JPH10195633A - Film forming device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a film forming device capable of efficiently forming a preventive means for creeping discharge generating on the inner circumferential face of the neck around the electron gun of a picture tube. SOLUTION: On a hole 4a provided in the center of the lid 4 of a vacuum chamber 3, a cylindrical mask 11 is installed having internally a slider 16 that is fitted to the hole and slidable. An orifice 13 is provided in this mask 11, with a taper 11b formed on the outer circumferential edge at the tip end of the mask 11, while an O-ring 17 which seals by elastically deforming at the time of a reduced pressure is provided between the jaw 16a of the slider 16 and the taper 11b. As a result, the area only is evacuated in which the gap is specified against the neck 18 to be externally fitted to the mask 11, so that a film can be formed only in this area.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a film forming apparatus (for example,
The present invention relates to a device for forming a metal thin film for preventing creeping discharge on a limited portion of an inner peripheral surface of a tube body such as a neck portion of a cathode ray tube such as a television picture tube.

[0002]

2. Description of the Related Art Conventionally, a picture tube 35 of a television is constructed as shown in a schematic sectional view of FIG. Picture tube 3
The neck portion 18 of 5 is formed in a cylindrical shape, and an electron gun 38 is provided inside the terminal portion 37 for extracting an electrode as shown in the figure. As the type of the electron gun 38, there are a delta arrangement or a line arrangement of three electron guns, a single electron gun three electron beam system, and the like.
Shows the case of the single electron gun 3 electron beam system.

The electron gun 38 emits electron beams from respective cathodes for red (R), green (G), and blue (B) electron beams, and these electron beams are focused and accelerated by an anode. Then, it is scanned by the convergence coil, and collides with each of the R, G, B phosphors disposed on the inner surface of the face plate to emit a predetermined color.

However, as described above, a creeping discharge may be generated on the inner peripheral surface of the neck portion 36 at or near the electron gun 38 that emits an electron beam due to the influence of the leakage beam. Although the creeping discharge hinders the operation of the picture tube 35, there has been no effective countermeasure for preventing the creeping discharge.

[0005] Regarding the mechanism of generation of creeping discharge at the neck of a cathode ray tube, which is a kind of discharge in a vacuum, the discharge of electrons from the cathode junction of an electron gun is followed by charging of the neck by a secondary electron avalanche mechanism. This phenomenon is explained by the gas discharge in the released gas formed along with the phenomenon (IEEE Technical Report No. 586, "Utilization and suppression of discharge in vacuum").

[0006] Such creeping discharge is repeatedly generated as long as electrons are continuously emitted from the low potential side stray source. Discharge noise is generated along with the discharge, and the screen is shaken. Further, the safety circuit operates, the power may be turned off, and in some cases, the IC incorporated in the picture tube may be destroyed.

[0007]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and involves secondary avalanche, sound generation, screen shaking, power off, IC destruction, etc. It is an object of the present invention to provide a film forming apparatus capable of effectively preventing creeping discharge which causes troubles.

[0008]

Means for Solving the Problems As a result of intensive studies to solve the above-mentioned problems, the present inventor focused on film forming means using a pressure reducing mechanism, and found an effective application method.
The present invention has been reached.

That is, the apparatus of the present invention comprises a film-forming material flying section for flying a film-forming material under reduced pressure, a mask defining a film-forming region connected to the film-forming material flying section, And a sealing material that is disposed and deviates toward the film formation region under the reduced pressure to seal the film formation region.

According to this film forming apparatus, since the film forming region is defined at a desired place by the mask and the sealing material and the conductive material is formed, abnormalities such as creeping discharge which tend to occur at the defined place are obtained. The state is prevented more than enough, and it is possible to eliminate the hindrance to the performance of the product such as screen disturbance and malfunction of the circuit. In order to form the film, the above-mentioned film-forming place can be automatically defined by the above-mentioned sealing material which is deviated at the time of film-forming under reduced pressure.

