JPH10115575A - Apparatus for inspection of liquid crystal display panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate correction of an image pickup state by providing a light path changing means and also providing first and second adjust mechanisms for respectively adjusting an angle rotation position of the light path changing means around first and second axial lines. SOLUTION: A first adjust mechanism includes a first adjust screw 58 screwed in a threaded hole of a first support 54 with a tip in contact with a light path changing means 28 and a first elastic body 60 for pressing the light path changing means 28 against the tip of the first adjust screw 58. A second adjust mechanism includes a second adjust screw 64 screwed in a second support 56 with a tip in contact with the first support 54 and a second elastic body 64 for pressing the first support 54 against the tip of the second adjust screw 62. By adjusting screwed amounts of the adjust screws 58, 62 so that difference in coordinate values at respective corners in a four-square (⊕) mark, a posture of the light path changing means 28 with respect to a liquid crystal display panel and a television camera 44 is two-dimensionally adjusted, thereby easily correcting an image pickup state of the television camera 44 and distortions in the images.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for inspecting the quality of a liquid crystal display panel.

[0002]

2. Description of the Related Art It is known that there are various types of defects in liquid crystal display panels, such as point defects, line defects, spot defects, and chromaticity defects. These defects are inspected by driving the liquid crystal display panel and using light from the liquid crystal display panel.

[0003] Such an automatic inspection apparatus for a liquid crystal display panel generally puts the liquid crystal display panel on a measuring station in a horizontal state and drives the liquid crystal display panel while driving the liquid crystal display panel.
The liquid crystal display panel is photographed, that is, imaged from above, with a television camera, and the output signal of the television camera is processed by a computer for inspection.

However, in the conventional automatic inspection apparatus, since the television camera is provided above the measurement stage, the height of the inspection apparatus is large. In particular, in an inspection apparatus that requires a wide field of view of a television camera, such as an inspection apparatus for a large liquid crystal display panel, the dimension between the measurement stage and the television camera becomes large, so that the height of the inspection apparatus is increased. The dimensions will be larger than the height of one floor of the building, and the building must be remodeled.

[0005]

SUMMARY OF THE INVENTION It is an object of the present invention to reduce the height of an inspection apparatus and to facilitate an operation of correcting an imaging state.

[0006]

A liquid crystal display panel inspection apparatus according to the present invention comprises: a measuring stage for arranging a liquid crystal display panel;
A television camera configured to image a liquid crystal display panel disposed on the measurement stage, and an optical path changing unit having a light reflecting surface for directing light from the liquid crystal display panel toward the television camera;
And supporting means for supporting the light path changing means so that the incident angle and the reflection angle of light with respect to the light path changing means can be changed.
Supporting means for supporting the optical path changing means so as to be rotatable angularly about first and second axes which intersect with an axis orthogonal to the light reflecting surface and extend in directions intersecting with each other; A first adjusting mechanism for adjusting the rotational position of the optical path changing means around the first axis, and a second adjusting mechanism for adjusting the rotational position of the optical path changing means around the second axis. including.

[0007] Since the light from the liquid crystal display panel is directed toward the television camera by the optical path changing means, the television camera can be arranged at an appropriate position, for example, in the horizontal direction with respect to the measurement stage.

It is desirable that the optical path length reaching the television camera from the liquid crystal display panel via the optical path changing means is the same at all light reflecting portions of the optical path changing means. If the optical path length passing through the optical path changing means differs for each light reflecting portion, the image captured by the television camera will be distorted.

However, when the angular rotation position of the light path changing means around the first and second axes is changed by the first and second adjusting mechanisms, the incident angle and the reflection angle of the light beam with respect to the light path changing means change. From this, the attitude of the optical path changing means with respect to the liquid crystal display panel and the television camera changes, and as a result, the optical path length passing through the light reflecting portion changes.
Therefore, the posture of the optical path changing means with respect to the liquid crystal display panel and the television camera can be two-dimensionally adjusted by the first and second adjustment mechanisms, and the image taken by the television camera can be two-dimensionally adjusted.

