JPH0970946A - Offset printing method and apparatus and image forming apparatus using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase the preciseness and area of a planar display device by generating a relative slip by the vibration of at least one of a blanket main body and a work main body at the contact interface of the surface of a blanket and that of a work to perform the transfer of ink. SOLUTION: The ink 7 kneaded on an ink slab 1 by the rotary slide contact with an ink roll 6 is transferred to an intaglio. The ink 7 slid on the upper surface of the intaglio 2 by a blade 8 to be transferred other than the ink filled into recessed parts is scraped off. A blanket 9 is successively rotated and transferred along the upper surfaces of both of the intaglio and a glass substrate 3. Herein, a vibration unit 5 having a vibrator incorporated therein is fixed to a work surface plate 4 and the vibration of the vibrator is transmitted at a time of the transfer of ink from the blanket 9 to a work and, by the vibration of the glass substrate 3, a microslit is generated between the blanket 9 and the glass substrate 3 and ink is well transferred.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a pattern of an electronic device by offset printing, and further, an image forming apparatus manufactured by the offset printing, mainly a flat-panel display device, is required to have a precise and large area. It relates to the manufacturing method to be realized.

[0002]

2. Description of the Related Art Conventionally, offset printing has been widely used for printing graphics, mainly for printing patterns that are visually perceptible to human eyes. Further, in recent years, technological developments have been made for producing electrodes of recording thermal heads, color filters of liquid crystal display devices, and the like as applications to electronic devices.

FIG. 9 is a diagram showing a flatbed proofing machine type printing apparatus. In the figure, 101 is an ink kneading base for spreading the ink 107 on the ink roller 104, and 102 is a plate surface plate for fixing the intaglio plate 105. Further, 103 is a work surface plate for fixing a work 106, which is an object to be printed, and is fixedly arranged on the main body frame 108. Two rack gears 109 and 110 are arranged on both sides of the three surface plates arranged in a line.
A blanket 113, in which pinion gears 111 and 112 are meshed with each other, is arranged on 9,110. The blanket 113 has carriages 114, 11 on both sides of its axis.
5, the carriages 114 and 115 move forward and backward by the crank operation of the crank arm 116 from the lower part of the main body, and the blanket 113 moves the ink mixing table 101,
The intaglio 105 and the work 106 are sequentially rotated and slid. A rubber blanket is attached to the surface of the blanket.

FIGS. 10 (a) to 10 (d) are views showing an offset printing process. In this figure, 101 is an ink kneading stand, 105 is an intaglio, and 106 is a glass substrate to be a work, which are arranged in series on the same plane. Reference numeral 104 denotes an ink roll, which is the ink 10 kneaded on the ink mixing table 101.
7 is transferred onto the intaglio plate 105 (102 (a)). 11
Reference numeral 7 denotes a blade, which scrapes out the ink 107 transferred by sliding on the upper surface of the intaglio plate 105 except for the ink filled in the recesses (102 (b)). Reference numeral 113 denotes a blanket, which receives the ink filled in the concave portion of the intaglio plate 105 by sequentially contacting the intaglio plate 105 and the upper surface of the glass substrate 106 in turn (102 (c)), and the intaglio plate 10 on the glass substrate 106.
The ink 107 is transferred to the pattern of 5 (10
2 (d)).

The printing process is completed as described above. The printing ink 107 can be appropriately selected depending on the function of the pattern to be produced. That is, organic Au, which is called Au resinate paste, is mainly used for electrodes of recording thermal heads and the like.
An ink made of a metal is used, and in the case of a color filter, an ink in which raw materials of R, G, and B colors are dispersed, an ink containing an organic dye, or the like is used.

Conventionally, as a display technology for realizing a flat-panel display device, a simple matrix liquid crystal display device (LC
D), thin film transistor liquid crystal display device (TFT / LC
D), plasma display (PDO), low-speed electron beam fluorescent display (VFD), multi-electron source flat CRT, and other flat panel display technology.

As an example of these display technologies, a light emitting element for emitting a phosphor using a multi electron source and a flat panel display device using the same will be described.

Conventionally, MIElison, Radio Eng. Electron Pys., Has been used as an element capable of emitting electrons with a simple structure.
A surface conduction electron-emitting device announced by 10, (1965) and others is known. This utilizes the phenomenon that electron emission occurs when a current is passed through a thin film of a small area formed on a substrate in parallel with the film surface.

As the surface conduction electron-emitting device, one using the SnO ₂ thin film by Erinson et al.
By thin film [G.Dittmer: “Thin Solid Films”, 9,
317 (1972)], In ₂ O ₃ / SnO ₂ thin film [M. Hartwell and CGFonstad: “IEEE Trans. ED Con
f. ”, 519 (1975)], by a carbon thin film [Hiraki Araki et al .:
Vacuum, Vol. 26, No. 1, p. 22 (1983)] and the like are reported.

As a typical device configuration of these surface conduction electron-emitting devices, the above-mentioned M. The Hartwell device structure is shown in FIG. In the figure, 201 is an insulating substrate, and 202
Is a thin film for forming an electron emitting portion, and is made of an H-shaped metal oxide thin film formed by sputtering, and the electron emitting portion 203 is formed by an energization process called forming described later. Reference numeral 204 is called a thin film including an electron emitting portion.

Conventionally, in these surface conduction electron-emitting devices, the electron-emitting portion forming thin film 2 is formed before the electron emission.
In general, the electron-emitting portion 203 was previously formed by an energization process called forming. That is, the forming means the thin film 202 for forming the electron emitting portion.
A voltage is applied to both ends of the electron emission part to locally destroy, deform or alter the electron emission part forming thin film to form the electron emission part 203 in an electrically high resistance state.
The electron emitting portion 203 is the electron emitting portion forming thin film 202.
There is also a case where a crack is generated in a part of the area and electrons are emitted from the vicinity of the crack.

