JPH10135547A - Optical amplifier - Google Patents
Optical amplifierInfo
- Publication number
- JPH10135547A JPH10135547A JP28940596A JP28940596A JPH10135547A JP H10135547 A JPH10135547 A JP H10135547A JP 28940596 A JP28940596 A JP 28940596A JP 28940596 A JP28940596 A JP 28940596A JP H10135547 A JPH10135547 A JP H10135547A
- Authority
- JP
- Japan
- Prior art keywords
- bis
- light
- dianhydride
- signal light
- optical amplifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 54
- 239000011347 resin Substances 0.000 claims abstract description 16
- 229920005989 resin Polymers 0.000 claims abstract description 16
- 229920001721 polyimide Polymers 0.000 claims abstract description 13
- 230000009477 glass transition Effects 0.000 claims abstract description 11
- 239000010409 thin film Substances 0.000 claims abstract description 6
- 230000001902 propagating effect Effects 0.000 claims abstract 2
- 239000009719 polyimide resin Substances 0.000 claims description 3
- 239000011342 resin composition Substances 0.000 claims description 2
- 230000005281 excited state Effects 0.000 claims 1
- 239000004642 Polyimide Substances 0.000 abstract description 9
- 239000000463 material Substances 0.000 abstract description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 9
- 239000010453 quartz Substances 0.000 abstract description 7
- 239000000758 substrate Substances 0.000 abstract description 7
- VBEGHXKAFSLLGE-UHFFFAOYSA-N n-phenylnitramide Chemical compound [O-][N+](=O)NC1=CC=CC=C1 VBEGHXKAFSLLGE-UHFFFAOYSA-N 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000004040 coloring Methods 0.000 abstract 2
- 230000000644 propagated effect Effects 0.000 abstract 1
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 25
- 229940124530 sulfonamide Drugs 0.000 description 17
- -1 polysiloxane Polymers 0.000 description 14
- 239000000975 dye Substances 0.000 description 13
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 8
- 150000004985 diamines Chemical class 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- 230000003321 amplification Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000003199 nucleic acid amplification method Methods 0.000 description 6
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 5
- 229910052731 fluorine Inorganic materials 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- 239000002243 precursor Substances 0.000 description 5
- KZTYYGOKRVBIMI-UHFFFAOYSA-N diphenyl sulfone Chemical compound C=1C=CC=CC=1S(=O)(=O)C1=CC=CC=C1 KZTYYGOKRVBIMI-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- VLDPXPPHXDGHEW-UHFFFAOYSA-N 1-chloro-2-dichlorophosphoryloxybenzene Chemical compound ClC1=CC=CC=C1OP(Cl)(Cl)=O VLDPXPPHXDGHEW-UHFFFAOYSA-N 0.000 description 3
- 239000004962 Polyamide-imide Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 3
- 229920002312 polyamide-imide Polymers 0.000 description 3
- 239000004926 polymethyl methacrylate Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- PYWVYCXTNDRMGF-UHFFFAOYSA-N rhodamine B Chemical compound [Cl-].C=12C=CC(=[N+](CC)CC)C=C2OC2=CC(N(CC)CC)=CC=C2C=1C1=CC=CC=C1C(O)=O PYWVYCXTNDRMGF-UHFFFAOYSA-N 0.000 description 3
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- 239000004697 Polyetherimide Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 2
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 2
- 229920001601 polyetherimide Polymers 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 239000002966 varnish Substances 0.000 description 2
- OFXSBTTVJAFNSJ-UHFFFAOYSA-N 1,1,2,2,3,3,4,4,5,5,6,6,7,7-tetradecafluoro-n,n'-diphenylheptane-1,7-diamine Chemical compound C=1C=CC=CC=1NC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)NC1=CC=CC=C1 OFXSBTTVJAFNSJ-UHFFFAOYSA-N 0.000 description 1
- VITYLMJSEZETGU-UHFFFAOYSA-N 1,1,2,2,3,3,4,4,5,5-decafluoro-n,n'-diphenylpentane-1,5-diamine Chemical compound C=1C=CC=CC=1NC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)NC1=CC=CC=C1 VITYLMJSEZETGU-UHFFFAOYSA-N 0.000 description 1
- JLTHXLWCVUJTFW-UHFFFAOYSA-N 1,1,2,2,3,3,4,4-octafluoro-n,n'-diphenylbutane-1,4-diamine Chemical compound C=1C=CC=CC=1NC(F)(F)C(F)(F)C(F)(F)C(F)(F)NC1=CC=CC=C1 JLTHXLWCVUJTFW-UHFFFAOYSA-N 0.000 description 1
- UMMYYBOQOTWQTD-UHFFFAOYSA-N 1,1,2,2,3,3-hexafluoro-n,n'-diphenylpropane-1,3-diamine Chemical compound C=1C=CC=CC=1NC(F)(F)C(F)(F)C(F)(F)NC1=CC=CC=C1 UMMYYBOQOTWQTD-UHFFFAOYSA-N 0.000 description 1
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical compound NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 description 1
- ZLCUIOWQYBYEBG-UHFFFAOYSA-N 1-Amino-2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=C(N)C(C)=CC=C3C(=O)C2=C1 ZLCUIOWQYBYEBG-UHFFFAOYSA-N 0.000 description 1
- HFXFYWMYAYUJAA-UHFFFAOYSA-N 2,5-diaminobenzenesulfonamide Chemical compound NC1=CC=C(N)C(S(N)(=O)=O)=C1 HFXFYWMYAYUJAA-UHFFFAOYSA-N 0.000 description 1
- LWKVCPHDFUTUGP-UHFFFAOYSA-N 2-(1,1,2,2,3,3,4,4,4-nonafluorobutyl)benzene-1,4-diamine Chemical compound NC1=CC=C(N)C(C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)=C1 LWKVCPHDFUTUGP-UHFFFAOYSA-N 0.000 description 1
- POEYBOBCTDQWLL-UHFFFAOYSA-N 2-(1,1,2,2,3,3,4,4,5,5,6,6,6-tridecafluorohexyl)benzene-1,4-diamine Chemical compound NC1=CC=C(N)C(C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)=C1 POEYBOBCTDQWLL-UHFFFAOYSA-N 0.000 description 1
- IWQGZRJJOFKYPW-UHFFFAOYSA-N 2-(2-phenylphenoxy)-N-(trifluoromethyl)aniline Chemical group FC(F)(F)Nc1ccccc1Oc1ccccc1-c1ccccc1 IWQGZRJJOFKYPW-UHFFFAOYSA-N 0.000 description 1
- IOHPPIBXAKZWGA-UHFFFAOYSA-N 2-[2-(2-aminophenoxy)-3,4,5,6-tetrakis(trifluoromethyl)phenoxy]aniline Chemical compound NC1=CC=CC=C1OC(C(=C(C(=C1C(F)(F)F)C(F)(F)F)C(F)(F)F)C(F)(F)F)=C1OC1=CC=CC=C1N IOHPPIBXAKZWGA-UHFFFAOYSA-N 0.000 description 1
- KDGNBLYSSKCVAN-UHFFFAOYSA-N 2-[2-(2-aminophenoxy)-3,4-bis(trifluoromethyl)phenoxy]aniline Chemical compound NC1=CC=CC=C1OC1=CC=C(C(F)(F)F)C(C(F)(F)F)=C1OC1=CC=CC=C1N KDGNBLYSSKCVAN-UHFFFAOYSA-N 0.000 description 1
- YUZSJKBFHATJHV-UHFFFAOYSA-N 2-[4-[2-[4-(2-aminophenoxy)phenyl]-1,1,1,3,3,3-hexafluoropropan-2-yl]phenoxy]aniline Chemical compound NC1=CC=CC=C1OC1=CC=C(C(C=2C=CC(OC=3C(=CC=CC=3)N)=CC=2)(C(F)(F)F)C(F)(F)F)C=C1 YUZSJKBFHATJHV-UHFFFAOYSA-N 0.000 description 1
