JPH0373348A - Ink-jet recording device - Google Patents

Abstract

PURPOSE:To improve the degree of integration, to lower driving voltage, to increase effective frequency and to simplify and reduce components by forming a slit to the piezoelectric body of a piezoelectric vibrator and filling the slit section with an elastic body having a specific elastic modulus. CONSTITUTION:A common electrode 5 is mounted to a front section, a signal line 7 is arranged to a rear section and a drive IC body 4 is loaded on the upper section of laminated piezoelectric elements 1 regarding an electric signal, thus miniaturizing a head. Flow paths are arrayed zigzag in the vertical direction of a flow path plate in order to increase density, and the drive IC body 4 is loaded directly on the piezoelectric elements 1, thus improving the effect of heat dissipation, then also allowing connection with the signal line on incorporation. When the electric signal is input to a selected actuator, the volume of a flow path 9 corresponding to the actuator is changed, and ink only by the changing section is injected from the corresponding orifice of a nozzle plate 3. Displacement volume is acquired at a large value within a range of an elastic modulus of 0.01-300kg/mm<2>.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an inkjet recording device, and more particularly to a head portion of an inkjet recording device.

Hige Hito: Conventional on-demand inkjet heads using piezoelectric actuators have the disadvantage that it is difficult to achieve high integration of the actuators, and that attempting to increase the integration requires a higher driving voltage. The prior art described in the following known documents improves these problems.

First, in Japanese Patent Publication No. 60-8953, a pressure-bonding actuator is provided in the ink opposite to the nozzle.

The actuator is driven to eject ink, and only a small portion of the actuator's displacement (the part facing the nozzle) occurs.

The piezoelectric vibrator only contributes to ink ejection, and there is a limit to high integration due to the characteristics of the piezoelectric vibrator.

In addition, Japanese Patent Publication No. 61-45542 uses a beam-shaped piezoelectric actuator as the partition wall of the flow path, and by making the flow path partition wall a beam-shaped actuator, it solves the problem of reduction in actuator area due to high integration. However, the processing of piezoelectric elements.

There were manufacturing difficulties such as placement, and there was a need to reduce processing costs.

Furthermore, Japanese Patent Application Laid-Open No. 63-252750 discloses a method in which ink is ejected by driving a partition wall of a flow path with a piezoelectric actuator, and the ink in the flow path is ejected using lateral deformation of a piezoelectric member parallel to the array direction. It is disclosed that by using the flow path partition as an actuator, the problem of reduction in actuator area due to high integration is solved, and efficiency is further improved by driving the piezoelectric element in the d15 mode. However, manufacturing difficulties such as processing the piezoelectric element and forming the electrodes could not be resolved, and there was a need to reduce processing costs. Further, since voltages are applied to the drive electrode and the ground electrode in a complicated manner, it is complicated to take out and connect the electrodes. In addition, the method described in the same publication has a large displacement constant and is suitable for low-voltage operation, but as the density increases, the rigidity of the side walls also weakens, causing deformation due to the increase in internal pressure during discharge and reducing discharge efficiency. There was a problem. In addition, volume changes occur in the flow passages on both sides to drive the side walls, and the lI contact orifice cannot be driven simultaneously, resulting in an effective frequency of 1/2, which is disadvantageous for increasing speed. Furthermore, in terms of processing and manufacturing, it is necessary to provide an electrode on the side wall of the flow path, and when using water-based ink, an insulating layer must be provided on the electrode surface.
There was a difficulty in forming a film on the side walls of the groove.

Furthermore, Japanese Patent Application Laid-Open No. 59-159358 uses a piezoelectric actuator (block-shaped) as the wall portion of the flow path.
The wall portion of the channel was constructed of block-shaped piezoelectric actuators, which made processing easier, but the integration was poor because there was a buffer section to prevent mutual interference.

Furthermore, in Japanese Patent Application Laid-Open No. 62-56150, a flow path is formed in the piezoelectric actuator itself, which facilitates machining. However, when the actuator is driven, the volume displacement within the flow path increases and decreases. coexistence, etc., and there were problems with characteristic efficiency.

