JPH10185624A - Optical potentiometer - Google Patents
Optical potentiometerInfo
- Publication number
- JPH10185624A JPH10185624A JP8345128A JP34512896A JPH10185624A JP H10185624 A JPH10185624 A JP H10185624A JP 8345128 A JP8345128 A JP 8345128A JP 34512896 A JP34512896 A JP 34512896A JP H10185624 A JPH10185624 A JP H10185624A
- Authority
- JP
- Japan
- Prior art keywords
- light receiving
- output
- rotation angle
- rotating disk
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 23
- 238000001514 detection method Methods 0.000 claims abstract description 25
- 239000004065 semiconductor Substances 0.000 claims description 14
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- OWNRRUFOJXFKCU-UHFFFAOYSA-N Bromadiolone Chemical compound C=1C=C(C=2C=CC(Br)=CC=2)C=CC=1C(O)CC(C=1C(OC2=CC=CC=C2C=1O)=O)C1=CC=CC=C1 OWNRRUFOJXFKCU-UHFFFAOYSA-N 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/2449—Error correction using hard-stored calibration data
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/3473—Circular or rotary encoders
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、一定の角度範囲内
を回転する有限回転モータ等の回転位置を検出するため
の光学式ポテンショメータに関するものである。更に詳
しくは、発光手段と受光手段の間にらせん状のスリット
が形成された回転ディスクを備え、当該スリットを通過
した通過光の受光手段での照射位置に基づき回転ディス
クの回転角を検出可能な光学式ポテンショメータに関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical potentiometer for detecting a rotational position of a finite rotation motor or the like rotating within a predetermined angle range. More specifically, a rotating disk having a helical slit formed between the light emitting means and the light receiving means is provided, and the rotation angle of the rotating disk can be detected based on the irradiation position of the light passing through the slit by the light receiving means. It relates to an optical potentiometer.
【０００２】[0002]
【従来の技術】本件出願人は、先に、実開平４−１１１
２８１号公報、同４−１１０２１９号公報、同５−８８
１９１号公報等において高精度の光走査等を行うことの
可能な有限回転モータを提案している。図１（Ａ）に
は、この有限回転モータの基本構成を示してある。この
図に示すように、有限回転モータ１のトルク発生部の構
造は基本的にはブラスレスＤＣモータの１相分と同一で
ある。しかし、永久磁石回転子２の磁極方向と、電磁石
からなる突極を備えた固定子３の磁極方向とが直交する
位置、すなわち、原点位置を安定化するために、固定子
３の一対の突極部分３ａ、３ｂの端面の中央に溝３ｃ、
３ｄを付けてある。この有限回転モータ１は例えば動作
角度範囲が＋−１５度程度であり、モータ出力軸４には
光走査用ミラー等の被駆動部分が取り付けられる。モー
タ出力軸４の有限回転角度を検出するために、モータ出
力軸４の反対側には位置センサ５が取り付けられてい
る。2. Description of the Related Art The applicant of the present application has previously disclosed a Japanese Utility Model Application Laid-Open No. 4-111.
No. 281, No. 4-110219, No. 5-88
No. 191 proposes a finite rotation motor capable of performing high-precision optical scanning and the like. FIG. 1A shows a basic configuration of the finite rotation motor. As shown in this figure, the structure of the torque generating unit of the finite rotation motor 1 is basically the same as that of one phase of the brassless DC motor. However, in order to stabilize the position where the magnetic pole direction of the permanent magnet rotor 2 is orthogonal to the magnetic pole direction of the stator 3 having salient poles made of electromagnets, that is, to stabilize the origin position, a pair of projecting A groove 3c at the center of the end face of each of the pole portions 3a and 3b;
3d is attached. The finite rotation motor 1 has, for example, an operating angle range of about + -15 degrees, and a driven portion such as an optical scanning mirror is attached to the motor output shaft 4. In order to detect a finite rotation angle of the motor output shaft 4, a position sensor 5 is mounted on the opposite side of the motor output shaft 4.
