JP2009270858A - Device and method for measuring workpiece characteristic - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To secure sufficient electric contact between a probe and an electrode of a workpiece, and to suppress a flaw generated on the electrode of the workpiece to be small. <P>SOLUTION: This device 1 for measuring workpiece characteristic is equipped with a conveyance table 3 having a workpiece storage hole 4, a pair of probes 7, 6 capable of abutting on electrodes Wa, Wb of the workpiece W stored in the workpiece storage hole 4, a conveyance body driving device 3a of the conveyance table 3, and a probe driving mechanism 12 for driving one probe 7. The conveyance body driving device 3a and the probe driving mechanism 12 are controlled by a control device 20. In this case, when the workpiece storage hole 4 comes to the first setting position S1 in front of the pair of probes 7, 6, at least one probe 7 is advanced toward the workpiece storage hole 4 by the probe driving mechanism 12, and when the workpiece storage hole 4 comes to the second setting position S2 corresponding to the pair of probes 7, 6, one probe 7 is retreated from the workpiece storage hole 4. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a workpiece characteristic measuring apparatus and workpiece characteristic measuring method for measuring electrical characteristics of a workpiece such as an electronic component, and more particularly to the size of a streak generated on a workpiece electrode by sliding between the workpiece electrode and a probe. The present invention relates to a workpiece characteristic measuring apparatus and a workpiece characteristic measuring method that can be controlled and can improve measurement accuracy.

  2. Description of the Related Art Conventionally, as a workpiece characteristic measuring device for measuring a workpiece while conveying it, a workpiece table having a workpiece storage hole for storing a workpiece and a pair of probes that come into contact with workpiece electrodes and measuring the workpiece characteristics is available. Are known. In such a workpiece characteristic measuring apparatus, the measurement is performed by bringing the tip of the probe into contact with the workpiece electrode while the rotation of the transfer table is stopped. Problems occur.

  That is, the first problem is that an oxide film is present on the electrode surface, which increases the contact resistance when the tip of the probe is brought into contact with the electrode. It is impossible. In order to solve the first problem, the second problem is that when the probe is sufficiently pressed and brought into contact with the electrode, the metal film on the electrode surface is peeled off from the probe tip after the measurement. It is to adhere. As a result, the electrical resistance at the tip of the probe increases, and correct measurement cannot be performed thereafter.

  As a method for preventing these problems, the tip of the probe is brought into contact with the electrode and slid while the transport table is rotated during measurement. As a result, the oxide film on the electrode surface is scraped to reduce the contact resistance, and the tip of the probe is polished and cleaned to prevent an increase in electrical resistance. However, when this measurement method is used, the electrode may be scratched due to sliding with the probe, resulting in defective scratches on the electrode, or the processing speed may be reduced depending on the cleaning time.

  In order to suppress the streak generated on the workpiece electrode, it is only necessary to reduce the applied pressure when the probe slides on the electrode surface. In this case, the function of removing the oxide film on the workpiece electrode surface or the probe The function of polishing the tip of the steel deteriorates.

  Thus, in order to achieve both improvement of the measurement characteristics of the workpiece and improvement of the quality of the workpiece after measurement, it is necessary to set mutually contradictory conditions, and this setting is difficult. Furthermore, the hardness of the electrode varies depending on the type of workpiece, and the size of the streak generated on the electrode is controlled by controlling the contact load and sliding time when the probe is slid on the electrode surface. There has been a demand for an apparatus for measuring workpiece characteristics.

  The present invention has been made in consideration of such points, and is capable of controlling the size of the streak generated in the electrode of the workpiece and improving the measurement accuracy and the workpiece characteristics. An object is to provide a measurement method.

  The present invention is a transport body having a plurality of work storage holes penetrating therethrough, and a transport body in which a work having a pair of electrodes facing outward in the penetration direction of the work storage holes is stored in each work storage hole, A transport body driving device for driving the transport body, a pair of probes provided on both sides of the transport body, each of which can contact a work electrode housed in the work housing hole, and at least one probe as the work housing hole A probe driving mechanism that moves forward and backward, and a control device that controls the carrier driving device and the probe driving mechanism so that the pair of probes are brought into contact with the electrodes of the corresponding workpiece while sliding. It is a workpiece characteristic measuring device.

  According to the present invention, when the workpiece storage hole comes to the first set position before the pair of probes, the control device controls the probe driving mechanism to advance one probe toward the workpiece storage hole. When the second set position corresponding to the pair of probes is reached, the probe drive mechanism is controlled to retract one of the probes from the workpiece storage hole.

  The present invention is the workpiece characteristic measuring apparatus, wherein the carrier is made of a disk.

  The present invention is the workpiece characteristic measuring apparatus, wherein the transport body is formed of a band-shaped body.

  The present invention is the workpiece characteristic measuring apparatus, wherein the transport body driving device has a servo motor having a rotation angle detecting function.

  The present invention is the workpiece characteristic measuring apparatus, wherein the carrier driving device includes a pulse motor.

  The present invention is the workpiece characteristic measuring apparatus, wherein the pulse motor of the transport body driving device has a rotation angle detection function.

  The present invention is the workpiece characteristic measuring apparatus, wherein the probe driving mechanism includes a pressing pin and a pressing pin driving mechanism for driving the pressing pin.

