JPH0963750A - Ceramic heater - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent layer-to-layer separation between a ceramic plate and a heat insulating plate, firmly connect leads drawn from a heating circuit and improve durability for a longer life. SOLUTION: A pin 17 is inserted between a ceramic plate 10 and a heat insulating plate 16 to easily and surely prevent layer-to-layer separation between both plates. At positions on the start end side 11a and the finish end side of a heating circuit 11 where a platinum wire 13 is inserted in a through-hole 12 passing through the heating circuit 11 and the ceramic plate 10, wound thereon and drawn as a lead, separation between the heating circuit 11 and the drawn lead is prevented.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic heater suitable for extending the life by improving durability.

[0002]

2. Description of the Related Art In recent years, ceramic heaters using aluminum nitride have come to be used as heating / melting heaters for fine processing used in wire bonding for connecting metal wires to IC chips, for example. There is.

As such heating / melting heaters, there have been conventionally used nichrome wire heaters, mica heaters, cartridge heaters, sheathed heaters, and alumina / ceramic heaters have been developed and used.

The alumina-ceramic heater is a heater having a long life and good heat transfer and a large watt density without oxidative deterioration as compared with the other heaters described above, but cracks occur due to repeated heating and cooling or rapid heating and cooling. Since it has a problem of being generated, a ceramic heater using aluminum nitride (hereinafter referred to as ALN) has been proposed as a ceramic heater having higher thermal shock resistance.

ALN is a ceramic heater excellent in thermal conductivity, heat dissipation and thermal shock. As shown in FIG.
The heat generating circuit 2 is formed on one side of the ceramic plate 1, and the heat generating layer 3 is laminated by applying glass coating or the like, and the insulating / heat insulating plate 4 is formed on the heat generating layer 3 via an inorganic adhesive (not shown).
Formed as a ceramic heater.

[0006]

By the way, the ceramic heater as described above is expected to further increase in demand while making the best use of its excellent characteristics, but it is laminated through an inorganic adhesive. Insulation with ceramic plate 1
There is a problem that peeling occurs between the heat insulating plate 4 and the heat insulating plate 4 due to warm heat during use.

Further, the start side 2a and the end side 2 of the heating circuit 2
The electrodes 2c and 2d are formed at the position of b and the electrodes 2c and 2d
Although the lead wires 5 and 5 are respectively brazed to the 2d and pulled out, this connecting portion is easily damaged and often affects the life of the heater.

Based on such a technical background, the applicants of the present invention are excellent in the prevention of delamination and the reliability of the brazing portion of the lead wire in the ceramic heater, which is expected to increase in demand in the future. As a result of earnestly researching the ceramic heater, it was found that the technical problem can be solved.

The present invention has been made in view of the above circumstances, and an object thereof is to prevent delamination between a ceramic plate and an insulating / heat insulating plate,
Another object of the present invention is to provide a ceramic heater suitable for enabling a robust connection of a lead wire from a heat generating circuit and improving durability to prolong the service life.

[0010]

In order to achieve the above-mentioned object, the present invention provides a heating layer by forming a heating circuit on one side or both sides of a ceramic plate as described in claim 1. In a ceramic heater that is laminated, and an insulating / heat insulating plate is laminated on the heat generating layer via an inorganic adhesive,
A pin is inserted between the ceramic plate on which the heating circuit is formed and the insulating / heat insulating plate so as to pass through both plates at a desired location, and this pin prevents delamination between the plates. And

Further, as described in claim 2, a heat generating circuit is formed on one side or both sides of the ceramic plate to laminate a heat generating layer, and an insulating / heat insulating plate is provided on the heat generating layer via an inorganic adhesive. In the laminated ceramic heater, a through hole is opened at the start end side and the end side of the heating circuit to penetrate the ceramic plate, and a platinum wire is inserted into the through hole and wound to form a lead wire. It is characterized by withdrawing.

Further, as described in claim 3, the through hole portion around which the platinum wire is wound, and the start end side and the end side of the heat generating circuit sinter or melt the current-carrying material or the material forming the heat generating circuit. It is characterized by being buried and connected.

Further, as described in claim 4, the through hole is formed so as to penetrate the starting end side and the terminating end side of the heating circuit and the ceramic plate.

[0014]

According to the present invention, the laminated ceramic plates and the insulating / insulating plates can be easily and reliably insulated and insulated from each other by a simple mechanical system in which pins are inserted between the plates. Prevents delamination from the plate.

Further, at the start end side and the end side of the heat generating circuit, a platinum wire is inserted into a through hole penetrating the ceramic plate and wound to lead out as a lead wire, so that the heat generating circuit and the lead wire are separated. Surely prevent.

[0016]

Embodiments of the present invention will be described in detail below with reference to the drawings. 1 is a sectional view for explaining a ceramic heater according to the present invention, and FIG. 2 is a plan view showing an example of a heat generating layer in FIG.

As shown in FIG. 1, on one side of a ceramic plate 10 made of a ceramic heater (ALN) using aluminum nitride, a heating circuit 11 is formed by thick film printing using a material mainly composed of platinum palladium. Heat-generating layer 1 formed by glass-coating the heat-generating circuit 11
4 are stacked.

