JPH0994954A - Ink jet recording apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To achieve the miniaturization, wt. reduction and cost reduction of an ink jet recording apparatus using a passage substrate composed of a piezoelectric material. SOLUTION: An electrode 6 is formed to the lower half part of the side surface of the passage partition wall 5 of a passage substrate 11 composed of a piezoelectric material and having ink passages 4 formed thereto. The electrode connection part 31 drawn out to the bottom surface of the passage substrate 1 from the electrode 6 through the end surface of the passage substrate is formed to the passage substrate 1. A cover plate 2, a nozzle plate 3 and an ink supply manifold 12 are bonded to the passage substrate 1. A voltage supply cable 13 is connected to the electrode connection part 31 provided to the bottom surface of the passage substrate. Since an electrical connection part or a common ink chamber 12a is not positioned on the surface (upper surface) of the passage substrate but not positioned on the bottom surface thereof, the miniaturization and wt. reduction of an ink jet recording apparatus can be achieved and the cost reduction thereof is achieved by the reduction of the use amt. of the piezoelectric material.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording apparatus for recording by ejecting ink droplets.

[0002]

2. Description of the Related Art Conventionally, an ink jet recording apparatus for forming an ink flow path in a piezoelectric material itself is disclosed in Japanese Patent Laid-Open No. 1503/1990.
No. 55, etc. FIG. 21 is a cross-sectional view of such an inkjet recording device in a direction perpendicular to the flow path.
22 is a sectional view taken along the ink flow path.
In this recording apparatus, a plurality of groove-shaped ink flow paths 51 are formed by cutting or the like on a flow path substrate 50 made of a piezoelectric material polarized in the thickness direction, and the flow dividing the plurality of ink flow paths. After the electrodes 53 are formed on both side surfaces of the passage partition wall 52, a cover plate 54 is joined to the upper surface of the passage substrate, and a nozzle plate 56 having nozzles 55 for ejecting ink droplets is formed on the passage substrate 50. Each ink flow path 51 is connected to each nozzle 55 by being joined to the end face of the path outlet. The electrode 53 is drawn out to the rear side of the flow path of the surface of the flow path substrate 50 on which the ink flow path 51 is formed to form an electrode connecting portion 57, where it is electrically connected to an external electric circuit (not shown). It is connected. When a drive voltage is supplied to the electrode 53, an electric field perpendicular to the polarization direction 58 is generated in the flow path partition wall 52, and the flow path partition wall 52 bends in the shear mode toward the inside of the flow path 51, and the ink in the flow path is deflected. Is applied to eject ink from the nozzle 55. In addition, the ink consumed by the ejection is stored in the cover plate 5
4 (or the flow path substrate 50) provided in the common ink chamber 5
Replenished via 9.

Since these ink jet recording apparatuses use a flow path substrate made of a piezoelectric material and the flow path substrate itself serves as a pressure generating means, it is not necessary to provide another pressure source.
Excellent in high density of flow passages and nozzles.

[0004]

However, in these conventional ink jet recording apparatuses, in addition to the fact that the electrode connection portion 57 for connecting to an external electric circuit is provided on the same surface as the flow path engraving surface of the flow path substrate 50. A common ink chamber 59 is formed in the cover plate 54 or the flow path substrate 50. That is, the flow path 51 itself is formed only from one end surface of the flow path substrate 50 to the intermediate portion, and the electrode connecting portion 5 is formed behind the flow path substrate 50.
7 and the common ink chamber 59 exist. Therefore, the ink flow path (pressurizing part) originally required to eject ink droplets
The lengths of the flow path substrate 50 and the cover plate 54 are much larger than the length of 51, which hinders reduction in size and weight. Explaining in detail with reference to FIG. 22, the ink flow path (pressurizing portion) used for ejecting ink droplets is from the nozzle-side end surface to the common ink chamber 59.
Is a portion indicated by L in the drawings up to, and normally L = 2 to 10
The length of the flow channel substrate including the common ink chamber 59 and the electrode connecting portion 57 is 15 to 2 while the length is about mm.
It is 5 mm. As described above, in the conventional ink jet recording apparatus, it is difficult to reduce the length in the flow path direction, which hinders reduction in size and weight. Further, the piezoelectric material is the most expensive material among the materials constituting the main part of the inkjet recording apparatus, and the conventional method causes a high cost because the piezoelectric material is used in a large amount. In addition, in the conventional configuration, in addition to the ink flow path (pressurizing section) 51, the common ink chamber 59
Also in the electrode connecting portion 57, an electric capacity was formed between the electrodes, and the consumption current and the power increased more than necessary.