- JRBJSXQPQWSCCF-UHFFFAOYSA-N 3,3'-Dimethoxybenzidine Chemical group C1=C(N)C(OC)=CC(C=2C=C(OC)C(N)=CC=2)=C1 JRBJSXQPQWSCCF-UHFFFAOYSA-N 0.000 description 1
- NUIURNJTPRWVAP-UHFFFAOYSA-N 3,3'-Dimethylbenzidine Chemical group C1=C(N)C(C)=CC(C=2C=C(C)C(N)=CC=2)=C1 NUIURNJTPRWVAP-UHFFFAOYSA-N 0.000 description 1
- PWTKZYBDXDXRMR-UHFFFAOYSA-N 3,4,5,6-tetrakis(trifluoromethyl)benzene-1,2-diamine Chemical compound NC1=C(N)C(C(F)(F)F)=C(C(F)(F)F)C(C(F)(F)F)=C1C(F)(F)F PWTKZYBDXDXRMR-UHFFFAOYSA-N 0.000 description 1
- WRTHJTIPFDXAGH-UHFFFAOYSA-N 3-(1,1,2,2,2-pentafluoroethyl)benzene-1,2-diamine Chemical compound NC1=CC=CC(C(F)(F)C(F)(F)F)=C1N WRTHJTIPFDXAGH-UHFFFAOYSA-N 0.000 description 1
- ZBMISJGHVWNWTE-UHFFFAOYSA-N 3-(4-aminophenoxy)aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(N)=C1 ZBMISJGHVWNWTE-UHFFFAOYSA-N 0.000 description 1
- SHZHLGBQLITWOB-UHFFFAOYSA-N 3-(trifluoromethyl)-6-[2-(trifluoromethyl)phenoxy]phthalic acid Chemical compound C1=CC(C(F)(F)F)=C(C(O)=O)C(C(=O)O)=C1OC1=CC=CC=C1C(F)(F)F SHZHLGBQLITWOB-UHFFFAOYSA-N 0.000 description 1
- JAUWPCNIJHYPGO-UHFFFAOYSA-N 3-[2-(2,3-dicarboxyphenoxy)-3,4,5,6-tetrakis(trifluoromethyl)phenoxy]phthalic acid Chemical compound OC(=O)C1=CC=CC(OC=2C(=C(C(=C(C=2OC=2C(=C(C(O)=O)C=CC=2)C(O)=O)C(F)(F)F)C(F)(F)F)C(F)(F)F)C(F)(F)F)=C1C(O)=O JAUWPCNIJHYPGO-UHFFFAOYSA-N 0.000 description 1
- GIDZGEJVGCDPLV-UHFFFAOYSA-N 3-[2-(2,3-dicarboxyphenoxy)-3,4-bis(trifluoromethyl)phenoxy]phthalic acid Chemical compound OC(=O)C1=CC=CC(OC=2C(=C(C(=CC=2)C(F)(F)F)C(F)(F)F)OC=2C(=C(C(O)=O)C=CC=2)C(O)=O)=C1C(O)=O GIDZGEJVGCDPLV-UHFFFAOYSA-N 0.000 description 1
- QBQWCUVAROAAQA-UHFFFAOYSA-N 3-[2-(2,3-dicarboxyphenoxy)-3-(trifluoromethyl)phenoxy]phthalic acid Chemical compound OC(=O)C1=CC=CC(OC=2C(=C(C=CC=2)C(F)(F)F)OC=2C(=C(C(O)=O)C=CC=2)C(O)=O)=C1C(O)=O QBQWCUVAROAAQA-UHFFFAOYSA-N 0.000 description 1
- MFTFTIALAXXIMU-UHFFFAOYSA-N 3-[4-[2-[4-(3-aminophenoxy)phenyl]-1,1,1,3,3,3-hexafluoropropan-2-yl]phenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=CC(=CC=2)C(C=2C=CC(OC=3C=C(N)C=CC=3)=CC=2)(C(F)(F)F)C(F)(F)F)=C1 MFTFTIALAXXIMU-UHFFFAOYSA-N 0.000 description 1
- QWMSLLWUPKDBDV-UHFFFAOYSA-N 3-[[(3,4-dicarboxyphenyl)-dimethylsilyl]oxy-dimethylsilyl]phthalic acid Chemical compound C=1C=C(C(O)=O)C(C(O)=O)=CC=1[Si](C)(C)O[Si](C)(C)C1=CC=CC(C(O)=O)=C1C(O)=O QWMSLLWUPKDBDV-UHFFFAOYSA-N 0.000 description 1
- ICNFHJVPAJKPHW-UHFFFAOYSA-N 4,4'-Thiodianiline Chemical compound C1=CC(N)=CC=C1SC1=CC=C(N)C=C1 ICNFHJVPAJKPHW-UHFFFAOYSA-N 0.000 description 1
- YBRVSVVVWCFQMG-UHFFFAOYSA-N 4,4'-diaminodiphenylmethane Chemical compound C1=CC(N)=CC=C1CC1=CC=C(N)C=C1 YBRVSVVVWCFQMG-UHFFFAOYSA-N 0.000 description 1
- QHZDSYDKTZORNZ-UHFFFAOYSA-N 4-(2,3,5,6-tetrafluorophenoxy)benzene-1,3-diamine Chemical compound NC1=CC(N)=CC=C1OC1=C(F)C(F)=CC(F)=C1F QHZDSYDKTZORNZ-UHFFFAOYSA-N 0.000 description 1
- FWOLORXQTIGHFX-UHFFFAOYSA-N 4-(4-amino-2,3,5,6-tetrafluorophenyl)-2,3,5,6-tetrafluoroaniline Chemical compound FC1=C(F)C(N)=C(F)C(F)=C1C1=C(F)C(F)=C(N)C(F)=C1F FWOLORXQTIGHFX-UHFFFAOYSA-N 0.000 description 1
- QQWWWAQUMVHHQN-UHFFFAOYSA-N 4-(4-amino-4-phenylcyclohexa-1,5-dien-1-yl)aniline Chemical group C1=CC(N)=CC=C1C1=CCC(N)(C=2C=CC=CC=2)C=C1 QQWWWAQUMVHHQN-UHFFFAOYSA-N 0.000 description 1
- OSOMJBMUSWZQME-UHFFFAOYSA-N 4-(4-fluorophenoxy)benzene-1,3-diamine Chemical compound NC1=CC(N)=CC=C1OC1=CC=C(F)C=C1 OSOMJBMUSWZQME-UHFFFAOYSA-N 0.000 description 1
- APXJLYIVOFARRM-UHFFFAOYSA-N 4-[2-(3,4-dicarboxyphenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C(C(F)(F)F)(C(F)(F)F)C1=CC=C(C(O)=O)C(C(O)=O)=C1 APXJLYIVOFARRM-UHFFFAOYSA-N 0.000 description 1
- BEKFRNOZJSYWKZ-UHFFFAOYSA-N 4-[2-(4-aminophenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]aniline Chemical compound C1=CC(N)=CC=C1C(C(F)(F)F)(C(F)(F)F)C1=CC=C(N)C=C1 BEKFRNOZJSYWKZ-UHFFFAOYSA-N 0.000 description 1
- AEMXURHNQSDPCG-UHFFFAOYSA-N 4-[2-[2-(4-aminophenoxy)phenyl]sulfanylphenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC=C1SC1=CC=CC=C1OC1=CC=C(N)C=C1 AEMXURHNQSDPCG-UHFFFAOYSA-N 0.000 description 1
- AJYDKROUZBIMLE-UHFFFAOYSA-N 4-[2-[2-[2-(4-aminophenoxy)phenyl]propan-2-yl]phenoxy]aniline Chemical compound C=1C=CC=C(OC=2C=CC(N)=CC=2)C=1C(C)(C)C1=CC=CC=C1OC1=CC=C(N)C=C1 AJYDKROUZBIMLE-UHFFFAOYSA-N 0.000 description 1
- WUPRYUDHUFLKFL-UHFFFAOYSA-N 4-[3-(4-aminophenoxy)phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(OC=2C=CC(N)=CC=2)=C1 WUPRYUDHUFLKFL-UHFFFAOYSA-N 0.000 description 1
- SSDBTLHMCVFQMS-UHFFFAOYSA-N 4-[4-(1,1,1,3,3,3-hexafluoropropan-2-yl)phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=C(C(C(F)(F)F)C(F)(F)F)C=C1 SSDBTLHMCVFQMS-UHFFFAOYSA-N 0.000 description 1
- JCRRFJIVUPSNTA-UHFFFAOYSA-N 4-[4-(4-aminophenoxy)phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC(C=C1)=CC=C1OC1=CC=C(N)C=C1 JCRRFJIVUPSNTA-UHFFFAOYSA-N 0.000 description 1
- QBSMHWVGUPQNJJ-UHFFFAOYSA-N 4-[4-(4-aminophenyl)phenyl]aniline Chemical compound C1=CC(N)=CC=C1C1=CC=C(C=2C=CC(N)=CC=2)C=C1 QBSMHWVGUPQNJJ-UHFFFAOYSA-N 0.000 description 1
- HBLYIUPUXAWDMA-UHFFFAOYSA-N 4-[4-[2-[4-(4-aminophenoxy)-3,5-bis(trifluoromethyl)phenyl]-1,1,1,3,3,3-hexafluoropropan-2-yl]-2,6-bis(trifluoromethyl)phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=C(C(F)(F)F)C=C(C(C=2C=C(C(OC=3C=CC(N)=CC=3)=C(C=2)C(F)(F)F)C(F)(F)F)(C(F)(F)F)C(F)(F)F)C=C1C(F)(F)F HBLYIUPUXAWDMA-UHFFFAOYSA-N 0.000 description 1
- VCFYKCXKADGLPS-UHFFFAOYSA-N 4-[4-[2-[4-(4-aminophenoxy)-3,5-dimethylphenyl]-1,1,1,3,3,3-hexafluoropropan-2-yl]-2,6-dimethylphenoxy]aniline Chemical compound CC1=CC(C(C=2C=C(C)C(OC=3C=CC(N)=CC=3)=C(C)C=2)(C(F)(F)F)C(F)(F)F)=CC(C)=C1OC1=CC=C(N)C=C1 VCFYKCXKADGLPS-UHFFFAOYSA-N 0.000 description 1
- HHLMWQDRYZAENA-UHFFFAOYSA-N 4-[4-[2-[4-(4-aminophenoxy)phenyl]-1,1,1,3,3,3-hexafluoropropan-2-yl]phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=C(C(C=2C=CC(OC=3C=CC(N)=CC=3)=CC=2)(C(F)(F)F)C(F)(F)F)C=C1 HHLMWQDRYZAENA-UHFFFAOYSA-N 0.000 description 1
