JPH0950949A - Manufacture of product and production control calculation system for product - Google Patents

Abstract

PROBLEM TO BE SOLVED: To avoid the large quantity of defective products and stabilize the quality or characteristics of the products by a method wherein the products are manufactured by using a production control calculation system which can evaluate the existence of abnormalities in the quality or characteristics of the products and the existence of abnormalities in production equipment and, if it is decided that the abnormalities exist, raises the alarm. SOLUTION: A product progression control computer 23 collects the production results of a series of works from the start to the completion and the process progression information of products which are inputted by shop terminals 221a-221g through a production network 28. A test result control computer 22 collects and classifies the quality test results of the products concerning respective types, respective lots or respective processes which are obtained from terminals 211a-211e through a test network 27. Equipment operation record data which are inputted to an equipment operation record control computer 21 by terminals 201a-201g through an equipment network 26 are controlled in relations to the quality items, lot numbers, process names, work dates, etc., of the object products.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention constantly monitors trends in product inspection data and equipment work data collected from a manufacturing line for products such as thin film process products and evaluates whether there is any abnormality in them, and outputs a warning or The present invention relates to a manufacturing method and a production management calculation system for a product, in which measures are taken to reduce the variation in quality, prevent a large number of defects from occurring, and improve the yield of the product so that the product can be manufactured stably.

[0002]

2. Description of the Related Art As a conventional technique as an inspection data analysis system for inspecting foreign matters and defects in semiconductors which are thin film process products, for example, Japanese Patent Laid-Open No. 3-44054 (Prior Art 1) and Japanese Patent Laid-Open No. 7-50235 ( Prior art 2) and Japanese Patent Laid-Open No. 7-211271 are known. This prior art 1 includes a means for detecting a visual defect on a workpiece to be inspected, a means for measuring coordinates of the visual defect, a means for recognizing a manufacturing process of the workpiece immediately before the visual inspection, and a means for identifying the workpiece. And a means for extracting the appearance defect newly detected in each appearance inspection by comparing the results of the appearance inspection of the same work as the means for accumulating the inspection data of the appearance inspection device having the And a test data analysis system including a data processing device having a processing result output unit.

Further, in the prior art 2, a work standard data file in which work standard data of a semiconductor manufacturing apparatus is stored,
A work result data file in which work results of semiconductor manufacturing equipment are stored, and work information consisting of maintenance work result information or current quality control information sent from the semiconductor manufacturing equipment are written into the work performance data file and A management apparatus for a semiconductor manufacturing apparatus is described, which includes information and a work reference data, and a monitoring unit that issues a warning to the semiconductor manufacturing apparatus based on the comparison result. Further, in the prior art 3, the organic relationship of various semiconductor manufacturing process conditions is grasped by a concept using a three-dimensional data structure, and related by using a process code, a standard code, a facility condition code, etc. Further, by managing the codes in association with lots, manufacturing process flows for each product type, equipment manufacturing conditions, etc., a specific one condition is searched from a wide variety of conditions utilizing the codes, and related data is searched. It describes a method for instructing the management of manufacturing conditions, such as extraction and condition instruction.

[0004]

Problem to be Solved by the Invention IC (Integrated Circuit), LS
Manufacturing of thin film process products such as I (large-scale integrated circuit), thin film magnetic head, TFT (thin film transistor), and computer mounting substrate is becoming more complicated and requires hundreds of processes due to recent high integration and fine processing technology. It is a long process that extends.
For this reason, the manufacturing period is extended and the management man-hours in the manufacturing process are increasing.

On the other hand, in the above-mentioned production line, for example, early start-up of a new product and production of a small amount of a large variety of products are carried out. Therefore, it is possible to suppress quality variation, prevent a large number of defects, and improve product yield. There is a strong demand for streamlining, rationalization and labor saving of manufacturing work. However, in the above-mentioned conventional techniques 1, 2, and 3, whether or not there is an abnormality in the quality or characteristics of the product based on the product inspection data in the desired manufacturing process, and in the desired manufacturing facility related to the desired manufacturing process. Evaluate the presence or absence of abnormalities in manufacturing equipment based on work data, efficiently identify the cause of defects, and efficiently take countermeasures against the causes of defects, and reduce variations in product quality or characteristics. In addition, the fact that a large number of defects are prevented from occurring and the yield is improved has not been sufficiently considered.

An object of the present invention is to solve the above problems.
It is an object of the present invention to provide a method of manufacturing a product and a production management calculation system that prevent the occurrence of a large number of defects, stabilize the quality or characteristics of the product, and improve the yield thereof. Another object of the present invention is to prevent the occurrence of a large number of defects, stabilize the quality or characteristics of the product, and improve the yield thereof even in the early start-up of a new product or the production of a large number of products in small quantities. The object of the present invention is to provide a product manufacturing method and a production management calculation system. Another object of the present invention is to monitor the product inspection data in a desired manufacturing process and the operation data in a desired manufacturing facility related to the desired manufacturing process to detect whether or not there is an abnormality in the quality or characteristics of the product and manufacture the product. To provide a product manufacturing method and production management calculation system that evaluates the presence or absence of abnormalities in equipment, prevents the occurrence of large numbers of defects, stabilizes the quality or characteristics of products, and improves their yield. is there.

[0007]

In order to achieve the above object, the present invention relates to a desired manufacturing process and a desired manufacturing facility in a manufacturing line and prepares management standard data in each of them. Product inspection data in the desired manufacturing process and operation data in the desired manufacturing facility are collected, and the collected product inspection data in the desired manufacturing process is related to the management standard in the desired manufacturing process. Evaluate the quality or characteristics of the product for abnormalities by comparing it with the data,
Furthermore, by comparing the collected work data in the desired manufacturing equipment with the management reference data in the related desired prepared manufacturing equipment, the presence or absence of abnormality in the manufacturing equipment is evaluated. A product manufacturing method, characterized in that a product is manufactured by the manufacturing line using a production management calculation system that warns when the above is evaluated. Further, the present invention relates to a desired manufacturing process and a desired manufacturing facility in a manufacturing line, prepares management reference data in each, and performs product inspection data in the desired manufacturing process and work in the desired manufacturing facility. By collecting data and comparing the collected product inspection data in the desired manufacturing process with the control reference data in the related desired prepared manufacturing process, the presence or absence of abnormality in the quality or characteristics of the product can be determined. By evaluating and further comparing the collected work data in the desired manufacturing equipment with the management reference data in the related desired prepared manufacturing equipment, the presence or absence of abnormality in the manufacturing equipment is evaluated. By using the production management calculation system that stores the evaluation result and forms the evaluation history, A method for producing a product, characterized in that to produce a product.

Further, according to the present invention, a desired manufacturing process and a desired manufacturing facility in a manufacturing line are correlated with each other to prepare management reference data for each, and product inspection data and a desired manufacturing process in the desired manufacturing process are prepared. By collecting work data in the equipment and comparing the collected product inspection data in the desired manufacturing process with the control reference data in the related desired prepared manufacturing process, the product quality or characteristics can be determined. By evaluating the presence or absence of abnormality by assigning a code indicating an inspection item, and further comparing the collected work data in the desired manufacturing facility with the management reference data in the related desired prepared manufacturing facility. A code indicating the manufacturing conditions of the manufacturing equipment is assigned and evaluated for abnormalities in the manufacturing equipment. Results using the production management computer system for forming an evaluation history stores a method of manufacturing a product characterized in that to produce the product by the production line.

Further, according to the present invention, a desired manufacturing process and a desired manufacturing facility in a manufacturing line are correlated with each other to prepare management reference data for each, and product inspection data and a desired manufacturing process in the desired manufacturing process are prepared. By collecting the operation data in the facility and comparing the collected product inspection data in the desired manufacturing process with the control reference data in the related desired prepared manufacturing process, the product quality or characteristics can be determined. The presence or absence of abnormality is evaluated, and further the presence or absence of abnormality in the manufacturing equipment is evaluated by comparing the collected work data in the desired manufacturing equipment with the management reference data in the desired manufacturing equipment prepared in relation to each other. If each evaluation is abnormal, enter the details of the countermeasure and record it as a countermeasure record. With the production management computer system for storing a manufacturing process of a product, characterized in that to produce the product by the production line.

Further, according to the present invention, a process code for a desired manufacturing process element in a manufacturing process flow for manufacturing a product, and a process determined according to a product type or lot of a product to be flown to a manufacturing line corresponding to the desired manufacturing process element. A standard code for specifications and a facility code for equipment that can be used to realize the process specifications are added to a production management calculation system, and the desired equipment for manufacturing a product in the production management calculation system. Managing the manufacturing conditions for the above with the given process code, standard code and facility code, and manufacturing a product using the controlled desired facility in a manufacturing line having the manufacturing process flow. Is a method of manufacturing a product.

Further, the present invention is characterized in that, in the method of manufacturing the product, the product is a thin film process product. Further, the invention is characterized in that, in the manufacturing method of the product, the manufacturing line includes at least a film forming step, a photolithography step, an etching step, and an inspection step. Further, in the production management calculation system used in the manufacturing method of the product, each of the product quality in the manufacturing line and the trend change monitoring of the equipment and the abnormality detection result is related to the lot, the kind, the process, the equipment, etc. It is characterized in that it is additionally displayed on the display means to warn. The present invention also provides
In this case, not only the data that deviates from the range of the control reference value of each process is warned, but also the detected abnormality that has already been warned but the countermeasure is not completed is also warned. Further, the present invention is a manufacturing condition management calculation means for preparing manufacturing conditions in a desired manufacturing facility installed in a desired manufacturing process of a manufacturing line and inspection specifications of product quality or characteristics in a desired manufacturing process of the manufacturing line. An equipment work history management calculating means for collecting work results performed in the desired manufacturing equipment, and an inspection for collecting inspection results of quality or characteristics of products in a desired manufacturing process of the manufacturing line Equipment for comparing the work results in the desired manufacturing equipment collected by the result management calculation means and the equipment work history management calculation means with the manufacturing conditions in the desired manufacturing equipment prepared by the manufacturing condition management calculation means The presence or absence of abnormality is evaluated, and the inspection result of the product quality or characteristics in the desired manufacturing process collected by the inspection result management calculation means and the And a production / quality monitoring calculation means for comparing the quality or characteristic inspection specifications of the product in the desired manufacturing process prepared by the manufacturing condition management calculation means to evaluate the presence or absence of abnormality in the product quality or characteristic. It is a production management calculation system characterized by the above.

The present invention is also for manufacturing condition management for preparing manufacturing conditions in a desired manufacturing facility installed in a desired manufacturing process of a manufacturing line and inspection specifications for product quality or characteristics in a desired manufacturing process of a manufacturing line. Calculation means,
Equipment work history management calculation means for collecting work results performed in the desired manufacturing equipment, and inspection results for collecting inspection results obtained by inspecting product quality or characteristics in the desired manufacturing process of the production line with an inspection device An abnormality in the equipment by comparing the work results in the desired manufacturing equipment collected by the management calculating means and the equipment work history management calculating means with the manufacturing conditions in the desired manufacturing equipment prepared by the manufacturing condition managing calculating means. The presence or absence of the inspection result, the inspection result of the product quality or characteristics in the desired manufacturing process collected by the inspection result management calculating means, and the product quality in the desired manufacturing process prepared by the manufacturing condition management calculating means Or, by comparing with the inspection specification of the characteristic, the quality of the product or the presence or absence of abnormality of the characteristic is evaluated, and when each evaluation result is evaluated as abnormal, Is the production management computer system characterized in that a production / quality monitoring calculating means for warning about.

