed to rotate the chuck 12 90 degrees counterclockwise. The spool rotation control circuit 51 rotates the chuck 12 in response to this instruction, and sets the lens corresponding to the cavity number two after that in the optical axis l of the imaging lens 35.

In the next step S0027, the control unit 42 checks whether or not the chuck 12 has made one rotation at this inspection position (odd cavity inspection position or even cavity inspection position). When it is determined that one rotation has been made, it can be determined that all the lenses having an odd cavity number have been inspected. Accordingly, in S0029, after instructing the single-axis robot control circuit 49 to move the moving stage 4 to the even-number cavity inspection position in S0029, the control unit 42 executes the processing in S0013 and subsequent steps again. On the other hand, if it is determined in S0027 that one rotation has not yet been made, the control unit 42 again executes the processing of S0013 and subsequent steps.

On the other hand, if it is determined in S0023 that the inspection for all the lenses has been completed, the control unit 42 determines in S0024 that the uniaxial robot control circuit 4
9 is instructed to move the moving stage 4 to the test object supply / discharge position shown in FIG.

In the next step S0025, the control unit 42 displays on the monitor 45 a character asking the examiner whether to continue the examination. In response to this, when the inspector has input from the keyboard 43 that the examination is to be continued, it is determined that the inspection object is still present, and the process proceeds to S0002.
Return to

On the other hand, when the inspector has input through the keyboard 43 that the examination is to be ended, it is determined that the object to be inspected no longer exists, and the control process is terminated. <Inspection Procedure by Optical Member Inspection Apparatus> When inspecting the lens A in the spool S by the above-described optical member inspection apparatus of the first embodiment, a non-defective lens A
After placing the spool S having
The identification number corresponding to the spool S is input by the keyboard 43 (S0008). If the identification number has not been registered, an optical axis direction position adjustment table creating process is executed (S0012).

In the optical axis direction position adjustment table creating process, first, the inspector manually adjusts the knife axis 28a in the optical axis direction and focuses the imaging lens 35 (S0102). That is, the inspector can monitor the monitor device 45.
The shaft 21 is rotated while watching the image projected on the screen. Then, as shown in FIG. 13A or 13B, the knife edge image γ is formed inside the outer edge α of the inspection target lens A in the same direction as the knife edge image β seen outside the outer edge α of the inspection target lens A. When you can see, knife edge 28
Since “a” is too close to the lens A to be inspected, the knife edge 28 a is moved away from the lens A to be inspected. Conversely, as shown in FIG. 13D or 13E, the outer edge α of the inspection target lens A is located inside the outer edge α of the inspection target lens A.
When the knife edge image γ is seen in the direction opposite to the knife edge image β that is seen outside the image, the knife edge 28a is too far from the lens A to be inspected. As a result of adjusting the position of the knife edge 28a in the optical axis direction as shown in FIG.
As shown in FIG. 3C, when the knife edge image γ has disappeared in most of the outer edge α of the inspection target lens A, the adjustment is stopped because the knife edge 28a is at an appropriate position. Thus, the adjustment of the optical axis position of the knife edge 28a is completed.

The examiner rotates the lens barrel 31 of the imaging device 30 while watching the image projected on the monitor device 45, and turns the imaging lens 35 on the imaging lens 35 until the surface of the lens A to be inspected can be clearly seen. Move in the axial direction. Thus, the focusing of the imaging lens 35 is completed. Then, while the illumination unit 23 is gradually shifted in the optical axis direction from the proper position, the luminance cross section on the Y axis is extracted from the image data captured at each point in time.
Luminance values of the origin-coordinate point y ₁ sums are calculated. And
An optical axis direction position adjustment table is created based on the shift amount and the total luminance value (S0104 to S0117), and registered in the external memory 44 (S0118).

As described above, since the position adjustment table in the optical axis direction is registered in the external memory 44 in correspondence with the identification number of each spool S, the same type of spool S to be inspected is replaced by a non-defective spool S thereafter. When placed on the chuck 12 and the same identification number is input, the corresponding optical axis direction position adjustment table is read from the external memory 44 (S0010).

When the optical axis direction position adjustment table is read from the external memory 44 in this way, the inspection for each lens A in the spool S mounted on the chuck 12 is executed in order. That is, every time the lens A to be inspected is set in the optical axis l of the imaging lens 35, an image formed by light passing through the lens A to be inspected is imaged by the CCD camera 30 for imaging the object, and luminance value sum of the origin-coordinate point y ₁ on the Y axis in the image data is calculated. Then, the movement amount and the movement direction corresponding to the calculated total luminance value are read from the optical axis direction position adjustment table, and the illumination unit 23 is driven to an appropriate position according to the movement amount and the movement direction.

When the automatic optical axis position adjustment is performed in this manner, the knife edge 28a is driven to rotate by 22.5 degrees by the knife edge rotation control unit 15 (S0019), and the lens to be inspected at each rotational position. A
An image formed by the light passing through is captured by the object imaging CCD camera 30 (S0015).
The image processing unit 41 emphasizes the shading change portion of each captured image by differential processing (S0016), and adds over one rotation (S0017). As a result, with respect to the defect component (refractive index [refractive power] abnormality, surface defect) in any direction of the lens A to be inspected, a region having the defect component is extracted and collected into one image data. That is, this image data is an image in which a portion having a defect is raised in white, regardless of the direction of the defect. Then, the area and the maximum width of the abnormal portion are quantified and compared with a predetermined judgment reference value, and it is objectively determined whether the product is good or defective according to the comparison result ( S0022).

