JPH10115502A - Sensor for detecting change of magnetic field - Google Patents
Sensor for detecting change of magnetic fieldInfo
- Publication number
- JPH10115502A JPH10115502A JP9189414A JP18941497A JPH10115502A JP H10115502 A JPH10115502 A JP H10115502A JP 9189414 A JP9189414 A JP 9189414A JP 18941497 A JP18941497 A JP 18941497A JP H10115502 A JPH10115502 A JP H10115502A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- resistor
- substrate
- magneto
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/147—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the movement of a third element, the position of Hall device and the source of magnetic field being fixed in respect to each other
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measuring Magnetic Variables (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、磁気抵抗性の材料
からなる抵抗を有し、この抵抗の抵抗値は、抵抗を貫通
する磁界の強さと方向とに依存し、この磁界は外部の金
属体により影響されるものであり、検出回路を有し、こ
の検出回路の出力信号は、抵抗の変化の量に依存する、
磁界の変化を検出するためのセンサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention has a resistor made of a magneto-resistive material, and the resistance of the resistor depends on the strength and direction of a magnetic field penetrating the resistor. Being affected by the body, having a detection circuit, the output signal of which is dependent on the amount of change in resistance,
The present invention relates to a sensor for detecting a change in a magnetic field.
【０００２】[0002]
【従来の技術】すでにヨーロッパ特許０４２７８８２号
明細書から、次のような装置が公知である。すなわち、
永久磁石が運動体として、磁界に感応するセンサの領域
において運動する装置である。運動体の運動はこの公知
の装置では、構造的に定められる間隔において、センサ
の面と平行に行われる。定置のセンサとしてここではい
わゆる磁気抵抗センサが存在する。このセンサは、セン
サの感応層の面において異方性磁気抵抗（ＡＭＲ）効果
を利用して、磁界の強さの変化または磁束の変化を磁石
の運動に基づいて検出する。2. Description of the Related Art The following device is already known from EP 0 427 882 A1. That is,
A device in which a permanent magnet moves as a moving body in the area of a sensor sensitive to a magnetic field. In this known device, the movement of the moving body takes place at structurally defined intervals parallel to the plane of the sensor. Here, a so-called magnetoresistive sensor exists as a fixed sensor. This sensor utilizes the anisotropic magnetoresistance (AMR) effect on the surface of the sensitive layer of the sensor to detect a change in magnetic field strength or a change in magnetic flux based on the motion of the magnet.
【０００３】この公知の装置でのセンサは、そのつど１
つのブリッジを構成するように接続された、磁界に感応
する複数の抵抗から形成される。この抵抗の抵抗値は、
磁力線が貫通する際に感応面において変化し、それによ
りブリッジの離調を導く。そのためブリッジの出力信号
が検出信号として供給される。The sensors in this known device are:
It is formed from a plurality of magnetic field-sensitive resistors connected to form one bridge. The resistance of this resistor is
As the field lines penetrate, they change in the sensitive surface, thereby leading to detuning of the bridge. Therefore, the output signal of the bridge is supplied as a detection signal.
【０００４】[0004]
【発明が解決しようとする課題】本発明の課題は、冒頭
に述べた形式のセンサを提供して、簡単な手段により、
磁力線の分布が周期的に凹入部によって、検出すべき物
体の表面で変更されまたは変調されるようにすることで
ある。SUMMARY OF THE INVENTION The object of the invention is to provide a sensor of the type mentioned at the outset and by simple means
The distribution of the magnetic field lines is periodically changed or modulated by the indentations on the surface of the object to be detected.
