JPH0997939A - Laser apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable one apparatus to output various laser beams having differ ent optical intensity and different pulse periods and to make the apparatus compact. SOLUTION: There are provided in one casing 22, lower oscillators 11, 12 for outputting continuous wave (CW) laser beams, laser oscillator 13, 14 for outputting pulse wave (PW) laser beams, and a light synthesizing optical system 21 consisting of reflector system 19 and an optical fiber incidence optical system 20. The laser beams from the laser oscillator 11, 12, 13, 14 are synthesized and sent to a working tool 24 via an optical fiber 23 and are utilized in laser working. When they are used, particular ones of the laser oscillators 11, 14 are activated and oscillation phases of the oscillator 13, 14 are adjusted to output various laser beams.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser device, which is devised so as to be able to output laser beams of different types (intensity of laser beam, pulse period of laser beam, etc.) in a single laser device. It is a thing.

[0002]

2. Description of the Related Art Since laser light has a very high directivity and a large amount of energy, it can be used for precise welding, cutting, drilling, surface modification treatment, etc. by focusing on a small spot or line. ing. In this case, pulse wave laser light (PW) or continuous wave laser light (CW) is used according to the difference in the material of the work and the processing method. In general, pulse wave laser light is suitable for processing of making minute holes or spot welding without affecting the surroundings because its duration is short. Suitable for processing such as welding without eyes.

A YAG laser oscillator, which is a type of solid-state laser oscillator, is a YAG (yttrium, aluminum, garnet) doped with Nd as a laser single crystal.
A crystal is used, and a laser beam having a wavelength of 1.064 μm is output as a pulse wave laser beam or a continuous wave laser beam. Since the YAG laser light is an infrared laser light having a wavelength of 1.064 μm, it can be transmitted by an optical fiber. As a result, in the processing apparatus using the YAG laser oscillator, the laser light can be routed by the optical fiber, and the degree of freedom in design and arrangement is great.

In order to increase the output of YAG laser light, a cascade type laser oscillator in which a plurality of YAG crystals are arranged in series has been commercialized. However, since the optical axes of the YAG crystals have to be accurately aligned with each other, in practice, the limit is to arrange 6 YAG crystals in series, and it is practical to arrange 7 or more YAG crystals in series. Then it was impossible. Therefore, there is a limit to the maximum output of YAG laser light that can be output by one YAG laser device.
The laser device is a device including a laser oscillator (laser single crystal, excitation lamp, optical resonator), a condensing optical system, a casing, and the like.

Further, in a YAG laser oscillator of the type which outputs a pulse wave laser light, the YAG laser light (P
Although the frequency of W) can be increased, the upper limit frequency of the laser light frequency is suppressed by the power supply frequency and the characteristics of the YAG crystal. In other words, one YAG
There was an upper limit to the frequency of the YAG laser light of the laser device.

After all, the maximum laser light of the YAG laser device of the type that outputs CW becomes the state shown in FIG. 2A, and the maximum frequency laser light of the YAG laser device of the type that outputs PW is shown in FIG. The state shown in).

By the way, depending on the object to be processed, FIG.
There are cases where it is desired to use not only the laser light having the waveform as shown in (b) but also the laser light having the waveform as shown in FIGS. 2 (c), (d), (e), and (f). That is, CW with a large optical output (FIG. 2C), PW with a high frequency (FIG. 2D),
There are cases where different types of laser light such as PW (FIG. 2 (e)) having a large light output and laser light combining CW and PW (FIG. 2 (d)) are desired. That is, FIG. 2 (c)
If welding is performed using laser light having waveforms such as (d), (e), and (f), the penetration depth can be increased and the welding speed can be improved.

In order to produce laser light as shown in FIGS. 2 (c), (d), (e), and (f), conventionally, a plurality of laser devices are prepared, and the laser light output from each laser device is changed to two. Each type of laser light was obtained by synthesizing with a light path synthesizer.

Here, an example of a conventional technique for obtaining various laser beams by using a plurality of laser devices will be described with reference to FIG. As shown in FIG. 4, in the prior art, two laser devices 1 and 2 are used. This laser device 1,2
The laser light output from the optical fibers 3 and 4 is guided to the two-optical path combiner 5 and combined. The synthesized laser light is further guided to a processing tool (for example, welding tool) 7 by an optical fiber 6 and used for processing (for example, welding).

The synthesized laser beam waveform is shown in FIG.
When obtaining the waveform of (c), as the laser devices 1 and 2, devices of the type that output CW are adopted. When the waveform of FIG. 2D is to be obtained as the synthesized laser light waveform, a laser output device that outputs PW is used as the laser devices 1 and 2, and the oscillation phase is shifted. When it is desired to obtain the waveform of FIG. 2E as the synthesized laser light waveform, the laser devices 1 and 2 are of the type that outputs PW and the oscillation phases are synchronized. When it is desired to obtain the waveform of FIG. 2 (f) as the synthesized laser light waveform, the laser device 1 employs a device that outputs CW and the laser device 2 employs a device that outputs PW. To do.