Further, the inventors of the present invention have reported that USP 5,066,
In 883, a technology of a novel surface conduction electron-emitting device in which fine particles for emitting electrons are dispersedly arranged between device electrodes is disclosed. Compared with the conventional surface conduction electron-emitting device, the electron-emitting device can precisely control the electron-emitting position and can arrange the electron-emitting devices with higher precision. A typical device structure of this surface conduction electron-emitting device is shown in FIG. In the figure, 301 is an insulating substrate, and 302 and 30.
Reference numeral 3 is an element electrode for obtaining an electrical connection, 304 is a thin film made of a fine particle electron emitting material dispersed, and 305 is an electron emitting portion. In this surface conduction electron-emitting device,
The electrode interval between the pair of electrodes 302 and 303 is 0.01 micron to 100 micron, and the sheet resistance of the electron emitting portion of the thin film 204 is 1 × 10 ³ Ω / □ to 1 × 10 ⁹ Ω / □.

When the surface conduction electron-emitting device described above is used as an electron-emitting device, it must be placed in a vacuum container in order to fly an electron beam. A face plate is provided almost vertically above this element in a vacuum container to form an electron emitting device, a voltage is applied between the electrodes, and the phosphor is irradiated by the electron beam obtained from the electron emitting portion. It can be made to emit light and can be used as a light emitting element or a flat panel display device.

[0014]

However, as described above, the flatbed proof press printing apparatus has the following problems.

1) In order to transfer an ink such as workherenate paste which does not absorb ink such as glass, has a smooth surface, and has a small sliding friction resistance with respect to the blanket, simply press the ink on the blanket against the work. Is insufficient, and print pattern defects often occur.

Further, there were the following problems in producing a flat image display device without using the offset printing method.

2) A functional thin film is formed on an object to be processed in the electronic circuit processing step of the thin film display device such as the surface conduction electron-emitting device, the simple matrix liquid crystal display device (LCD), the thin film transistor liquid crystal display device (LFT / LCD). A film is formed and this is patterned. For example,
After forming the Al material on the substrate, a wiring pattern is formed by photolithography and ening.

However, for example, in the case of producing a fine pattern on a large substrate of 40 cm square or more by the photolithography technique, a large-scale manufacturing apparatus including a large-scale exposure apparatus is required, which is very expensive.

Further, with a large area substrate of about 1 m, it is difficult to increase the size of the manufacturing apparatus itself, and even if a large apparatus such as an exposure apparatus can be realized, the processing time per substrate becomes long, and the manufacturing It had the drawback of enormous costs.

3) In a process of processing an electronic circuit using a thick film such as a plasma display (PDP) display element, a conductive paste or an insulating paste is directly pattern-printed by a screen printing method and then baked to form an electrode wiring. A method of forming a pattern or an insulating layer is performed. Patterning by the printing method can be applied to a relatively large area substrate, and the processing time per substrate is shorter than that of the photolithography technique.

However, the printing pattern is easily deformed due to the fluidity of the resist ink, the conductive paste and the insulating paste, the releasing property from the printing plate, the transferability, the plate pressure, etc., and the dimensional accuracy and the shape of the pattern. In addition, there is a limit in position controllability and reproducibility. Therefore, it is very difficult to perform precise and fine pattern processing with few defects by the printing method, and it is not suitable as a method for forming a precise fine pattern of about 100 microns or less with good reproducibility. For this reason, there is a drawback that it is difficult to increase the definition of the pixels of the screen of the flat display device. Therefore, it is difficult to finely manufacture a thin film transistor liquid crystal display device (TFT / LCD) and a surface conduction electron-emitting device.

[0022]

The present invention has made it possible to provide an offset printing apparatus and a printing method that solve the above problems. In particular, the present invention does not absorb ink such as glass and smoothes when pattern-printing electrodes used in an image display device, electronic circuits, electrodes of electronic devices, color filters used in LCDs, etc. by offset printing. Thus, even with respect to a work having a small surface contact resistance, it is possible to print with a small number of defects due to a good ink transfer and a small deformation of the pattern shape.

Furthermore, if the blanket rubber surface and the printing plate surface are brought into contact with each other without slippage during the sliding contact between the blanket intervening in printing and the printing plate which is the original pattern, the ink pattern received on the blanket rubber surface is deformed. Is small.

On the other hand, when the blanket and the work glass are brought into contact with each other, the pressing force between the blanket rubber surface and the work glass surface is increased, or a relative slip is caused to achieve good ink transfer. At this time, the high pressure of the blanket rubber or the relative slip does not significantly contribute to the shape deformation of the ink pattern transferred onto the work, and therefore the ink pattern printed on the glass work has a good shape. In the present invention, relative slip is generated by vibration.

That is, the present invention is an offset printing apparatus for forming a pattern by receiving the ink arranged in the original pattern of the printing plate on the blanket surface and then transferring the ink to the work surface to form the pattern. At the contact interface of the work surface, an offset printing apparatus having a function of causing relative slip by vibration of at least one of the blanket body and the work body to transfer ink, and more preferably, an original form of a printing plate An offset printing apparatus that receives the ink arranged in a pattern on the blanket surface and transfers the ink to the work surface to form a pattern. The blanket body and the printing plate are used for contact between the blanket surface and the printing plate surface. There is no relative slip at the contact interface of the body, ink is received, and the blanket The contact interface surface and the workpiece surface is to provide an offset printing apparatus characterized by having a function of causing a relative slip by at least one of vibration of the blanket body and the work body performing the transfer of ink.

