JPH10152777A - Vacuum deposition system - Google Patents
Vacuum deposition systemInfo
- Publication number
- JPH10152777A JPH10152777A JP31443096A JP31443096A JPH10152777A JP H10152777 A JPH10152777 A JP H10152777A JP 31443096 A JP31443096 A JP 31443096A JP 31443096 A JP31443096 A JP 31443096A JP H10152777 A JPH10152777 A JP H10152777A
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- shutter
- hood
- hoods
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は真空蒸着装置に関
し、特に帯鋼に金属蒸気を蒸着させる場合に用いて有用
なものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum deposition apparatus, and is particularly useful for depositing metal vapor on a steel strip.
【０００２】[0002]
【従来の技術】図７は従来技術に係る真空蒸着装置を示
す図である。同図において、１０は帯鋼、１１７，１１
７′は真空シール室で真空チャンバ１１５に接続される
とともにこの真空チャンバ１１５よりも高圧に形成して
ある。１１６，１１６′は真空シールロール、１０４，
１０４′は帯鋼を真空チャンバ１１５へ進入および退出
させるための案内ロール、１２６，１２６′はロール室
１２１，１２１′と真空チャンバ１１５を接続する伸縮
自在のジャバラ、１１９は帯鋼１０を巻付けて金属蒸気
を蒸着させる回転セル、１２９は回転セルを加熱するヒ
ータ、１１２は回転セル１１９に近接され僅かな隙間１
１３を持たせるように取付られた帯鋼１０の進入側およ
び退出側のカバー、１１０は該カバー１１２を加熱する
ヒータ、１０６は溶融金属を溶解するためのルツボ、１
０８は該ルツボ１０６を加熱するヒータ、１２０は蒸発
した金属蒸気１２４を蒸着面１２２へ案内するフード、
１１８は隙間１１３を帯鋼１０の板厚に応じて自在に調
節するためにカバー１１２とフード１２０の間に設けら
れた伸縮自在のベローズ、１０９はフード１２０を加熱
するヒータ、１３０は真空チャンバ１１５を真空にする
ための真空ポンプ、１２５，１２５′はカバー１１２を
開閉させ隙間１１３を調節する開閉装置、矢印１３６，
１３６′は帯鋼１０の入方向および出方向、矢印１３７
は回転セル１１９の回転方向を示す。2. Description of the Related Art FIG. 7 is a view showing a vacuum deposition apparatus according to the prior art. In the figure, 10 is a strip steel, 117, 11
Reference numeral 7 'denotes a vacuum sealing chamber which is connected to the vacuum chamber 115 and has a higher pressure than the vacuum chamber 115. 116, 116 'are vacuum seal rolls;
104 'is a guide roll for moving the steel strip into and out of the vacuum chamber 115, 126 and 126' are telescopic bellows connecting the roll chambers 121, 121 'and the vacuum chamber 115, and 119 is a roll of the steel strip 10. Cell 129 is a heater for heating the rotating cell, and 112 is a small gap 1 close to the rotating cell 119.
13 is a cover on the entry side and the exit side of the steel strip 10 attached so as to have 13; 110 is a heater for heating the cover 112; 106 is a crucible for melting molten metal;
08 is a heater for heating the crucible 106, 120 is a hood for guiding the evaporated metal vapor 124 to the vapor deposition surface 122,
Reference numeral 118 denotes a stretchable bellows provided between the cover 112 and the hood 120 to freely adjust the gap 113 according to the thickness of the steel strip 10, 109 denotes a heater for heating the hood 120, and 130 denotes a vacuum chamber 115 Pumps 125 and 125 ′ for opening and closing the cover 112 to adjust the gap 113, arrows 136 and 125
136 ′ is the entry and exit directions of the steel strip 10, and arrow 137.
Indicates the rotation direction of the rotation cell 119.
【０００３】かかる真空蒸着装置は次の様な作用・効果
を有する。すなわち、ルツボ１０６の中の溶融金属１０
７をヒータ１０８により所定の温度範囲、例えば当該溶
融金属１０７がＺｎの場合は約４３０〜５５０℃に加熱
溶解する。[0003] Such a vacuum deposition apparatus has the following functions and effects. That is, the molten metal 10 in the crucible 106
7 is heated and melted by a heater 108 to a predetermined temperature range, for example, about 430 to 550 ° C. when the molten metal 107 is Zn.
