JPH06288714A - Measuring device - Google Patents

Abstract

PURPOSE:To rapidly measure a plurality of areas of an object to be measured without reducing an imaging magnification by providing a plurality of optical systems for one line receiving element and by focusing images of respective parts requiring measurement of the object to be measured at one time on the areas of the light receiving element. CONSTITUTION:When an area of a light receiving element is smaller than an object to be measured 107 and an imaging magnification can not be reduced but the total area of a plurality of points of the object to be measured requiring actual measurement is accommodated in one light receiving element, a plurality of optical systems for one light receiving element are provided, while being composed of a mirror 103 for guiding the image of the object to be measured 107 to an image pickup face 101, a focusing lens 104 for focusing the image of the object to be measured 107 on the image pickup face 101 and an illuminating lamp 105 for illuminating the object to be measured 107. And by focusing the images of respective parts requiring measurement of the object to be measured 107 at one time on the area of the light receiving element, a plurality of areas of the object to be measured are rapidly measured without preparing a movement mechanism for one light receiving element and a driving amplifier of the light receiving element and without reducing the imaging magnification.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring device, and more particularly to a component measuring device for measuring the size and shape of an object to be measured.

[0002]

2. Description of the Related Art In a conventional component measuring apparatus for processing an image of an object to be measured by an imaging optical system to measure the size and shape of the object to be measured, the object to be measured can be taken in by a light receiving element. If it is larger than the area, install a reduction optical system,
If the image is reduced and focused on the light receiving element, or if the image cannot be reduced due to measurement accuracy and it is necessary to enlarge or magnify it, divide the object to be measured into several areas and use it as an imaging optical system. The number of light-receiving elements is the same as the number of divided areas, or the imaging optical system and the light-receiving element or the object to be measured are mounted on the moving mechanism, and the imaging area is moved to capture images at multiple points. Measurement is performed without reducing the area wider than the element area.

[0003]

However, in the case of preparing a plurality of coupling optical systems and a light receiving element in the above-mentioned conventional example, the imaging optical system, the light receiving element, and the drive amplifier of the light receiving element are divided into areas to be measured. It is necessary to prepare the same number as the above, and there is a problem that it is costly. Also, in the case of a method in which the imaging optical system and the light receiving element or the object to be measured are mounted on the moving mechanism and the area for capturing as an image is moved to capture images at a plurality of locations, the driving device costs not only high but also the image. There is a problem that the time to take in becomes long, including the moving time.

[0004]

According to the present invention, a component measurement for forming an image of an object to be measured on a light receiving element by an optical system and measuring the shape and size of the object to be measured from the image by image processing. In the device, when the area of the light receiving element is smaller than the object to be measured and the total area of multiple points of the object to be measured actually falls within one light receiving element even if the imaging magnification cannot be reduced, one light receiving element By preparing a plurality of optical systems for the element, by forming an image of each portion of the object to be measured at once in the area of the light receiving element,
Measurement is performed in approximately the same time as measuring one area without reducing the imaging magnification of multiple areas of the DUT without preparing a moving mechanism with one light receiving element and drive amplifier of the light receiving element. It becomes possible to do.

[0005]

1 shows an embodiment of an optical system according to the present invention, FIG. 2 shows an embodiment of the entire data processing system of a measuring apparatus according to the present invention, and FIGS. 3, 4 and 5 show data processing of the measuring apparatus according to the present invention. An example of a flow is shown.

