JPH097111A - Production of magnetic head - Google Patents

Abstract

PURPOSE: To obtain a process for producing a magnetic head which prevents abrasive grains from remaining in a polished member to be worked and greatly improves the yield of production. CONSTITUTION: The polished member 94 to be worked is immersed together with a sticking plate 100 into hot water 102 without drying. After the member 94 to be worked is peeled from the sticking plate 100, the member 94 to be worked is washed in succession without drying to remove the abrasive grains sticking to the member to be worked.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a magnetic head, and more particularly to a treatment of a work piece after a polishing step.

[0002]

2. Description of the Related Art The recent improvement in recording density in the field of magnetic recording technology is accompanied by a consequent narrowing of tracks for a magnetic head as an electromagnetic transducer, an increase in saturation magnetization of a core material, and a transparency in a high frequency region. There is an increasing demand for improved magnetic susceptibility.

In recent years, as a magnetic head satisfying the above requirements in the field of magnetic recording, for example, a magnetic thin film M such as a Fe--Si--Al alloy magnetic film as shown in FIG.
A thin film laminated magnetic head 1 constructed by abutting and joining two core halves 1A and 1B having a structure sandwiched between non-magnetic substrates 2 and 2 with a predetermined gap length has attracted attention. An example of a method of manufacturing such a magnetic head 1 is shown in FIG.
A brief explanation will be given with reference to.

In FIG. 3, first, a magnetic thin film laminated body, that is, a laminated block 90 formed by laminating a plurality of nonmagnetic substrates on which a magnetic film is formed by sputtering or the like is produced (FIG. 3A). The laminated block 90 is cut to form an I core plate 91 and a C core plate 92 (FIG. 3).
(B)).

Next, as indicated by reference numeral 82, the surface of the C core plate 92 is subjected to grooving for an apex glass mold, grooving for a winding groove, etc., and then the C core plate 92. After the track is aligned with the 92 and the I core plate 91 via the gap spacer (g), heat and pressure bonding, so-called gap welding is performed to obtain a gapped plate 93 (FIG. 3C).

Further, the gapped plate 93 is processed by grinding or the like to a predetermined thickness, and the apex glass 80 is molded on the apex portion (FIG. 3 (D)).
Individually cut and separated.

That is, the gapped plate 93 is
As shown in FIG. 4 (A) by hatching to show cut portions, first, cutting is performed in a direction orthogonal to the magnetic film M to obtain a plurality of bars 94 (FIG. 4 (B)). Is cut into a predetermined thickness, and I cores 1A and 1C as shown in FIG.
The magnetic head 1 including the core 1B is obtained.

As described above, the I core 1A and the C core 1B
In the method of manufacturing the magnetic head 1 made of, there is a polishing step for making the member have a predetermined size and surface roughness.

Conventionally, such a polishing step has been performed using a lapping machine. That is, the member to be processed is fixed to the attaching plate with wax, and the lapping process is performed by attaching the member to the lapping machine.

When the lapping process is completed, this sticking plate is washed with water by a brush, then placed on a hot plate heated to a predetermined temperature to melt the wax, and the member to be processed is peeled off from the sticking plate. The wax attached to the member to be processed is removed with an organic solvent such as IPA (isopropyl alcohol).

[0011]

However, in such a conventional polishing step and the subsequent cleaning step, the abrasive grains that cannot be completely removed by the brush cleaning with water are dried on the hot plate and adhered to the workpiece, Since it cannot be removed by subsequent cleaning, air bubbles are generated in the apex portion 80 of the magnetic head 1 to lower the mechanical strength of the magnetic head, or abrasive grains adhere to the winding window 82 or the like, resulting in poor appearance. was there.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a method of manufacturing a magnetic head in which abrasive grains are prevented from remaining on an abraded work member and the manufacturing yield is remarkably improved.

[0013]

The above object can be achieved by the method of manufacturing a magnetic head according to the present invention. In summary, the present invention is a method of manufacturing a magnetic head including a polishing step of fixing a workpiece to a sticking plate during the process of manufacturing the magnetic head, and attaching the sticking plate to a lapping machine to lap the workpiece. In the method, after the polishing step, the workpiece is peeled from the attachment plate by immersing the workpiece in hot water together with the attachment plate without drying, and subsequently, without drying the workpiece. It is a method of manufacturing a magnetic head, which comprises cleaning and then drying the member to be processed.

The member to be processed is fixed to the sticking plate with wax, and the member to be worked is immersed in hot water at a temperature higher than the softening point of the wax together with the sticking plate, so that the member to be worked is fixed. Peel from the attachment plate.

The cleaning is carried out by using one or a combination of running water cleaning, spray gun cleaning, brush cleaning and cleaning agent cleaning.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A method of manufacturing a magnetic head according to the present invention will be described in more detail below with reference to the drawings. The principle of the present invention is to provide a method for manufacturing a magnetic head including a polishing step of fixing a member to be processed to a sticking plate during a manufacturing process of a magnetic head, and attaching the sticking plate to a lapping machine to lap the member to be processed. Applicable. Next, examples of the present invention will be described.

In this embodiment, the manufactured magnetic head is
Two core halves 1A and 1B having a structure in which a magnetic thin film M such as a Fe—Si—Al alloy magnetic film as shown in FIG. 2 is sandwiched between non-magnetic substrates 2 and 2 are abutted with a predetermined gap length. Thin film laminated magnetic head 1 constructed by bonding
It is assumed that the magnetic head 1 is manufactured by the manufacturing method similar to that described with reference to FIGS. In this embodiment, the non-magnetic substrate 2 is a ceramic substrate mainly composed of CoO and NiO and Al ₂ O ₃ added thereto, that is, a CoO—NiO—Al ₂ O ₃ substrate.

