JPH10111259A - Inspection device of flaw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable miniaturization of the whole of a device by integrating a light source, a condenser and a photodetector array together. SOLUTION: A light source 2, a condenser 3 and a photodetector array 4 composed of a plurality of photodetectors are integrated in formation into a flow inspection device 1 by a housing member. On the occasion, the photodetectors in a plurality are disposed in a row on a plane of incidence of light from the light source 2 and, particularly, one of them is disposed at a position of regular reflection. The housing member can be prepared easily by plastic molding or sheet metal working. By integrating the light source 2, the condenser 3 and the photodetector array 4 together, the whole of the device is made compact and miniaturization thereof is enabled. By using the photodetector array 4, besides, a field of view can be regulated beforehand and a regulating operation thereafter can be dispensed with.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flaw inspection apparatus for optically detecting the presence or absence of flaws on the surface of a long object such as a steel plate or a film, or the surface of a disk-shaped member.

[0002]

2. Description of the Related Art As a conventional example of this type, a surface of a subject is illuminated by an illuminating unit, and reflected light from a certain line on the surface of the subject is imaged by an imaging unit such as a television camera. A technique for detecting the presence or absence of a flaw from a captured image is well known. However, in such a method, detection may not be possible depending on the size and type of the flaw, and there is a problem in detection accuracy.

[0003]

[0005] Therefore, the applicant of the present invention has proposed FIG.
(Japanese Patent Application No. 7-231)
No. 699 (filed on September 8, 1995: also referred to as a proposed device)). This is because when the three imaging devices 20A, 20B, and 20C are provided in such a manner that the three imaging devices 20A, 20B, and 20C are displaced in an arc shape by a predetermined angle around the regular reflection position corresponding to the incident light from the light source 10, a case in which the detection becomes impossible can be sufficiently performed. This is to improve the detection accuracy by reducing the number. An image pickup device 20B is provided at a position corresponding to the regular reflection position, and a total of three image pickup devices are provided, one on each side of the image pickup device. Generally, a plurality of image pickup devices can be provided. Reference numeral 21 denotes a condenser lens, reference numeral 22 denotes a light receiving element, and reference numeral 30 denotes an object.

[0004] However, the above method requires a plurality of imaging means, which makes it difficult to miniaturize the apparatus, and that it is difficult to match the positions of the fields of view of the plurality of imaging means on the subject. There is. SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to reduce the size while eliminating the need for complicated operations such as position adjustment of the visual field.

[0005]

In order to solve such a problem, according to the first aspect of the present invention, a point light source, a condensing lens for condensing light emitted from the point light source on a surface of a subject, and And a light-receiving element array formed of a plurality of light-receiving elements arranged in a matrix. The light-receiving element is disposed on an incident surface of a subject irradiated by the point light source, and one of the light-receiving elements is specularly reflected. It is arranged at a position for receiving light.

According to the second aspect of the present invention, there is provided a point light source, and a condenser lens for condensing the irradiation light from the point light source on the surface of the subject.
A light receiving element array composed of a plurality of light receiving elements is integrally formed, and a part of the light receiving elements is arranged in an incident surface of a subject irradiated by the point light source, one of which is specularly reflected light. And the remaining part of the light receiving element is arranged at a position different from the incident surface.

[0007]

FIG. 1 is an overall configuration diagram showing an embodiment of the present invention, and FIG. 2 is a schematic diagram showing an example of arrangement of light receiving elements. That is, as is apparent from FIG.
A flaw inspection device 1 is obtained by integrally forming a condenser lens 3 and a light receiving element array 4 including a plurality of light receiving elements with a housing member (see a hatched portion). At this time,
As shown in FIG. 2, the plurality of light receiving elements are arranged in a line on the incident surface of the light from the light source 2, and one of them is arranged at a regular reflection position. In addition, 5 indicates a subject, and P indicates a light irradiation position of the subject. Further, the housing can be easily manufactured by plastic molding or sheet metal processing.

By the way, the light from the light source 2 may deviate from the light receiving elements in a row as shown in FIG. By providing the sensor at a position deviated from the incident surface as shown in FIG. As described above, by integrating the light source, the condenser lens, and the light receiving element array, the entire device can be made compact and downsized. In addition, by using the light receiving element array, the field of view can be adjusted in advance, and subsequent adjustment work can be omitted.

Therefore, when performing a flaw inspection of a disc-shaped subject 5 as shown in FIG. 4, for example, using the flaw inspection apparatus configured as described above, the subject 5 is rotated as shown by an arrow A. On the other hand, by moving the flaw inspection device 1 in the radial direction as indicated by the arrow B, the entire surface of the subject 5 can be inspected. At this time, since the surface of the flaw inspection device 1 to be inspected is covered by the housing, it is possible to prevent disturbance light from entering the light receiving element array. Further, when the light receiving elements are arranged as shown in FIG. 3, even when light is scattered, it is possible to accurately inspect the roughness of the subject.

[0010]

According to the present invention, since the light source, the condenser lens and the light receiving element array are integrated, the size of the entire apparatus can be reduced, and the influence of disturbance light can be eliminated. The advantage is obtained. In addition, since the light receiving elements are arrayed, there is no need for adjustment work after assembling, and by arranging the light receiving elements at positions off the incident surface, it is possible to accurately inspect even rough surfaces. Is brought.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram showing an embodiment of the present invention.

FIG. 2 is a schematic diagram showing an example of the arrangement of light receiving elements.

FIG. 3 is a schematic diagram showing another example of arrangement of light receiving elements.

FIG. 4 is an explanatory view of an inspection mode of a disk-shaped subject according to the present invention.

FIG. 5 is a configuration diagram showing a proposed device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Flaw inspection apparatus, 2,10 ... Light source, 3,21 ... Condensing lens, 4 ... Light receiving element array, 5,30 ... Subject, 20A,
20B, 20C: imaging device, 22: light receiving element, P: irradiated surface.

Claims (2)

[Claims] 1. A point light source, a condenser lens for condensing irradiation light from the point light source on a surface of a subject, and a light receiving element array including a plurality of light receiving elements arranged in a line are integrally formed. A flaw inspection device, wherein the light receiving element is disposed in an incident surface of a subject irradiated by the point light source, and one of the light receiving elements is disposed at a position for receiving specularly reflected light. Inspection equipment. 2. A flaw inspection apparatus comprising a point light source, a condensing lens for condensing light emitted from the point light source on a surface of a subject, and a light receiving element array including a plurality of light receiving elements. A part of the light receiving element is disposed in the incident surface of the object irradiated by the point light source, one of the light receiving elements is disposed at a position for receiving the specularly reflected light, and the other of the light receiving element A flaw inspection device, wherein a part is arranged at a position different from the incident surface.