On the other hand, when a thin film is formed by depositing a metal material on the inner wall surface of the tube as described above, it is generally considered that the thin film is formed by vapor deposition. When it is necessary to form a film by limiting the area of the wall, it is necessary to simply mask the area other than the film formation area,
In this case, the work including the mounting of the mask is extremely troublesome, and the film formation itself is difficult.

[0012]

In the above apparatus according to the present invention, it is preferable that the displacement of the sealing material is caused by the pressure difference at the time of the pressure reduction.

[0013] Then, the above-mentioned apparatus holds a vacuum,
A film deposition apparatus for flying and depositing the film-forming material on the inner wall of a pipe, wherein the mask and the sealing material are automatically displaced by the pressure difference, and thereby, in a region where the film-forming material is adhered. It is preferable that only a certain film forming region is evacuated, and the film forming material is selectively adhered to the inner wall of the tube in this vacuum region.

In the above apparatus, the tube is a neck portion of a cathode tube containing an electron gun, and a conductive material is formed on the inner wall of the neck portion. It is desirable to be configured.

In the above apparatus, when the pressure is released, the sealing material is restored and the sealing state is released,
It is desirable that the seal material be automatically restored when the reduced pressure is released to the atmospheric pressure.

In this case, it is preferable that the mask has a slide portion, and the rubber sealing material is deviated and returned in conjunction with the slide portion.

Further, in the above apparatus, the film forming material flying section is constituted by a vacuum chamber having vacuum suction means and a flying source of the film forming material provided in the vacuum chamber, and is arranged on the vacuum chamber. A cylindrical engaging portion that is formed on the outer peripheral edge of the distal end and that is engaged with the tubular body to form a film formation region between the tubular body and the tubular engaging portion; The mask is constituted by pressurizing means which is provided internally and has respective stopper portions abutting on both ends in the sliding direction on the inner peripheral surface of the distal end portion of the engaging portion, and the inclined surface and the stopper portion are formed. And the sealing material is disposed in a space surrounded by the pipe body, the engaging portion is fitted from an end opening of the pipe body, and is joined and engaged with each other at the end opening. The pressure contact means is sucked by the vacuum suction of the vacuum chamber, and the The pressing portion slides toward the opening, and the distal end side stopper portion of the press-contacting means seals between the inclined surface and the inner wall of the pipe adjacent to the inclined surface via the sealing material. In a limited region between the end opening of the tube and a vacuum formed by defining a gap formed by the inner wall of the tube, the engaging portion, and the sealant as the film forming region, desirable.

In the above apparatus, a through-hole for communicating the film-forming region with the vacuum chamber is provided in the engaging portion, and the film-forming material flying from the vacuum chamber through the through-hole is formed of the material. It is preferable that the gas flows into the film region and is attached to the inner wall of the tube in the film formation region.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below, but it goes without saying that the present invention is not limited to the following embodiments.

FIG. 1 is a cross-sectional view (a cross-sectional view taken along line II of FIGS. 3 and 4) showing a film forming apparatus of this embodiment. This film forming apparatus (hereinafter, simply referred to as an apparatus) 30 includes an RC having a positioning error correcting function on a pedestal 1 movable on a floor surface.
A C device (trade name, manufactured by Bando Chemical Co., Ltd.) 2 is fixed, and a vacuum chamber 3 is fixed thereon with bolts 5.

In the vacuum chamber 3, a crucible 6 made of, for example, alumina is provided between the vacuum chamber 3 and the insulating material 2.
6 and is fixed by a crucible retainer 10. The crucible 6 heats the film forming material 7 by a heater (not shown). In addition, crucible holder 1
Numeral 0 denotes a portion made of copper and a portion made of alumina, and is insulated from the vacuum chamber 3 by an insulating material 26.