Additionally, U.S. Pat. No. 4,072,959 provides an ejector pin in close proximity to the orifice.

It is disclosed that the bending displacement pushes out the ink just before the orifice.

However, the parts structure is complicated, such as using a beam with one cantilever and one side, and an extrusion block installed in the actuator part.
It also had the disadvantage of being difficult to process.

Also, rIMC1986Proceedings
Koba, J (May 28-30 1986) discloses that green sheets are laminated, holes are provided in the laminated layers, and the holes are caused to be displaced by the bending moment of a piezoelectric member provided on the top, and discharged. has been done. However, although it is technically interesting, it has the problem that compliance is small and it is difficult to lower the voltage because only the electrode part of the flat structure is displaced.

In addition, it is necessary to control the degassing conditions and time (
There were many difficulties, such as the cost of approximately IW.

Other conventional techniques include a method in which a heater is installed on the flow path, and bubbles are explosively grown in a part of the heater in response to an electric signal, and discharged due to this change in volume, but this method causes stress to be applied to the flow path. There were problems with reliability, such as ink dye burning on some parts of the heater.

Tsuji: The present invention has been made in part in view of the above-mentioned circumstances.
By configuring piezoelectric elements into new shapes.

We aim to improve performance by increasing integration, reducing drive voltage, and increasing effective frequency. We also improve processability and assembly by simplifying and reducing the number of components, thereby reducing costs. In addition, by optimizing the compliance of the actuator part, we aim to reduce the drive voltage, and by making assembly easier, we aim to reduce costs.Furthermore, by using a piezoelectric vibrator with low power consumption, The purpose of this invention is to provide a head section of an inkjet recording apparatus that can easily manufacture a highly integrated head, improve the efficiency of head characteristics, and can be executed by a simple linear motion method.

In order to achieve the above object, the present invention provides (1) a large number of parallel channels arranged in a direction perpendicular to the longitudinal direction of the channels and separated by channel isolation members; It has each nozzle connected to the flow path for ejection, and a connecting means for supplying liquid to the flow path, and a piezoelectric vibrator that generates deformation is disposed in a part of the ink flow path, and the piezoelectric In an inkjet recording apparatus that generates deformation at the bottom of the ink flow path by driving a vibrator to generate a pressure change in the ink flow path and ejects ink droplets from the ejection port, the piezoelectric vibrator includes: A piezoelectric body with slits, or (2) a large number of parallel channels arranged in a direction perpendicular to the longitudinal direction of the channels and separated by channel isolation members, and for droplet jetting. has each nozzle connected to the flow path and a connecting means for supplying liquid to the flow path, and a piezoelectric vibrator for generating deformation in a part of the ink flow path is disposed, and the piezoelectric vibrator is In the inkjet recording apparatus, the piezoelectric vibrator is configured to generate deformation at the bottom of the ink flow path by driving, thereby generating a pressure change in the ink flow path, and ejecting ink droplets from the ejection opening.

A slit is provided in the piezoelectric body, and the elastic modulus of the slit is 30.
Filling with an elastic body of 0 kg/-2 or less and 0.01 kg/13 or more; and (3) providing a thin film material to cover either or both of the slit portion of the piezoelectric body or the groove portion of the flow path. That, or.

(4) Arranged in a direction perpendicular to the longitudinal direction of the channel.

The ink flow path has a large number of parallel flow paths separated by flow path isolation members, each nozzle connected to the flow path for ejecting droplets, and a connecting means for supplying liquid to the flow path. A piezoelectric vibrator that generates deformation is disposed in a part of the ink flow path, and by driving the piezoelectric vibrator, deformation is generated at the bottom of the ink flow path to generate a pressure change in the ink flow path. In the inkjet recording device that ejects ink droplets, the flow path isolation member is an elastic body capable of simple compression deformation and tensile deformation, and (5) one of the piezoelectric vibrators corresponding to the ink flow path is provided. By selectively driving two parts, simple compressive deformation and tensile deformation are generated in the flow path isolation members on both sides forming the corresponding ink flow path, thereby promoting pressure changes in the ink flow path. That is.