- PDYQWKUIJVOAON-UHFFFAOYSA-N 4-[4-[2-[4-[4-amino-3-(trifluoromethyl)phenoxy]phenyl]-1,1,1,3,3,3-hexafluoropropan-2-yl]phenoxy]-2-(trifluoromethyl)aniline Chemical compound C1=C(C(F)(F)F)C(N)=CC=C1OC1=CC=C(C(C=2C=CC(OC=3C=C(C(N)=CC=3)C(F)(F)F)=CC=2)(C(F)(F)F)C(F)(F)F)C=C1 PDYQWKUIJVOAON-UHFFFAOYSA-N 0.000 description 1
- UTDAGHZGKXPRQI-UHFFFAOYSA-N 4-[4-[4-(4-aminophenoxy)phenyl]sulfonylphenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=C(S(=O)(=O)C=2C=CC(OC=3C=CC(N)=CC=3)=CC=2)C=C1 UTDAGHZGKXPRQI-UHFFFAOYSA-N 0.000 description 1
- IWFSADBGACLBMH-UHFFFAOYSA-N 4-[4-[4-[4-amino-2-(trifluoromethyl)phenoxy]phenyl]phenoxy]-3-(trifluoromethyl)aniline Chemical group FC(F)(F)C1=CC(N)=CC=C1OC1=CC=C(C=2C=CC(OC=3C(=CC(N)=CC=3)C(F)(F)F)=CC=2)C=C1 IWFSADBGACLBMH-UHFFFAOYSA-N 0.000 description 1
- DPCDFSDBIWVMJC-UHFFFAOYSA-N 4-[4-[4-[4-amino-3-(trifluoromethyl)phenoxy]phenyl]phenoxy]-2-(trifluoromethyl)aniline Chemical group C1=C(C(F)(F)F)C(N)=CC=C1OC1=CC=C(C=2C=CC(OC=3C=C(C(N)=CC=3)C(F)(F)F)=CC=2)C=C1 DPCDFSDBIWVMJC-UHFFFAOYSA-N 0.000 description 1
- LACZRKUWKHQVKS-UHFFFAOYSA-N 4-[4-[4-amino-2-(trifluoromethyl)phenoxy]phenoxy]-3-(trifluoromethyl)aniline Chemical compound FC(F)(F)C1=CC(N)=CC=C1OC(C=C1)=CC=C1OC1=CC=C(N)C=C1C(F)(F)F LACZRKUWKHQVKS-UHFFFAOYSA-N 0.000 description 1
- NKYXYJFTTIPZDE-UHFFFAOYSA-N 4-[4-amino-2-(trifluoromethyl)phenoxy]-3-(trifluoromethyl)aniline Chemical compound FC(F)(F)C1=CC(N)=CC=C1OC1=CC=C(N)C=C1C(F)(F)F NKYXYJFTTIPZDE-UHFFFAOYSA-N 0.000 description 1
- NVKGJHAQGWCWDI-UHFFFAOYSA-N 4-[4-amino-2-(trifluoromethyl)phenyl]-3-(trifluoromethyl)aniline Chemical group FC(F)(F)C1=CC(N)=CC=C1C1=CC=C(N)C=C1C(F)(F)F NVKGJHAQGWCWDI-UHFFFAOYSA-N 0.000 description 1
- PJWQLRKRVISYPL-UHFFFAOYSA-N 4-[4-amino-3-(trifluoromethyl)phenyl]-2-(trifluoromethyl)aniline Chemical group C1=C(C(F)(F)F)C(N)=CC=C1C1=CC=C(N)C(C(F)(F)F)=C1 PJWQLRKRVISYPL-UHFFFAOYSA-N 0.000 description 1
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 1
- ZHBXLZQQVCDGPA-UHFFFAOYSA-N 5-[(1,3-dioxo-2-benzofuran-5-yl)sulfonyl]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(S(=O)(=O)C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 ZHBXLZQQVCDGPA-UHFFFAOYSA-N 0.000 description 1
- DNQIDXZMLCPYPU-UHFFFAOYSA-N 5-[3,4-dicarboxy-5-(trifluoromethyl)benzoyl]-3-(trifluoromethyl)phthalic acid Chemical compound FC(F)(F)C1=C(C(O)=O)C(C(=O)O)=CC(C(=O)C=2C=C(C(C(O)=O)=C(C(O)=O)C=2)C(F)(F)F)=C1 DNQIDXZMLCPYPU-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- MQJKPEGWNLWLTK-UHFFFAOYSA-N Dapsone Chemical compound C1=CC(N)=CC=C1S(=O)(=O)C1=CC=C(N)C=C1 MQJKPEGWNLWLTK-UHFFFAOYSA-N 0.000 description 1
- ZEGLXFHIJNPVNE-UHFFFAOYSA-N FC(F)(F)NC1=C(C=CC=C1)NC(F)(F)F Chemical compound FC(F)(F)NC1=C(C=CC=C1)NC(F)(F)F ZEGLXFHIJNPVNE-UHFFFAOYSA-N 0.000 description 1
- HQHZDNOKSOTOHQ-UHFFFAOYSA-N FC(F)(F)NC1=C(OC2=C(C=CC=C2)C(C(F)(F)F)(C(F)(F)F)C2=C(C=CC=C2)OC2=C(C=CC=C2)NC(F)(F)F)C=CC=C1 Chemical compound FC(F)(F)NC1=C(OC2=C(C=CC=C2)C(C(F)(F)F)(C(F)(F)F)C2=C(C=CC=C2)OC2=C(C=CC=C2)NC(F)(F)F)C=CC=C1 HQHZDNOKSOTOHQ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- SCMCHJZTNSCCBN-UHFFFAOYSA-N NC1=CC=C(OC2=C(C=CC=C2)C2=CC=C(C=C2)C2=CC=C(C=C2)C2=C(C=CC=C2)OC2=CC=C(C=C2)N)C=C1 Chemical group NC1=CC=C(OC2=C(C=CC=C2)C2=CC=C(C=C2)C2=CC=C(C=C2)C2=C(C=CC=C2)OC2=CC=C(C=C2)N)C=C1 SCMCHJZTNSCCBN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- HFACYLZERDEVSX-UHFFFAOYSA-N benzidine Chemical group C1=CC(N)=CC=C1C1=CC=C(N)C=C1 HFACYLZERDEVSX-UHFFFAOYSA-N 0.000 description 1
- DGZXRBRWCYWFCI-UHFFFAOYSA-N bis[4-amino-3-(trifluoromethyl)phenyl]methanone Chemical compound C1=C(C(F)(F)F)C(N)=CC=C1C(=O)C1=CC=C(N)C(C(F)(F)F)=C1 DGZXRBRWCYWFCI-UHFFFAOYSA-N 0.000 description 1
- WKDNYTOXBCRNPV-UHFFFAOYSA-N bpda Chemical compound C1=C2C(=O)OC(=O)C2=CC(C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 WKDNYTOXBCRNPV-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Natural products C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 1
- TUXJTJITXCHUEL-UHFFFAOYSA-N disperse red 11 Chemical compound C1=CC=C2C(=O)C3=C(N)C(OC)=CC(N)=C3C(=O)C2=C1 TUXJTJITXCHUEL-UHFFFAOYSA-N 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- GNBHRKFJIUUOQI-UHFFFAOYSA-N fluorescein Chemical compound O1C(=O)C2=CC=CC=C2C21C1=CC=C(O)C=C1OC1=CC(O)=CC=C21 GNBHRKFJIUUOQI-UHFFFAOYSA-N 0.000 description 1
- 239000005383 fluoride glass Substances 0.000 description 1
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 125000006343 heptafluoro propyl group Chemical group 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- KQSABULTKYLFEV-UHFFFAOYSA-N naphthalene-1,5-diamine Chemical compound C1=CC=C2C(N)=CC=CC2=C1N KQSABULTKYLFEV-UHFFFAOYSA-N 0.000 description 1
- DOBFTMLCEYUAQC-UHFFFAOYSA-N naphthalene-2,3,6,7-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C=C2C=C(C(O)=O)C(C(=O)O)=CC2=C1 DOBFTMLCEYUAQC-UHFFFAOYSA-N 0.000 description 1
- GOGZBMRXLADNEV-UHFFFAOYSA-N naphthalene-2,6-diamine Chemical compound C1=C(N)C=CC2=CC(N)=CC=C21 GOGZBMRXLADNEV-UHFFFAOYSA-N 0.000 description 1
- YTVNOVQHSGMMOV-UHFFFAOYSA-N naphthalenetetracarboxylic dianhydride Chemical compound C1=CC(C(=O)OC2=O)=C3C2=CC=C2C(=O)OC(=O)C1=C32 YTVNOVQHSGMMOV-UHFFFAOYSA-N 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- CLYVDMAATCIVBF-UHFFFAOYSA-N pigment red 224 Chemical compound C=12C3=CC=C(C(OC4=O)=O)C2=C4C=CC=1C1=CC=C2C(=O)OC(=O)C4=CC=C3C1=C42 CLYVDMAATCIVBF-UHFFFAOYSA-N 0.000 description 1
- 239000002798 polar solvent Substances 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- JRDBISOHUUQXHE-UHFFFAOYSA-N pyridine-2,3,5,6-tetracarboxylic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)N=C1C(O)=O JRDBISOHUUQXHE-UHFFFAOYSA-N 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 229940043267 rhodamine b Drugs 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- NJMOHBDCGXJLNJ-UHFFFAOYSA-N trimellitic anhydride chloride Chemical compound ClC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 NJMOHBDCGXJLNJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Optical Integrated Circuits (AREA)
- Lasers (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、光通信、光信号処
理、光コンピュータなどの光部品に関する。The present invention relates to optical components such as optical communication, optical signal processing, and optical computers.