【０００３】この位置センサ５は、回転角に比例したア
ナログ信号を発生する光学式ポテンショメータである。
この光学式ポテンショメータ５は、モータ出力軸４に固
着した回転ディスク５１を備え、この回転ディスク５１
には、モータ出力軸４の有限回転角度範囲を包含する角
度範囲に亘り、らせん状のスリット５２が形成されてい
る。このスリット５２の形成部分を挟み、一方の側には
ＬＥＤ等の発光素子５３が配置され、他方の側には受光
素子５４が対向配置されている。受光素子５４は、その
受光面が回転ディスク５１の半径方向に配列され、スリ
ット通過光の半径方向の位置（光学的重心）を検出する
１軸の半導体位置検出素子（ＰＳＤ）である。The position sensor 5 is an optical potentiometer that generates an analog signal proportional to the rotation angle.
The optical potentiometer 5 includes a rotating disk 51 fixed to the motor output shaft 4.
Is formed with a spiral slit 52 over an angle range including a finite rotation angle range of the motor output shaft 4. A light emitting element 53 such as an LED is arranged on one side and a light receiving element 54 is arranged on the other side to face the portion where the slit 52 is formed. The light receiving element 54 is a uniaxial semiconductor position detecting element (PSD) whose light receiving surface is arranged in the radial direction of the rotating disk 51 and detects the radial position (optical center of gravity) of the light passing through the slit.
【０００４】図１（Ｂ）に示すように、回転ディスク５
１のスリット５２は、極座標においてｒ＝ｒｏ＋ｋφ
（ｋ：定数）の関数で表されるらせん状スリットであ
る。発光素子５３から出射された光は、回転ディスク５
１のスリット５２を通過して半導体位置検出素子５４に
到達して、回転ディスク５２の回転角度θが、当該角度
に比例した半導体位置検出素子５４の受光面（ＰＳＤ検
出エリア）５４ａにおける入射光の照射位置ｒに変換さ
れる。[0004] As shown in FIG.
One slit 52 is r = ro + kφ in polar coordinates.
A spiral slit represented by a function of (k: constant). The light emitted from the light emitting element 53 is
After passing through the first slit 52 and reaching the semiconductor position detecting element 54, the rotation angle θ of the rotating disk 52 is proportional to the rotation angle θ of the incident light on the light receiving surface (PSD detection area) 54a of the semiconductor position detecting element 54. It is converted to the irradiation position r.
【０００５】半導体位置検出素子５４においては、その
受光面５４ａにおける入射光の位置ｒに応じて、その両
端から出力される電流が逆比例の関係で変化する。すな
わち、両端から出力される電流をｉａ、ｉｂとし、半導
体位置検出素子の受光面の長さをＬすると、これらの電
流値と入射光の位置ｒの関係は次式で示される。In the semiconductor position detecting element 54, currents output from both ends of the semiconductor position detecting element 54 change in inverse proportion to the position r of the incident light on the light receiving surface 54a. That is, assuming that the currents output from both ends are ia and ib and the length of the light receiving surface of the semiconductor position detecting element is L, the relationship between these current values and the position r of the incident light is expressed by the following equation.
【０００６】 ｒ＝（Ｌ／２）・（ｉａ−ｉｂ）／（ｉａ＋ｉｂ） 従って、光エネルギによる電流（ｉａ＋ｉｂ）が一定と
なるように発光素子５３の発光量を制御すれば、入射光
の位置ｒに比例する出力（ｉａ−ｉｂ）を得ることがで
きる。R = (L / 2) · (ia−ib) / (ia + ib) Therefore, if the light emission amount of the light emitting element 53 is controlled so that the current (ia + ib) due to the light energy becomes constant, the position of the incident light An output (ia-ib) proportional to r can be obtained.