【０００４】ここで真空ポンプ１３０で真空チャンバ１
１５の圧力を１〜１０-4Torrにすると蒸発室１２３内も
同様に隙間１１３を介して同一の真空圧となる。また回
転セル１１９の内側はヒータ１２９にて金属蒸気１２４
が蒸着しない温度に加熱され、回転セル１１９表面への
金属蒸気１２４の蒸着を防止し、かつ、回転セル１１９
の外周側を通る帯鋼１０は金属蒸気１２４が蒸着しない
温度以上に加熱されることなく維持される。Here, the vacuum pump 130 is used to
When the pressure at 15 is 1 to 10 -4 Torr, the same vacuum pressure is applied to the inside of the evaporation chamber 123 via the gap 113. Further, the inside of the rotating cell 119 is heated by a heater 129 to form a metal vapor 124.
Is heated to a temperature at which no vapor deposition occurs, to prevent vapor deposition of the metal vapor 124 on the surface of the rotating cell 119, and
Is maintained without being heated to a temperature higher than the temperature at which the metal vapor 124 is not deposited.
【０００５】かくして、帯鋼１０に一旦蒸着された金属
蒸気１２４は再蒸発することはない。このとき金属蒸気
１２４の流量は、蒸発室１２３と蒸着面１２２との間に
設けられた板状のシャッタ１０３によって制御される。
すなわち、シャッタスライド板１０３ａの摺動により金
属蒸気１２４の流通経路の開口径を変化させる。[0005] Thus, the metal vapor 124 once deposited on the steel strip 10 does not re-evaporate. At this time, the flow rate of the metal vapor 124 is controlled by a plate-shaped shutter 103 provided between the evaporation chamber 123 and the deposition surface 122.
That is, the sliding diameter of the shutter slide plate 103a changes the opening diameter of the flow path of the metal vapor 124.
【０００６】[0006]
【発明が解決しようとする課題】上述の如き従来技術に
おいて帯鋼１０が蒸着される面は片面であり、両面を蒸
着するには、当該真空蒸着装置を２箇所に設ける必要が
ある。In the prior art as described above, the surface on which the steel strip 10 is deposited is one side, and in order to deposit both sides, it is necessary to provide the vacuum deposition apparatus at two places.
【０００７】また、従来技術に係る真空蒸着装置のシャ
ッタ１０３では、シャッタ開度と蒸気流量が比例関係に
あり、また、シャッタスライド弁の曲がり変形などによ
り、微量蒸着時の流量を制限して蒸着する場合に形成さ
れる蒸着面１２２に大きなバラツキを生じる欠点があっ
た。Further, in the shutter 103 of the vacuum evaporation apparatus according to the prior art, the opening degree of the shutter and the vapor flow rate are in a proportional relationship, and the flow rate at the time of a small amount of evaporation is limited by bending deformation of a shutter slide valve or the like. However, there is a disadvantage that the deposition surface 122 formed in such a case causes a large variation.
【０００８】本発明は、上記従来技術に鑑み、同一装置
による両面の蒸着を可能にするとともに均一な蒸着面の
形成も可能とする真空蒸着装置を提供することを目的と
する。In view of the above prior art, an object of the present invention is to provide a vacuum vapor deposition apparatus which enables vapor deposition on both sides by the same apparatus and also enables uniform formation of a vapor deposition surface.
【０００９】[0009]
【課題を解決するための手段】上記目的を達成する本発
明の構成は次の点を特徴とする。The structure of the present invention that achieves the above object has the following features.
【００１０】（１） 高真空度の真空チャンバに帯鋼を
通し、溶融ルツボ内の溶融金属を加熱して生じた金属蒸
気を、二股に分岐する分流フード及びこれに連通して帯
鋼の両面にそれぞれ開口する開口部を有する蒸着フード
を介して帯鋼の両面に蒸着させるとともに、蒸着フード
内には１個若しくは複数個の整流用の多孔板を設け、さ
らに各分流フードに流入する金属蒸気の流量をそれぞれ
独立に制御し得るよう各分流フードの入口側開口部にシ
ャッタを配設したこと。(1) A steel strip is passed through a high-vacuum vacuum chamber to heat a molten metal in a molten crucible, and a metal vapor generated by the molten steel is branched into two branches. In addition to vapor deposition on both sides of the strip through vapor deposition hoods each having an opening that opens into the vapor deposition hood, one or more rectifying perforated plates are provided in the vapor deposition hood, and metal vapor flowing into each branch hood is further provided. Shutters are provided at the inlet-side openings of the respective flow hoods so that the flow rates of the diverter hoods can be controlled independently of each other.