【0002】[0002]
【従来の技術】光通信などの分野では、信号光を直接増
幅させる装置として、特開平3−260633号公報に
示されているように、ガラス系の材料にエルビウムやネ
オジムなどの希土類元素を添加した光ファイバを形成し
て、高パワーのポンプ光レーザで励起する方法がある。
このような光増幅は、光信号を電気に変換することなし
に光信号を増幅できるので、光から電気および電気から
光への変換のノイズもなく、また装置の構成が簡単にな
るという利点がある。2. Description of the Related Art In the field of optical communication and the like, as a device for directly amplifying signal light, a rare earth element such as erbium or neodymium is added to a glass-based material as disclosed in JP-A-3-260633. There is a method of forming an optical fiber and pumping it with a high-power pump light laser.
Since such optical amplification can amplify an optical signal without converting the optical signal into electricity, there is an advantage that there is no noise in conversion from light to electricity and electricity to light, and that the configuration of the device is simplified. is there.
【0003】特開平3−260633号公報に示される
光増幅器は、石英系やフッ素物ガラスなどの高融点材料
にエルビウムやネオジムなどの希土類元素を添加させる
ために、通常、500℃以上の高温での熱処理が必要と
なるため作製の装置やプロセスが高価になる。また、希
土類を添加したファイバを単独で作製することは容易で
石英系ガラスファイバ用のファイバ増幅器として用いる
ことはできるが、発光素子や受動素子や変調器を形成し
た同一基板上に形成することが困難であるという問題点
がある。これらに対して、最近、ポリメチルメタクリレ
ート(PMMA)などをベースに用いて非線形光学材料
を添加したファイバ型光増幅器の報告もなされている
が、PMMA系材料は、通常、ガラス転移点温度が10
0℃前後で、耐熱性が低く、装置となったときの環境条
件が制限されるなど信頼性に問題があり、また、基板上
に形成される場合にも、ハンダ付やパッケージングなど
の作製プロセス上で、変形などが起こり易く、装置とし
ての信頼性に問題がある。[0003] The optical amplifier disclosed in Japanese Patent Application Laid-Open No. 3-260633 is usually operated at a high temperature of 500 ° C. or higher in order to add a rare earth element such as erbium or neodymium to a high melting point material such as quartz or fluoride glass. Requires a heat treatment, which makes the manufacturing apparatus and process expensive. In addition, it is easy to produce a rare-earth-doped fiber by itself, and it can be used as a fiber amplifier for a silica-based glass fiber, but it can be formed on the same substrate on which a light-emitting element, a passive element, and a modulator are formed. There is a problem that it is difficult. On the other hand, recently, a fiber type optical amplifier in which a non-linear optical material is added based on polymethyl methacrylate (PMMA) or the like has been reported, but the PMMA-based material usually has a glass transition temperature of 10%.
At about 0 ° C, there is a problem in reliability, such as low heat resistance, which limits the environmental conditions when the device is formed. In addition, when the device is formed on a substrate, it is manufactured by soldering or packaging. In the process, deformation and the like are likely to occur, and there is a problem in the reliability as an apparatus.
【0004】[0004]
【発明が解決しようとする課題】請求項1記載の発明
は、作製プロセスが容易で、耐熱性、安定した光増幅性
能等の信頼性の高い光増幅器を提供するものである。請
求項2記載の発明は、請求項1記載の発明の効果に加
え、さらに透明性、色素との混合性等に優れる光増幅器
を提供する。請求項3記載の発明は、請求項1又は2記
載の発明の効果に加え、より作製プロセスが容易で、同
一基板上に電気回路等を形成可能な光増幅器を提供す
る。SUMMARY OF THE INVENTION The object of the present invention is to provide an optical amplifier which is easy to manufacture and has high heat resistance and stable optical amplification performance. The second aspect of the present invention provides an optical amplifier which is excellent in transparency, mixing with a dye, and the like in addition to the effects of the first aspect of the present invention. According to a third aspect of the present invention, in addition to the effects of the first or second aspect of the present invention, there is provided an optical amplifier which is easier to manufacture and can form an electric circuit or the like on the same substrate.
【0005】[0005]
【課題を解決するための手段】本発明は、ガラス転移温
度が180℃以上のベース樹脂及び色素を含む樹脂組成
物から成る光導波を行う部分に、ポンプ光を入射してこ
の部分を励起状態とすると共にこの部分に信号光を伝搬
させることにより、この信号光を増幅させることを特徴
とする光増幅器に関する。また、本発明は、ガラス転移
温度が180℃以上の樹脂が、ポリイミド系樹脂である
前記光増幅器に関する。また、本発明は、光導波を行う
部分が、薄膜形状である前記光増幅器に関する。SUMMARY OF THE INVENTION According to the present invention, a pump light is incident on an optical waveguide portion made of a resin composition containing a base resin and a dye having a glass transition temperature of 180 ° C. or higher, and this portion is excited. The present invention also relates to an optical amplifier characterized in that the signal light is amplified by transmitting the signal light to this portion. Further, the present invention relates to the optical amplifier, wherein the resin having a glass transition temperature of 180 ° C. or higher is a polyimide resin. In addition, the present invention relates to the optical amplifier, wherein the portion that performs optical waveguide is a thin film.
【0006】[0006]
【発明の実施の形態】本発明におけるベース樹脂は、過
酷な環境にも充分に耐えられる為に、ガラス転移点温度
が180℃以上である。また、作製プロセス時の熱的裕
度を持たせる為には、ガラス転移点温度が200℃以上
であることが好ましく、220℃以上であることがより
好ましい。本発明におけるガラス転移温度が180℃以
上であるベース樹脂としては、例えば、ポリイミド、ポ
リアミドイミド、ポリエーテルイミド、ポリサルホン、
ポリシロキサン、シリコーン等が挙げられる。透明性、
色素との混合性の良さ等の点から、ポリイミド、ポリア
ミドイミド、ポリエーテルイミド等のポリイミド系樹脂
がより好ましいものとして挙げられる。BEST MODE FOR CARRYING OUT THE INVENTION The base resin of the present invention has a glass transition temperature of 180 ° C. or higher in order to sufficiently withstand a severe environment. Further, in order to have a thermal margin during the manufacturing process, the glass transition point temperature is preferably 200 ° C. or higher, and more preferably 220 ° C. or higher. As the base resin having a glass transition temperature of 180 ° C. or higher in the present invention, for example, polyimide, polyamideimide, polyetherimide, polysulfone,
Examples include polysiloxane and silicone. transparency,
Polyimide resins such as polyimide, polyamide imide, and polyether imide are more preferable in terms of good mixing with a dye.
【0007】これらのポリイミドは、ポリイミド系前駆
体から製造することが広く行われている。ポリイミド系
前駆体は、例えば、N−メチル−2−ピロリドン、N,
N−ジメチルアセトアミド、γ−ブチロラクトン、ジメ
チルスルホキシド等の極性溶媒中でテトラカルボン酸二
無水物とジアミンとを反応させることなどにより得るこ
とができる。テトラカルボン酸二無水物とジアミンとの
反応は、ほぼ等モルとして反応させることが好ましく、
反応温度は、通常、0〜40℃とされ、反応時間は、通
常、30分〜50時間の範囲とされる。[0007] These polyimides are widely produced from polyimide-based precursors. The polyimide precursor is, for example, N-methyl-2-pyrrolidone, N,
It can be obtained by reacting a tetracarboxylic dianhydride with a diamine in a polar solvent such as N-dimethylacetamide, γ-butyrolactone, dimethylsulfoxide and the like. The reaction between the tetracarboxylic dianhydride and the diamine is preferably carried out in approximately equimolar amounts,
The reaction temperature is usually from 0 to 40 ° C, and the reaction time is usually from 30 minutes to 50 hours.
