JPH0976231A - Working fluid supplying apparatus for wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To more uniformly and stably supply working fluid to cutting wires extended in a wire saw. SOLUTION: First and second tanks 43, 44 extended in the aligning direction of wires W are installed together. A working fluid inlet 46 is provided at the tank 43, and a slit-like working fluid supply port 52 extended in the aligning direction of the wires W is formed at the bottom of the tank 44. Both the tanks 43, 44 are so disposed that the fluid S overflowing the tank 43 flows into the tank 44.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a working liquid supply device for simultaneously supplying a working liquid (slurry) mixed with working abrasive grains to a plurality of cutting wires stretched in a wire saw. It is a thing.

[0002]

2. Description of the Related Art Conventionally, a wire saw has been known as a means for cutting a wafer from a semiconductor ingot. In this wire saw, a large number of cutting wires are stretched in parallel with each other, and the cutting wires are driven at a high speed in the longitudinal direction of the wire saw from the semiconductor ingot or the like in a direction orthogonal to the wire longitudinal direction. By cutting and feeding a different work, a large number of thin pieces are simultaneously cut out from this work.

By the way, in such a wire saw, it is necessary to simultaneously supply a working liquid (slurry) mixed with working abrasive grains to a large number of wires arranged in parallel.
As a device therefor, Japanese Patent Publication No. 5-20227 discloses a device in which a hopper type slit nozzle is arranged directly below a machining liquid supply nozzle extending in the wire arranging direction. The processing liquid supply nozzle is configured by a pipe into which the processing liquid is introduced from one end and the other end is closed,
A large number of machining fluid jets are intermittently provided at the bottom of the pipe wall along the wire arrangement direction. The slit nozzle is provided at a position for receiving the machining fluid ejected from each machining fluid ejection port, and a slit-shaped machining fluid supply port extending in the wire arranging direction is formed at the bottom of the slit nozzle. There is.

According to this apparatus, even if the above-mentioned machining fluid jets are provided intermittently, the machining fluid jetted from these machining fluid jets is temporarily stored in the slit nozzle and then slit-shaped. Since it drops from the liquid supply port onto each wire in a substantially curtain shape, the amount of working liquid supplied to each wire is made uniform by that amount.

[0005]

In the above apparatus, even though the slit nozzle is interposed between the machining fluid supply nozzle and the wire, the machining fluid injection port is provided at the machining fluid supply nozzle. Since there is a large difference in the amount of working fluid supplied to the slit nozzles between the positions where is not provided, it is impossible to completely eliminate the variation in the amount of working fluid supplied to each wire. Further, since the machining fluid outlet has a small diameter and has a structure in which foreign matter in the machining fluid is easily clogged, if some of the machining fluid ejection holes cause ejection failure due to the clogging of the foreign matter, the variation in the machining fluid supply amount will vary. It becomes even more noticeable. This variation causes a saw mark on the work and deteriorates the processing accuracy.

In view of such circumstances, an object of the present invention is to provide an apparatus capable of supplying a working liquid to each wire more uniformly and stably.

[0007]

Means for Solving the Problems As a means for solving the above problems, the present invention provides a plurality of cutting wires provided on a wire saw stretched in parallel with each other and processed into each cutting wire. In a working liquid supply device for a wire saw for simultaneously supplying liquid, a first tank extending in the direction in which the cutting wires are arranged and into which the working liquid is introduced, and a position for receiving the working liquid overflowing from the first tank. A second tank which is provided and has a slit-shaped working liquid supply port extending in the direction in which the cutting wires are arranged is provided side by side.

