JPH0979248A - Manufacture of spring washer of ccm - Google Patents
Manufacture of spring washer of ccmInfo
- Publication number
- JPH0979248A JPH0979248A JP25580195A JP25580195A JPH0979248A JP H0979248 A JPH0979248 A JP H0979248A JP 25580195 A JP25580195 A JP 25580195A JP 25580195 A JP25580195 A JP 25580195A JP H0979248 A JPH0979248 A JP H0979248A
- Authority
- JP
- Japan
- Prior art keywords
- ccm
- spring washer
- carbon fiber
- spring
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【技術分野】本発明は、高温炉において導電性とスプリ
ング機能を有する炭素繊維強化炭素材料（以下ＣＣＭと
いう）のスプリングワツシャーの製造法に関する。ここ
に炭素という用語は炭素及び黒鉛を包括し示す。従って
実質的に炭素質のスプリングワッシャーと黒鉛質のスプ
リングワッシャーの両者を包含する。TECHNICAL FIELD The present invention relates to a method for manufacturing a spring washer of a carbon fiber reinforced carbon material (hereinafter referred to as CCM) having conductivity and a spring function in a high temperature furnace. The term carbon is used herein to include carbon and graphite. Therefore, it substantially includes both a carbonaceous spring washer and a graphite spring washer.
【０００２】[0002]
【従来の技術】スプリング材料としては、金属、セラミ
ック材がある。金属は耐熱温度が低く１０００℃を越え
る条件では使用できない。セラミック材は変形に対して
脆く壊れ易いことと、導電性が低い。2. Description of the Related Art Spring materials include metals and ceramic materials. Metals have a low heat resistance temperature and cannot be used under conditions exceeding 1000 ° C. Ceramic materials are fragile and easily broken by deformation and have low electrical conductivity.
【０００３】この欠点を解決する材料として高い耐熱性
と高い導電性を具備したＣＣＭがある。従来ＣＣＭのス
プリングワッシャーの製造方法としては以下のものがあ
る。一つはＣＣＭの板状または棒状のものから、切削加
工によつて製造されるが、強化材の炭素繊維の連続性が
損なわれ剛性が低い。また切削加工のため、ＣＣＭ材か
ら製品の利用率は５０％以下で、製造コストが高い。As a material for solving this drawback, there is CCM having high heat resistance and high conductivity. The following are conventional methods for manufacturing a CCM spring washer. One is manufactured by cutting from a CCM plate-shaped or rod-shaped one, but the continuity of the carbon fiber of the reinforcing material is impaired and the rigidity is low. Further, because of the cutting process, the utilization rate of the product from the CCM material is 50% or less, and the manufacturing cost is high.
【０００４】別の方法として例えば、特開昭５７ー１８
８４６４号の有機質線状体を賦形した後、炭素化した炭
素スプリングの製造法がある。実施例の中で炭素繊維の
短繊維を４０〜７０％重量、有機線状体組成物に含有さ
せたものがある。しかし、この方法では炭素繊維が短繊
維であるため、繊維の連続性が損なわれてしまい、目的
のスプリング特性が得られない。As another method, for example, JP-A-57-18
There is a method for producing a carbon spring in which the organic linear body of No. 8464 is shaped and then carbonized. In some of the examples, 40 to 70% by weight of short carbon fibers are contained in the organic linear composition. However, in this method, since the carbon fibers are short fibers, the continuity of the fibers is impaired, and the desired spring characteristics cannot be obtained.
【０００５】[0005]
【発明の課題】強化材の炭素繊維の連続性を保持し、剛
性の高いＣＣＭのスプリングワッシャーを得ること、並
びに切削ロスが少なく製造コストを低減することにあ
る。An object of the present invention is to obtain a CCM spring washer having high rigidity while maintaining the continuity of carbon fibers of a reinforcing material, and to reduce manufacturing loss by reducing cutting loss.
【０００６】[0006]
【課題を解決するための手段】本発明は、引張り強さ２
００kg/mm2以上、引張り弾性率２４０００kg/mm2以上の
炭素繊維の束又はスリーブ状に編んだプリプレグを治具
のスパイラルな溝に巻き付けて加熱し、半硬化させる。
この状態で、半硬化のコイル状成形体を治具から外し、
更に加熱し、完全に硬化させてコイル状成形体を得る。The present invention has a tensile strength of 2
00kg / mm 2 or more, a prepreg braided tensile modulus 24,000 kg / mm 2 or more bundles or sleeve-like carbon fiber was heated wound in a spiral groove of the jig, is semi-cured.
In this state, remove the semi-cured coiled body from the jig,
It is further heated and completely cured to obtain a coil-shaped molded body.