The present invention solves the above-mentioned problems, and downsizes and reduces the weight of an ink jet recording apparatus that uses a flow path substrate, at least a part of which is made of a piezoelectric material, and the flow path substrate itself serves as a pressure generating means. , Low cost and low power consumption are achieved.

[0006]

In order to achieve the above object, in the present invention, a plurality of groove-shaped ink flow passages are engraved at least in part made of a piezoelectric material and correspond to each ink flow passage. A channel substrate provided with a plurality of electrodes, a cover plate fixed to the ink channel forming surface of the channel substrate, and an opening of each ink channel fixed to one end surface of the channel substrate. It is characterized in that it has a nozzle plate having a plurality of nozzles that respectively communicate with the ends, and an electrode connecting portion that extends from each electrode and is bent to be drawn out to the end face of the flow path substrate. In addition, the electrode connection part,
In some cases, it may be extended and bent from each electrode to be drawn to the end face of the flow path substrate, and then further extended and bent to be drawn to the bottom surface of the flow path substrate. In this case, on the bottom,
It is also possible to provide a drive circuit element connected to the electrode connecting portion. The electrode connecting portion can be easily manufactured if the metal film is formed in the shallow groove formed on the end surface or the bottom surface. Preferably, a manifold having a common ink chamber that supplies ink to each ink channel is fixed to one of the end faces of the channel substrate. The plurality of electrode connecting portions may be alternately formed on one end face side and the other end face side of the flow path substrate.

[0007]

DETAILED DESCRIPTION OF THE INVENTION The details of the present invention will be described below with reference to the accompanying drawings. 1 is a cross-sectional view of the first embodiment of the present invention taken along the flow path direction, and FIG. 2 is a rear view of the first embodiment of the present invention as viewed from the rear of the flow path.

The main parts of the ink jet recording apparatus according to the present invention are a flow path substrate 1 made of a piezoelectric material, a cover plate 2 bonded to the upper surface of the flow path substrate, and a nozzle plate bonded to one end surface of the flow path substrate 1. It is composed of three.
A plurality of groove-shaped ink flow paths 4 are engraved on the upper surface of the flow path substrate 1 by cutting or the like, and the ink flow paths 4 are open to the end surface of the flow path substrate 1. Electrodes 6 are formed on both side surfaces of a flow path partition wall 5 that divides the ink flow path 4. Further, the nozzle plate 3 is fixed to the end face of the flow path substrate 1, and the nozzle 7 which communicates with each ink flow path 4 and discharges an ink droplet is formed in the nozzle plate 3. The length of the flow path substrate 1 and the cover plate 2 in the flow path direction is configured to be substantially equal to the length L of the ink flow path 4, which is a portion that applies pressure to the ink. In addition, the electrode 6 is formed over the entire length of the ink flow path 4, and further, the end surface of the flow path substrate 1 located at a right angle to the ink flow path 4 (in this embodiment, the rear end surface of the flow path opposite to the nozzle plate 3). Is also formed continuously.