According to this structure, the working fluid is once introduced into the first tank, the working fluid overflowing from the first tank is introduced into the second tank, and the second tank bottom portion is introduced. From the slit-shaped processing liquid supply port of No. 3, the powder flows down to each wire in a curtain shape. Therefore, compared with the case where the working fluid is supplied into the second tank from the working fluid supply nozzle in which the working fluid jets are intermittently provided, the working fluid supply amount to the second tank is better in the wire arranging direction. It is made uniform, and the variation in the amount of working fluid supplied from the slit-shaped working fluid supply port of the second tank to each wire is very small. Further, unlike the case where the machining fluid is ejected and put into the second tank, the machining fluid can be gently flown into the second tank from the first tank, and the machining fluid supply amount is more stable accordingly. Can be made. Further, in principle, the foreign matter mixed in the machining fluid settles on the bottom of the first tank, so that the foreign matter is clogged in the slit-shaped machining fluid supply port or passes through the slit-shaped machining fluid supply port. Therefore, the inconvenience of attaching to the wire surface and causing wire breakage is avoided in advance.

In particular, if the introduction position of the working fluid into the first tank is set at the lower portion of the tank, foreign matter can be more reliably settled on the bottom of the first tank. Further, the working fluid can be more gently overflowed from the first tank, and the working fluid supply amount from the first tank to the second tank can be made more uniform and stable in the wire arrangement direction.

Although the first tank and the second tank may be installed independently of each other, a partition member is provided in the housing extending in the direction in which the cutting wires are arranged, and the partition member is provided by the partition member. By partitioning the inside of the housing into the first tank and the second tank, there is no risk of the working fluid overflowing from the first tank spilling to the outside of the second tank, and the working fluid is lost. Disappears. Also, the entire device becomes more compact.

In this case, the partition member may be arranged in the vertical middle part of the housing so that both tanks are arranged vertically. However, as the partition member, the cutting member may be formed in the middle part of the bottom wall of the housing. If a partition wall extending in the wire arranging direction is erected, and the first tank and the second tank are arranged in the longitudinal direction of the wire, the height of the housing is significantly reduced, and the entire wire saw. The structure will be more compact. Further, since the head of the machining fluid from the first tank to the second tank is extremely small, the machining fluid flows into the second tank more quietly, and a more stable machining fluid supply can be realized. .

[0012]

FIG. 1 shows a first embodiment of the present invention.
3 to FIG.

The wire saw shown in FIG. 3 comprises a pair of wire feeding / winding devices 10A and 10B, and a guide roller 12.
A, 12B, guide rollers 14A, 14B, guide rollers 16A, 16B, wire tension adjusting devices 18A, 18
B, guide rollers 22A, 22B, and four multi-groove rollers 24A, 24B, 26A, 26B. The multi-groove rollers 24A, 24B are arranged at the same height position,
The multi-groove rollers 26A and 26B are the multi-groove rollers 24, respectively.
The multi-groove roller 2 is arranged at a position below A and 24B.
6A is driven to rotate by the drive motor 25.

Each wire feeding / winding device 10A, 10
B is a bobbin 9A, 9B around which a cutting wire W is wound.
And bobbin drive motors 11A and 11 for rotating the bobbin drive motors.
B. One wire feeding / winding device 1
The wire W fed from the 0A bobbin 9A is guided by the guide rollers 12A, 14A, 16A, and the wire tension adjusting device 1.
8A roller 20A and guide roller 22A are applied in this order, and multi-groove rollers 24A, 24B, 26B, 2
After being wound many times on the outside of 6A, the guide roller 22
B, the roller 20B of the wire tension adjusting device 18B, the guide rollers 16B, 14B, and 12B are wound in this order, and wound on the bobbin 9B of the other wire feeding / winding device 10B. An appropriate tension is applied to the wire W by the. And
Rotational drive direction of the multi-groove roller 26A by the drive motor 25 and bobbin 9 by each bobbin drive motor 11A, 11B.
By switching the rotational driving directions of A and 9B between the forward and reverse directions, the wire W is fed out from the bobbin 9A and the bobbin 9B.
The state in which the wire W is wound onto the bobbin 9A is switched to the state in which the wire W is unwound from the bobbin 9B and wound around the bobbin 9A.

That is, in this wire saw, a large number of wires W are stretched in parallel with each other between the multi-groove rollers 24A and 24B and are reciprocally driven in the longitudinal direction thereof.