Further, the present invention is for manufacturing condition management for preparing a manufacturing condition in a desired manufacturing facility installed in a desired manufacturing process of a manufacturing line and an inspection specification of quality or characteristics of a product in a desired manufacturing process of the manufacturing line. Calculation means,
Equipment work history management calculation means for collecting work results performed in the desired manufacturing equipment, and inspection results for collecting inspection results obtained by inspecting product quality or characteristics in the desired manufacturing process of the production line with an inspection device An abnormality in the equipment by comparing the work results in the desired manufacturing equipment collected by the management calculating means and the equipment work history management calculating means with the manufacturing conditions in the desired manufacturing equipment prepared by the manufacturing condition managing calculating means. The presence or absence of the inspection result, the inspection result of the product quality or characteristics in the desired manufacturing process collected by the inspection result management calculating means, and the product quality in the desired manufacturing process prepared by the manufacturing condition management calculating means Alternatively, the quality of the product or the presence or absence of abnormality of the characteristic is evaluated by comparing with the inspection specification of the characteristic, and the evaluation result is stored to form the evaluation history. / Is the production management computer system characterized in that a quality monitoring computing means.

The present invention is also for manufacturing condition management for preparing manufacturing conditions in a desired manufacturing facility installed in a desired manufacturing process of a manufacturing line and inspection specifications of product quality or characteristics in a desired manufacturing process of the manufacturing line. Calculation means,
Equipment work history management calculation means for collecting work results performed in the desired manufacturing equipment, and inspection results for collecting inspection results obtained by inspecting product quality or characteristics in the desired manufacturing process of the production line with an inspection device A manufacturing facility that compares the work results in the desired manufacturing facility collected by the management computing unit and the facility work history management computing unit with the manufacturing conditions in the desired manufacturing facility prepared by the manufacturing condition management computing unit. The evaluation result is given with a code indicating the manufacturing condition of, and the inspection result of the quality or characteristics of the product in the desired manufacturing process collected by the inspection result management calculation means and the desired condition prepared by the manufacturing condition management calculation means By comparing the inspection specifications of product quality or characteristics in the manufacturing process of the Ataishi a production management computer system characterized in that a production / quality monitoring for the calculation means for forming an evaluation history stores these evaluation results.

Further, the present invention is for manufacturing condition management for preparing manufacturing conditions in a desired manufacturing facility installed in a desired manufacturing process of a manufacturing line and inspection specifications of product quality or characteristics in a desired manufacturing process of the manufacturing line. Calculation means,
Equipment work history management calculating means for collecting work results performed in the desired manufacturing equipment, and inspection results for collecting inspection results obtained by inspecting product quality or characteristics in a desired manufacturing process of the manufacturing line with an inspection device Abnormal equipment by comparing the work results in the desired manufacturing equipment collected by the management calculating means and the equipment work history management calculating means with the manufacturing conditions in the desired manufacturing equipment prepared by the manufacturing condition managing calculating means. The presence or absence of the product, the inspection result of the product quality or characteristics in the desired manufacturing process collected by the inspection result management calculation means, and the product quality in the desired manufacturing process prepared by the manufacturing condition management calculation means Alternatively, the quality of the product or the presence or absence of an abnormality in the characteristic is evaluated by comparing with the inspection specifications of the characteristic, and if the abnormality is evaluated in each evaluation, the corresponding Is the production management computer system characterized in that a production / quality monitoring computing means for storing as a countermeasure record by entering the contents.

Further, the present invention is characterized in that the production management calculation system further comprises a product progress management calculation means for collecting at least a product completion record in a desired manufacturing process of the manufacturing line. Further, in the present invention, in the production management calculation system, the evaluation result evaluated by the production / quality monitoring calculation means is provided to any one of the calculation means or the calculation means by adding information about a product name and a product type or a lot. It is characterized in that it is configured to display on a display means provided in a connected terminal device. Further, in the present invention, in the production management calculation system, the history information relating to the evaluation result evaluated by the production / quality monitoring calculation means is added to the product name and the kind or lot information, and any one of the calculation means is added. It is characterized in that it is configured to display on a display means provided in a terminal device connected to the calculation means. Further, in the present invention, in the production management calculation system, based on an evaluation result evaluated by the production / quality monitoring calculation means, an instruction content for a desired manufacturing process or a manufacturing facility is calculated by any one of the calculation means or the calculation means. It is characterized in that it is configured to display on a display means provided in a terminal device connected to. Further, in the present invention, in the production management calculation system, a screen for inputting a countermeasure record for a desired manufacturing process or manufacturing facility based on the evaluation result evaluated by the production / quality monitoring calculation means is displayed on the calculation means. Or a display unit provided in a terminal device connected to the calculation unit. Further, according to the present invention, in the production management calculation system, the evaluation result evaluated by the production / quality monitoring calculation means can be inspected by either a code indicating a manufacturing condition of a manufacturing facility or a code indicating an inspection item. It is characterized by being configured. According to the present invention, in the production / quality monitoring calculation means in the production management calculation system, each processing function of abnormality detection, warning, and countermeasure recording can be independently activated at a timing required, and a timer can be used. It is characterized by interlocking with. The present invention also provides
The production management calculation system is characterized in that inspection items for detection and evaluation, control reference values, and the like are flexibly set as necessary.

Further, according to the present invention, a process code for a desired manufacturing process element in a manufacturing process flow for manufacturing a product, and a process determined by a product type or a lot corresponding to the desired manufacturing process element and flown on a manufacturing line. A standard code for specifications and a facility code for facilities that can be used to realize the process specifications are further assigned, and the manufacturing conditions for the desired facility for manufacturing a product are given as the process codes and the standards. It is a production management calculation system characterized by being managed in relation to each other by a code and an equipment code. The present invention also provides
In a method of manufacturing a thin film process product such as a semiconductor on a manufacturing line, (1) in order to promote sharing of production records, process progress records, product characteristics and inspection results, work history data of each manufacturing facility, etc. Are collected from the manufacturing line to prevent the occurrence of a large number of defects, stabilize the manufacturing quality, and improve the yield by using the method of organically associating the data and the input standardization method when manually inputting the data. While constantly monitoring the product inspection data and equipment data, etc., the quality data is evaluated for abnormalities by comparing the collected data with the control reference values in each process or by a predetermined judgment method. The method is characterized by using a method of instant automatic warning, and (3) a method of supporting know-how accumulation and utilization of defect countermeasures (early countermeasure instruction).

As described above, according to the present invention, the IC
(Integrated circuit), LSI (Large-scale integrated circuit), Thin film magnetic head, TFT (Thin film transistor), Manufacturing of thin film process products such as computer mounting boards is becoming more and more complicated due to recent high integration and fine processing technology. Even if it becomes a long process of hundreds of processes, the manufacturing period is prolonged, and the management man-hours in the manufacturing process are increased, the product inspection data in the desired manufacturing process of the manufacturing line and the work data in the desired manufacturing equipment can be saved. By constantly monitoring and evaluating the product quality or characteristics and the manufacturing conditions of the manufacturing equipment to efficiently feed back to the manufacturing line, the cause of defects and their countermeasures can be executed with high reliability and easily. As a result, it is possible to reduce the variation in product quality or characteristics, and prevent the occurrence of large numbers of defects to produce products with excellent quality or characteristics with high yield. It can be produced. Further, according to the present invention, even if the early start-up of a new product and the production of a large number of products in small quantities, investigation of the cause of the defect and its countermeasure can be performed with high reliability and easily. As a result, products with excellent quality or characteristics can be manufactured with a high yield, and the efficiency, rationalization, and labor saving of manufacturing work can be achieved.

Further, according to the present invention, it becomes possible to automatically warn each of the product quality in the production line and the trend variation monitoring of the equipment and the abnormality detection result in association with the lot, the product type, the process, the equipment and the like. As a result, the cause of failure and its countermeasure can be easily executed with high reliability, and as a result, products with excellent quality or characteristics can be manufactured with high yield, and the efficiency of manufacturing work can be improved. Rationalization and labor saving can be achieved. Further, according to the present invention, by accumulating and managing the countermeasure record for the detected abnormality content, it is possible to easily accumulate the know-how for following the unmeasured abnormality and preventing the recurrence, and as a result, the cause of the defect and its countermeasure can be investigated. Can be performed with high reliability and easily, and as a result, products with excellent quality or characteristics can be manufactured with high yield, and the efficiency, rationalization, and labor saving of manufacturing work can be achieved. .

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A thin film magnetic head according to the present invention, T
An embodiment of a method for manufacturing a thin film product such as an FT (thin film transistor), a computer mounting board, and a semiconductor product will be sequentially described with reference to the drawings. Although a semiconductor manufacturing process will be mainly described here as an example, for example, a thin film magnetic head, T
The present invention is applicable to thin film process products other than semiconductors such as FT (thin film transistor) and computer mounting board. First, a thin film product such as a thin film magnetic head, a TFT (thin film transistor), a computer mounting substrate, and a semiconductor product according to the present invention is manufactured through the element process steps shown in FIG. That is, the element process steps include an annealing step,
Oxidation / diffusion process, CVD (Chemical Vapor Depositio)
n) process, PVD (Physical Vapor Deposition) process,
There are a photolithography process, an ion implantation process, a dry etching process, a wet etching process, and a characteristic inspection process. However, the thin film product according to the present invention is not manufactured with all of the above element process steps,
It is manufactured by a typical photolithography process, a film forming process including a CVD process or a PVD process, an etching process including a dry etching process or a wet etching process, and a characteristic inspection process. The photolithography process is equipped with photolithography manufacturing equipment, the film formation process is equipped with film formation manufacturing equipment, the etching process is equipped with etching manufacturing equipment, and the characteristic inspection process is equipped with various types of equipment. A characteristic inspection device is provided. That is, the manufacturing line for manufacturing the thin film product according to the present invention mainly comprises manufacturing equipment for photolithography, manufacturing equipment for film formation, manufacturing equipment for etching, a characteristic inspection device, and an object to be processed between them. It is comprised by the conveyance means which conveys a to-be-processed object. The present invention aims to prevent the occurrence of a large number of defects by stabilizing the quality by using the thin film product manufacturing management system shown in FIG. 2 when manufacturing the thin film product.

FIG. 2 shows a functional configuration of an embodiment of a thin film product manufacturing management system according to the present invention. The thin film product manufacturing management system has a database 21a, and an equipment work history management computer (equipment work history management calculation means) 21 for collecting work history of each manufacturing equipment for processing thin film products and a database 22a. An inspection result management computer (inspection result management calculation means) for collecting inspection results and product characteristics for evaluating thin film products 2
2, a database 23a, a product progress management computer (product progress management computing means) 23 for collecting process progress results from a thin film product manufacturing line, and a database 24.
a, a manufacturing condition management computer (manufacturing condition management calculation means) 24 that manages various manufacturing conditions set for manufacturing thin film products, and a database 25a. And a production / quality monitoring computer (production / quality monitoring computing means) 25 that performs quality / equipment monitoring and error warnings, and further performs search / calculation processing to investigate defective factors and yield hindrance factors. , An information network 20 which enables data communication among the computers (calculation means) 21, 22, 23, 24 and 25.