【0008】使用するテトラカルボン酸二無水物とジア
ミンの種類には特に制約はないが、透明性を向上させる
点から、テトラカルボン酸二無水物及びジアミンの少な
くとも一方には、フッ素を含む化合物を用いることが好
ましい。There are no particular restrictions on the types of tetracarboxylic dianhydride and diamine used, but from the viewpoint of improving transparency, at least one of the tetracarboxylic dianhydride and the diamine contains a fluorine-containing compound. Preferably, it is used.
【0009】フッ素を含むテトラカルボン酸二無水物と
しては、例えば、(トリフルオロメチル)ピロメリット
酸二無水物、ジ(トリフルオロメチル)ピロメリット酸
二無水物、ジ(ヘプタフルオロプロピル)ピロメリット
酸二無水物、ペンタフルオロエチルピロメリット酸二無
水物、ビス{3,5−ジ(トリフルオロメチル)フェノ
キシ}ピロメリット酸二無水物、2,2−ビス(3,4
−ジカルボキシフェニル)ヘキサフルオロプロパン二無
水物、5,5′−ビス(トリフルオロメチル)−3,
3′,4,4′−テトラカルボキシビフェニル二無水
物、2,2′−5,5′−テトラキス(トリフルオロメ
チル)−3,3′,4,4′−テトラカルボキシビフェ
ニル二無水物、5,5′−ビス(トリフルオロメチル)
−3,3′,4,4′−テトラカルボキシジフェニルエ
ーテル二無水物、5,5′−ビス(トリフルオロメチ
ル)−3,3′,4,4′−テトラカルボキシベンゾフ
ェノン二無水物、ビス{(トリフルオロメチル)ジカル
ボキシフェノキシ}ベンゼン二無水物、ビス{(トリフ
ルオロメチル)ジカルボキシフェノキシ}(トリフルオ
ロメチル)ベンゼン二無水物、ビス(ジカルボキシフェ
ノキシ)(トリフルオロメチル)ベンゼン二無水物、ビ
ス(ジカルボキシフェノキシ)ビス(トリフルオロメチ
ル)ベンゼン二無水物、ビス(ジカルボキシフェノキ
シ)テトラキス(トリフルオロメチル)ベンゼン二無水
物、2,2−ビス{(4−(3,4−ジカルボキシフェ
ノキシ)フェニル}ヘキサフルオロプロパン二無水物、
ビス{(トリフルオロメチル)ジカルボキシフェノキ
シ}ビフェニル二無水物、ビス{(トリフルオロメチ
ル)ジカルボキシフェノキシ}ビス(トリフルオロメチ
ル)ビフェニル二無水物、ビス{(トリフルオロメチ
ル)ジカルボキシフェノキシ}ジフェニルエーテル二無
水物、ビス(ジカルボキシフェノキシ)ビス(トリフル
オロメチル)ビフェニル二無水物等が挙げられる。Examples of the fluorine-containing tetracarboxylic dianhydride include (trifluoromethyl) pyromellitic dianhydride, di (trifluoromethyl) pyromellitic dianhydride, and di (heptafluoropropyl) pyromellitic Acid dianhydride, pentafluoroethyl pyromellitic dianhydride, bis {3,5-di (trifluoromethyl) phenoxy} pyromellitic dianhydride, 2,2-bis (3,4
-Dicarboxyphenyl) hexafluoropropane dianhydride, 5,5'-bis (trifluoromethyl) -3,
3 ', 4,4'-tetracarboxybiphenyl dianhydride, 2,2'-5,5'-tetrakis (trifluoromethyl) -3,3', 4,4'-tetracarboxybiphenyl dianhydride, , 5'-bis (trifluoromethyl)
-3,3 ', 4,4'-tetracarboxydiphenyl ether dianhydride, 5,5'-bis (trifluoromethyl) -3,3', 4,4'-tetracarboxybenzophenone dianhydride, bis {( Trifluoromethyl) dicarboxyphenoxy {benzene dianhydride, bis {(trifluoromethyl) dicarboxyphenoxy} (trifluoromethyl) benzene dianhydride, bis (dicarboxyphenoxy) (trifluoromethyl) benzene dianhydride, Bis (dicarboxyphenoxy) bis (trifluoromethyl) benzene dianhydride, bis (dicarboxyphenoxy) tetrakis (trifluoromethyl) benzene dianhydride, 2,2-bis {(4- (3,4-dicarboxy) Phenoxy) phenyl @ hexafluoropropane dianhydride,
Bis {(trifluoromethyl) dicarboxyphenoxy} biphenyl dianhydride, bis {(trifluoromethyl) dicarboxyphenoxy} bis (trifluoromethyl) biphenyl dianhydride, bis {(trifluoromethyl) dicarboxyphenoxy} diphenyl ether Dianhydride, bis (dicarboxyphenoxy) bis (trifluoromethyl) biphenyl dianhydride and the like.
【0010】フッ素を含むジアミンとしては、例えば、
4−(1H,1H,11H−エイコサフルオロウンデカ
ノキシ)−1,3−ジアミノベンゼン、4−(1H,1
H−パーフルオロ−1−ブタノキシ)−1,3−ジアミ
ノベンゼン、4−(1H,1H−パーフルオロ−1−ヘ
プタノキシ)−1,3−ジアミノベンゼン、4−(1
H,1H−パーフルオロ−1−オクタノキシ)−1,3
−ジアミノベンゼン、4−ペンタフルオロフェノキシ−
1,3−ジアミノベンゼン、4−(2,3,5,6−テ
トラフルオロフェノキシ)−1,3−ジアミノベンゼ
ン、4−(4−フルオロフェノキシ)−1,3−ジアミ
ノベンゼン、4−(1H,1H,2H,2H−パーフル
オロ−1−ヘキサノキシ)−1,3−ジアミノベンゼ
ン、4−(1H,1H,2H,2H−パーフルオロ−1
−ドデカノキシ)−1,3−ジアミノベンゼン、(2,
5)−ジアミノベンゾトリフルオライド、ビス(トリフ
ルオロメチル)フェニレンジアミン、ジアミノテトラ
(トリフルオロメチル)ベンゼン、ジアミノ(ペンタフ
ルオロエチル)ベンゼン、2,5−ジアミノ(パーフル
オロヘキシル)ベンゼン、2,5−ジアミノ(パーフル
オロブチル)ベンゼン、2,2′−ビス(トリフルオロ
メチル)−4,4′−ジアミノビフェニル、3,3′−
ビス(トリフルオロメチル)−4,4′−ジアミノビフ
ェニル、オクタフルオロベンジジン、4,4′−ジアミ
ノジフェニルエーテル、2,2−ビス(p−アミノフェ
ニル)ヘキサフルオロプロパン、1,3−ビス(アニリ
ノ)ヘキサフルオロプロパン、1,4−ビス(アニリ
ノ)オクタフルオロブタン、1,5−ビス(アニリノ)
デカフルオロペンタン、1,7−ビス(アニリノ)テト
ラデカフルオロヘプタン、2,2′−ビス(トリフルオ
ロメチル)−4,4′−ジアミノジフェニルエーテル、
3,3′−ビス(トリフルオロメチル)−4,4′−ジ
アミノジフェニルエーテル、3,3′,5,5′−テト
ラキス(トリフルオロメチル)−4,4′−ジアミノジ
フェニルエーテル、3,3′−ビス(トリフルオロメチ
ル)−4,4′−ジアミノベンゾフェノン、4,4′−
ジアミノ−p−テルフェニル、1,4−ビス(p−アミ
ノフェニル)ベンゼン、p−ビス(4−アミノ−2−ト
リフルオロメチルフェノキシ)ベンゼン、ビス(アミノ
フェノキシ)ビス(トリフルオロメチル)ベンゼン、ビ
ス(アミノフェノキシ)テトラキス(トリフルオロメチ
ル)ベンゼン、2,2−ビス{4−(4−アミノフェノ
キシ)フェニル}ヘキサフルオロプロパン、2,2−ビ
ス{4−(3−アミノフェノキシ)フェニル}ヘキサフ
ルオロプロパン、2,2−ビス{4−(2−アミノフェ
ノキシ)フェニル}ヘキサフルオロプロパン、2,2−
ビス{4−(4−アミノフェノキシ)−3,5−ジメチ
ルフェニル}ヘキサフルオロプロパン、2,2−ビス
{4−(4−アミノフェノキシ)−3,5−ジトリフル
オロメチルフェニル}ヘキサフルオロプロパン、4,
4′−ビス(4−アミノ−2−トリフルオロメチルフェ
ノキシ)ビフェニル、4,4′−ビス(4−アミノ−3
−トリフルオロメチルフェノキシ)ビフェニル、4,
4′−ビス(4−アミノ−2−トリフルオロメチルフェ
ノキシ)ジフェニルスルホン、4,4′−ビス(3−ア
ミノ−5−トリフルオロメチルフェノキシ)ジフェニル
スルホン、2,2−ビス{4−(4−アミノ−3−トリ
フルオロメチルフェノキシ)フェニル}ヘキサフルオロ