Further, a suction tube 21 is connected to the vacuum chamber 3 together with an exhaust pipe, conductive terminals, and the like, which will be described later. A lid 4 is provided on the vacuum chamber 3, and the vacuum chamber 3 is sandwiched between O-rings 9. It is connected to the flange 3a by a bolt 8. The cooling water pipe 2 is placed on the lid 4.
0 is provided. For the O-ring, for example, a hydrogenated nitrile rubber is used as a base rubber, but a rubber having the same sliding property as this may be used.

A hole 4a is provided in the center of the lid 4, and the mask 11 corresponds to the hole 4a.
The flange 11 a is connected to the lid 4 by bolts 15 with the nip therebetween, and communicates with the vacuum chamber 3. The mask 11 has a cylindrical shape, and its tip is formed to be thicker in the inward direction. A stopper 11a is formed at the lower end of the thick part, and a taper 11b is formed at the outer peripheral edge at the other end. Outflow holes 13 penetrating through the walls of the mask 11 are provided in the upper and lower central portions of the mask 11, so that the flying material 7A flows out of the outflow holes 13 as indicated by arrows.

As shown in FIG. 1, the mask 11 has
A slider 16 engaged with the inside of the thick portion of the mask 11 is provided, and this slider 16 slides toward the vacuum chamber 3 when the pressure is reduced. A flange 16 is provided at the end of the slider 16 inside the mask 11.
b is formed, and the stopper 11a of the mask 11 described above is formed.
To come into contact with. Also, this slider 1
A jaw 16a having a diameter smaller than the outer diameter of the mask 11 is formed at the other end of the mask 6, and an O-ring 17 is arranged between the jaw 16a and the taper 11b of the mask 11 described above. Lever jaw 16a is O-ring 17
Is pressed or released. The slider 16 can be attached to and detached from the mask 11 by rotating, for example, 90 degrees.

The apparatus 30 of the present embodiment is constructed as described above. As shown in FIG. 1, the opening of the neck 18 of the picture tube is fitted to the jaw 16a of the slider 16 and the mask 11 so as to be fitted together. . At a position where the opening end of the neck portion 18 contacts, a packing 14 made of, for example, silicone rubber is disposed in a groove on the upper surface of the flange 11 c of the mask 11.

When connecting the neck 18, for example, the device 30 may be fixed and the neck 18 of the picture tube may be fitted onto the mask 11, or, for example, the picture tube and the neck 18 may be fixed. And move the device 30 to move the mask 1
1 may be inserted into the neck portion 18. After the connection, the picture tube is desirably supported by a supporting material. In either case, this connection is adjusted by the RCC device 2 while the opening end of the neck portion 18 and the packing 14 are adjusted.
It is preferable to equalize the gap between the inner wall 18a of the neck portion and the mask 11 and join them together.

As described above, after the neck portion 18 is connected to the mask 11, the vacuum chamber 3 is evacuated to automatically slide the slider 16 so that the jaw 16a of the slider 16 presses the O-ring 17, Mask 11
Between the taper 11b and the adjacent inner wall 18a of the neck.

FIGS. 2A and 2B show a state before and after the operation of the slider 16, wherein FIG. 2A shows a state at a raised position before the operation of the slider 16, and FIG. 2B shows a state at a lowered position where the slider 16 is operated. Is shown.

Before the operation of the slider 16, the jaw 16a of the slider 16 is pushed up by the elasticity of the O-ring 17 as shown in FIG.
6b is in contact with the stopper 11a of the mask 11.
However, after the operation, the jaw 16a of the slider 16 presses the O-ring 17 as shown in FIG. For this reason,
The O-ring is the jaw 16a, the taper 11 of the mask 11
b and the neck portion inner wall 18a, the mask 1
The space 19 between the inner wall 1 and the inner wall 18a is shielded from the other inner wall space.

Thus, the O-ring 17 and the neck 1
The gap 19 in the region between the opening 18 and the opening 8 is decompressed and evacuated with the evacuation of the vacuum chamber 3, and the neck 18
The contact between the opening and the packing 14 increases, and the gap 19 (see FIG. 1) in this region can completely maintain the vacuum.

