JPH0951046A - Work positioning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To position a work such as package, etc., in a high accuracy at a specified position. SOLUTION: Two supporting bases 5 and 6 are arranged on both sides of a guide rail 7 by which a package P as a work is supported movably, and contact wings 12 and 15 made of hard material are provided to the bases 5 and 6 so that they may be brought into contact with both sides of the package P transferred to the rail 7. One of the wings 12 and 15 is freely oscillated at a center of its lower end, and its tip end is freely made close, released or moved to/from the other wing.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work positioning device for positioning a semiconductor package or the like at a predetermined position.

[0002]

2. Description of the Related Art After a semiconductor package (hereinafter simply referred to as a package) has been manufactured, the package is conveyed to a marking process, and a trademark, a manufacturing name,
And the rod number is printed. This marking method includes marking with ink and marking with laser processing.

In laser marking, YAG (Y
ttrium aluminum garnet) laser or CO ₂ laser is used. Regarding such marking technology,
"VLSI package technology (below)" issued by Nikkei BP,
Published May 31, 1993, P50-P51.

In a marking machine laid inline on a semiconductor manufacturing line, it is necessary to accurately position and stop a package conveyed to a guide rail at a marking position of a marking device in order to perform marking at a predetermined position of the package. It becomes important. Therefore, a positioning device having a guide rail transferred from the transport rail is provided in the marking device, and the package is transported to the guide rail by the transport claw. A vacuum suction hole for fixing the package is opened in the guide rail portion.

In the marking device having such a positioning device, if the negative pressure due to vacuum suction does not reliably act on the package, the package conveyed by the conveying claws slides on the guide rail due to inertia. , It becomes impossible to position and fix the package at a predetermined position.

[0006]

When the positioning device is used for a long period of time, the surface of the guide rail is worn and scraped off, and a gap is generated between the package and the surface of the guide rail. I will end up. This causes a vacuum break which prevents the package from being fixed in place, causing the package to slip and cannot be fixed in place. Further, if the filter in the negative pressure supply circuit that supplies the negative pressure is clogged, the package cannot be stopped at the fixed position in the same way, and the slip phenomenon of the package occurs.

Therefore, there is a possibility that the marking or imprinting position of the marking may be displaced due to a decrease in vacuum pressure or a vacuum break due to a gap between the guide rail and the package. In particular, in the case of laser marking, if marking is made at a shifted position, the reproduction cannot be performed, which is one of the causes of lowering the yield.

Further, when marking or engraving a thin package, the package is loaded in a frame-shaped carrier and conveyed together with it, so that the carrier is positioned at a predetermined position of the marking device. Therefore, the vacuum suction method cannot be adopted.

An object of the present invention is to enable a work such as a package to be positioned at a predetermined position with high accuracy.

The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

[0011]

SUMMARY OF THE INVENTION Among the inventions disclosed in the present application, the outline of a representative one will be briefly described.
It is as follows.

That is, the work positioning apparatus of the present invention comprises a guide rail for movably supporting the work, a carrying member for carrying the work to the guide rail, and two support bases arranged on both sides of the guide rail. It is characterized in that each of the two support bases has a contact blade made of a hard material that comes into contact with both sides of the work conveyed to the guide rail. One of the contact blades is swingable around its base end. The guide rail is movable in a direction perpendicular to the surface of the guide rail, and one of the two supports is movable toward and away from the other. Also, 2
The two supports are movable in the direction perpendicular to the surface of the guide rail.

[0013]

In the work positioning device described above, since the contact blades made of a hard material are weakly applied to the sides of the work such as the package and sandwiched, friction is generated to position the package. Can be accurately positioned in the position. Further, by using a hard material for the contact blades, it is possible to prevent wear of the contact blades, improve wear resistance, and prevent scratches on the work. By making one of the contact blades swingable, the impact force when the work is carried into the positioning device can be mitigated and the load acting on the work can be reduced. By making both the supports movable in the vertical direction, it is possible to position a plurality of works of different sizes. Also, by making the guide rail movable up and down, it is possible to perform the positioning corresponding to the size change.

[0014]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a perspective view showing a main part of a work positioning apparatus according to an embodiment of the present invention, and FIG. 2 is a plan view of FIG.

As shown in FIG. 1, a spacer 2 is fixed to a base member 1 of the positioning device, and a pedestal 3 is installed on the spacer 2. This pedestal 3 is the base member 1
It is vertically movable by a pneumatic cylinder 4 attached to the lower surface of the.

A fixed-side support base 5 is fixed to the pedestal 3, and a movable-side support base 6 is movably attached to the pedestal 3 in a direction of moving toward and away from the fixed-side support base 5 as shown by an arrow S.
Is arranged. A guide rail 7 is arranged between these two supports 5, 6, and the guide rail 7
A package P, which is a work, is loaded on the surface of the.