【０００７】[0007]
【発明が解決しようとする課題】ここで、上記構成の光
学式ポテンショメータ５の重要な特性の一つに直線性が
ある。この直線性は角度に対する検出出力の直線度であ
る。この直線性に影響を与える要因としては、半導体位
置検出素子の直線性、回転ディスクのスリットパターン
の精度、および各部品の取り付け精度、発光素子の配光
特性等が挙げられる。これらの要因を検出出力から除去
しないと、精度の良い回転角度検出を行うとができな
い。Here, one of the important characteristics of the optical potentiometer 5 having the above structure is linearity. This linearity is the linearity of the detection output with respect to the angle. Factors that affect the linearity include the linearity of the semiconductor position detecting element, the precision of the slit pattern of the rotating disk, the mounting precision of each component, the light distribution characteristics of the light emitting element, and the like. Unless these factors are removed from the detection output, accurate rotation angle detection cannot be performed.
【０００８】本発明の課題は、直線性に影響を与える要
因を除去して直線性の高い検出出力を得ることのできる
光学式ポテンショメータを提案することにある。An object of the present invention is to propose an optical potentiometer capable of removing a factor affecting linearity and obtaining a detection output with high linearity.
【０００９】[0009]
【課題を解決するための手段】本発明は、発光手段と、
受光手段と、これらの間に配置され、一定の角度範囲に
亘るらせん状のスリットを備えた回転ディスクとを有
し、当該回転ディスクの回転角度に対応して前記スリッ
トを通過した通過光の前記受光手段の受光面における受
光位置が前記回転ディスクの半径方向に移動して、前記
回転ディスクの回転角度に対応する検出出力を得るよう
になっている光学式ポテンショメータにおいて、次のよ
うにして、回転角度と受光手段の検出出力の間の直線性
を確保するようにしている。According to the present invention, there is provided a light emitting means,
A light-receiving means, and a rotating disk provided with a helical slit over a certain angular range, disposed between the light-receiving means, and the transmitted light passing through the slit corresponding to the rotation angle of the rotating disk. A light receiving position on a light receiving surface of a light receiving means moves in a radial direction of the rotating disk to obtain a detection output corresponding to a rotation angle of the rotating disk. The linearity between the angle and the detection output of the light receiving means is ensured.
【００１０】すなわち、前記回転ディスクの回転角度と
前記受光手段の出力との間の実際の対応関係を測定し、
前記回転ディスクの回転角と前記受光手段の出力との間
の目標とする線形関係に対する各回転角度における実際
の前記受光手段出力の偏差を算出し、当該偏差を解消す
るための補正値を前記回転ディスクの回転角度との対応
テーブルの形態で予め記憶しておき、前記回転ディスク
の回転に伴なって発生する前記受光手段の実際の出力に
基づき前記回転ディスクの回転角度を求め、当該回転角
度に対応する前記補正値を前記対応テーブルから求め、
求まった前記補正値を前記受光手段の出力に加えること
により、前記回転ディスクの回転角度に対して線形関係
の検出出力を得るようにしている。That is, the actual correspondence between the rotation angle of the rotating disk and the output of the light receiving means is measured,
Calculate the deviation of the actual output of the light receiving means at each rotation angle with respect to the target linear relationship between the rotation angle of the rotating disk and the output of the light receiving means, and calculate the correction value for eliminating the deviation. The rotation angle of the rotating disk is stored in advance in the form of a table corresponding to the rotation angle of the disk, and the rotation angle of the rotating disk is obtained based on the actual output of the light receiving means generated with the rotation of the rotating disk. Finding the corresponding correction value from the correspondence table,
By adding the obtained correction value to the output of the light receiving means, a detection output having a linear relationship with the rotation angle of the rotating disk is obtained.