As described above, when the gap 19 is in a vacuum, the film forming material 7 is heated from the crucible 6 and flies, and the flying material 7A flows out of the outflow hole 13 of the mask 11 into the above-described gap 19 to flow into the inner wall 18. A film is formed by vapor deposition on the surface.

Therefore, after film formation, the neck 18 is
In order to prevent the film formation surface from being damaged when the film is separated from 1, the gap C is required to be, for example, 0.5
mm to 1.0 mm is preferred. The material of the mask 11 is preferably SUS304, for example, and the slider 1
As the material No. 6, C1020 (oxygen-free copper) is desirable.
The above-described region is a range that sufficiently includes the electron gun.

FIG. 3 is a plan view of FIG. 1, but shows only the upper part from the lid 4 in FIG. 1 and does not show other parts.
As shown in the figure, a cooling water pipe 20 is provided on the lid 4 and connected to a pump (not shown). The apparatus cools the vacuum chamber 3 during operation of the apparatus 30, and cools the vacuum chamber 3 with the heating of the film forming material 7. The rise has been suppressed.

FIG. 4 is a cross-sectional view taken along the line IV-IV of FIG. 1 and shows an arrangement inside the vacuum chamber 3 and the like. As shown in the drawing, conductive terminals 23 are provided outside the vacuum chamber 3 so as to face each other, and their respective tips are located inside the vacuum chamber 3 and are connected to the crucible 6 by lead wires 24.
In this manner, the film-forming material 7 is heated by, for example, a resistance heater.

Similarly, outside the vacuum chamber 3, an exhaust pipe 22 is provided in addition to the suction pipe 21 shown in FIG. 1, and the tips of the respective pipes 21 and 22 communicate with the inside of the vacuum chamber 3. I have. The other end of the suction pipe 21 is connected to a suction pump (not shown), and the exhaust pipe 22 has a function of returning the evacuated vacuum chamber 3 to atmospheric pressure via a valve (not shown).

The function of each part has been described above. Next, the process of film formation will be sequentially described.

At the time of film formation, first, the slider 16 is rotated by 90 degrees and removed from the mask 11, and the crucible 6 is filled with, for example, aluminum particles 7 as a film forming material from the hole of the mask 11 in which the slider 16 is provided. I do. After that, insert the removed slider 16 into the mask 11,
Rotate 90 degrees and fix.

Next, as shown in FIG. 5, the neck portion 18 is fitted outside the mask 11 in the direction of the arrow, and
Is brought into contact with the packing 14. At this time, the displacement and angle of the neck portion 18 with respect to the mask 11 are determined by RCC.
It is adjusted by the device 2. This couples the neck 18 to the device 30, as shown in FIG.

Next, the vacuum pump 3 is operated to evacuate the interior of the vacuum chamber 3 through the suction pipe 21 so that the inside of the vacuum chamber 3 is depressurized. The contact between the opening and the packing 14 is also increased to seal this portion. Therefore, with the operation of the slider 16, the slider 16
Jaw 16a presses the O-ring 17, and the O-ring 17 causes the neck portion 1 to approach the taper 11b of the mask 11.
8 between the inner wall 18a and the inner wall 18a.

Therefore, the space 19 is further evacuated through the outflow hole 13 of the mask 11, and only the space 19 between the sealing portion formed by the O-ring 17 and the opening of the neck portion 18 is evacuated. Bring to a possible vacuum pressure.

Next, each conductive terminal 23 is energized,
While controlling the current to a predetermined value, the crucible 6 is heated, while cooling water is circulated through the cooling water pipe 20 by a pump. Thereby, the film forming material 7 in the crucible 6 is heated and flies. Then, the flying material 7A that has flowed out flows through the outflow holes 13 of the mask 11 into the above-described space 19 in the sealed area, and is deposited on the inner wall 18a located in the limited sealed area of the neck portion 18.