  The present invention is the workpiece characteristic measuring apparatus, wherein one of the probes is located between the pressure pin and the transport body.

  The present invention is a workpiece characteristic measuring apparatus in which an elastic body is provided between a pressure pin and a pressure pin drive mechanism.

  The present invention is the workpiece characteristic measuring apparatus, characterized in that the rigidity of the elastic body can be changed.

  The present invention is the workpiece characteristic measuring apparatus, wherein the elastic body has a spring.

  The present invention is the workpiece characteristic measuring apparatus, wherein the pressure pin driving mechanism is composed of a servo motor having a rotation angle detecting function.

  The present invention is the workpiece characteristic measuring apparatus, wherein the pressure pin driving mechanism has a pulse motor.

  The present invention is the workpiece characteristic measuring apparatus, wherein the pressure pin driving mechanism is composed of a pulse motor having a rotation angle detecting function.

  The present invention is the workpiece characteristic measuring device, wherein the control device controls the transport body driving device to stop the transport body when the work storage hole comes to the second set position.

  The present invention relates to a workpiece property measuring method using the workpiece property measuring apparatus described above, wherein the workpiece is stored in the workpiece storage hole of the transport body, and the transport body driving device is controlled by the control device to drive the transport body. And controlling the probe driving mechanism by the control device to advance one probe toward the workpiece housing hole, bringing the pair of probes into contact with the corresponding electrodes of the workpiece, and measuring the characteristics of the workpiece And a workpiece characteristic measuring method.

  According to the present invention, when the workpiece storage hole comes to the first set position before the pair of probes, the control device controls the probe driving mechanism to advance one probe toward the workpiece storage hole. When the second set position corresponding to the pair of probes is reached, the probe drive mechanism is controlled to retract one of the probes from the workpiece storage hole.

  The present invention is the workpiece specifying measurement method, wherein the probe driving mechanism pressurizes one of the probes via an elastic body.

  The present invention is the workpiece characteristic measuring method, wherein the probe driving mechanism pressurizes one probe by changing at least one of the deformation amount of the elastic body and the rigidity of the elastic body.

  According to the present invention, the first set position and the second set position are variable, and thereby, the sliding length between the pair of electrodes of the work and the corresponding probe is determined. This is a measurement method.

  According to the present invention, the contact load and sliding time between the probe and the workpiece electrode can be arbitrarily controlled. For this reason, the oxide film on the electrode surface of the workpiece can be optimally removed, and sufficient electrical contact between the probe and the electrode of the workpiece can be ensured. Further, it is possible to reduce scratches generated on the workpiece electrode due to sliding between the probe and the workpiece, and to extremely reduce oxide film residue on the workpiece electrode caused by contact with the probe.

First Embodiment Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.

  1 to 5 and 7 are views showing a first embodiment of a workpiece characteristic measuring apparatus according to the present invention.

  As shown in FIGS. 1 to 5, the workpiece characteristic measuring apparatus 1 includes a vertically disposed base 2, a base 2 that is rotatably provided, and a plurality of work storage holes 4 that penetrate therethrough and is vertical. A conveyance table (conveyance body) 3 disposed on the substrate 3 and a conveyance body driving device 3 a that rotationally drives the conveyance table 3 and includes a first servomotor 24.

  Among these, the work storage hole 4 of the transfer table 3 stores a work W such as an electronic component having a pair of electrodes Wa and Wb facing outward in the penetration direction of the work storage hole 4.

  A pair of probes 7 and 6 that can contact the pair of electrodes Wa and Wb of the workpiece W housed in the workpiece housing hole 4 are provided on both sides of the transfer table 3, respectively. , 6, one probe 7 is the first detection probe 7, and the other probe 6 is the base probe 6.

  Further, the first measurement probe 7 is advanced toward the workpiece storage hole 4 by the probe driving mechanism 12 </ b> A and is retracted from the workpiece storage hole 4. In this case, the probe driving mechanism 12 </ b> A slides in the sleeve 10 and presses the first measuring probe 7 toward the workpiece storage hole 4 and drives the pressing pin 8 via the spring 11. And a pressure pin drive mechanism 12 including a second servomotor 26. The first servo motor 24 and the second servo motor 26 are each connected to the control device 20, and the first servo motor 24 and the second servo motor 26 are controlled by the control device 20, respectively.

  In this case, the control device 20 controls the first servo motor 24 and the second servo motor 26 so that the pair of probes 7 and 6 are brought into contact with the electrodes Wa and Wb of the corresponding workpiece W while sliding. It has become.

  By the way, as described above, the work table 3 is provided with a plurality of work storage holes 4 concentrically penetrating the work table 3. The workpieces W stored in the workpiece storage holes 4 have a rectangular parallelepiped shape and are individually stored horizontally. The electrodes Wa and Wb of the workpiece W are formed on two opposing surfaces at both ends in the longitudinal direction of the workpiece W, and the electrodes Wa and Wb are exposed outward from both sides in the thickness direction (penetration direction) of the transfer table 3. ing. As described above, the transfer table 3 is intermittently rotated clockwise (in the direction of the arrow A in FIG. 1) by the first servo motor 24 when viewed from the opposite side to the base 2 of the transfer table 3. Transport.