Above the wire W stretched between the multi-groove rollers 24A and 24B, a work feeding device 30 for moving a cylindrical work (for example, a semiconductor ingot) 28 is provided. The work feeding device 30 includes a work holding portion 32 and a work feeding motor 34. The work holding unit 32 holds the work 28 in a direction in which the axial direction of the work 28 and the wire arrangement direction match, and the work feed motor 34 is combined with the work holding unit 32 by a ball screw (not shown). The work 28 and the work 28 are integrally lifted (that is, cut and fed).

Machining liquid supply devices 36A and 36B are provided at the left and right sides of the work 28 above the wire W stretched between the multi-groove rollers 24A and 24B.
These working liquid supply devices 36A and 36B simultaneously supply the working liquid (slurry) in which the working abrasive grains are mixed to each wire W that is driven at high speed, and deposit the working liquid on the surface of the wire W.

Therefore, in this wire saw, a large number of wires W stretched between the multi-groove rollers 24A and 24B are simultaneously driven in the longitudinal direction at high speed, and these wires W are processed by the processing liquid supply devices 36A and 36B. While the liquid is being supplied, the work W is cut and fed downward to these wires W, so that a large number of wafers are cut out from the work W at the same time.

1 and 2 show the specific structures of both working fluid supply devices 36A and 36B. Processing liquid supply device 36A,
36B includes a single housing 40. In this embodiment, the housing 40 is in the form of a container with a bottom that opens upward, and extends in the direction in which the wires W are arranged, over the entire area where the wires W are stretched.

A partition wall 42 extending over the entire length of the housing 40 in the longitudinal direction (the left-right direction in FIG. 1; the wire longitudinal direction) of the bottom wall of the housing 40.
Is erected. The upper end of the partition wall 42 is slightly lower than the upper end of the outer wall of the housing 40.
The first tank 43 in which the inside of the housing 40 is a rear part by 2
And a second tank 44 at the front. That is, the two tanks 43, 44 are formed at positions aligned in front of and behind each other.

On the side wall of the housing 40, the first
A machining liquid introduction port 46 is formed at a position corresponding to the lower portion of the tank 43. A machining fluid storage tank 50 is connected to the machining fluid inlet port 46 via a machining fluid supply pipe 48 shown in FIG. 2, and the machining fluid S in the machining fluid storage tank 50 is fed by a pump (not shown). First tank 43
It is supposed to be introduced inside. Also, housing 4
At the position corresponding to the lower portion of the first tank 43 on the back wall of No. 0, a drain pipe and a drain valve 45 for draining foreign matters and the like settled in the first tank 43 are connected. .

The lower portion of the second tank 44 projects further downward than the bottom wall of the first tank 43, and this projecting portion has a hopper-shaped nozzle whose dimension in the front-rear direction becomes smaller as it goes downward. It is defined as part 51. A slit-shaped machining liquid supply port 52 extending in the wire arranging direction is formed at the lower end of the nozzle portion 51.

Next, the machining fluid supply devices 36A and 36B
The operation of will be described.

The working fluid S in the working fluid storage tank 50 is first introduced into the first tank 43 from below. After the first tank 43 is filled with the working liquid S, the working liquid S overflows from the upper end of the partition wall 42, and the second tank 44 adjacent to the first tank 43 gently and uniformly in the wire arranging direction. Inflow. The machining liquid S flowing into the second tank 44 flows down from the slit-shaped machining liquid supply port 52 at the lower end in a curtain shape extending in the wire arrangement direction, is uniformly supplied to each wire W, and adheres to the surface thereof. . At this time, even if a foreign matter is mixed in the working fluid S introduced into the first tank 43, this foreign matter is, as a rule, settled on the bottom of the first tank 43, so that the foreign matter is slit-shaped. Liquid supply port 52
It is possible to avoid the inconvenience that the wire is clogged with the work fluid S or the work fluid S adheres to the surface of the wire W to cause wire breakage.

