JPH10154017A - Chamber pressure controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To effectively prevent chamber pressure fluctuation at the time of the start and stop of an air supply and exhaust operation. SOLUTION: To a stop command of an air supply and exhaust operation, an air supply side adjusting damper 8B is closed and operated under the execution of necessary chamber pressure control, and also, after that, a closing operation of an air supply side airtight damper Vs and an air exhaust side airtight damper Ve is started as a cutoff control with a closing operation speed of the damper 8B limited. On the other hand, to a start command of the air supply and exhaust operation, an opening operation of the dampers Vs and Ve is started as cutoff release control with the damper 8B closed totally and also, at the same timer or later it returns to the necessary chamber pressure control under the execution of the necessary chamber pressure control with an opening operation speed limited in the returning process from the total closure of the damper 8B.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a room pressure control device used in a facility having a target room requiring room pressure control, such as a pharmaceutical factory, an LSI factory, or a microorganism research laboratory. An air-supply-side adjustment damper and an air-supply-side airtight damper are interposed in series in an air path, and an exhaust-side adjustment damper and an exhaust-side airtight damper are interposed in series in an exhaust path for the target chamber. The required air supply control for adjusting the opening amount of the air-side adjustment damper to adjust the air supply amount to the target chamber to the required air supply amount, and the opening of the exhaust-side adjustment damper for adjusting the opening degree of the target chamber The present invention relates to a room pressure control device provided with control means for performing required room pressure control for adjusting pressure to a required room pressure.

[0002]

2. Description of the Related Art When a supply / exhaust operation for a target chamber is stopped, a room pressure control device of this type closes a supply-side airtight damper and an exhaust-side airtight damper to supply and exhaust air to and from the target chamber. Conventionally, in this type of room pressure control device, in order to stop the air supply / exhaust operation to the target room, the air supply to the target room is adjusted by adjusting the opening degree of the air supply side adjustment damper. Under the execution of the required air supply control that adjusts the amount to the set required air supply, and the necessary room pressure control that adjusts the opening pressure of the exhaust-side adjustment damper to adjust the room pressure of the target room to the set required air pressure,
The supply-side airtight damper and the exhaust-side airtight damper were closed.

[0003] Also, when the supply / exhaust operation to the target chamber is started, the supply-side airtight damper and the exhaust-side airtight damper are opened while the required air supply amount control and the required room pressure control are executed. .

[0004]

However, in the conventional apparatus, when the supply / exhaust operation is stopped, the supply-side airtight damper and the exhaust-side airtight damper are closed and operated while the required supply amount control and the required room pressure control are executed. However, the required chamber pressure control by adjusting the opening degree of the exhaust-side adjustment damper cannot follow the change in the supply-exhaust balance caused by the deviation of the closing operation between the supply-side airtight damper and the exhaust-side airtight damper, There was a case where the room pressure of the target room greatly fluctuated from the required room pressure.

When the supply / exhaust operation is started, the supply-side airtight damper and the exhaust-side airtight damper are opened under the required supply amount control, so that the supply-side airtight damper is still fully closed. In order to control the required amount of air supply at the air supply stop stage, the air supply side adjustment damper is widely opened, and under this state, the air supply side airtight damper opening operation is started. Therefore, when the opening operation of these airtight dampers is started, the amount of air supply changes abruptly, and the required room pressure control cannot follow this, and the room pressure of the target room sometimes fluctuates greatly.

Then, due to these room pressure fluctuations, for example,
There has been a problem that the intended purpose of room pressure control, such as maintaining the cleanliness of the target room and preventing harmful substances from leaking from the target room, cannot be sufficiently achieved.

Further, in order to prevent such fluctuations in the room pressure as much as possible, the airtight damper on the air supply side and the airtight damper on the exhaust side can be opened and closed by operating in synchronism as much as possible, or by opening and closing these airtight dampers at a slow speed. This requires a special control means, which causes a problem that the apparatus cost is increased.

In view of the above circumstances, an object of the present invention is to effectively solve the above-mentioned problems by adopting a rational control mode.

[0009]

According to a first feature of the present invention, a supply-side adjustment damper and a supply-side hermetic damper are interposed in series in a supply path to a target chamber, and the target chamber is provided with a control valve. In the exhaust path, an exhaust-side adjustment damper and an exhaust-side airtight damper are interposed in series, and the degree of opening of the supply-side adjustment damper is adjusted to adjust the supply amount to the target chamber to the required supply amount. A control means for executing a required air supply amount control to perform necessary air pressure control and a necessary room pressure control for adjusting an opening degree of the exhaust side adjustment damper to adjust the room pressure of the target room to a set required room pressure. Means, when a stop command of the supply / exhaust operation is given, as a shut-off control for closing the supply-side airtight damper and the exhaust-side airtight damper, it is necessary to limit the closing operation speed of the supply-side adjustment damper. Closes the supply-side adjustment damper during execution of room pressure control Is operated, and, thereafter, to start the closing operation of the air supply side airtight damper and the exhaust-side gas-tight damper, whereas, when the start command of the supply and exhaust operation is applied,
Opening of the supply-side airtight damper and the exhaust-side airtight damper in a state in which the air-supply-side adjustment damper is fully closed is performed as shutoff release control for opening the air-supply-side airtight damper and the exhaust-side airtight damper. At the same time or after that, while the opening operation speed in the process of returning from the fully closed state of the air supply side adjustment damper is limited, the operation returns to the required air supply amount control under the execution of the required room pressure control. The point is that it is configured.