【００１１】（２） （１）のシャッタは、入口開口
部、出口開口部及びこれら入口開口部、出口開口部を連
通する複数の連通路をシャッタブロック内に形成する一
方、連通路の途中に各連通路と対応する孔を有するシャ
ッタシャフトをこの軸回りに回動可能に挿入し、さらに
このシャッタシャフトの回動量を制御することにより各
孔と連通路との交叉による重なり面積を制御して金属蒸
気の流量を調整するとともに、このときの孔と連通路と
の交叉開始時期が各孔相互間で異なるように構成した同
構成の二つのブロックを有するものであること。(2) In the shutter of (1), an inlet opening, an outlet opening, and a plurality of communication passages communicating with the inlet opening and the outlet opening are formed in the shutter block, while the shutter is provided in the middle of the communication passage. A shutter shaft having a hole corresponding to each communication path is rotatably inserted around this axis, and furthermore, by controlling the amount of rotation of the shutter shaft, the overlapping area due to the intersection of each hole and the communication path is controlled. It has two blocks of the same configuration that adjust the flow rate of the metal vapor and that the crossing start time between the hole and the communication path at this time is different between the holes.
【００１２】[0012]
【発明の実施の形態】以下本発明の実施の形態を図面に
基づき詳細に説明する。Embodiments of the present invention will be described below in detail with reference to the drawings.
【００１３】図１は本形態に係る真空蒸着装置を示す側
面図、図２はその平面図、図３はその正面図である。こ
れら図１〜図３に示すように、真空ポンプ３０により高
真空度を有するように形成された真空チャンバ１５内に
は、蒸着フード１，１′、分流フード２，２′、シャッ
タ３、蒸発室４、ベローズ５、溶融金属７を収納した溶
融ルツボ６及び誘導加熱コイル８を収納、配設してあ
る。FIG. 1 is a side view showing a vacuum deposition apparatus according to this embodiment, FIG. 2 is a plan view thereof, and FIG. 3 is a front view thereof. As shown in FIGS. 1 to 3, in a vacuum chamber 15 formed to have a high degree of vacuum by a vacuum pump 30, vapor deposition hoods 1 and 1 ′, branch hoods 2 and 2 ′, a shutter 3, A chamber 4, a bellows 5, a molten crucible 6 containing a molten metal 7, and an induction heating coil 8 are housed and arranged.
【００１４】所定温度に予備加熱した帯鋼１０は、真空
チャンバ１５の左上部（図３参照）から該真空チャンバ
１５内に水平に導入して中央部で垂直下方に向きを変
え、さらに再度水平に向きを変えて右下部から導出する
ように構成してある。The steel strip 10 which has been preheated to a predetermined temperature is introduced horizontally into the vacuum chamber 15 from the upper left part of the vacuum chamber 15 (see FIG. 3), turned vertically downward at the center, and then again horizontally. It is configured so that the direction is changed to and derived from the lower right.
【００１５】真空チャンバ１５内への帯鋼１０の導入・
導出は各シールロール１６，１６′に真空ポンプ３１，
３２を設けたロール室１７，１７′を通じて行なうとと
もに、上，下の案内ロール９，９′を介して蒸着フード
１，１′間を垂直下方に走行させる。Introducing the steel strip 10 into the vacuum chamber 15
The vacuum pump 31 is attached to each seal roll 16, 16 '.
32, and vertically travel between the vapor deposition hoods 1 and 1 'via upper and lower guide rolls 9 and 9'.
【００１６】誘導加熱コイル８により加熱される溶融ル
ツボ６内の溶融金属７は金属蒸気２４となって蒸発室４
及びベローズ５に至り、シャッタ３を介して分流フード
２，２′及び蒸着フード１，１′に至るように構成して
ある。このとき分流フード２，２′は二股に分岐し、各
分流フード２，２′に連通する蒸着フード１，１′の開
口部１ｂ，１′ｂが蒸着フード１，１′間を垂直方向に
流れる帯鋼１０の両面の蒸着面１０ａ，１０ｂに臨むよ
うになっている。かくして帯鋼１０の両面に同時に金属
蒸気を蒸着することができる。The molten metal 7 in the molten crucible 6 heated by the induction heating coil 8 is turned into a metal vapor 24 so as to form a metal vapor 24.
And the bellows 5, and through the shutter 3, to the branch hoods 2 and 2 ′ and the vapor deposition hoods 1 and 1 ′. At this time, the branch hoods 2 and 2 'are bifurcated, and the openings 1b and 1'b of the vapor deposition hoods 1 and 1' communicating with the branch hoods 2 and 2 'extend vertically between the vapor deposition hoods 1 and 1'. It faces the vapor deposition surfaces 10a and 10b on both sides of the flowing steel strip 10. Thus, metal vapor can be vapor-deposited on both sides of the strip 10 at the same time.