【０００５】[0005]
【課題を解決するための手段】この課題は、金属体は、
規則的に配設された凹入部を備えており、この凹入部は
連続して磁気抵抗板を通過することができ、この磁気抵
抗板は、センサの後部に配設された磁石の磁力線を切断
するようにセンサを構成して解決される。SUMMARY OF THE INVENTION The object of the present invention is to provide a
It has regularly arranged recesses, which can pass continuously through the magnetoresistive plate, which cuts the magnetic field lines of the magnets arranged at the rear of the sensor. The problem is solved by configuring the sensor so that
【０００６】[0006]
【発明の実施の形態】冒頭に述べた形式のセンサは、請
求項１に記載の特徴部分を有する本発明による別の実施
例においては、次のことにより有利である。すなわち簡
単な手段により、磁力線の分布が周期的に凹入部によっ
て、検出すべき物体の表面で変更されまたは変調され
る。有利な回転角センサとしての適用例においては、回
転速度と、ホイールの単純な回転角度の変化とが、凹入
部がホイールの外側の表面に存在してセンサの磁気抵抗
板を通過する場合に検出される。A sensor of the type described at the outset is advantageous in a further embodiment of the invention having the features of claim 1 by the following. That is, by simple means, the distribution of the magnetic field lines is periodically changed or modulated by the indentations on the surface of the object to be detected. In an advantageous rotation angle sensor application, the rotation speed and a simple change in the rotation angle of the wheel are detected when a recess is present on the outer surface of the wheel and passes through the magnetoresistive plate of the sensor. Is done.
【０００７】磁力線の分布が充分に検出されるのは、磁
気抵抗板の基板の層の厚さが、フェライトの場合には
０.２ｍｍよりも小さく、シリコンの場合には約０.０５
ｍｍである場合である。薄い基板を使用すれば、磁気抵
抗板の磁石と、検出すべき表面との間隔をわずかにする
ことができる。そのことにより、比較的高い磁気誘導が
この領域において生じ、分解能が磁力線の変調において
改善される。The distribution of the lines of magnetic force is sufficiently detected because the thickness of the substrate layer of the magnetoresistive plate is smaller than 0.2 mm in the case of ferrite and approximately 0.05 in the case of silicon.
mm. If a thin substrate is used, the distance between the magnet of the magnetoresistive plate and the surface to be detected can be made small. Thereby, relatively high magnetic induction occurs in this region, and the resolution is improved in the modulation of the field lines.
【０００８】特に有利には軟磁性材料を基板として使用
する。例えば、純鉄、鋼、ＳｉＦｅ合金、ＣｏＦｅ合
金、ＮｉＦｅ合金を使用するのである。この基板と磁気
抵抗性の抵抗素子との間に電気的絶縁層が存在する。高
い飽和磁束密度を有するこの基板においては、全磁束に
おける変調された磁束の成分は上昇する。磁気抵抗性の
抵抗の個所での磁界の変化量と検出装置の出力信号とは
これにより有利に拡大される。[0008] Particularly preferably, a soft magnetic material is used as the substrate. For example, pure iron, steel, SiFe alloy, CoFe alloy, and NiFe alloy are used. An electrical insulating layer exists between the substrate and the magnetoresistive resistance element. In this substrate having a high saturation flux density, the component of the modulated flux in the total flux rises. The variation of the magnetic field at the point of the magnetoresistive resistance and the output signal of the detection device are thereby advantageously magnified.
【０００９】さらに有利な実施形態により、磁気抵抗性
の抵抗は、薄い絶縁層を介して直接に磁石の上に構成さ
れる。これによりさらに間隔が低減され、組立も容易に
なる。[0009] According to a further advantageous embodiment, the magnetoresistive resistor is constructed directly on the magnet via a thin insulating layer. This further reduces the spacing and facilitates assembly.
【００１０】[0010]
【実施例】本発明によるセンサの実施例を図面に即して
説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a sensor according to the present invention will be described with reference to the drawings.
【００１１】図１には磁気抵抗板１が示されている。こ
の磁気抵抗板は、基板２の上に構成された磁気抵抗性の
抵抗３から形成される。磁気抵抗板１に磁石４が配置さ
れる。この磁石の磁力線を、磁気抵抗板１と、磁気抵抗
板１に対向して配置される金属体５とが切断する。金属
体５は図示の実施例においてはホイールである。このホ
イールは、ホイールの外側の表面に、周期的に連続して
配設される凹入部６を有する。ホイール５が回転するこ
とにより凹入部６で磁気抵抗板１を通過すると、磁石４
の磁束は、磁気抵抗板１の領域においても、凹入部６の
通過の際に変調される。なぜなら、磁力線または磁束は
ここでは変更された経路をとるからである。FIG. 1 shows a magnetoresistive plate 1. This magnetoresistive plate is formed from a magnetoresistive resistor 3 formed on a substrate 2. The magnet 4 is arranged on the magnetoresistive plate 1. The lines of magnetic force of the magnet are cut by the magnetoresistive plate 1 and the metal body 5 arranged to face the magnetoresistive plate 1. The metal body 5 is a wheel in the illustrated embodiment. This wheel has indentations 6 arranged on the outer surface of the wheel, periodically and continuously. When the wheel 5 rotates and passes through the magnetoresistive plate 1 at the recess 6, the magnet 4
Is also modulated in the region of the magnetoresistive plate 1 when passing through the recess 6. This is because the lines of magnetic force or magnetic flux take a modified path here.
