JPH10194449A - Conveying device for frame - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely store a frame in a storage container, by providing a frame transfer means with an engagement part which is engaged with a rear edge of a frame for forcibly moving the frame into the storage container, in response to a position signal from a detector, indicating that the frame reaches a position just before the storage container. SOLUTION: A device comprises an engagement part 10 installed on a base, and a reciprocating mechanism part for moving the engagement part 10 in the direction same as that of a frame 70. It further comprises a locking part 30 for temporarily locking the engagement part 10 at an upper part of the frame 70, and a conveying means (roller operating part) 40 for conveying a frame such as a wafer frame after the bonding operation, a lead frame on which a semiconductor device is fixed, or the like. Further it comprises a detector 50 for detecting the position of the conveyed frame, and a storage container (magazine) 60 for storing the conveyed frame 70. A generic name of the engagement part 10 and the reciprocating mechanism part, is a frame transfer means.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a frame transport device.

[0002]

2. Description of the Related Art Hitherto, various frame transport devices for transporting frames such as wafer frames and lead frames have been developed and put into practical use.

In a conventional frame transfer apparatus, one wafer frame is taken out of a storage container (magazine) containing a wafer frame on which a large number of semiconductor chips are mounted, and the taken-out frame is transferred by a transfer means (belt conveyor). To the bonding stage.
In the bonding stage, for example, semiconductor chips mounted on the transferred wafer frame are taken out one by one on a lead frame and bonded (die-bonded). The die-bonded lead frame is sent to the next step by the transfer device.

On the other hand, a used wafer frame including a defective chip is passed through a belt conveyor different from the route to be die-bonded, that is, unloaded and stored in an empty magazine. Further, the frame transport device is provided with a detector for detecting the position of the wafer frame on the empty magazine side and below the upper belt. Then, the position of the processed wafer frame is detected by the detector to determine whether or not the frame has been stored in the magazine. If the wafer frame is not stored in the magazine and remains stopped, the belt conveyor is immediately stopped.

[0005]

However, in the above-described frame transfer apparatus, when a wafer frame on which a defective semiconductor chip is mounted is transferred by a belt conveyor and stored in an empty magazine, the wafer is subjected to dicing. If the wafer frame is warped or deformed in the process, the belt is bent, or the magazine groove and belt are misaligned, the wafer frame will slip on the belt and the frame will not be completely stored in the magazine. There is. In recent years, as the size of a wafer frame has increased with the increase in the size of the wafer, conveyance errors due to warpage or deformation of the frame have tended to increase. As described above, when the wafer frame is not completely stored in the magazine, the frame transport device displays an error and stops the belt conveyor, thereby significantly reducing the production efficiency.

[0006] Therefore, there has been a demand for the appearance of a frame transport device capable of reliably storing a wafer frame in a magazine.

[0007]

According to the transfer apparatus of the present invention, a transfer means for transferring a wafer frame or a lead frame or the like to which a semiconductor device is fixed after bonding is completed, and A frame transport device comprising a detector for detecting the position of the frame transported from the transport device, and a vertically movable storage container for storing the frame transported from the transport device; The frame transfer means engages the rear end of the frame and moves the frame into the container in response to a position signal from the detector indicating that the frame has reached the position immediately before the container. It is characterized by having an engagement part forcibly moving.

According to the present invention, after the frame is mounted on the belt of the transporting means using the transporting means, the frame is transported to the storage container side to indicate that the frame has reached the position immediately before the storage container. In response to the signal, the engaging portion is engaged with the rear end of the frame and is forcibly moved into the storage container, so that the frame can be reliably stored in the storage container. Therefore, there is no non-storage of the frame in the conventional storage container, and the production efficiency is greatly improved.