According to the present invention, since the optical path changing means for directing the light from the liquid crystal display panel to the television camera is provided, there is no need to provide the television camera above the measurement stage.
Therefore, the height of the device is smaller than that of the conventional device. Further, since the first and second adjustment mechanisms for adjusting the angular rotation positions of the optical path changing means around the first and second axes are provided, it is possible to easily correct the imaging state of the television camera.

[0011] In a preferred embodiment, the support mechanism comprises:
A first support for rotatably supporting the optical path changing means about the first axis, and a second support for rotatably supporting the first support angularly about the second axis; A first support mechanism for adjusting the rotational position of the optical path changing means about the first axis with respect to the first support, and a second adjustment mechanism for adjusting the rotational position of the optical path changing means relative to the first axis. The rotational position of the first adjustment mechanism about the second axis is adjusted to adjust the rotational position of the optical path changing means around the first axis.

The first adjusting mechanism includes a first adjusting screw screwed to the first support and having a distal end in contact with the optical path changing means, and an optical path changing means connected to the distal end of the first adjusting screw. A first elastic body that presses, a second adjusting mechanism that is screwed to the second support, and has a second adjusting screw whose tip abuts the first support; A second elastic body that presses the support against the tip of the second adjustment screw. Thus, the incident angle and the reflection angle of the light beam with respect to the optical path changing means can be accurately adjusted by the simple supporting mechanism and the adjusting mechanism.

Further, a mark plate arranged on the measurement stage instead of the liquid crystal display panel when operating the first and second adjustment mechanisms, wherein the mark plate has a reference mark which can be picked up by a television camera. And processing means for displaying a mark image corresponding to the fiducial mark and the fiducial mark so as to be visually superimposed using an output signal of the television camera. Thus, by operating the first and second adjustment mechanisms so that the mark image matches the reference mark on the processing means, it is possible to accurately and easily adjust the image captured by the television camera.

The first and second axes may extend in directions perpendicular to each other, and may extend in directions perpendicular to the axis perpendicular to the light reflecting surface. Also,
The light path changing means can change the light path of the light to a direction having an angle with respect to the vertical direction.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS. 1 to 3, an inspection apparatus 10 includes a main body 14 for inspecting a liquid crystal display panel 12. FIG.
And a loader section 16 for disposing the liquid crystal display panel 12 on the main body section 14 and removing the liquid crystal display panel 12 from the main body section 14, and a tester section 18 for automatically inspecting the liquid crystal display panel 12 disposed on the main body section 14. The loader unit 16 is disposed on the right side of the main unit 14, and the tester unit 18 is disposed on the left side of the main unit 14.

The main body 14 has a frame or housing 20 formed by a plurality of steel members such as angle members and a plurality of panels attached to the steel members by a plurality of screw members to partition an internal space from an external space. Is provided. In the main body 14, a measurement stage 22, a probe unit 24 for inspection, and an optical path changing unit 28 for changing the optical path of the light 26 from the liquid crystal display panel 12 are arranged.

The upper portion of the front of the housing 20 is provided with an opening for viewing the measurement stage 22 and the liquid crystal display panel 12. The opening can be opened in a double-opening manner by a pair of doors 30 hinged to the housing 20. It is closed.

The measurement stage 22 is provided on the liquid crystal display panel 12.
Has an upward receiving portion 22a that supports the main body in a substantially horizontal state. The position of the receiving portion 22a can be adjusted three-dimensionally (in three directions: front and rear, left and right, and up and down). Receiving part 22a
Is also capable of adjusting an angular rotation position about an axis perpendicular to the liquid crystal display panel 12 on the receiving portion 22a. The receiving portion 22a is formed by an appropriate means such as a vacuum chuck which receives the liquid crystal display panel 12 in a non-displaceable manner.