【００１７】また、蒸着フード１，１′は、帯鋼１０へ
の蒸着を均一化するため、それぞれの内部に配設した多
孔板１ａ，１′ａを有する。この多孔板１ａ，１′ａは
蒸気の流れを整流する線径２ｍｍ、開口率６０％のステ
ンレス鋼製の部材である。シャッタ３はベローズ５と各
分流フード２，２′との境界部分に配設してあり、各分
流フード２，２′に流入する蒸気流量を独立に調整する
ものである。このシャッタ３の構成の詳細は後に説明す
る。Further, the deposition hoods 1 and 1 'have perforated plates 1a and 1'a disposed inside the hoods 1 and 1', respectively, for uniform deposition on the steel strip 10. The perforated plates 1a and 1'a are stainless steel members having a wire diameter of 2 mm and an opening ratio of 60% for rectifying the flow of steam. The shutter 3 is disposed at the boundary between the bellows 5 and each of the branch hoods 2 and 2 ', and independently adjusts the flow rate of steam flowing into each of the branch hoods 2 and 2'. Details of the configuration of the shutter 3 will be described later.
【００１８】フード移動装置２５，２５′は帯鋼１０の
蒸着面１０ａ，１０ｂと蒸着フード１，１′の開口部１
ｂ，１′ｂとの間の間隙Ｇ（図２参照）を保持して金属
蒸気２４の真空チャンバ１５内への漏洩を可及的に低減
している。また、ベローズ５はシャッタ３と蒸発チャネ
ルとの間の昇温に伴なう変形、変位を吸収するものであ
る。金属蒸気２４の生成は溶融ルツボ６中の溶融金属７
を誘導加熱コイル８で加熱することで実現し、５００℃
に加熱保持している。蒸発金属の補充は、大気中溶融金
属２１からライジングスノーケル２０を介して行なう。The hood moving devices 25, 25 'are provided with the vapor deposition surfaces 10a, 10b of the steel strip 10 and the opening 1 of the vapor deposition hood 1, 1'.
The gap G (see FIG. 2) between the first and second b and 1'b is maintained to reduce the leakage of the metal vapor 24 into the vacuum chamber 15 as much as possible. The bellows 5 absorbs deformation and displacement caused by a temperature rise between the shutter 3 and the evaporation channel. The production of the metal vapor 24 depends on the molten metal 7 in the molten crucible 6.
At 500 ° C.
Is kept heated. The replenishment of the evaporated metal is performed from the molten metal 21 in the atmosphere via the rising snorkel 20.
【００１９】蒸気フード１，１′、分流フード２，２′
および蒸発室４の外面には図面に記してないが、壁面へ
の蒸着を防ぐためのヒータを設け２５０〜５８０°に加
熱するようにしている。またロール室１７，１７′の入
口側及び出口側に不活性ガス導入管２６，２６′を設
け、真空チャンバ１５内への酸素の侵入を小さくするよ
うにした。Steam hood 1, 1 ', branch hood 2, 2'
Although not shown in the drawing, a heater for preventing deposition on the wall surface is provided on the outer surface of the evaporating chamber 4 so that the heater is heated to 250 to 580 °. Further, inert gas introduction pipes 26, 26 'are provided on the inlet side and the outlet side of the roll chambers 17, 17', respectively, so that penetration of oxygen into the vacuum chamber 15 is reduced.
【００２０】シャッタ３は分流フード２，２′に対応し
て配設した同構成の２個のブロックからなり、分流フー
ド２，２′に流入する金属蒸気２４の流量を独立に制御
し得るように構成してある。図４及び図５はシャッタ３
の一方のブロックを抽出・拡大して示す図であり、図４
（ａ）は一部破断して示す正面図、図４（ｂ）はそのシ
ャッタシャフトを抽出して示す正面図、図５は図４
（ａ）の縦断面図である。The shutter 3 is composed of two blocks of the same configuration arranged corresponding to the branch hoods 2 and 2 'so that the flow rate of the metal vapor 24 flowing into the branch hoods 2 and 2' can be controlled independently. It is configured in. 4 and 5 show the shutter 3.
FIG. 4 is a diagram showing one block extracted and enlarged.
4A is a partially cutaway front view, FIG. 4B is a front view showing the shutter shaft extracted, and FIG.
It is a longitudinal section of (a).