Further, according to the present invention, a vibrating element is attached to at least one of the blanket cylinder and the work fixing surface plate, and an offset printing device and an offset printing apparatus are controlled so that the vibrating element vibrates when the blanket surface and the work surface come into contact with each other. A printing method is provided.

Furthermore, the present invention is the offset printing apparatus described above, which is a flatbed proofing machine type offset printing apparatus, a cylindrical rotary offset printing apparatus, and an offset printing method using the same.

Further, according to the present invention, by applying a voltage between a pair of electrodes provided on the substrate, electrons are generated to irradiate the electrons on the phosphor on the counter substrate provided facing the substrate. A method of manufacturing an image forming apparatus for forming an image by causing the phosphor to emit light, the image forming apparatus using the offset printing apparatus to form the pair of electrodes, and the image forming using the offset printing apparatus. To provide a method.

[0029]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below. The offset printing used in the present invention is generally used for graphic printing in which ink is transferred onto paper. Further, the offset printing has a feature that the transfer film thickness of the ink can be made thinner than the screen printing used for forming the thick film electronic circuit.

In order to carry out high-definition printing, it is necessary to make the printing plate finer and to maintain an ink transfer pattern in the printing process. However, the thinner the ink to be transferred, the higher the resolution. be able to. This is because as the aspect ratio of the thickness to the pattern width of the ink is smaller, the thickening of the pattern width due to the sagging and blurring of the ink after transfer can be reduced. Therefore, the offset printing capable of reducing the transfer film thickness has the possibility of controlling the pattern thickening for high-definition printing.

Here, the sliding contact of the blanket rubber surface with the printing plate and the work surface in offset printing, and the acceptance of ink to the blanket and the transfer to the work will be described.

FIG. 9 shows a general flatbed proofing machine type offset printing apparatus. The actual printing procedure is as described in the previous section. The printing plate used here is a metal intaglio plate in which a pattern is etched on the surface of a metal plate by photolithographic etching. The ink filled in the concave portion of the metal intaglio plate is received by the blanket which is in sliding contact, and the blanket is in sliding contact with the glass work, whereby the ink is transferred on the glass work and a printing pattern is formed.

The heights of the metal intaglio and the glass work with respect to the sliding surface of the blanket are adjustable. This mechanism makes it possible to adjust the plate pressure determined by the amount of blanket rubber pushed into the metal intaglio and the printing pressure determined by the amount pushed into the glass work. The plate pressure and printing pressure are appropriately determined in the actual printing process.

The blanket sliding in this series of steps is carried out by the engagement of the gears, which are simply fixed on the blanket cylinder, with the printing plate, and the rack gears, which are arranged at both ends of the work stage. Generally, the diameter of the rotary motion generated by the engagement of the rack and the gear, that is, the pitch circle is determined as one. As described above, when the blanket rubber outer radius is the same as the pitch circle radius, there is no difference in circumferential length between the two. Therefore, when the surface of the blanket rubber is rotationally slid on the surface of the work of the printing plate, the surface of the blanket rubber can be rotated without causing in-plane slip with respect to the surface of the printing plate or the work.

As a method other than the above method, as shown in FIG. 4, the rotation of the blanket cylinder and the forward / backward movement of the blanket are driven by individual motors, and by synchronizing the motors with each other, the printing plate surface and the work surface It is possible to rotate the blanket rubber surface without slipping in the in-plane direction when the sliding contact is made.

Furthermore, as shown in FIGS. 3 and 5, also in the cylindrical rotary offset printing apparatus, the same in-plane slip as in the flatbed calibration machine method is generated by the same method for both gear drive and motor drive. It is possible to rotate without.

As described above, in order to transfer the ink such as resinate paste to a work which is smooth and has a small surface contact resistance without absorbing the ink such as glass under the condition of the rotary sliding contact in which the slip does not occur, a blanket is used. Transferring is insufficient by simply pressing the ink on the work, and defects in the printed pattern often occur.

In the present invention, since sufficient ink transfer is performed even in printing under the above conditions, at the contact interface between the blanket surface and the work surface, relative slip is caused by vibration of at least one of the blanket body and the work body, and the ink This is an offset printing method for transferring. The slip generated by this vibration is called microslip.

This micro-slip is possible by an offset printing apparatus in which a vibrating element is attached to at least one of the blanket cylinder and the work fixing surface plate, and the vibrating element is controlled to vibrate when the blanket surface comes into contact with the work surface. Become.

Now, the flat electrode proofing machine type offset printing apparatus was used to print the element electrodes in the flat image display apparatus under the following conditions.

Condition 1 Condition 2 Plate pressure (micron) 200 200 Printing pressure (micron) 200 200 No micro-slip on work Yes Printing results were as follows.

Ink observation surface Condition 1 Condition 2 Receiving ink on blanket Good ink acceptance Good ink acceptance Good ink transfer on work Good ink transfer defects Many ink transfer FIGS. 8 (a), 8 (b) and 8 (c) are made by the present invention. 3 is a diagram showing a pattern shape of element electrodes in a flat-panel image display device. (A) is an original intaglio shape, (b) is an ink shape transferred onto a glass substrate when microslip is generated, and (c) is an ink transferred onto a glass substrate when there is no microslip It is a figure which shows a shape.

As can be easily discerned from this figure, the ink shape received on the work differs depending on the presence or absence of microslip. That is, ink transfer is insufficient when there is no microslip, but ink transfer is good when there is microslip.

From the above results, the present inventors have found out the following. In order to transfer ink such as resine paste to a work that does not absorb ink such as glass, has a smooth surface, and has a small sliding friction resistance against the blanket, the transfer is insufficient by simply pressing the ink on the work and defects occur. There are many. In order to sufficiently transfer the ink to the work, it is necessary for the blanket to perform a movement in the in-plane direction of the glass so as to rub the ink on the work. In the present invention, this movement is caused by vibration. Detailed examples will be described below.