【００１１】ここで、前記受光手段としては、半導体位
置検出素子を備えたものとすることができる。当該半導
体位置検出素子は、前記回転ディスクの半径方向に延び
る受光面での受光位置に応じて両端に現れる出力電圧が
逆比例関係で変化するものである。Here, the light receiving means may include a semiconductor position detecting element. The output voltage appearing at both ends of the semiconductor position detecting element changes in an inversely proportional relationship according to a light receiving position on a light receiving surface extending in a radial direction of the rotating disk.
【００１２】このように構成した本発明の光学式ポテン
ショメータでは、実際に測定した検出出力の偏差に基づ
く補正値を回転角度に対応させて予め記憶してあり、実
際の検出出力に当該補正値を加味することにより、回転
角度に対して線形性に優れた検出出力を得ることができ
る。この結果、検出出力に基づき、高精度の回転角度制
御を実現することができる。In the optical potentiometer according to the present invention, the correction value based on the deviation of the actually measured detection output is stored in advance in association with the rotation angle, and the correction value is stored in the actual detection output. By taking this into account, it is possible to obtain a detection output excellent in linearity with respect to the rotation angle. As a result, highly accurate rotation angle control can be realized based on the detection output.
【００１３】[0013]
【発明の実施の形態】以下に、図面を参照して本発明の
実施の形態を説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００１４】図２（Ａ）は光学式ポテンショメータの制
御回路のブロック図である。光学式ポテンショメータの
機械的構成は、図１に示す構成と同一であるので、対応
する部分には同一の符号を付してある。FIG. 2A is a block diagram of a control circuit of the optical potentiometer. Since the mechanical configuration of the optical potentiometer is the same as the configuration shown in FIG. 1, the corresponding parts are denoted by the same reference numerals.
【００１５】この図において、半導体位置検出素子５４
の両端電流ｉａ、ｉｂは、それぞれ増幅器１１、１２に
よって増幅された後に加算器１３において加算され、予
め設定されている基準電流値ＲＥＦとの差が求められ
る。この差は増幅器１４を介して増幅されて発光素子５
３の駆動電流にフィードバックされる。この結果、半導
体位置検出措置５４の受光量は常に一定となるように制
御される。すなわち、両端電流の和（ｉａ＋ｉｂ）が一
定となるように制御される。In this figure, a semiconductor position detecting element 54
Are amplified by the amplifiers 11 and 12, respectively, and then added by the adder 13 to obtain a difference from a preset reference current value REF. This difference is amplified by the amplifier 14 and the light emitting element 5
3 is fed back to the drive current. As a result, the amount of light received by the semiconductor position detecting means 54 is controlled to be always constant. That is, control is performed so that the sum (ia + ib) of the currents at both ends is constant.
【００１６】一方、両端電流ｉａ、ｉｂの差が比較回路
１５において求められる。この差は、図２（Ｂ）に示す
ように、回転ディスク５１の回転角度に対して線形関係
（直線Ａ）となることが理想である。しかし、実際に
は、前述したように、半導体位置検出素子５４の直線
性、回転ディスク５１のスリット５２のパターンの精
度、および各部品５１、５３、５４等の取り付け精度、
発光素子５３の配光特性等が原因となって、直線性が損
なわれ、図２（Ｂ）に示す曲線Ｂのようになる。そこ
で、本例では、このような誤差（各回転角における直線
Ａに対する曲線Ｂの偏差）を解消するために、線形化補
正回路２０を配置してある。On the other hand, the difference between the two terminal currents ia and ib is obtained in the comparison circuit 15. Ideally, this difference has a linear relationship (straight line A) with respect to the rotation angle of the rotating disk 51, as shown in FIG. However, in actuality, as described above, the linearity of the semiconductor position detecting element 54, the accuracy of the pattern of the slit 52 of the rotating disk 51, and the mounting accuracy of the components 51, 53, 54, etc.
Due to the light distribution characteristics of the light emitting element 53 and the like, the linearity is impaired, resulting in a curve B shown in FIG. Therefore, in this example, in order to eliminate such an error (the deviation of the curve B from the straight line A at each rotation angle), the linearization correction circuit 20 is disposed.