  A suction hole 5 communicating with a vacuum source (not shown) is provided in a portion of the work storage hole 4 adjacent to the base 2, and when the work W is transferred, the rotation direction of the transfer table 3 is reversed from the vacuum source (see FIG. By sucking the work W in the direction of arrow B in FIG. 1, the work W is attracted and fixed to the wall surface of the suction hole 5. As a result, the end surface on the base 2 side of the electrode Wb of the workpiece W is transported substantially flush with the surface of the transport table 3 on the base 2 side.

  The base probe 6 is provided so as to penetrate the base 2, and the first measurement probe 7 is provided so as to face the base probe 6. The base probe 6 and the base 2 are insulated by an insulating layer 6a, and the surface of the base probe 6 on the transport table 3 side is substantially flush with the surface of the base 2 on the transport table 3 side. The first measurement probe 7 is supported by a probe holder 9 and is elastically deformed by external pressure, such as a flexible printed circuit (FPC) or a leaf spring, and comes into contact with the electrode Wb of the workpiece W. Made of materials that can be used.

  Further, the pressure pin 8 of the probe drive mechanism 12A is provided on the opposite side of the transport table 3 via the first inspection probe 7. The pressure pin 8 is stored in the sleeve 10 as described above, and one end of the spring 11 is fixed to the end of the pressure pin 8 in the sleeve 10. The other end of the spring 11 is fixed to a pressure pin driving mechanism 12 integrated with the sleeve 10. In this case, the spring 11 urges the pressure pin 8 in a direction in which the pressure pin 8 is separated from the first inspection probe 7. The pressure pin drive mechanism 12 has a second servo motor 26, and has a structure in which the rotation of the second servo motor 26 is converted into a linear motion by a ball screw, a screw mechanism or a link mechanism. Then, the linear motion of the pressure pin drive mechanism 12 is transmitted to the pressure pin 8 via the spring 11, whereby the pressure pin 8 approaches the first measurement probe 7 (the direction of arrow C in FIG. 1). ) And a direction away from the first inspection probe 7 (direction of arrow D in FIG. 1).

  An example of a link mechanism using a cylindrical cam is shown in FIG. 8, parts having the same functions as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted. One end of the spring 11 c is connected to the sleeve 10, and the other end is connected to the fixed support base 16. The pressure pin driving mechanism 12b integrated with the sleeve 10 is urged in a direction in which it abuts on the cylindrical cam 14 by a spring 11c. The portion where the pressure pin drive mechanism 12b contacts the cylindrical cam 14 is finished to a spherical surface having high rigidity. The cylindrical cam 14 is rotated around the central shaft 15 by the rotation of the second servo motor 26, and the rotational movement (arrow E in FIG. 8) is linearly moved to the pressurizing pin drive mechanism 12b contacting the cylindrical cam 14 ( It is transmitted as an arrow F) in FIG. This linear motion is transmitted to the pressure pin 8 via the spring 11b (arrow G in FIG. 8).

  When measuring the characteristics of the workpiece W, in FIG. 1, the base probe 6 comes into contact with the electrode Wb of the workpiece W, and the pressure pin 8 moves in a direction approaching the first measurement probe 7. When the pressure pin 8 comes into contact with the first measurement probe 7, the first measurement probe 7 pushed by the pressure pin 8 is elastically deformed and moves to the workpiece W side, and the electrode Wa of the workpiece W is moved. Abut. As a result, the workpiece W is sandwiched between the base probe 6 and the first measurement probe 7, and measurement relating to the electrical characteristics of the workpiece W is performed by a measuring device (not shown).

  When the measurement related to the electrical characteristics of the workpiece W is completed, the pressure pin 8 moves in a direction away from the first measurement probe 7, and the first measurement probe 7 is restored by elasticity to move from the electrode Wa of the workpiece W. Separate. In this case, since the length of the workpiece W in the longitudinal direction is slightly larger than the depth T of the workpiece storage hole 4, when the workpiece W is at the position shown in FIG. It protrudes slightly toward the first inspection probe 7 side from the surface on the inspection probe 7 side.

  At this time, in FIG. 1, the first measurement probe 7 is slightly separated from the end face of the electrode Wa of the workpiece W. However, this is not an essential condition, and the first measurement probe 7 is the electrode Wa of the workpiece W. Even if the first measuring probe 7 is not in pressure contact with the electrode Wa of the workpiece W by the pressure pin 8, it may suffice. That is, if the first measurement probe 7 is not in pressure contact with the electrode Wa of the workpiece W, no pressure is applied to the electrode Wa of the workpiece W, and the first detection probe 7 is rotated even if the transfer table 3 rotates. The measuring probe 7 does not slide on the electrode Wa of the workpiece W, and no streak due to sliding occurs on the electrode Wa. For the same reason, the pressure pin 8 is slightly separated from the first measurement probe 7 in FIG. 1, but this is also not a necessary condition, and the pressure pin 8 is connected to the first measurement probe 7. Even if they are in contact with each other, it is sufficient that the first measurement probe 7 is not in pressure contact with the electrode Wa of the workpiece W by the pressure pin 8.

  Next, the operation of the present embodiment having such a configuration will be described with reference to FIGS. 2 (a)-(d) and FIGS. 3 (e)-(g).

