JPH097536A - Specimen fixture - Google Patents

Specimen fixture

Info

Publication number
JPH097536A
JPH097536A JP7157725A JP15772595A JPH097536A JP H097536 A JPH097536 A JP H097536A JP 7157725 A JP7157725 A JP 7157725A JP 15772595 A JP15772595 A JP 15772595A JP H097536 A JPH097536 A JP H097536A
Authority
JP
Japan
Prior art keywords
sample
specimen
fixing
main body
sem
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7157725A
Other languages
Japanese (ja)
Other versions
JP2720835B2 (en
Inventor
Toshihiro Kato
俊弘 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP7157725A priority Critical patent/JP2720835B2/en
Publication of JPH097536A publication Critical patent/JPH097536A/en
Application granted granted Critical
Publication of JP2720835B2 publication Critical patent/JP2720835B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Sampling And Sample Adjustment (AREA)

Abstract

PURPOSE: To facilitate the mounting/demounting of a specimen to a microscope jig, and the tilt of the specimen, when a cross section specimen is used to an electron microscope. CONSTITUTION: In a main body 1, an FIB fixing screw 3 is formed on a bottom surface 31 of a specimen mounting surface 41, and plural SEM fixing screws 2 are formed on side surfaces 21 and 22. Specimen fixing metal fittings 8 and 9 are formed on the specimen mounting surface 41, and a specimen 4 is fixed onto the body 1 by using a specimen fixing screw 10. The body 1 is fixed onto an FIB specimen mount 6 by using the screw 3 to be inserted into an FIB specimen chamber to work the specimen 4. Then, the body 1 is fixed onto an SEM specimen mount by using an SEM fixing screw 2 to be inserted into an SEM specimen chamber.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、電子顕微鏡および集束
イオンビーム装置のための試料固定具に関する。
FIELD OF THE INVENTION This invention relates to sample fixtures for electron microscopes and focused ion beam devices.

【0002】[0002]

【従来の技術】従来、集束イオンビーム(以下FIB)
装置を用いて試料を加工し、加工された試料の加工面を
含む面の観察,測長および分析等を走査型電子顕微鏡
(以下SEM)で行なう場合の試料固定具の例を図9−
図11を用いて説明する。
2. Description of the Related Art Conventionally, focused ion beam (hereinafter referred to as FIB)
An example of a sample fixture when a sample is processed using an apparatus and observation, length measurement and analysis of a surface including a processed surface of the processed sample are performed by a scanning electron microscope (hereinafter, SEM).
This will be described with reference to FIG.

【0003】図9を参照すると、FIB用試料ホルダー
11に試料4が搭載された例が示されている。この例で
は、試料4は、FIB用試料ホルダー11に接着剤5を
用いて固定されている。このように接着剤5で試料4の
固定されたFIB用試料ホルダー11は、FIB試料台
6に搭載される。このようにして試料4は、FIB装置
に挿入される。
Referring to FIG. 9, there is shown an example in which the sample 4 is mounted on the FIB sample holder 11. In this example, the sample 4 is fixed to the FIB sample holder 11 with the adhesive 5. The FIB sample holder 11 in which the sample 4 is thus fixed with the adhesive 5 is mounted on the FIB sample table 6. In this way, the sample 4 is inserted into the FIB device.

【0004】図10を参照すると、FIBにより試料4
は加工される。
Referring to FIG. 10, a sample 4 is obtained by FIB.
Is processed.

【0005】加工後、試料4はSEMにより観察,測
長,および分析等が行なわれる。
After processing, the sample 4 is observed, measured, and analyzed by SEM.

【0006】このため、SEMに試料4が挿入されなけ
ればならない。
Therefore, the sample 4 must be inserted into the SEM.

【0007】まず、接着剤5で固定されている試料4が
FIB用試料ホルダー11から剥がされて取られ、この
試料4が接着剤5を用いてSEM用資料ホルダー12に
固定される。
First, the sample 4 fixed with the adhesive 5 is peeled from the FIB sample holder 11 and taken, and the sample 4 is fixed to the SEM material holder 12 with the adhesive 5.

【0008】図11を参照すると、SEM用試料ホルダ
ー12に試料4が接着剤5で固定され、SEM試料台7
に搭載された例が示されている。
Referring to FIG. 11, the sample 4 is fixed to the SEM sample holder 12 with an adhesive 5, and the SEM sample table 7 is attached.
The example installed in is shown.