Hereinafter, the present invention will be explained based on examples.

FIGS. 1(a) and 1(b) are configuration diagrams for explaining one embodiment of an inkjet recording apparatus according to the present invention, and FIG.
) is a perspective view seen from the front, and Figure (b) is a perspective view seen from the back. 6 is a common electrode, 6 is an ink inlet, 7 is a signal line, and 8 is a back plate.

The structure includes a laminated piezoelectric element 1 as an electric actuator.
The laminated piezoelectric element 1 is provided with slits so that it can be actuated individually.

A parallel flow path is provided in the flow path plate 2 corresponding to the actuator portion of the laminated piezoelectric element 1 . A nozzle plate 3 is disposed on an extension of the channel plate 2 in the longitudinal direction. At the rear of the nozzle plate 3 there is shown in FIG. 1(b).
An ink inlet 6 is provided as shown in FIG.
The liquid is supplied to each channel from a common channel formed by.

In the embodiment of the present invention, electrical signals are transmitted to the head by providing a common electrode 5 on the front side, a signal line 7 on the back side, and mounting a drive IC body 4 on the top of the laminated piezoelectric element 1. The structure is designed to make it more compact.

In addition, in the second embodiment of the present invention, an example is shown in which the flow channels are arranged in a staggered manner in the vertical direction of the flow channel plate 2 in order to achieve higher density, since the drive IC body is mounted directly on the piezoelectric element. It has a good heat dissipation effect and can be easily assembled and connected to signal lines using chip flow.

FIG. 2 is a diagram for explaining the operation of the actuator, where 9 is a flow path and ↓0 is a filler.

When an electrical signal is input to the selected actuator,
The corresponding flow path 9 changes in volume by Q, and only that change is injected from the corresponding orifice of the nozzle plate.

Q can be expressed as follows.

Q= t In the formula, if only VP is to be reduced, the number of laminated sheets n and the effective operating length L of the element should be increased, but simply increasing the number of laminated sheets n may be difficult during slitting. Furthermore, simply increasing the effective working length L of the element increases the size and compliance of the head itself, causing problems in response.

However, by optimizing each parameter, it is possible to reduce the voltage to the extent that it can be driven by an IC chip. moreover,
As can be seen from the figure, the actuator (the convex portion formed by the slits on both sides) driven by an input electric signal acts only on the corresponding flow path 9, so it does not affect adjacent flow paths and is independent. Driving is possible and the effective frequency becomes high. Further, the amount of displacement of the actuator itself due to an increase in internal pressure caused by displacement is extremely small because the pressure receiving area is small, and efficiency does not decrease even if the density is increased.

FIG. 3 shows an enlarged view of changes in the actuator.

The ease of movement of the displacement δ when a voltage is applied is determined by the force (F) that acts to prevent the actuator from moving when the filler moves;
The force exerted by the internal pressure increase (ΔP) can be considered. Here, the force received by the internal pressure increase is negligibly small compared to the force (F, ) generated by the actuator, and the filler is deformed by the internal pressure increase ΔP, resulting in a volume loss of ΔQ.

The above-mentioned blocking force (F) acts as shear stress between the actuator and the filler, and if the elastic modulus of the filler is large, it becomes difficult to move and the displacement is reduced, but if the elastic modulus is small, as mentioned above, The result is that ΔQ causes an inverse deformation.

These optimum values are determined by the material (elastic modulus) and structural dimensions of the filler, and are not uniquely determined.

This time, as a filler, we have found that rubber-based fillers such as silicone and polybutadiene, as well as soft epoxy-based fillers, are flexible and
It was found to be suitable as it has excellent water resistance and bondability.

