JPH0998023A - Surface mount piezoelectric device - Google Patents

Surface mount piezoelectric device

Info

Publication number
JPH0998023A
JPH0998023A JP7255858A JP25585895A JPH0998023A JP H0998023 A JPH0998023 A JP H0998023A JP 7255858 A JP7255858 A JP 7255858A JP 25585895 A JP25585895 A JP 25585895A JP H0998023 A JPH0998023 A JP H0998023A
Authority
JP
Japan
Prior art keywords
piezoelectric device
package
temperature compensation
thermistor
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7255858A
Other languages
Japanese (ja)
Other versions
JP3239713B2 (en
Inventor
Yukihiro Unno
幸浩 海野
Makoto Hashimoto
誠 橋本
Katsuyoshi Suzuki
克良 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MEIDEN TSUSHIN KOGYO KK
Meidensha Corp
Meidensha Electric Manufacturing Co Ltd
Original Assignee
MEIDEN TSUSHIN KOGYO KK
Meidensha Corp
Meidensha Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MEIDEN TSUSHIN KOGYO KK, Meidensha Corp, Meidensha Electric Manufacturing Co Ltd filed Critical MEIDEN TSUSHIN KOGYO KK
Priority to JP25585895A priority Critical patent/JP3239713B2/en
Publication of JPH0998023A publication Critical patent/JPH0998023A/en
Application granted granted Critical
Publication of JP3239713B2 publication Critical patent/JP3239713B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To secure the temperature compensation by adding a temperature compensation circuit into the package of a piezoelectric device without changing the package size. SOLUTION: A single ceramic base 2 includes a wiring part 11 and an external terminal 6, and a chip thermistor (temperature compensation circuit) 5A having a capacitor function is attached between the wiring parts 112 and 113 . A piezoelectric device piece 3A is mounted on the thermistor 5A, and the terminals 41 and 42 of electrodes 4a and 4b are fixed to the terminal parts 111a and 111b of the wiring parts 111 and 112 via the conductive adhesives 81 and 82 respectively. Then the piece 3A and the temperature compensation circuit are covered with a cap and put into a package. As the thermistor 5A is used as a pillow part of the piece 3A, the temperature compensation circuit is added without increasing the package size. Furthermore, the heat of a piezoelectric device is satisfactorily transmitted to the thermistor 5A and therefore the temperature compensation is assured.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、圧電デバイスのパ
ッケージ内に温度補償回路を内蔵させた自己温度補償形
の表面実装形圧電デバイスに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a self-temperature compensating surface mount type piezoelectric device having a temperature compensating circuit built in a package of the piezoelectric device.

【0002】[0002]

【従来の技術】温度補償発振器に圧電デバイス(水晶振
動子)を使用する場合、圧電デバイスの他にサーミスタ
とコンデンサを備えた温度補償回路を設ける必要があ
る。通常図8に示すように水晶振動子Aに負特性サーミ
スタRPとコンデンサCPの並列回路からなる温度補償回
路Bを直列に接続する。図9にこの水晶振動子の温度補
償前,後の温度変化に対する周波数偏差曲線イ,ロを示
す。この温度補償では主に低温側特性が補償される。
2. Description of the Related Art When a piezoelectric device (crystal oscillator) is used in a temperature-compensated oscillator, it is necessary to provide a temperature compensation circuit having a thermistor and a capacitor in addition to the piezoelectric device. Normally, as shown in FIG. 8, a temperature compensation circuit B including a parallel circuit of a negative characteristic thermistor R P and a capacitor C P is connected in series to the crystal unit A. FIG. 9 shows frequency deviation curves a and b with respect to temperature changes before and after temperature compensation of the crystal unit. In this temperature compensation, the characteristics on the low temperature side are mainly compensated.

【0003】[0003]

【発明が解決しようとする課題】上述のとおり、温度補
償発振器は圧電デバイスの他に温度補償回路部分を設け
なければならないため、発振器を小形化することが困難
である。
As described above, it is difficult to miniaturize the oscillator because the temperature-compensated oscillator must be provided with the temperature-compensated circuit portion in addition to the piezoelectric device.