In the above-described embodiment, the optical axis direction position adjustment table is created based on the total luminance value on the Y direction central axis, and the automatic optical axis direction adjustment using this optical axis direction position adjustment table is performed. The position is being adjusted. However, when the lens A to be inspected is a spherical lens, an optical axis direction position adjustment table is created based on the inclination of the luminance on the central axis in the Y direction, and the automatic adjustment using the optical axis direction position adjustment table is performed. The position adjustment in the optical axis direction may be performed.

[0145]

[Embodiment 2] Next, an optical member inspection apparatus according to a second embodiment of the present invention will be described. In the second embodiment, the control unit 42 creates an appropriate position table as shown in FIG. 34 instead of the optical axis direction position adjustment table in the first embodiment. That is, when registering the identification number of each spool S, the control unit 42
For all the lenses A in the inside, the CCD camera 3 for imaging the test object
The position of the illumination unit 23 in the optical axis direction where the luminance on the central axis in the Y direction becomes uniform and the inclination becomes 0 in the image picked up by 0 is found. In this manner, the inclination of the luminance becomes 0 because the focal position of the inspection target lens A is the knife edge 2.
This is a case where the inside of the outer edge α of the inspection target lens A in the image data has a uniform density by matching the position on the optical axis 1 of 8a. Therefore, the control unit 42 writes the position on the optical axis 1 of the illumination unit 23 at that time as an appropriate position corresponding to the cavity number of the lens A in the appropriate position table. The control unit 42 registers the appropriate position table created in this manner in the external memory 44 in association with the identification number of the spool S. The control unit 42
When the identification number corresponding to the type of the spool S placed on the chuck 12 is input via the keyboard 43, the appropriate position table corresponding to the identification number is read from the external memory 44. This is because if the same type of spool is formed from the same molding die and molding conditions, the runner L bends in exactly the same manner, and the distribution of the positions of the lenses A in the optical axis direction is exactly the same. It depends.
Then, at the time of inspection of each lens A, the control unit 42 reads the optical axis direction position corresponding to the cavity number of the lens A to be inspected from the appropriate position table, and moves the illumination unit 23 to the read optical axis direction position. Move it.

In practice, this proper position table includes a drive to be supplied to the knife edge optical axis direction position adjusting pulse motor 22 in order to move the illumination unit 23 from its lower limit movement position to the proper position. The number of pulses is
The position is registered as the position of the lighting unit 23. Therefore, the control unit 42 resets the internal counter (not shown) after temporarily moving the lighting unit 23 to the lower movement limit position,
By monitoring the number of drive pulses supplied from the knife edge optical axis direction position control circuit 47 to the knife edge optical axis direction position adjustment pulse motor 22, the illumination unit 2
The position of No. 3 is recognized.

The other mechanical configuration and the circuit configuration of the optical member inspection apparatus according to the second embodiment are completely the same as those of the first embodiment, and the description thereof will be omitted. <Control Processing> Next, in the second embodiment, the CPU 40
The contents of the control processing executed by the (image processing unit 41 and the control unit 42) will be described with reference to the flowcharts in FIGS.

The processing of S0501 to S0508 in the main routine of the control processing shown in FIG. 30 is completely the same as the processing of S0001 to S0008 in FIG. 6 in the first embodiment, and the description thereof will be omitted.

In step S0509, the control unit 42 executes the processing in step S050.
It is checked whether or not the identification number entered in step 8 has already been registered in the external memory 44. If not registered, the control unit 42 determines that a new type of spool S has been placed on the chuck 12, and
In S0514, an appropriate position registration process is executed.

FIG. 32 is a flow chart showing a proper position registration processing subroutine executed in S0514. In the first step S0601 after entering this subroutine, the control unit 42 instructs the spool rotation control circuit 51 to set the lens corresponding to the cavity number 1 to the imaging lens 3
5 is set in the optical axis l. That is, the control unit 42
Inspection lens (lens set in the optical axis l of the imaging lens 35) A at the present time recognized at 0506
Recognize the current position of the lens with cavity number 1 based on the cavity number, calculate the rotation angle from this position to the optical axis l of the imaging lens 35, and issue an instruction to rotate the chuck 12 by the calculated rotation angle. This is given to the control circuit 51. Based on this instruction, the spool rotation control circuit 51
Replaces the lens A corresponding to the spool number 1 with the imaging lens 35.
When set in the optical axis l of
In step (2), the illumination unit 23 is moved to the origin (the lower movement limit position) with respect to the knife edge optical axis direction position control circuit 47.

In the next step S0603, the control section 42 resets an internal counter (not shown). In the next step S0604, the control unit 42 executes the automatic centering processing of FIGS.