Example 1 FIGS. 1 (a) to 1 (d) are views showing steps of flatbed proofing machine type offset printing showing Example 1 of the present invention. In the figure, 1 is an ink kneading stand, 2 is an intaglio plate, 3 is a glass substrate to be a work, and 4 is a work surface plate for adsorbing and fixing the glass substrate 3, which are arranged in series on the same plane. Reference numeral 5 denotes a vibration unit having a vibrator incorporated therein, which is attached to the back surface of the work surface plate 4. 6 is an ink roll for supplying ink,
Reference numeral 7 is an ink, 8 is a blade for scraping off the unnecessary ink 7 on the intaglio 2, and 9 is a blanket for transferring the ink 7. In this figure, the apparatus configuration is the same as that of the conventional example, and the blanket sliding in the process is carried out by the meshing of gears fixed to both ends of the blanket cylinder, the printing plate and rack gears arranged at both ends of the work stage.
The blanket diameter and the pitch circle diameter of the gear are the same, and the surface of the blanket rubber is rotated without causing in-plane slip with respect to the surface of the printing plate or the work.

However, the work surface plate 4 is fixed with a vibrating unit 5 incorporating a vibrator, and when the ink is transferred from the blanket 9 to the work, the vibration of the vibrating unit 5 is transmitted and the glass substrate 3 vibrates. Microslip occurs between the blanket and the ink transfer is carried out well.

Next, the printing process will be described with reference to FIG. The ink 7 kneaded on the ink kneading stand 1 is transferred onto the intaglio plate 2 by the rotary sliding contact of the ink roll 6 (1 (a)).
Ink 7 transferred by sliding on the upper surface of intaglio 2 with blade 8.
Scrap the ink other than the ink filled in the recess (1
(B)). The blanket 9 rotates and contacts the upper surface of the intaglio 2 and the upper surface of the glass substrate 3 in this order, so that the ink filled in the recess of the intaglio 2 is received on the blanket 9 (1
(C)). The ink 7 received by the blanket 9 is transferred onto the glass substrate 3 in the pattern of the intaglio plate 2. At this time, the vibrating unit 5 is electrically vibrated to favorably transfer the ink (1 (d)). The printing process is completed as described above.

In this step, the intaglio plate 2 is formed by forming a recess in a desired printing pattern on a brass plate by a photolithographic etching method and then performing chrome plating. The depth of the recess was about 10 microns. The glass substrate 3 is made of washed soda-lime glass. A blanket rubber made of silicone is wound around the surface of the blanket 9. Ink 7 was Pt resinate paste ink. The vibration unit 5 has an ultrasonic vibrator made of a piezoelectric material and is fixed so that the vibration is transmitted to the work surface plate 4. The vibration frequency was 1 MHz.

The plate pressure in printing was 100 μm when the blanket was pressed into the intaglio plate, and the printing pressure was 100 μm when the blanket was pressed into the glass substrate. The printing pattern had the same shape as the concave pattern of the intaglio plate 2, and the ink was satisfactorily transferred onto the glass substrate without any defects.

Embodiment 2 FIGS. 2A to 2D are views showing the steps of flatbed proofing machine type offset printing showing Embodiment 2 of the present invention. In the figure, 11 is an ink kneading stand, 12 is an intaglio, 13 is a glass substrate that serves as a work, and 14 is a work surface plate for adsorbing and fixing the glass substrate 13, which are arranged in series on the same plane. Reference numeral 15 is an ink roll for supplying ink, 16 is ink, 17 is a blade for scraping off unnecessary ink on the intaglio 12, and 18 is a blanket for transferring the ink 17. Reference numeral 19 denotes a vibration unit having a vibrator incorporated therein, which is arranged and fixed at the coaxial position of the blanket 18. In this figure, the apparatus configuration is the same as that of the conventional example, and the blanket sliding in the process is carried out by the meshing of gears fixed to both ends of the blanket cylinder, the printing plate and rack gears arranged at both ends of the work stage. The blanket diameter and the pitch circle diameter of the gear are the same, and the surface of the blanket rubber is rotated without causing in-plane slip with respect to the surface of the printing plate or the work. However, a vibration unit 19 incorporating a vibrator is fixed to the blanket 18, and the vibration of the vibration unit 19 is transmitted at the time of ink transfer from the blanket 18 to the work, and the vibration of the glass substrate 3 causes a microscopic gap between the blankets. Slip occurred and the ink transfer was performed well.

The printing process is the same as in the first embodiment. In this step, each member and printing conditions were the same as in Example 1. As a result, the ink 7 was satisfactorily transferred onto the glass substrate 13 without any defects, with the obtained print pattern having the same shape as the recess pattern of the intaglio plate 12.

Third Embodiment FIG. 3 is a top view and a side view of a cylindrical rotary offset printing apparatus showing a third embodiment of the present invention. 4 in this figure
Reference numeral 1 is a main body frame, and 42 is a work stage, which is supported by linear guides 43 and 44 on the main body frame 41, and travels left and right in the drawing by a ball screw 45 driven by a motor arranged on the left side of the main body frame 41. Reference numerals 46 and 47 denote rack gears arranged and fixed on both sides of the work stage 42. Reference numeral 48 denotes a work surface plate disposed substantially in the center of the work stage 42, and a vibration unit similar to that of the first embodiment is fixed to the back surface thereof. Further, it has a structure that can be adjusted in the height direction. A glass substrate 49 is arranged and fixed on the work surface plate 48. The glass substrate 49 is made of washed soda-lime glass.