  Here, FIG. 2A shows a state in which the workpiece W is being transported, which is measured next in the workpiece property measuring apparatus 1. First, as shown in FIG. 2A, the transfer table 3 is rotated clockwise to transfer the workpiece W when viewed from the side opposite to the base 2 by the transfer body driving device 3a controlled by the control device 20. . At this time, the work W is sucked from the suction hole 5, and the work W is attracted to the side of the base 2 and the side wall surface of the suction hole 5 of the work storage hole 4.

  In FIG. 2A, X is a standby position of the pressure pin 8, and the pressure pin 8 when measurement is not performed is stopped at the X position. Y moves the pressing pin 8 in the direction approaching the first measuring probe 7 in FIG. 2A to bring the first measuring probe 7 into sufficient pressure contact with the electrode Wa of the workpiece W. And is substantially flush with the end surface of the electrode Wa of the workpiece W.

  In FIG. 2A, S1 indicates a first set position corresponding to the timing at which the pressure pin 8 starts moving from the standby position X in the direction approaching the first detection probe 7. The set position S1 is provided for giving an instruction to the second servo motor 26 for controlling the movement and stop of the pressure pin 8. Here, when the substantially midpoint of the short side of the workpiece W passes the first set position S1 due to the rotation of the transfer table 3, the pressure pin 8 is moved by the pressure pin drive mechanism 12 controlled by the control device 20. The movement starts from the standby position X in a direction approaching the first inspection probe 7.

  Next, as shown in FIG. 2B, the substantially midpoint of the short side of the workpiece W passes through the first set position S1. The pressure pin 8 starts moving from the standby position X in a direction approaching the first measurement probe 7, and has reached the position of the first measurement probe 7 at this point. Thereafter, the first measurement probe 7 is pushed toward the transfer table 3 by the pressure pin 8, and the first measurement probe 7 comes into contact with the electrode Wa of the workpiece W while being elastically deformed.

  Next, as shown in FIG. 2C, the first inspection probe 7 is sufficiently in pressure contact with the electrode Wa of the workpiece W. Since the transfer table 3 is rotating in this state, the first inspection probe 7 slides with respect to the electrode Wa of the workpiece W. However, since the rotation of the transfer table 3 stops immediately after this, the sliding time is extremely short.

  Thereafter, when the substantially midpoint of the short side of the workpiece W comes to the second set position S2 corresponding to the pair of probes 7 and 6, the rotation of the transfer table 3 stops (FIG. 2 (d)). In this state, the workpiece W is sandwiched between the base probe 6 and the first measurement probe 7, and measurement of the electrical characteristics of the workpiece W is performed by a measurement device (not shown).

  In this way, the measurement relating to the electrical characteristics of the workpiece W is completed (FIG. 3 (e)). Thereafter, the pressure pin 8 starts moving in a direction away from the first inspection probe 7. Along with this, the first measurement probe 7 that has been pushed to the electrode Wa side of the workpiece W by the pressure pin 8 is restored by elasticity and separated from the electrode Wa of the workpiece W. When the pressure pin 8 is separated from the first measurement probe 7, the first measurement probe 7 is surely separated from the electrode Wa of the workpiece W. Z indicates a position corresponding to the timing at which the transport table 3 starts to rotate, and this position Z is provided to instruct the first servomotor 24 to move the transport table 3. Here, when the tip of the pressure pin 8 moves in the direction away from the first measurement probe 7 and crosses the position Z, the transfer table 3 starts to rotate (FIG. 3 (f)). )).

  The workpiece W that has been measured is conveyed to the next process by the rotation of the conveyance table 3, and the workpiece W to be measured next is conveyed to the position of the pair of probes 7 and 6 along with the rotation of the conveyance table 3. come.

  FIG. 3 (f) shows a state after the tip of the pressure pin 8 has crossed the position Z. The conveyance table 3 starts rotating and conveys the workpiece W to the next process. At this time, since the first measurement probe 7 is separated from the electrode Wa of the workpiece W, the first measurement probe 7 does not slide with respect to the electrode Wa of the workpiece W.

  The pressure pin 8 continues to move, reaches the standby position X, and stops. This state is shown in FIG. Thereafter, the workpiece W for which the measurement relating to the electrical characteristics has been completed is conveyed to the next process by the rotation of the conveyance table 3, and the workpiece W to be measured next is conveyed to the positions of the pair of probes 7 and 6 by the rotation of the conveyance table 3. Come. And it will be in the state of Fig.2 (a) and the above-mentioned operation | movement will be repeated.

  By the way, when measuring the characteristics of a workpiece by bringing the inspection probe into contact with the electrode of the target workpiece, as described in the prior art, an attempt is made to remove the oxide film on the electrode surface of the workpiece with an appropriate contact load or sliding (scratching). If this happens, the electrode may have a large scratch that does not become a product, or the electrode residue generated by the sliding may adhere to the measurement probe, causing the electrical resistance to increase or become unstable. It was.

  On the other hand, according to the present invention, by appropriately selecting the contact load and sliding (scratching) length, as shown in FIG. 7, the measurement probe 7 is attached to the electrode Wa having the electrode base material 30. When contacted, a kind of plastic deformation occurs, and even if the oxide film 31 formed on the surface of the electrode base material 30 is removed, no residue is formed, and the sliding direction of the probe (opposite to the moving direction of the workpiece). In the direction) gathered as the accumulation unit 33. That is, in the present invention, since the measurement probe 7 is brought into contact with the oxide film removing portion 32 shown in FIG. 7, the contact resistance is reduced and stabilized, and the electrode residue attached to the measurement probe 7 side is further stabilized. Is very unlikely to adhere to the electrode Wa again.

