JPH10135000A - Synchrotron radiation generating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the installation space by distributing an incidence device and a storage ring in upstairs and downstairs of a building, and communicating the incidence device and the storage ring with each other with a beam transmitting unit, which is arranged through a deflecting magnet. SOLUTION: Electron beam, which is deflected by a deflecting magnet 11', is deflected by a deflecting magnet 12 so as to enter a storage ring 3. Periphery of the storage ring 3 is provided with beam lines 6, 6, 6... for transmitting the radiation radiated from the storage ring 3 and radiation utilizing devices (X-ray exposing device) 7, 7, 7... for utilizing the radiation. Periphery of the X-ray exposing device 7 is provided with a carrying line 13 for carrying wafers to the X-ray exposing device. In this case, an incidence device is located downstairs, and the storage ring 3 is located upstairs so that a shield wall of a floor part of the storage ring 3 is used as a shield wall of a ceiling part of the incidence device.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a synchrotron radiation (hereinafter referred to as "SR light") generator, and more particularly to a small-sized industrial S
The present invention relates to an R light generator.

[0002]

2. Description of the Related Art An SR light generator includes a storage ring for storing electrons or positrons at a predetermined energy to generate radiation, an injector for injecting electrons or positrons into the storage ring, and an injector for injecting electrons or positrons. And a control device (including a power supply device and a utility device) for controlling them.

FIG. 4 shows a conventional SR light generator.
Reference numeral 1 denotes an injection device such as a microtron or a linac, which is constituted by a device for generating electrons or positrons and a device for accelerating electrons or positrons. Reference numeral 2 denotes a beam transport unit that transports electrons or positrons accelerated to the incident energy to the storage ring 3. The storage ring 3 is composed of an electromagnet for putting electrons or positrons carried from the beam transport unit 2 on a storage orbit, an electromagnet for orbiting, and a high-frequency device for supplying energy to the emitted electrons or positrons. ing.

When the incident energy of electrons or positrons is smaller than the stored energy, the control device controls the storage ring 3 to accelerate the storage ring 3 to a predetermined stored energy. 5
Is a radiation shielding wall for shielding radiation generated from the incident device, and 5 'is a radiation shielding wall for shielding radiation from the storage ring 3. These shielding walls are from several tens of cm to 100
It is composed of a concrete wall having a thickness of several tens of centimeters. The shielding wall of the incident device 1 is thicker than the shielding wall of the storage ring 3.

Reference numerals 6, 6, 6... Denote beam lines attached to the beam extraction ports of the storage ring 3, and at their ends, a radiation light utilization device 7 for utilizing radiation light.
7, 7,... Are installed. Reference numeral 8 denotes a power supply room, 9 denotes a control room, and 10 denotes a cooling water device room.

In the above-mentioned conventional SR light generator, since the beam transport unit 2 and the storage ring 3 of the incident device 1 are installed on the same floor, the installation space for the SR generator becomes large, and the beam transport unit 2 Is located on the same floor, the radiation light utilization device 7 could not be installed at the installation location of the beam transport unit, and the SR light generation device could not be freely installed anywhere in the building. .

[0007]

The installation location of the synchrotron radiation device 7 is not restricted by the beam transport section 2, and the SR light generator can be arbitrarily installed at an optimum location in the building. It is an object of the present invention to provide an SR light generator having a structure.

[0008]

SUMMARY OF THE INVENTION In a synchrotron radiation light generating apparatus comprising an injection device 1 and a beam transport section 2 for guiding electrons or positrons from the injection device 1 to a storage ring 3, the injection device 1 and the storage ring 3 are connected to each other. It is characterized in that it is installed separately on the upper floor and lower floor of the building, and the incident device 1 and the storage ring 3 are communicated with each other by the beam transport unit 2 disposed via the deflection magnets 11 and 11 '.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described with reference to FIGS. 1 to 3 in which an SR light generating apparatus of the present invention is installed in a semiconductor factory. Reference numeral 1 denotes an incident device such as a microtron, which is installed on the floor of the first floor in the illustrated example. The ceiling, floor, front, rear, left and right side walls of the incident device room are shielded by radiation shielding walls 5. A storage ring 3 is installed on the second floor just above the incident device room, and the electrons accelerated by the incident device 1 penetrate through the deflection magnets 11 and 11 'and the ceiling shield wall of the incident device room and are vertically extended. The light is projected onto the storage ring 3 through the installed beam transport unit 2. The deflection magnet shown moves the electron beam in the horizontal direction vertically,
Although an α-electromagnet that bends 270 degrees to deflect it from the vertical direction to the horizontal direction is shown, a deflection magnet that bends 90 degrees may be used. 5 'is a shielding wall for shielding radiation from the storage ring, which shields the ceiling and the front, rear, left and right side surfaces.