In the present invention, preferably, a reciprocating mechanism for reciprocating in response to a position signal is provided to move the engaging portion. As described above, according to the present invention, the reciprocating mechanism for reciprocatingly driving in response to the position signal is provided. When the frame reaches the position immediately before the storage container, the reciprocating mechanism is driven to engage the engaging portion. Can be immediately engaged with the rear end of the frame and moved toward the storage container.

[0010] In the present invention, preferably, a locking portion for temporarily locking the engaging portion above the frame before the engaging portion engages with the rear end of the frame. It is good to have.

As described above, before the engaging portion is provided and the rear end of the frame is engaged with the engaging portion, the engaging portion is temporarily locked above the frame, so that the position of the frame can be reduced. If there is no signal response and the reciprocating mechanism does not operate,
By driving the transporting means, the frame can be freely transported to a predetermined position.

Further, in the present invention, preferably, the engaging portion is connected to the first claw portion which can be engaged with the locking portion and the first claw portion, and is engaged with the rear end of the frame. A second claw portion having a substantially L-shape, which is provided with a rotary shaft for rotating the engaging portion over at least a part of the circumference of the rotary shaft. Good to be.

The engaging portion includes a first claw portion capable of engaging with the locking portion and a substantially L-shaped second claw portion capable of engaging with the rear end of the frame. The second pawl and the second pawl may be connected to the first pawl and the second pawl, and may be provided with a rotating shaft for rotating at least a part of the circumference of the rotating shaft.

In the present invention, when the first claw is engaged with the locking portion, the state of the engagement portion is such that the first claw is rotated downward around the rotation axis and the second claw is rotated. The part is held in a state of being rotated around the rotation axis and above the frame.

The state of the engagement portion when the first claw is separated from the locking portion is such that the first claw is rotated upward around the rotation axis and the second claw is rotated around the rotation shaft. Is held in a state rotated downward by the weight of the second claw portion. Therefore, when the engaging portion is in this state, the second claw portion is engaged with the rear end of the frame, and the frame can be forcibly moved into the storage container.

Further, in the present invention, preferably, the reciprocating mechanism includes a reciprocating drive means for reciprocatingly driving in response to a position signal of the detector, and an engaging portion connected to the reciprocating drive means for moving the engaging portion toward the storage container. Preferably, it has a transmission means for moving.

As described above, the reciprocating drive using the reciprocating drive means enables the engaging portion to be simultaneously moved, for example, in the same direction as the moving direction of the frame by the transmission means connected to the reciprocal drive means. Becomes

[0018]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a frame transfer device according to an embodiment of the present invention; In this embodiment, a description will be given of a frame transfer device that transfers a frame such as a wafer frame or a lead frame into a storage container (magazine) using the transfer device. FIGS. 1 to 4 and FIGS. 6 and 7 merely show the shapes, sizes and arrangements of the components so that the present invention can be understood.

[Structure of Transfer Apparatus According to First Embodiment] Referring to FIGS. 1 and 2, the structure of a transfer apparatus for a frame (hereinafter referred to as a transfer apparatus) according to a first embodiment of the present invention will be described. I do. FIG. 1 is a side view of the transfer device when viewed from the side, and FIG. 2 is a bottom view of the transfer device when viewed from the bottom.

This transport device is roughly divided into an engaging portion 10 provided on the base T, a reciprocating mechanism 20 for moving the engaging portion 10 in the same direction as the frame 70, and an engaging portion 10 And a transport means (roller operation) for transporting a frame 70 such as a wafer frame or a lead frame to which a semiconductor device is fixed after the bonding operation is completed. ), A detector 50 for detecting the position of the transported frame 70, and a storage container (also referred to as a magazine) 60 for storing the transported frame 70. In addition, the conveying means 40, the detector 5
0 and the magazine 60 are components similar to those of the related art.

In the embodiment of the present invention, a base T is provided above the roller operating section 40, and the engaging section 10, the reciprocating mechanism 20 and the locking section 10 are provided below the base T. A part 30 is provided. In the first embodiment, the engaging portion 10 and the reciprocating mechanism 20 are collectively referred to as frame moving means F (FIGS. 1 and 2).