In FIG. 1, 101 is an image pickup camera for capturing a measurement image, 102 is an image pickup surface of the image pickup camera 101,
Reference numeral 03 denotes a mirror for guiding the image of the measurement object to the imaging surface 101, 104 denotes an imaging lens for forming the image of the measurement object on the imaging surface 101, and 105 an illumination lamp for illuminating the measurement object. Reference numeral 106 is a cover for preventing stray light from entering the measurement surface, and 107 is an object to be measured. In FIG.
201 is a data processing computer, 202 is a monitor of the data processing computer 201, 203 is an image processing apparatus, 204 is a power source for the imaging camera 101, 205 is an image processing dedicated monitor, 206 is a printer for outputting the result, 207 is 103, 104, 1 in FIG.
Reference numeral 05 is an optical system unit, and 208 is an external device that controls the conveyance, positioning, and the like of a measured object for automatic measurement. FIG. 3 shows a data processing computer 201.
Is an automatic measurement routine of. In FIG. 3, 301 is an external signal input processing routine for inputting a signal from an external device, 302 is a measurement start determination process for determining whether to start measurement by a signal from the external device, and 303 is an image captured by the image processing device 203. Image capturing processing for inputting image data captured by the camera 101, 304 is an image processing routine for calculating a predetermined distance of the measurement object from the image data, and 305 is a measurement result processing routine for processing a quality signal from the measurement result. FIG. 4 shows an image processing routine, which is the processing content of 304 in FIG. In FIG. 4, 4
Reference numeral 01 is a histogram calculation process for calculating a histogram from image data, 402 is a histogram smoothing process for smoothing the histogram graph calculated in 401, 403 is a histogram gain adjustment process for adjusting the gain of the histogram graph, and 404 is a histogram graph A distance calculation process for further calculating a distance, 405 is a standard value comparison process for comparing the distance calculated in 404 with a standard value, 406 is a quality determination process for determining whether the distance is a non-defective product or a defective product compared with the standard value, 407. Is a flag process for making the pass / fail flag a good product, and 408 is a flag process for making the pass / fail flag a defect. FIG. 5 is a measurement result processing routine, and shows the processing contents of 305 in FIG. In FIG. 5, reference numeral 501 is a measurement abnormality determination processing for determining whether or not the measurement is abnormal, 502 is an abnormality signal output processing for outputting a measurement abnormality signal to an external device, and 503 is a pass / fail determination for determining whether the measurement result is a good product or a bad product. Judgment processing, 504 is a defective signal output processing for outputting a signal of a defective measured object to an external device, 505 is a counter addition processing for adding a counter of the number of input products and the number of defective products, and 506 is a signal of a measured good product to an external device. A non-defective signal output process for outputting, and 507 is a counter addition process for adding counters for the number of input products and the number of non-defective products. Figure 6 (a)
FIG. 3 is a diagram of the measurement object 107 in FIG. 1 viewed from the measurement surface side. In FIG. 6A, 601 and 602 are the portions to be measured. FIG. 7A shows an image of the measurement object 107 captured by the imaging camera 101, and 603 is a screen. FIG. 7B is a screen in which a data processing window 604 is displayed on the imaging screen 603. FIG. 8 is a graph 702 of the image data 701 cut by the window 604 and the histogram calculated from the image data 701.
Is.

Next, the function of this embodiment will be described. In this embodiment, the predetermined portions 601 and 6 of the measurement object shown in FIG.
The distances a1 and a2 of 02 are measured.
As is apparent from FIG. 6A, there are many portions that are not necessary for measurement, and when image formation is performed on the image pickup surface 102 at a magnification necessary for measuring the measurement targets 601 and 602, as shown in FIG. Either 102 to 601 or 602 will overflow. Therefore, the optical system shown in FIG.
The image of 601 and 602 can be taken in without reducing the image pickup magnification by guiding the area of one place to one image pickup surface 102, and an image is formed on the image pickup surface 102 as shown in FIG. 7A. The image projected on the imaging camera 101 is captured by the image processing device 203 and processed by a command from the data processing computer 201.

Next, a processing flow at the time of automatic measurement in this embodiment will be described. First, in FIG. 3, in the measurement flow, in step 301, a signal from an external device is taken in and it is determined in step 302 whether a measurement start signal is input. If the measurement start signal is not input, process 301
Returning to step 301, the processing 301 and the determination 302 are repeated. When the measurement start signal is input from the external device, the determination 302 branches to the process 303, and in the process 303, the image data is captured. At this time, an image as shown in FIG. 7A is captured as image data. When the acquisition of the image data is completed, the process proceeds to the process 304, that is, the image processing routine of FIG. In the image processing routine of FIG. 4, in process 401, image data in the data processing window 604 of FIG. 7B, that is, image grayscale data in the X axis direction from 701 of FIG. 8 is added, and grayscale data in the Y axis direction is added. A histogram graph 702 which is a graph is calculated. Next, a smoothing process 402 for removing noise from the histogram graph and a gain adjustment process 403 for the histogram graph are performed, and in process 404, the distance of the measurement target is A in FIG. 8, that is, a in FIG. 6A.
Calculate the distance of 1 and a2. When the distances a1 and a2 are calculated, the standard value registered in advance is compared in step 405. If it is a non-defective product in the comparison result judgment 406, the process 407
In step 408, the pass / fail flag is set to a good item (ON), and if it is a defective item, the pass / fail flag is set to defective (OFF) in step 408, and the image processing routine is exited. Processing 3 when the image processing routine is completed
05, that is, the measurement result processing routine of FIG. In FIG. 5, a judgment 501 judges whether or not the measurement is abnormal, and if abnormal, a process 502 outputs an abnormal signal to an external device, and a process 505 increments the counters of the number of input and defective products to process the measurement result. Exit the routine. Judgment 50
When it is determined in 1 that the measurement is not abnormal, a determination 503 determines whether the measured object is a good product or a defective product. If it is a non-defective product, a non-defective signal is output to an external device in process 506, and process 5
At 07, the counters for the number of input products and the number of non-defective products are incremented by 1, and the measurement result processing routine is exited. When it is determined in the determination 503 that the DUT is a defective product, the process branches to a process 504, a defect signal is output to an external device, and in a process 505, a counter for the number of input devices and the number of defective products is incremented to process the measurement result. Exit the routine. When the measurement result processing routine is finished, the sequence returns to FIG. 3, and the above flow is repeated from the processing 301 again to continue the automatic measurement. The above is the flow of the automatic measurement in the present embodiment.