After the deposition is completed, the energization of the conductive terminal 23 and the operation of the vacuum pump are stopped, and then the valve of the exhaust pipe 22 is opened to return the inside of the vacuum chamber 3 to the atmospheric pressure. As a result, the slider 16 is pushed back by the elasticity of the O-ring 17 and returns to the original position. Then, another neck portion 18 is deposited while repeating the above-described process.

FIGS. 6A and 6B show the neck portion 18 formed by the above-described process. FIG. 6A is a longitudinal sectional view showing a main part, and FIG. 6B is a transverse sectional view. As shown, the neck 1
The film 25 can be formed only on a limited area on the inner wall 18a of the substrate 8.

According to the present embodiment, by evacuating the vacuum chamber 3, the slider 16 automatically slides toward the vacuum chamber 3 and presses the O-ring 17, and the neck inner wall 18a adjacent to the O-ring 17 is pressed. And the taper 11b of the mask 11 are sealed. At the same time, due to this evacuation, the space 19 between the mask 11 and the inner wall 18a is depressurized through the outflow hole 13, and the contact between the opening of the neck portion 18 and the packing 14 increases, thereby sealing this portion.

Therefore, only the gap 19 in the region between the two sealing portions can be evacuated, so that the time for evacuation can be shortened and the inner wall 18 of the neck portion 18 only in this region can be evacuated.
a can be formed. Further, after the film formation, the slider 16 is automatically returned to the original position by returning the inside of the vacuum chamber 3 to the atmospheric pressure.

Although the embodiments of the present invention have been described above, the above-described embodiments can be variously modified based on the technical idea of the present invention.

For example, the shapes of the mask 11 and the slider 16 and the method of sealing the mask 11 and the inner wall 18a of the neck portion can be any shape and method other than the above-described embodiment. For example, it is also possible to operate the slider 16 mechanically,
It is also possible to operate electromagnetically.

Further, for example, in addition to the above-described film formation region, the evaporation method according to the present invention is applied to, for example, the neck portion 18.
It is also possible to form a film on the outer wall of the.

Also, for example, a hydraulic cylinder may be provided at the lower part of the device 30 to move the whole or a part of the device 30 up and down by hydraulic pressure to connect the mask 11 and the neck portion 18. It is also possible to use a screw type other than hydraulic pressure, air pressure, or the like.

Further, it is possible to form an electrode film constituting a grid of an electron gun by using this apparatus, and it is also possible to apply the present invention to low pressure CVD in addition to the above-described embodiment.

[0051]

As described above, the present invention provides a film-forming material flying section for flying a film-forming material under reduced pressure, a mask for defining a film-forming region communicating with the film-forming material flying section, A sealing material that is disposed on the mask and is deflected to the film formation region side under the reduced pressure to seal the film formation region, so that only the limited film formation region is evacuated, and only this region is evacuated. A film can be formed. Further, since the mask and the sealing material are displaced with the decompression, and the film can be formed only in the automatically defined region, the film forming operation can be efficiently performed in a single time.

Therefore, for example, by forming a film on the inner wall of the neck portion of the picture tube provided with the electron gun by this apparatus, creeping discharge is prevented, secondary electron avalanches, discharge noise, screen shaking, power supply Troubles such as disconnection and destruction of IC can be prevented.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view of a film forming apparatus according to an embodiment of the present invention.

FIG. 2 is an enlarged cross-sectional view showing a part of the film forming apparatus.
(A) is a figure before operation | movement, (b) is a figure which shows an operation state.

FIG. 3 is a schematic plan view of the same film forming apparatus.

FIG. 4 is a sectional view taken along line IV-IV of FIG. 1;

FIG. 5 is a schematic cross-sectional view showing a state where a film forming apparatus and a film formation object are separated from each other.