In the next step S0605, the control section 42 issues an origin return command to the knife edge rotation control circuit 48. When the knife-edge rotation control circuit 48 receives the home-return command, the knife-edge rotation pulse motor 24
Is driven to return the rotational position of the knife edge 28a to the origin.

In the next step S0606, the image processing section 41
At that time, an image of the lens A to be inspected captured by the CCD camera 30 for imaging the object is input. Next S
In step 0607, the image processing unit 41 converts the luminance values of all the pixels arranged on the central axis in the Y direction from the image data input in step S0606 into luminance cross-sectional data (a part of the light shielding unit that partially transmits light). (Luminance data on the center axis of the image oriented in a direction orthogonal to the boundary line between the light-shielding part and the light-shielding part) (corresponding to a luminance data extracting means).

At the next step S0608, the image processing section 41
The inclination of the distribution of the luminance section is determined. That is, FIG.
If the brightness cross section is inclined upward as a whole as shown in (b) (when the knife edge 28a is too close to the lens A to be inspected), it is determined that the luminance section is inclined in the "+ direction".
As shown in FIGS. 21 (d) and 21 (e), when the brightness section is inclined downward to the right as a whole (when the knife edge 28a is too far from the lens A to be inspected), it is determined to be inclined in the “−direction”. If it is determined, as shown in FIG. 21C, when the brightness cross section has a uniform brightness as a whole (when the knife edge 28a is at an appropriate position), it is determined to be “horizontal”.

If it is determined that the luminance section is inclined in the “-direction”, the control unit 42 controls the knife edge optical axis direction position control circuit 47 to move the lighting unit 23 upward in S0609. To move to 10 μm. If it is determined that the luminance section is inclined in the “+ direction”, an instruction is given in S0610 to move the illumination unit 23 downward by 10 μm.
In any case, the knife edge optical axis direction position control circuit 47 which has received the instruction supplies a driving pulse corresponding to the instructed moving amount and the moving direction to the knife edge optical axis direction position adjusting pulse motor 22. Then, the lighting unit 23 is moved. The driving pulse supplied at this time is counted by an internal counter (not shown) of the control unit 42.
Specifically, the internal counter counts up and moves downward when a driving pulse for moving the illumination unit 23 upward is supplied to the knife edge optical axis direction position adjustment pulse motor 22. Is counted down when a driving pulse is supplied. Therefore, the count value of the internal counter (not shown) corresponds to the position of the lighting unit 23. The pulse motor 22 for adjusting the position of the knife edge in the optical axis direction rotates the shaft 21 in accordance with the drive pulse, and the illumination unit 23
Is completed, the process returns to S0606, and the process for the image captured at that time is executed.

If it is determined in S0608 that the luminance section has become “horizontal” as a result of repeating the loop processing of S0606 to S0610, the control unit 42 advances the processing to S0611. In S0611, the control unit 4
Numeral 2 indicates the current count in the proper position storage area of the cavity number corresponding to the inspection target lens A (the lens A set in the optical axis l of the imaging lens 35) in the proper position table shown in FIG. Write the value.

In the next step S0612, the control unit 42 checks whether or not the proper position measurement in steps S0604 to S0611 has been completed for all the lenses A in the spool S currently mounted on the chuck 12. If the proper position measurement has not yet been completed for all the lenses, the control unit 42 controls the spool rotation control circuit 51 to move the chuck 12 counterclockwise in S0613.
Instruct to rotate 0 degrees. Spool rotation control circuit 5
1 rotates the chuck 12 in response to the instruction, and moves the lens corresponding to the cavity number two after to the imaging lens 35.
Is set in the optical axis l.

At the next step S0614, the control unit 42 checks whether or not the chuck 12 has made one rotation at this inspection position (odd cavity inspection position or even cavity inspection position). When it is determined that one rotation has been made, it can be determined that all the lenses having an odd cavity number have been inspected. Accordingly, in S0615, the control unit 42 instructs the single-axis robot control circuit 49 to move the moving stage 4 to the even-number cavity inspection position, and then executes the proper position measurement in S0604 and subsequent steps again. On the other hand, if it is determined in S0614 that one rotation has not yet been completed, the control unit 42
Performs the appropriate position measurement at S0604 and below as it is.

On the other hand, if it is determined in S0612 that the inspection has been completed for all the lenses, the control unit 42 determines in S0616 the appropriate position table in which the count value has been written in S0611 in S050.
The external memory 44 is associated with the identification number input at step 8.
(Corresponding to recording means). Upon completion of this registration, the process returns to the main routine of FIG.
15 is executed.

On the other hand, if it is determined in S0509 that the identification number has been registered in the external memory 44, the control unit 42 determines in S0510 that the optical axis direction position adjustment table corresponding to the identification number has been registered. To the external memory 44
(Readout means).

In the next step S0511, the control unit causes the uniaxial robot control circuit 49 and the spool rotation control circuit 51 to set the lens A corresponding to the cavity number 1 in the optical axis l of the imaging lens.

In the next step S0512, the control unit 42 causes the knife edge optical axis direction position control circuit 47 to move the illumination unit 23 to the origin (lower movement limit position). In the next S0513, the control unit 42 resets an internal counter (not shown), and advances the processing to S0515.