The engaging portion 10 includes a first claw portion 11 capable of engaging with the locking portion 30 and a second claw portion 12 having an approximately L-shaped appearance capable of engaging with the rear end of the frame 70. A rotating shaft that is formed and connects the first claw portion 11 and the second claw portion 12 to the first claw portion 11 and the second claw portion 12 and rotates over at least a part of the axis circumference of the rotating shaft. 13 are provided.

The reciprocating mechanism 20 includes a detector 5
A reciprocating drive means 220 which reciprocates in response to a position signal of 0 and a transmission means 230 connected to the reciprocal drive means 220 for transmitting the reciprocating motion of the reciprocal drive means 220 to the engaging portion 10 are provided. .

The reciprocating drive means 220 includes a sealed container 221 for sealing the compressed air,
1, a cylinder (cylindrical bar) 222 provided therein, a solenoid valve 223 which is turned on / off in response to a position signal of the detector 50, here, an electric signal, and a compressed air when the solenoid valve 223 is turned on. A flow control valve 224 for adjusting the flow rate is provided. FIG. 2 shows only one inlet for compressed air, but actually, an inlet pipe P for introducing compressed air from the right side and compressed air from a direction facing the inlet pipe P. (Not shown) is provided.

The transmission means 230 includes a first moving member 2 which reciprocates on the surface of the cylinder 222 by the pressure of compressed air.
A second moving member 232 connected to the first moving member 231 and engaged with the slider 233 to be movable in the same direction as the moving direction of the frame;
There is provided a connecting member 234 for connecting the engaging portion 10 to the engaging portion 10. Further, the connecting member 234 includes the second claw 12
A stopper 234a is provided to prevent the second claw portion 12 from rotating from a predetermined position when rotates downward.

In the first embodiment, the connecting member 234 and the rotating shaft 13 of the engaging portion 10 are connected, and the connecting portion 234b connecting the connecting member 234 and the rotating shaft 13 has A ball bearing (not shown) for rotating the second claw portion 12 downward is provided.

On the other hand, the locking portion 30 is constituted by a locking member 31 fixedly connected to the base T and having an inclined surface 32 at the tip.

In this embodiment, a roller operating section 40, a detector 50, a magazine 60, and the like are provided in addition to the components of the above-described transport apparatus. However, since these components are the same as the conventional components, they will be briefly described here.

The roller operating section 40 is composed of two rollers, that is, a left roller 41, a right roller 42, and a belt 43 extending between the left and right rollers 41 and 42. In addition, the roller operation unit 40 includes a lift mechanism (not shown) that can move up and down.

The detector 50 is for detecting, as a position signal (electric signal), the position of the frame 70 which has been conveyed using, for example, a reflection type photoelectric element.

The magazine 60 is a storage container for storing the frame 70. FIG. 6 is a cross-sectional view for explaining the internal configuration of the magazine 60.

On the side wall of the magazine 60, grooves 61 are provided at positions facing each other and parallel to each other. The frame 70 conveyed from the roll operation unit 40 is stored between the grooves 61. Further, the magazine 60 is provided with a lift mechanism (not shown) that can be moved up and down.

Next, the structure of the wafer frame 70 before the bonding operation will be briefly described with reference to FIG. FIGS. 7A and 7B are a plan view for explaining the structure of the wafer frame and a cross-sectional view taken along line XX.

The wafer frame 70 has a wafer 72 attached to an adhesive tape (for example, an ultraviolet (UV) tape) 71. The wafer 72 is divided into a plurality of diced semiconductor chips 73 and arranged. A ring 74 is provided around the wafer 72. However, the frame 70 shown in FIG. 1 is a frame 70 in a state where the semiconductor chip 73 which has become defective after the bonding operation is left (transfer state by unloading).
It is. The frame 70 is also called a scribe ring.