The probe unit 24 includes the measuring stage 2
2 is provided above the receiving portion 22a, and is provided with a plurality of probes for inspection to be brought into contact with the terminals of the liquid crystal display panel 12. Further, the door 30 is opened to open the measurement stage 2
2 has a rectangular opening for viewing the upper liquid crystal display panel 12 from above.

The optical path changing means 28 is provided on the inside of the housing 20 via the supporting means 32 so as to direct the light 26 from the liquid crystal display panel 12 on the measuring stage 22 substantially horizontally toward the upper part of the tester section 18. It is assembled. The optical path changing unit 28 changes the optical path of the light 26 by 90 degrees. The support means 32 will be described later with reference to FIGS.

In the example shown in the figure, an optical path changing means 28 for an axis perpendicular to the liquid crystal display panel 12 on the measuring stage 22 is provided.
Is 45 degrees, but may be another angle, and therefore, the incident angle and the reflection angle of the light 26 with respect to the optical path changing unit 28 may be angles other than 45 degrees. The optical path changing unit 28 is a reflecting mirror in the illustrated example.
Other means such as a prism may be used.

The loader section 16 includes a cassette mounting table 34,
It includes a gantry 36 and a robot 38 movably received in the gantry in the left-right direction. The cassette mounting table 34 receives a plurality of cassettes 40 containing a plurality of liquid crystal display panels on an upper surface. The robot 38 takes out the liquid crystal display panel to be inspected from the appropriate cassette 40 on the cassette mounting table 34 and transports the liquid crystal display panel to be inspected to the measurement stage 22 every time the inspection is performed. Transfer or return to a predetermined cassette 40 on the cassette mounting table 34.

A camera stage 42 is arranged above the tester section 18. The camera stage 42 has a mounting portion 42a that supports the television camera 44 in a position where its optical axis is substantially horizontal. The position of the mounting portion 42a of the camera stage 42 can be adjusted three-dimensionally (in three directions: front and rear, left and right, and up and down).

The television camera 44 is moved from the optical path changing unit 28 to the liquid crystal display panel 1 on the measuring stage 22 so that the optical axis thereof coincides with the axis of the light reflected by the optical path changing unit 28.
It is supported laterally at a position parallel to the horizontal direction and separated from the horizontal direction. The mounting portion 42a is also capable of adjusting the rotation angle around the optical axis of the television camera 44, that is, the angular rotation position, and is also capable of adjusting the angular rotation position around an axis extending in the vertical direction.

At the time of inspection, in a state where the opening of the housing 20 is closed by the door 30 and the inside of the housing 20 is shielded from external light,
The liquid crystal display panel 12 on the measurement stage 22 is driven. Thus, the light 26 from the liquid crystal display panel 12 is reflected by the optical path changing unit 28 and directed to the television camera 44, and the image of the liquid crystal display panel 12 is reflected by the television camera 44 by the optical path changing unit 28. I have.

In the above state, the television camera 44 is driven to photograph, ie, photograph, the liquid crystal display panel 12 via the optical path changing means 28. The output signal of the TV camera 44 is
It is used by a processing circuit (not shown) to determine the quality of the liquid crystal display panel 12. At the time of inspection, the opening of the housing 20 is the door 30
As a result, external light does not enter the housing 20, so that the liquid crystal display panel 12 can be properly imaged by the television camera 44.

The optical path changing means 28 is provided on the liquid crystal display panel 12.
Is changed in the horizontal direction toward the television camera 44. This eliminates the necessity of providing the television camera 44 above the measurement stage 22, and provides an advantage that the height of the device is smaller than that of the device in which the television camera is provided above the measurement stage. However, depending on the attitude of the optical path changing unit 28 with respect to the liquid crystal display panel 12 and the television camera 44, the optical path changing unit 28 may have an optical path length reaching the television camera 44 from the liquid crystal display panel 12 via the optical path changing unit 28.
There is a possibility that different disadvantages may be caused for each light reflection portion.