  By the way, in the present embodiment, the contact depends on the type of the electrode Wa of the workpiece W, the thickness of the oxide film 31, the current value depending on the size and type of the workpiece W, and the hardness and surface roughness of the measurement probe 7. The load and sliding (scratching) length can be changed depending on the situation.

  In the present embodiment, (1) the contact load between the inspection probe 7 and the electrode Wa of the workpiece W is made variable, and (2) the sliding (friction) length between the inspection probe 7 and the electrode Wa of the workpiece W is changed. And is slid by pressing before measurement.

  Next, referring to FIG. 4, the control method by the control device 20, that is, the first servo motor 24 of the transport body driving device 3 a and the second servo motor 26 of the pressure pin driving mechanism 12 are controlled to rotate the transport table 3. In addition, the control method of pressing the first measurement probe 7 with the pressure pin 8 will be described in further detail.

  Here, FIG. 4 is a diagram showing a block diagram of a servo motor in the workpiece characteristic measuring apparatus. In FIG. 4, the MPU 21 includes a microprocessor and peripheral circuits, and operates by software. The pulse oscillator controller 22 controls the positioning of the servo motor via a driver by sending / receiving data to / from the MPU 21. Among these, the MPU 21 and the pulse oscillator controller 22 constitute a control device 20.

  Two sets of servo motors and drivers are installed. The first servo motor 24 is provided in the transport body driving device 3 a that rotates the transport table 3, and sends and receives data to and from the pulse oscillator controller 22 by the first driver 23. The second servo motor 26 is provided in the pressure pin driving mechanism 12 that moves the pressure pin 8, and data is transmitted to and received from the pulse oscillator controller 22 by the second driver 25.

  The first servo motor 24 and the second servo motor 26 incorporate a first encoder and a second encoder that generate an encoder signal 1 and an encoder signal 2 indicating the rotation angles of the respective motors. The MPU 21 transmits a command signal 1 and a command signal 2 for controlling the rotation of the first servo motor 24 and the second servo motor 26 to the pulse oscillator controller 22. The pulse oscillator controller 22 receives the command signal 1, and also receives the encoder signal 1, the operation completion signal 1, the alarm 1, etc. of the first servo motor 24 via the first driver 23, and the second servo motor. 26 encoder signals 2, operation completion signals 2, alarms 2 and the like are received via the second driver 25.

  The pulse oscillator controller 22 monitors these signals, sends a command pulse signal 1 for controlling the rotation of the first servo motor 24 to the first driver 23, and commands for controlling the rotation of the second servo motor 26. The pulse signal 2 is transmitted to the second driver 25. The first driver 23 controls the rotational speed of the first servo motor 24 based on the command pulse signal 1. Similarly, the second driver 25 controls the rotation speed of the second servo motor 26 based on the command pulse signal 2.

  Here, a control method for moving the pressure pin 8 in the direction approaching the first inspection probe 7 with reference to the current position of the transport table 3 will be described below. The conveyance table 3 repeats the operation of rotating when conveying the workpiece W and stopping when measuring the characteristics of the workpiece W. On the other hand, the pressure pin 8 is separated from the first measurement probe 7 when the workpiece W is conveyed, and the first measurement probe 7 is in pressure contact with the electrode Wa of the workpiece W when measuring the characteristics of the workpiece W. Repeat the action.

  This is shown in FIG. FIG. 5 is a time chart showing the state of each part with time on the horizontal axis. In the upper part of FIG. 5, the correspondence between each time and FIGS. 2 (a) to 3 (g) is shown.

As shown in FIG. 5, until time t ₁ rotates the conveying table 3, the pressure pin 8 is stopped at the standby position (X in FIG. 2). The stop position of the transfer table 3 is determined in advance so that the workpiece W in the workpiece storage hole 4 is sandwiched between the base probe 6 and the first measurement probe 7 and measurement is performed. The time indicated by _{t 3} in FIG.

That, MPU 21, as the rotational speed of the first servo motor 24 at this time t ₃ becomes 0, in advance transmits a command signal 1 to the pulse oscillator controller 22. The pulse oscillator controller 22 uses the command signal 1 as a reference and the encoder signal 1 received from the first encoder built in the first servomotor 24 (the current rotation angle of the first servomotor 24, that is, the position of the workpiece housing hole 4). The command pulse signal 1 for controlling the rotation of the first servo motor 24 is transmitted to the first driver 23. The second encoder built in the second servo motor 26 transmits the encoder signal 2 indicating the current position of the pressure pin 8 to the pulse oscillator controller 22 via the second driver 25.

Here, for the second servo motor 26 until the time t ₁ is stopped in the are stopped, the pressure pin 8 waiting position (X in FIG. 2), the value of the encoder signal 2 indicates a standby position . In this case, the encoder signal 1 indicates a stop position at a time t ₃ when the rotational speed of the first servo motor 24 becomes zero. The value E1 of the encoder signal 1 indicating the position there should be work-storing pockets 4 in FIG at 5, the time t ₁ to initiate moved toward the pressure pin 8 to the first gage probe 7, the pulse oscillator controller In 22, it is obtained by calculation in advance.

