JPH1010299A - Asymmetrical square spectroscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to change the beam magnification in a very short time. SOLUTION: This spectroscope is equipped with a holder 20a and spectroscopic crystals 21a, 22a and 23a. The holder 20a is placed on the optical axis of radiation light beams S containing electromagnetic waves with wavelength in an X-ray range to be dispersed and can be moved in the direction orthogonal to the advancing direction of the emitted light beams S. The spectroscopic crystals 21a, 22a and 23a are processed from single crystals so that asymmetrical angles formed by the surfaces 41a, 42a and 43a of elements with the surfaces 16a of the crystals to the radiation light beams S will be different from each other. Moreover, each of the spectroscopic crystals 21a, 22a and 23a is supported by the holder 20a so that the surfaces 16a of the crystals will be parallel to each other and the surfaces 41a, 42a and 43a of the elements will line up in the direction in which the holder 20a moves, and the spectroscopic crystals 21a, 22a and 23a are switched by displacing the holder 20a appropriately to change the beam magnification of X-ray beams Xa in a very short time.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an asymmetric square spectroscope.

[0002]

2. Description of the Related Art When an electron moving at a speed close to the speed of light is bent by a magnetic field or an electric field, an electromagnetic wave (light) called a radiation is emitted in a tangential direction of an electron orbit.

FIG. 6 shows an example of a synchrotron radiation generating means, wherein 1 is a linear accelerator, which comprises an electron generator 2 for emitting electrons (charged particles) e, and one end having an electron. A straight tubular acceleration duct 3 connected to the generator 2;
A high-frequency accelerator 4 is provided to apply high frequency to the electrons e moving inside the acceleration duct 3 to accelerate the electrons e.

[0004] The other end of the acceleration duct 3 is connected to one end of a curved tubular deflecting duct 5.
A bending electromagnet 6 is provided to bend the trajectory of the electron e moving inside.

[0005] Reference numeral 7 denotes an electron storage ring. The electron storage ring 7 has an endless duct 8 for forming an orbit of electrons e. The other end of the deflection duct 5 is connected.

The bending portion of the endless duct 8 is provided with a deflecting electromagnet 9 for bending the trajectory of the electron e moving inside the endless duct 8. A high-frequency accelerator 10 is provided for applying a high frequency to the electrons e moving inside and accelerating the electrons e.

[0007] Further, in a curved portion at a required portion of the endless duct 8, a radiation light beam S emitted by bending the traveling direction of the electron e moving at a speed close to the speed of light in the curved portion is provided with an endless beam. One end of a beam line 11 for leading to the outside of the duct 8 is connected, and the other end of the beam line 11 is provided with an experimental device 12 for performing an experiment using the radiation light beam S as an irradiation light source.

When the radiation light beam S is emitted by the radiation light generating means shown in FIG. 6, the inside of the acceleration duct 3, the deflection duct 5, the endless duct 8, and the beam line 11 is decompressed to an ultra-high vacuum state. After the electron e is moved at a speed close to the speed of light, the electron e is emitted from the electron generator 2.

Electrons e emitted from the electron generator 2 are:
Accelerated by the high-frequency accelerator 4,
The beam enters the endless duct 8 by bending the orbit.

The electron e incident on the endless duct 8 is accelerated by the high-frequency accelerator 10 and its trajectory is bent at each bending portion by the bending electromagnet 9, whereby the tangent of the electron e to the trajectory of the electron e is obtained. A radiation light beam S is emitted in the direction.

A radiation light beam S emitted from a predetermined curved portion of the endless duct 8 enters a test device 12 via a beam line 11.

The emitted light beam S contains electromagnetic waves having a wavelength ranging from the visible region to the X-ray region.
When applied to (cardiovascular imaging), an asymmetrical square spectrometer is incorporated in the beam line 11 so that an electromagnetic wave in a specific wavelength region (X-ray region) is expanded and irradiated as monochromatic radiation to an irradiation target. I have.