【００１７】図２（Ａ）を参照して説明すると、線形化
補正回路２０は、比較回路１５のアナログ出力Ｂをデジ
タル化するＡ／Ｄ変換器２１と、デジタル化された出力
Ｃに基づき、補正値を出力するＲＯＭ２２と、当該ＲＯ
Ｍ２２から出力されたデジタル補正値をアナログ値Ｄに
変換するＤ／Ａ変換器２３を備えている。Ａ／Ｄ変換器
２１では、アナログ出力Ｂを、図２（Ｃ）に示すよう
に、デジタル値に変換する。ＲＯＭ２２においては、予
め回転ディスク５１の回転角度と、当該回転角度に対応
する補正値とが対応テーブルの形態で記憶されている。
すなわち、実際に、回転ディスク５１を回転させること
によって得られるアナログ出力Ｂを計測し、当該アナロ
グ出力と回転角度との間の目標とする線形関係（図２
（Ｂ）において破線で示す直線Ａ）に対する当該アナロ
グ出力Ｂの偏差を求め、当該偏差を解消するための補正
値を回転角度に対応させた対応テーブルの形態で、ＲＯ
Ｍ２２内に格納してある。Referring to FIG. 2A, the linearization correction circuit 20 is based on an A / D converter 21 for digitizing the analog output B of the comparison circuit 15 and a digitized output C. A ROM 22 for outputting a correction value,
A D / A converter 23 that converts the digital correction value output from M22 to an analog value D is provided. The A / D converter 21 converts the analog output B into a digital value as shown in FIG. In the ROM 22, the rotation angle of the rotary disk 51 and correction values corresponding to the rotation angle are stored in advance in the form of a correspondence table.
That is, an analog output B obtained by actually rotating the rotary disk 51 is measured, and a target linear relationship between the analog output and the rotation angle (see FIG. 2).
In (B), a deviation of the analog output B from the straight line A) indicated by a broken line is obtained, and a correction value for eliminating the deviation is set in the form of a correspondence table corresponding to the rotation angle.
It is stored in M22.
【００１８】従って、アナログ出力Ｂをデジタル化した
出力ＣがＲＯＭ２２に入力されると、当該出力Ｃに対応
する回転角度に割り当てられている補正値がテーブルか
ら検索されて出力される。このデジタル補正値はＤ／Ａ
変換器２３によってアナログ正値に変換される。すなわ
ち、図２（Ｄ）において棒線で示すデジタル補正値が、
曲線で示すアナログ補正値Ｄに変換される。このアナロ
グ補正値は、加算器１６において、比較器１５からのア
ナログ出力Ｂに加算される。この結果、回転角度に対す
る直線性に優れた検出出力Ｅが得られる。この出力Ｅ
を、図２（Ｅ）において直線で示してある。この図にお
いて破線は、実際の検出出力Ｂを表している。このよう
にして得られた検出出力Ｅは、増幅器１７を介して出力
される。Therefore, when the output C obtained by digitizing the analog output B is input to the ROM 22, the correction value assigned to the rotation angle corresponding to the output C is retrieved from the table and output. This digital correction value is D / A
The data is converted into an analog positive value by the converter 23. That is, the digital correction value indicated by the bar in FIG.
It is converted to an analog correction value D indicated by a curve. This analog correction value is added to the analog output B from the comparator 15 in the adder 16. As a result, a detection output E having excellent linearity with respect to the rotation angle is obtained. This output E
Is shown by a straight line in FIG. In this figure, the broken line represents the actual detection output B. The detection output E obtained in this way is output via the amplifier 17.