Next, a method of manufacturing the flow path substrate 1 used in the ink jet recording apparatus of the first embodiment will be described with reference to FIG. 3 is a process diagram for explaining the method of manufacturing the flow channel substrate 1 used in the first embodiment, and is a front view of the rear end face of the flow channel substrate. First, as the first step, PZ
As shown in FIG. 3A, the substrate 1 made of a piezoelectric material such as T and polarized in the thickness direction is machined by a dicing saw or the like to form a plurality of substantially parallel groove-shaped ink channels 4.
To form The channel substrate 1 has a length of 2 mm to 10 mm and a thickness of 0.5 to 2 mm, and the channel depth is, for example, 200 μm.
˜1 mm, the channel width is, for example, 50 μm to 200 μm, and the thickness of the partition walls 5 that partition the channel is, for example, 50 μm to 200 μm.
It is.

In the second step, an electrode film 6a is formed on the entire surface including the inside of the channel 4 by sputtering or electroless plating on the channel substrate 1 in which the channel is processed as shown in FIG. 3B. Form. The electrode material is Al, Ni, Cr, Au, etc., 0.1μ
It is formed with a thickness of m to 3 μm. The third step is the separate formation of the electrodes 6. In the present embodiment, the piezoelectric flow path substrate 1 is polarized in the substrate thickness direction, and an electric field perpendicular to the polarization direction 8 is applied to the flow path partition wall 5 to move the partition wall 5 to the inside of the ink flow path 4 in the shear mode. The ink droplets are deformed toward each other, and ink droplets are ejected from the nozzle 7. To do this ink discharge efficiently, electrode 6 must be formed to approximately half the height direction of the passage partition walls 5, as shown in FIG. 3 (c), YAG laser or F ₂ , ArF, KrF, XeC
Laser light 9a by excimer laser such as l, XeF
To obliquely irradiate the channel surface of the channel substrate 1 and use the channel partition wall 5 itself as a mask to remove the electrode film 6a on the channel surface only in the upper half and obtain the electrode 6 having a desired shape in the lower half. You can

Further, the rear end surface of the flow path on the side opposite to the nozzle plate 3 is protected by a metal mask 10 such as phosphor bronze to irradiate the laser beam 9b, as shown in FIG.
The electrode connecting portion 11 for supplying electric power from an external electric circuit (not shown) as shown in (d) is formed separately.
In this way, the flow path substrate 1 on which the desired electrode 6 and the electrode connecting portion 11 are formed can be obtained. The electrode film 6a provided on the end surface of the flow path substrate 1 on the nozzle side, both end surfaces parallel to the flow path 4, and the bottom surface is removed by the entire surface irradiation of the laser or mechanical polishing.

In the flow path substrate 1 thus produced,
The cover plate 2 of PZT, ceramics, glass, plastic or the like having a thickness of about 0.2 to 2 mm is joined by, for example, an epoxy adhesive.

Next, a nozzle plate 3 formed by processing a polyimide film as a material by laser irradiation or formed by using a metal as an electroforming or micro press method is bonded to the end surface of the flow path substrate 1 and each nozzle is formed. 7 is communicated with each ink flow path 4, and the main part of the ink jet recording apparatus of this embodiment shown in FIG. 1 is completed.

Next, the ink supply manifold 12 having the common ink chamber 12a therein is joined to the rear end face of the flow path. Finally, a cable 13 such as an FPC or heat seal having wiring for supplying a voltage waveform from an external electric circuit (not shown) to the electrode is connected to the electrode connecting portion 11 provided on the end face of the flow path substrate 1. After connection, the ink jet recording apparatus of this embodiment shown in FIG. 4 is completed.

According to this embodiment, the conventional method is 15
The length of the flow path substrate 1 which has been as large as mm to 25 mm is substantially equal to the length of the ink flow path 4 from 2 mm to
The size can be significantly reduced to 10 mm, and the size and weight of the ink jet recording apparatus can be reduced to less than half of the conventional one. Further, the piezoelectric material forming the flow path substrate 1 is the most expensive material among the raw materials, but the cost of the raw material is halved due to downsizing, and the cost of the inkjet recording apparatus can be reduced. Further, since the size is reduced, the additional capacity other than the ink flow path portion is reduced, and the power consumption can be reduced.