In step S0515, the control unit 42 determines in step S060
4, the automatic centering process (FIGS. 9 and 10) is executed. S executed after completion of the automatic centering process
At 0516, the control unit 42 executes automatic optical axis direction position adjustment processing 2. FIG. 33 is a flowchart showing a subroutine of the automatic optical axis direction position adjustment processing 2 executed in S0516.

First step S070 after entering this subroutine
In step 1, the control unit 42 sets the count value corresponding to the cavity number of the inspection target lens A (the lens A set in the optical axis l of the imaging lens 35) at that time to S
It is read from the proper position table in which the count value has been written in 0611 or the proper position table read in S0510.

In the next S0702, the control unit 42
The count value of the internal counter (not shown) at that time is subtracted from the count value read at 701 to calculate the number of drive pulses.

In the next step S0703, the control unit 42 sends a signal to the knife edge optical axis direction position control circuit 47 in step S070.
Illumination unit 23 according to the number of drive pulses calculated in 2
Is instructed to drive. When the polarity of the number of drive pulses calculated in S0702 is positive, the knife edge optical axis direction position control circuit 47 sets the moving direction of the illumination unit 23 to the downward direction, and the polarity of the number of drive pulses is negative. , The moving direction of the lighting unit 23 is set to the upward direction. Then, the same number of drive pulses as the absolute value of the number of drive pulses are supplied to the knife edge optical axis direction position adjustment pulse motor 22 to move the illumination unit 23 to an appropriate position.

When the movement of the illumination unit 23 in S0703 is completed, the control section 42 ends the subroutine of FIG. 33, and returns the processing to the main routine of FIG. FIG.
In the main routine of FIG.
7 and below are executed. The processing after S0517 is completely the same as the processing after S0015 in FIG. 7 in the first embodiment, and a description thereof will be omitted. <Inspection Procedure by Optical Member Inspection Device> When inspecting the lens A in the spool S by the optical member inspection device of the second embodiment described above, the inspector places the spool S having a good lens on the chuck 12. After the placement, the identification number corresponding to the spool S is input by the keyboard 43 (S0508). If the identification number has not been registered yet, a proper position registration process is executed (S0514).

In this proper position registration processing, the position of the lighting unit 23 is temporarily lowered to the lower movement limit position, and the internal counter in the control unit 42 is reset (S060).
2, S0603). Then, for each lens A of each cavity number, the illumination unit 23 is moved so that the inclination of the luminance on the Y-axis in the image data imaged by the CCD camera 30 for imaging the object is horizontal, and when the movement is completed. Is written in the appropriate position table (S0611). Then, the proper position table created in this manner is registered in the external memory 44 in association with the input identification number (S
0616).

As described above, the appropriate position table is registered in the external memory 44 in correspondence with the identification number of each spool S, and thereafter, the same type of spool S to be inspected is replaced on the chuck 12 in place of the non-defective spool S. And the same identification number is input, the corresponding appropriate position table is read from the external memory 44 (S051).
0).

When the optical axis direction position adjustment table is read from the external memory 44 in this way, the inspection for each lens A in the spool S mounted on the chuck 12 is executed in order. That is, every time the lens A to be inspected is set in the optical axis l of the imaging lens 35, an image formed by light passing through the lens A to be inspected is imaged by the CCD camera 30 for imaging the object, and The inclination of the luminance section on the Y axis in the obtained image data is calculated.
Then, a count value corresponding to the calculated inclination is read from the appropriate position table, and according to the count value,
The lighting unit 23 is driven to an appropriate position. Then, at this proper position, the inspection of the lens to be inspected is performed in the same manner as in the first embodiment.

[0171]

[Embodiment 3] Next, an optical member inspection apparatus according to a third embodiment of the present invention will be described. <Circuit Configuration of Optical Member Inspection Apparatus> FIG. 35 is a block diagram showing a circuit configuration of an optical member inspection apparatus according to the third embodiment. The circuit configuration of the third embodiment is characterized in that an up-down key 53 is connected to the control unit 42 of the CPU 40 as compared with the circuit configuration of the first embodiment. The up / down key 53 is used to move the knife edge 28a.
And a down key for inputting an instruction to move the knife edge 28a downward.

The control unit 42 creates an appropriate position table in the same manner as in the above-described second embodiment, and performs automatic optical axis position adjustment of the illumination unit 23 based on the appropriate position table. However, when the appropriate position table is created, an image captured by the object imaging CCD camera 30 is displayed on the monitor device 45 while an input signal from the up / down key 53 operated by the operator is received. Accordingly, the illumination unit 23 is moved in the optical axis direction, and when the fact that the blurred image is optimal is input via the keyboard 43, the count value of the internal counter at that time is written in the appropriate position table.

The other circuit configuration and mechanical configuration of the third embodiment are exactly the same as those of the second embodiment.
The description is omitted. <Control Processing> Next, in the third embodiment, the CPU 40
The contents of the control processing executed by the (image processing unit 41 and control unit 42) will be described with reference to the flowchart in FIG. Also in the third embodiment, the same control processing as in the second embodiment (FIGS. 30, 31, 33, 9, 10, and 12) is executed, but in S0514 in FIG.
6 is executed.