プロパン、ビス{(トリフルオロメチル)アミノフェノ
キシ}ビフェニル、ビス〔{(トリフルオロメチル)ア
ミノフェノキシ}フェニル〕ヘキサフルオロプロパン、
ビス{2−〔(アミノフェノキシ)フェニル〕ヘキサフ
ルオロイソプロピル}ベンゼン等が挙げられる。As the diamine containing fluorine, for example,
4- (1H, 1H, 11H-eicosafluoroundecanooxy) -1,3-diaminobenzene, 4- (1H, 1
H-perfluoro-1-butanoxy) -1,3-diaminobenzene, 4- (1H, 1H-perfluoro-1-heptanoxy) -1,3-diaminobenzene, 4- (1
H, 1H-perfluoro-1-octanoxy) -1,3
-Diaminobenzene, 4-pentafluorophenoxy-
1,3-diaminobenzene, 4- (2,3,5,6-tetrafluorophenoxy) -1,3-diaminobenzene, 4- (4-fluorophenoxy) -1,3-diaminobenzene, 4- (1H , 1H, 2H, 2H-perfluoro-1-hexanoxy) -1,3-diaminobenzene, 4- (1H, 1H, 2H, 2H-perfluoro-1)
-Dodecanoxy) -1,3-diaminobenzene, (2,
5) -Diaminobenzotrifluoride, bis (trifluoromethyl) phenylenediamine, diaminotetra (trifluoromethyl) benzene, diamino (pentafluoroethyl) benzene, 2,5-diamino (perfluorohexyl) benzene, 2,5- Diamino (perfluorobutyl) benzene, 2,2'-bis (trifluoromethyl) -4,4'-diaminobiphenyl, 3,3'-
Bis (trifluoromethyl) -4,4'-diaminobiphenyl, octafluorobenzidine, 4,4'-diaminodiphenyl ether, 2,2-bis (p-aminophenyl) hexafluoropropane, 1,3-bis (anilino) Hexafluoropropane, 1,4-bis (anilino) octafluorobutane, 1,5-bis (anilino)
Decafluoropentane, 1,7-bis (anilino) tetradecafluoroheptane, 2,2'-bis (trifluoromethyl) -4,4'-diaminodiphenyl ether,
3,3'-bis (trifluoromethyl) -4,4'-diaminodiphenyl ether, 3,3 ', 5,5'-tetrakis (trifluoromethyl) -4,4'-diaminodiphenyl ether, 3,3'- Bis (trifluoromethyl) -4,4'-diaminobenzophenone, 4,4'-
Diamino-p-terphenyl, 1,4-bis (p-aminophenyl) benzene, p-bis (4-amino-2-trifluoromethylphenoxy) benzene, bis (aminophenoxy) bis (trifluoromethyl) benzene, Bis (aminophenoxy) tetrakis (trifluoromethyl) benzene, 2,2-bis {4- (4-aminophenoxy) phenyl} hexafluoropropane, 2,2-bis {4- (3-aminophenoxy) phenyl} hexa Fluoropropane, 2,2-bis {4- (2-aminophenoxy) phenyl} hexafluoropropane, 2,2-
Bis {4- (4-aminophenoxy) -3,5-dimethylphenyl} hexafluoropropane, 2,2-bis {4- (4-aminophenoxy) -3,5-ditrifluoromethylphenyl} hexafluoropropane, 4,
4'-bis (4-amino-2-trifluoromethylphenoxy) biphenyl, 4,4'-bis (4-amino-3
-Trifluoromethylphenoxy) biphenyl, 4,
4'-bis (4-amino-2-trifluoromethylphenoxy) diphenylsulfone, 4,4'-bis (3-amino-5-trifluoromethylphenoxy) diphenylsulfone, 2,2-bis {4- (4 -Amino-3-trifluoromethylphenoxy) phenyl} hexafluoropropane, bis {(trifluoromethyl) aminophenoxy} biphenyl, bis [{(trifluoromethyl) aminophenoxy} phenyl] hexafluoropropane,
Bis {2-[(aminophenoxy) phenyl] hexafluoroisopropyl} benzene and the like.
【0011】フッ素を含まないテトラカルボン酸二無水
物としては、例えば、p−ターフェニル−3,4,
3″,4″−テトラカルボン酸二無水物、ピロメリット
酸二無水物、3,3′,4,4′−ベンゾフェノンテト
ラカルボン酸二無水物、3,3′,4,4′−ビフェニ
ルテトラカルボン酸二無水物、3,3′,4,4′−ビ
フェニルエーテルテトラカルボン酸二無水物、1,2,
5,6−ナフタレンテトラカルボン酸二無水物、2,
3,6,7−ナフタレンテトラカルボン酸二無水物、
2,3,5,6−ピリジンテトラカルボン酸二無水物、
1,4,5,8−ナフタレンテトラカルボン酸二無水
物、3,4,9,10−ペリレンテトラカルボン酸二無
水物、4,4′−スルホニルジフタル酸二無水物、3,
3′,4,4′−テトラフェニルシランテトラカルボン
酸二無水物、メタ−ターフェニル−3,3″,4,4″
−テトラカルボン酸二無水物、3,3′,4,4′−ジ
フェニルエーテルテトラカルボン酸二無水物、1,3−
ビス(3,4−ジカルボキシフェニル)−1,1,3,
3−テトラメチルジシロキサン二無水物、1−(2,3
−ジカルボキシフェニル)−3−(3,4−ジカルボキ
シフェニル)−1,1,3,3−テトラメチルジシロキ
サン二無水物等が挙げられる。なお、ポリアミドイミド
樹脂を得る場合には、通常、塩化無水トリメリット酸等
が用いられる。The tetracarboxylic dianhydride containing no fluorine includes, for example, p-terphenyl-3,4,4
3 ", 4" -tetracarboxylic dianhydride, pyromellitic dianhydride, 3,3 ', 4,4'-benzophenonetetracarboxylic dianhydride, 3,3', 4,4'-biphenyltetra Carboxylic dianhydride, 3,3 ', 4,4'-biphenylethertetracarboxylic dianhydride, 1,2,2
5,6-naphthalenetetracarboxylic dianhydride, 2,
3,6,7-naphthalenetetracarboxylic dianhydride,
2,3,5,6-pyridinetetracarboxylic dianhydride,
1,4,5,8-naphthalenetetracarboxylic dianhydride, 3,4,9,10-perylenetetracarboxylic dianhydride, 4,4'-sulfonyldiphthalic dianhydride, 3,
3 ', 4,4'-tetraphenylsilanetetracarboxylic dianhydride, meta-terphenyl-3,3 ", 4,4"
-Tetracarboxylic dianhydride, 3,3 ', 4,4'-diphenylethertetracarboxylic dianhydride, 1,3-
Bis (3,4-dicarboxyphenyl) -1,1,3
3-tetramethyldisiloxane dianhydride, 1- (2,3
-Dicarboxyphenyl) -3- (3,4-dicarboxyphenyl) -1,1,3,3-tetramethyldisiloxane dianhydride. When a polyamideimide resin is obtained, usually trimellitic anhydride chloride or the like is used.