According to a second aspect of the present invention, in the first aspect of the present invention, the control means is arranged such that, in the shutoff release control, the exhaust side adjustment damper is provided together with the air supply side adjustment damper. With the fully closed
Starting the opening operation of the supply-side airtight damper and the exhaust-side airtight damper, and at the same time or thereafter, with the opening operation speed in the process of returning from the fully closed state of the air supply-side adjustment damper, The point is that it is configured to return to the required air supply control under the return of the required chamber pressure control.

According to a third aspect of the present invention, in the embodiment of the first or second aspect of the present invention, each of the air supply passages separately branched from the main air supply passage to the plurality of target chambers. The air supply side adjustment damper and the air supply side airtight damper are interposed in series, and each of the exhaust paths branched and connected from a main exhaust path to a plurality of the target chambers respectively is connected to the exhaust side. With respect to the configuration in which the adjustment damper and the exhaust-side airtight damper are interposed in series, when the control means is given a stop command of the supply / exhaust operation for only some of the target chambers, Performing the cutoff control only for some of the target rooms, and, when a start command of a supply / exhaust operation for only some of the target rooms among the target rooms is given,
The point is that the above-mentioned block release control is executed only for some of the target rooms.

According to a fourth aspect of the present invention, in the embodiment of the first aspect of the present invention, the main supply path is branched and connected to a plurality of the target chambers. In each of the air supply paths, the air supply side adjustment damper and the air supply side airtight damper are interposed in series, and each of the exhaust paths separately branched and connected from the main exhaust path to the plurality of target chambers. In a configuration in which the exhaust-side adjustment damper and the exhaust-side hermetic damper are interposed in series, the control unit is provided with a plurality of target chambers when a start command of a supply / exhaust operation of the entire apparatus is given. And the shutdown control is executed for each of the plurality of target chambers when a command to stop the supply / exhaust operation of the entire apparatus is given. It is in.

[0013]

According to the first aspect of the present invention, in response to a stop command of the supply / exhaust operation, the closing operation speed of the supply-side adjustment damper is firstly controlled as shut-off control for closing the supply-side airtight damper and the exhaust-side airtight damper. In a state where the required air pressure is controlled, the air supply side adjustment damper is closed under the execution of the required room pressure control, so that the air supply amount to the target room is gradually reduced from the set required air supply amount. On the required chamber pressure control, the exhaust side adjustment damper is closed by following the decrease in air supply amount,
As a result, the supply air amount and the exhaust air amount are reduced while the room pressure of the target room is stably maintained at the set necessary room pressure.

Thereafter, the closing operation of the supply-side airtight damper and the exhaust-side airtight damper is started in a state where the supply amount and the exhaust amount are reduced, so that the supply-side airtight damper and the exhaust-side airtight damper are started. Even if there is a shift in the closing operation, the change in the supply / exhaust balance caused by the shift in the closing operation is smaller than in the case where the closing operation of the hermetic damper is performed without reducing the air supply amount and the exhaust amount. As a result, fluctuations in the room pressure during the closing operation of these hermetic dampers are prevented.

On the other hand, in response to the start command of the supply / exhaust operation,
As shut-off release control for opening the supply-side airtight damper and the exhaust-side airtight damper, by starting the operation of opening the supply-side airtight damper and the exhaust-side airtight damper in a state in which the supply-side adjustment damper is fully closed, At the start of the supply / exhaust operation, room pressure fluctuation due to a sudden change in the supply amount caused by opening the supply-side airtight damper while the supply-side adjustment damper is largely opened is prevented.

Simultaneously with or after the start of the opening operation, while the opening operation speed in the process of returning from the fully closed state of the air supply side adjustment damper is limited, the required air supply amount is controlled under the necessary room pressure control. By returning to control, the amount of air supply to the target room is gradually increased toward the set required amount of air supply, and accordingly, the exhaust side adjustment damper follows the increase in the amount of air supply in the necessary room pressure control Then, the opening operation is performed, thereby increasing the air supply amount and the exhaust amount while stably maintaining the room pressure of the target room at the set necessary room pressure, and entering a steady air supply / exhaust operation state.

When the return to the required air supply control is performed simultaneously with the start of the opening operation of the airtight damper, the air supply dam is limited by the above-described restriction of the opening operation speed, and the return to the required air supply control is performed. Is performed after the opening operation of the airtight damper is started and before the opening operation is completed, the air supply side adjustment damper is fully closed until the operation is returned, and the air supply amount is limited by the restriction of the opening operation speed. With restrictions,
When the return to the required air supply control is performed after the airtight damper is opened, the air supply damper and the exhaust airtight damper are held by holding the air supply damper fully closed until the airtight damper is opened. The fluctuation of the room pressure caused by the deviation of the opening operation can be prevented.