FIG. 5 is a process diagram illustrating a method of manufacturing the flow path substrate 14 used in the ink jet recording apparatus according to the second embodiment of the present invention, and FIG. 6 is a flow chart of the main part of the second embodiment. The perspective view of a road rear part is shown. A method of manufacturing the flow path substrate 14 used in the ink jet recording apparatus of the second embodiment will be described with reference to FIG. The materials having no description such as material names and dimensions are the same as those in the first embodiment. In the first step, as shown in FIG. 5A, a plurality of substantially parallel groove-shaped ink channels 4 are formed in the piezoelectric channel substrate 14 by mechanical cutting using a dicing saw or the like. Next, on the end face forming a right angle with the surface on which the flow path 4 is formed,
The shallow groove 15 connected to each flow path 4 is machined. Shallow groove 15
The required depth is 3 μm, which is the maximum value of the electrode film thickness.
Although it is the above, 5 μm or more is desirable in consideration of machining accuracy. If it is too deep, the electrical connection with the cable 13 will be hindered, so the thickness is preferably 30 μm or less. The width of the shallow groove 15 is almost the same as that of the flow path portion, for example, 50 μm to
200 μm.

In the second step, the electrode film 16a is formed on the entire surface of the piezoelectric flow path substrate 14 in which the flow path 4 is processed as shown in FIG. 5B by sputtering or electroless plating. The third step is the separate formation of the electrodes 16. YAG
A laser beam 17 such as a laser or an excimer laser such as F2, ArF, KrF, XeCl or XeF is obliquely applied to the flow channel substrate flow channel surface, and the flow channel partition wall 5 itself is used as a mask to remove the electrode film 16a on the flow channel surface. Only the upper half can be removed.

Further, when the end face at the rear of the channel is polished by a mechanical method to the extent that the shallow groove 15 is not removed, only the electrode film in the shallow groove 15 remains, and as shown in FIG. Electrode connection part 1 for supplying electric power to the end face from an external electric circuit
8 are formed separately.

According to this embodiment, the metal mask for forming the electrode pattern on the rear end face of the flow channel, which is used in the first embodiment, is unnecessary, and the manufacturing process can be simplified.

FIG. 7 shows a rear view of the third embodiment as seen from the rear side of the flow path. In the third embodiment, since the flow path substrate 20 in which the two piezoelectric substrates 20a and 20b having different polarization directions 19 are bonded together is used, the deformation directions of the flow path partition wall due to the upper and lower shear modes are the same. Therefore, it is not necessary to remove the electrode 21 by half, and the manufacturing process can be further simplified.

FIG. 8 shows a rear view of the fourth embodiment as seen from the rear of the flow channel. In the fourth embodiment, the projections 23 are provided below the respective flow paths 4 formed on the piezoelectric flow path substrate 22, and the electrodes 24 provided on the upper surfaces of the projections and the electrodes 25 provided below the projections 23 are provided.
When a voltage is applied between the two, an electric field parallel to the polarization direction 26 is generated in the convex portion, the convex portion 23 is deformed upward in the drawing in the piezoelectric longitudinal mode, and pressure is applied to the ink in the ink flow path. The generated ink droplets are ejected. The electrode 24 on the upper surface of the convex portion is drawn out to the end face perpendicular to the flow path 4 of the flow path substrate 22 by the same method as the above-mentioned method, and becomes the electrode connecting portion 27 in which the end surface is electrically connected to the external electric circuit. ing. As described above, the present invention can be applied not only to the inkjet recording apparatus using the shearing mode.