FIG. 3 is a plan view of the second floor where the storage ring 3 is installed. The electron beam bent by the deflection magnet 11 ′ is bent by the deflection magnet 12 and enters the storage ring 3. A beam line 6 around the storage ring 3 for passing radiation emitted from the storage ring,
., And a radiation utilization apparatus (X-ray exposure apparatus) 7, 7, 7,... For utilizing the radiation.
A transfer line 13 for transferring a wafer to the X-ray exposure apparatus is provided around the X-ray exposure apparatus 7. 14 is a wafer stocker, and 15 is an overhead crane installed on the ceiling of the incident device room. Although not shown, the power supply device, the control device, the cooling water device, and the like are appropriately installed on the floor where the incident device is installed or on the floor where the storage ring is installed.

In the illustrated example of the present invention, the incident device 1 is installed on the lower floor and the storage ring 3 is installed on the upper floor, so that the shielding wall on the floor of the storage ring is also used as the shielding wall on the ceiling of the incident device 1. However, the incident device may be installed on the upper floor and the storage ring may be installed on the lower floor depending on the structure of the building, layout of the factory, and the like. In short, the injection device 1 and the storage ring 3
Is not installed on the same floor but installed up and down the floor.

[0012]

According to the present invention, since the incident device and the storage ring are installed in the vertical direction, the installation space for the SR light generation device can be made smaller than that of a conventional device installed on the same floor. . The electrons or positrons from the injector 1 are stored in the storage ring 3
, And the beam transport unit 2 does not cross the space for using the radiation light, so that the space for using the radiation light after the SR light generator is installed can be used freely. Since the incident device 1 and the storage ring 3 of the SR light generating device are installed in the vertical direction, the SR light device can be installed at the center of the building or at the end of the building, and can be placed at an optimum position. Can be installed in When the incident device 1 is installed downstairs and the storage ring 3 is installed on the floor, the shielding wall on the floor surface of the storage ring 3 can also be used as the shielding wall of the ceiling of the incident device 1, which is economical.

[0013]

[Brief description of the drawings]

FIG. 1 is a partial cross-sectional view of a building in which an SR light generation device of the present invention is installed.

FIG. 2 is a plan view of the first floor of a building in which the incident device of the present invention is installed.

FIG. 3 is a plan view of the second floor of a building in which the storage ring of the present invention is installed.

FIG. 4 is a plan view of a building in which a conventional SR light generation device is installed.

[Explanation of symbols]

REFERENCE SIGNS LIST 1 incident device 2 beam transport unit 3 storage ring 4 control device 5 incident device shielding wall 5 ′ storage ring shielding wall 6 beam line 7 synchrotron radiation utilization device 8 power supply room 9 control room 10 cooling water device room 11, 11 ′ beam transport unit Deflection magnet 12 deflection magnet 13 transfer line 14 wafer stocker 15 overhead crane

Claims (3)

[Claims] 1. A synchrotron radiation light generating apparatus comprising an injection device (1) and a beam transport section (2) for guiding electrons or positrons from the injection device (1) to a storage ring (3). ) And the storage ring (3) are distributed and installed on the upper and lower floors of the building, respectively, and the beam which allows the incident device (1) and the storage ring (3) to be disposed via the deflection magnets (11) and (11 '). A synchrotron radiation light generating device, wherein the synchrotron radiation light generating device communicates with a transport section (2). 2. The synchrotron radiation light generating device according to claim 1, wherein the storage ring is installed on a ceiling of the shielding wall of the incident device. 3. The synchrotron radiation light generating device according to claim 1, wherein the incident device is mounted on a ceiling of a shielding wall of the storage ring.