【0004】本発明は、従来のこのような問題点に鑑み
てなされたものであり、その目的とするところは、パッ
ケージの大きさを変更することなく圧電デバイスのパッ
ケージの中に温度補償回路を直接設けた小形で温度補償
を確実になしうる表面実装形圧電デバイスを提供するこ
とにある。
The present invention has been made in view of the above-mentioned conventional problems, and an object thereof is to provide a temperature compensation circuit in a package of a piezoelectric device without changing the size of the package. It is an object of the present invention to provide a small-sized surface-mounted piezoelectric device that can be reliably provided with temperature compensation directly.

【0005】[0005]

【課題を解決するための手段】本発明の表面実装形圧電
デバイスは、セラミックス単体ベースに配線を施し、圧
電デバイス本体の枕部又は緩衝部となるように温度補償
用のコンサンサ機能を有するサーミスタを取り付けるこ
とにより、パッケージ内に温度補償部分を内蔵したもの
である。
A surface mount piezoelectric device of the present invention comprises a thermistor having a temperature compensation compensator function, which is formed by wiring a ceramics base and serving as a pillow portion or a buffer portion of the piezoelectric device body. By mounting it, the temperature compensation part is built in the package.

【0006】または、デバイス素板の一部を薄くしてそ
の両面に振動電極を設けて振動部とし、デバイス素板の
残余の部分に温度補償用のコンサンサ機能を有するサー
ミスタを設けてパッケージに納めたものである。
Alternatively, a part of the device base plate is thinned to provide vibrating electrodes on both sides thereof as a vibrating part, and a thermistor having a temperature compensator function is provided on the remaining part of the device base plate to be packaged. It is a thing.

【0007】[0007]

【発明の実施の形態】BEST MODE FOR CARRYING OUT THE INVENTION

実施の形態1 図1について、まず図(a)に示すように、セラミック
ス単体ベース2の表面ないし表面から側面にメタライズ
配線部111〜113を施すと共に、裏面に配線部111
及び113と接続するように外部端子61及び62を設け
る。
For Embodiment 1 FIG. 1, first, as shown in FIG. (A), the metallized wiring portion 11 1 to 11 3 is performed with respect to the side from the surface to the surface of the ceramic alone base 2, wiring portions 11 1 on the back surface
And external terminals 6 1 and 6 2 are provided so as to be connected to the external terminals 11 and 3 3 .

【0008】次に図(b)に示すように、配線部を施し
たベース2の上面に額縁状にアルミナコーティング部7
を施すと共に、ベース右側に配線部112及び113と接
続されるようにコンデンサ機能を含むチップサーミスタ
5Aを半田又は導電性接着剤を用いて取り付ける。
Next, as shown in FIG. 1B, an alumina coating portion 7 is formed in a frame shape on the upper surface of the base 2 having the wiring portion.
In addition, the chip thermistor 5A having a capacitor function is attached to the right side of the base so as to be connected to the wiring portions 11 2 and 11 3 by using solder or a conductive adhesive.

【0009】そして図(c)に示すように、片持ち支持
となる電極パターンが施された圧電デバイス片3Aをチ
ップサーミスタ5Aが枕部となるように載置して、裏側
振動電極4a(図示省略)の端子部41を配線部111
端子部111aに導電性接着剤81で固定すると共に、表
側振動電極4bの端子部42を配線部112の端子部11
2aに導電性接着剤82で固定して片持ち支持する。最後
に、この単体ベース上に箱形のキャップ(図示省略)を
被せ、キャップとベース間を樹脂又はガラスで接合して
パッケージを完成させる。
Then, as shown in FIG. 1C, the piezoelectric device piece 3A provided with an electrode pattern for cantilever support is placed so that the chip thermistor 5A serves as a pillow portion, and the backside vibrating electrode 4a (shown in the figure). The terminal portion 4 1 of (omitted) is fixed to the terminal portion 11 1a of the wiring portion 11 1 with a conductive adhesive 8 1 , and the terminal portion 4 2 of the front side vibration electrode 4b is connected to the terminal portion 11 of the wiring portion 11 2.
2a to fixedly cantilevered by the conductive adhesive 82. Finally, a box-shaped cap (not shown) is covered on this single base, and the cap and the base are joined with resin or glass to complete the package.