【0012】フッ素を含まないジアミンとしては、例え
ば、4,4′−ジアミノジフェニルエーテル、4,4′
−ジアミノジフェニルメタン、4,4′−ジアミノジフ
ェニルスルホン、4,4′−ジアミノジフェニルスルフ
ィド、ベンジン、メタンフェニレンジアミン、パラフェ
ニレンジアミン、2,2−ビス−(4−アミノフェノキ
シフェニル)プロパン、1,5−ナフタレンジアミン、
2,6−ナフタレンジアミン、ビス−(4−アミノフェ
ノキシフェニル)スルホン、ビス−(4−アミノフェノ
キシフェニル)スルフィド、ビス−(4−アミノフェノ
キシフェニル)ビフェニル、1,4−ビス−(4−アミ
ノフェノキシ)ベンゼン、1,3−ビス−(4−アミノ
フェノキシ)ベンゼン、3,4′−ジアミノジフェニル
エーテル、3,3′−ジメチル−4,4′−ジアミノビ
フェニル、3,3′−ジメトキシ−4,4′−ジアミノ
ビフェニル、4,4′−ジアミノジフェニルエーテル−
3−スルホンアミド、3,4′−ジアミノジフェニルエ
ーテル−4−スルホンアミド、3,4′−ジアミノジフ
ェニルエーテル−3′−スルホンアミド、3,3′−ジ
アミノジフェニルエーテル−4−スルホンアミド、4,
4′−ジアミノジフェニルメタン−3−スルホンアミ
ド、3,4′−ジアミノジフェニルメタン−4−スルホ
ンアミド、3,4′−ジアミノジフェニルメタン−3′
−スルホンアミド、3,3′−ジアミノジフェニルメタ
ン−4−スルホンアミド、4,4′−ジアミノジフェニ
ルスルホン−3−スルホンアミド、3,4′−ジアミノ
ジフェニルスルホン−4−スルホンアミド、3,4′−
ジアミノジフェニルスルホン−3′−スルホンアミド、
3,3′−ジアミノジフェニルスルホン−4−スルホン
アミド、4,4′−ジアミノジフェニルサルファイド−
3−スルホンアミド、3,4′−ジアミノジフェニルサ
ルファイド−4−スルホンアミド、3,3′−ジアミノ
ジフェニルサルファイド−4−スルホンアミド、3,
4′−ジアミノジフェニルサルファイド−3′−スルホ
ンアミド、1,4−ジアミノベンゼン−2−スルホンア
ミド、4,4′−ジアミノジフェニルエーテル−3−カ
ルボンアミド、3,4′−ジアミノジフェニルエーテル
−4−カルボンアミド、3,4′−ジアミノジフェニル
エーテル−3′−カルボンアミド、3,3′−ジアミノ
ジフェニルエーテル−4−カルボンアミド、4,4′−
ジアミノジフェニルメタン−3−カルボンアミド、3,
4′−ジアミノジフェニルメタン−4−カルボンアミ
ド、3,4′−ジアミノジフェニルメタン−3′−カル
ボンアミド、3,3′−ジアミノジフェニルメタン−4
−カルボンアミド、4,4′−ジアミノジフェニルスル
ホン−3−カルボンアミド、3,4′−ジアミノジフェ
ニルスルホン−4−カルボンアミド、3,4′−ジアミ
ノジフェニルスルホン−3′−カルボンアミド、3,
3′−ジアミノジフェニルスルホン−4′−カルボンア
ミド、4,4′−ジアミノジフェニルサルファイド−3
−カルボンアミド、3,4′−ジアミノジフェニルサル
ファイド−4−カルボンアミド、3,3′−ジアミノジ
フェニルサルファイド−4−カルボンアミド、3,4′
−ジアミノジフェニルサルファイド−3′−スルホンア
ミド、1,4−ジアミノベンゼン−2−カルボンアミド
等が挙げられる。Examples of the diamine containing no fluorine include 4,4'-diaminodiphenyl ether and 4,4 '
-Diaminodiphenylmethane, 4,4'-diaminodiphenylsulfone, 4,4'-diaminodiphenylsulfide, benzine, methanephenylenediamine, paraphenylenediamine, 2,2-bis- (4-aminophenoxyphenyl) propane, 1,5 -Naphthalenediamine,
2,6-naphthalenediamine, bis- (4-aminophenoxyphenyl) sulfone, bis- (4-aminophenoxyphenyl) sulfide, bis- (4-aminophenoxyphenyl) biphenyl, 1,4-bis- (4-amino Phenoxy) benzene, 1,3-bis- (4-aminophenoxy) benzene, 3,4′-diaminodiphenyl ether, 3,3′-dimethyl-4,4′-diaminobiphenyl, 3,3′-dimethoxy-4, 4'-diaminobiphenyl, 4,4'-diaminodiphenyl ether-
3-sulfonamide, 3,4'-diaminodiphenylether-4-sulfonamide, 3,4'-diaminodiphenylether-3'-sulfonamide, 3,3'-diaminodiphenylether-4-sulfonamide, 4,
4'-diaminodiphenylmethane-3-sulfonamide, 3,4'-diaminodiphenylmethane-4-sulfonamide, 3,4'-diaminodiphenylmethane-3 '
-Sulfonamide, 3,3'-diaminodiphenylmethane-4-sulfonamide, 4,4'-diaminodiphenylsulfone-3-sulfonamide, 3,4'-diaminodiphenylsulfone-4-sulfonamide, 3,4'-
Diaminodiphenylsulfone-3'-sulfonamide,
3,3'-diaminodiphenylsulfone-4-sulfonamide, 4,4'-diaminodiphenylsulfide-
3-sulfonamide, 3,4'-diaminodiphenylsulfide-4-sulfonamide, 3,3'-diaminodiphenylsulfide-4-sulfonamide, 3,
4'-diaminodiphenylsulfide-3'-sulfonamide, 1,4-diaminobenzene-2-sulfonamide, 4,4'-diaminodiphenylether-3-carbonamide, 3,4'-diaminodiphenylether-4-carbonamide 3,4'-diaminodiphenyl ether-3'-carbonamide, 3,3'-diaminodiphenyl ether-4-carbonamide, 4,4'-
Diaminodiphenylmethane-3-carbonamide, 3,
4'-diaminodiphenylmethane-4-carbonamide, 3,4'-diaminodiphenylmethane-3'-carbonamide, 3,3'-diaminodiphenylmethane-4
-Carbonamide, 4,4'-diaminodiphenylsulfone-3-carbonamide, 3,4'-diaminodiphenylsulfone-4-carbonamide, 3,4'-diaminodiphenylsulfone-3'-carbonamide, 3,
3'-diaminodiphenylsulfone-4'-carbonamide, 4,4'-diaminodiphenylsulfide-3
-Carbonamide, 3,4'-diaminodiphenylsulfide-4-carbonamide, 3,3'-diaminodiphenylsulfide-4-carbonamide, 3,4 '
-Diaminodiphenylsulfide-3'-sulfonamide, 1,4-diaminobenzene-2-carbonamide and the like.
【0013】上記したテトラカルボン酸二無水物及びジ
アミンは、それぞれ単独で又は2種類以上を組み合わせ
て使用される。The above-mentioned tetracarboxylic dianhydride and diamine are used alone or in combination of two or more.
【0014】本発明における色素は、ベース樹脂と同様
に、耐熱性のものを用いることが好ましいが、光増幅器
の作製プロセス中に分解しない程度の耐熱性があればよ
い。また、非線形光学材料の拡散を防止するために、ベ
ース樹脂と化学的に結合させたものを用いることもでき
る。本発明における色素としては、特に制限なく、例え
ば、色素レーザーに用いられるローダミン系のものを使
用することができる。また、これらの色素のうち、非線
形光学材料として分類できるものも好ましく用いること
ができ、具体的には、例えば、ニトロアニリン、フタロ
シアニン、ローダミン、フルオレセン、ディスパースレ
ッド、ディスパースオレンジ、ペリレンスカーレット、
ロフィン等の有機系材料、メルカドミウムオレンジレッ
ド等の無機系材料等が挙げられる。なお、ベース樹脂に
対する色素の濃度は、0.01〜40重量%とすること
が好ましい。As the dye in the present invention, it is preferable to use a heat-resistant dye as in the case of the base resin, but it is sufficient that the dye has a heat resistance that does not decompose during the process of manufacturing the optical amplifier. Further, in order to prevent diffusion of the nonlinear optical material, a material chemically bonded to a base resin can be used. The dye in the present invention is not particularly limited, and for example, a rhodamine-based dye used in a dye laser can be used. Among these dyes, those that can be classified as nonlinear optical materials can also be preferably used. Specifically, for example, nitroaniline, phthalocyanine, rhodamine, fluorescein, disperse red, disperse orange, perylene scarlet,
Examples include organic materials such as roffin, and inorganic materials such as mercadmium orange red. The concentration of the dye with respect to the base resin is preferably 0.01 to 40% by weight.
【0015】本発明の光増幅器における光導波を行う部
分は、ファイバ形状、薄膜形状等とすることが好まし
く、薄膜形状とすることがより好ましい。また、発光素
子、受光素子、変調素子、電気回路等を、同一基板上に
形成することが可能となり、装置を小型化できる点から
も、光導波を行う部分を、一つの基板上に薄膜形状の光
導波路として形成することが好ましい。なお、薄膜形状
の光導波路は、通常、スラブ型光導波路と呼ばれる。ま
た、光導波を行う部分をリッジ型光導波路、トレンチ型
光導波路等とすることもできる。これらに使用する基板
としては、例えば、石英ウエハ、シリコンウエハ、ガリ
ウムヒ素ウエハ、ガラス板、樹脂板等が挙げられる。In the optical amplifier of the present invention, the portion for conducting the optical waveguide preferably has a fiber shape, a thin film shape or the like, and more preferably a thin film shape. In addition, the light emitting element, the light receiving element, the modulation element, the electric circuit, and the like can be formed on the same substrate. Is preferably formed as an optical waveguide. The thin-film optical waveguide is usually called a slab optical waveguide. Further, the portion that performs optical waveguide may be a ridge-type optical waveguide, a trench-type optical waveguide, or the like. Substrates used for these include, for example, quartz wafers, silicon wafers, gallium arsenide wafers, glass plates, resin plates, and the like.