The present invention can be applied to an inspection apparatus such as a soldering quality determination apparatus in a print substrate inspection in addition to the above embodiment.

In the above embodiments, two image forming optical systems are used for a single light receiving element. However, the number of image forming optical systems is not limited to this, and a plurality of images are formed on the light receiving surface of the light receiving element. You may make it a statue. In addition, a single special optical system is used to reduce the area between the measurement areas that are very far apart so that multiple measurement areas can be imaged simultaneously on the light receiving surface of the light receiving element. You can also

[0011]

As described above, according to the component measuring apparatus equipped with the optical system of the present invention, even if the area of the light receiving element is narrower than the object to be measured and the imaging magnification cannot be reduced, actual measurement is performed. When the total area of the part of the object to be measured fits within one light receiving element, multiple optical systems are prepared for one light receiving element, and the image of each part of the part to be measured on the area of the light receiving element is prepared. By imaging at one time, multiple areas of the DUT can be created without reducing the imaging magnification without preparing a moving mechanism with one light receiving element and one light receiving element drive amplifier. It became possible to measure in about the same time as measuring.

[Brief description of drawings]

FIG. 1 is a block diagram showing an optical system for forming an image of a plurality of portions of the present invention on a single light receiving element.

FIG. 2 is a block diagram of an entire processing system of an automatic component measuring device using the present invention.

FIG. 3 is an automatic measurement main routine of a data processing computer program.

FIG. 4 is an image processing routine of a data processing computer program.

FIG. 5 is a measurement result processing routine of a data processing computer program.

FIG. 6 is a view of the measurement object in FIG. 1 viewed from the measurement surface side.

FIG. 7 is an image of a measurement object captured by an imaging camera.

8 is image data clipped by a window 604 of FIG.

[Explanation of symbols]

 101 Imaging Camera 102 Imaging Surface 103 Mirror 104 Imaging Lens 105 Lighting Lamp 106 Stray Light Preventing Cover 107 DUT 201 Data Processing Computer 202 Monitor 203 Image Processing Device 204 Power Supply 205 Image Processing Monitor 206 Printer 207 Optical System Unit 208 External device

Claims (3)

[Claims] 1. A measuring device for forming an image of an object to be measured on a light receiving surface of a light receiving element by an optical system, and measuring the shape, size, etc. of the object to be measured based on the image by image processing. A plurality of optical systems are arranged for one light receiving element, and images of a plurality of different areas on the DUT are formed on different areas of the light receiving surface by the plurality of optical systems. Measuring device. 2. A measuring device for forming an image of an object to be measured on a light receiving surface of a light receiving element by an optical system and measuring the shape, size, etc. of the object to be measured based on the image by image processing, A measuring apparatus having an optical system for forming images of different measured regions of the measured object, which are separated from each other on the image plane by a distance longer than the longitudinal direction of the light receiving surface, at different positions of the light receiving surface. . 3. An object to be measured formed by an optical system is captured by a light receiving element having a light receiving surface smaller than the image plane, and the object to be measured is based on the image captured by the light receiving element by image processing. In the measuring method for measuring the shape, size, etc., the images of the first and second regions on the object to be measured, which are separated from each other by a predetermined distance and are smaller than the light receiving surface, are different positions of the light receiving surface by the optical system. A measuring method characterized by forming an image on the.