【0009】このような状態でSEMが用いられ、試料
4の観察,測長および分析等が行なわれていた。
In such a state, the SEM was used to observe, measure and analyze the sample 4.

【0010】この接着剤5ではなく、ネジで試料をはさ
み込み固定する技術の一例が特開平1−258348号
公報に示されている。
An example of a technique of sandwiching and fixing a sample with screws instead of the adhesive 5 is disclosed in Japanese Patent Laid-Open No. 1-258348.

【0011】この公報には、ホルダーA(4)にホルダ
ーB(5)にねじ込むことにより観察すべき資料(1)
が物理的に圧着,固定される。
In this publication, the material (1) to be observed by screwing the holder A (4) into the holder B (5)
Are physically crimped and fixed.

【0012】[0012]

【発明が解決しようとする課題】電子顕微鏡を用いて試
料を垂直にして、断面の観察,測長,分析を行う場合、
電子顕微鏡用治具とFIB用治具は、試料接着部の治具
が共用化がされていない。このため、FIBにて試料を
加工及び観察後SEMにて観察する場合、あるいは、そ
の逆の場合には、試料を必ず接着部を治具から剥し、も
う一方の治具に載せ換え、接着または固定しなければな
らないという欠点がある。この結果、試料の載せ換え時
に要する工数が増大するという問題点があり、さらに
は、載せ換え時に試料を汚したり破損したりするという
問題もしばしば発生している。また、複数の試料ホルダ
ーを組み合わせることにより、垂直面を作り上げると、
試料ホルダーが大きくなり、装置に挿入することができ
ないという問題点がある。
When observing a cross section, measuring the length, and analyzing the sample vertically with an electron microscope,
The jig for the electron microscope and the jig for the FIB are not commonly used as the jig for the sample bonding portion. For this reason, when the sample is processed and observed by the FIB and then observed by the SEM, or vice versa, the sample is always peeled off from the bonding portion and placed on the other jig for bonding or bonding. It has the drawback of having to be fixed. As a result, there is a problem that the number of man-hours required at the time of remounting the sample is increased, and further, a problem that the sample is soiled or damaged at the time of remounting often occurs. Also, by combining multiple sample holders to create a vertical surface,
There is a problem that the sample holder becomes large and cannot be inserted into the device.

【0013】また、試料の垂直断面部を180°変えた
り、試料を0°〜90°まで傾斜させるような場合にお
いても、同様に試料の載せ替え等を行わなければならな
いという問題点がある。
Further, even when the vertical cross section of the sample is changed by 180 ° or the sample is inclined from 0 ° to 90 °, the sample must be replaced again.

【0014】そしてまた、試料を固定する際に接着剤を
用いるため、試料を汚したり、ガスの発生により高解像
度観察,高分解能分析ができなくなるという問題点があ
る。
Further, since an adhesive is used to fix the sample, there is a problem that the sample becomes dirty and high resolution observation and high resolution analysis cannot be performed due to generation of gas.

【0015】本発明の目的は、走査型電子顕微鏡用治具
と集束イオンビーム用治具とに共用化される試料固定具
を提供することにある。
It is an object of the present invention to provide a sample fixture that is commonly used as a jig for a scanning electron microscope and a jig for a focused ion beam.

【0016】本発明の他の目的は、集束イオンビームで
試料を加工後走査型電子顕微鏡で試料を観察するため試
料の載せ換えを不要にした試料固定具を提供することに
ある。
Another object of the present invention is to provide a sample fixture which does not require replacement of the sample for observing the sample with a scanning electron microscope after processing the sample with a focused ion beam.

【0017】本発明の他の目的は、走査型電子顕微鏡で
試料を観察後集束イオンビームで試料を加工するため試
料の載せ換えを不要にした試料固定具を提供することに
ある。
Another object of the present invention is to provide a sample fixture which does not require replacement of the sample because the sample is processed by a focused ion beam after observing the sample with a scanning electron microscope.

【0018】[0018]

【課題を解決するための手段】本発明の第1の試料固定
具は、試料を搭載する試料搭載面を有する本体と、この
本体の試料搭載面に対抗する面に設けられ、集束イオン
ビーム装置に固定する集束イオンビーム用固定ネジと、
この集束イオンビーム用固定ネジの設けられた面に直角
な面に設けられ、電子顕微鏡に固定する電子顕微鏡用固
定ネジとを含む。
A first sample fixture of the present invention is provided on a main body having a sample mounting surface on which a sample is mounted and on a surface of the main body facing the sample mounting surface, and the focused ion beam apparatus is provided. Focusing ion beam fixing screw to fix to
A fixing screw for an electron microscope, which is provided on a surface perpendicular to the surface on which the fixing screw for the focused ion beam is provided and which is fixed to the electron microscope, is included.