6A and 6B show a film forming unit of the film forming apparatus, wherein FIG. 6A is a longitudinal sectional view and FIG. 6B is a transverse sectional view.

FIG. 7 is a schematic sectional view of a picture tube.

[Explanation of symbols]

1 ... pedestal, 2 ... RCC device, 3 ... vacuum chamber,
3a, 11c, 16b ... flange, 4 ... lid, 4a ... hole,
5, 8, 15 ... bolt, 6 ... crucible, 7 ... film forming material, 7A
... Flying material, 9, 12, 17 ... O-ring, 10 ... Crucible holder, 11 ... Mask, 11a ... Stopper, 11b ... Taper, 13 ... Outflow hole, 14 ... Packing, 16 ... Slider, 16a ... Jaw, 18 ... Neck, 18a ... inner wall,
19 ... air gap, 20 ... cooling water pipe, 21 ... suction pipe, 22 ... exhaust pipe, 23 ... conductive terminal, 24 ... lead wire, 25 ... membrane, 2
Reference numeral 6: insulating material, 30: film forming device, 35: picture tube, 37: terminal portion, 38: electron gun, C: gap

Claims (10)

[Claims] 1. A film-forming material flying section for flying a film-forming material under reduced pressure, a mask defining a film-forming region communicating with the film-forming material flying section, A film forming apparatus having a sealing material that is deviated to the film forming region side to seal the film forming region below. 2. The apparatus according to claim 1, wherein the displacement of the sealing material is caused by the pressure difference at the time of the pressure reduction. 3. A film forming apparatus for holding the vacuum and causing the film forming material to fly and adhere to the inner wall of the tube, wherein the mask and the sealing material are automatically displaced by the pressure difference. 3. The apparatus according to claim 2, wherein only the film forming region that is the region where the film forming material is attached is evacuated, and the film forming material is selectively adhered to the inner wall of the tube in the vacuum region. 4. The apparatus according to claim 1, wherein the tube is a neck portion of a cathode tube containing an electron gun, and a conductive material is formed on an inner wall of the neck portion. 5. The apparatus according to claim 1, wherein the film-forming material flying section is configured as a vacuum evaporation apparatus. 6. The apparatus according to claim 1, wherein the sealing material is restored when the pressure reduction is released, and the sealing state is released. 7. The apparatus according to claim 6, wherein said seal material automatically restores when said reduced pressure is released to atmospheric pressure. 8. The apparatus according to claim 1, wherein the mask has a slide portion, and the rubber seal material shifts and returns in conjunction with the slide portion. 9. A vacuum chamber having vacuum suction means, and a film material flying section constituted by a film material flying source disposed in the vacuum chamber, and disposed on the vacuum chamber, and a tip outer peripheral edge is provided. An inclined surface is formed on the tubular body, the tubular engaging portion is engaged with the tubular body, and forms a film-forming region with the tubular body, and is slidably provided on an inner peripheral surface of the engaging portion. The mask is constituted by press-contact means having respective stopper portions respectively contacting both ends in the slide direction on the inner peripheral surface of the distal end portion of the engaging portion, and the mask is formed between the inclined surface and the stopper portion. The sealing material is disposed in a space surrounded by the tube body, the engagement portion is fitted from an end opening of the tube body, joined and engaged with each other at the end opening, and The pressure contact means is sucked by vacuum suction and slides toward the end opening side of the tube. The distal end side stopper portion of the press-contact means seals between the inclined surface and the inner wall of the pipe adjacent to the inclined surface via the sealing material. In a limited area between the opening and
4. The apparatus according to claim 3, wherein a vacuum defined by the inner wall of the tube, the engagement portion, and the seal material is defined as the film formation region, and the device is evacuated. 5. 10. A through hole is provided in the engaging portion for communicating the film formation region with the vacuum chamber, and the film material flying from the vacuum chamber flows into the film formation region through the through hole. The apparatus according to claim 9, wherein the apparatus is attached to an inner wall of the tube in the film formation region.