【００１９】[0019]
【発明の効果】以上説明したように、本発明の光学式ポ
テンショメータにおいては、回転角度に対応する実際の
検出出力を計測し、計測結果に基づき、回転角度と検出
出力との線形性（直線性）を確保するための検出出力の
補正値を予め求めておき、実際の検出出力に対して、当
該出力が得られる回転角度に対応する補正値を加算する
ようにしている。従って、本発明によれば、回転角度に
対応した線形性の良い検出出力、換言すると、精度の良
い検出出力を得ることができる。As described above, in the optical potentiometer of the present invention, the actual detection output corresponding to the rotation angle is measured, and based on the measurement result, the linearity (linearity) of the rotation angle and the detection output is measured. The correction value of the detection output for ensuring the above (3) is obtained in advance, and the correction value corresponding to the rotation angle at which the output is obtained is added to the actual detection output. Therefore, according to the present invention, a detection output with good linearity corresponding to the rotation angle, in other words, a detection output with high accuracy can be obtained.
【図１】（Ａ）は本発明を適用可能な光学式ポテンショ
メータを備えた有限回転モータを示す概略構成図、
（Ｂ）はその光学式ポテンショメータの回転ディスクに
形成したスリットを示す説明図である。FIG. 1A is a schematic configuration diagram showing a finite rotation motor provided with an optical potentiometer to which the present invention can be applied;
(B) is an explanatory view showing a slit formed in a rotating disk of the optical potentiometer.
【図２】（Ａ）は本発明を適用した光学式ポテンショメ
ータの制御系のブロック図であり、（Ｂ）〜（Ｅ）は制
御系の動作を説明するためのグラフである。FIG. 2A is a block diagram of a control system of an optical potentiometer to which the present invention is applied, and FIGS. 2B to 2E are graphs for explaining the operation of the control system.
２０ 線形化補正回路 ２１ Ａ／Ｄ変換器 ２２ 補正値のテーブルを記憶したＲＯＭ ２３ Ｄ／Ａ変換器 ５ 光学式ポテンショメータ ５１ 回転ディスク ５２ スリット ５３ 発光素子 ５４ 受光素子 Ｂ 受光素子の出力 Ｄ デジタル補正値 Ｅ 補正後の検出出力 Reference Signs List 20 linearization correction circuit 21 A / D converter 22 ROM storing correction value table 23 D / A converter 5 optical potentiometer 51 rotating disk 52 slit 53 light emitting element 54 light receiving element B light receiving element output D digital correction value E Detection output after correction
─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成９年１月２９日[Submission date] January 29, 1997
【手続補正１】[Procedure amendment 1]
【補正対象書類名】図面[Document name to be amended] Drawing
【補正対象項目名】全図[Correction target item name] All figures
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【図２】 FIG. 2
【図１】 FIG.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 浅輪 秀夫 長野県南安曇郡穂高町大字牧1856−１ 株 式会社ハーモニック・ドライブ・システム ズ穂高工場内 ──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Hideo Asawa 1856-1, Maki, Hodaka-cho, Minamiazumi-gun, Nagano Pref. Harmonic Drive Systems Co., Ltd.