【0019】本発明の第2の試料固定具は、前記第1の
試料固定具における前記本体の前記試料搭載面に前記試
料の一面と接着する試料固定部を有し、該試料の一面に
対抗する面を押圧し該試料固定部とともに前記試料を挟
持する試料固定部材を有する。
A second sample fixture of the present invention has a sample fixing portion that adheres to one surface of the sample on the sample mounting surface of the main body of the first sample fixture, and opposes the one surface of the sample. It has a sample fixing member that presses the surface to be held and holds the sample together with the sample fixing portion.

【0020】本発明の第3の試料固定具は、前記第2の
試料固定具における前記試料固定部材が、前記本体の前
記試料搭載面に直角な面に、前記試料を挟持する際調節
可能な部材で固定されていることを特徴とする。
The third sample fixture of the present invention is adjustable when the sample fixture of the second sample fixture holds the sample in a plane perpendicular to the sample mounting surface of the main body. It is characterized by being fixed by a member.

【0021】本発明の第4の試料固定具は前記第1の試
料固定具における前記本体が導電性の金属で形成される
ことを特徴とする。
A fourth sample fixture of the present invention is characterized in that the main body of the first sample fixture is made of a conductive metal.

【0022】本発明の第5の試料固定具は、前記第4の
試料固定具の前記本体を形成する金属が銅,アルミニウ
ムおよびステンレスのいずれか一つを材料とすることを
特徴とする。
The fifth sample fixture of the present invention is characterized in that the metal forming the main body of the fourth sample fixture is made of any one of copper, aluminum and stainless steel.

【0023】本発明の第6の試料固定具は、前記第4の
試料固定具における前記本体の試料搭載面に前記試料が
導電性接着剤で接着されることを特徴とする。
The sixth sample fixture of the present invention is characterized in that the sample is adhered to the sample mounting surface of the main body of the fourth sample fixture with a conductive adhesive.

【0024】本発明の第7の試料固定具は、前記第6の
試料固定具における前記導電性の接着剤が銀ペーストお
よび銀カーボンのいずれか一つを材料とすることを特徴
とする。
A seventh sample fixture of the present invention is characterized in that the conductive adhesive in the sixth sample fixture is made of one of silver paste and silver carbon.

【0025】[0025]

【実施例】次に、本発明の実施例について図面を参照し
て詳細に説明する。
Next, embodiments of the present invention will be described in detail with reference to the drawings.

【0026】図1を参照すると、本発明の第1の実施例
は、方形の本体1を有し、図2では上面にあたる試料搭
載面41と、この試料搭載面41に対抗し図では底面に
あたる面31に設けられたFIB用固定ネジ3と、図で
は右側面と左側面にあたり、面31に直角で互いに対抗
する面21および22に設けられたSEM用固定ネジ2
とを含む。
Referring to FIG. 1, a first embodiment of the present invention has a rectangular main body 1, a sample mounting surface 41 which is the upper surface in FIG. 2 and a bottom surface which faces the sample mounting surface 41 in the drawing. The FIB fixing screw 3 provided on the surface 31 and the SEM fixing screw 2 provided on the surfaces 21 and 22 which are the right side surface and the left side surface in FIG.
And

【0027】本体1は、銅,アルミ,またはステンレス
等を材料とした導電性の金属で形成されている。
The main body 1 is made of a conductive metal such as copper, aluminum or stainless steel.

【0028】次に本発明の第1の実施例がどのように使
用されるのか図2−図4を参照して詳細に説明する。
Next, how the first embodiment of the present invention is used will be described in detail with reference to FIGS.

【0029】図2を参照すると、本体1の試料搭載面4
1に試料4が導電性の接着剤5で接着固定される。導電
性の接着剤5としては、銀ペーストや銀カーボン等が望
ましい。
Referring to FIG. 2, the sample mounting surface 4 of the main body 1
The sample 4 is bonded and fixed to the sample 1 with a conductive adhesive 5. As the conductive adhesive 5, silver paste, silver carbon, or the like is desirable.