FIGS. 4 and 5 show an example of a conventional asymmetric square spectroscope. This asymmetric square spectroscope uses a light wave (radiation light beam S / X-ray) containing an electromagnetic wave having a wavelength in the X-ray region. A spectral crystal 13a, 13b for dispersing electromagnetic waves having a wavelength in the X-ray region as X-ray beams Xa, Xb by asymmetrical reflection from the beam Xa), and a holder for supporting the spectral crystals 13a, 13b from surfaces opposite to the element surfaces 14a, 14b. 15a,
15b.

The dispersive crystals 13a and 13b are made of a single crystal such as silicon (Si) or germanium (Ge) having a characteristic of dispersing electromagnetic waves having a wavelength in the X-ray region, and a crystal face 16
The element surfaces 14a and 14b are processed so as to form an asymmetric angle of a predetermined angle θ with respect to the elements a and 16b.

The crystal faces 16 of the spectral crystals 13a and 13b
a, 16b, light waves (electron beam S / X-ray beam X) containing electromagnetic waves in the X-ray region through the element surfaces 14a, 14b.
When a) is incident, the electromagnetic waves in the X-ray region included in the light waves are converted into X-ray beams Xa and Xb, and the spectral crystals 13a,
13b from the crystal faces 16a, 16b to the element surfaces 14a, 1
The light beam exits through 4b in a state in which the beam cross-section is larger than the light wave.

The holders 15a and 15b are made of a material having high thermal conductivity such as oxygen-free copper.

Inside the holders 15a and 15b, a cooling medium passage 17 connected to a cooling medium supply pipe and a cooling medium recovery pipe (not shown) and through which the cooling medium flows continuously is provided.
a and 17b are provided.

The above-mentioned dispersive crystals 13a, 13b and holders 15a, 15b are respectively arranged in a chamber (not shown) constituting the beam line 11 (see FIG. 6) at right angles to the optical axis of the radiation light beam S. Rotating shaft 18a, 1 extending to
8b.

When the electromagnetic wave in the X-ray region is separated from the emitted light beam S by the asymmetric rectangular spectroscope shown in FIGS. 4 and 5, the inside of the chamber is depressurized to a high vacuum state and the holders 15a and 15b are decompressed. The cooling medium is continuously passed through the cooling medium flow paths 17a and 17b.

In this state, the holder 15a, which supports one of the dispersive crystals 13a located on the upstream side in the traveling direction of the radiation light beam S, is appropriately swung about a rotation shaft 18a, thereby allowing one side. The radiation light beam S is incident on the dispersive crystal 13a, and the X-ray beam X
a is emitted toward the other dispersive crystal 13b located on the downstream side in the traveling direction of the radiation light beam S, and the holder 15 on which the other dispersive crystal 13b is supported
The X-ray beam Xa from one of the dispersive crystals 13a is incident on the other dispersive crystal 13b and the X-ray beam Xb is radiated from the other dispersive crystal 13b by oscillating b around the rotation axis 18b as appropriate. The electromagnetic wave in the X-ray region including the emitted light beam S is split into an X-ray beam Xb having a beam cross section larger than that of the emitted light beam S so as to be emitted in parallel with the light beam S.

At this time, the radiation light beam S and the X-ray beam X
The heat given to the light-separating crystals 13a and 13b by the incidence of the light is transmitted to the cooling medium flow path 1 of the holders 15a and 15b.
The heat is transmitted to the cooling medium flowing through 7a, 17b, and the thermal deformation of the spectral crystals 13a, 13b is suppressed.

[0022]

In the asymmetric rectangular spectroscope shown in FIGS. 4 and 5, the beam cross section of the light wave (radiation light beam S / X-ray beam Xa) incident on the spectral crystals 13a and 13b and the spectral crystal 13a The beam expansion ratio, which is the ratio of the X-ray beams Xa and Xb emitted from the X-ray beams Xa and Xb to the beam cross section, depends on the magnitude of the asymmetric angle formed by the element surfaces 14a and 14b with respect to the crystal planes 16a and 16b. It is determined.

Therefore, when changing the beam cross section of the X-ray beams Xa, Xb, it is necessary to replace the dispersive crystals 13a, 13b supported by the holders 15a, 15b with other ones having different asymmetric angles. There is.