【００２１】これらの図に示すように、シャッタブロッ
ク３ａには入口開口部３ｂ、出口開口部３ｃ及びこれら
入口開口部３ｂと出口開口部３ｃとを連通する複数個
（図では５個）の連通路３ｄ1 ，３ｄ2 ，３ｄ3 ，３ｄ
4 ，３ｄ5 が設けてある。連通路３ｄ1 〜３ｄ5 の途中
には各連通路３ｄ1 〜３ｄ5 の位置に対応する孔３
ｆ1，３ｆ2 ，３ｆ3 ，３ｆ4 ，３ｆ5 を有する円柱状
のシャッタシャフト３ｅが挿入してある。ここで、シャ
ッタシャフト３ｅはその径を１２０ｍｍとする一方、径
が５０ｍｍ，７０ｍｍ，８０ｍｍ，６０ｍｍ，５０ｍｍ
の孔３ｆ1 〜３ｆ5 を開口完了時が同時になるように穿
孔した。すなわち、７０ｍｍの孔３ｆ2 は５ｍｍ、６０
ｍｍの孔３ｆ4 は１０ｍｍ、５０ｍｍの孔３ｆ1 ，３ｆ
5 は１５ｍｍ、それぞれ同じ側に偏心させてある。As shown in these figures, the shutter block 3a has an inlet opening 3b, an outlet opening 3c, and a plurality (five in the figure) of communication between the inlet opening 3b and the outlet opening 3c. passage 3d 1, 3d 2, 3d 3 , 3d
4 , 3d 5 are provided. Hole in the middle of the communication path 3d 1-3d 5 corresponds to the position of each communication path 3d 1 ~3d 5 3
f 1, 3f 2, 3f 3 , 3f 4, a cylindrical shutter shaft 3e having 3f 5 is has been inserted. Here, the shutter shaft 3e has a diameter of 120 mm, and a diameter of 50 mm, 70 mm, 80 mm, 60 mm, and 50 mm.
The hole 3f 1 ~3f 5 during opening completion drilled so simultaneously. That is, hole 3f 2 of 70mm is 5 mm, 60
mm hole 3f 4 is 10 mm, 50 mm holes 3f 1, 3f
5 are 15 mm, each eccentric on the same side.
【００２２】かかるシャッタシャフト３ｅはその軸回り
に回動可能に形成してあり、その回動量に対応して孔３
ｆ1 〜３ｆ5 により通路３ｄ1 〜３ｄ5 の開口面積を連
続的に変化させて当該シャッタ３を通過する金属蒸気２
４の量を制御している。特にこのとき、シャッタシャフ
ト３ｅに穿孔される孔３ｆ1 〜３ｆ5 はシャッタブロッ
ク３ａの連通路３ｄ1 〜３ｄ5 と時間をずらして交叉す
るように穿孔し、蒸着速度の小さい微量蒸着時において
シャフト回転角に対する蒸気通過量を制御する開口量の
増加幅が小さくなるようにした。シャッタシャフト３ｅ
の回動角と開口面積の関係の一例を図６に示す。図６は
開口開始時の面積増加率は小さく、徐々に面積増加率が
大きくなる特性を表わしている。The shutter shaft 3e is formed so as to be rotatable around its axis.
f 1 ~3f 5 the opening area of the passage 3d 1-3d 5 is continuously changed by metal vapor 2 passing through the shutter 3
4 is controlled. In particular this time, the shaft during drilling, and a small trace deposition of the deposition rate as hole 3f 1 ~3f 5 to be drilled to the shutter shaft 3e is cross staggered communicating passage 3d 1-3d 5 and the time of the shutter unit 3a The amount of increase in the amount of opening for controlling the amount of vapor passage with respect to the rotation angle was reduced. Shutter shaft 3e
FIG. 6 shows an example of the relationship between the rotation angle and the opening area. FIG. 6 shows a characteristic in which the area increase rate at the start of opening is small and the area increase rate gradually increases.
【００２３】なお、上記シャッタ３の各部の寸法は勿論
開示したものに限定されるものではない。また、孔３ｆ
1 〜３ｆ5 の形状も円形に限る必要はない。三角形，楕
円等であっても良い。但し、加工性は円形が最も良好で
ある。The dimensions of each part of the shutter 3 are of course not limited to those disclosed. In addition, hole 3f
The shape of the 1 ~3f 5 is also not necessarily limited to circular. It may be a triangle, an ellipse, or the like. However, the workability is most preferably a circle.
【００２４】上述の如き真空蒸着装置を用いる帯鋼１０
への金属蒸気の蒸着の際には、真空ポンプ３０，３１，
３２にて、真空チャンバ１５内を１〜１０-4Torrとす
る。これに伴ない蒸発室４も蒸着フード１，１′、分流
フード２，２′、シャッタ３、ベローズ５を通じて真空
となる。蒸着用の溶融金属７は誘導加熱コイル８により
加熱されると共に温度調節されて、金属蒸気２４とな
る。The steel strip 10 using the vacuum evaporation apparatus as described above
Vacuum pumps 30, 31, and
At 32, the inside of the vacuum chamber 15 is made 1 to 10 -4 Torr. Along with this, the evaporation chamber 4 is also evacuated through the evaporation hoods 1 and 1 ′, the branch hoods 2 and 2 ′, the shutter 3 and the bellows 5. The molten metal 7 for vapor deposition is heated by the induction heating coil 8 and temperature-adjusted to become the metal vapor 24.