First S080 after entering this subroutine
In 1, the control unit 42 causes the spool rotation control circuit 51 to set the lens corresponding to the cavity number 1 in the optical axis l of the imaging lens 35.

In the next step S0802, the control unit 42 causes the knife edge optical axis direction position control circuit 47 to move the illumination unit 23 to the origin (lower movement limit position). In the next step S0803, the control unit 42 resets an internal counter (not shown).

In the next S0804, the control unit 42
Then, the automatic centering process of FIG. 10 is executed. Next S080
5, the control unit 42 controls the knife edge rotation control circuit 48.
Issue a home return command to

[0177] In next S0806, the control unit 42 checks whether or not an input indicating that the blurred image is optimal has been made via the keyboard 43. The fact that the blurred image is optimal is determined by the operator that the blur amount within the outer edge α of the inspection target lens A in the image captured by the object imaging CCD camera 30 is uniform. Entered by the person. If it is not yet input that the blurred image is optimal, the control unit 42 checks in S0807 whether the up / down key 53 has been operated by the operator.

If the up / down key 53 has not been operated at all, the control section 42 advances the processing to S0810 as it is. On the other hand, when an instruction to move the knife edge 28a upward is input by the up key, the control unit 42 sends the illumination unit 23 to the knife edge optical axis direction position control circuit 47 in S0808. Instruct to move upward. When the down key is pressed to move the knife edge 28a downward, the control unit 42 instructs the knife edge optical axis direction position control circuit 47 to move the illumination unit 23 downward in S0809. Instruct them to move. In any case, the knife edge optical axis direction position control circuit 47 that has received the instruction supplies a predetermined number of drive pulses to the knife edge optical axis direction position adjustment pulse motor 22 to move the illumination unit 23. The driving pulse supplied at this time is counted by an internal counter (not shown) of the control unit 42. Specifically, the internal counter counts up and moves downward when a driving pulse for moving the illumination unit 23 upward is supplied to the knife edge optical axis direction position adjustment pulse motor 22. Is counted down when a driving pulse is supplied. When the illumination unit 23 moves in response to the drive pulse supplied in this manner, the control unit 42
Advances the processing to S0810.

In S0810, the image processing section 41 inputs the image of the lens A to be inspected, which is captured by the CCD camera 30 for imaging the object at that time. Next S08
In 11, the control unit 42 displays the image input in S0810 on the monitor device 45, and returns the process to S0806.

As a result of repeating the loop processing from S0806 to S0811, if it is input that the blurred image is optimal, the processing advances from S0806 to S0812. In S0812, the control unit 42 stores the appropriate position storage area of the cavity number corresponding to the inspection target lens A (the lens A set in the optical axis l of the imaging lens 35) in the appropriate position table shown in FIG. Write the count value at that time.

In the next step S0813, the control unit 42 checks whether or not the proper position measurement in S0804 to S0812 has been completed for all the lenses A in the spool S currently mounted on the chuck 12. If the appropriate position measurement has not been completed for all the lenses, the control unit 42 controls the spool rotation control circuit 51 to move the chuck 12 counterclockwise in S0814.
Instruct to rotate 0 degrees. Spool rotation control circuit 5
1 rotates the chuck 12 in response to the instruction, and moves the lens corresponding to the cavity number two after to the imaging lens 35.
Is set in the optical axis l.

At the next step S0815, the control unit 42 checks whether or not the chuck 12 has made one rotation at this inspection position (odd cavity inspection position or even cavity inspection position). When it is determined that one rotation has been made, it can be determined that all the lenses having an odd cavity number have been inspected. Accordingly, in S0816, the control unit 42 instructs the single-axis robot control circuit 49 to move the moving stage 4 to the even-number cavity inspection position, and then re-performs the appropriate position measurement in S0804 and subsequent steps. On the other hand, if it is determined in S0815 that one revolution has not yet been completed, the control unit 42
Re-executes the appropriate position measurement at S0804 and below.

On the other hand, if it is determined in S0813 that the inspection for all the lenses has been completed, the control unit 42 stores in S0817 the appropriate position table in which the count value has been written in S0812 in S050.
The external memory 44 is associated with the identification number input at step 8.
(Corresponding to registration means). Upon completion of this registration, the process returns to the main routine of FIG. <Inspection Procedure by Optical Member Inspection Device> In the proper position registration processing by the optical member inspection device of the third embodiment described above, the position of the illumination unit 23 is temporarily lowered to the lower movement limit position, and the control unit The internal counter in 42 is reset (S0802, S0803). And
The operator appropriately operates the up / down key 53 while viewing the image of the lens A to be inspected displayed on the monitor device 45 for each lens A of each cavity number, and the outer edge of the lens A to be inspected in the image. The position of the illumination unit 23 where the blur state inside α becomes uniform as a whole is found.
Each time such a position (appropriate position) is found,
The operator inputs via the keyboard 43 that the blurred image is optimal. Then, the count value of the internal counter at each time when the input is made is written to the appropriate position table (S0812). Then, the proper position table created in this way is registered in the external memory 44 (S0817).