【００１２】こうした磁束変化の評価は、公知のヨーロ
ッパ特許０４２７８８２号明細書に説明されている手段
により、ミアンダ状に磁気抵抗板１の上に配置される磁
気抵抗性の抵抗３を介して行われる。この抵抗の抵抗値
は磁束変化の場合に同様に変化する。評価すべき信号の
分解能を高めるために、特に薄い材料が基板に適してい
る。この基板は、例えば０.２ｍｍよりも薄いフェライ
ト、または約０.０５ｍｍの厚さのシリコンから成る。The evaluation of such a change in the magnetic flux is carried out by means described in the known European patent 0427882 via a magnetoresistive resistor 3 arranged on the magnetoresistive plate 1 in a meandering manner. . The resistance value of this resistor also changes in the case of a magnetic flux change. In order to increase the resolution of the signal to be evaluated, particularly thin materials are suitable for the substrate. This substrate is made of, for example, ferrite thinner than 0.2 mm or silicon having a thickness of about 0.05 mm.
【００１３】磁気抵抗板１が拡大されている実施形態
が、図２に示されている。ここでは磁気抵抗板１の基板
２は、軟磁性材料、例えば純鉄、鋼、ＳｉＦｅ合金、Ｃ
ｏＦｅ合金、ＮｉＦｅ合金から形成されている。これら
の材料での高い飽和磁束密度のもとでは、全磁束におけ
る変調された磁束の成分はきわだって上昇する。基板２
と抵抗３との間に、この実施例においては電気的絶縁層
９が配設される。An embodiment in which the magnetoresistive plate 1 is enlarged is shown in FIG. Here, the substrate 2 of the magnetoresistive plate 1 is made of a soft magnetic material such as pure iron, steel, SiFe alloy, C
It is formed from an oFe alloy or a NiFe alloy. Under high saturation flux densities in these materials, the component of the modulated flux in the total flux rises significantly. Substrate 2
In this embodiment, an electric insulating layer 9 is provided between the resistor 3 and the resistor 3.
【００１４】図３の実施例によれば、磁気抵抗性の抵抗
３は絶縁層９を介して直接に磁石４に構成される。According to the embodiment of FIG. 3, the magneto-resistive resistor 3 is formed directly on the magnet 4 via the insulating layer 9.
【図１】ホイールに対向して配置される、変調器または
パルス発振器としてのセンサの基本図である。FIG. 1 is a basic view of a sensor as a modulator or a pulse generator, which is arranged opposite a wheel.
【図２】軟磁性の基板を有するセンサの実施例の図であ
る。FIG. 2 is a diagram of an embodiment of a sensor having a soft magnetic substrate.
【図３】直接に磁石に配設された抵抗を有するセンサの
実施例の図である。FIG. 3 is an illustration of an embodiment of a sensor having a resistance disposed directly on a magnet.