FIG. 9 is a sectional view taken along the flow path direction of the fifth embodiment. In the fifth embodiment, the electrode 6 is drawn out to the same end surface as the surface of the flow path substrate 1 to which the nozzle plate 3 is joined, and the electrode connection portion 28 and the cable 13 are electrically connected on the end surface on the nozzle plate side. Has been done. With this configuration, the flexibility of the cable wiring is increased, and the entire recording device can be downsized. If there is a slight gap between the flow path substrate 1 and the nozzle plate 3 in the portion where the electrode connecting portion 29 does not exist, an adhesive for bonding the nozzle plate 3 is filled and sealed.

FIG. 10 is a sectional view taken along the flow path direction of the sixth embodiment. In the sixth embodiment, the electrodes 6 are alternately drawn out at every other flow path to both end surfaces of the end surface of the flow path substrate 1 to which the nozzle plate 3 is joined and the end surface on the opposite side, and the electrode connection is made on both end surfaces. The parts 29, 30 and the cable 13 are electrically connected to each other and connected to an external electric circuit. Conventionally, it was difficult to connect electrodes with a flow path pitch of about 100 μm or less. By adopting this configuration, the pitch of the electrode connection portions can be doubled with the flow path pitch, and a high-definition recording device can be realized. it can.

A seventh embodiment is shown in FIGS. The electrode 6 extends through the ink flow path 4 and the end surface of the flow path substrate 1 to the bottom surface of the flow path substrate (the surface opposite to the flow path forming surface). That is, the electrode film 6a is formed on the entire surface including the bottom surface of the flow path substrate 1 made of the piezoelectric material and having the ink flow path 4 formed therein. As shown in FIG. 3 (a), the laser beam 9 a is obliquely applied to the flow path substrate flow path surface, and the flow path partition wall 5
By using itself as a mask, the electrode 6a on the channel surface
Is removed only in the upper half, and the electrode 6 is left in the lower half. Further, the rear end surface of the flow path on the side opposite to the nozzle plate 3 and the bottom surface of the flow path substrate are protected by a metal mask 32 such as phosphor bronze to irradiate the laser beam 9b with a necessary portion, and
The electrode connection part 31 for supplying electric power from an external electric circuit is formed as shown in FIG. The nozzle-side end surface of the flow path substrate and the electrode films 6a on both end surfaces parallel to the flow path are
It is removed by irradiation of the entire surface of the laser or mechanical polishing.

The cover plate 2 and the nozzle plate 3 are joined to the flow path substrate 1 to complete the main part of the ink jet recording apparatus. Then, the ink supply manifold 12 having the common ink chamber 12a therein is joined to the rear end surface of the flow path. Finally, the voltage supply cable 13 is connected to the electrode connecting portion 31 provided on the bottom surface of the flow path substrate, as shown in FIG.
The ink jet recording apparatus of this embodiment shown in FIG. 4 is completed.

An eighth embodiment is shown in FIGS. In the eighth embodiment, as shown in FIG. 15A, the end face and the bottom face that are perpendicular to the surface of the flow path substrate on which the flow path is formed are provided at positions where electrode connection parts are to be formed. After forming the shallow groove 34 connected to the flow path 11, the electrode film 35a is formed on the entire surface. Then, as shown in FIG. 15B, the laser beam 36 is irradiated to form the electrode 6 on the side surface of the flow path partition wall 5, and the end surface and the bottom surface on which the shallow groove 34 is formed are mechanically processed. Polish to the extent that 34 does not disappear. As a result, only the electrode film in the shallow groove 34 remains, and as shown in FIG. 15C, the electrode connecting portion 37 for supplying electric power from the external electric circuit is formed on the bottom surface of the flow path substrate 33.

FIG. 17 shows a front view of the ninth embodiment as seen from the rear of the flow path. In the ninth embodiment, two polarization directions are different.
Since the flow path substrate 38 in which the piezoelectric substrates 38a and 38b are bonded together is used, the deformation directions of the flow path partition walls due to the upper and lower shear modes are the same, and it is not necessary to remove the electrode 39 by half. Further, the manufacturing process can be simplified.