【０００７】次に成形体を炭化、必要に応じてピッチ等
を含浸、焼成、黒鉛化しＣＣＭのコイル状材を得る。更
に一巻き毎に分離し、ＣＣＭのスプリングワツシヤーと
する。本発明によって切削ロスの量は、一巻き毎に分離
する際に生じるのみで、従来方法に比べ大幅にロスを減
少できる。また炭素繊維はＣＣＭ材の中で連続してお
り、剛性の高いスプリングワッシャーが得られる。Next, the molded body is carbonized and, if necessary, impregnated with pitch or the like, fired and graphitized to obtain a CCM coil-shaped material. Furthermore, it is separated for each winding and used as a CCM spring washer. According to the present invention, the amount of cutting loss is only generated when separating each winding, and the loss can be greatly reduced as compared with the conventional method. Further, since the carbon fibers are continuous in the CCM material, a spring washer having high rigidity can be obtained.
【０００８】[0008]
【実施例】以下に実施例を示し、本発明の特徴を説明す
る。６０００フィラメントの引張り強度２２０kg/mm2、
引張り弾性率２５０００kg/mm2の炭素繊維束１２本で編
組したスリーブに炭化残存率の高いフェノール樹脂、フ
ラン樹脂等を含浸し、プリプレグとする。EXAMPLES The features of the present invention will be described with reference to the following examples. 6000 filament tensile strength 220 kg / mm 2 ,
A sleeve braided with 12 carbon fiber bundles having a tensile elastic modulus of 25000 kg / mm 2 is impregnated with a phenol resin, furan resin, or the like having a high residual carbonization rate to obtain a prepreg.
【０００９】このプリプレグを外径５０mmで溝幅３mm、
溝底径２０mm、溝のピッチ３mmのスパイラル溝を持つ長
さ２００mmの治具に巻き付けて加熱し、半硬化する。半
硬化の温度、時間は使用樹脂により適宜選定される。半
硬化の後に治具を外し、軸方向を垂直にして、加熱し完
全に硬化させる。次に成形体を炭化、更に必要に応じて
ピツチタール又は樹脂を含浸、焼成、黒鉛化しコイル状
のＣＣＭを得る。これを一巻き毎に分離させてＣＣＭの
スプリングワッシャーを得た。スプリング性能を隙間を
ゼロとする荷重を測定したところ５〜６ｋｇであった。
このことから溝のピッチを大きくすれば、更にスプリン
グの隙間をゼロとする荷重は大きく出来ることが分か
る。This prepreg has an outer diameter of 50 mm and a groove width of 3 mm,
It is wound around a jig having a length of 200 mm having a spiral groove having a groove bottom diameter of 20 mm and a groove pitch of 3 mm, and heated to be semi-cured. The temperature and time for semi-curing are appropriately selected depending on the resin used. After semi-curing, the jig is removed, the axial direction is made vertical, and heating is performed to completely cure. Next, the molded body is carbonized and, if necessary, impregnated with pitital or resin, fired, graphitized to obtain a coiled CCM. This was separated for each winding to obtain a CCM spring washer. When the load was measured so that the spring performance had zero clearance, it was 5 to 6 kg.
From this, it can be seen that the load for making the gap of the spring zero can be further increased by increasing the groove pitch.
【００１０】これは、高温において黒鉛ヒーターと電極
又は黒鉛ヒーター素子間の締め付け圧５〜１０kg/cm2に
対し、接触面積５ｃｍ2 とすると、２５〜５０ｋｇの総
荷重の１０〜２４％であるので、黒鉛のヒーターに接続
する黒鉛製ボルト、ナツトのワッシャーとして使用する
と、ねじの緩みが防止できる。[0010] This is because the tightening pressure 5 to 10 kg / cm 2 between the graphite heater and the electrode or graphite heater element at high temperatures, when the contact area 5 cm 2, because it is 10 to 24% of the total load of 25~50kg When used as a graphite bolt or nut washer connected to a graphite heater, loosening of screws can be prevented.
【００１１】[0011]
【発明の効果】従来は本発明のようなスプリングワッシ
ャーを使用していないため、取付け時の締付だけであっ
たので、使用中にねじが緩む事故も起きており、特に半
導体のシリコン単結晶引上げ装置のヒーターは、シリコ
ンウエハーの大口径化に伴い、大型のヒーターとなり、
通電電流も大きく安定して操炉できるヒーターが特に要
求されている。本願発明のスプリングワッシャーは、ね
じの緩みを防止し、かつ炭素材料であるため導電性が高
く、化学的に安定で高温強度が高い。Since the spring washer of the present invention has not been used so far, only the tightening at the time of mounting has been performed, and therefore the screw may be loosened during use. Particularly, the silicon single crystal of semiconductor is used. The heater of the pulling device becomes a large heater with the increase in the diameter of the silicon wafer,
There is a particular demand for a heater that can stably operate the furnace with a large energizing current. The spring washer of the present invention prevents loosening of screws and is a carbon material, so that it has high conductivity, is chemically stable, and has high strength at high temperatures.