  Therefore, the pulse generator controller 22 compares the encoder signal 1 and the encoder signal 2, and when the value of the encoder signal 1 is E1 and the value of the encoder signal 2 indicates the standby position, the pressure pin 8 is subjected to the first measurement. A command pulse signal 2 that starts moving in a direction approaching the probe 7 and stops at a position (Y in FIG. 2) where the first measurement probe 7 is in pressure contact with the electrode Wa of the workpiece W is sent to the second driver 25. And transmitted to the second servo motor 26. Here, as described above, the command pulse signal 2 is transmitted when the substantially midpoint of the short side of the workpiece W passes S1 in FIG.

In FIG. 5, the time t ₂ corresponds to this state. Since the first gage probe 7 pushed by the pressure pin 8 abuts against the electrode Wa of the workpiece W while being elastically deformed, the first gage probe 7 in a period from time t ₁ in FIG. 5 of t ₂ Since the pressure applied to the electrode Wa of the workpiece W is pressed in the direction in which the spring 11 is contracted even after the inspection probe 7 contacts the electrode Wa, it gradually increases. For this reason, the impact given to the electrode Wa can be suppressed small.

In FIG. 2C, since the transfer table 3 is rotating, the first inspection probe 7 slides in a state where the electrode Wa of the workpiece W is sufficiently pressurized. Immediately after this, when an extremely short time Δt that has been set elapses, at time t ₃ in FIG. 5, the work W reaches the position where the measurement is performed, and the first servo motor 24 stops rotating, and accordingly. Thus, the rotation of the transfer table 3 is also stopped. For this reason, this sliding time, that is, Δt = t ₃ −t ₂ in FIG. 5 becomes extremely short. In this case, the oxide film formed on the surface of the electrode Wa of the workpiece W can be scraped off by sliding for a short time, and sufficient electrical contact can be ensured. Further, since the electrode Wa of the workpiece W and the first measurement probe 7 only slide for a short time, the streak generated on the electrode Wa of the workpiece W becomes extremely small.

  As an example, when the sliding time Δt is 1.5 ms, the length of the streak generated on the electrode Wa of the workpiece W is 0.2 mm. That is, when the stiffness of the spring 11 is constant, the length of the streak is controlled by adjusting the sliding time of the electrode Wa of the workpiece W and the first inspection probe 7 as apparent from the above-described method. Is possible.

  Although the control of the length of the streak according to the sliding time has been described here, the pressurization is performed depending on the type of the electrode Wa of the workpiece W, the thickness of the oxide film, the hardness of the first measuring probe 7, the surface roughness, and the like. At least one of the deformation amount of the spring 11 and the rigidity of the spring 11 when the pin 8 is moved can be adjusted. This makes it possible to control the contact load, which is the amount of pressure applied to the electrode Wa of the workpiece W.

Next, a control method for starting movement of the transport table 3 with reference to the current position of the pressure pin 8 will be described below. In FIG. 5, when the rotation of the transfer table 3 stops at time t ₃ as described above, at time t ₄ , the first measurement probe 7 that is elastically deformed by being pressed by the pressure pin 8 is the electrode of the workpiece W. The second servomotor 26 stops rotating when it reaches a position where pressure is applied to Wa (Y in FIG. 2). As a result, the pressure pin 8 stops. In this state, electrical specific measurement of the workpiece W is performed.

Relationship in FIG. 5 and the stop time _{t 4} of the pressure pin 8 and the rotation stop time _{t 3} of the conveyor table 3, _{the t 4} is later than _{t 3,} i.e. it satisfies _t 4 -t ₃ ≧ 0 That's fine.

As shown in FIG. 5, at time t _5, the second servo motor 26 starts rotating, squashed after opening the spring 11 has, pressure pin 8 is examined from the position of Y in FIG. 2 the first The movement is started in a direction away from the measurement probe 7. As a result, the first measurement probe 7 pushed by the pressure pin 8 is restored by elasticity and is separated from the electrode Wa of the workpiece W (FIG. 3E). Along with this, the pressure applied to the electrode Wa of the workpiece W by the first inspection probe 7 gradually decreases. When the pressure pin 8 at time t ₆ is in a state of being separated from the first gage probe 7, a first gage probe 7 reliably separated from the electrode Wa of the workpiece W (FIG. 3 (f)). At this time, the first servo motor 24 starts to rotate, whereby the transport table 3 starts to rotate (FIG. 3 (g)). As a result, the first inspection probe 7 does not slide on the electrode Wa of the workpiece W, and no streak due to sliding occurs on the electrode Wa of the workpiece W.

As shown in FIG. 5, until time t ₆ , the pressure pin 8 moves in a direction away from the first inspection probe 7, and the transport table 3 is stopped. The moving pressure pin 8 stops at the standby position (X in FIG. 2). The time indicated by _{t 7} in FIG. That is, the MPU 21 transmits the command signal 2 to the pulse oscillator controller 22 in advance so that the rotation speed of the second servo motor 26 becomes 0 at the time t ₇ , and the pulse oscillator controller 22 uses the command signal 2 as a reference. While monitoring the encoder signal 2 received from the second encoder incorporated in the second servomotor 26 (indicating the current rotation angle of the second servomotor 26, that is, the position of the pressure pin 8), A command pulse signal 2 for controlling the rotation of the servo motor 26 is transmitted to the second driver 25. Further, the first encoder incorporated in the first servo motor 24 transmits the encoder signal 1 indicating the current position of the workpiece housing hole 4 to the pulse oscillator controller 22 via the first driver 23.

