JPH0954134A - Method and apparatus for measurement of characteristic for electronic component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an apparatus by which an electronic component is measured at a high speed, whose maintainability is enhanced, and whose operating reliability is enhanced. SOLUTION: A servometer for driving a measuring unit is used in order to drive the measuring unit 20 in which the characteristic of an electronic component is measured by using a contact 23 coming into contact with the terminal electrode of the electronic component as an object to be measured. A servomotor 60 for conveyance driving is used in order to drive a rotary index table 1 which intermittently conveys the electronic component to the measuring position of the measuring unit 20. A period in which the contact 23 of the measuring unit 20 is separated from the terminal electrode of the electronic component is detected on the basis of the angle of rotation of the servomotor for driving the measuring unit. The rotary index table 1 is moved by a constant amount within the period by using the servomotor 60 for conveyance driving.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component characteristic measuring method and apparatus for measuring the electrical characteristic of a chip-shaped electronic component such as a chip capacitor and a chip inductor at high speed.

[0002]

2. Description of the Related Art Heretofore, as a characteristic measuring apparatus for electronic components of this type, there are those disclosed in Japanese Patent Publication No. 5-66009 and Japanese Patent Publication No. 6-87072 proposed by the present applicant. Japanese Patent Publication No. 5-66009 and Japanese Patent Publication No. 6-87072
The device of No. 1 is an intermittent transfer table for holding and transferring chip-shaped electronic parts (hereinafter referred to as chip parts) such as chip capacitors and chip inductors, and a pair of measuring parts for the chip parts on the intermittent transfer table. It has a measuring unit for contacting the contactor to measure the electrical characteristics, and based on the intermittent feed operation of the intermittent transfer table, mechanically interlocks with it to open and close the measuring contact of the measuring unit. Then, the chip components that are intermittently conveyed are sequentially measured.

As another conventional apparatus, there is one in which a servo motor is used to drive an intermittently moving and carrying table and a solenoid is used to drive a measuring unit. In this case, a moving completion signal from the intermittently moving and carrying table is used. The solenoid of the measuring unit is driven to measure the electronic components on the intermittently moving and transporting table.

[0004]

In the devices of Japanese Patent Publication No. 5-66009 and Japanese Patent Publication No. 6-87072 described above, the intermittent feeding operation of the intermittent transfer / conveyance table is used as a reference and mechanically interlocked therewith. Since the measuring contact of the measuring unit is opened and closed, it is difficult to achieve higher speed than the current one, and regular maintenance such as refueling is required. In addition, it is difficult to instantaneously stop at the current position in response to a stop command caused by a stop factor in supplying and discharging electronic components.

Further, in the conventional apparatus which uses the servomotor to drive the intermittent transfer table and uses the solenoid to drive the measuring unit, the life of the solenoid is short. There is a drawback that it requires complicated replacement and maintenance is troublesome.

In view of the above points, an object of the present invention is to provide a method and apparatus for measuring characteristics of an electronic component, which can speed up measurement of the electronic component, improve maintainability and reliability of operation. .

[0007] Other objects and novel features of the present invention will be clarified in embodiments described later.

[0008]

In order to achieve the above object, the method for measuring the characteristics of an electronic component according to the present invention is a method for measuring the characteristics of an electronic component with a contactor that comes into contact with a terminal electrode of the electronic component which is the object to be measured. The first servomotor is used to drive the measurement unit to be performed, and the second servomotor is used to drive the intermittent movement transport table that intermittently transports the electronic component to the measurement position of the measurement unit. The period during which the contact of the measuring unit is separated from the terminal electrode of the electronic component is detected from the rotation angle of the servo motor, and the intermittent movement conveyance table is moved by a predetermined amount by the second servo motor within the period. It is characterized by that.

Further, in the above-mentioned method for measuring the characteristics of electronic parts, normally, the first servomotor is continuously rotated,
The rotation of the first and second servo motors may be stopped when the predetermined amount of movement of the intermittent movement conveyance table by the second servo motor cannot be completed within the period.