【0010】以上のように構成されているので、外部端
子61が圧電デバイス片3Aの振動電極41に接続され、
振動電極42が配線部112を介してチップサーミスタ5
Aの一端に接続され、その他端が外部端子62に接続さ
れるので、外部端子61と62の間に圧電デバイス片3A
とチップサーミスタ5Aが直列に接続された温度補償回
路内蔵の圧電デバイスが得られる。
With the above-described structure, the external terminal 6 1 is connected to the vibrating electrode 4 1 of the piezoelectric device piece 3A,
The vibrating electrode 4 2 is connected to the chip thermistor 5 via the wiring portion 11 2.
Since the other end is connected to the external terminal 6 2 , the piezoelectric device piece 3A is connected between the external terminals 6 1 and 6 2.
A piezoelectric device having a built-in temperature compensation circuit in which the chip thermistor 5A and the chip thermistor 5A are connected in series can be obtained.

【0011】この実施の形態によれば、チップサーミス
タ5Aを圧電デバイス片3Aの落下衝撃用の枕部として
利用しているので、圧電デバイスのパッケージに温度補
償部分を内蔵することが可能となり小形化を実現でき
た。また、チップサーミスタを枕部として圧電デバイス
単体と同一のパッケージに納めるため、圧電デバイスの
温度変化をより精度良く感知することが可能となる。更
に、単板べースを使用するため価格を安価に抑えること
ができた。
According to this embodiment, since the chip thermistor 5A is used as the pillow portion for the drop impact of the piezoelectric device piece 3A, the temperature compensating portion can be built in the package of the piezoelectric device, and the size can be reduced. Was realized. In addition, since the chip thermistor is housed in the same package as the piezoelectric device alone as a pillow portion, it is possible to detect the temperature change of the piezoelectric device more accurately. Furthermore, since the single plate base is used, the price can be kept low.

【0012】なお、図1では外部端子と配線部が側面接
続となっているが、この接続は図2に示すようにベース
2の左右にスルーホール101,102を設けてスルーホ
ール接続としてもよい。
In FIG. 1, the external terminal and the wiring portion are side-surface connected, but this connection is made as through-hole connection by providing through holes 10 1 and 10 2 on the left and right sides of the base 2 as shown in FIG. Good.

【0013】また、単板ベース2にメタライズ配線部1
1〜113を図3に示すようなパターンで設ければ、チ
ップサーミスタ5Aと圧電デバイス片3Aとを逆に配置
することが可能となるので、単板ベースの左右の位置関
係を揃えることなくチップサーミスタ及び圧電デバイス
片を装着することができる。
Further, the metallized wiring portion 1 is formed on the single plate base 2.
If 1 1 to 11 3 are provided in a pattern as shown in FIG. 3, it is possible to dispose the chip thermistor 5A and the piezoelectric device piece 3A in reverse, so that the left-right positional relationship of the single plate base is made uniform. Instead, a chip thermistor and a piezoelectric device piece can be mounted.

【0014】また、配線部を施した単板ベース2の上に
アルミナコーティング部7を図4(b)に示すようなパ
ターンで設ければ、同図(c)に示すようにコーティン
グ部7が圧電デバイス片3Aの片持ち支持部の位置決め
ができるので、圧電デバイス片の位置決め精度が向上す
る。
If the alumina coating portion 7 is provided on the single plate base 2 having the wiring portion in a pattern as shown in FIG. 4 (b), the coating portion 7 will be formed as shown in FIG. 4 (c). Since the cantilever support portion of the piezoelectric device piece 3A can be positioned, the positioning accuracy of the piezoelectric device piece is improved.

【0015】実施の形態2 図5について、図(a)に示すように、セラミック単板
ベース2の表面ないし側面にメタライズ配線部111
113を施すとと共に、裏面に配線部111及び113
接続するように、外部端子61及び62を設ける。
Embodiment 2 Referring to FIG. 5, as shown in FIG. 5A, a metallized wiring portion 11 1 , is formed on the front surface or the side surface of the ceramic single plate base 2.
While applying 11 3 , external terminals 6 1 and 6 2 are provided on the back surface so as to be connected to the wiring parts 11 1 and 11 3 .

【0016】次に、図(b)に示すように、配線部を施
したベース2の上面に額縁状にアルミナコーティング部
7を施すと共に、右側配線部113の先端部113aの上
に、上下面に端子を有するコンデンサ機能を含むチップ
サーミスタ5Bを半田又は導電性接着剤を用いて取り付
ける。
Next, as shown in FIG. 2B, an alumina coating portion 7 is formed in a frame shape on the upper surface of the base 2 having the wiring portion, and at the same time, on the tip portion 11 3a of the right wiring portion 11 3 . The chip thermistor 5B having a capacitor function having terminals on the upper and lower surfaces is attached by using solder or a conductive adhesive.