【0030】図3を参照すると、図2で試料4が導電性
の接着剤5で試料搭載面41に接着固定された本体1が
FIB用試料台6上にFIB用固定ネジ3を用いて固定
される。固定されたあと、FIB試料室に挿入された試
料4は加工される。
Referring to FIG. 3, the main body 1 in which the sample 4 is adhered and fixed to the sample mounting surface 41 by the conductive adhesive 5 in FIG. 2 is fixed on the FIB sample base 6 using the FIB fixing screws 3. To be done. After being fixed, the sample 4 inserted into the FIB sample chamber is processed.

【0031】図4を参照すると、SEM用試料台7に図
1(B)に示される試料4の接着固定された本体1が搭
載され、SEM用固定ネジ2で固定される。固定された
ものがSEM試料室に挿入される。この結果、加工され
た試料4が観察,測長,分析される。
Referring to FIG. 4, the main body 1 to which the sample 4 shown in FIG. 1 (B) is adhered and fixed is mounted on the SEM sample base 7 and fixed by the SEM fixing screw 2. The fixed one is inserted into the SEM sample chamber. As a result, the processed sample 4 is observed, measured, and analyzed.

【0032】本発明の第1の実施例では、本体1を18
0°回転させ、SEM用試料台7上に固定することによ
り、試料4を本体1から取り外すことなく加工された試
料4の観察,測長および分析を行うことが可能である。
In the first embodiment of the present invention, the body 1 is
By rotating the sample 4 for 0 ° and fixing it on the SEM sample base 7, it is possible to observe, measure, and analyze the processed sample 4 without removing the sample 4 from the main body 1.

【0033】本発明の第1の実施例は、さらにまた、装
置の傾斜機能を用いて試料ホルダー1を傾斜し、FIB
用固定ネジ3の同一面上にSEM用固定ネジ2を形成す
ることにより、試料4をあらゆる角度に傾斜でき、その
角度での観察ができる。
The first embodiment of the present invention also uses the tilting function of the device to tilt the sample holder 1 to
By forming the SEM fixing screw 2 on the same surface of the fixing screw 3, the sample 4 can be tilted at any angle, and observation at that angle can be performed.

【0034】本発明の第1の実施例は、治具固定ネジを
複数備えることにより、試料4を載せ替えることなく1
個の試料ホルダーで容易に加工,観察,測長,分析等を
行なうことができる。
The first embodiment of the present invention is provided with a plurality of jig fixing screws, so that the sample 4 can be replaced without replacement.
Processing, observation, length measurement, analysis, etc. can be easily performed with one sample holder.

【0035】次に本発明の第2の実施例について図面を
参照して詳細に説明する。
Next, a second embodiment of the present invention will be described in detail with reference to the drawings.

【0036】本発明の第2の実施例の特徴は、試料4が
加工,観察等しやすいような位置で両側から挟持され、
取り外しが自在なように試料固定金具9で取り付けられ
ることにある。
The feature of the second embodiment of the present invention is that the sample 4 is clamped from both sides at a position where it can be easily processed and observed.
It is to be attached by the sample fixing fitting 9 so that it can be freely removed.

【0037】図5および6を参照すると、本発明の第2
の実施例は試料固定部9を含む本体1と、この本体1に
試料固定ネジ10で固定され試料4を挟持し調節する試
料固定部材の一例としての試料固定金具8とを備えてい
る。
Referring to FIGS. 5 and 6, the second aspect of the present invention.
This embodiment includes a main body 1 including a sample fixing portion 9 and a sample fixing metal fitting 8 as an example of a sample fixing member which is fixed to the main body 1 by a sample fixing screw 10 to clamp and adjust the sample 4.

【0038】この本体11は、銅,アルミ,ステンレス
等を材料とした導電性の金属で形成されている。
The main body 11 is made of a conductive metal such as copper, aluminum or stainless steel.

【0039】前記試料固定部材は試料を固定できるもの
であればよく、材料は木やプラスチックを適用できる
が、導電性のある金属であることが望ましい。
Any material can be used as the sample fixing member as long as it can fix the sample, and wood or plastic can be used as the material, but it is preferable that it is a conductive metal.