The production / quality monitoring computer 25 is connected to each computer 21, 22, 2 via the information network 20.
3 and 24, and is configured to be able to access the data of the databases 21a, 22a, 23a, and 24a managed by each computer. The computer 25 also temporarily stores (records) the collected data, and manages the input and output to and from the database 25a that stores (records) the occurrence data of the quality abnormality described in detail below. The manufacturing condition management computer 24 is a manufacturing process flow (corresponding to the X-axis in FIG. 4) corresponding to various kinds of products required for manufacturing products, which is input from each manufacturing condition input terminal 231 via the design network 29 ( In FIG. 4, the Y axis is shown.), Each process specification included in those manufacturing process flows (corresponding to 13 in FIG. 4), and equipment manufacturing conditions related to the equipment used (corresponding to 15 in FIG. 4).
In addition to collecting and classifying manufacturing process conditions including
It manages the input and output to and from the database 24a which stores and manages these data by associating them with a method described later.

The product progress management computer 23 is a control device for each facility required for product progress management within a large number of facilities (including a manufacturing facility and a product transportation system and a handling system) in a production line through a production network 28. A terminal device installed in association with each facility (the structure is as shown in FIG. 3. That is, the control device or the terminal device is a CPU.
3, a memory 32, an input means such as a keyboard 34, a mouse 35, a bar code reader 38 and an input pen 39, and a display means 36 such as a CRT. In the case of a control device, of course, it also controls the manufacturing equipment. ) 221a-22
1g ... through the production network 28, and also connected to the production / quality monitoring computer 25 through the information network 20. In the case of a terminal device, one terminal device may manage a plurality of facilities. Further, it can be applied to a case where a control device provided in equipment is used and a case where a plurality of equipment is controlled by one control device. That is, the control device provided in the facility also has the function of a normal terminal device. Then, the product progress management computer 23
A database 23 that collects production results and process progress information of products in a series of start-to-finish work input from each facility or on-site terminal devices 221a to 221g ...
Manages input and output to a. Specifically, as also shown in the figure, the product progress management computer 23 includes the production network 2 from each facility or the on-site terminal devices 221a to 221g.
The product type name (product name) manufactured through 8, the lot number, the manufacturing process performed and the facility number that identifies the facility used in the manufacturing process, the completion date and time of the manufacturing process, the number of processed products, etc. Are collected as product progress management information.

The inspection result management computer 22 has each inspection device (various inspection devices) or a terminal device installed in association with each inspection device via the inspection network 27 (as shown in FIG. 3). That is, the inspection device or the terminal device includes a CPU 31, a memory 32, an input means such as a keyboard 34, a mouse 35, a bar code reader 38 and an input pen 39, and a display means 36 such as a CRT.
In the case of the inspection device, the inspection processing of the inspection device is naturally performed. ) Or on-site terminal devices 211a to 211e ... through the inspection network 27, and similarly to the production / quality monitoring computer 25 through the information network 20. In the case of a terminal device, a plurality of inspection devices may be managed by one terminal device. It can also be applied to the case where a single processing apparatus processes a plurality of inspection apparatuses. Each of the above-mentioned inspection devices, for example, the film thickness and shape of the thin film material formed in the manufacturing process, processing dimensions, appearance characteristics,
The contents of defects and the number of occurrences are inspected. Further, the inspection result management computer 22 is provided with a quality inspection result (for example, formed in a manufacturing process) for each product type, lot, or process regarding products obtained from each inspection device or the terminal devices 211a to 211e ... Via the inspection network 27. It collects and classifies the film thickness and shape of thin film materials, processing dimensions, appearance characteristics, contents of defects, number of occurrences, etc., and manages the input and output to the database 22a that stores them. Various inspection results inspected by each inspection device and input from each inspection device or the terminal devices 211a to 211e through the inspection network 27 are, for example, the film thickness, shape, and processing dimension of the thin film material formed in the manufacturing process. , Appearance characteristics, content of failure, number of occurrences, etc., in the inspection result management computer 22, each inspection device or terminal device 211
are classified and managed according to the type name or lot number of the inspection target, the inspection process name, the date and time, which are input from a to 211e ...

The facility work history management computer 21 is associated with a control device of each manufacturing facility or each manufacturing facility required to manage the facility work history within a large number of manufacturing facilities that constitute a manufacturing line through the facility network 26. The installed terminal device (having a configuration as shown in FIG. 3. That is, the control device or the terminal device is a CPU 31, a memory 32, an input means such as a keyboard 34, a mouse 35, a bar code reader 38, an input pen 39, and the like. And a display means 36 such as a CRT, etc. Of course, in the case of the control device, it also controls the manufacturing equipment.) 201a to 201g ...
, And also to the production / quality monitoring computer 25 via the information network 20. In the case of a terminal device, a single terminal device may manage a plurality of manufacturing facilities. Further, the present invention can be applied to the case where the control device provided in the manufacturing equipment controls a plurality of manufacturing equipment with one control device. That is, the control device provided in the manufacturing facility also has the function of a normal terminal device. And each control device or terminal device 20 for each manufacturing facility
1a to 201g ... through the equipment network 26 to the equipment work history management computer 21 through the equipment work history data (for example, from the set value for each condition control parameter item of the manufacturing equipment or the consumption value of the used gas, chemical solution, etc.) Is)
In the facility work history management computer 21, for each manufacturing facility, the type name or lot number of the processing target, the manufacturing process name, the processing date and time, etc. input from each control device or terminal device 201a to 201g ... through the facility network 26. Is managed by connecting to.

Each control device or terminal device 201a to 201g ... Connected to the facility network 26 and each control device or terminal device 221a to 221g ... Connected to the production network 28 are the same control device or terminal device. Is often shown. That is, in the case of a manufacturing facility that executes element processes, it is connected to the facility network 26 and the production network 28. Each of the computers 21, 22, 23, 24, 25 has an internal memory 32a for storing (recording) a processing program and data as shown in FIG. 3, and an information processing device for processing data input according to the program ( A computer main body 30 having a CPU) 31, an external memory 32b, a network connection unit 33 for communicating with other computers, an input means including a keyboard 34, a mouse 35, etc. for inputting a command relating to data processing, and processing CR to display the result
And a display means 36 such as T. Further, as shown in FIG. 3, as an option, a bar code reader 38 and an input pen 39 are provided as input means, and a printer 37 for printing the processing result is provided as output means. Each computer 21, 2
2, 23, 24, and 25 specifically use information processing devices such as personal computers, workstations, and minicomputers. The information network 20 is realized by using, for example, a local area network (LAN).

The above computers (calculation means) 21, 2
2, 23, 24, and 25 may be configured by one or more computers (calculation means). In the present embodiment, a case will be described in which each of the computers 21, 22, 23, 24, and 25 is networked and configured, but in the present invention, for example, a case where each function is modularized and processed by one computer Is also applicable. Further, in the present embodiment, each computer 21, 22, 23, 24 and 25 is configured to have a database, but the present embodiment is not limited to this, and for example, one database and data server are provided, And each computer 2
The configuration may be such that 1, 22, 23, 24 and 25 access. In addition, each database 21a, 22a, 23
The data stored (recorded) in a, 24a, and 25a are classified by the above-mentioned respective code classes, related to each other, and managed by a relational database.

In the thin film product manufacturing management system according to the present invention, it is necessary to organically relate various manufacturing process conditions of the thin film product. It is each computer 21, 22, 2 that constitutes the manufacturing management system of the thin film product.
This is because it is necessary to organically relate various manufacturing process conditions of the thin film products processed in 3, 24 and 25. Therefore, for example, various manufacturing process conditions set in a wafer processing process (pre-process) for manufacturing a semiconductor product are linked to each other by using information such as lots, types, processes, and facilities (organically related to each other). ) Shows the basic concept for. That is, in FIG. 4, for example, a lot number or a product type name is listed in the X-axis direction, and each manufacturing process flow or each manufacturing process corresponding to the lot number and the product type name shown on the X-axis in the Y-axis direction. In the process flow, multiple process steps of any one element process group (ie only manufacturing steps belonging to any one element process group) such as only photolithography step, only oxidation / diffusion step, and only ion implantation step are listed. To do. Further, the Z-axis has a plurality of manufacturing facilities or inspections capable of realizing the process specifications (for example, process design, manufacturing standard or inspection standard) of each manufacturing process related by the X-axis and the Y-axis. List the equipment (inspection equipment) by positioning them. Therefore, in FIG.
The equipment that can realize the process specification 13 of the manufacturing process 12 of 1 is
One of the arbitrary equipments 15 which are related to each other like the equipment group list (list of usable equipments) 14 and selected from them.
It can be seen that the four manufacturing conditions can be captured in the relationship shown in FIG.

Therefore, each manufacturing (inspection) of each equipment
Conditions, for example, manufacturing conditions of each equipment for realizing the process specification 13 need to be defined in association with each of the related items represented by the X axis, Y axis, and Z axis in FIG. Next, in order to specifically associate various manufacturing process conditions of semiconductor products according to the above concept, "process code", "standard code", "facility code" set in the manufacturing control system of the thin film product according to the present invention. ], And "equipment condition number" will be described. For example, when attention is paid to a manufacturing process flow of a previous process for manufacturing a semiconductor product, a processing flow (manufacturing process flow) is constituted by a combination of the above-described element process group units. Therefore, the codes are set in association with the element process groups such as the photolithography process, the oxidation / diffusion process, and the ion implantation process described above.

FIG. 5 shows an example of classification of element process groups and an example of setting of identifiers in the pre-process of a semiconductor product. FIG.
As shown in, each element process group is classified into 9 types such as annealing, oxidation diffusion, CVD, PVD, photolithography, ion implantation, dry etching, wet etching, and characteristic inspection. Set. Of course, the classification and setting examples shown in FIG. 5 are not limited to these, and it goes without saying that classification and setting should be performed according to the target product, the application line environment, and the like. FIG. 6 shows respective setting examples of the “process code”, the “standard code”, the “facility code”, and the “facility condition number”. In FIG. 6, the “process code” is set by combining the identifiers hierarchically arranged in the order of the element process group, the main process, and the work process, and a unique “process code” is set for each manufacturing process. That is, the identifiers of the element process group xx, the main process yy, and the work process z may be configured by combining, for example, several digits of alphabetic characters AZ and several digits of 0-9.

Here, the main process is a further classification of the processing contents in each element process group shown in FIG. 5, for example, in the case of the oxidation / diffusion group "OX", surface oxidation, gate oxidation, interlayer An identifier is given to a manufacturing process such as oxidation. Further, the work process refers to a process in units of work steps corresponding to the pre-process, the main process, and the post-process in the main process, and is given an identifier. Therefore, in the present embodiment, lot or product unit (see FIG.
In the manufacturing process flow (manufacturing process flow 12 shown as the Y-axis in FIG. 4) in the product name or lot number 11) shown as the X-axis in FIG. The main process and work process in can be easily identified.

Next, the "standard code" is assigned to each manufacturing process flow (manufacturing process flow 12 shown as Y axis in FIG. 4) in a lot or product type (product name shown as X axis in FIG. 4 or lot number 11). The defined process specifications (for example, design standards, manufacturing standards, and manufacturing standards such as materials used, processing dimensions, processing shapes, processing characteristics, and inspection specifications) (indicated by 13 in FIG. 4) are described above. This is for subdividing in each element process group unit, and in the present embodiment, as the “standard code”, the identifier xx of the element process group and each process specification (manufacturing standard) in them (13 in FIG. 4). Number) aa
It is set in combination with a (3 digits of 0-9).