【0017】そして図(c)に示すように、両持ち支持
となる電極パターンが施された圧電デバイス片3Bを配
線部111の端子部111aとチップサーミスタ5Bの上
面に載置して、表側振動電極4aの端子41及び裏側振
動電極4bの端子42を配線部の端子部111a及びチッ
プサーミスタ5Bの上面側端子52に導電性接着剤81
び82で固定し、両持ち支持する。最後に、この単板ベ
ース上に箱形のキャップを被せてベースと接合してパッ
ケージを完成させる。なお、外部端子と配線部との側面
接続はスルーホール接続としてもよい。
Then, as shown in FIG. 3C, the piezoelectric device piece 3B provided with the electrode pattern for supporting both ends is placed on the terminal portion 11 1a of the wiring portion 11 1 and the upper surface of the chip thermistor 5B, fixed with the front side vibrating electrodes 4a terminals 4 1 and the rear side vibrating electrode 4b terminals 4 2 wiring portion terminal portions 11 1a and the upper surface side terminal 5 2 in the conductive adhesive 8 1 and 8 2 of the chip thermistor 5B of the both Have and support. Finally, a box-shaped cap is placed on the single plate base and joined to the base to complete the package. The side surface connection between the external terminal and the wiring portion may be through-hole connection.

【0018】この実施の形態によれば、実施の形態1と
同等の効果を奏する。なお、チップサーミスタ5Bがセ
ラミック単体ベース2と圧電デバイス片3B間の緩衝材
の役目も果すため、両持ち支持でも熱膨張係数の差によ
って生ずる歪応力の発生を抑制することができる。
According to this embodiment, the same effect as that of the first embodiment can be obtained. Since the chip thermistor 5B also serves as a cushioning material between the ceramic single base 2 and the piezoelectric device piece 3B, it is possible to suppress the occurrence of strain stress caused by the difference in thermal expansion coefficient even in the case of supporting both ends.

【0019】実施の形態3 図6について、まず、図に示すように、水晶等のデバイ
ス素板1の部分12をエッチング等によって薄板化して
振動部3Cとし、薄板化されない右側部分13の上部に
コンデンサ機能を含む薄膜サーミスタ5Cを直接成膜さ
せ、更に振動部3Cの下面及び素板左側部分11の下面
にかけて振動電極4a及びそのリード端子41を一体に
設けると共に、振動部3Cの上面及び素板右側部分13
の上面に振動電極4bと前記薄膜サーミスタ5Cが直列
となるように振動電極4bのリード端子42及び薄膜サ
ーミスタ5Cのリード端子51,52を設ける。最後にこ
のデバイス素板をパッケージに納めて完成させる。
[0019] For Embodiment 3 FIG. 6 embodiment, first, as shown in FIG, part 1 2 of the device the material plate 1 of quartz or the like by a thin plate and the vibration unit 3C by etching or the like, the right portion 1 3 which is not thinned A thin film thermistor 5C including a capacitor function is directly formed on the upper portion, and further, the vibrating electrode 4a and its lead terminal 4 1 are integrally provided on the lower surface of the vibrating portion 3C and the lower surface of the left side portion 1 1 of the blank plate, and the vibrating portion 3C Top and right side of the base plate 1 3
The lead terminal 4 2 of the vibrating electrode 4b and the lead terminals 5 1 and 5 2 of the thin film thermistor 5C are provided so that the vibrating electrode 4b and the thin film thermistor 5C are in series on the upper surface of the. Finally, the device blank is put into a package and completed.

【0020】以上のように構成したので、リード端子4
1,52間に振動部(圧電デバイス片)3cと薄膜サーミ
スタ5Cが直列に接続された温度補償回路内蔵の圧電デ
バイスが得られる。
The lead terminal 4 is constructed as described above.
A piezoelectric device with a built-in temperature compensation circuit in which the vibrating portion (piezoelectric device piece) 3c and the thin film thermistor 5C are connected in series between 1 and 5 2 can be obtained.