Claims (2)
配置され、一定の角度範囲に亘るらせん状のスリットを
備えた回転ディスクとを有し、当該回転ディスクの回転
角度に対応して前記スリットを通過した通過光の前記受
光手段の受光面における受光位置が前記回転ディスクの
半径方向に移動して、前記回転ディスクの回転角度に対
応する検出出力が得られる光学式ポテンショメータにお
いて、 前記回転ディスクの回転角度と前記受光手段の出力との
間の実際の対応関係を測定し、前記回転ディスクの回転
角と前記受光手段の出力との間の目標とする線形関係に
対する各回転角度における実際の前記受光手段出力の偏
差を算出し、当該偏差を解消するための補正値を前記回
転ディスクの回転角度の対応テーブルの形態で予め記憶
しておき、前記回転ディスクの回転に伴なって発生する
前記受光手段の実際の出力に基づき前記回転ディスクの
回転角度を求め、当該回転角度に対応する前記補正値を
前記対応テーブルから求め、求まった前記補正値を前記
受光手段の出力に加えることにより、前記回転ディスク
の回転角度に対して線形関係の検出出力を得ることを特
徴とする光学式ポテンショメータ。1. A light-emitting device, a light-receiving device, and a rotating disk provided between them and having a helical slit extending over a certain angular range, corresponding to a rotation angle of the rotating disk. In the optical potentiometer, a light receiving position of light passing through the slit on a light receiving surface of the light receiving unit moves in a radial direction of the rotating disk to obtain a detection output corresponding to a rotation angle of the rotating disk. The actual correspondence between the rotation angle of the disc and the output of the light receiving means is measured, and the actual correspondence at each rotation angle with respect to the target linear relationship between the rotation angle of the rotating disc and the output of the light receiving means is measured. The deviation of the output of the light receiving means is calculated, and a correction value for eliminating the deviation is stored in advance in the form of a correspondence table of the rotation angle of the rotating disk, The rotation angle of the rotating disk is determined based on the actual output of the light receiving means generated with the rotation of the rotating disk, the correction value corresponding to the rotation angle is determined from the correspondence table, and the determined correction value is obtained. An optical potentiometer, wherein a detection output having a linear relationship with respect to the rotation angle of the rotating disk is obtained by adding the following to the output of the light receiving means.
体位置検出素子を備え、当該半導体位置検出素子は、前
記回転ディスクの半径方向に延びる受光面での受光位置
に応じて両端に現れる出力電流が逆比例関係で変化する
ものであることを特徴とする光学式ポテンショメータ。2. The output current according to claim 1, wherein said light receiving means includes a semiconductor position detecting element, and said semiconductor position detecting element appears at both ends in accordance with a light receiving position on a light receiving surface extending in a radial direction of said rotating disk. The optical potentiometer changes in inverse proportion.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8345128A JPH10185624A (en) | 1996-12-25 | 1996-12-25 | Optical potentiometer |
| US08/988,535 US5973320A (en) | 1996-12-25 | 1997-12-10 | Optical position sensor |
| DE19756883.1A DE19756883B4 (en) | 1996-12-25 | 1997-12-19 | Optical position sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8345128A JPH10185624A (en) | 1996-12-25 | 1996-12-25 | Optical potentiometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10185624A true JPH10185624A (en) | 1998-07-14 |
Family
ID=18374481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8345128A Pending JPH10185624A (en) | 1996-12-25 | 1996-12-25 | Optical potentiometer |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US5973320A (en) |
| JP (1) | JPH10185624A (en) |
| DE (1) | DE19756883B4 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6956505B2 (en) | 2002-02-28 | 2005-10-18 | Fanuc Ltd | Signal processing apparatus for encoder |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19858287A1 (en) † | 1998-12-17 | 2000-06-21 | Schlafhorst & Co W | Method and device for non-contact yarn monitoring on a spinning or winding machine |
| JP2003107386A (en) * | 2001-09-28 | 2003-04-09 | Harmonic Drive Syst Ind Co Ltd | Scanner of galvanometer type |
| US7326918B2 (en) * | 2005-07-05 | 2008-02-05 | Texas Instruments Incorporated | Optical position sensor architecture for servo systems |
| US7476843B2 (en) * | 2005-12-23 | 2009-01-13 | Delphi Technologies, Inc. | Method for determining the position of a first moving component relative to a second component and device for applying said method |