The "facility condition number" is for uniquely classifying various manufacturing conditions and inspection conditions of each facility in association with the process specifications (manufacturing standards). In the present embodiment, the "standard condition code" is used. “XXaaa” and “equipment code” nnn of each equipment are set in combination. Specifically, it may be composed of a combination of several digits of alphanumeric characters. This "equipment condition number" x
Since xaaann serves as an ID (identification number) / search key for manufacturing conditions, recipes, inspection conditions, etc. of each equipment, in the present embodiment, one manufacturing condition owned by the equipment is set for one “equipment condition number”. It is necessary to define each item in one format. In the manufacturing process of the thin film product according to the present invention, various processes can be performed by specifically setting the codes such as “process code”, “standard code”, “equipment code”, and “equipment condition number”. Names, process specifications, manufacturing / inspection equipment, and equipment manufacturing conditions can be uniquely classified.

As described above, various manufacturing process conditions of the thin film product according to the present invention are grasped by the relational concept as shown in FIG. 4, and organically linked and classified by the four kinds of codes. , Is a premise. As a result, the respective processes can be organically associated and performed in each of the computers 21, 22, 23, 24 and 25 constituting the thin film product manufacturing management system according to the present invention.
Next, the inspection item code and condition item code set for the thin film product manufacturing management system according to the present invention will be described. The quality monitoring warning calculator (quality monitoring warning calculating means) 25 and the like detect and warn the quality equipment abnormality described later.
In the countermeasure recording process, the inspection item code and the condition item code are set in order to collect and classify the inspection data and the facility work data collected from the manufacturing line in association with the inspection item and the condition item. Therefore, FIGS. 7 and 8 show setting examples of the above-mentioned “inspection item code” and “condition item code”, respectively.

As shown in FIG. 7, in the case of a semiconductor product, process materials include an insulating film, a conductor film, a photoresist, a substrate material, etc., which are themselves film thickness, line width, hole diameter, resistance, There are inspection items such as pattern displacement and unevenness. Therefore, in the present embodiment, an “inspection item code” is set in order to collect inspection data from the manufacturing line in association with the above-described inspection items. As shown in the example of FIG. 7, this “inspection item code” is a two digit alphabetic character from A to Z, 0 to
It consists of two numbers of 9 or a combination of both.

Similarly, the condition item of each equipment itself has a recipe number, processing time, condition control parameters 1 and 2, maintenance control parameters 1 and 2 as shown in the example of FIG. In order to collect the data in association with the condition data of, the “condition item code” as shown in FIG. 8 is set. By specifically setting the "inspection item code" and the "condition item code" of the equipment in this way and making them correspond to the collected data from the production line, it is possible to easily evaluate the production quality and equipment quality item by item. become. Therefore, by selecting a main monitoring item from these inspection items and condition items, it becomes possible to easily detect quality abnormalities and equipment abnormalities narrowed down based on these.

Next, a case where the appearance characteristic data of the product is collected from the manufacturing line will be described. In the inspection process of the manufacturing line, the appearance characteristics of the product substrate are often inspected, and in this case, in this embodiment, the contents of the appearance defect are classified as shown in FIG. 9 and FIG.
Is set. As shown in FIG. 9, the appearance defect content is related to the substrate material itself, the process condition, the manufacturing facility, the worker, and the work environment, so the identifier of the association source is set first. Next, since the appearance defect contents are qualitatively and apt to be diversified, in the present invention, for example, in the case of the "pattern missing" defect contents shown in Table 6, the association source identifier P
And the classification number mmm there are combined to give a "bad code"
Is set. Therefore, it is possible to clarify the content breakdown and ratio of appearance defects, the number of occurrences, the relationship with the related source, etc. by presetting the above "defect code" for each defect content and collecting it from the manufacturing line. . This contributes to making it possible to easily monitor quality defects in the appearance of the product and to more quantitatively grasp the tendency of occurrence rate of appearance defects by process or product type.

As shown in FIGS. 9 and 10, in the present embodiment, a code of the same type as the "defective code" is also used to set the level of pass / fail of the work result in each process. is there. Each of the classification methods and codes of the "process code", "standard code", "equipment code", "equipment condition number", "inspection item code", "condition item code", and "defective code" of the present invention described above The number of digits depends on the number of lots of the target product and production line, the number of product types, the method of grouping element processes, the quantity, the type of process name, the quantitative scale of manufacturing conditions, the number of manufacturing facilities, etc. The setting is flexible, and these setting examples are not limited to the present embodiment. In addition, the adoption of each code described above, for example, the name of the manufacturing process, the equipment name, the name of the inspection item, the name of the equipment condition items, etc. are not always uniquely named as a Japanese name, Because the character length is indefinite, it is difficult to use as an association key and it is not possible to efficiently store or search data using Japanese character strings as keys. Although the semiconductor pre-process has been described as an example here,
Needless to say, the above-described associating of manufacturing process conditions, classification methods, and the like are not limited to semiconductor manufacturing, and can also be applied to manufacturing technology of general industrial products.

First, the manufacturing conditions (corresponding in the relationship shown in FIG. 4) for manufacturing the thin film process product according to the present invention using the manufacturing line are manufactured from the terminal device 231 via the design network 29. It is input to the condition management computer 24 and constructed as a database 24a. That is,
In the manufacturing condition management computer 24, the product type (product name) or lot number (X axis in FIG. 4), manufacturing process flow (consisting of element processes) (Y axis in FIG. 4), each process specification (manufacturing standard) ( (Including inspection) (13 in Fig. 4)
Indicated by ), Manufacturing conditions / inspection conditions of each facility (manufacturing process conditions for each facility: based on product characteristics (film thickness, line width, line spacing, hole diameter, pattern deviation, unevenness amount, step amount, electrical characteristic value, etc.), etc. Control values for each manufacturing facility including usable manufacturing facilities, product characteristics (thickness, line width, line spacing, hole diameter, pattern deviation, unevenness amount, step amount, electrical characteristic value, etc.) specification value or management standard Value, product appearance (“appearance defect rate” such as pattern defects, foreign matter adhesion defects, etc., “number of foreign substances”)
Value or management reference value) (indicated by 15 in FIG. 4) is input from the terminal device 231 via the design network 29 and constructed as the database 24a. When the manufacturing condition management computer 24 constructs the database 24a, the "process code", "standard code", and "manufacturing condition number (inspection condition number)" shown in FIG. 6 are used, and the "inspection" shown in FIG. Item code "
Also, the “manufacturing condition item code of equipment” shown in FIG. 8 is used. The product name (product name) or lot number,
The manufacturing process flow, each process specification (manufacturing standard), and the manufacturing conditions / inspection conditions of each facility may be input to the manufacturing condition management computer 24 from the computer having the CAD information via the design network 29. Further, input means (including a recording medium) installed in the manufacturing condition management computer 24 for the type name (product name) or lot number, the manufacturing process flow, each process specification (manufacturing standard), and the manufacturing conditions / inspection conditions of each facility. You may input directly into the manufacturing condition management computer 24 using 34 and 35.

Next, the terminal device 201a installed on the manufacturing line for manufacturing the thin film process product according to the present invention.
~ 201g, 211a ~ 211e, 221a ~ 221g
From the equipment network 2 by manual input by workers, etc.
6, the facility work history management computer 21, the inspection result management computer 22, and the product progress management computer 23 through the inspection network 27 and the production network 28, respectively, and the above-mentioned facility work history data, quality inspection results, and product progress management information. A case of inputting each of the above will be described. It should be noted that the control device of the manufacturing equipment and the processing device 201a of the inspection device
~ 201g, 211a ~ 211e, 221a ~ 221g
To the facility work history management computer 21, the inspection result management computer 22, and the product progress management computer 23 through the facility network 26, the inspection network 27, and the production network 28, respectively, the facility work history data, the quality inspection result, and the product progress management. Obviously, each of the information may be entered automatically.

11, 12 and 13 show (1) QC inspection results such as film thickness, shape and processing dimensions of the thin film material, and (2) external appearance such as pattern defects and foreign matter adhesion defects on the product substrate surface. Inspection results, (3) work history data of the equipment used in the processing of the product, and the like, on-site terminal devices 201a to 201g, 211 arranged on the manufacturing line.
The input screen example and the work procedure when inputting from a to 211e and 221a to 221g are shown. Naturally, the equipment work history management computer 21, the inspection result management computer 22, and the product progress management computer 23 also have the configuration shown in FIG. 3, and therefore the terminal devices 201a to 201g, 211a to 211e, 221a.
Like 221g, it is displayed on the display means 36, and using the input means 34, 35, 38, 39, (1) QC inspection result, (2) appearance inspection result, (3) work history data of equipment, etc. You can enter the information.

Each terminal device 201a to 201 on the manufacturing site
g, 211a to 211e, and 221a to 221g are shown in FIG.
As shown in FIG. 1 as an input screen displayed on the display means 36, the common functions of the bulletin board 40a, the screen return 40b, and the screen forward 40c are provided. The bulletin board 40a is a function for the line worker or the like to receive a site instruction message from the manufacturing staff, the line manager or the like when necessary, and by designating this bulletin board button or icon 40a using the mouse 35 or the like, The production / quality monitoring computer 25 is operated directly via the information network 20 to read a contact instruction message (to be described later, for example, shown in FIG. 20) from the database 25a, and the information network 2
It can be received and displayed via 0. On the other hand, the functions of the screen return button or icon 40b and the screen forward button or icon 40c are
This is for handling the case of inputting the above-mentioned data for multiple processes and equipment described later in the same time zone. By switching the screen, processing results of multiple processes and equipment, that is, inspection results and equipment work history data, can be used as inspection results. It can be collected in the management computer 22 and the facility work history management computer 21.

Note that the screen of the QC inspection 41 in FIG. 11 indicates that the screen of the third page 40d is currently used in each of the terminal devices 211a to 211e. As described above, in the present embodiment, as a method of inputting using the display means and the input means in the field terminal device, one input terminal device arranged in the production line is always one facility or one process, one person per person. Even if it is not arranged, or even if one person is arranged, it is possible to flexibly cope with both. Now, referring to FIG. 11, the inspection work by the inspection device in the field is performed by the desired terminal device 21.
Select the input screen of the QC inspection 41 for 1a to 211e, and inspect the start ID data 42 of the lot number, product name, process name, work name, equipment used (manufacturing / inspection equipment), worker name. By reading the bar code added to the target product with the bar code reader 38, as shown in FIG.
For (process name, work name, equipment used (manufacturing / inspection equipment), use “process code”, “standard code”, “manufacturing condition number (inspection condition number)” to specify various manufacturing process conditions. Since they are related to each other, they can be automatically input by using the database 24a of the manufacturing condition management computer 24. The operator name can also be input by using the input means 34 such as a keyboard. By specifying the start button or the icon 43, the start of the work is started for the inspection result computer 22 via the inspection network 27. At this time, the inspection result calculator 22 automatically collects the start date and time.