However, in order to replace the dispersive crystals 13a and 13b with another one, it is necessary to open the inside of the chamber to the atmosphere. After the replacement, the inside of the vacuum chamber is again depressurized to a high vacuum state. Therefore, the beam expansion rate cannot be easily changed in a short time.

The present invention has been made in view of the above circumstances, and has as its object to provide an asymmetric rectangular spectroscope capable of changing the beam expansion rate in a very short time.

[0026]

According to a first aspect of the present invention, there is provided an asymmetric square-type spectroscope according to the first aspect of the present invention. The holder 20a which is located and can move in the direction orthogonal to the traveling direction of the light wave S, and the asymmetric angles formed by the element surfaces 41a, 42a, 43a and the crystal plane 16a with respect to the light wave S are different from each other. And a plurality of dispersive crystals 21a, 22a, and 23a each formed by processing a single crystal.
The respective dispersive crystals 21a, 22a, and 23a are supported by the holder 20a so that a and 43a are arranged in the holder moving direction.

Further, in the asymmetric rectangular spectroscope according to the second aspect of the present invention, it is located on the optical axis of the light wave S including the electromagnetic wave in the wavelength region to be separated, and is located in the traveling direction of the light wave S. And a holder 20a that can move in a direction orthogonal to each other, and has a plurality of element surfaces 45a, 46a, 47a, and has an asymmetric angle formed by the element surfaces 45a, 46a, 47a and the crystal plane 16a with respect to the light wave S. It has a dispersive crystal 44a obtained by processing a single crystal differently, and has element surfaces 45a and 4a.
6a, 47a are arranged in the holder moving direction so that the
4a is supported by the holder 20a.

In the asymmetrical square spectroscope according to the first aspect of the present invention, the holder 20a supporting the plurality of light-splitting crystals 21a, 22a, and 23a is moved by the holder 20a of the light wave S including the electromagnetic wave in the wavelength region to be separated. When displaced in a direction perpendicular to the traveling direction, the light dispersing crystals 21a, 22a,
23a is switched, and the beam expansion rate changes.

In the asymmetric square spectrometer according to the second aspect of the present invention, the plurality of element surfaces 45a, 46a, 47 are provided.
holder 20a supporting a dispersive crystal 44a having a
Is displaced in a direction orthogonal to the traveling direction of the light wave S including the electromagnetic wave in the wavelength region to be split, the element surfaces 45a, 46a, 47a on which the light wave S is incident are switched,
The beam magnification changes.

[0030]

Embodiments of the present invention will be described below with reference to the drawings.

FIGS. 1 and 2 show an embodiment of an asymmetrical square spectroscope according to the present invention. This asymmetrical square type spectroscope has two moving chambers 19a and 19b and the moving chamber. Inside 19a, 19b, it is arranged so that it may be located on the optical axis of the light wave (radiation light beam S / X-ray beam Xa) including the electromagnetic wave of the wavelength region to be separated, and is orthogonal to the traveling direction of the light wave. 20a, 20b that can move in the directions, a plurality of spectral crystals 21a, 22a, 23a supported by one holder 20a, and a plurality of spectral crystals 21b, 22b, 2 supported by the other holder 20b.
3b.

The moving chambers 19a and 19b are composed of box bodies 24a and 24b having a box structure and connecting pipes 25a and 2 provided at one end of the chamber bodies 24a and 24b.
5b, and connecting pipes 26a, 26b provided at the other ends of the chamber main bodies 24a, 24b.

The connecting pipe 25a at one end of the chamber main body 24a of one of the moving chambers 19a is provided with a beam duct 27a constituting the beam line 11 (see FIG. 6) connected to the endless duct 8, and a first bellows 28. Is airtightly connected through.

The connecting pipe 26a at the other end of the chamber main body 24a of one moving chamber 19a is connected to the connecting pipe 25b at one end of the chamber main body 24b of the other moving chamber 19b.
Are hermetically connected via a second bellows 29.

A connecting duct 26b at the other end of the chamber main body 24b of the other moving chamber 19b is provided with a beam duct 27b constituting the beam line 11 (see FIG. 6) connected to the experimental apparatus 12, and a third bellows 30. Is airtightly connected through.

The moving chambers 19a and 19b are provided with traversing mechanisms 31a and 31b and lifting mechanisms 32a and 3b, respectively.
It is supported by a fixed structure 33 such as a gantry via 2b.