The heat generating circuit 11 in the heat generating layer 14 is
As shown in FIG. 2, a circuit is formed from a starting end side 11a to a terminating end side 11b as a heat generating circuit designed in an appropriate shape,
Through holes 12 penetrating the ceramic plate 10 are provided near the start end side 11a and the end end side 11b, respectively.

Then, the platinum wire 13 is inserted into the through hole 12 and wound around to be drawn out as a lead wire.
It is connected to a conducting wire (not shown) to an external power source. Further, the starting end side 11a and the terminating side 11b of the heat generating circuit 11 around which the platinum wire 13 is wound, and the through hole 12 are buried with a sintered or molten material for forming the heat generating circuit or a current-carrying material, and a current connection is made. It is defined as part 15.

In this way, the insulating / heat insulating plate 16 is laminated on the heat generating layer 14 via an inorganic adhesive (not shown). In addition, 18 is a to-be-heat-processed object. Further, as shown in FIG. 3, the heat generating layer 14 may be formed on both side surfaces of the ceramic plate 10. In this case, the opposite side of the insulating / heat insulating plate 16 is the insulating / heat radiating plate 19.

On the other hand, the ceramic plate 10 and the insulating / heat insulating plate 1
A pin 17 is inserted so as to insert both plates 10 and 16 at a desired position.
0 and 16 are prevented from peeling. The pin 7 may be formed of a ceramic body or a metal body,
It is preferable to use aluminum nitride having the same expansion coefficient.

According to this embodiment constructed as described above, the ceramic plate 10 and the insulating / insulating plate 16 are formed by a simple mechanical method in which the pin 17 is inserted so as to penetrate between the plates. Easy and reliable ceramic plate 10
It is possible to prevent delamination between the insulating / heat insulating plate 16 and the insulating / heat radiating plate 19.

At the start end side 11a and the end side 11b of the heat generating circuit 11, the platinum wire 13 is inserted into the through hole 12 penetrating the ceramic plate while being wound and pulled out as a lead wire. As compared with the method of simply brazing the lead wires to the starting end side and the terminating end side of the heat generating circuit, peeling between the heat generating circuit 11 and the lead wire can be reliably prevented.

Moreover, the portion of the through hole 12 around which the platinum wire 13 is wound, and the starting end side 11a and the ending end side 11b of the heat generating circuit 11 are sintered or melted / embedded with the current-carrying material or the material for forming the heat generating circuit itself. By connecting in this manner, it is possible to surely secure a robust energization connection without forming an electrode portion as in the conventional case.

[0025]

As described above, according to the invention described in claim 1, by the simple mechanical method of inserting the pin so as to insert the ceramic plate and the insulating / heat insulating plate,
It is possible to easily and reliably prevent delamination between the ceramic plate and the insulating / heat insulating plate.

Further, according to the second aspect of the present invention, at the starting end side and the terminating side of the heat generating circuit, the platinum wire is inserted into the through hole penetrating the ceramic plate and wound, and the lead wire is drawn out. It is possible to prevent peeling from the lead wire.

Further, according to the invention of claim 3 or 4, the through hole portion around which the platinum wire is wound, and the starting end side and the terminating end side of the heating circuit are made of a conductive material or a heating circuit forming material. By connecting by melting, embedding, burying, or connecting, it is possible to surely secure a robust energization connection without forming an electrode portion as in the conventional case.

[Brief description of drawings]

FIG. 1 is a sectional view for explaining a ceramic heater according to the present invention.

FIG. 2 is an explanatory diagram showing an example of a heat generating layer in FIG.

FIG. 3 is an enlarged sectional view for explaining a through hole portion in FIG.

FIG. 4 is an explanatory sectional view showing another example of the ceramic heater.

FIG. 5 is an explanatory diagram showing a connection example between a heating circuit and a lead wire in a conventional ceramic heater.

[Explanation of symbols]

 10 Ceramic Heater 11 Exothermic Circuit 12 Through Hole 13 Platinum Wire 14 Exothermic Layer 15 Conductive Material 16 Insulation / Adiabatic Plate 17 Pin 18 Heated Object 19 Insulation / Radiation Plate

Claims (4)

[Claims] 1. A ceramic heater in which a heating circuit is formed on one side or both sides of a ceramic plate, a heating layer is laminated, and an insulating / heat insulating plate is laminated on the heating layer via an inorganic adhesive, A pin is inserted between the ceramic plate on which the heating circuit is formed and the insulating / heat insulating plate so as to pass through both plates at a desired location, and this pin prevents delamination between the plates. And a ceramic heater. 2. A ceramic heater in which a heating circuit is formed on one side or both sides of a ceramic plate, a heating layer is laminated, and an insulating / heat insulating plate is laminated on the heating layer via an inorganic adhesive, A ceramic heater characterized in that a through hole is formed at a starting end side and a terminating end side of a heating circuit so as to pass through a ceramic plate, and a platinum wire is inserted into the through hole and wound to lead as a lead wire. . 3. The through hole portion around which the platinum wire is wound, and the starting end side and the terminating end side of the heat generating circuit are connected by sintering or melting / embedding a conductive material or a material for forming the heat generating circuit. The ceramic heater according to claim 2. 4. The ceramic heater according to claim 2, wherein the through hole is formed so as to penetrate the start side and the end side of the heat generating circuit and the ceramic plate.