Next, in the desired terminal devices 211a to 211e, various manufacturing process conditions are associated with each other by the "process code", "standard code", and "manufacturing condition number (inspection condition number)" as described above. Therefore, by using the database 24a of the manufacturing condition management computer 24, the inspection condition number xxaaann47 is displayed on the inspection result screen 46 shown in FIG.
Is output and the list of inspection items for input request (C line length [80
.About.90 .mu.m], C line width [40 to 45 .mu.m], TH hole diameter [50 to 55 .mu.m]) are also instructed (displayed) as shown in FIG. Therefore, in each of the terminal devices 211a to 211e, the inspection board number (inspection product number) and the measurement data at each inspection point are inspected via the inspection network 27 using the input means 34 such as a keyboard as shown in the example of FIG. Input to the management computer 22. The inspection board number can be input by reading the barcode attached to the inspection target product with the barcode reader 38. After inputting all the data, check and correct the input data with the check correction button or icon. At this time, the inspection standard (for the C line length, [80
~ 90 μm], and for the C line width [40 to 45 μm],
For data that exceeds [50 to 55 μm] for the TH hole diameter, a warning is displayed by changing the color of the input field 48, and if there is an input error, re-input is corrected. Next, the data is collected in the inspection result management computer 22 by the bookkeeping button or icon (record button or icon) in the figure. If there are multiple inspection boards, after specifying the plus button or icon 49 in the figure,
Repeat similar input work.

Then, desired terminal devices 211a to 211e
In the above, after the input of the inspection data, the inspection result management computer 22 is input with the inspection result management computer 22 using the input means 34 such as a keyboard after inputting the inspection sheet number, the inspection result (pass / fail), and the comment completion result data 44. By the icon 45, the input of information on a series of QC inspection operations to the inspection result management computer 22 is completed. Here again, the completion date and time is similarly automatically collected by the inspection result management computer 22.

In the QC inspection result input screen 46 of FIG. 11, in the case of other QC inspection processes, the contents of the inspection item list of the input request are changed, but the same input format of the table format is set. Therefore, the input screen of the QC inspection process has no process dependency. Note that in FIG. 11, the lot number, process name,
Start ID data 42 of work name, equipment used, worker name
The number of pieces to be inspected, the inspection result (pass / fail), and the comment completion data 44 are indispensable data for the production results and the process progress results, and are common to all processes, and the product progress through the production network 28. It is input to the management computer 23 and constructed as a database 23a. Next, the case of inputting the appearance inspection result from the desired terminal devices 211a to 211e to the inspection result calculator 22 via the inspection network 27 will be described using the input screen example shown in FIG. That is, as shown in FIG. 12, in the visual inspection work, after the input screen of the visual inspection 51 is selected and designated by the desired terminal devices 211a to 211e, the inspection result calculator 22 is designated by the same procedure as the QC inspection described above. Do it. That is, the operations at the start of construction and at the completion of construction are exactly the same as the input method of the QC inspection result. Therefore, only the work of inputting the visual inspection data will be described here.

The inspection condition number xxaaann53 is instructed (displayed) on the input screen 52 of the appearance inspection data shown in FIG. 12 in the desired terminal device 211a to 211e as described above. Therefore, the operator inputs the inspection board number (inspection product number) and the inspection surface (front / back) to the inspection result calculator 22 using the input means 34 such as a keyboard. Then, the inspection result calculator 22 displays the inspection condition number x
Manufacturing condition management computer 24 based on xaaann53
The in-plane location information and the site information are obtained from the database 24a held by the user, and the desired terminal devices 211a to 211e are received via the inspection network 27.
12 can be displayed on the input screen 52 of the appearance inspection data shown in FIG. Therefore, the desired terminal device 2
In 11a to 211e, the location where the appearance defect occurs is selected and designated from the in-plane locations shown in FIG. 12 such as D3. Next, the detailed location D30 is specified from the location position map diagram obtained by further dividing the occurrence location D3, and the failure occurrence location is input to the inspection result computer 22. In this case, if the detailed location is known by the coordinate position, the X and Y coordinates are directly input to the inspection result calculator 22 using the input means 34 such as a keyboard as shown in FIG.

Next, at the occurrence location D30, a site having an appearance defect is selected from the pull-down menu as shown in the figure like the wiring film 2, and the content of the defect is the same from the pull-down menu in the figure. Specify the number, and input the number of pieces and the necessity of repair, and record (store) in temporary memory. These series of input operations are performed at the occurrence point D3.
When there are a plurality of defective contents in 0, the part, defective contents, number, need for repair, and temporary entry are repeatedly input. On the other hand, if there is a defect occurrence location in another location on the same surface of the same board, the plus button or icon 5 in the figure
After designating 4, the input operation similar to the above is repeated from the selection of the in-board location position. Then, after inputting all the data of one board, the appearance characteristic data is collected for the inspection result computer 22 by designating the bookkeeping button or the icon 55 in the figure. Therefore, if there are multiple inspection boards, specify the plus button or icon 55 in the figure,
The same operation as above is repeated.

When the inspection results of the appearance characteristics are input to the inspection result calculator 22 from the desired terminal devices 211a to 211e as described above, the location of the defect occurrence site, the site, the content of the defect, the number of defects, etc., in this embodiment. By adopting the method of selecting and specifying, the input load is reduced. The location division map is set to correspond to the type or lot of the inspection board, and the other input fields are common. Therefore, the standardization of the input method is also attempted here.
By the way, since the various manufacturing process conditions are associated with each other by the “process code”, the “standard code”, and the “manufacturing condition number (inspection condition number)” as described above, the database 24a of the manufacturing condition management computer 24 is stored in the database 24a. It is possible to use it, and it is possible to adopt a method of selecting and specifying the location of the defect occurrence location, the part, the content of the defect, the number, etc. Moreover, the division map of the location is also set corresponding to the type or lot of the inspection board. It is possible to reduce the input load and standardize the input.

Also in FIG. 12, the start ID data 42 of the lot number, the process name, the work name, the facility name used, the worker name and the number of inspections, the inspection result (pass / fail), and the completion record data 44 of the comment are as follows. This data is indispensable for production results and process progress results, and is data common to all processes, and is input to the product progress management computer 23 via the production network 28 to be constructed as a database 23a. Next, the equipment work history data is converted into desired terminal devices 201a to 201g.
To collect from the equipment work history management computer 21. In FIG. 13, desired terminal devices 201a to
The example of the input screen of the equipment work history data in 201g is shown. As shown in FIG. 13, desired terminal devices 201a-2
The input of the equipment work history in 01g to the equipment work history management computer 21 is performed using the equipment work history screen 62 by selecting and designating the input screen of the manufacturing equipment 61 using the input means 35 such as a mouse as in the past. . However, in the case of equipment history, there is equipment capable of simultaneously processing (batch processing) a plurality of lots, and therefore this embodiment is adapted to handle such a case. That is, in the case of processing a plurality of lots, input means 34, 35, 38, 3 while designating the lot number and product type of each lot number and type name at the time of inputting the construction ID data of FIG.
9 is used for additional input, and then the process name, work name, equipment used, etc. can be input. Therefore, in the case of single lot processing, it goes without saying that designation of the plus button or icon 63 in the figure is unnecessary. Further, other input operations are the same as those in the case of the QC inspection result.
Input request condition item list (for example, Recipe No (Job
#), O ₂ gas pressure (MPa), O ₂ gas flow rate (l / mi
Although the contents of n), RF power (KW), and processing time (Min) are changed, the same input format as a tabular format is set.

Also in FIG. 13, the start ID data 42 of the lot number, the process name, the work name, the equipment name, and the worker name, the number of processed sheets, the work result (pass / fail), and the completion record data 44 of the comment are as follows. This data is indispensable for production results and process progress results, and is data common to all processes, and is input to the product progress management computer 23 via the production network 28 to be constructed as a database 23a. FIG.
The number of processed sheets is 23 and the work result (pass / fail) is G101 (granted by the code shown in FIG. 10) as the completion record data 44. As described above, the terminal devices 201a to 201g, 211 installed in the manufacturing line
From a to 211e and 221a to 221g, the equipment work history management computer 21, by inputting (1) production performance and process progress performance, (2) product QC inspection characteristics, (3) appearance characteristics, (4) equipment work history, When collecting to the inspection result management computer 22 and the product progress management computer 23, a standard input format that does not depend on the input data check function and product type, process, and facility is provided. . Further, in the present embodiment, since it is possible to collect the easy-to-understand results without input errors and data leakage, it is possible to smoothly expand the application process, for example, a thin film magnetic head, a TFT.
(Thin film transistor), computer mounting board, semiconductor, and any other thin film product.

The above (1) production results and process progress results, (2) product QC inspection characteristics, (3) appearance characteristics,
(4) The work history of the equipment passes through the networks 26, 27, 28 shown in FIG.
Each database 21 managed by each of 2 and 23
It is classified and stored in a, 22a, and 23a. On the other hand, each of the computers 21, 22, and 23 has a control device 201 for manufacturing equipment.
a to 201g, 221a to 221g and the processing devices 211a to 211e of the inspection device to the networks 26 and 2 respectively.
It is obvious that the same input as above can be applied to the case of collecting directly via 7, 28.

Next, the production / quality monitoring computer 25 produces /
A method for determining a quality equipment abnormality, a warning method, a countermeasure recording method, and the like for quality control (production / quality monitoring processing) will be described in order below. First, a production line manager, a technical staff, or the like uses the production / quality monitoring computer 25 shown in FIG. 2 to monitor the production line in advance (consisting of product types or lots, processes, equipment) and monitoring items. (Equipment condition items and inspection items defined by the manufacturing conditions and inspection conditions of each facility), the monitoring period (monitoring processing data period, that is, the range), etc. are displayed on the display unit 36, and the input unit 3 is displayed.
It is set by inputting using 4, 35, 38, and 39. Specifically, the production / quality monitoring computer 25 monitors the product type name or lot number to be monitored for the manufacturing line received from the database 24a built in the manufacturing condition management computer 24 via the information network 20, the manufacturing process, and the inspection. The process and equipment are designated by using the input means 34, 35, 38, 39 while displaying the screen on the display means 36, and the monitoring items there (the equipment condition items defined by the manufacturing conditions and inspection conditions of each equipment and Inspection item), monitoring period (monitoring processing data period, that is, its range)
Is received from the database 24a via the information network 20 and prepared, and stored as management (judgment) reference data 801 (25a) shown in FIG. That is, the production / quality monitoring computer 25 can prepare a monitoring target for the manufacturing line, a monitoring item on the manufacturing line, a monitoring period, etc. by using a search key or the like. Further, the production / quality monitoring computer 25 uses the manufacturing condition management computer 24 to specify each designated product type or lot, each process,
Specific specification values or management reference values (set as manufacturing conditions and inspection conditions for each facility) in each monitoring item of the facility are also collected via the information network 20 and managed as shown in FIG. Judgment) The database is stored as a reference database 801 (25a), and is managed (searched / calculated) based on the stored management reference database 801 (25a). As described above, the monitoring target (consisting of product type or lot, process, and equipment) for the manufacturing line stored in the management standard database 801 (25a), the monitoring item on the manufacturing line (manufacturing condition and inspection condition of each equipment, The condition items and inspection items of the defined equipment), the monitoring period (monitoring processing data period, that is, its range), and the like are the units of abnormality determination described below. That is, at least by product type or lot unit (may be a product unit), and with respect to the specified process (including the case of multiple processes) and the specified equipment, the condition items and inspection of the specified equipment are performed. For the item, for the desired monitoring period (may be always), the production / quality monitoring computer 25 makes an abnormality determination for the monitoring target related to the abnormality determination,
It is sufficient to manage the countermeasure records and the like, including the investigation of warnings, defective factors and yield impediment factors.