Claims (1)
率２４０００kg/mm2以上の炭素繊維の束またはスリーブ
状に編んだプリプレグをスパイラルな溝に巻き付けて、
半硬化し、溝から外し、次に加熱硬化し成形を完了す
る。成形体を加熱炭化、必要に応じて含浸、焼成、黒鉛
化し、一巻き毎に分離させることを特徴とする炭素繊維
強化炭素材料（ＣＣＭ）のスプリングワッシャーの製造
法。1. A tensile strength of 200 kg / mm 2 or more, a prepreg braided tensile modulus 24,000 kg / mm 2 or more bundles or sleeve-like carbon fiber wound in a spiral groove,
Semi-cure, remove from groove, then heat cure to complete molding. A method for producing a spring washer of a carbon fiber reinforced carbon material (CCM), which comprises heating and carbonizing a molded body, if necessary impregnating, firing, graphitizing, and separating each winding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25580195A JP3333361B2 (en) | 1995-09-08 | 1995-09-08 | Manufacturing method of CCM spring washer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25580195A JP3333361B2 (en) | 1995-09-08 | 1995-09-08 | Manufacturing method of CCM spring washer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0979248A true JPH0979248A (en) | 1997-03-25 |
| JP3333361B2 JP3333361B2 (en) | 2002-10-15 |
Family
ID=17283830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25580195A Expired - Fee Related JP3333361B2 (en) | 1995-09-08 | 1995-09-08 | Manufacturing method of CCM spring washer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3333361B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11317240A (en) * | 1998-04-30 | 1999-11-16 | Shin Kobe Electric Mach Co Ltd | Enclosed type battery |
| US6231709B1 (en) * | 1997-12-22 | 2001-05-15 | Societe Nationale D'etude Et De Construction De Moteurs D'aviation - S.N.E.C.M.A. | Method of making a spring out of thermostructural composite material |
| JP2017106502A (en) * | 2015-12-08 | 2017-06-15 | 株式会社Ｃｆｃデザイン | Carbon/carbon composite material-based coil spring |
| JP2018123023A (en) * | 2017-01-31 | 2018-08-09 | イビデン株式会社 | Method for producing ceramic spring, and the ceramic spring |
| KR20200016237A (en) | 2017-06-07 | 2020-02-14 | 씨에프씨 디자인 인크. | Carbon / carbon composite spring device and its manufacturing method |
-
1995
- 1995-09-08 JP JP25580195A patent/JP3333361B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6231709B1 (en) * | 1997-12-22 | 2001-05-15 | Societe Nationale D'etude Et De Construction De Moteurs D'aviation - S.N.E.C.M.A. | Method of making a spring out of thermostructural composite material |
| JPH11317240A (en) * | 1998-04-30 | 1999-11-16 | Shin Kobe Electric Mach Co Ltd | Enclosed type battery |
| JP2017106502A (en) * | 2015-12-08 | 2017-06-15 | 株式会社Ｃｆｃデザイン | Carbon/carbon composite material-based coil spring |
| JP2018123023A (en) * | 2017-01-31 | 2018-08-09 | イビデン株式会社 | Method for producing ceramic spring, and the ceramic spring |
| KR20200016237A (en) | 2017-06-07 | 2020-02-14 | 씨에프씨 디자인 인크. | Carbon / carbon composite spring device and its manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3333361B2 (en) | 2002-10-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3045889B2 (en) | Method of manufacturing coil spring made of carbon fiber carbon composite material | |
| WO2001055487A2 (en) | Carbon fiber manufacturing via plasma technology | |
| RU2315133C2 (en) | Method for making carbon electrodes | |
| JPS6118951B2 (en) | ||
| JP5013767B2 (en) | Rotating anode and method of manufacturing rotating anode cooling body | |
| WO2006003774A1 (en) | Method for manufacturing carbon fiber reinforced carbon composite material suitable for semiconductor heat sink | |
| CA1081313A (en) | Glassy carbon grid-like electrodes and method of manufacturing same | |
| JPH0979248A (en) | Manufacture of spring washer of ccm | |
| JP2519042B2 (en) | Carbon-carbon composite material manufacturing method | |
| US5556608A (en) | Carbon thread and process for producing it | |
| KR101031689B1 (en) | High-purity carbon fiber-reinforced carbon composite for semiconductor manufacturing apparatus and method for producing the same | |
| Zok et al. | Tensile strength of SiC fibers | |
| EP0372931A3 (en) | Continuous, ultrahigh modulus carbon fiber | |
| US4916292A (en) | Coiled resistance heating element of carbonaceous material | |
| JPH06100367A (en) | Anisotropic carbon-carbon composite material and its production | |
| JPH10167879A (en) | Crucible for pulling up single crystal | |
| JPS641914B2 (en) | ||
| JP2000143826A (en) | Short carbon fiber aggregate, its production, and fiber- reinforced resin composition | |
| JP2020070197A (en) | Carbon composite material manufacturing method, composition, heat dissipation component, conductive component, and mobile component | |
| JPH0768064B2 (en) | Carbon fiber reinforced composite material | |
| JPH08222357A (en) | Manufacture of carbon heating element | |
| CN115974571B (en) | Heating tube device and preparation method thereof | |
| JPH07276549A (en) | Heat insulation material | |
| JPH0426547A (en) | Production of carbon reinforced carbon composite material | |
| JPS6356471B2 (en) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20020709 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080726 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080726 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090726 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100726 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110726 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120726 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130726 Year of fee payment: 11 |
|
| LAPS | Cancellation because of no payment of annual fees |