The traversing mechanisms 31a and 31b are fixed
3 and the stage 34a so as to be horizontally movable in a direction crossing the optical axis of a light wave (radiation light beam S / X-ray beam Xa) traveling inside the moving chambers 19a and 19b. , 34b attached to the traversing tables 35a, 35b,
Drive devices 36a and 36b for displacing 5a and 35b with respect to stages 34a and 34b are provided.

The lifting mechanisms 32a and 32b are composed of stages 37a and 37b mounted and fixed on the traversing tables 35a and 35b of the traversing mechanisms 31a and 31b, respectively.
a and 37b, which are attached to the elevating tables 38a and 38b so as to be able to ascend and descend,
And driving devices 39a and 39b for displacing the stage with respect to the stages 37a and 37b.

The lifting table 38 of one lifting mechanism 32a
One moving chamber 19a is mounted and fixed to a, and the other moving chamber 19b is mounted and fixed to the elevating table 38b of the other elevating mechanism 32b.

The holders 20a and 20b are formed of a material having high thermal conductivity such as oxygen-free copper, and are used as the holders 15a and 15b (see FIG.
Like the first embodiment, a cooling medium passage (not shown) through which the cooling medium continuously flows is provided inside.

Each of the holders 20a and 20b has a rotating shaft 40 extending at right angles to the optical axis of the radiation light beam S.
It is pivotally supported inside the moving chambers 19a and 19b so as to be able to swing around the a and 40b.

The dispersive crystals 21a and 21b are made of a single crystal of silicon (Si) having a characteristic of dispersing an electromagnetic wave having a wavelength in the X-ray region, and the element surfaces 41a and 16b are separated from the crystal surfaces 16a and 16b.
a and 41b are processed so as to be parallel.

The spectral crystals 22a and 22b are made of silicon (S
The single crystal of i) is processed so that the element surfaces 42a and 42b form a predetermined asymmetric angle with respect to the crystal faces 16a and 16b.

The spectral crystals 23a and 23b are made of silicon (S
The single crystal of i) is processed so that the element surfaces 43a, 43b form a predetermined asymmetric angle with respect to the crystal faces 16a, 16b.

The asymmetric angle of each of the spectral crystals 23a and 23b is set to be larger than the asymmetric angle of each of the spectral crystals 22a and 22b.

One of the spectral crystals 21a, 22a, 23a
The holder 20 inside one of the moving chambers 19a is arranged such that the respective crystal planes 16a are parallel to each other and the element surfaces 41a, 42a, 43a are arranged in the holder moving direction.
a.

The crystal surface 16a of each of the spectral crystals 21a, 22a and 23a is placed on the element surface 41 from the beam duct 27a.
When a light wave (radiation light beam S) including an electromagnetic wave having a wavelength in the X-ray region enters through a, 42a, and 43a, the electromagnetic wave in the X-ray region included in the light wave is converted from the crystal surface 16a as an X-ray beam Xa. The light beam is emitted through the element surfaces 41a, 42a, and 43a in a state where the beam cross section is larger than the light wave.

Further, the above-mentioned spectral crystals 21a, 22a, 2
3a are mutually fixed by diffusion bonding using gold (Au).

The other spectral crystals 21b, 22b, 23b
The holder 20 inside the other moving chamber 19b is arranged such that the respective crystal faces 16b are parallel to each other and the element surfaces 41b, 42b, 43b are arranged in the holder moving direction.
b.

The above-mentioned spectral crystals 21a, 22a, 23a are placed on the crystal plane 16b of the spectral crystals 21b, 22b, 23b.
When an optical wave (X-ray beam Xa) including an electromagnetic wave having a wavelength in the X-ray region enters through the element surfaces 41b, 42b, and 43b, the electromagnetic wave in the X-ray region included in the light wave is converted into an X-ray beam Xb. From the surface 16b to the element surfaces 41b, 42
b and 43b, the light wave is emitted in a state where the beam cross section is enlarged more than the light wave.

Further, the above-mentioned spectral crystals 21b, 22b, 2
3b are mutually fixed by diffusion bonding using gold (Au).