According to a second aspect of the present invention, in the shut-off release control, the supply-side airtight damper and the exhaust-side airtight damper are provided with the exhaust-side adjustment damper and the exhaust-side adjustment damper fully closed. By starting the opening operation of the damper, it is possible to prevent room pressure fluctuations caused by opening the exhaust-side airtight damper when the exhaust-side adjustment damper is in an open state with an undefined opening at the start of the supply / exhaust operation I do.

That is, in the conventional apparatus described above, when the supply / exhaust operation is started, the air supply damper and the exhaust gas damper are opened under the required room pressure control. In order to control the required chamber pressure in the closed supply / exhaust stop stage, the exhaust-side adjustment damper is opened at an indefinite opening degree, and the opening operation of the exhaust-side airtight damper is started under that state, For this reason, at the start of the opening operation of these airtight dampers, the exhaust volume changes rapidly, and there is a problem that the required room pressure control cannot follow up and the room pressure of the target room fluctuates greatly. As described above, by starting the opening operation of the supply-side airtight damper and the exhaust-side airtight damper in a state where the exhaust-side adjustment damper together with the air-supply-side adjustment damper is fully closed, this kind of room pressure fluctuation can be reduced. Can prevent alignment

At the same time as or after the start of the airtight damper opening operation, with the opening operation speed limited in the process of returning from the fully closed state of the air supply side adjustment damper, the required air supply is restored under the required room pressure control return. By returning to the amount control, the air supply amount to the target chamber is gradually increased toward the set required air supply amount as in the invention according to claim 1, and the exhaust gas is controlled in the necessary room pressure control. The side adjustment damper is opened by following the increase in the air supply amount, thereby increasing the air supply amount and the exhaust amount while stably maintaining the room pressure of the target room at the set required room pressure. Enter operating state.

According to the characteristic configuration of the invention according to claim 3, in response to a command to stop the supply / exhaust operation for only a part of the plurality of target rooms, the shutoff is performed only for the part of the target rooms. By executing the control, the air supply side is maintained in a state in which the room pressure fluctuation at the time of the supply / exhaust operation stoppage is prevented as described above only for some of the target rooms while maintaining the current state of the other target rooms. The airtight damper and the exhaust side airtight damper are closed to stop the supply / exhaust operation.

In response to a supply / exhaust operation start command for only some of the target rooms out of a plurality of target rooms, the above-mentioned shutoff release control is executed only for some of the target rooms. For the other target chambers, the current state is maintained, and only for some of the target chambers, the supply-side airtight damper and the exhaust-side airtight Open the damper and start the air supply / exhaust operation.

According to a characteristic feature of the invention according to claim 4, in response to a start command of the supply / exhaust operation of the entire apparatus, the above-mentioned shutoff release control is executed for each of the plurality of target rooms, thereby to set the plurality of target rooms. As described above, the supply-side airtight damper and the exhaust-side airtight damper are opened in the state where the room pressure fluctuation at the start of the supply / exhaust operation is prevented as described above, and the supply / exhaust operation is started.

Further, in response to a command to stop the supply / exhaust operation of the entire apparatus, the above-described shutoff control is executed for each of the plurality of target rooms, so that the supply / exhaust operation is performed for each of the plurality of target rooms as described above. The supply-side airtight damper and the exhaust-side airtight damper are closed in a state where the room pressure fluctuation during the stop is prevented, and the supply / exhaust operation is stopped.

[0025]

According to the first aspect of the present invention, when the supply / exhaust operation is stopped, the supply / exhaust operation is started together with the fluctuation of the room pressure caused by the deviation of the closing operation between the supply-side airtight damper and the exhaust-side airtight damper. In this case, it is possible to effectively prevent room pressure fluctuations caused by sudden changes in the air supply amount, and also to prevent room pressure fluctuations caused by the deviation of the opening operation between the air supply damper and the airtight damper when the air supply / exhaust operation starts. Can be prevented, and from these things,
The intended purpose of room pressure control, such as maintaining the cleanliness of the target room and preventing harmful substances from leaking from the target room, can be more reliably achieved.

Further, when the supply / exhaust operation is stopped, the supply-side adjustment damper and the exhaust-side adjustment damper, which are originally provided with the opening control structure for the required supply amount control and the required supply amount control, are used. To prevent the chamber pressure from fluctuating at the start of the operation, the supply-side airtight damper and the exhaust-side airtight damper are opened / closed by synchronizing as much as possible, or by opening / closing these airtight dampers at a slow speed. No additional control means for the damper is required or simple, which makes it possible to reduce the equipment costs.

According to the second aspect of the present invention, it is also possible to effectively prevent the fluctuation of the room pressure due to the sudden change of the displacement at the start of the supply / exhaust operation, thereby more reliably achieving the intended purpose of the room pressure control. it can.