In this case, since until time t ₆ is carrying table 3 is stopped, the value of the encoder signal 1 indicates a stop position. Since the encoder signal 2 indicates the stop position at time t ₇ when the rotation speed of the second servo motor 26 becomes 0, the pressure pin 8 is present at time t _{6 when} the rotation of the transfer table 3 is started in FIG. The value E2 of the encoder signal 2 indicating the position to be obtained is obtained in advance by the pulse oscillator controller 22 by calculation. Therefore, the pulse generator controller 22 compares the encoder signal 1 and the encoder signal 2, and when the value of the encoder signal 2 is E2 and the value of the encoder signal 1 indicates the stop position, the rotation of the conveyance table 3 is started. A command pulse signal 1 to be stopped when the workpiece in the next workpiece storage hole arrives at the workpiece measuring device is transmitted to the first servo motor 24 via the first driver 23. In this embodiment, in FIG. 3E, the first servo motor 24 is moved when the tip of the pressure pin 8 moves in the direction away from the first inspection probe 7 and crosses Z. Starts rotating.

Second Embodiment Next, a second embodiment of the present invention will be described with reference to FIG. In the second embodiment shown in FIG. 6, the inspection probe and the pressure pin are integrated and advanced with respect to the workpiece storage hole of the transfer table, and other configurations are shown in FIGS. This is substantially the same as the first embodiment.

  In FIG. 6, the same parts as those of the first embodiment shown in FIGS. 1 to 5 are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 6, the second measurement probe 13 is fixed to one end of the pressure pin 8, and the second measurement probe 13 is integrated with the pressure pin 8. The pressure pin 8 is stored in the sleeve 10, and one end of a spring 11 is fixed to the end of the pressure pin 8 in the sleeve 10. The other end of the spring 11 is fixed to a pressure pin driving mechanism 12 integrated with the sleeve 10. The spring 11 biases the second measuring probe 13 in a direction in which the second measuring probe 13 is separated from the electrode Wa of the workpiece W. The pressure pin drive mechanism 12 has a structure in which the rotation of the second servo motor 26 is converted into a linear motion by a ball screw, a screw mechanism, or a link mechanism, and this linear motion passes through the spring 11 and the second inspection probe 13. It is transmitted to. As a result, the second inspection probe 13 approaches the electrode Wa of the workpiece W (in the direction of arrow C in FIG. 5) and away from the electrode Wa of the workpiece W (in the direction of arrow D in FIG. 5). It is free to advance and retreat. In this case, a probe driving mechanism 12 </ b> A is configured by the pressure pin 8 in the sleeve 10, the spring 11, and the pressure pin driving mechanism 12.

  When measuring the characteristics of the workpiece W, the base probe 6 contacts the electrode Wb of the workpiece W in the state shown in FIG. 6, and the second inspection probe 13 moves in a direction approaching the electrode Wa of the workpiece W. In contact with the electrode Wa of the workpiece W. Thereby, the workpiece | work W is clamped by the base probe 6 and the 2nd measurement probe 13, and a measurement is performed by the measuring device which is not shown in figure. When the measurement is completed, the second inspection probe 13 moves in a direction away from the electrode Wa of the workpiece W.

  The control method related to the rotation of the transfer table 3 and the movement of the second inspection probe 13 is substantially the same as the control method related to the rotation of the transfer table 3 and the movement of the pressure pin 8 in the first embodiment.

  In each of the above embodiments, the case where the transport body driving device 3a and the pressure pin driving mechanism 12 have the servo motors 24 and 26 has been described. However, the transport body driving device 3a and the pressure pin driving mechanism 12 are The conveyance table, the pressure pin, the measurement probe, or the link mechanism may be moved by the rotation of the motor, and these may be controlled by the rotation angle detection function of the motor.

  In addition, each of the above embodiments is for the purpose of high-precision control. However, in the case of low-precision control, such as when the target workpiece is large, the transport body driving device 3a and the pressure pin driving mechanism 12 are pulse motors. Alternatively, a stepping motor may be used.

  In each of the above embodiments, the case where the transfer table 3 is installed vertically has been described. However, the transfer table 3 may be installed horizontally or may be installed inclined.

  Furthermore, although the elastic body provided between the pressure pin and the pressure pin drive mechanism has been described with the spring 11, rubber may be used as long as it has long-term stable characteristics (for example, plastic deformation can be ignored for a long time). .

  Moreover, although the case where only one probe 7 moves among the pair of probes 7 and 6 in contact with the electrodes Wa and Wb of the workpiece W has been described, both the pair of probes 7 and 6 move and the electrodes of the workpiece W are moved. The measurement may be performed by contacting Wa and Wb and sandwiching the workpiece W.

  Moreover, although the conveyance body demonstrated the example which consists of the conveyance table 3, the conveyance body may consist of a strip | belt-shaped conveyance belt.