When the electromagnetic wave in the X-ray region is separated from the emitted light beam S by the asymmetric square spectroscope shown in FIGS. 1 and 2, the movable chambers 19a and 19b and the beam duct 2 are used.
The insides of the bellows 7a, 27b and the bellows 28, 29, 30 are decompressed to a high vacuum state, and the cooling medium is continuously circulated through a cooling medium flow path (not shown) of the holders 20a, 20b.

Next, by appropriately displacing the traversing tables 35a and 35b of the traversing mechanisms 31a and 31b with respect to the stages 34a and 34b, for example, the radiated light beam S from the beam duct 27a enters one of the dispersive crystals 22a. The position of the holder 20a is set so that
X from the above-mentioned dispersive crystal 22a is
The position of the holder 20b is set so that the line beam Xa can enter.

Further, by appropriately displacing the elevating tables 38a, 38b of the elevating mechanisms 32a, 32b with respect to the stages 37a, 37b, the incident position of the radiated light beam S on the element surface 42a of one of the dispersive crystals 22a is adjusted. Further, the incident position of the X-ray beam Xa on the element surface 42b of the other spectral crystal 22b is adjusted.

In this state, the holder 20a, which supports one of the dispersive crystals 22a positioned on the upstream side in the traveling direction of the radiation light beam S, is appropriately swung about the rotation axis 40a, thereby allowing one side. The radiation light beam S is incident on the dispersive crystal 22a, and the X-ray beam X
a is emitted toward the dispersive crystal 22b, and the holder 20 on which the other dispersive crystal 22b is supported.
b is appropriately swung about the rotation axis 40b, so that the X-ray beam Xa from one of the dispersive crystals 22a is incident on the other dispersive crystal 22b and the X-ray beam Xb is radiated from the other dispersive crystal 22b. The electromagnetic wave in the X-ray region including the emitted light beam S is split into an X-ray beam Xb having a beam cross section larger than that of the emitted light beam S so as to be emitted in parallel with the light beam S.

At this time, the radiation light beam S and the X-ray beam X
The heat imparted to the light-splitting crystals 22a and 22b due to the incidence of a is transmitted to the cooling medium flowing through the cooling-medium flow paths (not shown) of the holders 20a and 20b, and the heat deformation of the light-splitting crystals 22a and 22b is reduced. Be deterred.

When changing the beam expansion rate of the X-ray beam Xb split from the emitted light beam S, the traversing mechanism 31
Stages 3a and 35b of the row tables 35a and 35b
The holder 20a is appropriately displaced with respect to 4a and 34b so that the radiated light beam S from the beam duct 27a can be incident on one of the dispersive crystals 21a or 23a instead of the dispersive crystal 22a described above. Is set, and the X-ray beam Xa from one of the dispersive crystals 21a or 23a is placed on the other dispersive crystal 21b or 23b instead of the dispersive crystal 22b described above.
The position of the holder 20b is set so that can be incident.

Further, by appropriately displacing the elevating tables 38a, 38b of the elevating mechanisms 32a, 32b with respect to the stages 37a, 37b, one of the dispersive crystals 21a, 2b is moved.
3a, the emitted light beam S for the element surfaces 41a, 43a
Is adjusted, and the other spectral crystals 21b, 2 are adjusted.
X-ray beam Xa for the element surfaces 41b and 43b of 3b
Adjust the incident position of.

In this state, the holder 20a, which supports one of the dispersive crystals 21a, 23a positioned on the upstream side in the traveling direction of the radiation light beam S, is appropriately swung about the rotation shaft 40a. , One of the spectral crystals 21a, 23
a, the radiation light beam S is incident on one of the
The X-ray beam Xa is split from the a and 23a into the spectral crystals 21b and 23.
b, and by appropriately swinging the holder 20b on which the other dispersive crystals 21b, 23b are supported around the rotation axis 40b, the other dispersive crystals 21b, 23b One of the spectral crystals 21a, 23a
The X-ray beam Xa from
b, 23b, the X-ray beam Xb is emitted in parallel with the radiated light beam S, and the electromagnetic wave in the X-ray region including the radiated light beam S is converted into a beam cross section larger than the radiated light beam S. As an X-ray beam Xb having

The beam expansion rate of the X-ray beam Xb emitted from the above-mentioned spectral crystals 21b and 23b is
a, 21b and the dispersive crystals 23a and 23b are different from the asymmetric angles of the dispersive crystals 22a and 22b described above.
A value different from the case where a and 22b are used is exhibited.