【００２５】金属蒸気２４の流量は蒸着フード１，１′
の金属蒸気圧と溶融金属と７の温度及びシャッタ３の開
度、流路のコンダクタンス等によって決まる。The flow rate of the metal vapor 24 depends on the deposition hood 1, 1 '.
And the temperature of the molten metal 7, the opening of the shutter 3, the conductance of the flow path, and the like.
【００２６】本形態では、分流フード２，２′を設けて
金属蒸気２４の通路をシャッタ３から蒸着フード１，
１′へ向って２分割して設けると共に、シャッタ３に対
して、シャッタシャフト３ｅを２本設け、各々独立して
制御するようにしているので、帯鋼１０の両面蒸着、片
面蒸着及び差厚蒸着が１回の帯鋼１０の通板で可能とな
る。In this embodiment, the branch hoods 2 and 2 'are provided to allow the passage of the metal vapor 24 from the shutter 3 to the vapor deposition hood 1 and 2'.
1 ', and two shutter shafts 3e are provided for the shutter 3 so that they can be controlled independently of each other. The vapor deposition can be performed with a single pass of the steel strip 10.
【００２７】このとき、分流フード２，２′と帯鋼１０
の蒸着面２２との間に整流用の１枚ないし複数枚の多孔
板１ａ，１ａ′を設けているので迂回して進入してきた
金属蒸気２４は整流され帯鋼１０の表面に均一に蒸着さ
れる。At this time, the branch hoods 2 and 2 'and the strip 10
Since one or a plurality of rectifying perforated plates 1a and 1a 'are provided between the metal plate 24 and the vapor deposition surface 22, the metal vapor 24 that has entered by-passing is rectified and uniformly deposited on the surface of the steel strip 10. You.
【００２８】このとき、シャッタ３の開度を適宜独立に
制御することにより帯鋼１０の蒸着面１０ａ，１０ｂに
形成する蒸着膜の膜厚を任意に選定し得る。At this time, the thickness of the vapor deposition film formed on the vapor deposition surfaces 10a and 10b of the steel strip 10 can be arbitrarily selected by appropriately and independently controlling the opening of the shutter 3.
【００２９】ちなみに、真空チャンバ１５を１０-2Torr
に保ち、溶融金属Ｚｎを５００℃として５００ｍｍ幅×
０．２ｍｍ厚の帯鋼１０を１５０℃に予熱してライン速
度５０ｍ／min で蒸着したところ、３μｍ厚のＺｎ蒸着
を両面に形成できた。また、シャッタ３の片方の開口面
積を零とすることで、片面蒸着が実現できた。さらに、
シャッタ３の一方の開度を２０度、他方の開度を１５度
とすることにより、蒸着めっき層の厚さ比が１：２のめ
っき層を得ることができた。Incidentally, the vacuum chamber 15 is set at 10 -2 Torr.
And the molten metal Zn at 500 ° C. and a width of 500 mm ×
When a 0.2 mm thick steel strip 10 was preheated to 150 ° C. and deposited at a line speed of 50 m / min, a 3 μm thick Zn deposited on both sides. In addition, by setting one of the opening areas of the shutter 3 to zero, one-sided vapor deposition could be realized. further,
By setting one opening of the shutter 3 to 20 degrees and the other opening to 15 degrees, a plating layer having a thickness ratio of the evaporated plating layer of 1: 2 could be obtained.
【００３０】[0030]
【発明の効果】以上実施の形態とともに具体的に説明し
たように、本発明によれば、帯鋼の両面蒸着、片面蒸着
および差厚蒸着が可能となった。また、開口面積の大き
さと微量蒸着時期において細かく制御できるようにな
り、蒸着量のバラツキが小さくなった。As described above in detail with the embodiments, according to the present invention, double-sided deposition, single-sided deposition, and differential-thickness deposition of a strip can be performed. In addition, it became possible to finely control the size of the opening area and the minute vapor deposition time, and the variation in the vapor deposition amount was reduced.
【図１】本発明の実施の形態に係る真空蒸着装置を示す
側面図。FIG. 1 is a side view showing a vacuum evaporation apparatus according to an embodiment of the present invention.
【図２】上記真空蒸着装置の平面図。FIG. 2 is a plan view of the vacuum evaporation apparatus.
【図３】上記真空蒸着装置の正面図。FIG. 3 is a front view of the vacuum evaporation apparatus.