１ 磁気抵抗板 ２ 基板 ３ 抵抗 ４ 磁石 ５ ホイール ６ 凹入部 ９ 絶縁層 DESCRIPTION OF SYMBOLS 1 Magnetoresistive board 2 Substrate 3 Resistance 4 Magnet 5 Wheel 6 Depressed part 9 Insulating layer
───────────────────────────────────────────────────── フロントページの続き (72)発明者 ユルゲン メッシンガー ドイツ連邦共和国 ヴァインスベルク−ヴ ィメンタール アム フロイデンベルク １ (72)発明者 マッティアス シュネル ドイツ連邦共和国 ヴィンターバッハ ヴ ェスターガッセ 11 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Jürgen Messinger Germany Weinsberg-Wimental am Freudenberg 1 (72) Inventor Mattias Schnell Germany Winterberg-Westergasse 11
Claims (6)
有し、 該抵抗の抵抗値は、該抵抗を貫通する磁界の強さと方向
とに依存し、 該磁界は外部の金属体（５）により影響されるものであ
り、 検出回路を有し、 該検出回路の出力信号は抵抗の変化の量に依存する、磁
界の変化を検出するためのセンサにおいて、 前記金属体（５）は、規則的に配設された凹入部（６）
を備えており、 該凹入部は連続して磁気抵抗板（１）を通過することが
でき、 該磁気抵抗板は、センサの後部に配設された磁石（４）
の磁力線を切断する、ことを特徴とする磁界の変化を検
出するためのセンサ。A resistor (3) made of a magneto-resistive material, wherein the resistance value of the resistor depends on the strength and direction of a magnetic field penetrating the resistor, and the magnetic field is an external metal body (3). A sensor for detecting a change in a magnetic field, the output signal of the detection circuit being dependent on the amount of change in resistance, wherein the metal body (5) is , Regularly arranged recesses (6)
The recessed portion can continuously pass through the magnetoresistive plate (1), and the magnetoresistive plate is provided with a magnet (4) disposed at the rear of the sensor.
A sensor for detecting a change in a magnetic field, wherein the sensor cuts a magnetic line of force.
記凹入部（６）は、該ホイール（５）の外側を取りまい
て配設されている、請求項１記載のセンサ。2. The sensor according to claim 1, wherein the metal body (5) is a wheel, and the recess (6) is arranged around the outside of the wheel (5).
抵抗板の基板（２）の上に構成され、該基板（２）は
０.２ｍｍよりも薄いフェライトである、請求項１また
は２に記載のセンサ。3. The magnetoresistive plate according to claim 1, wherein the resistor is configured in a meandering manner on a substrate of the magnetoresistive plate, the substrate being a ferrite thinner than 0.2 mm. The sensor according to claim 1.
のシリコンである、請求項１または２に記載のセンサ。4. The sensor according to claim 1, wherein the substrate (2) is approximately 0.05 mm thick silicon.
する軟磁性材料であり、該基板（２）と前記抵抗（３）
との間に電気的絶縁層（９）が配設されている、請求項
１または２に記載のセンサ。5. The substrate (2) is made of a soft magnetic material having a high saturation magnetic flux density, and the substrate (2) and the resistor (3)
Sensor according to claim 1 or 2, wherein an electrically insulating layer (9) is arranged between the sensor and the sensor.
を介して直接に磁石の上に構成されている、請求項１ま
たは２に記載のセンサ。6. The meandering resistor (3) comprises an insulating layer (9).
The sensor according to claim 1, wherein the sensor is configured directly on the magnet via a sensor.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19628566.6 | 1996-07-16 | ||
| DE1996128566 DE19628566A1 (en) | 1996-07-16 | 1996-07-16 | Magnetic field sensitive sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10115502A true JPH10115502A (en) | 1998-05-06 |
Family
ID=7799917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9189414A Pending JPH10115502A (en) | 1996-07-16 | 1997-07-15 | Sensor for detecting change of magnetic field |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPH10115502A (en) |
| DE (1) | DE19628566A1 (en) |
| FR (1) | FR2751408A1 (en) |
| GB (1) | GB2315333A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007127673A (en) * | 2007-02-22 | 2007-05-24 | Matsushita Electric Ind Co Ltd | Rotation speed sensor |
| JP2007240531A (en) * | 2006-03-08 | 2007-09-20 | Liebherr-France Sas | Localization system of hydraulic pressure cylinder |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19813569A1 (en) * | 1998-03-27 | 1999-04-15 | Bosch Gmbh Robert | Rotary angle sensor |
| US20080001596A1 (en) * | 2004-07-28 | 2008-01-03 | Carl Clayton | Machining Spindle Speed Probes |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5927115B2 (en) * | 1974-12-29 | 1984-07-03 | ソニー株式会社 | information detection device |