According to the third aspect of the present invention, the stop and start commands of the supply / exhaust operation for only some of the target rooms out of the plurality of target rooms are used to control the room only for some of the target rooms. The supply and exhaust operation can be stopped and started in a state where pressure fluctuations are effectively prevented, and as a result, only some of the multiple target rooms are temporarily supplied for fumigation etc. This is a suitable device for facilities that need to be shut down.

According to the fourth aspect of the present invention, the start and stop commands of the supply / exhaust operation of the entire apparatus are used to start and stop the supply / exhaust operation of each of the plurality of target rooms in a state where the room pressure fluctuation is prevented. The suspension can be performed, and for this reason, for example, when the facility starts operating and when the facility is stopped,
It is a suitable device in a facility where it is necessary to start and stop the supply / exhaust operation of a plurality of target rooms at the same time.

[0030]

Next, an embodiment will be described.

FIG. 1 shows an arrangement of supply / exhaust equipment for a plurality of target chambers 1, wherein a main air supply path 3 from an air supply fan 2 is connected to each of the target chambers 1 via a branch air supply path 4. The main exhaust path 6 connected to the exhaust fan 5 is connected to each of the target chambers 1 via the branch exhaust path 7, and the main air supply path 3 and the main exhaust path 6 return air at their backbones. It is connected by road B.

Each of the branch air supply passages 4 is provided with an airtight damper Vs on the air supply side and an air supply amount adjusting device 8 from the upstream side thereof. Air supply amount sensor 8A for detecting the air supply amount, air supply-side airtight damper V
s and a supply-side adjustment damper 8B which is interposed in series in the branch supply path 4 to adjust the supply amount by adjusting the opening degree, and the supply amounts Qx1, Qx2, Qx3 detected by the supply amount sensor 8A. An air supply controller 8C is provided to adjust the opening of the air supply-side adjustment damper 8B so that the target air supply amounts Qm1, Qm2, and Qm3 are obtained.

Each of the branch exhaust passages 7 is provided with a chamber pressure adjusting device 9 and an exhaust-side airtight damper Ve from the upstream side thereof. The chamber pressure sensor 9A for detecting (differential pressure from the outside or the absolute pressure of the target chamber 1) and the exhaust side airtight damper Ve are interposed in series in the branch exhaust path 7 to adjust the exhaust amount by adjusting the opening degree. The chamber pressure Px1, Px2, and Px3 detected by the exhaust-side adjustment damper 9B and the chamber pressure sensor 9A are changed to target chamber pressures Pm1 and Pm.
A room pressure controller 9C is provided for adjusting the opening of the exhaust-side adjustment damper 9B so as to be 2, Pm3.

A is an air conditioner for adjusting the temperature and humidity of the supply air, and Vb is a return air damper for adjusting the amount of return air from the main exhaust passage 6 to the main air supply passage 3.

Reference numeral 10 denotes start / stop of the supply / exhaust operation, control of the amount of supply air to each target room 1, control of the room pressure to each target room 1,
The central control device 10 controls and controls the dampers. The central control device 10 includes a fan control unit 11 for the air supply fan 2 and the exhaust fan 5, and a supply amount setting unit 1.
2. Room pressure setting unit 13, target air supply amount changing unit 14, and
A damper control unit D is provided.

When a start command of the supply / exhaust operation (that is, a start command of the supply / exhaust operation of the entire apparatus) is given to the fan control unit 11, as shown in FIG.
And the exhaust fans 5 are started, and the outputs of the fans 2 and 5 are gradually increased at predetermined change rates α1 and β1 (α1 <β1 is set in this example), while the supply / exhaust operation is stopped. When a command (that is, a command to stop the supply / exhaust operation of the entire apparatus) is given, as shown in FIG. 2, the stop operation for each of the fans 2 and 5 is performed in a predetermined order (in this example, the air supply fan 2 is exhausted). Before fan 5), and
In these fan stop operations, the outputs of the fans 2 and 5 are gradually decreased at predetermined change rates α2 and β2 (α2 <β2 is set in this example).
Stop 5

When the air supply / exhaust operation is in a steady state, the air supply fan 2 and the air supply fan 2 are controlled to maintain the air supply pressure in the main air supply passage 3 and the exhaust pressure in the main air exhaust passage 6 at predetermined pressure values, respectively. The output of each exhaust fan 5 is adjusted and controlled.

As shown in FIG. 2, the damper control unit D
When a start command of the supply / exhaust operation (a start command of the supply / exhaust operation of the entire apparatus) is given, the return air damper Vb is opened at a predetermined change speed γ1, and the supply-side airtight damper Vs of each of the target chambers 1 is operated. And opening the exhaust-side hermetic damper Ve to release the target chamber shut-off state. Further, until the opening operation of the supply-side hermetic damper Vs and the exhaust-side hermetic damper Ve is completed, the air supply amount is maintained. In a state prioritizing the controller 8C and the room pressure controller 9C, the supply-side adjustment damper 8B and the exhaust-side adjustment damper 9B of each target chamber 1 are forcibly maintained in the fully closed state continuously from the time of shutting down the target chamber. When the opening operation of the supply-side airtight damper Vs and the exhaust-side airtight damper Ve is completed, the opening degree control (that is, the supply amount control) of the supply-side adjustment damper 8B is transferred to the supply amount controller 8C. And the exhaust-side adjustment damper 9B Opening control (i.e., room pressure control) will be transferred to the chamber pressure controller 9C.