A blanket cylinder 50 has gears 51, 52, 53, 54 fixed to both ends thereof. A cylindrical intaglio 55 has gears 56 and 57 fixed to both ends thereof. Reference numerals 58 and 59 denote carriages fixed to the main body frame 41, and the shaft of the blanket cylinder 50 and the cylindrical intaglio plate 5
The shaft No. 5 is fixed via a bearing bearing. 60
Is a blanket rubber made of silicone rubber,
It is wound around and fixed to the blanket cylinder 50. The cylinder intaglio 55 can be pressed into contact with the blanket rubber 60 by the air cylinders 61 and 62, if necessary. Reference numeral 63 is a doctor blade made of thin plate steel, and is supported and fixed to air cylinders 64 and 65 for raising and lowering the doctor blade fixed to carriages 58 and 59. The lowering of the air cylinders 64, 65 allows the doctor blade 63 to slide in contact with the surface of the cylindrical intaglio 55.

Here, the gears 51, 5 fixed to the blanket cylinder 50 with respect to the outer diameter of the blanket rubber.
Gear 5 fixed to 2, 53, 54 and cylindrical intaglio 55
The pitch circle diameters of 6 and 57 were set to be the same. The pitch circle diameter and the outer circumference circle diameter of the blanket rubber 60 were also set to be the same. Therefore, the contact rotary slide between the surface of the blanket rubber 60 and the surface of the cylindrical intaglio 55 and the contact rotary slide between the surface of the blanket rubber 60 and the surface of the glass substrate 49 rotate without causing a slip in an in-plane direction between them. I am doing it.

However, the work surface plate 48 has a vibrating unit incorporating a vibrator fixed on its back surface, and when the ink is transferred from the blanket rubber 60 to the work, the vibration of the vibrating unit is transmitted and the glass substrate 49 vibrates. Micro-slip occurs between the blanket and the blanket, and the ink transfer is performed well. Here, the pressing amount into the cylindrical intaglio plate 55, that is, the plate pressure is 100 μm, and the glass substrate 4
The pressing amount to 9, ie, the printing pressure was also set to 100 μm.

The actual printing process will be described below. First,
The doctor blade 63 on the cylindrical intaglio plate is brought into downward contact, and then Pt resinate paste ink is supplied to the vicinity of the doctor blade contact part of the cylindrical intaglio plate. The glass substrate 49 is fixedly arranged on the work surface plate 48. Next work stage 42
When the ball screw 45 is driven and rotated to move straight to the left in the drawing, the blanket cylinder 50 and the cylindrical cinder 55 cause contact rotary sliding motions due to the engagement of the rack and the gear. The ink is filled in the concave portion of the cylindrical intaglio plate 55 as the rotational movement progresses, and unnecessary ink other than that is scraped off by the doctor blade 63. The ink with which the concave portion is filled is contact-rotated and slid to be received by the surface of the blanket rubber 60.

The received ink is a blanket rubber 60.
With the rotation of the glass substrate 49, it slides in contact with the glass substrate 49 that moves straight. At this time, the desired printing pattern could be formed on the glass substrate 49 by favorably transferring the ink by electrically vibrating the vibration unit of the work surface plate 49. At this time, the transfer was satisfactorily performed on the entire surface of the effective pattern, and the shape of the ink transferred onto the glass substrate 49 was the same as the pattern of the cylindrical intaglio 55.

The printing process is completed as described above. In the present embodiment, similar printing was possible by disposing and fixing the vibrating unit at the coaxial position of the blanket cylinder 50 and vibrating the blanket rubber 60 as in the second embodiment.

Fourth Embodiment FIG. 4 is a diagram of a flatbed proofreading machine type offset printing apparatus showing a fourth embodiment of the present invention. The printing apparatus configuration of the present embodiment is different from the configuration of the first embodiment described above, and the rotational movement of the blanket cylinder is driven by an independent motor 71. Also,
The printing plate surface plate and the work surface plate are fixed on a stage 72 that moves left and right by a linear guide and a ball screw installed on the body frame, and this stage 72 is also driven by an independent motor 74. A vibration unit similar to that of the first embodiment is fixed to the back surface of the work surface plate 73.

Further, since the carriage supporting the blanket cylinder is fixed to the main body frame, there is no left / right movement. Therefore, the blanket cylinder performs only the plate pressure and printing pressure control operations by the up-and-down motion of the air cylinder and the rotational motion by the motor 71, and the intaglio plate and the glass substrate slide by the movement motion of the stage 72. The ink is not supplied to the plate by using an ink roller, but the ink dropped directly onto the intaglio plate is spread with a doctor to fill the recesses of the intaglio plate with the ink and scrape off the ink in unnecessary portions.

Here, the rotation speed of the blanket cylinder and the moving speed of the stage 72 can be controlled individually. The speed at which the blanket rubber surface contacts and slides on the intaglio and the speed at which the blanket rubber surface contacts and slides on the glass substrate are controlled so that the outer peripheral length is equal to the intaglio length and the glass substrate length, and mutual contact is made. Does not slip. However, the work surface plate 73 has a vibrating unit with a vibrator fixed on the back surface, and when the ink is transferred from the blanket rubber to the work, the vibration of the vibrating unit is transmitted, and the vibration of the glass substrate occurs to cause the blanket to move. Microslip occurs between them, and the ink transfer is performed well.

As a method of changing the speed of the motor as described above, high-resolution encoders are mounted on the rotary shaft of the blanket cylinder and the moving shaft of the stage, and the respective motors are controlled while detecting the mutual positions, so that the speeds set are set. Make adjustments. As described above, the ink transfer became possible, and the print pattern having the same shape as the intaglio plate could be formed on the glass substrate.