If the optical path length passing through the optical path changing means 28 is different for each light reflecting portion, the image picked up by the television camera is distorted. It is desirable that they be the same at the site. However, in practice, since the measurement stage 22, the optical path changing means 28, and the camera stage 42 are separately assembled, it is difficult to assemble the inspection apparatus so that the optical path lengths of all the light reflecting portions are the same.

In order to solve the above problems, the support means 32
Supports the light path changing means 28 so that the attitude of the light path changing means 28 with respect to the liquid crystal display panel 12 and the television camera 44 can be adjusted two-dimensionally. More specifically, as shown in FIG. 3 and FIG.
A support mechanism that adjustably supports a rotation angle of first and second axes 50 and 52 that are orthogonal to an axis 48 of the optical path changing unit 28 that is orthogonal to the light reflecting surface 46 and that are orthogonal to each other; Optical path changing means 28 around
A first adjusting mechanism for adjusting the rotational position of the
And a second adjustment mechanism for adjusting the rotational position of the optical path changing means 28 around the second position.

Referring to FIGS. 3 and 4, the support mechanism comprises a first support 54 for supporting the optical path changing means 28 so as to be rotatable about a first axis 50 at an angle, and the first support 54. A second support 56 for supporting the support angularly rotatable about a second axis 52. The first adjustment mechanism is
A first adjusting screw 58 screwed into a screw hole of the first support 54 and having a distal end abutting on the optical path changing unit 28; and a first adjusting screw 58 pressing the optical path changing unit 28 against the distal end of the first adjusting screw 58. And an elastic body 60. The second adjusting mechanism includes a second adjusting screw 62 screwed to the second supporting member 56 and having a tip abutting on the first supporting member 54, and a second adjusting screw 62 for connecting the first supporting member 54 to the second adjusting screw 62. And a second elastic body 64 pressed against the tip of the second elastic body.

First and second supports 54 and 56
Supports the optical path changing means 28 and the first support 54 by a pair of pivot pins 66 and 68, respectively, so as to be angularly rotatable about the first and second axes 50 and 52, respectively. The first and second elastic bodies 64 and 66 are:
In the illustrated example, a tension coil spring is used, but another elastic member such as a compression coil spring or rubber may be used.

When the screwing amount of the adjusting screw 58 into the support 54 is changed, the optical path changing means 28 is angularly rotated around the axis 50, and the angular rotation position of the optical path changing means 28 around the axis 50 is changed. Changes. In addition, the support 5
6, the support 54 is angularly rotated about the axis 52 together with the optical path changing means 28 so that the support 54 around the axis 52 is rotated.
And the angular rotation position of the optical path changing means 28 changes.

As described above, the first and second axes 50
When the angular rotational position of the light path changing means 28 around the light path changing means 28 changes around
Of the light path changing means 28 with respect to the liquid crystal display panel 12 and the television camera 44, the light path length of the light path changing means 28 passing through the light reflecting portion changes. Therefore, the attitude of the optical path changing means 28 with respect to the liquid crystal display panel 12 and the television camera 44 can be two-dimensionally adjusted by the adjustment screws 58 and 62, and as a result, the distortion of the image captured by the television camera 44 can be easily corrected. Can be.

In order to more easily correct the imaging state of the television camera, as shown in FIG. 3, the inspection device 10 includes a mark plate 70, an image processing device 72 for processing an output signal of the television camera 44, And a monitor 74 for reproducing the processing device 72. The mark plate 70 has a cross-shaped reference mark that can be picked up by the television camera 44. When the adjusting screws 58 and 62 are operated, the measurement stage 2 is moved by the loader unit 16 instead of the liquid crystal display panel.
The second receiving portion 22a is disposed.