When a command to stop the supply / exhaust operation (a command to stop the supply / exhaust operation of the entire apparatus) is given, the return air damper Vb is closed at a predetermined change speed γ2, and the supply fan 2 and the exhaust When the stop of the fan 5 is completed, the supply-side airtight damper Vs and the exhaust-side airtight damper Ve of each target room 1 are closed to shut off the target room, and the supply-side airtight damper Vs and the exhaust-side airtight damper Ve are closed. Is completed, the air supply controller 8C and the room pressure controller 9
Prior to C, the supply-side adjustment damper 8B and the exhaust-side adjustment damper 9B of each target chamber 1 are forcibly switched to the fully closed state,
While the target room is shut off, these adjustment dampers 8B and 9B are kept in the fully closed state.

The room pressure setting section 13 responds to each object room 1
Are set, the required room pressures Ps1, Ps2, and Ps3 are set to target room pressures Pm1, Pm2, and Pm3 (Ps1 = Pm3) of the respective room pressure controllers 9C.
1, Ps2 = Pm2, Ps3 = Pm3) to each of the room pressure controllers 9C, thereby controlling the room pressure P of each of the target rooms 1 by adjusting the opening degree of the exhaust-side adjustment damper 9B as room pressure control.
x1, Px2, Px3 must be set.
The required room pressure control which adjusts to Ps3 is performed, and the required room pressure Ps
Until the setting of 1, Ps2, and Ps3 is changed, the target chamber pressures Pm1, Pm2, and Pm3 of the respective chamber pressure controllers 9C are fixed.

On the other hand, with respect to the air supply amount control, each target room 1
The required air supply amount Qs1, Qs2, Qs3 of the air supply amount setting unit 1
2, the required air supply amount Qs1, Qs2,
In response to the setting of Qs3, as shown in FIG. 2, the target air supply amount changing unit 14 supplies an air supply / exhaust operation start instruction (a start instruction of the air supply / exhaust operation of the entire apparatus) and then supplies air to the air supply side. The opening operation of the damper Vs and the exhaust side airtight damper Ve is completed, and the opening degree control of the air supply side adjustment damper 8B is performed by the air supply amount controller 8C.
Until the transfer to, the target supply amount Qm1 of each supply amount controller 8C regardless of the set required supply amount Qs1, Qs2, Qs3 of each target room 1 set in the supply amount setting unit 12. Q
Specify 0 as m2 and Qm3 (Qm1 = Qm2 = Qm3
= 0).

After that, when the opening degree control of the supply side adjustment damper 8B is transferred to the supply amount controller 8C, the target supply amounts Qm1, Qm2, Qm designated to the respective supply amount controllers 8C.
3 at predetermined time intervals T1, T2, and T3 in order from the target room 1 having the higher target room pressures Pm1, Pm2, and Pm3 (that is, the set required chamber pressures Ps1, Ps2, and Ps3), and at predetermined time intervals equal to each other. At the change rate θ1, the required supply air amount Qs1, Qs2, Qs3 is sequentially increased from 0, thereby preventing the temporary chamber pressure reversal phenomenon between the target chambers 1 and the supply air adjustment damper. In a state where the opening operation speed in the process of returning from the fully closed state of 8B is limited, the air supply amounts Qx1, Qx2, and Qx3 of each target room 1 are set.
s1, Qs2, and Qs3 to increase to a steady supply / exhaust operation state.
The air supply amount Qx1, Qx2, Qx3 to each target room 1 is set by adjusting the opening degree of the air supply side adjustment damper 8B.
The required air supply amount control is adjusted to 1, Qs2, and Qs3.

FIG. 2 shows a case where the relationship between the set room pressures is Ps1>Ps2> Ps3.

As shown in FIG. 2, when a target supply / exhaust operation stop command (a command to stop the supply / exhaust operation of the entire apparatus) is given, the target supply amount changing unit 14 controls each supply amount control. Target air supply amount Qm1, Qm2, Qm3 to be specified for the heater 8C
Are set at predetermined time intervals T4 and T5 in order from the target chamber 1 having the lower target chamber pressures Pm1, Pm2, and Pm3 (that is, the required set chamber pressures Ps1, Ps2, and Ps3), and at the same predetermined change speed θ2. Required air supply Qs1, Qs2
Qs3 is sequentially reduced from 0 to 0, thereby preventing the temporary room pressure reversal phenomenon between the target chambers 1 and limiting the closing operation speed of the air supply side adjustment damper 8B.
The supply amount Qx1, Qx2, Qx3 of each target room 1 is reduced, and the closing operation of the supply side airtight damper Vs and the exhaust side airtight damper Ve by the damper control unit D is performed under the reduced supply amount. To do.