Similar to the second embodiment, in this embodiment, the same printing can be performed by arranging and fixing the vibration unit at the coaxial position of the blanket cylinder and vibrating the blanket rubber 60.

Embodiment 5 FIG. 5 is a view of a cylindrical rotary offset printing apparatus showing Embodiment 5 of the present invention. The configuration of the printing apparatus according to the present embodiment is different from the configuration of the third embodiment described above, and the rotational movements of the blanket cylinder and the cylinder intaglio are driven by independent motors 81 and 82. The work surface plate is fixed on a stage 83 that moves left and right by a linear guide and a ball screw installed on the main body frame.
Is also driven by an independent motor 84.

Here, the rotational speeds of the blanket cylinder and the cylindrical intaglio plate and the moving speed of the stage 83 can be individually controlled. The speed at which the blanket rubber surface contacts and slides on the cylinder intaglio, and the speed at which the blanket rubber surface contacts and slides on the glass substrate are controlled so that the blanket rubber outer peripheral length is equal to the cylindrical intaglio outer peripheral length and the glass substrate length. No slip occurs on mutual contact. However, in the work surface plate 85, a vibration unit incorporating a vibrator is fixed on the back surface, and when the ink is transferred from the blanket rubber to the work, the vibration of the vibration unit is transmitted, and the vibration of the glass substrate occurs to cause the vibration of the blanket. Microslip occurs between them, and the ink transfer is performed well.

As a method of changing the speed of the motor as described above, high-resolution encoders are mounted on the rotary shaft of the blanket cylinder, the cylindrical intaglio shaft, and the stage moving shaft, and the motors are controlled while detecting their mutual positions. Adjust the set speed. As described above, the ink transfer became possible, and the print pattern having the same shape as the intaglio plate could be formed on the glass substrate. In the present embodiment, similar printing was possible by disposing and fixing the vibrating unit at the coaxial position of the blanket cylinder and vibrating the blanket rubber 60 as in the second embodiment.

Example 6 A method of manufacturing an image forming apparatus using an element electrode of an electron-emitting device formed by offset printing will be described below. The device electrode of the electron-emitting device was printed and transferred onto the glass substrate by the printing method and the printing apparatus described in the above examples. In this example, the one shown in FIG. 6 was used.

As the ink, a Pt resinate paste made of an organic metal is used. The ink transferred onto the glass substrate can be used as a device electrode made of Pt by drying at about 70 ° C. and baking at about 580 ° C. The thickness of the ink transfer on the glass substrate after printing and drying was as small as about 2 microns, and the width of the printed electrode pattern was very small. further,
The thickness of the Pt electrode after firing was as thin as about 1000 Å. Here, as the pattern shape of the device electrodes, there is a device electrode interval in which the electron emitting material is arranged, and the dimension thereof is set to about 20 μm. An electron-emitting device substrate can be manufactured by forming wiring on the device electrode formed as described above. The following is a sequential description with reference to the drawings.

An electron source substrate can be manufactured by forming a wiring and a thin film of Pd fine particles on the device electrode formed as described above. In FIG.
401 is an electron source substrate made of soda lime glass. 405, 40
6 is a thickness of about 7 obtained by printing and firing Ag paste ink.
Micron printed wiring. The device electrodes 402 and 403 are connected to the printed wirings 405 and 406, respectively. Reference numeral 404 is a thin film made of Pd fine particles having a thickness of about 200 angstroms obtained by coating and baking an organic metal solution.
Patterning was carried out by reverse etching of the Cr thin film so as to be arranged at 2, 403 and the electrode interval portion. 40
7 and 408 are plated wirings, which are formed on the printed wirings 402 and 403 by Cu plating having a thickness of about 50 microns and a width of 400 microns. A glass substrate 409 made of soda lime glass is opposed to the electron source substrate 401 with a distance of 5 mm.

Reference numeral 410 denotes a phosphor, which is arranged on the substrate 409 and is formed at a position corresponding to the electrode gap portion composed of the device electrodes 402 and 403 arranged on the electron source substrate 409 facing each other. The phosphor 410 is formed by mixing a photosensitive resin with a phosphor to form a slurry, applying and drying the phosphor, and then patterning the same by photolithography. Four
11 is a film after the filming process on the phosphor 410,
Al with a thickness of about 300 angstroms is formed by vacuum evaporation.
It is a metal back obtained by forming a thin film and baking it to remove the film layer. The above-described phosphor and metal back formed on the glass substrate 409 is called a face plate.

Reference numeral 413 is a grid electrode arranged between the element substrate and the face plate. After placing the above in a vacuum envelope, a voltage was applied between the plating wirings 407 and 408 to energize the thin film 404 to obtain an electron emitting portion 412. Thereafter, an electron extraction voltage of 3 kV is applied using the metal back 411 as an anode electrode, and the plated wiring 40
When a voltage of 14 V was applied from the device electrodes 402 and 403 to the electron emitting portion 412 through the gaps 7 and 408, electrons were emitted. By changing the voltage of the emission electron grid 413, the emission electron grid 413 was modulated and the amount of emission electrons irradiated to the phosphor 410 could be adjusted. As a result, the phosphor 410 was made to emit light arbitrarily and an image could be displayed.

Example 7 FIGS. 7A to 7F are views showing a combination of a surface conduction electron-emitting device manufactured by offset printing and a matrix wiring.