FIG. 18 shows a sectional view taken along the flow path direction of the tenth embodiment. In the tenth embodiment, the electrode is led out to the bottom surface of the flow path substrate 1 via the same end surface as the surface of the flow path substrate 1 to which the nozzle plate 3 is joined, and the electrode is externally provided on the nozzle plate side of the bottom surface of the flow path substrate 1. Electrode connection part 41 with electric circuit
Has been done. With this configuration, since the manifold 12 for supplying the ink having the common ink chamber 12a inside and the electrode connecting portion 41 provided at the rear of the flow path can be separated, the ink sealing of the manifold 12 and the main portion of the inkjet recording apparatus is possible. The reliability of can be improved.

FIG. 19 shows a sectional view taken along the flow path direction of the eleventh embodiment. In the eleventh embodiment, every other flow path from each electrode is alternately routed through the two end faces of the flow path substrate 1 and is drawn out to at least a part of the bottom surface of the flow path substrate, so that the electrode connecting portions 42 and 43 are formed. It is provided. And the flow path substrate 1
Electrical connection between the electrode connection portions 42 and 43 and the cable 13 is made on the bottom surface of the. Conventionally, the flow path pitch is about 100
The electrode connection, which was difficult when the thickness was less than μm, can double the pitch of the electrode connection portions by adopting this configuration, and the electrode connection can be performed even at the flow path pitch of about 50 μm. A fine recording device can be realized.

FIG. 20 is a sectional view taken along the flow path of the twelfth embodiment. In the twelfth embodiment, the flow path substrate 1
The drive circuit element 44, a so-called IC, is bonded to the bottom surface. The output part of the drive circuit element 44 is electrically connected to the electrode connecting part 43 drawn out to the bottom surface of the flow path substrate via the end surface of the flow path substrate by wire bonding or the like. Control signals and electric power to the drive circuit elements are supplied from an external electric circuit (not shown) via the cable 13. By serially transferring the data to the drive circuit element 44, the number of electrical wirings connected from the external electrical circuit to the inkjet recording device can be significantly reduced. In this embodiment, since the bottom surface of the flow path substrate, which has not been used conventionally, is used, the drive circuit element 44 can be mounted without enlarging the flow path substrate 1 and the entire inkjet recording apparatus.

[0031]

As described above, according to the present invention, in the ink jet recording apparatus in which the flow path substrate at least a part of which is made of the piezoelectric material is used and the electrodes are formed corresponding to the respective ink flow paths, the flow from each electrode is performed. Since the electrode connection part extended to the end surface or the bottom surface of the path substrate is formed, the electrical connection with the external drive circuit is made on the end surface or the bottom surface, and the electrical connection on the ink flow path forming surface is for electrical connection. It is not necessary to provide a space, and the flow path substrate and the cover plate can have substantially the same length as the ink flow path. Therefore, according to the present invention, it is possible to reduce the size and weight of the inkjet recording apparatus to less than half that of the conventional one, and the cost of raw materials is reduced by the downsizing, and in particular, the amount of expensive piezoelectric material used is reduced. The device can be provided. Further miniaturization reduces the added capacity and enables lower power consumption. Further, it is more effective if the manifold having the common ink chamber is fixed to the end face of the flow path substrate instead of providing the common ink chamber on the flow path forming surface. When the electrode connecting portion is provided on the bottom surface of the flow path substrate, the drive circuit element can be mounted without increasing the size of the shape flow path substrate and the inkjet recording device.

If a metal film is formed in the shallow groove formed on the end surface or the bottom surface of the flow path substrate to form the electrode connecting portion, the manufacturing process is simplified. When the plurality of electrode connecting portions are alternately formed on one end surface side and the other end surface side of the flow path substrate, the pitch of the electrical connection portions can be doubled as compared with the flow path pitch. Contributes to higher density of roads.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a first embodiment of the present invention taken along the flow path direction.