In the second tank 44, the flow rate of the processing liquid S overflowing from the first tank 43 and the processing liquid supply port 5 are set.
The machining fluid S is accumulated by the difference from the flow rate of the machining fluid S flowing down from 2.

A second embodiment of the present invention is shown in FIG.
Here, a partition plate (partition member) 54 is provided at an intermediate portion in the vertical direction of the housing 40. The partition plate 54 extends in the entire longitudinal direction of the housing 40 like the partition wall 42 shown in FIG.
Bottom wall portion 54 extending horizontally from the front wall (left side wall in FIG. 4) of
A and the side wall portion 5 extending upward from the end of the bottom wall portion 54A.
4B and has a substantially L-shaped cross section. Therefore,
A first tank 43 is formed by the partition plate 54, and a second tank 44 is formed below the first tank 43. Below the second tank 44, a nozzle portion 51 similar to the device of FIG. A liquid supply port 52 is formed, and a working liquid introduction port 46 is provided at a position corresponding to the lower portion of the first tank 43 on the side wall of the housing 40 (that is, a position immediately above the bottom wall portion 54A).

Also in this apparatus, the working liquid S is made to flow into the second tank by overflowing the working liquid S from the first tank 43.
It is possible to gently and uniformly flow into the tank 44 in the wire arranging direction. However, in the apparatus shown in FIG. 1, since the first tank 43 and the second tank 44 are lined up in the front-rear direction, there is almost no drop between the two tanks 43, 44, and thus the apparatus shown in FIG. There is an advantage that the machining liquid S can be caused to flow in more quietly than that, and the amount of the machining liquid supplied to each wire S can be more stabilized accordingly. Further, in the device of FIG. 1, the height dimension of the housing 40 can be made smaller than that of the device of FIG. 4, so that there is an advantage that the structure of the entire wire saw can be made more compact accordingly.

A third embodiment of the present invention is shown in FIG.
Here, the first tank 43 and the second tank 44 are vertically arranged in a mutually independent state, and the second tank 44 receives the processing liquid S overflowing from the first tank 43 from below. It is arranged in a position. And this second
A nozzle portion 51 and a working liquid supply port 52 similar to those in the apparatus of FIG. 1 are formed in the lower part of the tank 44, and a working liquid introduction port 46 is formed in the lower part of the side wall of the first tank 43.

Also in this apparatus, the working fluid S is made to flow into the second tank by overflowing the working fluid S from the first tank 43.
It is possible to gently and uniformly flow into the tank 44 in the wire arranging direction. However, in the device shown in FIG. 1 and FIG. 4, both tanks 4 are contained in a single housing 40.
Since 3, 44 are formed, the working fluid S overflowing from the first tank 43 does not have to be spilled out of the second tank 44, the loss of the working fluid can be eliminated, and the entire apparatus can be eliminated. Has the advantage of being more compact.

In each of the above-mentioned embodiments, a plurality of working liquid inlets 46 may be provided, for example, both side walls of the housing 40 may be provided. Further, the disposition position may be set as appropriate, and may be provided, for example, on the back wall of the housing 40 (left side wall in FIGS. 1, 4, and 5) or on the first tank 43. Good. However, as shown in each of the above figures, if the working fluid introduction port 46 is provided in the lower portion of the first tank 43, the foreign matter in the working fluid can be more reliably removed from the first tank 43.
The processing liquid S can be more gently overflowed from the first tank 43 while being allowed to settle at the bottom of the wire, and the second tank 44 can be made more uniform and stable over the entire wire arrangement direction. Then, the working liquid S can be made to flow in.