The image processing device 72, as shown in FIG.
The output signal of the television camera 44 when the mark plate 70 is disposed in the receiving portion 22a is subjected to image processing, and a mark image 76 corresponding to the reference mark of the mark plate 70 is formed.
And a reference mark 78 pre-stored in the memory, are visually displayed on the monitor 74, and the mark image 7
A character corresponding to the difference on the XY coordinates between the reference mark 78 and the reference mark 78 is displayed on the monitor 74 so as to be visible. Fiducial mark 78
Are stored so as to match the reference marks of the mark plate 70 when the mark plate 70 is correctly arranged on the receiving portion 22a.

For example, as shown in FIG.
6 and the reference mark 78 can be displayed in a superimposed state with their origins (X ₀ , Y ₀ ) coincident. The difference between the mark image 76 and the reference mark 78 on the XY coordinates is calculated and calculated as the difference (X = ± α, Y = ± β) between the coordinate values of each corner of the cross-shaped mark. Values can be displayed.

At the time of correction, the mark plate 70 is
6, the mark plate 70 on the receiving portion 22a is imaged by the television camera 44, and an output signal of the television camera 44 is processed by the image processing device 72. Thereby, for example, FIG.
The images shown in (A) and (B) are displayed on the monitor 74.

For this reason, the operator adjusts the adjusting screw 5 so that the difference between the coordinate values of each corner of the cross-shaped mark becomes zero.
By adjusting the screw-in amounts of the screws 8 and 62, the attitude of the optical path changing unit 28 with respect to the liquid crystal display panel 12 and the television camera 44 is two-dimensionally adjusted, and the imaging state of the television camera 44 and the distortion of the image captured by the television camera 44 are distorted. Can be easily and accurately corrected.

As shown in FIG. 5A, the mark image 76
When the mark is greatly distorted with respect to the reference mark 78, the mark image 76 and the reference mark 78 can be identified with the naked eye. Adjusting screw 5 to approach
The positions of the optical path changing means 28 can be adjusted by the positions 8 and 62. Therefore, in this case, the character corresponding to the difference on the XY coordinates between the mark image 76 and the reference mark 78 may or may not be displayed on the monitor 74.

However, as shown in FIG. 5B, when the mark image 76 is approaching the reference mark 78, the operator cannot recognize the mark image 76 and the reference mark 78 with the naked eye. The difference between the coordinate values displayed on the monitor 74 (X
= ± α, Y = ± β) to zero.
The positions of the optical path changing means 28 can be adjusted by the positions 8 and 62.

Instead of assembling the support means 32 to the housing 20, the support means 32 may be assembled to another means. Further, instead of receiving the liquid crystal display panel 12 in a state substantially horizontal to the measurement stage 22, the liquid crystal display panel 12 may be received in a state inclined to the measurement stage 22.
FIGS. 6 and 7 show an embodiment of an inspection device 80 that receives the liquid crystal display panel 12 in a state inclined to the measurement stage 22. FIG.

Referring to FIG. 6 and FIG.
0, the loader unit 16 is arranged on the rear side of the main unit 14 and the tester unit 18 is arranged on the left side of the main unit 14. Case 2
The upper part of the front side of the reference numeral 0 is an inclined part 82, and the inclined part 82 is formed by the measuring stage 22 and the probe unit 24.
Has an opening at a position corresponding to the arrangement position. The probe unit 24 is arranged on the side of the opening of the inclined portion 82 with respect to the receiving portion 22 a of the measurement stage 22.

The measurement stage 22 and the probe unit 24 are inclined so as to receive the liquid crystal display panel 12 obliquely with respect to the horizontal line and the vertical line at the receiving portion 22a. The receiving portion 22 a is also inclined obliquely upward so as to be parallel to the inclined portion 82 of the housing 20. Therefore, the liquid crystal display panel 12 is supported so as to face forward and upward.

In the embodiment shown in FIGS. 6 and 7, the receiving portion 2
The position of 2 a can be adjusted three-dimensionally in the directions of two axes perpendicular to each other in a plane parallel to the inclined portion 82 and in the directions of axes perpendicular to the upper surface of the measurement stage 22. The receiving portion 22a is capable of adjusting an angular rotation position about an axis perpendicular to the liquid crystal display panel 12 on the receiving portion 22a.