FIG. 2 is a rear view of the first embodiment as viewed from the rear of the flow path.

FIG. 3 is an explanatory diagram of a method of manufacturing the flow path substrate of the first embodiment.

FIG. 4 is a cross-sectional view of the entire device of the first embodiment.

FIG. 5 is an explanatory diagram of a method of manufacturing the flow path substrate of the second embodiment.

FIG. 6 is a perspective view of a flow path rear portion of the main part of the second embodiment.

FIG. 7 is a rear view of the third embodiment as viewed from the rear of the flow path.

FIG. 8 is a rear view of the fourth embodiment as viewed from the rear of the flow path.

FIG. 9 is a sectional view taken along the flow path direction of the fifth embodiment.

FIG. 10 is a sectional view taken along the flow path direction of the sixth embodiment.

FIG. 11 is a sectional view taken along the flow path direction of the seventh embodiment.

FIG. 12 is a rear view of the seventh embodiment as viewed from the rear of the flow path.

FIG. 13 is an explanatory diagram of the manufacturing method of the flow path substrate of the seventh embodiment.

FIG. 14 is a sectional view of the entire device of the seventh embodiment.

FIG. 15 is an explanatory diagram of the manufacturing method of the flow path substrate of the eighth embodiment.

FIG. 16 is a perspective view of a flow path rear portion of the main part of the eighth embodiment.

FIG. 17 is a rear view of the ninth embodiment as viewed from the rear of the flow path.

FIG. 18 is a sectional view taken along the flow path direction of the tenth embodiment.

FIG. 19 is a sectional view taken along the flow path direction of the eleventh embodiment.

FIG. 20 is a sectional view taken along the flow path direction of the twelfth embodiment.

FIG. 21 is a cross-sectional view of a conventional example in a direction perpendicular to a flow path.

FIG. 22 is a cross-sectional view taken along the flow path direction of a conventional example.

[Explanation of symbols]

1, 14, 20, 22, 33, 38 ... Flow path substrate 2 ... Cover plate 3 ... Nozzle plate 4 ... Ink flow path 5 ... Flow path partition wall 6, 21, 24, 25 , 39 ... Electrode 7 ... Nozzle 11, 18, 27, 28, 29, 30, 31, 37, 4
1, 42, 43 ... Electrode connection part 12 ... Manifold 12a ... Common ink chamber 15, 34 ... Shallow groove

Claims (6)

[Claims] 1. A flow channel substrate, at least a part of which is made of a piezoelectric material, in which a plurality of groove-shaped ink flow channels are engraved, and a plurality of electrodes are provided corresponding to the respective ink flow channels. A cover plate fixed to the ink flow path forming surface of the flow path substrate, and a plurality of nozzles fixed to one end surface of the flow path substrate and communicating with the open ends of the ink flow paths, respectively. An ink jet recording apparatus comprising: a nozzle plate having an electrode; and an electrode connecting portion that extends from each of the electrodes and is bent to be drawn out to an end surface of the flow path substrate. 2. The electrode connecting portion extends and bends from each of the electrodes and is drawn out to an end face of the flow path substrate,
The ink jet recording apparatus according to claim 1, wherein the ink jet recording apparatus further extends and bends and is drawn out to the bottom surface of the flow path substrate. 3. The ink jet recording apparatus according to claim 2, wherein a drive circuit element connected to the electrode connecting portion is provided on the bottom surface. 4. The inkjet according to any one of claims 1 to 3, wherein the electrode connecting portion has a metal film formed in a shallow groove formed on the end surface or the bottom surface. Recording device. 5. A manifold having a common ink chamber for supplying ink to each of the ink channels is fixed to one of the end faces of the channel substrate. 4. The inkjet recording device according to any one of 4. 6. The plurality of electrode connecting portions are alternately formed on one end face side and the other end face side of the flow channel substrate, according to any one of claims 1 to 5. Inkjet recording device.