FIG. 14 shows a specific example of the monitoring target, the monitoring item, and the abnormality judging method relating to the abnormality judgment managed (monitoring processing) by the production / quality monitoring computer 25. That is, in FIG. 14, (1) product characteristics are set as monitoring targets for abnormality determination,
(2) Product appearance, (3) Manufacturing equipment, (4) Redo work increasing process, (5) Redo work frequent lot are taken up. Also, as the monitoring items related to each abnormality determination, the examples shown in the figure are set. That is, in the case of (1) product characteristics as the monitoring target for abnormality determination,
Monitoring items related to abnormality determination include “film thickness, line width, line interval, hole diameter, pattern deviation, unevenness amount, both steps, electrical characteristic value, and the like”. In addition, in the case of (2) product appearance as the monitoring target related to abnormality determination, the monitoring items related to abnormality determination include "a defective appearance rate such as a pattern defect and a foreign matter adhesion defect" and "the number of foreign matter". Further, in the case of (3) manufacturing equipment as a monitoring target related to abnormality determination, there are “condition control parameters, maintenance control parameters, number of times / time of use, etc.” as monitoring items regarding abnormality determination. Also,
As a monitoring target for abnormality determination (4) In the case of a redone work increasing process, as a monitoring item for abnormality determination,
There are "repair frequency / score, time, re-input frequency, duplicate frequency, etc." Also, in the case of (5) lots of re-work frequent occurrences as an object to be monitored regarding abnormality determination, there is "a direct rate" in which attention is paid to the number of overlapping steps, the number of additional processing steps, etc. as an item to be monitored regarding abnormality determination.

As the abnormality judging method managed (monitoring processing) by the production / quality monitoring computer 25, for example, three kinds of judgment patterns of A, B and C shown in FIG. 14 are used. By the way, when the pattern A exceeds the upper limit value or the lower limit value of the management (judgment) reference data, the pattern B has the data managed (judgment) with respect to the central value of the management (judgment) reference data.
Pattern C is a method of determining as abnormal when the data is continuously deviated by more than the reference data and the data is inclined continuously by more than the management (determination) reference data. In any of the cases where the abnormality monitoring target is (1) product characteristics, (2) product appearance, and (3) manufacturing equipment, any of patterns A, B, and C is determined to be abnormal. When the abnormality monitoring target is (4) the redone work increasing step, it is determined as abnormal in the case of pattern C. When the abnormality monitoring target is (5) a lot where rework is frequently performed, it is determined to be abnormal in the case of pattern A.

That is, the production / quality monitoring computer 25 is prepared in the database 25a at least in units of product types or lots (or in units of products), and also in a specified process (including a case where a plurality of processes are included). Database 22a regarding the inspection result and the like built in the inspection result management computer 22 for a desired monitoring period (may be always) for the specified equipment condition item and inspection item for the specified equipment, From the database 21a regarding the work results (including maintenance) constructed in the equipment work history management computer 21 and the database 23a regarding the completion work date and time, the number of processes / the number of completion constructed in the product progress management computer 23 Data of monitoring items are collected and the history database (inspection Result, the work results) 802 (25a)
Store as. And production / quality monitoring computer 25
Evaluates the collected monitoring item data relating to abnormality determination by the abnormality determination method, and determines the presence or absence of abnormality. Note that, in FIG. 14, the hatching unit 71, when inputting data from the manufacturing line as described above, uses the terminal devices 211a to 211e as already described with reference to FIG.
It is also a function that is checked in.

The production / quality monitoring computer 25 mainly performs abnormality detection processing (abnormality determination processing), list of unmeasured abnormality, warning display, and unified management of countermeasure records. Therefore, the production / quality monitoring computer 25 mainly performs any of the processes of abnormality detection → warning → countermeasure recording in a predetermined time period. That is, the production / quality monitoring computer 25 first performs an abnormality detection process (shown in FIG. 15), and excludes from the warning targets those abnormal results that have already been warned and whose countermeasure processing has been completed. The abnormality result, which has already been warned but not yet taken, is combined with the newly discovered abnormality and stored in the history data file 804 (25a) for graph output shown in FIG. Next, the production / quality monitoring computer 25 operates as an engine so as to immediately display a warning in real time following the above abnormality detection processing. On the other hand, the computers 21, 22, 23, and 24 are for answering user requests at any time zone, and therefore, in any case, they are received from the production / quality monitoring computer 25 via the information network 20 by remote operation. As a result, a warning can be displayed on the display means (CRT) 36. In addition, computers 21, 22, 23, 2
A warning can be displayed on the display means (CRT) 36 of the terminal devices 201, 211, 221 connected to the terminal 4.

Regarding the record of countermeasures, not only the production / quality monitoring computer 25 but also the computers 21, 22, 23, 2
Any of the four can be performed by remote operation, and the user can use any of the computers 21 to 25 at any time. However, the processing of the countermeasure record is assumed to be performed by the production / quality monitoring computer 25 having the database 25a.

Next, a processing algorithm such as abnormality detection (abnormality determination) processed by the production / quality monitoring computer 25 will be specifically described with reference to FIG. In FIG. 15, in the production / quality monitoring computer 25, a process to be particularly monitored is specified, and abnormality detection (abnormality determination), warning processing,
The following shows the case where countermeasure records are recorded. In FIG. 15, the production / quality monitoring computer 25 first sets the management standard database 80.
From 1 to read the monitoring target (product or lot, process, equipment) for the manufacturing line including the process to be monitored, the monitoring item on the manufacturing line, the monitoring period, the specification value or management reference value for each monitoring item, the search key, etc. Then, the inspection result of each monitoring item corresponding to them, the data of the equipment work history, the process progress, etc. are stored in the database 22a of the inspection result management computer 22 and the database of the equipment work history management computer 21 shown in FIG. 21a, the inspection result, the work result, etc. are collected from the database 23a of the product progress management computer 23 via the information network 20 and prepared in the history database 802 (25a) (step 8).
1). Next, the production / quality monitoring computer 25 sets the monitoring (inspection) item in the specified (designated) desired monitoring process, the specification value or the management reference value in the monitoring item, and the collected data related thereto as the management standard. Database 801 (25a), provenance database 802 (2
5a) is read (step 82). Therefore, the production / quality monitoring computer 25 determines the presence / absence of a quality abnormality by any of the above-described abnormality determination methods shown in FIG. 14 from the specification value or management reference value in the above-mentioned monitoring item and the collected data (step 83). ). If it is determined that there is an abnormality, the production / quality monitoring computer 25 determines whether the abnormality information has already been warned or has the same content as that for which countermeasures have been taken. Detection from the database 803 (25a) for countermeasures
The warning abnormal data is read (step 84). Next, the production / quality monitoring computer 25 determines whether or not it is a new abnormality by comparing the content of the abnormal data detected this time with the content of the abnormality already warned (step 85). Specifically, process, equipment, product name, monitoring (inspection)
When the data of the item and the content of the abnormality are the same as the information determined to be abnormal in step 83 and the abnormality data read from the warning / countermeasure database 803, respectively,
It is determined that it is the same as the already-warned data, and if different, it is determined as a new abnormality. As a result, when the production / quality monitoring computer 25 is determined to be a new abnormality, each data item is added and recorded in each data item of the warning / countermeasure database 803 (25a) (step 86). After that, the production / quality monitoring computer 25 displays each collected data as a graph regardless of whether or not there is an abnormality. Therefore, the production / quality monitoring computer 25 performs a predetermined processing process and writes it in the graph output file 804 (step 87). Finally, the production / quality monitoring computer 25 uses the management standard database 801.
It is determined whether or not the specified (designated) process to be monitored remains in the process, and if there is still, the process returns to the data reading step 82 of the monitoring process, and if there is not, the abnormality detection process ends (step 88). ).

As described above, the production / quality monitoring computer 25 is configured not to record all the detected abnormal data as warning data, but to additionally record only new abnormal data. This is to prevent duplicate management of warning contents. Further, since the detection function in the production / quality monitoring computer 25 is activated by a timer at a predetermined time interval or at a fixed time in the morning, daytime, evening, and night, it is not necessary to manually activate the system by the user. Further, in the production / quality monitoring computer 25, it is needless to say that the process, equipment, monitoring items and the like necessary for abnormality detection can be flexibly set according to the need of the manufacturing line. Next, a processing algorithm for the abnormality warning and the like processed by the production / quality monitoring computer 25 will be specifically described with reference to FIG. In the production / quality monitoring computer 25, a warning countermeasure database 803
From (25a), information about one abnormal data, that is, both warning data and countermeasure recording data are read (step 91). The production / quality monitoring computer 25 determines whether or not the abnormal data is not yet taken as a countermeasure, based on whether the countermeasure date and time, the countermeasure person, the main cause, and the countermeasure content in the countermeasure recording data described later are blank ( Step 92). If the content is blank, it is determined that no countermeasure is taken, and the warning data is temporarily stored (step 93). Further, the production / quality monitoring computer 25 determines whether or not there is unresolved abnormal data, that is, warning data in the warning database 803 (step 94), and if there is warning data, step 91. Return to.

In this way, the production / quality monitoring computer 2
In the process of 5, the unmeasured abnormal data is listed in advance prior to the warning. After the completion of the listing, the production / quality monitoring computer 25 acts as an engine so as to display all of the unmeasured abnormality data on the screen in a predetermined format including a graph as described later. Then, the production / quality monitoring computer 25 transmits all of the unmeasured abnormality data to the desired computer 21-24 or the terminal device via the information network 20 by remote operation, and the production / quality monitoring computer 25 sends the desired computer 21-24 or the terminal device. Display means (CR
(T) is displayed on the screen of 36 to specifically warn each person involved in the production line about the occurrence of the abnormality and its content (step 9).
5).

The production / quality monitoring computer 25 continues until the desired computer 21 to 24 or the terminal device obtains confirmation of the confirmation of the warning content from the person concerned by operating the release button or the icon 113 shown in FIG. 18, for example. The abnormality warning process is performed, and when the confirmation is obtained, the abnormality warning process ends (step 96). Therefore, a display example of the abnormality warning screen in step 95 is collectively shown in FIGS. As shown in FIG. 17, in the quality monitoring warning process performed by the production / quality monitoring computer 25,
It has the main functions of the quality monitor 101, the contact instruction 108, and the countermeasure record 109. Therefore, by selecting those start-up buttons or the icons 101, 108, and 109 as necessary, the measures relating to quality monitoring, contact instruction, and countermeasure recording are specifically executed. In the present embodiment, by designating the quality monitoring button or the icon 101, the content of the abnormality detected up to that point and not yet taken countermeasures is partially discolored by being linked to the lot, the process, and the equipment, as in the example shown in FIG. (By color) and warn. In addition, vertical and horizontal scroll bars 100a and 100b are provided to enable confirmation by scrolling the screen in order to deal with the case where the entire warning content cannot be output on one screen.