The other inspection procedures in the third embodiment are exactly the same as those in the second embodiment, so that the description will be omitted.

[0185]

Embodiment 4 Next, an optical member inspection apparatus according to a fourth embodiment of the present invention will be described. <Mechanical Configuration of Optical Member Inspection Apparatus> FIG. 37 shows a mechanical configuration of the fourth embodiment. As is apparent from FIG.
The mechanical configuration of the fourth embodiment is the same as that of the first embodiment shown in FIG.
In comparison with the mechanical configuration of the above, the column 15, the cavity number recognizing CCD camera 16, the imaging lens 17, and the cavity number recognizing transmitted illumination device 18 are omitted. Also,
In the fourth embodiment, the spool S mounted on the chuck 12 has a shape in which one lens A is connected to each of the tips of four runners L extending in the cross direction. In this connection, the inspection position of the moving stage 4 is 1
Only the location.

The other mechanical configurations in the fourth embodiment are exactly the same as those in the first embodiment, and therefore description thereof will be omitted. <Circuit Configuration of Optical Member Inspection Apparatus> FIG. 38 shows a circuit configuration of the fourth embodiment. As is apparent from FIG.
The circuit configuration of the fourth embodiment is similar to that of the first embodiment shown in FIG.
9 compared to the circuit configuration of 9
The camera 16, the external memory 44, the transmitted illumination driving circuit 46 for cavity number recognition, and the transmitted illumination device 18 for cavity number recognition are omitted. The control unit 42 does not create and use the optical axis direction position adjustment table as in the first embodiment or the proper position table as in the second and third embodiments, and sets the inspection target lens A Each time, the automatic adjustment of the knife edge 28a in the optical axis direction is performed.

The other circuit configurations in the fourth embodiment are exactly the same as those in the first embodiment, and the description thereof will be omitted. <Control Processing> Next, in the fourth embodiment, the CPU 40
The contents of the control processing executed by the (image processing unit 41 and control unit 42) will be described with reference to the flowcharts of FIGS. 39 and 40.

This control process is started when a main power-on key (not shown) in the keyboard 43 is turned on. In the first step S0901, the control unit 42
Is the moving stage 4 for the uniaxial robot control circuit 49.
Is moved to the test object supply / discharge position shown in FIG. When the moving stage 4 moves to the inspection object supply / discharge position based on this instruction, the operator can place the spool S on the chuck 12 (the spool S is already placed on the chuck 12). In this case, the spool S can be replaced.)

When the operator finishes placing the spool S on the chuck 12, the operator inputs the fact to the control unit 42 via the keyboard 43. The control unit 42 waits for the input of this notification in S0902, and when there is an input, executes the process in S0902.
Proceed to 903.

In S0903, the control unit 42 instructs the uniaxial robot control circuit 49 to move the moving stage 4 to the inspection position. In the next S0904, the control unit 4
2 executes the automatic centering processing of FIGS. 9 and 10.

At the next step S0905, the control unit 42 issues an origin return command to the knife edge rotation control circuit 48. When the knife-edge rotation control circuit 48 receives the home-return command, the knife-edge rotation pulse motor 24
Is driven to return the rotational position of the knife edge 28a to the origin.

In the next step S0906, the image processing section 41
At that time, the image of the inspection target lens A captured by the CCD camera 30 for capturing an object is input. In the next S0907, the image processing unit 41 extracts, from the image data input in S0606, the luminance values of all the pixels arranged on the Y-axis central axis as luminance cross-sectional data.

In the next step S0908, the image processing section 41
Differentiation processing is performed on the luminance section data extracted in S0907, and the inclination of the distribution of the luminance section is determined. The criterion for this determination is S06 in FIG.
08.

If it is determined that the luminance section is inclined in the “-direction”, the control unit 42 instructs the knife edge optical axis direction position control circuit 47 to move the lighting unit 23 upward in S0909. To move to 10 μm. If it is determined that the luminance section is inclined in the “+ direction”, in S0910, an instruction is given to move the illumination unit 23 downward by 10 μm.
The knife edge optical axis direction position control circuit 4 receiving this instruction
When the moving of the lighting unit 23 is completed, the process proceeds to S0.
Returning to step 906, the process for the image captured at that time is executed.

As a result of repeating the loop processing from S0906 to S0910, if it is determined in S0908 that the luminance section has become “horizontal”, the control unit 42 advances the processing to S0911 and below.

The processing from S0911 to S0918 is performed in the first
Since the processing is exactly the same as the processing of S0015 to S0022 in FIG. 7 in the embodiment, the description thereof will be omitted. Next S09
At 19, the control unit 42 controls all lenses A (four) in the spool S currently mounted on the chuck 12
It is checked whether the inspection from 904 to S0918 has been completed. If the inspection for all the lenses has not been completed, the control unit 42 sends the chuck 1 to the spool rotation control circuit 51 in S0920.
2 is rotated 90 degrees counterclockwise. The spool rotation control circuit 51 according to this instruction
Is rotated, the control unit 42 proceeds to S09
Return to 04.