FIG. 3 is a view showing a portion where the package P is carried into the positioning device shown in FIG. 1, and a transport rail 8 is arranged in series with the guide rail 7. A transport member 10 is arranged above the transport rail 8,
The conveying member 10 has a conveying claw 11 that contacts the package P.
The forward movement indicated by arrow A, the upward movement indicated by arrow B, the backward movement indicated by arrow C, and the downward movement indicated by arrow D are performed. By this movement, the packages P are carried into the guide rail 7 one by one.

As shown in FIGS. 1 and 2, contact vanes 12 are fixed to the fixed-side support base 5 so as to extend in parallel along the surface of the guide rail 7. On the other hand, a movable member 14 is attached to the movable support base 6 by a vertical support pin 13 so as to be swingable in a direction indicated by an arrow R in a horizontal plane, and the movable member 14 makes contact with the contact blade 12 in a pair. The wing 15 is fixed. Each of the contact blades 12, 15 is made of a hard material such as artificial sapphire, and the tapered portions 12a, 1 are provided at both ends of each of the contact blades 12, 15.
5a is formed.

The support pin 13 is located on the rear end side of the movable member 14, and a spring receiving member 16 is provided on the front end side of the movable member 14 as shown in FIG.
Reference numeral 6 projects into a concave portion 17 formed in the movable support base 6. A spring member 18 that abuts the spring receiving member 16 is provided in the recess 17.

Therefore, the movable member 14 is biased by a spring force in a direction in which its tip approaches the fixed-side support base 5, and normally the movable-side support base 6 is moved relative to the fixed-side support base 5. Become almost parallel. That is, both contact blades 12, 1
5 are parallel to each other. When a load is applied in the direction in which the movable member 14 is expanded, the movable member 14 swings in the direction indicated by the arrow R against the spring force of the spring member 18.

FIG. 4 is a sectional view taken along the line IV-IV in FIG. 1, and a flange portion 21 that engages with the movable side support base 6 at one end thereof.
Two rods 20 each having a penetrating through the movable side support base 6, the pedestal 3 and the fixed side support base 5,
Of the flange portion 22 provided on the other end of the
A compression coil spring 23 is mounted between and. Therefore, when a load is applied in the direction in which the fixed-side support base 5 and the movable-side support base 6 are pushed toward each other, the movable-side support base 6 moves in a direction away from the fixed-side support base 5, and the load is released. Then, it returns to the original position. In order to guide the movement of the movable side support base 6, the movable side support base 6 and the pedestal 3 may be engaged with each other by an uneven rail.

As shown in FIG. 5, the guide rail 7 has a base 3
A compression coil spring 24 is mounted between the pedestal 3 and the guide rail 7, and the guide rail 7 is urged by an upward spring force. The up and down movement of the guide rail 7 is performed on both the fixed and movable support bases 5, 5.
Guided by 6.

The rod 25 of the cylinder 4 attached to the lower surface of the base member 1 comes into contact with the lower surface of the pedestal 3, and when the cylinder 4 is driven, the rod 25 of FIG.
As shown in (b), the pedestal 3 rises.

FIG. 5A shows a state in which the package Pa having a COL (Chip On Lead) structure is positioned at a predetermined position on the guide rail 7, and FIG. 6B shows a LOC (Lead On Chi).
The package Pb having the structure p) is shown positioned on the guide rail 7 at a predetermined position. In this way, the package P
, The contact positions of the contact blades 12 and 15 with respect to both side surfaces of the package P are different depending on the mounting form of the semiconductor chip C on the lead L. By ascending, it is possible to position a plurality of types of packages P even if the contact positions are different.

Even if the pedestal 3 is lifted, the guide rail 7 moves in the direction of approaching the pedestal 3 against the spring force of the compression coil spring, so that the surface position of the guide rail 7 is reduced. It is possible to keep the surfaces of the guide rail 7 and the transport rail 8 substantially constant without changing the above.

Next, a procedure for positioning the package P, which is a work, by the above-described positioning device will be described.

The package P is carried onto the guide rail 7 of the positioning device by the carrying member 10 shown in FIG.
When loaded, the contact blades 12 provided on the fixed-side support base 5
First, both side surfaces of the package P come into contact with the tapered portions 12a, 15a of the contact blades 15 provided on the movable side support base 6 via the movable member 14, and the contact blades 12 are guided by the tapered portions 12a, 15a. The package P stops due to the friction between these and the package P at the portion of the parallel plane 15. The stop position of the package P is set by the moving direction of the transport member 10. In this state, as shown in FIG.
By irradiating the surface of the package P with laser light from the laser marking device M, characters or the like are marked on the surface of the package P.

In order to stamp the package Pb having the LOC structure, as shown in FIG. 5B, the pedestal 3 is pushed up by the cylinder 4 and both contact blades 12, 1 are attached.
Raise the 5 position. On the other hand, when engraving the package Pa having the COL structure, as shown in FIG. 5A, the pedestal 3 is lowered and both contact blades 12 and 15 are aligned with the position of the side surface of the package Pa. Keep it down.