The characteristic measuring device for electronic parts according to the present invention comprises an intermittent moving transfer table for intermittently transferring an electronic part, which is an object to be measured, and a contact for contacting the terminal electrodes of the electronic parts intermittently transferred by the intermittent moving transfer table. A measuring unit having a child for measuring the characteristics of the electronic component, a first servo motor for opening and closing the contact, and a second servo motor for driving the intermittent transfer table. A rotation angle detecting means for detecting a rotation angle of the first servo motor, and a detection output of the rotation angle detecting means indicates that the contact is separated from the terminal electrode of the electronic component. In addition, the second servo motor drives the intermittent transfer table.

Further, in the above-mentioned characteristic measuring device for electronic parts, a confirmation sensor for detecting a fixed amount of movement of each intermittent conveyance of the intermittent movement conveyance table is provided, and normally the first servomotor is continuously rotated. The rotation of the first and second servo motors may be stopped when the confirmation sensor detects that the constant amount of movement of the intermittent movement conveyance table is not completed within the period.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a method and apparatus for measuring characteristics of electronic parts according to the present invention will be described below with reference to the drawings.

FIG. 1 is a front sectional view showing a rotary index table as an intermittent moving / conveying table and a mechanical portion around the rotary index table according to an embodiment of the present invention, and FIG. 2 is a mechanical portion for opening / closing driving a contact of a measuring unit. Front sectional view of
3 is a plan view of the embodiment, FIG. 4 is an enlarged cross-sectional view showing a measurement unit portion, FIG. 5 is a block diagram showing an electric control system in the embodiment, and FIG. 6 is a time for explaining the operation of the embodiment. It is a chart.

1 to 4, a rotary index table 1 serving as an intermittently moving and carrying table is provided with a table support frame 2 which is vertically fixed on an apparatus base 11.
Is rotatably supported in the horizontal plane. That is, the central shaft 3 is vertically fixed to the center of the rotary index table 1, and the central shaft 3 is rotatably supported by the table support frame 2 by a fixed bearing 4. FIG.
As shown in FIG. 1, a chip-shaped electronic component 10 such as a chip capacitor or a chip inductor as a DUT has a carrier portion 1 at a peripheral portion of an upper surface of a rotary index table 1.
It is mounted on a at equal intervals. Although illustration is omitted, in order to hold each chip-shaped electronic component 10 by suction so as not to cause positional displacement, the vacuum suction path has a carrier portion 1a.
It is formed corresponding to the mounting position of the chip-shaped electronic component.

The rotary index table 1 is fixedly supported at a predetermined height with respect to the apparatus base 11.
On the fixed base plate 12 located around the circumference of the measurement unit mounting base 1 having a planar shape in which a ring is partially cut out as shown in FIG.
3 is fixed, and the measuring unit 20 is fixed on the measuring unit mounting base 13. Here, as shown in FIG. 3, the measuring units 20 are fixedly arranged at 14 measuring stations among the stations corresponding to the stop positions of the rotary index table 1.

The structure of each measuring unit 20 is shown in FIG. In this figure, the measurement unit 20 includes a unit main body 21 fixed to the measurement unit mounting base 13,
A pair of open / close levers 22 attached to the unit main body 21 so as to rotate (swing) about the knife edge fulcrum P, and a pair of opposite open / close levers 22 attached to the lower ends of the pair of open / close levers 22, respectively. The contact 23 of an L-shaped thin metal plate, the compression spring 24 for urging the pair of opening / closing levers 22 in the direction in which the pair of contacts 23 are closed, and the facing distance when the pair of contacts 23 are closed are defined. It has a stopper adjusting screw 25 and a cam roller 26 pivotally attached to the upper end of each opening / closing lever 22.

The compression spring 24 is attached to a bracket 27 fixed to the unit main body 21 and presses the opening / closing lever 22 portion below the knife edge fulcrum P, and the stopper adjusting screw 25 is used for the bracket 2
7 is screwed to the tip of the opening / closing lever 22 above the knife edge fulcrum P. Lead wires are connected to the pair of contacts 23 via lead terminals 28, and are connected to a measuring device for measuring the electrical characteristics of the chip-shaped electronic component 10.