FIG. 1 is a diagram showing a first embodiment of a workpiece characteristic measuring apparatus according to the present invention. FIGS. 2A to 2D are views showing the operation of the workpiece characteristic measuring apparatus according to the present invention. FIGS. 3E to 3G are views showing the operation of the workpiece characteristic measuring apparatus according to the present invention. FIG. 4 is an operation control block diagram of the workpiece characteristic measuring apparatus according to the present invention. FIG. 5 is an operation time chart of the workpiece characteristic measuring apparatus according to the present invention. FIG. 6 is a diagram showing a second embodiment of the workpiece characteristic measuring apparatus according to the present invention. FIG. 7 is a cross-sectional view showing an electrode of a workpiece after measurement according to the present invention. FIG. 8 is a view showing a pressure pin driving mechanism including a link mechanism.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Work characteristic measuring apparatus 2 Base 3 Conveying table 3a Conveying body drive apparatus 4 Work accommodation hole 5 Suction hole 6 Base probe 6a Insulating layer 7 First measurement probe 8 Pressure pin 9 Probe holder 10 Sleeve 11 Spring 11b Spring 11c Spring 12 Pressure pin drive mechanism 12A Probe drive mechanism 12b Pressure pin drive mechanism 13 Second measurement probe 14 Cylindrical cam 15 Center shaft 16 Support base 21 MPU
22 Pulse oscillator controller 23 1st driver 24 1st servo motor 25 2nd driver 26 2nd servo motor 30 Electrode base material 31 Oxide film 32 Oxide film removal part 33 Integration part W Work Wa, Wb Electrode

Claims (21)

A transport body having a plurality of penetrating work storage holes, each of the work storage holes storing a work having a pair of electrodes facing outward in the penetration direction of the work storage holes;
A carrier driving device for driving the carrier;
A pair of probes provided on both sides of the carrier, each of which can contact a work electrode housed in a work housing hole;
A probe drive mechanism for advancing and retracting at least one of the probes with respect to the workpiece storage hole;
A workpiece characteristic measuring apparatus comprising: a control device that controls the carrier driving device and the probe driving mechanism to cause the pair of probes to contact the corresponding workpiece electrode while sliding.   When the workpiece storage hole comes to the first set position before the pair of probes, the control device controls the probe driving mechanism to advance one of the probes toward the workpiece storage hole so that the workpiece storage hole becomes a pair of probes. 2. The workpiece characteristic measuring apparatus according to claim 1, wherein when the second set position is reached, the probe driving mechanism is controlled to retract one of the probes from the workpiece receiving hole.   The workpiece characteristic measuring apparatus according to claim 1, wherein the carrier is a disk.   The workpiece characteristic measuring apparatus according to claim 1, wherein the carrier is a belt-like body.   2. The workpiece characteristic measuring apparatus according to claim 1, wherein the carrier driving device includes a servo motor having a rotation angle detecting function.   2. The workpiece characteristic measuring apparatus according to claim 1, wherein the carrier driving device includes a pulse motor.   7. The workpiece characteristic measuring apparatus according to claim 6, wherein the pulse motor of the carrier driving device has a rotation angle detection function.   2. The workpiece characteristic measuring apparatus according to claim 1, wherein the probe drive mechanism includes a pressure pin and a pressure pin drive mechanism for driving the pressure pin.   9. The workpiece characteristic measuring apparatus according to claim 8, wherein the one probe is positioned between the pressure pin and the transport body.   9. The workpiece characteristic measuring apparatus according to claim 8, wherein an elastic body is provided between the pressure pin and the pressure pin driving mechanism.   11. The workpiece characteristic measuring apparatus according to claim 10, wherein the elastic body can change its rigidity.   The work characteristic measuring apparatus according to claim 10, wherein the elastic body has a spring.   9. The workpiece characteristic measuring apparatus according to claim 8, wherein the pressure pin driving mechanism is composed of a servo motor having a rotation angle detection function.   9. The workpiece characteristic measuring apparatus according to claim 8, wherein the pressure pin driving mechanism includes a pulse motor.   9. The workpiece characteristic measuring apparatus according to claim 8, wherein the pressure pin driving mechanism is composed of a pulse motor having a rotation angle detecting function.   3. The work characteristic measuring apparatus according to claim 2, wherein the control device controls the transport body driving device to stop the transport body when the work storage hole reaches the second set position. In the workpiece | work characteristic measuring method using the workpiece | work characteristic measuring apparatus of Claim 1,
Storing the work in the work storage hole of the transport body, driving the transport body by controlling the transport body driving device by the control device; and
A step of controlling the probe drive mechanism by the control device to advance one of the probes toward the workpiece housing hole, bringing the pair of probes into contact with the corresponding electrodes of the workpiece, and measuring the characteristics of the workpiece;
A method for measuring workpiece characteristics, comprising:   When the workpiece storage hole comes to the first set position before the pair of probes, the control device controls the probe driving mechanism to advance one of the probes toward the workpiece storage hole so that the workpiece storage hole becomes a pair of probes. 18. The workpiece characteristic measuring method according to claim 17, wherein when the second set position is reached, the probe driving mechanism is controlled to retract one of the probes from the workpiece storage hole.   The work specifying method according to claim 17, wherein the probe driving mechanism pressurizes one of the probes via an elastic body.   20. The workpiece characteristic measuring method according to claim 19, wherein the probe driving mechanism pressurizes one probe by changing at least one of the deformation amount of the elastic body and the rigidity of the elastic body.   18. The workpiece according to claim 17, wherein the first setting position and the second setting position are variable, and thereby the sliding length between the pair of electrodes of the workpiece and the corresponding probe is determined. Characteristic measurement method.

Images