【0040】本体1は、図5の上面にあたる試料搭載面
41と、この試料搭載面41に対抗し図では底面にあた
る面31に設けられたFIB用固定ネジ3と、図では正
面と背面にあたり面31に直角で互いに対抗する面21
および22に設けられたSEM用固定ネジ2とを含む。
The main body 1 comprises a sample mounting surface 41 corresponding to the upper surface of FIG. 5, FIB fixing screws 3 provided on the surface 31 corresponding to the sample mounting surface 41 and corresponding to the bottom surface in the figure, and front and rear surfaces in the drawing. Faces 21 that are perpendicular to each other and that face each other
And the fixing screw 2 for SEM provided at 22.

【0041】本発明の第2の実施例の特徴の1つは、試
料搭載面41にもある。この試料搭載面41の一辺近傍
には試料固定部9が設けられている。この試料固定部9
のある辺に対抗する辺には、図の正面からみてL字状の
段差が設けられている。この段差の側面には図6に示さ
れるように試料固定ネジ10が結合されている。この試
料固定ネジ10の結合により断面がL字形状の試料固定
金具8は、本体1の試料固定部9との組合せで試料4を
挟持,調整のため用いられる。
One of the features of the second embodiment of the present invention is also in the sample mounting surface 41. The sample fixing portion 9 is provided near one side of the sample mounting surface 41. This sample fixing part 9
An L-shaped step viewed from the front of the drawing is provided on the side opposite to the side with the. A sample fixing screw 10 is coupled to the side surface of this step as shown in FIG. The sample fixing metal fitting 8 having an L-shaped cross section by the connection of the sample fixing screw 10 is used for holding and adjusting the sample 4 in combination with the sample fixing portion 9 of the main body 1.

【0042】次に本発明の第2の実施例がどのように使
用されるのか図6−図8を参照して詳細に説明する。
Next, how the second embodiment of the present invention is used will be described in detail with reference to FIGS. 6-8.

【0043】図6を参照すると、本体1の試料搭載面4
1上に試料4が試料固定ネジ10を用いて固定されてい
る。
Referring to FIG. 6, the sample mounting surface 4 of the main body 1
A sample 4 is fixed on the sample 1 using a sample fixing screw 10.

【0044】図7を参照すると、図6で示されるように
試料4が試料固定金具8および試料固定部9で試料搭載
面41に挟持固定された本体1が、FIB用試料台6上
にFIB用固定ネジ3を用いて固定される。固定された
あと、FIB試料室に挿入された試料4は加工される。
Referring to FIG. 7, as shown in FIG. 6, the main body 1 in which the sample 4 is clamped and fixed to the sample mounting surface 41 by the sample fixing metal fitting 8 and the sample fixing portion 9, is placed on the FIB sample base 6 and the FIB. It is fixed using the fixing screw 3 for. After being fixed, the sample 4 inserted into the FIB sample chamber is processed.

【0045】図8を参照すると、SEM用試料台7に図
1(B)に示される試料4の挟持固定された本体1が搭
載され、SEM用固定ネジ2で固定される。固定された
ものがSEM試料室に挿入される。この結果、加工され
た試料4が観察,測長,分析される。
Referring to FIG. 8, the main body 1 of the sample 4 shown in FIG. 1B, which is clamped and fixed, is mounted on the SEM sample base 7, and is fixed by the SEM fixing screw 2. The fixed one is inserted into the SEM sample chamber. As a result, the processed sample 4 is observed, measured, and analyzed.

【0046】本発明の第2の実施例では、本発明の第1
の実施例の効果に加えて、試料4を本体1に固定するた
め接着剤を使用しない。このため、ガスは発生せず、本
発明の第2の実施例では高解像度観察,高分解能分析が
できるという効果をもたらす。
In the second embodiment of the present invention, the first embodiment of the present invention is used.
In addition to the effect of the above embodiment, an adhesive is not used for fixing the sample 4 to the main body 1. Therefore, no gas is generated, and the second embodiment of the present invention brings about an effect that high-resolution observation and high-resolution analysis can be performed.