A pair of contacts 23 of the measuring unit 20.
The opening / closing operation is performed by the elevating cam member 30 having the cam surface 30a that narrows the interval between the cam rollers 26 when descending. When the elevating cam member 30 is not in contact with the cam roller 26, a pair of contactors is used. When the chip-shaped electronic component 10 is placed on the carrier portion 1a on the rotary index table 1 side in a closed state, both end surfaces of the chip-shaped electronic component 10 are sandwiched between the chip-shaped electronic component 10 and the chip-shaped electronic component 10. The contacts 23 come into contact with the external terminal electrodes at both ends of the contact 10.

When the elevating cam member 30 descends, the cam roller 26 is pushed by the cam surface 30a thereof, and the pair of open / close levers 22 rotate in the direction in which the interval between the pair of cam rollers 26 becomes narrower. The contactor 23 is opened and retracted to a position on the carrier portion 1a that is sufficiently distant from the chip-shaped electronic component 10.

The rotary index table 1
When the chip-shaped electronic component 10 is intermittently conveyed by the intermittent rotation, the pair of contacts 23 of the measurement unit 20 are in an open state so as not to hinder the movement of the chip-shaped electronic component 10 on the carrier portion 1a. It is necessary to have

Lifting cam members 30 for opening and closing the pair of contacts 23 of each measuring unit 20 are fixed to cam mounting lift plates 31, and the cam mounting lift plates 31 are perpendicular to the fixed base plate 12. It is fixed to a lift slider 32 which is slidably supported (up and down). As shown by the chain double-dashed line in FIG. 3, the cam attachment lift plate 31 has an arc shape along the outer edge of the rotary index table 1, and is vertically aligned by the linear slide guides 33 attached at four locations on the fixed base plate 12. It is slidably supported (up and down). Rollers 34 and 35 as cam followers are pivotally attached to the lower end of the elevating slider 32.

In FIG. 2, reference numeral 40 denotes a measuring unit driving servomotor (first servomotor), and the measuring unit driving servomotor 40 is installed and fixed on a motor mounting base 41 fixed on the apparatus base 11. Has been done. The rotary drive shaft 40a of the servomotor 40 for driving this measuring unit
Is connected via a joint 44 to a horizontal rotary shaft 43 that is rotatably supported by a fixed bearing 42 on the motor mount 41. A measuring unit driving cam member 45 is connected and fixed to the tip of the horizontal rotary shaft 43. A circumferential groove 46 is formed on the cam member 45. The cam surface 45a on the outer peripheral surface of the cam member 45 is in contact with the roller 34 as the cam follower, and the cam surface 4a on the inner surface of the groove 46 is formed.
The roller 35 is in contact with 5b. That is, the cam surfaces 45a of the cam member 45 by the rollers 34, 35,
The thickness between 45b is sandwiched, and the elevating slider 32 moves up and down with the rotation of the cam member 45, and thus the elevating cam member 30 can be moved up and down to open and close the contact 23 of the measurement unit 20. .

As shown in FIGS. 3 and 5, a rotary encoder 50 and a cam positioner 54 are provided as rotation angle detecting means for detecting the rotation angle of the rotary drive shaft 40a (horizontal rotary shaft 43) of the measuring unit driving servomotor 40.
Is provided. That is, the encoder 50 is installed and fixed on the motor mount 41 in parallel with the servo motor 40 for driving the measuring unit, and the input shaft 50a and the horizontal rotation shaft 43 of the encoder 50 are respectively provided with a belt wheel (pulley) 51, 52 is fixed, and a timing belt 53 is wound around both belt wheels 51 and 52. here,
The encoder 50 is the servomotor 40 for driving the measurement unit.
One pulse is output to the cam positioner 54 of the electric control system of FIG. 5 every time is rotated by a certain angle. For example, if the setting is such that one pulse is output each time, the encoder 50 can output 360 pulses each time the measuring unit driving servomotor 40 makes one rotation (360 degrees rotation). The cam positioner 54 is the encoder 50.
Reference position (at the position where the rotation angle is zero, for example, the lifting cam member 3
By counting the pulses from the position of the horizontal rotation shaft 43 when 0 reaches the lower limit), the rotation angle of the rotation drive shaft 40a, and thus the rotation position of the cam member 45 attached thereto can be detected. (Thus, the lifting cam member 3
You can also know the ascending / descending state of 0).