FIG. 7 is a top view showing the manufacturing process of the element substrate of this embodiment. In FIG. 7 (f), an example is shown in which 3 × 3 electron-emitting devices are formed in a matrix on a soda-lime glass substrate (not shown) together with wirings. In the figure, 501 is a lower layer printed wiring, 502 is a printing pad arranged in parallel with the lower layer printed wiring 501, and the lower layer printed wiring 5
In the same step as 01, the printed metal paste is formed by firing. Reference numeral 503 is a strip-shaped insulating layer that is formed by firing the printing glass paste and is orthogonal to the lower-layer printed wiring, and has a contact hole opening 504 at the center of the intersection with the printing pad 502. Reference numeral 505 denotes an upper layer printed wiring, which is a lower layer of the plated wiring 506 and is not exposed in the drawing.

The upper-layer printed wiring 505 has a strip shape on the insulating layer 23, is electrically connected to the printing pad 502 through the contact hole 505, and is formed by baking the printed metal paste. Element electrodes 507 and 508 are respectively connected to the lower layer printed wiring 501 and the printing pad 502, and are formed by offset printing of a resinate paste ink and firing. Element electrodes 507 and 508
Form a shape with an electrode interval of 30 μm and an electrode width of 200 μm at the adjacent portions. Reference numeral 509 denotes a thin film made of Pd fine particles which is an electron emitting material, and is a device electrode 507, 50.
Wiring is formed at 8 and the electrode interval. Reference numeral 510 denotes a thin film portion of the electrode gap portion, which is a portion to be an electron emitting portion described later. Reference numeral 506 denotes a plated wiring, which is a strip-shaped metal wiring having a thickness of about 100 microns formed on the upper layer printed wiring 505 by a plating method.

The figures (a), (b), (c),
A method of manufacturing the present element substrate will be described in order using (d), (e) and (f). First. Offset printing of resinate paste ink on a well-cleaned soda lime glass substrate and baking to obtain a Pt of 1000 angstroms
The device electrodes 507 and 508 were patterned. (A) Next, Ag paste ink is screen-printed and fired to form a lower layer printed wiring 50 having a width of 300 μm and a thickness of 7 μm.
1 and printing pad 502 were formed. At this time, the wiring 5
01 and the printing pad 502 are electrically connected to the device electrodes 507 and 508, respectively. (B) Next, a glass paste ink is screen-printed and fired to form an insulating layer 50 having a width of 500 microns and a thickness of about 20 microns.
3 and a contact hole 5 with an opening size of 100 microns square
04 was formed. (C) Further, Ag paste ink was screen-printed on the insulating layer 503 and baked to form an upper layer printed wiring 505 having a width of 300 μm and a thickness of 10 μm. At this time, the upper layer printed wiring 505 and the printing pad 502 are electrically connected through the contact hole 504. Further, by forming the plated wiring in the subsequent process, a sufficient step cover for the contact hole is realized. (D) Next, after forming a Cr film by a sputtering method on a portion where the thin film 509 is not to be arranged, a C film is formed by a photolithographic etching method.
After forming an r pattern, an organic palladium solution (Catapaste CCP4230 manufactured by Okuno Chemical Industries Co., Ltd.) was applied and baked to obtain a Pd fine particle film. Further, the Cr pattern is reverse-etched to form a thin film 509 on the device electrodes 507 and 508.
Then, patterning is performed on the electrode gap portion. (E) Next, a plating resist is formed by a photolithography method so that the upper layer printed wiring 505 is exposed, and the upper layer printed wiring 505 is energized to be electrolytically plated with Cu to a thickness of 1
Perform 00 micron. The element substrate is manufactured by removing the plating resist. At this time, in the contact hole 504 portion, the Cu plating film is sufficiently deposited and grown also in the contact hole 504, and the printing pad 50
2 and the upper layer printed wiring 505 were sufficiently electrically connected. (F) This device substrate is arranged on a 40 cm square substrate, and 350 × 350 electron-emitting devices are arranged in a matrix to form R, G, B
Was placed in a vacuum envelope together with a face plate having phosphors corresponding to. After that, after conducting the energization of the electron-emitting device, 14 V is applied to the upper layer printed wiring of the device substrate.
An arbitrary voltage signal of 0 V was sequentially applied and scanned to the lower layer printed wiring, and the other lower layer printed wirings were set to 7 V potential. When an anode voltage of 3 kV was applied to the metal back of the face plate, an arbitrary image could be displayed. At this time, there was no crosstalk between the fluorescent bright spots caused by the positional deviation between the electron-emitting device and the phosphor. Further, the wiring resistance of the plated wiring 506 can be reduced to about 0.5 ohm between both ends of the substrate, and the voltage drop and delay of the drive signal can be greatly improved.

In this step, the device electrodes 507 and 508 are prepared before printing and baking the printed wiring. However, since this element electrode has been subjected to the printing and firing step once, thermal damage to the element electrode did not occur in the same firing of the printed wiring. Further, the lower layer printed wiring 501 and the print pad 502 are the same formation layer on the substrate, and the contact between the element electrodes 507 and 508 is formed on the substrate where the element electrodes 507 and 508 have no steps. Since it was connected to 502, there was no disconnection in the middle.

[0077]

As described above, by generating and suppressing mutual surface slips during the contact rotary sliding of the blanket rubber surface, the printing plate surface, and the work glass surface,
The transfer of the ink to the surface of the work glass was good, and it was possible to form a printing pattern having no defects with respect to the pattern shape of the printing plate. As a result, the electron-emitting device according to the present invention can be stabilized, and an image forming apparatus that displays a higher quality image can be realized. Furthermore,
By forming the element electrodes by offset printing, the manufacturing processing time can be shortened and the image display device can be manufactured at low cost.

[Brief description of drawings]

FIG. 1 is a side view showing a printing process according to a first embodiment of the present invention.

FIG. 2 is a side view showing a printing process according to a second embodiment of the present invention.

FIG. 3 is a top view illustrating a printing device according to a third embodiment of the invention.

FIG. 4 is a top view showing a printing apparatus according to a fourth embodiment of the present invention.