In the above, the start / stop of the supply / exhaust operation of the entire equipment with the start / stop of the air supply fan 2 and the exhaust fan 5 has been described. During the supply and exhaust operation as
In the case of a partial suspension in which only a part of the target rooms 1 is shut off and the supply / exhaust operation to the target rooms 1 is temporarily stopped (for example, in order to perform a fumigation process on some of the target rooms 1). The central control device 10 also performs the same control as described above for the case where the target room 1 is temporarily shut off.

Specifically, (see FIG. 3), a temporary stop command in which the target room 1 for temporarily stopping the supply / exhaust operation is designated (ie, a stop instruction for the supply / exhaust operation for only some target rooms 1) ) Is given, the target air supply amount changing unit 14 sets the target air supply amounts Qm2 and Qm3 specified in the air supply amount controller 8C of the target room 1 to be temporarily stopped by the target air supply amounts Qm2 and Qm3 of the target room 1 to be temporarily stopped. From the target chamber 1 having the lower room pressures Pm2 and Pm3 (that is, the set required chamber pressures Ps2 and Ps3), the required air supply amounts Qs2 and Qs3 are set to 0 at predetermined time intervals T4 and at predetermined equal change rates θ2. In a state in which the temporary room pressure reversal phenomenon between the target chambers 1 in which the supply / exhaust operation is temporarily stopped is prevented, and the closing operation speed of the supply-side adjustment damper 8B is limited. In, those to pause Reducing the first air supply amount Qx2, Qx3.

Further, the damper control unit D determines when the target supply air amounts Qm2 and Qm3 of the target room 1 to be temporarily stopped become zero.
The supply-side airtight damper Vs and the exhaust-side airtight damper Ve of the target room 1 to be temporarily stopped are closed to shut off the target room 1 to be temporarily stopped.
When the closing operation of the exhaust-side hermetic damper Ve is completed, the supply-side adjustment damper 8B and the exhaust-side adjustment damper 9B of the target room 1 to be temporarily stopped are prioritized over the supply amount controller 8C and the room pressure controller 9C. The state is forcibly switched to the fully closed state, and the adjustment dampers 8B and 9B are kept in the fully closed state during the target room shutoff state.

Thereafter, when a restart command for the target room 1 in which the supply / exhaust operation is temporarily stopped (ie, a start command for the supply / exhaust operation for only some of the target rooms 1) is given,
The damper control unit D opens and shuts off the supply-side airtight damper Vs and the exhaust-side airtight damper Ve of the temporarily stopped target room 1 to release the target room shutoff, and then releases the supply-side airtight damper V.
s and the opening operation of the exhaust-side hermetic damper Ve are completed, and the priority is given to the air supply amount controller 8C and the room pressure controller 9C. Supply side adjustment damper 8B and exhaust side adjustment damper 9B
Forcibly fully closed, and the airtight dampers V on the air supply side
s and the opening operation of the exhaust side airtight damper Ve is completed, the opening degree control of the air supply side adjustment damper 8B (that is, the air supply amount control) is transferred to the air supply amount controller 8C, and the exhaust side adjustment damper is transferred. The opening degree control of 9B (that is, the room pressure control) is transferred to the room pressure controller 9C.

Further, the target air supply amount changing unit 14 completes the opening operation of the air supply damper Vs and the air exhaust damper Ve of the temporarily stopped target chamber 1 and completes the opening control of the air supply adjustment damper 8B. Until is transferred to the air supply controller 8C, the target air supply amounts Qm2 and Qm3 specified in the air supply controller 8C of the temporarily stopped target room 1 are kept at 0, and thereafter, the target rooms 1 and 2 are temporarily stopped. The target air supply amounts Qm2 and Qm3 specified in the air supply amount controller 8C of the first target room 1 are set to the target room pressures Pm2 and Pm3 of the temporarily stopped target room 1 (that is, the set required room pressures Ps2 and Pm2).
Ps3) Predetermined time intervals T1,
At T2 and at a predetermined change rate θ1 equal to each other, the required supply air amount Qs2 is gradually increased from Qs3 to Qs3, thereby temporarily reversing the room pressure between the target rooms 1 in which the supply / exhaust operation is temporarily stopped. In a state where the phenomenon is prevented, and in a state where the opening operation speed in the process of returning from the fully closed state of the air supply side adjustment damper 8B is limited, the air supply amounts Qx2 and Qx3 of the temporarily stopped target room 1 are set. The air volumes are increased to Qs2 and Qs3, and the temporarily stopped target room 1 is returned to the normal supply / exhaust operation state.