The servomotor 4 for driving the measuring unit
0 is normally continuously operated at a constant rotation speed, and as a result, the elevating cam member 30 that opens and closes the contactor 23 of each measurement unit 20 is periodically moved up and down (the contactor 23 is opened and closed periodically. Repeated).

A transport drive servomotor (second servomotor) 60 and a speed reducer 61 are installed and fixed to the table support frame 2 for intermittently rotating the rotary index table 1. That is, the rotary drive shaft 60a of the servomotor 60 for conveying drive and the speed reducer 61
Input shaft 61a is connected through a joint 62,
The output shaft 61b of the speed reducer 61 and the central shaft 3 on the rotary index table 1 side are connected via a joint 63. The horizontal shaft 3 and the output shaft 61b are rotary shafts oriented in a direction perpendicular to the horizontal plane. In order to detect that the rotary index table 1 has completed one desired intermittent rotation operation (so-called indexing operation, in this case, forward operation for one station), the speed reducer 61 is used.
Rotation detection plate 6 with a hole or groove fixed to the output shaft 61b of the
4 and the photo sensor 65 fixed to the table support frame 2.
A division confirmation sensor S1 is provided. The split confirmation sensor S1 is configured such that when the intermittent rotation of the index table 1 is completed, the photo sensor 6 is provided with a hole or groove in the rotation detection plate 64.
For example, the structure of 5 through which light passes is provided.

The transport driving servomotor 60 is in intermittent operation, and the timing of the intermittent operation of the measuring unit 20 is based on the rotation angle of the rotary drive shaft 40a of the continuously operating measuring unit driving servomotor 40. The period in which the contactor 23 is open is detected and performed. Details of the synchronous operation of the measuring unit driving servomotor 40 and the conveyance driving servomotor 60 will be described later.

As shown in FIG. 3, among the stations provided along the outer edge of the rotary index table 1 so as to correspond to the stop position of the rotary index table 1, the chip-shaped electronic component 10 as the object to be measured is shown in FIG.
A place for supplying onto the carrier portion 1a on the rotary index table 1 shown in is a supplying station, and the supplying unit 70 is arranged therein. The supply unit 70 is a so-called chip feeder, and has a function of arranging the chip-shaped electronic components 10 in one row, separating each of the electronic components 10 one by one, and supplying them onto the carrier portion 1a.

Further, as shown in FIG. 3, defective product discharge nozzles 81 are installed between the measuring stations in which the measuring unit 20 is arranged, or at defective product discharging stations located at the subsequent stage of the measuring station. The defective product discharge nozzle 81 blows out an air flow, and the chip-shaped electronic component 1 in which the measurement result of the electrical characteristics by the measurement unit 20 in the preceding stage of the defective product discharge nozzle 81 is determined to be defective.
0 is blown off from the carrier portion of the rotary index table 1 by an air flow and sent to a defective product discharge pipe (not shown).

The first and second non-defective product discharging stations for discharging the chip-shaped electronic component 10 that has passed all the measuring stations and is judged to have a good electric characteristic measurement result by each measuring unit 20 are first and second. Second non-defective product discharge nozzles 82 and 83 are installed, respectively. First and second
The non-defective product discharge nozzles 82, 83 blow off the chip-shaped electronic component 10 on the rotary index table 1 by an air flow and send it to a non-defective product discharge pipe only when a non-defective product arrives at the first and second non-defective product discharge stations.

A forced discharge nozzle 84 is installed at the forced discharge station subsequent to the second non-defective product discharge nozzle 83, and the chip-shaped electronic component 10 remaining on the rotary index table 1 is forcibly removed by an air flow. To do. In normal operation, the chip-shaped electronic component 10 should be discharged at the defective product discharge station or the non-defective product discharge station, and the chip-shaped electronic component 10 should not remain at the forced discharge station. However, if the chip-shaped electronic component 10 remains for some reason There is. A new supply unit 70 is provided with the chip-shaped electronic component 10 remaining on the rotary index table 1.
Since it is inconvenient to execute the supply operation of the chip-shaped electronic component 10 from above, the chip-shaped electronic component 10 is removed by the forced discharge nozzle 84 of the forced discharge station.