[0011]

By the way, in the above-mentioned prior art, since the types of the laser devices 1 and 2 to be adopted are determined according to the desired laser beam waveform, the types are once determined and shown in FIG. When assembled as such a laser processing device, it is impossible to output laser light having other waveforms. That is, there is no versatility, and one laser processing device cannot output various types of laser light.

Further, since each of the laser devices 1 and 2 is an independent finished product composed of a laser oscillator, a condensing optical system, a casing, etc., each one is large, and a plurality of such devices are required. Installation will increase the overall system configuration. In other words, in terms of a system, even though there are functional parts that can be shared (for example, casing and optical system), the laser devices 1 and 2 are independent completed products, so the same functional parts cannot be shared, and the system configuration is large. Will turn into. Further, since the optical fibers 3 and 4 and the two-path combining device 5 are required for the photosynthesis, the system configuration becomes larger and larger.

In view of the above-mentioned prior art, it is an object of the present invention to provide a compact laser device capable of outputting laser light of various waveforms in a single device.

[0014]

The structure of the present invention for solving the above-mentioned problems is to provide at least one pulse wave laser light type laser oscillator for outputting a pulse wave laser light and a continuous wave laser light in one casing. It is characterized by comprising at least one continuous wave laser light type laser oscillator for outputting and a light combining optical system for combining the laser lights outputted from the respective laser oscillators and outputting to the outside.

Further, the configuration of the present invention is characterized in that the pulse wave laser light type laser oscillator and the continuous wave laser light type laser oscillator are YAG laser oscillators in which a laser single crystal is formed of a YAG crystal.

According to the configuration of the present invention, a plurality of continuous wave laser light type laser oscillators for outputting continuous wave laser light and a laser light output from the plurality of continuous wave laser light type laser oscillators are provided in one casing. And a photosynthesis optical system for synthesizing and outputting to the outside.

According to the structure of the present invention, a plurality of pulse wave laser light type laser oscillators for outputting pulse wave laser light and a laser beam outputted from the plurality of pulse wave laser light type laser oscillators are provided in one casing. And a photosynthesis optical system for synthesizing and outputting to the outside.

Since at least one pulse wave laser light type laser oscillator and continuous wave laser light type laser oscillator are provided in the present invention, various laser light waveforms can be obtained only by changing the combination of the laser oscillators to be excited.

Further, since the plurality of laser oscillators and the photosynthetic optical system are housed in one casing, the apparatus becomes compact.

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below.

FIG. 1 shows a laser device 10 according to an embodiment of the present invention. The laser device 10 includes four laser oscillators 11, 12, 13, and 14. Each of the laser oscillators 11, 12, 13, and 14 has a Y
Formed by AG crystals 11a, 12a, 13a, 14a, excitation lamps 11b, 12b, 13b, 14b, optical resonator total reflection mirrors 11c, 12c, 13c, 14c and optical resonator partial transmission mirrors 11d, 12d, 13d, 14d YAG laser oscillator. Of these, the laser oscillators 11 and 12 output a continuous wave laser light (CW) as shown in FIG. 2A, and the laser oscillators 13 and 14 have a pulse wave laser light (CW) as shown in FIG. PW) is output.

Each laser oscillator 11, 12, 13, 14
Are provided with condenser lens systems 15, 16, 17, 18 respectively, and laser oscillators 11, 12, 13, 1
The laser light output from 4 is focused by the condenser lens system 15, 1
By passing through 6, 17 and 18, it becomes almost parallel rays.

Further, the laser device 10 includes a reflecting mirror system 19
And a photosynthetic optical system 21 including the optical fiber incident optical system 20.
It has. In the reflecting mirror system 19, the condenser lens system 15,
The laser beams made substantially parallel by 16, 17, and 18 are reflected by the reflecting mirrors 19a, 19b, 19c, and 19d to enter the reflecting mirror 19e. The laser light reflected by the reflecting mirror 19e is condensed by the optical fiber incident optical system 20.

Moreover, in the present laser device 10, the laser oscillators 11, 12, 1 are housed in one casing 22.
3, 14, a condenser lens system 15, 16, 17, 18, and a light combining optical system 21 (a reflecting mirror system 19 and an optical fiber incident optical system 20).

A processing tool 24 is connected to the laser device 10 thus constructed via an optical fiber 23. Therefore, the laser light focused by the optical fiber incident optical system 20 is incident on the optical fiber 23 and sent to the processing tool 24 to be used for necessary processing.