FIG. 5 is a top view showing a printing apparatus according to a fifth embodiment of the present invention.

FIG. 6 is a sectional view showing an image display device of Example 6 of the present invention.

FIG. 7 is a top view showing an image display device of Example 7 of the present invention.

FIG. 8 is a top view showing a device electrode pattern shape.

FIG. 9 is a diagram showing a conventional flatbed proof machine type printing apparatus.

FIG. 10 is a diagram showing a conventional offset printing process.

FIG. 11 is a top view showing a surface conduction electron-emitting device.

12A and 12B are a top view and a cross-sectional view showing a surface conduction electron-emitting device.

[Explanation of symbols]

Figure 1 1 Ink mixing table 2 Intaglio 3 Glass substrate to be the work 4 Work surface plate for adsorbing and fixing the glass substrate 3 and arranged in series on the same plane 5 Vibrating unit with built-in vibrator Attached to the back side of 4 Ink roll 7 for supplying ink 7 Ink 8 Blade for scraping off unnecessary ink 7 on intaglio 9 Blanket for transferring ink 7 Fig. 2 11 Ink mixing table 12 Intaglio 13 Glass substrate to be a work 14 Work surface plate for adsorbing and fixing the glass substrate 13 and arranged in series on the same plane in series 15 Ink roll for ink supply 16 Ink 17 To scrape unnecessary ink on the intaglio 12 Blade 18 Blanket 19 for transferring ink 17 Fig. 3 41 Body frame 42 Work stage 43, 44 Linear guide 45 Ball screw 46, 47 Rack gear 48 Work surface plate 49 Glass substrate 50 fixed and arranged on the work surface plate 50 Blanket cylinder 51,52,53,54 Gear 55 Cylindrical intaglio 56,57 Gear 58,59 Carriage 60 Blanket rubber 61,62 Air cylinder-63 Doctor blade 64,65 Doctor blade lifting air cylinder Fig. 4 71 Motor 72 Stage 73 Workpiece Surface plate 74 Motor Fig. 5 81, 82 Motor 83 Stage 84 Motor 85 Work surface plate Fig. 6 401 Glass substrate 402, 403 Element electrode 403 Printing pad 404 Thin film 405, 406 Printing wiring 407, 408 Plating Wiring 409 Glass substrate 410 Phosphor 411 Metal back 413 Grid electrode Figure 7 501 Lower layer printed wiring 502 Printing pad 503 Insulating layer 504 Contact hole 505 Upper layer printed wiring 506 Plating wiring 507, 508 Element electrode 509 Electron emitting material 510 Electron emission diagram 8 (a) Intaglio shape as an original plate (b) Ink shape transferred onto the glass substrate when microslip is generated (c) Ink shape transferred onto the glass substrate when microslip is not present FIG. FIG. 10 101 Ink mixing table 102 Plate surface plate 104 Ink roller 103 Work surface plate 105 Intaglio plate 106 Work piece 107 Ink 108 Body frame 109, 110 Rack gear 113 Blanket 114, 115 Carriage 116 Crank arm Figure 11 20 DESCRIPTION OF SYMBOLS 1 Insulating substrate 202 Electron emitting part forming thin film, H type formed by sputtering 203 Electron emitting part 203 204 Thin film including electron emitting part FIG. 12 301 Insulating substrates 302, 303 Element electrodes 304 Dispersed fine particles Thin film made of electron emitting material 305 Electron emitting portion

Continuation of the front page (51) Int.Cl. ⁶ Identification code Office reference number FI technical display area // G02B 5/20 101 G02B 5/20 101

Claims (8)

[Claims] 1. An offset printing apparatus for forming a pattern by transferring the ink arranged on an original pattern of a printing plate to a blanket surface and then transferring the ink to the work surface to form a pattern. An offset printing apparatus having a function of causing relative slip at a contact interface by vibration of at least one of a blanket body and a work body to transfer ink. 2. An offset printing apparatus, which receives an ink arranged on an original pattern of a printing plate on a blanket surface and transfers the ink to a work surface to form a pattern, wherein the blanket surface and the printing plate surface. The ink is received without any relative slip at the contact interface between the blanket main body and the printing plate main body, and at the contact interface between the blanket surface and the work surface, relative slippage occurs due to the vibration of at least one of the blanket main body and the work main body. An offset printing apparatus having a function of causing ink transfer to transfer ink. 3. An offset printing apparatus, wherein a vibrating element is attached to at least one of a blanket cylinder and a work fixing surface plate, and the vibrating element is controlled so as to vibrate when the blanket surface and the work surface are in contact with each other. . 4. The offset printing apparatus is a flatbed proof machine type offset printing apparatus.
Alternatively, the offset printing apparatus according to Item 3. 5. The offset printing apparatus is a cylindrical rotary offset printing apparatus.
Alternatively, the offset printing apparatus according to Item 3. 6. An electron is generated by applying a voltage between a pair of electrodes provided on a substrate to irradiate the phosphor on a counter substrate provided facing the substrate with the electron, A method of manufacturing an image forming apparatus for forming an image by illuminating a body, comprising: forming the pair of electrodes using the offset printing apparatus according to claim 1, 2, 3, 4 or 5. Characterized image forming device. 7. An offset printing method using the offset printing apparatus according to any one of claims 1, 2, 3, 4 and 5. 8. An electron is generated by applying a voltage between a pair of electrodes provided on a substrate to irradiate the phosphor on a counter substrate provided facing the substrate with the electron, A method of manufacturing an image forming apparatus for forming an image by causing a body to emit light, wherein the pair of electrodes is manufactured by using the offset printing method according to claim 1, 2, 3, 4 or 5. Characterized image forming method.