FIG. 4 is a diagram showing the relationship between the elastic modulus and volumetric displacement determined experimentally. As can be seen from FIG. 4, a large displacement volume can be obtained when the elastic modulus is in the range of 0.01 to 300 kg/mm<2>.

FIG. 5 shows another embodiment of the present invention.

In the figure, 11 is a cavity and 12 is a thin film. By providing a thin film 12 at the interface between the piezoelectric actuator and the flow path, the above-described filler 10 is used as a cavity 11 to enable electrical insulation between adjacent piezoelectric bodies. Further, as for the material, it is desirable that it be an elastic body like the above-mentioned filler.

FIG. 6 shows another embodiment in which laminated piezoelectric elements are arranged on both sides of the flow path plate, and a back plate 8 is provided with through holes 13 in the electrode portions of each actuator as an electric signal input method.
The back plate 8 is used to connect to the electrode, and a flow path is also formed by the back plate 8. By using a ceramic material for the back plate 8, it has good corrosion resistance and can also function as a heat dissipation board for the drive IC body 4. and drive IC
Since the signals are collected in one place, signal processing becomes advantageous.

FIGS. 7(a) and 7(b) are views showing other embodiments of the present invention, where FIG. 7(a) is a sectional view and FIG. 7(b) is an enlarged view of section A in FIG. 7(a).

In the figure, 21 is a laminated piezoelectric element, 22 is a flow path plate, and 23
2 is a nozzle plate, 24 is a driving IC body, 25 is a flow path, 2
6 is a supply base, 27 is ink.

28 is an electrode portion, 29 is a filling material, and 30 is a signal line.

The ink 27 is not supplied from the rear as in the above embodiment, but is supplied from the upper and lower directions of the flow path plate 22.
A space is provided behind the piezoelectric element 21.

The drive IC body 24 is directly mounted on the channel plate 22 on a part that has been patterned in advance as a signal line 30. By using a material such as photosensitive glass or silicon wafer for the channel plate 22, the channel grooves can be easily half-etched, and electrode patterns can be easily formed by sputtering or the like.

8(a) and 8(b) are diagrams showing still another embodiment of the present invention, in which flow path plates are arranged on both sides of a piezoelectric element, and FIG. 1(a) is a cross-sectional view, and FIG. (b) is an enlarged view of part B in Figure (a). In Figure 0, 31 is a back plate, 32 is a through hole, and other parts that function in the same way as in Figure 7 are indicated by reference numbers. It is attached.

The piezoelectric element 21, which is expensive in terms of cost, is integrated into one, an actuator part is formed by slit processing on both sides of the piezoelectric element 21 in the thickness direction, and a flow path plate 22 is provided correspondingly. By using the piezoelectric element 21 as a single unit, the rigidity of the driving force source is increased, and the influence on others when actuated is reduced.

The electrical signal is on the opposite side of the nozzle plate 23. Conductivity was provided to the electrode portion 28 on the plane through the through hole 32 . By providing the back plate 31, direct connection to the drive IC body 24 is also possible, which improves reliability.

FIG. 9 is a configuration diagram for explaining another embodiment of the inkjet recording apparatus according to the present invention, and in FIG.
3 is a substrate, 44 is an ink channel, 45 is a channel isolation member, 4
6 is an upper substrate, 47 is a slit, 48 is a bonding layer, and 49 is an ejection port.

The piezoelectric vibrator 42 is bonded onto a substrate 43, and a slit 47 is provided to substantially separate the flat plate.

Above the piezoelectric vibrator 42, a flow path isolation member 45 is placed on the bonding layer 4.
8, and is arranged to correspond to the slit 47. The flow path isolation member 45 has a Young's modulus of 10.
It is made of an elastic member having a strength of about 0 to 1000 Kgf/mm2. An upper substrate 46 is bonded to the upper surface of the flow path isolation member 45, whereby each ink flow @44 is separated and formed.

A discharge port cutout having a discharge port 49 is connected to one end of the ink flow path 44 .