【図４】シャッタの一方のブロックを抽出・拡大して示
す図であり、（ａ）は一部破断して示す正面図、（ｂ）
はシャッタシャフトを抽出して示す正面図。FIGS. 4A and 4B are views showing one block of a shutter extracted and enlarged, wherein FIG. 4A is a partially cutaway front view, and FIG.
FIG. 3 is a front view showing a shutter shaft extracted.
【図５】図４（ａ）の縦断面図。FIG. 5 is a longitudinal sectional view of FIG.
【図６】シャッタの特性（開度に対する流量）を示すグ
ラフ。FIG. 6 is a graph showing shutter characteristics (flow rate with respect to opening).
【図７】従来技術に係る真空蒸着装置を概念的に示す説
明図。FIG. 7 is an explanatory view conceptually showing a vacuum deposition apparatus according to a conventional technique.
１，１′ 蒸着フード １ａ，１′ａ 多孔板 １ｂ，１′ｂ 開口部 ２，２′ 分流フード ３ シャッタ ３ａ シャッタブロック ３ｄ1 〜３ｄ5 連通路 ３ｅ シャッタシャフト ３ｆ1 〜３ｆ5 孔 ６ 溶融ルツボ ７ 溶融金属 ８ 誘導加熱コイル １０ 帯鋼 １５ 真空チャンバ ２４ 金属蒸気1,1 'deposition hood 1a, 1'a perforated plate 1b, 1'b openings 2,2' shunt hood 3 shutter 3a shutter unit 3d 1-3d 5 communicating passage 3e shutter shaft 3f 1 ~3f 5 hole 6 melting crucible 7 molten metal 8 induction heating coil 10 steel strip 15 vacuum chamber 24 metal vapor
───────────────────────────────────────────────────── フロントページの続き (72)発明者 橋本 律男 広島県広島市西区観音新町四丁目６番22号 三菱重工業株式会社広島研究所内 (72)発明者 島川 司 広島県広島市西区観音新町四丁目６番22号 三菱重工業株式会社広島製作所内 (72)発明者 斎藤 実 大阪府堺市石津西町５番地 日新製鋼株式 会社技術研究所表面処理研究部内 (72)発明者 福居 康 大阪府堺市石津西町５番地 日新製鋼株式 会社技術研究所表面処理研究部内 (72)発明者 坂本 和志 大阪府堺市石津西町５番地 日新製鋼株式 会社技術研究所表面処理研究部内 (72)発明者 森山 義輝 大阪府堺市石津西町５番地 日新製鋼株式 会社堺製造所内 (72)発明者 愛甲 ▲琢▼哉 大阪府堺市石津西町５番地 日新製鋼株式 会社堺製造所内 (72)発明者 竹崎 勝之 大阪府堺市石津西町５番地 日新製鋼株式 会社堺製造所内 (72)発明者 樋口 威彦 大阪府堺市石津西町５番地 日新製鋼株式 会社堺製造所内 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Ritsuo Hashimoto 4-22, Kannonshinmachi, Nishi-ku, Hiroshima City, Hiroshima Prefecture Inside the Hiroshima Research Laboratory, Mitsubishi Heavy Industries, Ltd. (72) Inventor Tsukasa Shimakawa 4-chome, Kannonshinmachi, Nishi-ku, Hiroshima City, Hiroshima Prefecture No. 6-22 Inside the Mitsubishi Heavy Industries, Ltd.Hiroshima Plant (72) Inventor Minoru Saito 5 Ishizu Nishimachi, Sakai City, Osaka Prefecture Nisshin Steel Co., Ltd.Surface Treatment Research Laboratory (72) Inventor Yasushi Fukui Ishizu, Sakai City, Osaka Prefecture 5 Nishimachi Nisshin Steel Co., Ltd.Technical Research Laboratory Surface Treatment Research Dept. (72) Inventor Kazushi Sakamoto 5th Ishizu Nishimachi Sakai City, Osaka Prefecture Nisshin Steel Co., Ltd.Technical Research Laboratory Surface Treatment Research Dept. (72) Inventor Yoshiteru Moriyama Osaka 5 Ishizunishi-cho, Sakai City, Nisshin Steel Co., Ltd. (72) Inventor Aiko ▲ Taku ▼ ya Ishizunishi, Sakai-shi, Osaka No. 5 Inside Nisshin Steel Co., Ltd. Sakai Works (72) Inventor Katsuyuki Takezaki No. 5 Ishizu Nishicho, Sakai City, Osaka Prefecture Nisshin Steel Co., Ltd. Inside Sakai Works (72) Inventor Takehiko Higuchi 5 Ishizu Nishimachi, Sakai City, Osaka Nisshin Inside Sakai Works, Steelmaking Co., Ltd.