【0021】この実施の形態によれば、薄膜サーミスタ
5Cをデバイス素板に直接成膜しているので、小形のパ
ッケージに温度補償部分を内蔵することが可能となると
共に、同じパッケージに納まっているので、圧電デバイ
スの温度変化により精度良く感知することができる。
According to this embodiment, since the thin film thermistor 5C is directly formed on the device base plate, the temperature compensating portion can be built in a small package, and the thin package thermistor 5C is housed in the same package. Therefore, it is possible to detect with high accuracy by the temperature change of the piezoelectric device.

【0022】実施の形態4 図7について、まず、図示のように、セラミック単体ベ
ース2表面ないし表面から裏面にかけてメタライズ配線
部111〜113を施す。次に配線部112と113に接続
されるように単体ベース2上にコンサンサ機能を含む薄
膜サーミスタ5Cを直接成膜させる。そして、片持ち支
持となる電極パターンが施された圧電デバイス片3A
(図示省略)を薄膜サーミスタを枕部として図1と同様
に設け、キャップを被せてパッケージを完成させる。こ
の場合、配線部111,113の単体ベース2の下面に現
れている部分が外部端子となる。
Fourth Embodiment With reference to FIG. 7, first, as shown in the figure, metallized wiring portions 11 1 to 11 3 are provided from the front surface of the ceramic single base 2 or from the front surface to the back surface. Next, a thin film thermistor 5C having a concentrator function is directly formed on the single base 2 so as to be connected to the wiring parts 11 2 and 11 3 . Then, the piezoelectric device piece 3A provided with an electrode pattern for cantilever support
A thin film thermistor (not shown) is provided as a pillow portion in the same manner as in FIG. 1, and a cap is covered to complete the package. In this case, the portions of the wiring portions 11 1 and 11 3 exposed on the lower surface of the single base 2 serve as external terminals.

【0023】この実施の形態によれば、薄膜サーミスタ
を単体ベースに成膜しているので、実施の形態3同様の
効果が得られる。
According to this embodiment, since the thin film thermistor is formed on a single base, the same effect as in the third embodiment can be obtained.

【0024】[0024]

【発明の効果】本発明は、上述のとおり構成されている
ので、次に記載する効果を奏する。
Since the present invention is configured as described above, it has the following effects.

【0025】(1)片持ち支持の圧電デバイスはチップ
サーミスタ(コンサンサ機能も含む)を枕部として利用
するため、圧電デバイス単体と同等な容積で温度補償部
分を含んだ小形のデバイスを実現できる。
(1) Since the cantilever-supported piezoelectric device uses a chip thermistor (including a concentrator function) as a pillow portion, it is possible to realize a small-sized device having a temperature compensating portion with a volume equivalent to that of the piezoelectric device alone.

【0026】(2)両持ち支持の圧電デバイスはチップ
サーミスタを緩衝材として利用しているため、デバイス
片とセラミックスの熱膨張係数の差によって生じる歪み
応力の影響を受けにくい。
(2) Since the double-supported piezoelectric device uses the chip thermistor as a cushioning material, it is unlikely to be affected by strain stress caused by the difference in thermal expansion coefficient between the device piece and the ceramic.

【0027】(3)ベース上のどちらのサイドにも圧電
デバイス片を固定できるためにベースの方向性を規定す
る必要がない。
(3) Since the piezoelectric device pieces can be fixed to either side of the base, it is not necessary to specify the directionality of the base.

【0028】(4)ベース上のアルミナコーティングを
ストッパーとして利用することにより圧電デバイス片の
位置決め精度向上が見込める。
(4) The use of the alumina coating on the base as a stopper can improve the positioning accuracy of the piezoelectric device piece.

【0029】(5)圧電デバイス片と温度補償部(チッ
プサーミスタ)を同一のパッケージに収納したため、よ
り精度良くデバイス片の温度を感知することが可能とな
る。
(5) Since the piezoelectric device piece and the temperature compensating section (chip thermistor) are housed in the same package, the temperature of the device piece can be sensed more accurately.

【0030】(6)温度補償部と振動部を1枚のデバイ
ス素板上に設けることによって小形のデバイスを実現で
きる。
(6) A small device can be realized by providing the temperature compensating part and the vibrating part on one device base plate.

【0031】(7)パッケージベース上にサーミスタを
直接成膜させることによって従来のパッケージに温度補
償部を設けることが可能となる。
(7) By directly forming the thermistor on the package base, it becomes possible to provide the temperature compensating portion in the conventional package.