[Structure of Transfer Apparatus According to Second Embodiment] Next, an example of a transfer apparatus according to a second embodiment will be described with reference to FIG. FIG. 3 is a diagram for explaining the structure of the transport device according to the second embodiment.

The second embodiment is different from the first embodiment in that the first claw portion 14 and the second claw portion 15 of the engaging portion 10 are integrally connected. .

The other components are the same as those in the first embodiment, and the description is omitted here.

The engaging portion 10 has an overall substantially L-shaped appearance. The engagement portion 10 includes a first claw portion 14 that can be engaged with the locking member 31 and a frame 70.
A substantially L-shaped second claw portion 15 capable of engaging with the rear end of the second claw 15
And it is formed.

The first claw portion 14 is provided with a rotating shaft 13 for rotating the engaging portion over at least a part of the circumference of the rotating shaft (FIG. 3).

[Method of Transporting Various Frames by Transporting Apparatus] Next, referring to FIGS. 1, 2, 4 and 5, the transporting apparatus of the first embodiment is operated and the wafer after the bonding operation is performed. A method for transporting the frame to the magazine will be described.

First, the roll operation unit 40 is driven to transport the wafer frame (hereinafter, referred to as a frame) 70 after the bonding operation to a position below the locking unit 30 and the engaging unit 10 (step 100 in FIG. 5).

Next, any suitable lift mechanism (not shown)
The roller operating section 40 is connected to the engaging section 10 and the locking section 3 using
It is raised to around 0 (step 102 in FIG. 5). At this time, the inclined surface 32 of the locking member 31 and the first claw 11
The second claw portion 12 is engaged with the rotating shaft 1
3 and is temporarily locked above the frame surface.

Thereafter, the belt 43 is rotated to move the frame 70 in the direction of the magazine, that is, to the right here. At this time, when the leading end of the frame 70 reaches a position immediately before the entrance of the magazine 60 (step 104 in FIG. 5),
The position of the frame is detected using a detector 50, for example, a reflection type photoelectric sensor (Step 106 in FIG. 5), and is output as an electric signal. At this time, it is preferable that the end of the frame 70 is also moved to the magazine 60 side from the position of the engaging portion 10.

A position signal at the position where the frame 70 has reached just before the magazine, in this case, an electric signal is given to the solenoid valve 223 of the reciprocating drive means 220 to turn on the solenoid valve 223 and to supply compressed air to the flow regulating valve 224. Via closed container 221
Introduce within. At this time, the first moving member 231 reciprocates on the surface of the cylinder 222 by the pressure of the compressed air.
Here, the first moving member 231 is moved to the right (Step 108 in FIG. 5). The first moving member 231 at this time
It is preferable that the moving speed is substantially the same as the driving speed of the roll operation unit 40.

When the first moving member 231 moves to the right, the first moving member 231 and the second moving member 232, and the second moving member 232 and the connecting member 2 move.
34, the second moving member 232 is connected.
And the connecting member 234 also moves to the right. At this time, since the second moving member 232 is engaged with the slider 233, the movement of the second moving member 232 is performed extremely smoothly.

Since the connecting member 234 is connected to the rotating shaft 13 of the engaging portion 10, the engaging portion 10 is
Move to the right off the zero. At this time, the second claw 1
2 is rotated downward by the rotation shaft 13 so as to be positioned substantially perpendicular to the plane of the frame (step 110 in FIGS. 4 and 5). In this embodiment, the second claw 12
Is adjusted by the stopper 234a so that the front end surface is substantially perpendicular to the surface of the frame.

Further, by moving the second claw portion 12 connected to the connecting member 234 to the right side, that is, to the magazine 60 side, the second claw portion 12 is engaged with the rear end of the frame 70, and the frame 70 is It is forcibly stored in the magazine 60 (step 112 in FIG. 5).