The opening of the inclined portion 82 has an area larger than that of the measurement stage 22 and the probe unit 24 and is opened and closed by a box-shaped shield cover 84 that shields the inside of the housing 20 from the outside. . Cover 8
4 is one or more hinges 86 at the top in the example shown.
, So that it can be pivotally mounted to the housing 20.
However, in FIG. 6, the cover 84 is positioned at the left end, the right end,
The housing 2 is provided at another portion such as a lower portion, a diagonally upper portion, and a diagonally lower portion.
You may butterfly on 0.

The light path changing means 28 is assembled to the cover 84 by the support means 32 shown in FIGS. For this reason, the optical path changing means 28 can adjust the angular rotation position around the first and second axes 50 and 52. The optical path changing unit 28 is disposed inside the cover 84 so as to direct the light 26 from the liquid crystal display panel 12 on the measurement stage 22 substantially horizontally toward the upper part of the tester unit 18. Change the optical path by 90 degrees.

At the time of the automatic inspection, the opening of the housing 20 is closed by the cover 84 as shown by a solid line in FIGS. Therefore, the optical path changing unit 28 is positioned at the first position for directing the light 26 from the liquid crystal display panel 12 disposed on the measurement stage 22 toward the television camera 44, as shown by the broken lines in FIGS. It is being moved, and the image on the liquid crystal display panel 12 is reflected by the television camera 44. In this state, the liquid crystal display panel 12 is driven, and the television camera 44 takes an image of the liquid crystal display panel 12 via the optical path changing means 28, that is, an image.

At the time of visual inspection, the cover 84 is
The hinge 86 is rotated around the pivot axis as shown by the dashed line, and the opening of the inclined portion 82 is opened. As a result, the optical path changing unit 28 is moved from the liquid crystal display panel 12 to the second position deviated from the optical path incident on the optical path changing unit 28, so that the liquid crystal display panel 12 on the measurement stage 22 can be visually observed through the opening. Can be inspected. Cover 84
Is releasably maintained by a suitable stopper (not shown) at a position where the viewing of the liquid crystal display panel 12 is not prevented.

The manual visual inspection may be performed when it is difficult to determine whether or not the defect is a defect in the automatic inspection using a television camera. In other cases, for example, when the number of liquid crystal display panels to be inspected is small. You may go to. In the latter case, the liquid crystal display panel 12 may be manually placed on the measurement stage 22 and removed from the measurement stage 22. Further, the liquid crystal display panel determined to be defective by the visual inspection may be manually removed from the measurement stage 22 or the delivery mechanism without using the robot 38.

Liquid crystal display panel 12 and television camera 4
As described above, the attitude of the light path changing means 28 with respect to 4 can be adjusted two-dimensionally by the support means 32, and therefore, the distortion of the photographed image caused by the light path changing means 28 can be corrected by the adjusting screws 58, 62. Can be.

According to the inspection device 80, the opening is formed above the front surface of the housing 20, and the liquid crystal display panel 12 is supported in a position inclined with respect to the horizontal and vertical lines, that is, in a position facing the opening. From the liquid crystal display panel 12
Can be visually observed obliquely from above in front of the inspection apparatus 10, and therefore, the liquid crystal display panel 12 can be easily and correctly visually observed.

The adjustment of the attitude of the optical path changing means 28 by the support means 32 is performed not only when the inspection apparatus is assembled, but also when the receiving part 22a is replaced, when the television camera 44 is replaced, and when the television camera 44 is replaced. Then, it can be performed at an appropriate time after assembly, such as during maintenance and inspection.

The present invention is not limited to the above embodiment. For example, the direction in which the optical path is changed by the optical path changing unit 28 does not need to be an accurate horizontal direction, and may be oblique.
Further, in the inspection device 50, the cover 84 supporting the optical path changing unit 28 may be moved in the left / right or up / down direction with respect to the inclined portion 82 of the housing 20, or may be detached from the housing 20. Is also good. In addition, axis 4
8, 50, 52 need not be the axes at which they are orthogonal, but may be the axes at which they intersect each other.