The other end of the ink flow path 44 is connected to the common liquid chamber and further connected to an ink supply section communicating with the liquid reservoir.

FIGS. 10(a) and 10(b) are diagrams explaining the operation of the head.

In the figure, reference numeral 50 denotes a drive electrode, and other parts having the same functions as in FIG. 9 are given the same reference numerals.

In FIG. 10(a), when a voltage is applied between the drive electrode 50-2 and the common electrode, the piezoelectric vibrator 42-2 is distorted in the thickness direction (d
32 direction strain), and on the other hand, contraction occurs in the channel width direction (the piezoelectric vibrator 42 is polarized in the thickness direction). Therefore, as shown in FIG. 10(b), the channel The isolation member 45-2, 45-3 is connected to the bonding layer 4 on the side of the piezoelectric vibrator 42.
Via 8.

Since the joint portion is displaced in the direction of the upper substrate 46 and inward of the ink flow path 44-2, the entire portion is compressively deformed.

As a result, the ink flow path 44-2 is connected to the flow path isolation member 45-2.
2. A change in volume (a rapid decrease in volume) is obtained in both 45-3 and piezoelectric vibrator 42-2.

Due to the pressure increase when this voltage application is ON, the ink flow path 44
Ink droplets are ejected from the ejection port 49 corresponding to -2.

Conversely, the application of voltage causes the piezoelectric vibrator 42-2 to shrink in the thickness direction, and the flow path isolation member 45-2.45
-3 as a whole is pulled and deformed outward with respect to the ink flow path 44-2. If the voltage application to the piezoelectric vibrator 42-2 is stopped in this state, the strain energy will be in the direction of returning to the original state. Because of this, the volume of the ink flow path 44-2 rapidly decreases, and the pressure change at this time can cause ink droplets to be ejected.

The expansion and contraction of the piezoelectric vibrator 42 may be set by appropriately selecting the polarization direction and the electric field direction.

At this time, by driving the piezoelectric vibrator 42-2, the flow path isolation member 45-2, 45-3 is displaced with respect to the ink flow path 44-2, and the displacement is applied to the adjacent ink flow path 44-1, 44-3. is minute. Therefore, mutual interference between adjacent ink channels does not become a problem, and it is possible to simultaneously drive ink channels that are in contact with each other by 5 mm.

11(a) to 11(c) show other embodiments of the present invention. FIG. 11(a) shows an example in which a slit 47 is provided up to the substrate 43, and FIG. 11(b) shows an example in which a piezoelectric vibrator 42 is provided. Figure (c) shows an example in which the slit process is performed from the substrate 43 side, and Figure (c) shows an example in which the piezoelectric vibrator is not slit.

FIG. 12 is a diagram for explaining a head processing method. In FIG. 12(a), a piezoelectric vibrator 42 (thickness 0.1=0.5 mm) is bonded to a substrate 43 by adhesive or the like.

In FIG. 12(b), grooves are formed on the piezoelectric vibrator 42 by appropriately using machining such as cutting, various types of etching, beam machining such as laser, electric discharge machining, ultrasonic machining, etc. A slit 47 is formed by processing. Here, the slit 47 is the piezoelectric vibrator 42
As shown in FIG. 10, it is not necessary to completely separate the piezoelectric vibrator 42, and a slit 47 can be made up to the substrate 43 as shown in FIG. In this case, since the piezoelectric vibrator 42 is provided with electrodes in advance on both surfaces in the thickness direction, the upper surface becomes a drive electrode separately and independently by this groove processing, and the common 1 becomes a pole on the lower surface. In the case of FIG. 11(a), a common electrode can be achieved by making the substrate 43 a conductor such as metal or SL.

In FIG. 12(c), a bonding layer 48 for bonding the flow path isolation portions is formed on the piezoelectric vibrator 42. In FIG.

At this time, a desired liquid adhesive is applied to the surface of the piezoelectric vibrator 42 by a well-known method 1, for example, a spinner coating method, a dip coating method, or a roller coating method, and then semi-cured. The type of agent is not particularly limited as long as it exhibits a predetermined adhesive strength, but in the present invention, particularly.