In both cases of stopping the supply / exhaust operation of the entire equipment and the above-mentioned partial suspension, the supply-side airtight damper Vs and the exhaust-side airtight damper Ve are closed to shut off the target chamber. Is the integral value of the air supply amount deviation in the air supply amount controller 8C adopting the PID control, and also the PID
The room pressure controller 9C employing the control resets the integral value of the chamber pressure deviation, and at the start of the next supply / exhaust operation, the opening operation of the supply-side and exhaust-side hermetic dampers Vs, Ve is completed. When the opening degree control of the air supply side adjustment damper 8B is transferred to the air supply amount controller 8C, and the opening degree control of the exhaust side adjustment damper 9B is transferred to the room pressure controller 9C, each deviation integrated value becomes 0.
From the initial state, the control operation of the air supply controller 8C and the room pressure controller 9C is performed, whereby the air supply controller 8C and the room pressure controller 9C are influenced by the residual deviation integrated value.
It is possible to prevent the opening degree adjustment of the air supply side adjustment damper 8B and the opening degree adjustment of the exhaust side adjustment damper 9B from becoming unstable immediately after the transfer to the control.

In the case where the target chamber 1 is subjected to the fumigation treatment during the partial suspension period, the return air damper Vb is temporarily set so that the fumigation exhaust gas is not led to another target chamber 1 at the time of resumption. Close.

In summary, in the present embodiment, the central control device 10, the air supply sensor 8A, the air supply controller 8C, the room pressure sensor 9A, and the room pressure controller 9C comprise the air supply side adjustment damper 8
Adjust the opening degree of B to supply air Qx1, Qx2 to the target room 1.
The required air supply amount control for adjusting Qx3 to the set required air supply amount Qs1, Qs2, Qs3, and the opening degree of the exhaust-side adjustment damper 9B is adjusted to set the room pressures Px1, Px2, and Px3 of the target room 1 to the required room pressure Ps1. , Ps2, Ps3, and Ps3.

When a command to stop the supply / exhaust operation is given, the control means performs a closing operation speed of the supply-side adjustment damper 8B as a shutoff control for closing the supply-side airtight damper Vs and the exhaust-side airtight damper Ve. In a state in which the required chamber pressure control is performed, the supply-side adjustment damper 8B is closed, and thereafter, the closing operation of the supply-side airtight damper Vs and the exhaust-side airtight damper Ve is started. When the start command of the supply / exhaust operation is given, the supply-side adjustment damper 8B is fully closed, and the supply-side adjustment damper 8B is fully closed. The opening operation of the hermetic damper Vs and the exhaust-side hermetic damper Ve is started, and thereafter (or at the same time as described later), the opening operation speed in the process of returning the supply-side adjustment damper 8B from the fully closed state is controlled. And in state, are the structure to return to the required air supply amount control in need chamber pressure control under execution.

In the shut-off release control, the control means controls the supply-side airtight damper Vs while the exhaust-side adjustment damper 9B is fully closed together with the supply-side adjustment damper 8B.
And the opening operation of the exhaust side airtight damper Ve is started, and
Thereafter (or simultaneously), the supply-side adjustment damper 8
In a state in which the opening operation speed in the process of returning from the fully closed state of B is limited, the control is returned to the required air supply control under the required room pressure control.

Further, when a stop command of the supply / exhaust operation for only a part of the target rooms 1 out of the target rooms 1 is given, the control means performs the above-mentioned operation for only some of the target rooms 1. When the shutoff control is executed and a start command of the supply / exhaust operation for only a part of the target chambers 1 among the target chambers 1 is given, the cutoff release control is performed only for the part of the target chambers 1. When the start command of the supply / exhaust operation of the entire apparatus is given, the above-described shutoff release control is executed for each of the plurality of target chambers 1, and the supply / exhaust operation of the entire apparatus is performed. When the stop command is given, the shutoff control is executed for each of the plurality of target rooms 1.

[Another Embodiment] In the above-described embodiment, the supply-side adjustment damper 8B and the exhaust-side adjustment damper are operated until the opening operation of the supply-side airtight damper Vs and the exhaust-side airtight damper Ve is completed in the shutoff release control. 9B is kept in the fully closed state, but in the shutoff release control, the supply-side airtight damper Vs and the exhaust-side airtight damper Ve in a state in which the supply-side adjustment damper 8B and the exhaust-side adjustment damper 9B are fully closed. In response to the opening operation, the supply-side adjustment damper 8B and the exhaust-side adjustment damper 9B are released from the fully closed state, and the opening degree control of the supply-side adjustment damper 8B and the exhaust-side adjustment damper 9B is performed. At the time of transfer to the air supply amount controller 8C or the room pressure controller 9C (that is, at the time of returning to the required air supply amount control with the opening operation speed limited in the process of returning from the full closing of the air supply side adjustment damper 8B) , , The time to return to the required chamber pressure control)
Is not limited to the time when the opening operation of the supply-side airtight damper Vs and the exhaust-side airtight damper Ve is completed, but the time when the opening operation of the air-supply-side airtight damper Vs and the exhaust-side airtight damper Ve starts, and during the opening operation. It may be a point in time.

The object room 1 may be used for any purpose, and the purpose of room pressure control is to maintain the cleanliness of the room.
Any purpose may be used.