【0016】本発明における信号光及びポンプ光として
は、特に制限はなく、ヘリウムネオン等のガスレーザ、
Nd:YAG等の固体レーザ、GaAlAs等の半導体
レーザなどを用いることができ、その波長は、可視領域
の500nm程度から近赤外領域の1600nm付近までの
どこでもよく、その出力も、数マイクロワットから数ワ
ットまでの範囲で用いることができる。本発明における
信号光とポンプ光は、使用する色素の吸収スペクトル及
び発光スペクトルにより決定することができる。本発明
の光増幅器の利得は、増幅器の有効増幅長、ポンプ光の
強度等により異なるものではあるが、3〜50dBとする
ことが好ましい。The signal light and the pump light in the present invention are not particularly limited, and include a gas laser such as helium neon,
A solid-state laser such as Nd: YAG, a semiconductor laser such as GaAlAs, or the like can be used. The wavelength may be anywhere from about 500 nm in the visible region to around 1600 nm in the near-infrared region. It can be used in the range up to several watts. The signal light and the pump light in the present invention can be determined based on the absorption spectrum and emission spectrum of the dye used. The gain of the optical amplifier of the present invention varies depending on the effective amplification length of the amplifier, the intensity of the pump light, and the like, but is preferably 3 to 50 dB.
【0017】以下、実施例により本発明を説明する。Hereinafter, the present invention will be described with reference to examples.
実施例1 0.5リットルの平底型フラスコに、N,N−ジメチル
アセトアミド90g、2,2−ビス(3,4−ジカルボ
キシフェニル)ヘキサフルオロプロパン酸二無水物4.
61g及び2,2′−ビス〔4−(4−アミノフェノキ
シ)フェニル〕ヘキサフルオロプロパン5.39gを溶
解し、室温で10時間撹拌してポリイミド前駆体を得
た。このポリイミド前駆体を、5インチの石英ウエハ
(厚さ1mm)上に、スピン塗布し、硬化炉で100℃で
30分間、200℃で2時間で乾燥後、硬化したポリイ
ミドのフィルムのガラス転移温度を測定したところ25
0℃であった。Example 1 In a 0.5-liter flat bottom flask, 90 g of N, N-dimethylacetamide and 2,2-bis (3,4-dicarboxyphenyl) hexafluoropropanoic dianhydride.
61 g and 2,39'-bis [4- (4-aminophenoxy) phenyl] hexafluoropropane 5.39 g were dissolved and stirred at room temperature for 10 hours to obtain a polyimide precursor. The polyimide precursor was spin-coated on a 5-inch quartz wafer (1 mm thick) and dried in a curing oven at 100 ° C. for 30 minutes and 200 ° C. for 2 hours, and then the glass transition temperature of the cured polyimide film Measured 25
It was 0 ° C.
【0018】このポリイミド前駆体に、ローダミンBを
0.5g加えて、室温で1時間撹拌してワニスを得た。
このワニスを、5インチの石英ウエハ上にスピン塗布
し、硬化炉で100℃で30分間、200℃で2時間で
乾燥、硬化してスラブ型光導波路を形成した。このスラ
ブ型光導波路を、図1に示すプリズムカップリング法で
測定した(20℃の温度下で測定)。図1はスラブ型光
導波路の光増幅の測定法(プリズムカップリング法)を
示す模式図であり、図1において、1は信号光、2はポ
ンプ光、3は出射光、4はプリズム、5はスラブ型光導
波路及び6は石英ウエハである。To this polyimide precursor, 0.5 g of Rhodamine B was added and stirred at room temperature for 1 hour to obtain a varnish.
The varnish was spin-coated on a 5-inch quartz wafer, dried and cured in a curing furnace at 100 ° C. for 30 minutes and at 200 ° C. for 2 hours to form a slab optical waveguide. This slab type optical waveguide was measured by the prism coupling method shown in FIG. 1 (measured at a temperature of 20 ° C.). FIG. 1 is a schematic view showing a method for measuring optical amplification (prism coupling method) of a slab-type optical waveguide. In FIG. Is a slab type optical waveguide and 6 is a quartz wafer.
【0019】具体的には、信号光として出力5mWのヘリ
ウム−ネオンレーザ(波長633nm)と、ポンプ光とし
て出力200mWのアルゴンレーザ(波長515nm)の光
を入射して、6cm導波したところで出射光を取り出しパ
ワーの測定を行った。波長633nmの出射光の出力パワ
ーは、ポンプ光がないときは1mWであったが、ポンプ光
を入射した場合は3mWとなり、信号光が増幅されている
ことが確認された。また、このスラブ型光導波路を、1
20℃で300時間加熱後に上記と同様の測定を行った
が、出射光に変化はなく、耐熱性に優れることが確認さ
れた。Specifically, a helium-neon laser (wavelength: 633 nm) having an output of 5 mW as signal light and an argon laser (wavelength: 515 nm) having an output of 200 mW as pump light are incident, and the light is emitted when guided by 6 cm. Was taken out and the power was measured. The output power of the emitted light having a wavelength of 633 nm was 1 mW when there was no pump light, but was 3 mW when the pump light was incident, and it was confirmed that the signal light was amplified. Also, this slab type optical waveguide is
After heating at 20 ° C. for 300 hours, the same measurement as above was carried out, but there was no change in the emitted light, and it was confirmed that the heat resistance was excellent.
【0020】[0020]
【発明の効果】請求項1記載の光増幅器は、作製プロセ
スが容易で耐熱性、安定した光増幅性能等の信頼性の高
いものである。請求項2記載の光増幅器は、請求項1記
載の発明の効果を奏し、さらに透明性、色素との混合性
等に優れる。請求項3記載の光増幅器は、請求項1又は
2記載の発明の効果を奏し、より作製プロセスが容易
で、同一基板上に電気回路等を形成可能である。According to the first aspect of the present invention, the optical amplifier has a high reliability such as easy manufacturing process, heat resistance and stable optical amplification performance. The optical amplifier according to the second aspect has the effects of the invention according to the first aspect, and is further excellent in transparency, mixing with a dye, and the like. The optical amplifier according to the third aspect has the effects of the invention according to the first or second aspect, is easier to manufacture, and can form an electric circuit or the like on the same substrate.
【図1】スラブ型光導波路の光増幅の測定法(プリズム
カップリング法)を示す模式図である。FIG. 1 is a schematic diagram showing a method for measuring optical amplification of a slab-type optical waveguide (prism coupling method).
1 信号光 2 ポンプ光 3 出射光 4 プリズム 5 スラブ型光導波路 6 石英ウエハ DESCRIPTION OF SYMBOLS 1 Signal light 2 Pump light 3 Emission light 4 Prism 5 Slab type optical waveguide 6 Quartz wafer
Claims (3)
樹脂及び色素を含む樹脂組成物から成る光導波を行う部
分に、ポンプ光を入射してこの部分を励起状態とすると
共にこの部分に信号光を伝搬させることにより、この信
号光を増幅させることを特徴とする光増幅器。1. A pump light is made incident on a portion where optical waveguide is made of a resin composition containing a base resin and a dye having a glass transition temperature of 180 ° C. or higher, and this portion is put into an excited state, and a signal light is made on this portion. An optical amplifier characterized by amplifying this signal light by propagating light.
が、ポリイミド系樹脂である請求項1記載の光増幅器。2. The optical amplifier according to claim 1, wherein the resin having a glass transition temperature of 180 ° C. or higher is a polyimide resin.
求項1又は2記載の光増幅器。3. The optical amplifier according to claim 1, wherein the portion that performs optical waveguide is a thin film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28940596A JPH10135547A (en) | 1996-10-31 | 1996-10-31 | Optical amplifier |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28940596A JPH10135547A (en) | 1996-10-31 | 1996-10-31 | Optical amplifier |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH10135547A true JPH10135547A (en) | 1998-05-22 |
Family
ID=17742818
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28940596A Pending JPH10135547A (en) | 1996-10-31 | 1996-10-31 | Optical amplifier |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH10135547A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002332349A (en) * | 2001-05-11 | 2002-11-22 | Hitachi Chem Co Ltd | Fluorine-containing polyimide copolymer, precursor, optical part, and method for controlling refractive index of optical part |
JP2006165292A (en) * | 2004-12-08 | 2006-06-22 | Ricoh Co Ltd | Semiconductor laser excitation solid state laser device |
KR100594036B1 (en) | 2003-12-30 | 2006-06-30 | 삼성전자주식회사 | Optical amplifier, optical module with the same and method for fabricating thereof |
-
1996
- 1996-10-31 JP JP28940596A patent/JPH10135547A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002332349A (en) * | 2001-05-11 | 2002-11-22 | Hitachi Chem Co Ltd | Fluorine-containing polyimide copolymer, precursor, optical part, and method for controlling refractive index of optical part |
KR100594036B1 (en) | 2003-12-30 | 2006-06-30 | 삼성전자주식회사 | Optical amplifier, optical module with the same and method for fabricating thereof |
JP2006165292A (en) * | 2004-12-08 | 2006-06-22 | Ricoh Co Ltd | Semiconductor laser excitation solid state laser device |
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