A photocurable resin adhesive is recommended for manufacturing convenience. Ukonate, a dry film photoresist, is also available. At this time, the bonding layer 48 functions as a protective layer for the piezoelectric vibrator 42 (another protective layer may be formed as necessary).

It is also possible to eliminate the need for the bonding layer 48 by subjecting the piezoelectric vibrator to appropriate surface treatment and insulation treatment.

In FIG. 12(d), the flow path isolation member 45 can be formed in the same manner as the groove machining of the piezoelectric vibrator 42, but this process can be easily performed by using photosensitive resin such as dry film photoresist. Become. First, a photomask having a predetermined pattern is superimposed on a dry film photoresist provided on the surface of the upper substrate 46, and then exposed to light and dissolved and removed with a developer to form the channel isolation member 45. At this time, the common liquid chamber and the discharge port can also be set in the same pattern and formed at the same time, making the discharge port unnecessary.

Of course, a liquid photosensitive composition can also be used. In addition, by molding processing of resin, etc.

For example, the flow path isolation member 45, the common liquid chamber, etc. can be formed integrally with the upper substrate 46. However, the above technique is very suitable because processing can be easily controlled.

In FIG. 12(s), the upper substrate 46 on which the channel isolation member 45 is disposed and the substrate 43 on which the piezoelectric vibrator 42 and the bonding layer 48 are disposed are bonded. This can be easily formed by thermocompression bonding between dry films. It is also effective to use both heat curing and ultraviolet curing. As a result, the ink flow path 44 is completely separated and formed.

In FIG. 12(f), the discharge port plate 41 is joined. The piezoelectric vibrator 42 and the flow path isolation member 45 are displaced to cause a pressure change in the ink flow path 44, but a similar displacement occurs at the joint surface with the ejection port plate 4. This is disadvantageous because it causes harmful stress to the outlet plate 41 degree channel isolation member 45 or the joint portion. Therefore, in order to alleviate or absorb this stress, it is also possible to provide a suitable adhesive layer or a buffer member at the joint. Groove processing of the piezoelectric vibrator 42 may be performed from the substrate 43 side as shown in FIG. 11(b) in contrast to FIG. 10.

As mentioned above, it is desirable that the piezoelectric vibrator is substantially cut for each ink flow path, but in order to further simplify processing, the drive electrode is By patterning each path independently, it is possible to form the piezoelectric vibrator without grooving (however, the characteristics will deteriorate).Also, the piezoelectric vibrator 42 can be of a laminated type. It is also possible to do this, thereby achieving low voltage driving.

In the above example, the piezoelectric vibrator was disposed only on one side of the flow path partition, but it is also possible to facilitate the displacement of the volume of the ink flow path 44 by providing it on both sides. Further, the arrangement of the discharge port plate 41 is not limited and may be placed on the upper surface of the upper substrate 46, and if the shape of the flow path isolation member 45 is appropriately set as described above, the arrangement of the discharge port plate 41 is unnecessary. becomes. Note that the embodiments described above can be installed in various combinations.

As is clear from the above explanation, the present invention has the following effects.

(1) Component parts are simple and small in size, and processing and assembly are facilitated to reduce costs.

(2) Due to the layered structure and the divided shape, the driving voltage is reduced and there is no influence between adjacent parts, and there is no mutual interference, so the effective driving frequency does not decrease.

(3) By optimizing the elastic modulus, the volumetric displacement can be increased (
As a result, it is possible to lower the driving voltage.

(4) Assembly is easy. In addition to (3) above, insulation between the electrodes of the piezoelectric body becomes possible, and water-based ink can be used.

(5) By mounting the driving IC directly on the piezoelectric element.

The head body can be made smaller and lighter.

(6) By using a solid-state back plate for piezoelectric elements that are arranged separately, the number of drive ICs can be reduced and reliability can be improved.