On the other hand, if it is determined in S0919 that the inspection for all the lenses has been completed, the control unit 42 determines in S0921 that the uniaxial robot control circuit 4
9 is instructed to move the moving stage 4 to the test object supply / discharge position shown in FIG.

At the next step S0922, the control section 42 displays on the monitor device 45 a character asking the examiner whether to continue the examination. In response to this, if the inspector has input via the keyboard 43 that the examination is to be continued, it is determined that the inspection object is still present, and the process proceeds to S0902.
Return to

On the other hand, if the inspector has input through the keyboard 43 that the examination is to be ended, it is determined that the object to be inspected no longer exists, and the control process is terminated. <Inspection Procedure by Optical Member Inspection Device> When inspecting the lens A in the spool S by the optical member inspection device of the fourth embodiment described above, the inspector places the spool S having a good lens on the chuck 12. Place.

Then, the illumination unit 23 is moved for each lens A of each cavity number such that the inclination of the luminance on the Y axis in the image data picked up by the CCD camera 30 for picking up an object is horizontal. When the movement is completed, the inspection of the inspection target lens is performed.

[0201]

According to the optical member inspection apparatus of the present invention, the relative position between the optical member and the knife edge in the optical axis direction can be appropriately adjusted.

[Brief description of the drawings]

FIG. 1 is a side view showing a mechanical configuration of an optical member inspection apparatus according to a first embodiment of the present invention.

FIG. 2 is an enlarged view of the chuck of FIG. 1;

FIG. 3 is a block diagram showing a circuit configuration of the optical member inspection device of FIG. 1;

FIG. 4 is an optical configuration diagram of the optical member inspection apparatus of FIG. 1;

FIG. 5 is a plan view of the light shielding plate in FIG. 1;

FIG. 6 is a flowchart showing control processing executed by the CPU of FIG. 1;

FIG. 7 is a flowchart showing control processing executed by the CPU of FIG. 1;

FIG. 8 is a flowchart showing an optical axis direction position adjustment table creation processing subroutine executed in S0012 of FIG. 1;

9 is a flowchart showing an automatic centering processing subroutine executed in S0013 of FIG. 7 and S0103 of FIG. 8;

10 is a flowchart showing an automatic centering processing subroutine executed in S0013 of FIG. 7 and S0103 of FIG. 8;

11 is a flowchart showing a subroutine of automatic optical axis direction position adjustment processing 1 executed in S0014 of FIG. 7;

FIG. 12 is a flowchart showing an inspection target area extraction processing subroutine executed in S0020 of FIG. 7;

13 is a diagram showing an image on a monitor device when adjusting the position of the knife edge in the optical axis direction in FIG. 1;

FIG. 14 is a diagram showing an image on a monitor device when a lens having sink marks is inspected.

FIG. 15 is an explanatory diagram of coordinate axes and coordinate positions defined on image data.

FIG. 16 is a graph showing a luminance distribution on the central axis in the Y direction in image data when the amount of displacement in the Y direction is −0.2 μm.

FIG. 17 is a graph showing the luminance distribution on the center axis in the Y direction in the image data when the amount of displacement in the Y direction is −0.1 μm.

FIG. 18 is a graph showing a luminance distribution on a central axis in the Y direction in image data in a state where the image data is centered in the Y direction.

FIG. 19 is a graph showing a luminance distribution on the center axis in the Y direction in image data when the amount of displacement in the Y direction is +0.1 μm.

FIG. 20 is a graph showing the luminance distribution on the central axis in the Y direction in the image data when the amount of displacement in the Y direction is +0.2 μm.

21 is a graph showing the luminance distribution on the center axis in the Y direction in each image of FIG.

FIG. 22 is a graph plotting the total luminance value calculated from FIG. 21;

FIG. 23 is a table showing an optical axis direction position adjustment table;

FIG. 24 is a side view showing a mechanical configuration of the optical member inspection apparatus when the moving table is located at the cavity number recognition position.

FIG. 25 is a side view showing a mechanical configuration of the optical member inspection apparatus when the moving table is located at the inspection position.

26 is a diagram showing an image on the monitor device when adjusting the position of the knife edge in the optical axis direction in FIG. 1;

27 is a graph showing a luminance distribution on the center axis in the Y direction in each image of FIG. 26.

28 is a diagram showing an image on the monitor device when adjusting the position of the knife edge in the optical axis direction in FIG. 1;

29 is a graph showing a luminance distribution on the center axis in the Y direction in each image of FIG. 28.

FIG. 30 is a flowchart showing control processing executed by a CPU according to the second embodiment of the present invention.

FIG. 31 is a flowchart showing control processing executed by a CPU according to the second embodiment of the present invention.

FIG. 32 is a flowchart showing a proper position registration processing subroutine executed in S0514 of FIG. 30;

FIG. 33 is a flowchart showing a subroutine of automatic optical axis direction position adjustment processing 2 executed in S0516 in FIG. 31;

FIG. 34 is a table showing an appropriate position table.

FIG. 35 is a block diagram showing a circuit configuration of an optical member inspection device according to a third embodiment of the present invention.

36. FIG. 36 shows the operation of S051 in FIG. 30 in the CPU in FIG.
4 is a flowchart showing an appropriate position registration processing subroutine executed in step 4.