[0031]

As described above, according to the present invention, in the working fluid supply device for the wire saw, the first tank, which extends in the direction in which the cutting wires are arranged and into which the working fluid is introduced, overflows from the first tank. Since a second tank provided at a position for receiving the working liquid and having a slit-shaped working liquid supply port extending in the arrangement direction of the cutting wires on the bottom is provided together, the conventional working liquid is used. Compared with a device that supplies the machining fluid into the second tank from the machining fluid supply nozzle in which the ejection ports are provided intermittently, the machining fluid inflow amount into the second tank can be made uniform in the wire arranging direction. ,
This has the effect of significantly reducing the variation in the amount of machining liquid supplied to each wire and ensuring good machining accuracy. Further, unlike the case where the machining fluid is ejected and put into the second tank, the machining fluid can be gently flown into the second tank from the first tank, and the machining fluid supply amount is more stable accordingly. Can be made. Further, in principle, the foreign matter mixed in the machining fluid settles on the bottom of the first tank, so that the foreign matter is clogged in the slit-shaped machining fluid supply port or passes through the slit-shaped machining fluid supply port. There is also an effect that the inconvenience of causing wire breakage by attaching to the surface of the wire can be avoided.

Particularly, in the apparatus in which the working fluid inlet is provided in the lower portion of the first tank, the foreign matter in the working fluid can be more reliably settled on the bottom of the first tank, and at the same time, the first tank can be settled. The effect that the amount of working fluid supplied from the tank to the second tank can be made more uniform and stable in the wire arranging direction can be obtained.

A partition member is provided in the housing which extends in the direction in which the cutting wires are arranged, and the partition member divides the housing into the first tank and the second tank. For example, unlike the case where both tanks are installed independently, it is possible to eliminate the loss of the working fluid overflowing from the first tank spilling to the outside of the second tank, and the working fluid can be efficiently supplied to the wire. The effect is obtained. Also, the entire device can be made more compact.

In particular, as the partition member, a partition wall extending in the direction in which the cutting wires are arranged is erected at an intermediate portion of the bottom wall of the housing, and the first tank and the second tank are provided in the longitudinal direction of the wire. The ones arranged side by side have an effect that the height dimension of the housing can be significantly reduced and the structure of the entire wire saw can be made more compact. Further, since the head of the machining fluid from the first tank to the second tank can be made extremely small, the machining fluid can be more quietly flowed into the second tank to provide a more stable machining fluid supply. To be

[Brief description of drawings]

FIG. 1 is a cross-sectional view taken along the line AA of FIG.

FIG. 2 is a front view of the working fluid supply apparatus according to the first embodiment of the present invention.

FIG. 3 is an overall configuration diagram of a wire saw provided with the working liquid supply device.

FIG. 4 is a cross-sectional view of a working liquid supply apparatus according to a second embodiment of the present invention.

FIG. 5 is a cross-sectional view of a working liquid supply apparatus according to a third embodiment of the present invention.

[Explanation of symbols]

 36A, 36B Machining liquid supply device 40 Housing 42 Partition wall 43 First tank 44 Second tank 46 Machining liquid introduction port 52 Machining liquid supply port 54 Partition plate (partitioning member) S Machining liquid W wire

Claims (4)

[Claims] 1. A working liquid supply device for a wire saw, wherein a plurality of cutting wires are provided on a wire saw stretched in parallel with each other, and the cutting liquid is supplied to the respective cutting wires at the same time. A first tank extending in the wire arranging direction and into which the machining liquid is introduced, and a slit-shaped machining provided at a position for receiving the machining liquid overflowing from the first tank and extending in the arranging direction of the cutting wires on the bottom portion. A working liquid supply device for a wire saw, which is provided with a second tank having a liquid supply port. 2. The working fluid supply device for a wire saw according to claim 1, wherein a working fluid introduction position to the first tank is set at a lower portion of the first tank. apparatus. 3. The machining liquid supply apparatus for a wire saw according to claim 1, further comprising a housing extending entirely in a direction in which the cutting wires are arranged, the inside of the housing being the first tank. A machining liquid supply device for a wire saw, characterized in that a partitioning member for partitioning the second tank is provided. 4. The machining liquid supply apparatus for a wire saw according to claim 3, wherein a partition wall extending in a direction in which the cutting wires are arranged is provided upright at an intermediate portion of a bottom wall of the housing as the partition member. A working liquid supply device for a wire saw, wherein a first tank and a second tank are formed side by side in the longitudinal direction of the wire.