【図面の簡単な説明】[Brief description of drawings]

【図1】実施の形態1にかかる片持ち支持方式のデバイ
スの要部構造説明図。
FIG. 1 is an explanatory view of a main part structure of a cantilever type device according to a first embodiment.

【図2】スルーホールによる配線部と外部端子との接続
例を示すメタライズ後のベース構造説明図。
FIG. 2 is an explanatory view of a base structure after metallization showing an example of connection between a wiring portion and an external terminal by a through hole.

【図3】ベースの方向を規定する必要のない場合の配線
部メタライズ後のベース構造説明図。
FIG. 3 is an explanatory view of a base structure after metallization of a wiring portion when it is not necessary to specify the direction of the base.

【図4】アルミナコーティングで圧電デバイスを位置決
めした場合のデバイスの要部構造説明図。
FIG. 4 is an explanatory view of a main part structure of a device when a piezoelectric device is positioned by an alumina coating.

【図5】実施の形態2にかかる両持ち支持方式のデバイ
スの要部構造説明図。
FIG. 5 is an explanatory view of a main part structure of a double-support type device according to a second embodiment.

【図6】実施の形態3にかかるデバイス素板に薄膜サー
ミスタを成膜したデバイスの要部構造説明図。
FIG. 6 is an explanatory view of a main part structure of a device in which a thin film thermistor is formed on a device base plate according to the third embodiment.

【図7】実施の形態4にかかる単体ベースに薄膜サーミ
スタを成膜したデバイスの要部構造説明図。
FIG. 7 is an explanatory view of a main part structure of a device in which a thin film thermistor is formed on a simple substance base according to the fourth embodiment.

【図8】水晶振動子の温度補償回路。FIG. 8 is a temperature compensation circuit for a crystal unit.

【図9】温度補償前後の周波数偏差曲線図。FIG. 9 is a frequency deviation curve diagram before and after temperature compensation.

【符号の説明】[Explanation of symbols]

1…デバイス素板 2…セラミック単体ベース 3A,3B…圧電デバイス片 3C…振動部(圧電デバイス片) 4…振動電極 5…チップサーミスタ 6…外部端子 7…アルミナコーティング部 8…導電性接着剤 9…圧電デバイス固定部 10…スルーホール 11…メタライズ配線部 DESCRIPTION OF SYMBOLS 1 ... Device base plate 2 ... Ceramic simple substance base 3A, 3B ... Piezoelectric device piece 3C ... Vibrating part (piezoelectric device piece) 4 ... Vibrating electrode 5 ... Chip thermistor 6 ... External terminal 7 ... Alumina coating part 8 ... Conductive adhesive 9 ... Piezoelectric device fixing part 10 ... Through hole 11 ... Metallized wiring part

───────────────────────────────────────────────────── フロントページの続き (72)発明者 鈴木 克良 山形県米沢市通町1丁目1番37号 明電通 信工業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Katsura Suzuki 1-31 Tsudoricho, Yonezawa City, Yamagata Prefecture Meidentsu Shin Kogyo Co., Ltd.