In the laser device 10 of this embodiment, the laser oscillators 11 to 11 are used depending on the type of laser light required.
The starting state of 14 is switched as follows.

(1) When outputting the laser waveform shown in FIG. 2A, only the laser oscillator 11 is activated and the other laser oscillators 12, 13, 14 are stopped. (2) When outputting the laser waveform shown in FIG. 2B, only the laser oscillator 13 is activated and the other laser oscillators 11, 12, 14 are stopped. (3) When outputting the laser waveform shown in FIG. 2C, the laser oscillators 11 and 12 are activated and the laser oscillators 13 and 14 are stopped. (4) When outputting the laser waveform shown in FIG. 2D, the laser oscillators 13 and 14 are started, the oscillation phase is shifted, and the laser oscillators 11 and 12 are stopped. (5) When outputting the laser waveform shown in FIG. 2E, the laser oscillators 13 and 14 are activated, the oscillation phases are synchronized, and the laser oscillators 11 and 12 are stopped. (6) When outputting the laser waveform shown in FIG. 2 (f), the laser oscillators 11 and 13 are activated and the laser oscillators 12 and 14 are stopped.

(7) When outputting the laser waveform shown in FIG. 3A, the laser oscillators 11, 12, 13 are activated and the laser oscillator 14 is stopped. (8) When outputting the laser waveform shown in FIG. 3 (b), the laser oscillators 11, 12, 13, 14 are activated,
Moreover, the oscillation phases of the laser oscillators 13 and 14 are shifted.

After all, the present laser apparatus 10 can output laser light of various waveforms having different laser light intensity and pulse period by changing the combination of the laser oscillators to be activated. In other words, there is versatility, this 1
If the laser device 10 is provided, it can be applied to each application of laser processing. Further, in this laser device 10, since the necessary members are housed in one casing 22, there is no needless space for arrangement and the overall size is reduced.

In the apparatus shown in FIG. 1, the laser oscillator 1
1 and 12 output CW, and laser oscillators 13 and 14 output PW, but it is assumed that all four laser oscillators output CW, or all four laser oscillators output PW. It may be a type that does. When all the laser oscillators are of the CW type, laser light (CW) with high laser intensity can be output. When all the laser oscillators are PW type, laser light (PW) having a high laser intensity can be output by phase synchronization, and high frequency laser light (PW) can be output by shifting the phase.

Other types of laser oscillators may be used instead of the YAG laser oscillator. Furthermore, the number of laser oscillators provided in the casing of the laser device is
The number of installed units is not limited to four as shown in FIG. 1 and may be changed as necessary.

[0032]

As described above in detail with reference to the embodiments, according to the present invention, one laser device is provided with a plurality of laser oscillators, and the laser light of each laser oscillator is converted into a photosynthesis optical system. Since they are combined and output to the outside, it is possible to output each type of laser light by changing the combination of the laser oscillators to be activated. Therefore, a highly versatile laser device can be realized.

Further, since the laser oscillator and the photosynthesis optical system are provided in one casing, there is no wasted space and the size is reduced as a whole.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a laser device according to an embodiment of the present invention.

FIG. 2 is a waveform diagram showing waveforms of various laser lights.

FIG. 3 is a waveform diagram showing waveforms of various laser lights.

FIG. 4 is a configuration diagram showing a conventional technique.

[Explanation of symbols]

 1, 2 Laser device 3, 4, 6 Optical fiber 5 2 Optical path synthesizing device 7 Processing tool 10 Laser device 11, 12, 13, 14 Laser oscillator 15, 16, 17, 18 Condensing lens system 19 Reflecting mirror system 20 Optical fiber Incident optical system 21 Photosynthesis optical system 22 Casing 23 Optical fiber 24 Processing tool

Claims (4)

[Claims] 1. At least one pulse wave laser light type laser oscillator which outputs a pulse wave laser light, and at least one continuous wave laser light type laser oscillator which outputs a continuous wave laser light, in one casing; A laser device comprising: a photosynthesis optical system for synthesizing laser beams output from each laser oscillator and outputting the synthesized laser beams to the outside. 2. The laser device according to claim 1, wherein the pulse wave laser light type laser oscillator and the continuous wave laser light type laser oscillator are YAG laser oscillators in which a laser single crystal is formed of a YAG crystal. 3. A plurality of continuous wave laser light type laser oscillators for outputting continuous wave laser light and laser light outputted from the plurality of continuous wave laser light type laser oscillators are combined in one casing to externally. And a photosynthesis optical system for outputting to a laser device. 4. A plurality of pulse wave laser light type laser oscillators for outputting pulse wave laser light and laser light outputted from the plurality of pulse wave laser light type laser oscillators are combined in one casing to externally. And a photosynthesis optical system for outputting to a laser device.