In FIG. 17, the abnormal places 102, 10
Five points 4, 105, 106, 107 indicate that there are trend abnormalities, appearance abnormalities, equipment abnormalities, increase in rework work, and lots of rework work in each process and product type in the drawing. In the present embodiment, the details of the undetected abnormality detected on the manufacturing line and the location (main process) of the abnormality can be seen at a glance. For example, when the abnormality occurrence process 102 is selected and designated, a more detailed work process in the X3 process is shown here as shown from the right side of the figure, and it is indicated that the x304 process 103 therein is abnormal. Therefore, if this x304 step is further specified, the specific abnormality content is the ΔΔΔ size shown in FIG.
Is displayed as a color change (by color) to warn. Note that in FIG. 18, since all the data collected and evaluated in the x304 process are displayed at the same time, the enlargement button or icon 1
It is also easy to enlarge the details of each graph by using 12 and the cancel button or the icon 113 and cancel the display color to see the graph.

Therefore, FIG. 19 shows an example in which the graph of the ΔΔΔ size is enlarged and displayed. From the display result of FIG. 19, it can be clearly understood that the abnormality content is a phenomenon in which the dimension data is continuously inclined (C pattern in FIG. 14) as indicated by the arrow. Therefore, in the present invention, it is easy to grasp the details of the abnormality in more detail, as in the example of FIG.
It is also easy to return to the screen shown in FIG. 18 by designating the screen release button or the icon 121. In the same manner, the other abnormal place 104, 105, 106, 10
With respect to No. 7 as well, in the present embodiment, a system showing details in stages is configured. That is, the production / quality monitoring computer 25
Searches the display means (CRT) 36 so that the association display method and the stepwise detailed display method can be adopted.
Since the arithmetic processing is performed, the location of the abnormality can be associated with each process and more specifically and easily confirmed. Further, in the above-mentioned quality monitoring warning processing in the production / quality monitoring computer 25, the “process code”, “equipment code”, “inspection item code”, “condition item code”, etc. which are associated and standardized as described above are used. Therefore, the organic relationship of each data becomes clear.

On the other hand, when no abnormality occurs, the screen example shown in FIG. 17 can be used as a quality monitoring version, and the output examples shown in FIGS. 18 and 19 are used for daily confirmation of each management data. Of course you can. Therefore, the points of the abnormality warning method according to the present embodiment are summarized as follows. (1) An effective and timely abnormality warning can be performed by activating the abnormality detection processing with a timer a necessary number of times in a necessary time period and simultaneously issuing an abnormality warning. This greatly contributes to early detection of abnormal potential in the production line and prevention of yield reduction due to opportunity loss. (2) Since the location and contents of the abnormality are displayed in an easy-to-understand manner as in the example shown in FIG. 17, each related department is clear, which greatly contributes to improving the mobility of the manufacturing line such as countermeasures and review work. (3) In the warning process, the warning countermeasure database 8
Since 03 is permanently installed, regardless of whether the date and time of abnormality detection is old or new, the details of uncorrected abnormality will be followed until corrective action is taken. become able to.

Next, a method in which the production / quality monitoring computer 25 mainly processes to support the instruction to contact the manufacturing line will be described with reference to FIGS. 20 and 21. Display means 3 shown in FIG.
As shown in the display screen 6 of FIG. 6, the contact instruction procedure is performed sequentially after the contact instruction button or icon 108 is selected and designated, password check, message creation, output destination designation, and transfer are performed. Therefore, a method of designating the message creation button 131 to create a contact message will be described. With the create button 131, the message contents and the history that have been instructed so far are output as shown in FIG. Therefore, in order to additionally create a new instruction message, a new message 172 as shown in the example of FIG. After that, the message range of the contact instruction is designated by the cursor as in the message 172, determined by selecting the create & confirm button or icon 133, and further registered in the present system by the register button or icon 134. If the user cancels the message range, the creation & determination, and the registration operation, the cancel button or icon 135 in the figure is operated each time. As described above, message creation, registration, and designation of the output destination can be performed by any of the computers 21, 22, 23, 24, and 25. However, it goes without saying that the operation computer may be fixed to any of the above in order to avoid confusion in the operation or operation of the manufacturing line.

FIG. 21 shows an example of a selection designation screen for outputting a contact message to each of the input terminal devices 201, 211, 221 on the manufacturing line. In the example of FIG. 21, the terminal device # 21
It shows the case of outputting only to. However, as shown in the figure, it is possible to collectively specify the transfer not only to the individual terminals but also to the terminal devices for each process or for the whole manufacturing line as a whole.

As described above, in the present embodiment, it is easy to support thorough instruction to contact the manufacturing line. It is needless to say that this contact message can be read as necessary by designating the bulletin board button 40a on the on-site terminal devices 201, 211, 221 of FIGS.

Next, with reference to FIGS. 22 and 23, a support method will be described with reference to FIG. 22 and FIG. The countermeasure recording process performed in this embodiment is arbitrarily performed using the production / quality monitoring computer 25.

As shown in FIG. 22, when the countermeasure recording button 109 is designated from any one of the computers 21 to 25, the production / quality monitoring computer 25 selects the warning database 803 shown in FIG. List all of the abnormal detection data that is a countermeasure, and use the computers 21-2.
22 is displayed on the screen in a table format as shown in FIG. Therefore, with respect to the above-mentioned uncorrected abnormality content, the related staff member or the like performs a horizontal scroll operation on the screen, and inputs the main cause 161 and countermeasure content 161 from any of the computers 21 to 25 in response to the detected abnormality as shown in FIG. To do. After checking the countermeasures, the record button or icon 16 in the figure is displayed.
2, the countermeasure data 161 is recorded in the warning database 803 (25a) of the computer 25. That is, as in the case of the contact instruction, as shown in FIG. 23, the main cause and the content 161 of the countermeasure can be input from any of the computers 21 to 25 in response to the detection abnormality, and these terminal devices 201, 211, 221 can be input. The content of the detected abnormality is displayed on the display means of the terminal device 201, 211,
Input at 221.

With such a countermeasure recording method, an unmeasurable abnormality is displayed each time this function is activated, so that the person concerned can be followed until countermeasures are taken. FIG. 2
Since all the abnormality countermeasure documents up to that time are output by the all record display button 163 of 3, the technical know-how thereof is widely used to prevent recurrence.

Further, by selecting and designating the number-of-items breakdown button 164 in the same figure, in the present embodiment, the number of occurrences of the process, equipment, item, etc. of the detected abnormality content is output as a graph, so It is easy to quantitatively grasp the tendency, frequency of occurrence, and breakdown of all abnormal contents. According to the embodiment of the present invention described above, the following effects can be obtained.

(1) Since each identifier such as a process code, a standard code, and an equipment code is uniquely set in association with various manufacturing process conditions of a thin film process product, for example, one specific manufacturing condition can be easily searched. That is, it is possible to efficiently create the same condition and prevent duplication of management. (2) For example, the respective identifiers of (1) above are specifically set in the manufacturing process conditions of semiconductors, thin film magnetic heads, TFTs (thin film transistors), computer mounting boards, etc., and further inspection item codes, condition item codes, defects By setting each code uniquely, it becomes easy to manage organic relationships such as various process conditions, collected data, and monitoring items.

(3) Equipment work history management means for collecting work history of each equipment, inspection result management means for collecting and managing characteristic inspection results of products, and products for collecting work records and process progress records on the production line Since it has a progress management means, a manufacturing condition management means for managing various manufacturing conditions for manufacturing a product, and a quality monitoring warning means for investigating a defect occurrence and a yield impediment factor, the quality abnormality in the manufacturing line can be detected at an early stage. Discovery,
It becomes possible to efficiently accumulate know-how on measures to prevent recurrence. (4) When collecting the production performance, process progress performance, product inspection characteristics, appearance characteristics, and equipment work history from the manufacturing line by manual input, input data check function, product type, process,
Since a standard input format that does not depend on equipment is provided, it is possible to collect easy-to-understand results without input errors or data leakage. (5) In addition to the method of comparing with the process control reference value (upper and lower limit values) as a method for detecting quality abnormality, continuous deviation of data,
Since it is judged even by inclination and the result is visually alerted by associating it with lots, product types, processes, equipment, etc., it is possible to immediately check the location of an abnormality and it is easy to grasp the signs that trend trends have been captured. It becomes possible to prevent defects in advance. Therefore, actions and work that lead to the optimization of conditions and countermeasures by related parties become efficient.

(6) In order to accumulate and manage warning contents of abnormalities and countermeasure records thereof, not only follow-up of unmeasured abnormalities but also know-how related to recurrence prevention are widely shared, utilized and handed down among related parties. Like (7) Processes such as abnormality detection, warning, and countermeasure recording can be set at the required timings, and each inspection item and control reference value for abnormality detection can be set flexibly, so according to the needs of the manufacturing line. It can be applied and operated smoothly.

[0076]

According to the present invention, IC (integrated circuit), LS
Manufacturing of thin film process products such as I (large-scale integrated circuit), thin film magnetic head, TFT (thin film transistor), and computer mounting substrate is becoming more and more complicated and requires hundreds of processes due to recent high integration and fine processing technology. Even if it becomes a huge process, the manufacturing period is prolonged, and the management man-hours in the manufacturing process are increased, the product inspection data in the desired manufacturing process of the manufacturing line and the work data in the desired manufacturing equipment are constantly monitored to produce products. By efficiently evaluating the quality or characteristics of the product and the manufacturing conditions of the manufacturing equipment and feeding it back to the manufacturing line efficiently, the cause of the defect and its countermeasure can be executed with high reliability and easily. It is possible to manufacture products with excellent quality or characteristics at a high yield by compressing variations in quality or characteristics and preventing the occurrence of large numbers of defects. There is an effect that can be done.

Further, according to the present invention, even if a new product is started up early or a small number of products are produced in a large variety, the cause of the defect and its countermeasure can be executed with high reliability and easily. As a result, products having excellent quality or characteristics can be manufactured with a high yield, and there is an effect that efficiency, rationalization, and labor saving of manufacturing work can be achieved.

Further, according to the present invention, it becomes possible to automatically warn each of the product quality in the manufacturing line and the trend variation monitoring of the equipment and the abnormality detection result in association with the lot, product type, process, equipment and the like. As a result, the cause of failure and its countermeasure can be easily executed with high reliability, and as a result, products with excellent quality or characteristics can be manufactured with high yield, and the efficiency of manufacturing work can be improved. The effect that rationalization, labor saving, etc. can be aimed at is produced.

Further, according to the present invention, by accumulating and managing the countermeasure record for the detected abnormality content, it is possible to easily accumulate the know-how for following the unmeasurable abnormality and preventing the recurrence, and as a result, to investigate the cause of the defect. And its countermeasures can be executed with high reliability and easily, and as a result, products with excellent quality or characteristics can be manufactured with high yield, aiming to improve the efficiency, rationalization, labor saving of manufacturing work, etc. There is an effect that can be.

[Brief description of drawings]

FIG. 1 is a diagram showing representative process steps for manufacturing a thin film process product according to the present invention.

FIG. 2 is a mechanism configuration diagram showing an embodiment of a production management calculation system according to the present invention.

FIG. 3 is a hardware configuration diagram showing an embodiment of the computer and the terminal device shown in FIG.

FIG. 4 is a schematic diagram showing a basic concept for relating manufacturing conditions (manufacturing process conditions) of equipment according to the present invention.

FIG. 5 is a diagram showing a classification example of element process groups and a setting example of identifiers corresponding to them in a wafer processing step when manufacturing a thin film process product such as a semiconductor according to the present invention.

FIG. 6 is a diagram showing a setting example of a “process code”, a “standard code”, and a “facility code” that correlate the manufacturing conditions (manufacturing process conditions) of the equipment according to the present invention.