In the block diagram showing the electric control system of FIG. 5, a servo motor control section 90 is provided for controlling the operation and stop of the measuring unit driving servo motor 40 and the conveyance driving servo motor 60, and the measurement is performed. Unit 2
Cam positioner 54 showing the open / closed state of the contact 23 of 0
Output signal of the servo motor controller 90 from the cam positioner 54, for example, a timing signal indicating that the contact 23 of the measuring unit 20 is in the open state or the closed state.
Is being added to. Further, the detection signal of the division confirmation sensor S1 for detecting the completion of one intermittent rotation operation of the rotary index table 1 by the conveyance driving servomotor 60, that is, the indexing operation, and the elevating cam member 30 indicating the descending position. The detection signal of the open confirmation sensor S2 for detecting that the contact state has been reached (that is, the open state of the contact 23) is added to the servo motor control unit 90.

Servo motor 40 for driving the measuring unit
The synchronous operation of the conveyance drive servomotor 60 based on the rotation angle of is described below with reference to the time chart of FIG.

As shown in FIG. 6A, the elevating cam member 30 for opening and closing the pair of contacts 23 of each measuring unit 20 when the measuring unit driving servomotor 40 rotates at a constant speed is used for a period of time. Descent state at T1 (contact 2
3 open), rising operation from the lowered position in period T2, period T
3, the ascending state (contact 23 closed), the descending operation from the ascending position is performed in the period T4, and then the periods T1 to T4 are repeated. In the period T3, the pair of contacts 23 are closed and are in contact with the external terminal electrodes at both ends of the chip-shaped electronic component 10 on the carrier portion 1a as shown in FIG. 4, and the measurement shown by the hatched portion in FIG. In the period T5, required electrical characteristics measurement (capacitance, inductance, electric resistance, withstand voltage measurement, etc.) is executed by a measuring device connected between the pair of contacts 23.

The cam positioner 54 receives the pulse output of the rotary encoder 50 which is interlocked with the rotary drive shaft 40a of the servomotor 40 for driving the measuring unit when the elevating cam member 30 is in the descending or ascending state (that is, the opening / closing state of the contact 23). Both the timing signal of the cam positioner 54 that indicates that the contactor 23 is in the open state and the detection signal that indicates that the lift cam member 30 of the opening confirmation sensor S2 is actually in the lowered position. When the servo motor control unit 90 receives this, the rotation of the conveyance driving servo motor 60 is started, and the indexing operation of the rotary index table 1 in the period T6 of FIG. 6B is executed. When the rotary index table 1 completes a rotation operation of a predetermined angle (advance operation for one station) and the elevating cam member 30 continues to descend during the period T1, the division confirmation sensor S1 outputs a detection signal indicating completion of indexing. When issued to the control unit 90, the servo motor control unit 9
0 stops the servomotor 60 for carrying drive, and FIG.
The conveyance drive servomotor 60 continues to be stopped for the rest period T7. Then, after the required electrical characteristic measurement is performed during the measurement period T5 indicated by the shaded area in FIG. 6A while the rotary index table 1 is stopped, the timing signal indicating the contact release of the cam positioner 54 is again provided. And the detection signal indicating that the lifting cam member 30 of the opening confirmation sensor S2 is in the lowered position are both the servo motor control unit 9
When applied to 0, the conveyance driving servomotor 60 starts to rotate.

As shown in FIG. 6, in a normal condition, the servomotor 40 for driving the measuring unit is continuously operated, and the rotation angle of the rotary drive shaft 40a is detected to open the contact 23 of the measuring unit 20 at a constant level. It is possible to intermittently operate the conveyance drive servomotor 60 in synchronization with the timing of.