【0047】[0047]

【発明の効果】以上説明したように電子顕微鏡を用いて
試料を垂直にして、断面の観察,測長,分析を行う場
合、本発明の試料ホルダーとすることにより、SEM用
ホルダーとFIB用ホルダーにおいて試料ホルダーの共
用化を図ることが可能となる。このため、試料は1度試
料観察ホルダーに接着するだけでよく、FIBで試料を
加工後SEMで観察する場合、あるいは、その逆の場合
において、半導体集積回路の載せ換えが不要となり、そ
こで要した工数が大幅に短縮できるという効果がある。
さらには、載せ換え時に発生していた半導体集積回路を
汚したり破損したりするという危険もないため、容易に
試料を扱えるという効果がある。そしてまた、1個の試
料ホルダーで全ての装置に利用できるため、複数個の試
料ホルダーを用意することなく容易に装置の試料台へ着
脱することが出来るという効果がある。また、試料の垂
直断面部を180°変えたり、試料を0°〜90°まで
傾斜させる場合においても、同様に試料の載せ替え等を
行うことなく容易に観察することができるという効果が
ある。
As described above, when observing a cross section, measuring the length, and analyzing the sample vertically by using the electron microscope, the sample holder of the present invention can be used to provide the SEM holder and the FIB holder. It becomes possible to share the sample holder. Therefore, the sample only needs to be adhered to the sample observing holder once, and when the sample is processed by the FIB and then observed by the SEM or vice versa, the remounting of the semiconductor integrated circuit becomes unnecessary, which is required. This has the effect of significantly reducing man-hours.
Furthermore, since there is no danger that the semiconductor integrated circuit generated at the time of remounting will be contaminated or damaged, the sample can be easily handled. Further, since one sample holder can be used for all devices, there is an effect that the sample holder can be easily attached to and detached from the sample table without preparing a plurality of sample holders. Further, even when the vertical cross section of the sample is changed by 180 ° or the sample is tilted from 0 ° to 90 °, there is an effect that the sample can be easily observed without replacement or the like.

【0048】そしてまた、試料を固定する際に接着剤を
用いないため、試料を汚すことがなく、ガスの発生がな
いため高解像度観察,高分解能分析が容易に可能とな
る。
Since no adhesive is used to fix the sample, the sample is not contaminated and no gas is generated, so that high-resolution observation and high-resolution analysis can be easily performed.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例を示す図である。FIG. 1 is a diagram showing a first embodiment of the present invention.

【図2】第1の実施例に試料を搭載した状態を示す側面
図である。
FIG. 2 is a side view showing a state in which a sample is mounted on the first embodiment.

【図3】FIB試料台に第1の実施例を搭載した状態を
示す側面図である。
FIG. 3 is a side view showing a state in which the first embodiment is mounted on the FIB sample table.

【図4】SEM試料台に第1の実施例を搭載した状態を
示す側面図である。
FIG. 4 is a side view showing a state in which the first embodiment is mounted on the SEM sample stage.

【図5】本発明の第2の実施例を示す図である。FIG. 5 is a diagram showing a second embodiment of the present invention.

【図6】第2の実施例に試料を搭載した状態を示す側面
図である。
FIG. 6 is a side view showing a state in which a sample is mounted on the second embodiment.

【図7】FIB試料台に第2の実施例を搭載した状態を
示す側面図である。
FIG. 7 is a side view showing a state in which the second embodiment is mounted on the FIB sample table.

【図8】SEM試料台に第2の実施例を搭載した状態を
示す側面図である。
FIG. 8 is a side view showing a state where the second embodiment is mounted on the SEM sample stage.

【図9】従来のFIB用試料治具及びSEM用の試料治
具を説明するための図である。
FIG. 9 is a diagram for explaining a conventional sample jig for FIB and a sample jig for SEM.

【図10】FIB試料ホルダーに試料を搭載した状態を
示す側面図である。
FIG. 10 is a side view showing a state in which a sample is mounted on the FIB sample holder.

【図11】FIBにて試料を加工した状態を示す側面図
である。
FIG. 11 is a side view showing a state where a sample is processed by FIB.

【符号の説明】[Explanation of symbols]

1 本体 2 SEM用固定ネジ 3 FIB用固定ネジ 4 試料 5 接着剤 6 FIB用試料台 7 SEM用試料台 8 試料固定金具 9 試料固定金具 10 試料固定ネジ 11 FIB用試料ホルダー 12 SEM用試料ホルダー 41 試料搭載面 1 Main Body 2 SEM Fixing Screw 3 FIB Fixing Screw 4 Sample 5 Adhesive 6 FIB Sample Stand 7 SEM Sample Stand 8 Sample Fixing Fixture 9 Sample Fixing Fixture 10 Sample Fixing Screw 11 FIB Sample Holder 12 SEM Sample Holder 41 Sample mounting surface