In the claims, reference numerals are provided for convenience of comparison with the drawings, but the present invention is not limited to the configuration shown in the attached drawings.

[Brief description of the drawings]

FIG. 1 Equipment configuration diagram

FIG. 2 is a diagram showing an operation control mode in starting and stopping the supply / exhaust operation.

FIG. 3 is a diagram showing an operation control mode at the time of partial suspension.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Target room 3 Main air supply path 4 Air supply path 6 Main exhaust path 7 Exhaust path 8B Supply side adjustment damper 9B Exhaust side adjustment damper 10, 8A, 8C, 9A, 9C Control means Vs Supply side airtight damper Ve Exhaust side Airtight damper Qx1, Qx2, Qx3 Air supply amount Qs1, Qs2, Qs3 Set required air supply amount Px1, Px2, Px3 Room pressure Ps1, Ps2, Ps3 Set required room pressure

Claims (4)

[Claims] 1. An air supply passage (4) for a target room (1),
Supply side adjustment damper (8B) and supply side airtight damper (Vs)
And an exhaust-side adjustment damper (9B) and an exhaust-side hermetic damper (Ve) are interposed in series in an exhaust path (7) for the target chamber (1). The opening degree of the damper (8B) is adjusted to supply air (Qx1), (Qx2), (Qx
3) Set the required air supply amount (Qs1), (Qs2), (Qs
3) The required supply amount control to be adjusted to 3) and the opening pressure of the exhaust side adjustment damper (9B) are adjusted to adjust the chamber pressure (P) of the target chamber (1).
x1), (Px2) and (Px3) are set as required chamber pressure (Ps
Control means (10, 8A, 8C, 9A, 9) for executing necessary room pressure control to adjust to (1), (Ps2) and (Ps3)
C), wherein the control means (10, 8A, 8C, 9A, 9C) controls the air-supply-side airtight damper (Vs ) And the shut-off control for closing the exhaust-side airtight damper (Ve), with the closing operation speed of the air-supply-side adjustment damper (8B) limited, and under the execution of the required chamber pressure control, the air-supply-side adjustment damper ( 8B), and thereafter, the closing operation of the air supply damper (Vs) and the airtight damper (Ve) is started. On the other hand, when a start command of the air supply / exhaust operation is given. , The supply-side airtight damper (Vs) and the exhaust-side airtight damper (Vs).
e) As shut-off release control for opening e), the opening operation of the air supply damper (Vs) and the exhaust air tight damper (Ve) is started with the air supply damper (8B) fully closed. At the same time or after that, while the opening operation speed in the process of returning from the fully closed state of the air supply side adjustment damper (8B) is limited, the necessary air supply amount control is performed under the execution of the necessary room pressure control. A room pressure control device that is configured to return. 2. The control means (10, 8A, 8C, 9)
A, 9C), in the shutoff release control, the air supply side adjustment damper (8
B) with the exhaust-side adjustment damper (9B) fully closed together with B), start opening the supply-side airtight damper (Vs) and the exhaust-side airtight damper (Ve), and
At the same time or thereafter, the supply-side adjustment damper (8
2. The room pressure control device according to claim 1, wherein, in a state in which the opening operation speed in the process of returning from the fully closed state in B) is limited, the operation returns to the required air supply amount control under the return of the required room pressure control. 3. The supply-side adjusting damper (8B) and the supply-side adjustment damper (8B) are respectively connected to each of the supply paths (4) branched from the main supply path (3) to the plurality of target chambers (1). An air-side hermetic damper (Vs) is interposed in series, and each of the exhaust paths (7) branch-connected separately from the main exhaust path (6) to the plurality of target chambers (1). Side adjustment damper (9B) and the exhaust side airtight damper (Ve)
And the control means (10, 8A, 8C, 9A, 9C) is operated in a supply / exhaust operation for only a part of the target room (1) of the target room (1). When the stop command is given, the shut-off control is executed only for some of the target rooms (1), and only for some of the target rooms (1) of the target rooms (1). 3. The room pressure control device according to claim 1, wherein when the start command of the supply / exhaust operation to be performed is given, the shutoff release control is executed only for a part of the target room (1). 4. 4. The supply-side adjustment damper (8B) and the supply air supply damper (8B) are respectively connected to each of the supply paths (4) branched and connected from the main supply path (3) to the plurality of target chambers (1). An air-side hermetic damper (Vs) is interposed in series, and each of the exhaust paths (7) branch-connected separately from the main exhaust path (6) to the plurality of target chambers (1). Side adjustment damper (9B) and the exhaust side airtight damper (Ve)
Are arranged in series, and when the control means (10, 8A, 8C, 9A, 9C) is provided with a command to start the supply / exhaust operation of the entire apparatus, the plurality of target chambers (1) The above-mentioned block release control is executed for each of the above, and when a stop command of the supply / exhaust operation of the entire apparatus is given, the above-mentioned block control is executed for each of the plurality of target chambers (1). The room pressure control device according to any one of claims 1 to 3, wherein