| DE102010003561A1 (en) * | 2010-03-31 | 2011-10-06 | Robert Bosch Gmbh | Method for the systematic treatment of errors |
| JP6959835B2 (en) * | 2017-11-06 | 2021-11-05 | 株式会社東海理化電機製作所 | Rotation detector |
| US11885614B2 (en) * | 2020-12-07 | 2024-01-30 | Osi Optoelectronics, Inc. | Optical rotary sensor |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2509851A1 (en) * | 1981-07-17 | 1983-01-21 | Tesa Sa | ELECTRONIC MEASUREMENT SENSOR |
| JPS60225024A (en) * | 1984-04-24 | 1985-11-09 | Jeco Co Ltd | Angle sensor |
| US4761546A (en) * | 1985-11-25 | 1988-08-02 | Matsushita Electric Works, Ltd. | Optical displacement measuring system with nonlinearity correction |
| US4789826A (en) * | 1987-03-19 | 1988-12-06 | Ampex Corporation | System for sensing the angular position of a rotatable member using a hall effect transducer |
| US5132531A (en) * | 1990-11-07 | 1992-07-21 | Eaton Corporation | Translational position sensing apparatus employing rotating element and PSD |
| US5136154A (en) * | 1991-05-10 | 1992-08-04 | Advanced Fuel Research, Inc. | Method and system for photoconductive detector signal correction |
| EP0531947B1 (en) * | 1991-09-09 | 1997-01-02 | Kabushiki Kaisha Tokai Rika Denki Seisakusho | Position detecting apparatus |
| KR100277139B1 (en) * | 1992-03-29 | 2001-01-15 | 도고로 아쯔오 | Angular acceleration detector |
| US5352968A (en) * | 1992-05-28 | 1994-10-04 | Apple Computer, Inc. | Battery charge state determination |
-
1996
- 1996-12-25 JP JP8345128A patent/JPH10185624A/en active Pending
-
1997
- 1997-12-10 US US08/988,535 patent/US5973320A/en not_active Expired - Lifetime
- 1997-12-19 DE DE19756883.1A patent/DE19756883B4/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6956505B2 (en) | 2002-02-28 | 2005-10-18 | Fanuc Ltd | Signal processing apparatus for encoder |
Also Published As
| Publication number | Publication date |
|---|---|
| DE19756883B4 (en) | 2015-08-06 |
| US5973320A (en) | 1999-10-26 |
| DE19756883A1 (en) | 1998-07-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6084234A (en) | Position transducer | |
| US20230079776A1 (en) | Clutch actuator, sensing system and method for sensing an angular position of a rotational component | |
| JP2002162252A (en) | Rotary position detector | |
| JPH10185624A (en) | Optical potentiometer | |
| GB2356299A (en) | Switched reluctance position sensing | |
| JP2005049183A (en) | Variable reluctance type resolver | |
| JP5176208B2 (en) | Rotation angle detection method and rotation angle sensor | |
| JPH11160434A (en) | Range finder instrument | |
| JP2015108610A (en) | Rotation detection device and rotation detection method | |
| JP2001165707A (en) | Method and device for correcting phase error of resolver | |
| JP3309027B2 (en) | Reluctant resolver | |
| JPH04161085A (en) | Synchronous motor control method | |
| EP0500431B1 (en) | Angle sensor, in particular for rotating machines at very high speed | |
| JP6685719B2 (en) | Rotation angle sensor mounting angle measuring device and rotation angle sensor mounting angle measuring method | |
| JPH0618339A (en) | Measuring device for braking torque generated by electromagnetic retarder and torque adjusting device | |
| JP2001264109A (en) | Encoder device and signal processing method thereof | |
| JP2004219333A (en) | Encoder output signal correcting device | |
| JP5162739B2 (en) | Encoder signal processing method, encoder device, and servo motor | |
| US11204260B2 (en) | System for determining at least one rotation parameter of a rotating member | |
| US4435987A (en) | Device for correcting torque detected by an electric dynamometer | |
| JPH0552583A (en) | Magnetic encoder | |
| JP2796296B2 (en) | Wafer pre-alignment method | |
| JP3408238B2 (en) | Resolver / digital converter and conversion method | |
| FI112300B (en) | Method and apparatus for controlling a synchronous permanent magnet motor | |
| US20200292634A1 (en) | System for determining at least one rotation parameter of a rotating member |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20040930 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20041006 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20050107 |