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 試料を搭載する試料搭載面を有する本体
と、 この本体の試料搭載面の対抗面に設けられ、集束イオン
ビーム装置に固定する集束イオンビーム用固定ネジと、 この集束イオンビーム用固定ネジの設けられた面に直角
な面に設けられ、電子顕微鏡に固定する電子顕微鏡用固
定ネジとを含むことを特徴とする試料固定具。
1. A main body having a sample mounting surface for mounting a sample, a focusing ion beam fixing screw for fixing the sample to the focused ion beam device, the fixing screw being provided on a surface opposite to the sample mounting surface of the main body. A sample fixing tool, comprising: a fixing screw for an electron microscope, which is provided on a surface perpendicular to the surface on which the fixing screw is provided and which is fixed to the electron microscope.
【請求項2】 前記本体の前記試料搭載面に前記試料の
一面と接着する試料固定部を有し、 該試料の一面に対抗する面を押圧し該試料固定部ととも
に前記試料を挟持する試料固定部材を備えたことを特徴
とする請求項1記載の試料固定具。
2. A sample fixing part having a sample fixing part adhered to one surface of the sample on the sample mounting surface of the main body, and pressing a surface opposite the one surface of the sample to clamp the sample together with the sample fixing part. The sample fixture according to claim 1, further comprising a member.
【請求項3】 前記試料固定部材が、前記本体の前記試
料搭載面に直角な面に、前記試料を挟持する際調節可能
な部材で固定されていることを特徴とする請求項2記載
の試料固定具。
3. The sample according to claim 2, wherein the sample fixing member is fixed to a surface of the main body perpendicular to the sample mounting surface with a member that can be adjusted when the sample is clamped. Fixture.
【請求項4】 前記本体が導電性の金属で形成されてい
ることを特徴とする請求項1記載の試料固定具。
4. The sample fixture according to claim 1, wherein the main body is made of a conductive metal.
【請求項5】 前記本体の試料搭載面に前記試料が導電
性接着剤で接着されることを特徴とする請求項4記載の
試料固定具。
5. The sample fixture according to claim 4, wherein the sample is adhered to the sample mounting surface of the main body with a conductive adhesive.
JP7157725A 1995-06-23 1995-06-23 Sample fixture Expired - Lifetime JP2720835B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7157725A JP2720835B2 (en) 1995-06-23 1995-06-23 Sample fixture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7157725A JP2720835B2 (en) 1995-06-23 1995-06-23 Sample fixture

Publications (2)

Publication Number Publication Date
JPH097536A true JPH097536A (en) 1997-01-10
JP2720835B2 JP2720835B2 (en) 1998-03-04

Family

ID=15656009

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7157725A Expired - Lifetime JP2720835B2 (en) 1995-06-23 1995-06-23 Sample fixture

Country Status (1)

Country Link
JP (1) JP2720835B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004109097A (en) * 2002-09-20 2004-04-08 Toshiba Corp Polishing jig for physical analysis and method of physical analysis
JP2005515458A (en) * 2002-01-22 2005-05-26 レニショウ パブリック リミテッド カンパニー Reconfigurable sample holder
JP2007053048A (en) * 2005-08-19 2007-03-01 Sii Nanotechnology Inc Processing device using focusing charged particle beam
JP2011210400A (en) * 2010-03-29 2011-10-20 Jeol Ltd Charged particle beam device
WO2013121938A1 (en) * 2012-02-13 2013-08-22 株式会社 日立ハイテクノロジーズ Charged particle beam device, sample mask unit, and conversion member
JP2019083179A (en) * 2017-11-01 2019-05-30 日本電子株式会社 Sample holder

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005515458A (en) * 2002-01-22 2005-05-26 レニショウ パブリック リミテッド カンパニー Reconfigurable sample holder
JP2004109097A (en) * 2002-09-20 2004-04-08 Toshiba Corp Polishing jig for physical analysis and method of physical analysis
JP2007053048A (en) * 2005-08-19 2007-03-01 Sii Nanotechnology Inc Processing device using focusing charged particle beam
JP2011210400A (en) * 2010-03-29 2011-10-20 Jeol Ltd Charged particle beam device
WO2013121938A1 (en) * 2012-02-13 2013-08-22 株式会社 日立ハイテクノロジーズ Charged particle beam device, sample mask unit, and conversion member
JP2019083179A (en) * 2017-11-01 2019-05-30 日本電子株式会社 Sample holder

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