As described above, in the asymmetric square spectroscope shown in FIGS. 1 and 2, a plurality of spectral crystals 21a, 21b, 22a, and 2 are formed by processing single crystals so that the asymmetric angles are different from each other.
2b, 23a, 23b, the crystal faces 16a, 16b are parallel to each other and the element surfaces 41a, 41b, 42a, 4
2b, 43a, 43b are aligned in the holder moving direction,
Since it is supported by holders 20a and 20b that can move in a direction orthogonal to the traveling direction of a light wave (radiation light beam S / X-ray beam X) including an electromagnetic wave in a wavelength region to be split, the holders 20a and 20b are supported. By appropriately displacing 20b, the beam expansion rate of X-ray beam Xb can be changed in an extremely short time without opening moving chambers 19a and 19b to the atmosphere.

FIG. 3 shows another embodiment of the asymmetrical square spectrometer according to the present invention. In the drawing, the portions denoted by the same reference numerals as those in FIGS. 1 and 2 represent the same components. .

In this asymmetric rectangular spectroscope, the above-described spectral crystals 21a, 22a, 23a and 21b,
Dispersion crystals 44a and 44b are used instead of 22b and 23b (see FIGS. 1 and 2).

Each of the dispersing crystals 44a and 44b is composed of one silicon (S) having a characteristic of dispersing electromagnetic waves having a wavelength in the X-ray region.
The single crystal of i) is divided into a plurality of element surfaces 45a, 45b, 46
a, 46b, 47a, 47b.

The element surfaces 45a and 45b are
a, 16b are formed in parallel to the element surfaces 46a,
46b and element surfaces 47a, 47b are
16b is formed so as to form a predetermined asymmetric angle with respect to 16b.

The device surfaces 47a and 47b and the crystal plane 1
6a and 16b, the asymmetric angle between the element surfaces 46a and 4b
6b is set to be larger than the asymmetric angle formed by crystal planes 16a and 16b.

That is, the dispersive crystals 44a and 44b are formed by integrally forming the dispersive crystals 21a, 22a and 23a and the dispersive crystals 21b, 22b and 23b (see FIGS. 1 and 2) from a single crystal. One of the dispersive crystals 44a is supported by one of the holders 20a such that the element surfaces 45a, 46a, 47a are arranged in the holder moving direction, and the other dispersive crystal 44b is connected to the element surfaces 45b,
The other holder 20a is supported so that 46b and 47b are arranged in the holder moving direction.

In the asymmetric rectangular spectroscope shown in FIG. 3, a plurality of element surfaces 45a, 45b, 46a, 46b, 47
a, 47b and the element surfaces 45a, 45b, 46
a, 46b, 47a, 47b and the crystal planes 16a, 16b are processed into single crystals so that the dispersive crystals 44a, 44b are processed to have different asymmetric angles.
b, 46a, 46b, 47a, 47b in a direction orthogonal to the traveling direction of the light wave (radiation light beam S / X-ray beam Xa) including the electromagnetic wave in the wavelength region to be separated so that the lines are aligned in the holder moving direction. Since it is supported by movable holders 20a and 20b, the holders 20a and 20b are appropriately displaced so that the beam expansion rate of the X-ray beam Xb is increased in the same manner as in the asymmetric square-type spectroscope shown in FIGS. Can be changed in a very short time.

Further, a plurality of element surfaces 45a, 45b, 4
Dispersion crystal 44 having 6a, 46b, 47a, 47b
Since a and 44b are formed from one single crystal,
A plurality of element surfaces 45a, 45b, 46a, 46b, 47
crystal planes 16a, 16b facing each other
Are completely located on the same plane, and the
It is easy to calibrate the angles when rotating a and 44b about the rotation shafts 40a and 40b.