In the process of loading the package P onto the guide rail 7, the movable support 6 is movable in the direction S toward and away from the fixed support 5 as shown in FIG. Further, since the movable member 14 to which the contact blades 15 are attached is swingable around the support pin 13, the spring member 18 for pressing the movable member 14 and the movable side support base 6 are provided on both side surfaces of the package P. Spring 23 to press
Against the spring force of
Enter between 5.

At this time, assuming that the contact blades 15 are not swingable through the movable member 14 and the spring force of the spring member 18 is not applied thereto, as shown in FIG. 6 (a). In addition, although the force acting on the contact blades 12 and 15 and the package P, that is, the reaction and reaction becomes large, the contact blade 15 is swingable via the movable member 14 as shown in FIG. 6B. Since the spring force of the spring member 18 is biased, the action and reaction acting on the two members are reduced, and the stress can be dispersed.

Since one of the contact blades 15 is made swingable and the spring force is applied as described above, the impact force generated when the package P is carried into the positioning device can be reduced. it can. In addition, the pressure at the time of positioning can be released to disperse the stress.
Furthermore, the contact blades 12 and 15 are made of a hard material such as artificial sapphire, and their surfaces are mirror-finished,
It is possible to prevent wear of the contact blades 12 and 15 and improve wear resistance, and it is also possible to prevent a package, which is a product, from being scratched.

The invention made by the inventor of the present invention has been specifically described above based on the embodiments. However, the present invention is not limited to the above embodiments, and various modifications can be made without departing from the scope of the invention. Needless to say.

For example, in the above-described embodiment, the package P is directly carried in from the carrier rail 8 to the guide rail 7. However, as shown in FIG. 7, when the package P is thin, the package P is frame-shaped. The carrier 30 may be transported while being accommodated therein.

In the above description, the case where the invention made by the present inventor is mainly applied to the marking device, which is the field of use thereof, has been described, but the present invention is not limited to this, and the work is positioned at a predetermined position. The present invention can be applied to various kinds of work.

[0036]

Advantageous effects obtained by typical ones of the inventions disclosed in the present application will be briefly described.
It is as follows.

(1) Since the work can be positioned without using negative pressure, the work can be positioned with high accuracy even if the guide rails supporting the work are worn.

(2) Since the work is positioned without using the negative pressure, the frame-shaped work can be positioned with high accuracy.

(3) The work can be positioned with high precision by utilizing the frictional force by the contact blades which come into contact with the side surface of the work.

(4). Plural kinds of works having different sizes can be positioned by the same device.

[Brief description of drawings]

FIG. 1 is a perspective view showing a work positioning device according to an embodiment of the present invention.

2A is a plan view of FIG. 1, and FIG. 2B is a sectional view taken along line II-II in FIG.

FIG. 3 is a perspective view showing a portion for carrying in a work with respect to the work positioning apparatus shown in FIG.

FIG. 4 is a sectional view taken along line IV-IV in FIG.

5A is a sectional view showing a state in which a package having a COL structure is positioned, and FIG. 5B is a sectional view showing a state in which a package having a LOC structure is positioned.

FIG. 6A is an explanatory diagram showing the action and reaction in the contact state of the package and the contact blade when the contact blade is not swingable, and FIG. 6B is the case where the contact blade is swingable. FIG. 6 is an explanatory view showing the action and reaction in the contact state between the package and the contact blade in FIG.

FIG. 7 is a cross-sectional view showing another type of workpiece positioned by the positioning device of the present invention.

[Explanation of symbols]

 1 Base Member 2 Spacer 3 Pedestal 4 Pneumatic Cylinder 5 Fixed Side Support 6 Movable Side Support 7 Guide Rail 8 Transport Rail 10 Transport Member 11 Transport Claw 12 Contact Blade 13 Support Pin 14 Movable Member 15 Contact Blade 16 Spring Bearing Member 17 Recess 18 Spring member 20 Rod 21, 22 Flange portion 23, 24 Compression coil spring 25 Rod 30 Frame member (carrier) P, Pa, Pb Package (work)

Claims (5)

[Claims] 1. A guide rail for movably supporting a work, a conveying member for conveying the work to the guide rail, two support bases arranged on both sides of the guide rail, and two support bases. A workpiece positioning device, comprising: contact blades provided on each of the workpieces, the blades contacting both sides of the workpiece conveyed to the guide rail. 2. The workpiece positioning device according to claim 1, wherein one of the contact blades provided on each of the support bases is provided around the one end in the workpiece conveying direction of the guide rail. A work positioning device, which is swingably provided in a plane parallel to the surface. 3. The work positioning device according to claim 1, wherein the guide rail is movably provided in a direction perpendicular to the surface, and the distance between the surface of the guide rail and the contact blade is variable. A workpiece positioning device characterized by being capable of performing. 4. The work positioning device according to claim 1, wherein the two support bases are provided so as to be movable in a direction perpendicular to a surface of the guide rail. Positioning device for work. 5. The work positioning device according to claim 1, wherein one of the two support bases is provided so as to be movable toward and away from the other support base. Work positioning device.