In the above-described embodiment, the method of accommodating the wafer frame 70 in the magazine 60 by the transfer device has been described. However, even in the case where the lead frame to which the semiconductor device is fixed is accommodated in the magazine 60, this method is also applicable. A transport device can be used.

The reciprocating mechanism 20 has been described with respect to an example using reciprocating drive means by compressed air. However, the present invention is not limited to this means, and means for reciprocating a plurality of screw rods in combination is used. May be used.

[0050]

As is apparent from the above description, according to the frame transport device of the present invention, the engaging portion is engaged with the rear end of the frame to forcibly move and store the frame. Therefore, the frame can be securely stored in the storage container. Therefore, conveyance failure in the step of conveying the frame is reduced, and the production efficiency is significantly improved.

[Brief description of the drawings]

FIG. 1 is a side view for explaining the structure of a frame transport device according to a first embodiment of the present invention.

FIG. 2 is a bottom view for explaining the structure of the frame transport device according to the first embodiment of the present invention.

FIG. 3 is a schematic side view for explaining the structure of a frame transport device according to a second embodiment of the present invention.

FIG. 4 is an operation explanatory diagram for explaining a method of transporting a frame using the transport device according to the first embodiment of the present invention;

FIG. 5 is a flowchart for explaining a method of transporting a frame of the transport device of the present invention.

FIG. 6 is a cross-sectional view for explaining the structure of the magazine.

FIGS. 7A and 7B are a plan view and a cross-sectional view for explaining the structure of a wafer frame.

[Explanation of symbols]

 T: base F: frame transfer means 10: engagement part 11, 14: first claw part 12, 15: second claw part 13: rotating shaft 20: reciprocating mechanism part 220: reciprocating drive means 221: sealed container 222 : Cylinder 223: Solenoid valve 224: Flow control valve 230: Transmission means 231: First moving member 232: Second moving member 233: Slider 234: Connecting member 30: Locking part 31: Locking member 32: Inclined surface 40: Conveying means 50: Detector 60: Magazine 70: Frame

Claims (6)

[Claims] 1. A conveying means for conveying a wafer frame or a frame such as a lead frame to which a semiconductor device is fixed after a bonding operation is completed, and a detecting means for detecting a position of the frame conveyed from the conveying means. A frame transport device comprising a detector and a vertically movable storage container for storing the frame transported from the transport device, comprising: a frame transport device; An engagement portion for engaging the rear end of the frame and forcibly moving the frame into the storage container in response to a position signal indicating that the frame has reached the position immediately before the storage container. A carrier device for a frame, comprising: 2. The frame transport device according to claim 1, further comprising a reciprocating mechanism for reciprocatingly driving the engagement portion in response to the position signal. Transfer device. 3. The transporting device for a frame according to claim 1, wherein the engaging portion is temporarily locked above the frame before the engaging portion engages with a rear end of the frame. A transport device for a frame, characterized in that the transport device for a frame is provided with a locking portion for holding the frame. 4. The frame transporting device according to claim 1, wherein the engaging portion is integrally connected to the first claw portion capable of engaging with the locking portion. And a second claw that is generally L-shaped and can be engaged with the rear end of the frame. The first claw is provided with the engaging portion at least a part of the circumference of the rotation shaft. A frame transport device comprising the rotary shaft for rotating the frame. 5. The frame transport device according to claim 1, wherein the engaging portion is capable of engaging with a first claw portion capable of engaging with the locking portion and a rear end of the frame. Almost L
And a second claw portion for connecting the first claw portion and the second claw portion to the first claw portion and the second claw portion, and rotating the first claw portion and the second claw portion over at least a part of the axis circumference of the rotating shaft. A frame transport device comprising the rotary shaft. 6. The reciprocating mechanism according to claim 2, wherein the reciprocating mechanism is reciprocatingly driven in response to the position signal, and the engaging portion is connected to the reciprocatingly driving means. And a transmission means for moving the frame to the storage container side.