Incidentally, when the indexing operation of the rotary index table 1 cannot be completed within the period T1 showing the lowered state (contact 23 opened) of the elevating cam member 30 of FIG. 6A, that is, within the period T1. Confirmation sensor S1
If the detection signal for the division confirmation is not obtained (when it is detected that the indexing is not completed), the servo motor control unit 90 immediately stops both the measurement unit driving servo motor 40 and the conveyance driving servo motor 60. To do. Further, even when the lowering of the lift cam member 30 cannot be detected by the opening confirmation sensor S2, the servo motor control unit 90 immediately stops both the measurement unit driving servo motor 40 and the conveyance driving servo motor 60. By these,
Damage to the device (eg contacts 23 of the measuring unit 20,
Carrier part 1a of rotary index table 1
Etc.) and damage to the chip-shaped electronic component 10 are prevented in advance.

Next, the overall operation of this embodiment will be described.

Of the stations installed along the outer edge of the rotary index table 1, in the supply station, the chip-shaped electronic component 10 as the object to be measured is transferred from the supply unit 70 onto the carrier portion 1a of the rotary index table 1. With the intermittent rotation of the rotary index table 1, the station sequentially advances every station. The chip-shaped electronic component 10 that has reached the measurement station is sandwiched by the pair of contactors 23 when the pair of contactors 23 of the measurement unit 20 is closed, and contacts the external terminal electrodes at both ends of the chip-shaped electronic component 10. Child 2
The required electrical characteristics are measured by contacting each of the three. Measuring units 20 of different measuring stations
Then, measurement is performed on different electrical characteristics. Then, the chip-shaped electronic component 10 determined to have any of the electrical characteristics is defective is rotated by the defective product discharge nozzles 81 of the defective product discharge stations at a plurality of locations before reaching the first and second non-defective product discharge stations. It is excluded from the index table 1. The remaining chip-shaped electronic components 10 that are not rejected and are determined to be non-defective products are the non-defective product discharge pipes from the rotary index table 1 by the first and second non-defective product discharge nozzles 82 and 83 of the first and second non-defective product discharge stations. Send to.

According to this embodiment, the following effects can be obtained.

(1) Servo motor 4 for driving the measuring unit
0 indicates continuous rotation at a constant speed, and this rotary drive shaft 40a
23 of the measuring unit 20 based on the rotation angle of the
Servo motor 60 for transport drive at the timing when the
Are synchronized with each other and intermittently rotated, and in a normal operating state, there is no time during which the measuring unit driving servomotor 40 is stopped, no time is wasted, and the measurement processing can be speeded up.

(2) Rotary index table 1
The servo motor used for driving the measuring unit 20 and the measuring unit 20 generally has few failures, has a longer life than solenoids, and is easy to maintain.

(3) Rotary index table 1
When the operation of the lifting and lowering cam member 30 or the like is hindered, both the measuring unit driving servomotor 40 and the conveyance driving servomotor 60 can be instantaneously stopped, and the contact 23 of the measuring unit 20 can be stopped. It is possible to prevent the carrier portion 1a of the rotary index table 1, the chip-shaped electronic component 10 and the like from being damaged.

(4) Servo motor 4 for driving the measuring unit
Since two independent servo motors of 0 and the conveyance driving servo motor 60 are used, flexible time allocation is possible and the miniaturization of the entire apparatus can be achieved by adopting a small servo motor.

In the above embodiment, even when the supply of the chip-shaped electronic component 10 cannot be completed within the supply period assigned to the supply unit 70, the measurement unit driving servomotor 40 and the conveyance driving servomotor 60 are instantaneously operated. It can be configured to execute the stop.

Further, the structure of the measuring unit 20 can be appropriately changed, and a structure in which one of the contacts is fixed and only one side is movable, a structure in which a plurality of pairs of contacts are opened and closed, and the like can be adopted.

Further, the rotation angle detection of the rotation drive shaft 40a of the servomotor 40 for driving the measuring unit is detected by the rotation angle detection means comprising a combination of the encoder 50 and the cam positioner 54 for counting the output pulses of the encoder 50. However, it is also possible to adopt other angle detection means.