That is, according to the method of manufacturing the magnetic head of the present embodiment, in FIG. 3, first, a magnetic thin film laminated body formed by laminating a plurality of non-magnetic substrates on which magnetic films are formed by sputtering or the like. That is, the laminated block 90 is manufactured (FIG. 3A), and the laminated block 90 is cut to form the I core plate 91 and the C core plate 92 (FIG. 3).
(B)).

Next, as indicated by reference numeral 82, the surface of the C core plate 92 is subjected to grooving for an apex glass mold and grooving for a winding groove, and then the C core plate 92. 92 and I core plate 91
After the tracks are aligned with each other via the gap spacer (g), heat and pressure bonding, so-called gap welding is performed to obtain a gapped plate 93 (FIG. 3 (C)).

Subsequently, the gapped plate 93 is processed by grinding or the like to a predetermined thickness, and the apex glass 80 is molded on the apex portion (FIG. 3).
(D)).

Thereafter, as shown in FIG. 4, the gapped plate 94 is cut in a direction orthogonal to the magnetic film to obtain a plurality of bars 94, and then the bars 94 are cut into a predetermined thickness. A magnetic head 1 including an I core 1A and a C core 1B as shown in 2 is obtained.

The manufacturing method of the present invention is particularly characterized by a member polishing step and a subsequent cleaning step which are frequently performed in the above magnetic head manufacturing step.

FIG. 1 shows the bar 94 manufactured in FIG.
A step of polishing and a step of cleaning are shown. According to the present invention, in the polishing step (FIG. 1A), the member to be processed, which is the bar 94 in this embodiment, is attached using the wax W.
00 and fix this sticking plate 100 to the lapping machine 2
It is carried out by attaching it to 00 and lapping.

When the polishing process is completed, the bar 94, which has been completed the polishing process, is immersed in hot water 102 together with the sticking plate 100 without drying, as shown in FIG. 1 (B). The temperature of the warm water 102 is set higher than the softening point of the wax W for sticking the bar 94 to the sticking plate 100. For example, the wax used has a softening point of 48.
If it is ℃, the temperature of the hot water may be higher than this temperature by 2 to 3 ℃, for example, about 50 ℃.

Subsequently, the bar 94 which has been peeled off from the application plate 100 is not dried but is subsequently washed according to a usual manner. That is, the abrasive grains having a diameter of about 0.25 to 1 μm attached to the bar 94 that has undergone the polishing process are washed with running water, spray gun washing, brush washing,
It can be removed by cleaning with a detergent (neutral detergent),
The wax adhering to the bar 94 can be removed with an organic solvent such as IPA (isopropyl alcohol) or acetone.

The washed bar 94 is rinsed if necessary and then dried by, for example, a dryer. Pure water or the like is preferably used as the rinse liquid.

When the magnetic head 1 as shown in FIG. 2 is manufactured by the manufacturing method shown in FIGS. 3 and 4 by employing the polishing step and the cleaning step according to the present invention, the apex portion 80 is formed.
The ratio of the magnetic head in which bubbles are generated in the conventional method (2
It has been found that it can be reduced to a quarter or less compared to (5%). Further, according to the present invention, the rate of the appearance defect due to the adherence of the abrasive grains can be significantly reduced as compared with the prior art, and the yield can be improved.

[0028]

As is apparent from the above description, in the method of manufacturing a magnetic head according to the present invention, after the polishing step, the member to be processed is immersed in warm water together with the attachment plate without drying the member to be processed. Is peeled off from the pasting plate, and subsequently, the workpiece is cleaned without being dried, and then dried, so that it is possible to effectively prevent the abrasive grains from remaining on the polished workpiece. The manufacturing yield can be remarkably improved.

[Brief description of drawings]

FIG. 1 is a process chart for explaining a polishing process and a plate peeling process performed according to the present invention.

FIG. 2 is a perspective view showing an embodiment of a magnetic head manufactured according to the present invention.

FIG. 3 is an explanatory diagram showing a manufacturing process of the magnetic head.

FIG. 4 is a perspective view for explaining a step of cutting the gapped plate into a bar shape.

[Explanation of symbols]

 1 magnetic head 2, 3 non-magnetic ceramic substrate 80 apex glass 82 winding window 94 bar 102 hot water

Claims (3)

[Claims] 1. A method of manufacturing a magnetic head, comprising a polishing step of fixing a member to be processed to a sticking plate during the process of manufacturing the magnetic head, and attaching the sticking plate to a lapping machine to lap the member to be processed. After the polishing step, the workpiece is peeled from the attachment plate by immersing the workpiece in a warm water together with the attachment plate without drying, and subsequently, the workpiece is washed without being dried, After that, the member to be processed is dried, and a method of manufacturing a magnetic head, comprising: 2. The member to be processed is fixed to the attaching plate with wax, and the member to be processed is immersed together with the attaching plate in warm water whose temperature is higher than the softening point of the wax. The method of manufacturing a magnetic head according to claim 1, wherein the magnetic head is peeled off from the attachment plate. 3. The method of manufacturing a magnetic head according to claim 2, wherein the cleaning is performed by using one or a combination of running water cleaning, spray gun cleaning, brush cleaning and cleaning agent cleaning.