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 単体ベースに配線部を施し片持ち支持の
圧電デバイス片を取り付けてパッケージに納めた表面実
装形圧電デバイスにおいて、 温度補償用のコンデンサ機能を含むチップサーミスタを
圧電デバイス片の枕部として取り付け、パッケージの中
に温度補償部分を内蔵したことを特徴とする表面実装形
圧電デバイス。
1. A surface mount type piezoelectric device in which a wiring part is provided on a single body base and a cantilevered piezoelectric device piece is attached to the package, and a chip thermistor including a capacitor function for temperature compensation is provided on the pillow part of the piezoelectric device piece. A surface mount type piezoelectric device characterized in that the temperature compensation part is built into the package.
【請求項2】 配線部の配線パターンを、チップサーミ
スタをベース長手方向の左右どちら側に配置してもその
反対側に圧電デバイス片を固定することができるように
したことを特徴とする請求項1記載の表面実装形圧電デ
バイス。
2. The piezoelectric device piece can be fixed to the opposite side of the wiring pattern of the wiring portion, regardless of whether the chip thermistor is arranged on the left or right side in the longitudinal direction of the base. The surface-mounted piezoelectric device according to 1.
【請求項3】 単体ベースに配線部を施し片持ち支持の
圧電デバイス片を取り付けてパッケージに納めた表面実
装形圧電デバイスにおいて、 温度補償用のコンデンサ機能を含む薄膜サーミスタを圧
電デバイス片の枕部として直接ベース上に成膜し、圧電
デバイス単体と同等の大きさのパッケージの内に温度補
償部分を内蔵したことを特徴とする表面実装形圧電デバ
イス。
3. A surface mount type piezoelectric device in which a wiring part is provided on a single body base and a cantilevered piezoelectric device piece is attached to the package, and a thin film thermistor including a capacitor function for temperature compensation is attached to the pillow part of the piezoelectric device piece. A surface mount type piezoelectric device characterized in that a temperature compensating portion is built in a package having the same size as that of a single piezoelectric device by directly forming a film on the base.
【請求項4】 単体ベースに配線部を施し両持ち支持の
圧電デバイス片を取り付けてパッケージに納めた表面実
装形圧電デバイスにおいて、 温度補償用のコンデンサ機能を含むチップサーミスタを
圧電デバイス片の緩衝部として取り付け、パッケージの
中に温度補償部分を内蔵したことを特徴とする表面実装
形圧電デバイス。
4. A surface mount type piezoelectric device in which a wiring part is provided on a single body base and a piezoelectric device piece supporting both ends is attached to the package, and a chip thermistor including a capacitor function for temperature compensation is provided in the buffer part of the piezoelectric device piece. A surface mount type piezoelectric device characterized in that the temperature compensation part is built into the package.
【請求項5】 デバイス素板の一部を薄くしてその両面
に振動電極を設けて振動部とし、デバイス素板の残余の
部分に温度補償用のコンデンサ機能を含むサーミスタを
設け、パッケージに納めたことを特徴とする表面実装形
圧電デバイス。
5. A part of the device base plate is thinned, and vibration electrodes are provided on both sides of the device base plate to form a vibrating portion, and a thermistor including a capacitor function for temperature compensation is provided in the remaining part of the device base plate, and the device is placed in a package. A surface-mounted piezoelectric device characterized in that
【請求項6】 サーミスタが、直接デバイス素板上に成
膜した薄膜サーミスタであることを特徴とする請求項5
記載の表面実装形圧電デバイス。
6. The thermistor is a thin film thermistor formed directly on a device base plate.
The surface-mounted piezoelectric device described.
JP25585895A 1995-10-03 1995-10-03 Surface mount type piezoelectric device Expired - Fee Related JP3239713B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25585895A JP3239713B2 (en) 1995-10-03 1995-10-03 Surface mount type piezoelectric device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25585895A JP3239713B2 (en) 1995-10-03 1995-10-03 Surface mount type piezoelectric device

Publications (2)

Publication Number Publication Date
JPH0998023A true JPH0998023A (en) 1997-04-08
JP3239713B2 JP3239713B2 (en) 2001-12-17

Family

ID=17284568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25585895A Expired - Fee Related JP3239713B2 (en) 1995-10-03 1995-10-03 Surface mount type piezoelectric device

Country Status (1)

Country Link
JP (1) JP3239713B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013034166A (en) * 2010-12-28 2013-02-14 Nippon Dempa Kogyo Co Ltd Surface-mounted crystal oscillator, and substrate sheet
US9391586B2 (en) 2012-11-29 2016-07-12 Seiko Epson Corporation Resonator device, electronic device, and moving object
US9831018B2 (en) 2013-05-13 2017-11-28 Murata Manufacturing Co., Ltd. Electronic component
WO2023127884A1 (en) * 2021-12-28 2023-07-06 京セラ株式会社 Piezoelectric vibration element and piezoelectric device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013034166A (en) * 2010-12-28 2013-02-14 Nippon Dempa Kogyo Co Ltd Surface-mounted crystal oscillator, and substrate sheet
US9391586B2 (en) 2012-11-29 2016-07-12 Seiko Epson Corporation Resonator device, electronic device, and moving object
US9831018B2 (en) 2013-05-13 2017-11-28 Murata Manufacturing Co., Ltd. Electronic component
WO2023127884A1 (en) * 2021-12-28 2023-07-06 京セラ株式会社 Piezoelectric vibration element and piezoelectric device

Also Published As

Publication number Publication date
JP3239713B2 (en) 2001-12-17

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