It should be noted that the asymmetric square spectroscope of the present invention is not limited to only the above-described embodiment, but uses the spectral crystals 21a, 22a, 22a, 22a, 22b without using the spectral crystals 21b, 22b, 23b or 44b. A configuration in which electromagnetic waves in a specific wavelength region are separated by only one of the crystal 23a and the spectral crystal 44a, the present invention is applied to light wave generating means other than the emitted light generating means, and other ranges that do not depart from the gist of the present invention. It goes without saying that various changes can be made in.

[0071]

As described above, the asymmetric rectangular spectrometer of the present invention can provide various excellent effects as described below.

(1) In the asymmetric rectangular spectroscope according to the first aspect of the present invention, the plurality of spectral crystals 21a, 22a, and 23a set at different asymmetric angles include electromagnetic waves in a wavelength region to be spectrally separated. Since the holder 20a is supported by a holder 20a that moves in a direction perpendicular to the traveling direction of the light wave S, when the holder 20a is appropriately displaced, the spectral crystals 21a, 22a, and 23a on which the light wave S is incident are switched, and the beam is expanded. The rate can be changed in a very short time.

(2) In the asymmetric square spectroscope according to the second aspect of the present invention, a plurality of element surfaces 4 having different asymmetric angles are provided.
Since the dispersive crystal 44a having 5a, 46a, and 47a is supported by the holder 20a that moves in a direction perpendicular to the traveling direction of the light wave S including the electromagnetic wave in the wavelength region to be separated, the holder 20a is appropriately mounted. When displaced, the light wave S
The element surfaces 45a, 46a, and 47a on which light is incident are switched, and the beam expansion rate can be changed in a very short time.

(3) In the asymmetrical square spectrometer according to the second aspect of the present invention, a plurality of element surfaces 45a, 46a, 47a are provided.
Is formed from a single single crystal, the crystal planes 16a and 16b where the plurality of element surfaces 45a, 46a and 47a face each other are completely located on the same plane, and the spectral crystal 44a , 44b can be easily calibrated when rotating.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram showing an example of an embodiment of an asymmetric square spectroscope of the present invention.

FIG. 2 is a conceptual diagram showing a state in which an X-ray beam is split from a radiated light beam by the asymmetric square spectroscope shown in FIG.

FIG. 3 is a conceptual diagram showing another example of the embodiment of the asymmetric square spectroscope of the present invention.

FIG. 4 is a conceptual diagram showing an example of a conventional asymmetric square spectrometer.

FIG. 5 is a conceptual diagram showing the relationship between the crystal plane of the spectral crystal and the element surface in FIG.

FIG. 6 is a conceptual diagram illustrating an example of a radiation light generating unit.

[Explanation of symbols]

 16a Crystal plane 20a Holder 21a, 22a, 23a Dispersion crystal 41a, 42a, 43a Element surface 44a Dispersion crystal 45a, 46a, 47a Element surface S Radiation light beam (light wave)

Claims (2)

[Claims] 1. A holder (20a) that is located on the optical axis of a light wave (S) including an electromagnetic wave in a wavelength region to be separated and that can move in a direction orthogonal to the traveling direction of the light wave (S).
And the device surface (41a) (4
2a) a plurality of dispersive crystals (21a), (22a), and (23a) obtained by processing a single crystal so that the asymmetric angle between the (43a) and the crystal plane (16a) is different from each other; Become parallel and the element surface (41a)
(42a) An asymmetrical square spectrometer characterized in that the respective dispersive crystals (21a), (22a) and (23a) are supported by a holder (20a) such that the (43a) and the (43a) are arranged in the holder moving direction. 2. A holder (20a) which is located on the optical axis of a light wave (S) including an electromagnetic wave in a wavelength region to be separated and which can move in a direction orthogonal to a traveling direction of the light wave (S).
And a plurality of element surfaces (45a), (46a), (47a), and the element surface (45a) for the light wave (S).
(46a) A dispersive crystal (44a) obtained by processing a single crystal so that the asymmetry angles formed by the (47a) and the crystal plane (16a) are different from each other, and the element surfaces (45a), (46a), and (4)
7a) are aligned in the holder moving direction so that the
An asymmetric square spectrometer characterized in that a) is supported on a holder (20a).