[Brief description of the drawings]

FIG. 1 is a front view showing an embodiment of an inspection device according to the present invention.

FIG. 2 is a plan view of the inspection device of FIG.

FIG. 3 is a view showing one embodiment of a support means for an optical path changing means.

FIG. 4 is a view of the support means shown in FIG. 3 as viewed obliquely from the upper right.

FIG. 5 is a diagram for explaining a method of correcting a posture of an optical path changing unit.

FIG. 6 is a right side view showing another embodiment of the inspection apparatus according to the present invention.

FIG. 7 is a plan view of the inspection device of FIG. 6;

[Explanation of symbols]

 Reference Signs List 10,80 Inspection apparatus 12 Liquid crystal display panel 14 Main body 16 Loader section 18 Tester section 20 Housing 22 Measurement stage 24 Probe unit for inspection 26 Light from liquid crystal display panel 28 Optical path changing means 32 Support means for optical path changing means 42 Camera Stage 44 Television Camera 46 Light Reflecting Surface of Optical Path Changing Means 48 Axis Line perpendicular to Light Reflecting Surface of Optical Path Changing Means 50, 52 First and Second Axis Lines 54, 56 First and Second Supporters 58, 62 First and second adjusting screws 60, 64 First and second elastic members 84 Shield cover

Claims (6)

[Claims] 1. A measuring stage on which a liquid crystal display panel is disposed, a television camera for imaging the liquid crystal display panel disposed on the measuring stage, and a light reflecting surface for directing light from the liquid crystal display panel to the television camera. An optical path changing unit; and a supporting unit that supports the optical path changing unit so that an incident angle and a reflection angle of light with respect to the optical path changing unit can be changed. The supporting unit intersects the optical path changing unit with the light reflecting surface at right angles. A support mechanism rotatably supporting the first and second axes that intersect with and extend in the direction intersecting with each other, and the rotation of the optical path changing means around the first axis. A first adjusting mechanism that adjusts a position, and a second adjusting mechanism that adjusts a rotational position of the optical path changing unit around the second axis.
Inspection equipment for liquid crystal display panels. 2. A first mechanism for supporting said optical path changing means so as to be angularly rotatable about said first axis.
And a second support for supporting the first support rotatably at an angle around the second axis, wherein the first adjusting mechanism is configured to rotate the first support along the first axis. The rotation position of the light path changing means around the first support is adjusted with respect to the first support, and the second adjustment mechanism adjusts the rotation position of the light path changing means around the second axis. 2
The inspection apparatus according to claim 1, wherein a rotation position of the first adjustment mechanism about an axis of the first adjustment mechanism is adjusted. 3. The first adjustment mechanism includes: a first adjustment screw screwed to the first support and having a tip abutting on the optical path changing unit; A first elastic body that presses against the tip of the adjusting screw, wherein the second adjusting mechanism is screwed to the second support and the tip of which is in contact with the first support. 2 adjusting screw and the first adjusting screw
The inspection device according to claim 2, further comprising: a second elastic body that presses the supporting member of the second adjustment screw against the tip of the second adjustment screw. 4. A reference plate which is arranged on the measurement stage instead of a liquid crystal display panel when operating the first and second adjustment mechanisms, and forms a reference mark which can be imaged by the television camera. 4. The processing device according to claim 1, further comprising a mark plate provided, and a processing unit configured to visually and superimposedly display a mark image corresponding to the reference mark and a reference mark using an output signal of the television camera. 5. Inspection equipment. 5. The method according to claim 1, wherein the first and second axes extend in directions orthogonal to each other and extend in a direction orthogonal to the axis orthogonal to the light reflecting surface. Inspection device as described. 6. The optical path changing means for changing an optical path of the light in a direction having an angle with respect to a vertical direction.
The inspection device according to any one of the above items 5.