| EP0057766A3 (en) * | 1981-02-07 | 1984-07-18 | Hitachi, Ltd. | Magnetoelectrical transducer |
| US4533872A (en) * | 1982-06-14 | 1985-08-06 | Honeywell Inc. | Magnetic field sensor element capable of measuring magnetic field components in two directions |
| US4629982A (en) * | 1983-07-01 | 1986-12-16 | Transducer Systems, Inc. | Apparatus for detecting motion and direction using magnetoresistive sensors producing sum and difference signals |
| DE3435867A1 (en) * | 1984-09-29 | 1986-04-10 | Bosch Gmbh Robert | DIFFERENTIAL SENSOR |
| US4926122A (en) * | 1988-08-08 | 1990-05-15 | General Motors Corporation | High sensitivity magnetic circuit |
| DE69029153T2 (en) * | 1989-01-18 | 1997-06-19 | Nippon Denso Co | Magnetic detection device and physical quantity detection device using it |
| US5014147A (en) * | 1989-10-31 | 1991-05-07 | International Business Machines Corporation | Magnetoresistive sensor with improved antiferromagnetic film |
| AU9107391A (en) * | 1990-12-28 | 1992-08-17 | Kabushiki Kaisha Komatsu Seisakusho | Magnetic sensor and structure of its mounting |
| JP2720681B2 (en) * | 1992-01-06 | 1998-03-04 | 株式会社村田製作所 | Mobile object movement detection device |
| EP0580207A1 (en) * | 1992-07-16 | 1994-01-26 | General Motors Corporation | Method and device for sensing movement of a ferro-magnetic object |
| DE9312612U1 (en) * | 1993-08-23 | 1993-10-07 | Siemens Ag | Device for eliminating a temperature response in a position encoder, which has magnetic field-dependent resistances |
-
1996
- 1996-07-16 DE DE1996128566 patent/DE19628566A1/en not_active Withdrawn
-
1997
- 1997-07-02 GB GB9714035A patent/GB2315333A/en not_active Withdrawn
- 1997-07-15 JP JP9189414A patent/JPH10115502A/en active Pending
- 1997-07-16 FR FR9709004A patent/FR2751408A1/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007240531A (en) * | 2006-03-08 | 2007-09-20 | Liebherr-France Sas | Localization system of hydraulic pressure cylinder |
| JP2007127673A (en) * | 2007-02-22 | 2007-05-24 | Matsushita Electric Ind Co Ltd | Rotation speed sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2751408A1 (en) | 1998-01-23 |
| GB9714035D0 (en) | 1997-09-10 |
| DE19628566A1 (en) | 1998-01-29 |
| GB2315333A (en) | 1998-01-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3618466B2 (en) | Hall effect iron article proximity sensor | |
| JP3028377B2 (en) | Magnetoresistive proximity sensor | |
| US7126327B1 (en) | Asymmetrical AMR wheatstone bridge layout for position sensor | |
| US7112957B2 (en) | GMR sensor with flux concentrators | |
| JP6276283B2 (en) | Magnetic currency verification head | |
| JPH0280913A (en) | Position sensor | |
| JPH0252807B2 (en) | ||
| EP0842392A2 (en) | Gear tooth sensor with improved resolution and stability | |
| JP3487452B2 (en) | Magnetic detector | |
| EP0690296A3 (en) | Magnetostrictive sensor | |
| JP4338090B2 (en) | Magnetic powder adhesion medium or magnetic film adhesion medium detector | |
| JPH10115502A (en) | Sensor for detecting change of magnetic field | |
| JPH08320327A (en) | Magnetic sensor | |
| EP0265798B1 (en) | A magnetoresistive read transducer | |
| JP5086605B2 (en) | Moving body detection device | |
| US7026809B2 (en) | Magnetic sensor for detecting position and/or speed of a mobile target | |
| US6894486B2 (en) | Magnetic encoder with double Frequency output | |
| JPH04282481A (en) | Magnetoelectric converter | |
| JP2007516437A (en) | Magnet sensor device | |
| JP2619621B2 (en) | Encoder device | |
| JP2936684B2 (en) | Rotation sensor | |
| JP2005043209A (en) | Magnetic detection device | |
| JP2929714B2 (en) | Angle detector | |
| JPH081387B2 (en) | Magnetic sensor | |
| JP2001091526A (en) | Rotation detecting apparatus |