FIG. 37 is a side view showing a mechanical configuration of an optical member inspection device according to a fourth embodiment of the present invention.

38 is a block diagram showing a circuit configuration of the optical member inspection device in FIG. 37.

FIG. 39 is a flowchart showing control processing executed by the CPU in FIG. 38;

40 is a flowchart showing control processing executed by the CPU in FIG. 38.

FIG. 41 is a plan view of a spool.

FIG. 42 is a side view of the spool.

FIG. 43 is a side view of a spool where a runner is bent.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 12 Chuck 13 Spool rotation pulse motor 20 Moving stay 21 Shaft 22 Knife edge Optical axis direction position adjustment pulse motor 23 Illumination unit 28 Shielding plate 30 CCD camera for object imaging 34 Diffusion plate 35 Imaging lens 40 CPU 41 Image processing unit 42 control unit 44 external memory 47 knife edge optical axis direction position control circuit 53 up / down key A lens to be inspected L runner S spool

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Toshihiro Nakayama 2-36-9 Maenocho, Itabashi-ku, Tokyo Asahi Kogaku Kogyo Co., Ltd.

Claims (11)

[Claims] An optical member inspection device for detecting an optical defect of an optical member, comprising: a diffusion plate illuminated by illumination light; a light diffused by the diffusion plate; A light shielding unit that is in contact with the diffusion plate so as to shield light, an imaging unit that captures light transmitted through the optical member, and the optical member is held on an optical axis between the imaging unit and the light shielding unit. An optical member inspection comprising: a holding unit; and an adjusting unit that adjusts a relative position in the optical axis direction between the holding unit and the light shielding unit based on an image captured by the imaging unit. apparatus. 2. An optical member inspection apparatus for detecting an optical defect of optical members connected to each other by a runner, comprising: a diffusion plate illuminated by illumination light; and a partly transmitted light diffused by the diffusion plate. Light-shielding means that is in contact with the diffusion plate so as to partially and partially shield light; imaging means for imaging light transmitted through the optical member; and a surface holding the runner and orthogonal to an optical axis of the imaging means. And a holding unit for selectively arranging each optical member connected by the runner on an optical axis between the imaging unit and the light shielding unit; and an image captured by the imaging unit. An optical member inspection apparatus, comprising: an adjusting unit that adjusts a relative position between the holding unit and the light shielding unit in the optical axis direction based on the condition. 3. The image processing apparatus according to claim 1, further comprising: a luminance data extracting unit configured to extract luminance data of a specific range in the image captured by the imaging unit; and the adjusting unit based on the luminance data extracted by the luminance data extracting unit. The optical member inspection apparatus according to claim 1, wherein a relative position between the holding unit and the light blocking unit in the optical axis direction is adjusted. 4. The specific range in which the luminance data is extracted by the luminance data extracting means is orthogonal to a boundary line between a part of the light shielding part that partially transmits the light and a part that partially shields the light. The optical member inspection apparatus according to claim 3, wherein the optical member inspection apparatus has a range extending in a direction. 5. The luminance data extracted by the luminance data extracting means, wherein the luminance data is oriented in a direction orthogonal to a boundary line between a part of the light shielding part that partially transmits the light and a part that partially shields the light. The optical member inspection apparatus according to claim 3, wherein the data is luminance data on a central axis of an image. 6. An optical member inspection apparatus according to claim 5, wherein the luminance data extracted by said luminance data extracting means is luminance data in a range deviated from a center on said central axis. 7. The adjusting means includes: a light source for detecting the relative brightness in the optical axis direction between the holding unit and the light-shielding means such that the brightness data extracted by the brightness data extracting means has a uniform brightness over the entire area; The optical member inspection apparatus according to claim 3, wherein the position is adjusted. 8. The relative position in the optical axis direction between the holding unit and the light shielding unit such that an integral value of the luminance data extracted by the luminance data extracting unit becomes a predetermined value. The optical member inspection apparatus according to claim 6, wherein the position is adjusted. 9. The apparatus according to claim 9, wherein said adjusting means has a table in which a relative movement amount in said optical axis direction between said holding section and said light shielding means corresponds to said integral value in advance. Referring to this table based on the integrated value of the luminance data extracted by the data extracting means, the corresponding relative movement amount is read, and the holding unit and the light shielding means are connected to the light based on the read relative movement amount. The optical member inspection apparatus according to claim 8, wherein the optical member inspection apparatus is relatively moved in the axial direction. 10. The adjustment means adjusts a relative position in the optical axis direction between the holding part and the light shielding means by moving the light shielding means with respect to the holding part. The optical member inspection device according to claim 2. 11. A storage unit for storing, for each optical member connected to each other by the runner, a position of the light shielding unit at the time when the relative position is adjusted, a runner of the same type as the runner is provided in the holding unit. A reading unit that reads, from the storage unit, a position of the light-shielding unit corresponding to an optical member disposed on an optical axis between the imaging unit and the light-shielding unit when held by the imaging unit; 11. The optical member inspection apparatus according to claim 10, wherein when the position of the light shielding unit is read by the reading unit, the adjusting unit moves the light shielding unit to the read position.