(7) Assembly efficiency is improved by integrally forming the flow path and the electric signal line on a flat flow path plate.

(8) Providing actuating points on both sides of the piezoelectric element reduces the number of parts, increases the rigidity of the actuator, and reduces interference with others. Furthermore, connection with the drive IC body is easier, increasing assembly efficiency.

Improved reliability.

(9) The configuration of the highly integrated head is simplified, the process for forming the flow path isolation portion is facilitated, and the voltage application during driving is also simplified.

(10) Displacement can be applied efficiently to the piezoelectric vibrator part and the flow path isolation part, improving discharge efficiency and reducing driving voltage.Furthermore, mutual interference during driving is reduced, and adjacent It becomes possible to simultaneously move the ink flow path section.

[Brief explanation of drawings]

1(a) and 1(b) are block diagrams of an inkjet recording apparatus according to the present invention, FIG. 2 is a diagram for explaining the operation of the actuator, FIG. 3 is an enlarged view of the displacement of the actuator, and FIG. The figure shows the relationship between elastic modulus and volumetric displacement, FIG. 5 shows another embodiment of the invention, and FIGS. 6 to 8 show still other embodiments of the invention. , FIG. 9 is a block diagram for explaining another embodiment of the inkjet recording apparatus according to the present invention, and FIG. 10 is a partial perspective view of the head.
a) and (b) are explanatory diagrams of the operation of the head, and Fig. 11 (a)
-(c) are diagrams showing other embodiments of the present invention, FIG. 12 (
a) to (f) are diagrams for explaining a head processing method. 1... Laminated piezoelectric element, 2... Channel plate, 3...
- Nozzle plate, 4... Mobile IC body, 5... Common electrode, 6... Ink inlet, 7... Signal line, 8
... Back plate, 41 ... Discharge port plate, 42 ... Piezoelectric vibrator, 43 ... Substrate, 44 ... Ink channel, 45 ...
... Channel isolation member, 46 ... Upper substrate, 47 ... Slit, 48 ... Bonding layer, 49 ... Discharge port.

Claims (1)

[Claims] 1. A large number of parallel channels arranged in a direction perpendicular to the longitudinal direction of the channels and separated by channel isolation members, and each channel connected to the channels for droplet jetting. It has a nozzle and a connecting means for supplying liquid to the ink flow path, and a piezoelectric vibrator that generates deformation is disposed in a part of the ink flow path, and by driving the piezoelectric vibrator, the ink flow path is changed. In an inkjet recording device that causes a pressure change in the ink flow path by causing deformation in the bottom portion, and ejects ink droplets from the ejection port,
An inkjet recording apparatus characterized in that the piezoelectric vibrator is a piezoelectric body provided with slits. 2. A large number of parallel channels arranged in a direction perpendicular to the longitudinal direction of the channels and separated by channel isolation members, each nozzle connected to the channels for jetting droplets, and the channel. a piezoelectric vibrator for causing deformation in a part of the ink flow path, and driving the piezoelectric vibrator to cause deformation at the bottom of the ink flow path; in an inkjet recording device that causes a pressure change in the ink flow path to eject ink droplets from the ejection port,
The piezoelectric vibrator has a slit in the piezoelectric body, and the slit has an elastic modulus of 300 kg/mm^2 or less and 0.01 k.
An inkjet recording device characterized by being filled with an elastic body of g/mm^2 or more. 3. A large number of parallel channels arranged in a direction perpendicular to the longitudinal direction of the channel and separated by channel isolation members, each nozzle connected to the channel for ejecting droplets, and the channel. a piezoelectric vibrator for causing deformation in a part of the ink flow path, and driving the piezoelectric vibrator to cause deformation at the bottom of the ink flow path; in an inkjet recording device that causes a pressure change in the ink flow path to eject ink droplets from the ejection port,
An inkjet recording apparatus characterized in that the flow path isolation member is an elastic body capable of simple compression deformation and tensile deformation.