Although the embodiment of the present invention has been described above, it is obvious to those skilled in the art that the present invention is not limited to this and various modifications and changes can be made within the scope of the claims. Ah

[0048]

As described above, according to the present invention,
The first servomotor is used to drive the measurement unit that measures the characteristics of the electronic component with the contactor that contacts the terminal electrode of the electronic component that is the object to be measured, and the electronic component is intermittently placed at the measurement position of the measurement unit. A second servomotor is used to drive the intermittent transfer table for carrying,
The period in which the contact of the measuring unit is separated from the terminal electrode of the electronic component is detected from the rotation angle of the first servo motor, and the intermittent movement conveyance table is fixed by the second servo motor within the period. Since it is configured to move by a large amount, it is possible to realize a method and apparatus for measuring characteristics of an electronic component, in which measurement of the electronic component is speeded up, maintainability and operation reliability are improved.

[Brief description of drawings]

FIG. 1 is a front sectional view showing a rotary index table and a mechanical portion around the rotary index table, which is an embodiment of a method and apparatus for measuring characteristics of an electronic component according to the present invention.

FIG. 2 is a front cross-sectional view showing a mechanical portion for opening / closing driving a contact of the measurement unit.

FIG. 3 is a plan view of the embodiment.

FIG. 4 is an enlarged cross-sectional view of a measurement unit portion in the embodiment.

FIG. 5 is a block diagram showing an electric system in the embodiment.

FIG. 6 is a time chart for explaining the operation of the embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 rotary index table 1a carrier part 2 table support frame 3 center axis 4,42 bearing 10 chip-shaped electronic parts 11 device base 12 fixed base plate 13 measurement unit mounting base 20 measurement unit 21 unit body 22 opening / closing lever 23 contactor 24 compression Spring 25 Adjusting screw for stopper 26 Cam roller 27 Bracket 28 Lead terminal 30 Elevating cam member 30a, 45a, 45b Cam surface 31 Cam mounting elevating plate 32 Elevating slider 33 Linear slide guide 34, 35 Roller 40 Measuring unit driving servo motor 40a Rotational drive Shaft 41 Motor mount 43 Horizontal rotation shaft 44, 62, 63 Joint 45 Cam member 46 Recessed groove 50 Encoder 51, 52 Belt wheel 53 Timing belt 54 Cam positioner 60 Transport drive Bomota 60a rotary drive shaft 61 reduction gear 70 supply unit 81 defective discharge nozzle 82, 83 non-defective discharge nozzle 84 forcibly discharge nozzle 90 servo motor control portion S1 partition confirmation sensor S2 opens confirmation sensor

Claims (4)

[Claims] 1. A first servomotor is used to drive a measuring unit for measuring characteristics of an electronic component by a contactor which contacts a terminal electrode of the electronic component as a DUT, and a measuring position of the measuring unit. A second servomotor is used to drive the intermittently moving and transporting table for intermittently transporting the electronic component, and the contact of the measuring unit is separated from the terminal electrode of the electronic component from the rotation angle of the first servomotor. A method for measuring characteristics of an electronic component, characterized in that a period during which the table is present is detected, and the intermittently moving and transporting table is moved by a predetermined amount by the second servo motor within the period. 2. The first servomotor is continuously rotated at normal times, and when the movement of the constant amount of the intermittent movement conveyance table by the second servomotor cannot be completed within the period, the first and The method for measuring characteristics of an electronic component according to claim 1, wherein the rotation of the second servomotor is stopped. 3. An electronic component having an intermittent movement conveyance table for intermittently conveying an electronic component, which is an object to be measured, and a contactor for contacting a terminal electrode of the electronic component intermittently conveyed by the intermittent movement conveyance table. A measuring unit for performing characteristic measurement, a first servo motor for opening and closing the contact, a second servo motor for driving the intermittent transfer table, and a rotation angle of the first servo motor. Rotation angle detection means for detecting the rotation angle detection means, and the detection output of the rotation angle detection means indicates that the contact is separated from the terminal electrode of the electronic component, and the second servomotor causes the An apparatus for measuring characteristics of electronic parts, characterized by driving an intermittently moving and carrying table. 4. A confirmation sensor for detecting a fixed amount of movement for each intermittent conveyance of the intermittent movement conveyance table is provided, and the first servomotor is continuously rotated during normal operation, but the intermittent movement conveyance is performed within the period. 4. The electronic component characteristic measuring device according to claim 3, wherein the rotation of the first and second servomotors is stopped when the confirmation sensor detects that the movement of the table by the predetermined amount is not completed.