Claims (2)
溶融ルツボ内の溶融金属を加熱して生じた金属蒸気を、
二股に分岐する分流フード及びこれに連通して帯鋼の両
面にそれぞれ開口する開口部を有する蒸着フードを介し
て帯鋼の両面に蒸着させるとともに、蒸着フード内には
１個若しくは複数個の整流用の多孔板を設け、さらに各
分流フードに流入する金属蒸気の流量をそれぞれ独立に
制御し得るよう各分流フードの入口側開口部にシャッタ
を配設したことを特徴とする真空蒸着装置。1. A steel strip is passed through a vacuum chamber having a high degree of vacuum,
The metal vapor generated by heating the molten metal in the molten crucible,
Vapor deposition is performed on both sides of the steel strip through a bifurcated diverging hood and a vapor deposition hood communicating with the branch hood and having openings on both sides of the steel strip. A perforated plate, and a shutter disposed at an inlet-side opening of each branch hood so that the flow rate of metal vapor flowing into each branch hood can be independently controlled.
部、出口開口部及びこれら入口開口部、出口開口部を連
通する複数の連通路をシャッタブロック内に形成する一
方、連通路の途中に各連通路と対応する孔を有するシャ
ッタシャフトをこの軸回りに回動可能に挿入し、さらに
このシャッタシャフトの回動量を制御することにより各
孔と連通路との交叉による重なり面積を制御して金属蒸
気の流量を調整するとともに、このときの孔と連通路と
の交叉開始時期が各孔相互間で異なるように構成した同
構成の二つのブロックを有するものであることを特徴と
する真空蒸着装置。2. The shutter according to claim 1, wherein the shutter block includes an inlet opening, an outlet opening, and a plurality of communication paths communicating with the inlet opening and the outlet opening. A shutter shaft having a hole corresponding to each communication path is inserted rotatably around this axis, and by controlling the amount of rotation of the shutter shaft, the overlapping area due to the intersection of each hole and the communication path is controlled. Characterized in that it has two blocks of the same configuration that are configured such that the flow start time of the metal vapor is adjusted and the crossing start time between the hole and the communication path at this time is different between the holes. Evaporation equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31443096A JP3901773B2 (en) | 1996-11-26 | 1996-11-26 | Vacuum deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31443096A JP3901773B2 (en) | 1996-11-26 | 1996-11-26 | Vacuum deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10152777A true JPH10152777A (en) | 1998-06-09 |
| JP3901773B2 JP3901773B2 (en) | 2007-04-04 |
Family
ID=18053267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31443096A Expired - Fee Related JP3901773B2 (en) | 1996-11-26 | 1996-11-26 | Vacuum deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3901773B2 (en) |
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| KR100669062B1 (en) * | 2004-01-29 | 2007-01-15 | 미쯔비시 히다찌 세이떼쯔 기까이 가부시끼가이샤 | Vacuum evaporator |
| CN100363532C (en) * | 2004-01-29 | 2008-01-23 | 三菱日立制铁机械株式会社 | Vacuum evaporation plating machine |
| WO2009083546A1 (en) * | 2007-12-21 | 2009-07-09 | Industrial Plasma Services & Technologies - Ipst Gmbh | Method and devices for controlling a vapour flow in vacuum evaporation |
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| CN100363532C (en) * | 2004-01-29 | 2008-01-23 | 三菱日立制铁机械株式会社 | Vacuum evaporation plating machine |
| KR100669062B1 (en) * | 2004-01-29 | 2007-01-15 | 미쯔비시 히다찌 세이떼쯔 기까이 가부시끼가이샤 | Vacuum evaporator |
| AU2008342644B2 (en) * | 2007-12-21 | 2014-06-12 | Neovac Gmbh | Method and devices for controlling a vapour flow in vacuum evaporation |
| WO2009083546A1 (en) * | 2007-12-21 | 2009-07-09 | Industrial Plasma Services & Technologies - Ipst Gmbh | Method and devices for controlling a vapour flow in vacuum evaporation |
| BE1017912A3 (en) * | 2007-12-21 | 2009-11-03 | Ind Plasma Services & Technolo | Device for coating substrates that move in rolling direction, comprises a confinement enclosure in which vapor source of a coating material is present, an adjustment unit comprising sealing elements, and a plasma creating unit |
| JP2011506776A (en) * | 2007-12-21 | 2011-03-03 | インダストリアル プラズマ サービシーズ アンド テクノロジーズ − イーペーエステー ゲーエムベーハー | Method and apparatus for controlling vapor flow in a vacuum evaporation method |
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