FIG. 7 is a diagram showing an example in which inspection item codes are set corresponding to inspection items in the quality inspection according to the present invention.

FIG. 8 is a diagram showing an example in which condition item codes are set corresponding to manufacturing condition items of equipment according to the present invention.

FIG. 9 is a diagram showing a setting example of an associated destination of defective contents and an identifier for classifying pass / fail / pass according to the present invention.

FIG. 10 is a diagram showing a setting example of a defect code for identifying the appearance defect content and the good level of the product according to the present invention.

11 shows an embodiment of a standardized screen displayed on a display unit for inputting inspection data and the like in QC inspection from a computer or terminal device for inspection result management and product progress management shown in FIG. It is a figure.

12 shows an embodiment of a standardized screen displayed on display means for inputting inspection data and the like in appearance inspection from a computer or terminal device for inspection result management and product progress management shown in FIG. It is a figure.

FIG. 13 shows an embodiment of a standardized screen displayed on display means for inputting work data and the like in manufacturing equipment from a computer or terminal device for equipment work history management and product progress management shown in FIG. FIG.

FIG. 14 is a diagram showing an embodiment of an abnormality monitoring target to be processed, an abnormality monitoring item (inspection item, a manufacturing condition item of manufacturing equipment), an abnormality determination, etc. in the production / quality monitoring computer according to the present invention. is there.

FIG. 15 is a flow chart showing an embodiment of a detection processing algorithm for the quality of the product to be processed and the abnormality of the manufacturing facility in the production / quality monitoring computer or the like according to the present invention.

FIG. 16 is a flowchart showing an embodiment of an abnormality warning processing algorithm to be processed in the production / quality monitoring computer or the like according to the present invention.

FIG. 17 is one example of a typical display screen in the case where the computer or the terminal device according to the present invention positions and warns the abnormality content detected in the quality monitoring in the production / quality monitoring computer or the like in the process or facility. It is a figure which shows the form of.

FIG. 18 is an example of an output screen showing, in the computer or the terminal device according to the present invention, which data specifically indicates the content of the quality abnormality of the process warned in the quality monitoring in the production / quality monitoring computer or the like. It is a figure which shows the form of.

FIG. 19 is an implementation of an output screen showing the details of the abnormality (dimension value transition diagram) detected in quality monitoring in a production / quality monitoring computer or the like in the computer or terminal device according to the present invention in further detail It is a figure which shows the form of.

FIG. 20 is a diagram showing an embodiment in which a message for instructing a bulletin board on a manufacturing line is created in a computer or the like according to the present invention.

FIG. 21 is a diagram showing an embodiment of a screen for designating an output destination for transmitting an instruction message to a manufacturing site in the computer or the like according to the present invention.

FIG. 22 is a diagram showing an embodiment of a screen displaying a list of abnormal contents that have been detected / warned and have not yet been taken countermeasures in the computer or the like according to the present invention.

FIG. 23 is a diagram showing an embodiment of a screen for inputting a countermeasure record of uncorrected abnormality contents in the computer or the like according to the present invention.

[Explanation of symbols]

11 ... Arbitrary product type name or lot number, 12 ... Main process and work process of arbitrary manufacturing process or element process group in manufacturing process flow, 13 ... Process specification (manufacturing standard) defined in arbitrary manufacturing process, 14 …
Multiple equipment groups that can be used to realize process specifications, 15 ... Manufacturing conditions for arbitrary equipment that realizes process specifications, 21, 21a ...
Computer for facility work history management and its database, 22,
22a ... inspection result management computer and its database, 2
3, 23a ... Product progress management computer and its database, 24, 24a ... Manufacturing condition management computer and its database, 22, 22a ... Production / quality monitoring computer and its database, 20 ... Information network, 26 ... Facility network, 27 ... Inspection network, 28 ... Production network, 29 ... Design network, 30 ... Computer main body, 31 ... Information processing device (CPU), 32a ... Internal memory, 32b ... External memory, 33 ... Network connection unit,
34 ... Keyboard (input means), 35 ... Mouse (input means), 36 ... Display means (CRT), 37 ... Printer (output means), 38 ... Bar code reader (input means), 3
9 ... Input pen (input means), 40a ... Bulletin board selection button or icon, 40b ... Return button or icon of input screen, 40c ... Forward button or icon of input screen, 40d ... Input screen number (page number) currently displayed ), 41 ... QC inspection result input screen, 42 ... Start of construction data input section, 43 ... Start of construction button or icon, 44 ... Start of construction data input section, 45 ... Start of construction (completion) button or icon, 46 ... QC inspection result data input part, 47 ... QC inspection condition number, 48 ... Abnormal value of input data pointed out by input check function, 49 ... Add button or icon for adding inspection board, 5
Reference numeral 1 ... Appearance inspection result input screen, 52 ... Appearance inspection result data input section, 53 ... Appearance inspection condition number, 54 ... Data addition button or icon, 55 ... Add button or icon for adding inspection board, 61 ... Work history input screen of manufacturing equipment, 62 ... Equipment work history data input section, 6
3 ... Add button or icon when adding a processing lot (equipment capable of batch processing), 71 ... Input data check (abnormality determination) method, 100a ... Horizontal scroll bar, 100b ... Vertical scroll bar, 101 ... Quality monitoring process Start button or icon, 102 ... warning of a main process abnormally detected in the QC inspection result, 103 ... warning of a work process abnormally detected in the main process, 104 ... main process abnormally detected in the appearance inspection result Warning, 105 ... warning of equipment where abnormality was detected in equipment work history, 106 ... warning of abnormally detected reworking process, 107 ... warning of abnormally detected low direct rate lot, 108 ... contact to production line Instruction (message creation / transfer) processing start button, 109 ... Start button for performing countermeasure recording processing for the alerted abnormality content, 11 ... detected abnormal data, 112
... Enlarged display of abnormal detection data, 111 ... Cancel button or icon for display by color, 121 ... Cancel / stop button for screen output, 131 ... Creation of line instruction message
Registration process start button, 132 ... Creation example of instruction message, 133 ... Button for determining output range of instruction message,
134 ... Message system registration button, 135 ... Operation cancel button, 141 ... Instruction message output destination designation processing start button, 161 ... Measure content input field for abnormal content, 162 ... Process recording operation button 163 ... Start button for processing to output all the details of warnings and countermeasures up to now, 164 ... Start button for processing to output a breakdown of the number of warning contents

Claims (19)

[Claims] 1. A desired manufacturing process and a desired manufacturing facility in a manufacturing line are correlated with each other to prepare management reference data for each, and product inspection data in the desired manufacturing process and work in the desired manufacturing facility. By collecting data and comparing the collected product inspection data in the desired manufacturing process with the control reference data in the related desired prepared manufacturing process, the presence or absence of abnormality in the quality or characteristics of the product can be determined. Evaluate and further evaluate the presence or absence of abnormality in the manufacturing equipment by comparing the collected work data in the desired manufacturing equipment with the management reference data in the related prepared desired manufacturing equipment, Use the production management calculation system that warns you when abnormalities are evaluated in the evaluation, Method of manufacturing a product characterized in that to produce the product Ri. 2. A desired manufacturing process and a desired manufacturing facility in a manufacturing line are correlated with each other to prepare management reference data for each, and product inspection data in the desired manufacturing process and work in the desired manufacturing facility. By collecting data and comparing the collected product inspection data in the desired manufacturing process with the control reference data in the related desired prepared manufacturing process, the presence or absence of abnormality in the quality or characteristics of the product can be determined. By evaluating and further comparing the collected work data in the desired manufacturing equipment with the management reference data in the related desired prepared manufacturing equipment, the presence or absence of abnormality in the manufacturing equipment is evaluated. By using the production management calculation system that stores the evaluation result and forms the evaluation history, Method of manufacturing a product characterized by the production of goods. 3. A desired manufacturing process and a desired manufacturing facility in a manufacturing line are correlated with each other to prepare management reference data in each, and product inspection data in the desired manufacturing process and work in the desired manufacturing facility. By collecting data and comparing the collected product inspection data in the desired manufacturing process with the control reference data in the desired manufacturing process prepared by associating the data, it is possible to determine whether there is any abnormality in the quality or characteristics of the product. A manufacturing facility is evaluated by adding a code indicating an inspection item and evaluating it, and further comparing the collected work data in the desired manufacturing facility with the management reference data in the related desired prepared manufacturing facility. The presence or absence of abnormalities is evaluated by assigning a code that indicates the manufacturing conditions of the manufacturing equipment, and the evaluation results are stored. With the production management computer system for forming an evaluation history, manufacturing method of the product, characterized in that to produce the product by the production line. 4. A desired manufacturing process and a desired manufacturing facility in a manufacturing line are correlated with each other to prepare management reference data for each, and product inspection data in the desired manufacturing process and work in the desired manufacturing facility. By collecting data and comparing the collected product inspection data in the desired manufacturing process with the control reference data in the related desired prepared manufacturing process, the presence or absence of abnormality in the quality or characteristics of the product can be determined. Evaluate and further evaluate the presence or absence of abnormality in the manufacturing equipment by comparing the collected work data in the desired manufacturing equipment with the management reference data in the related prepared desired manufacturing equipment, If the evaluation indicates an abnormality, enter the details of the countermeasure and store it as a countermeasure record Production Using physical computing system, a manufacturing method of a product, characterized in that to produce the product by the production line. 5. A process code for a desired manufacturing process element in a manufacturing process flow for manufacturing a product, and a standard for a process specification determined by a product type or lot of a product to be flown to a manufacturing line corresponding to the desired manufacturing process element. A code and a facility code for a facility that can be used to realize the process specifications are assigned to a production management calculation system, and manufacturing conditions for the desired facility for manufacturing a product in the production management calculation system. To
A product characterized by being managed in relation to each other by the given process code, standard code and facility code, and using the desired facility managed in a production line having the production process flow. Manufacturing method. 6. The method of manufacturing a product according to claim 1, wherein the product is a thin film process product. 7. The method of manufacturing a product according to claim 1, wherein the manufacturing line has at least a film forming step, a photolithography step, an etching step, and an inspection step. 8. A manufacturing condition management calculation means for preparing manufacturing conditions in a desired manufacturing facility installed in a desired manufacturing process of a manufacturing line and inspection specifications of product quality or characteristics in a desired manufacturing process of the manufacturing line. An equipment work history management calculating means for collecting work results performed in the desired manufacturing equipment, and an inspection for collecting inspection results of quality or characteristics of products in a desired manufacturing process of the manufacturing line Equipment for comparing the work results in the desired manufacturing equipment collected by the result management calculation means and the equipment work history management calculation means with the manufacturing conditions in the desired manufacturing equipment prepared by the manufacturing condition management calculation means The presence or absence of abnormality is evaluated, and the inspection result of the quality or characteristics of the product in the desired manufacturing process collected by the inspection result management calculation means and the above And a production / quality monitoring calculation means for comparing the inspection specifications of the product quality or characteristics in the desired manufacturing process prepared by the calculation means for manufacturing condition management to evaluate the presence or absence of abnormality in the product quality or characteristics. A production management calculation system characterized by 9. A manufacturing condition management calculation means for preparing a manufacturing condition in a desired manufacturing facility installed in a desired manufacturing process of a manufacturing line and an inspection specification of quality or characteristics of a product in a desired manufacturing process of the manufacturing line. An equipment work history management calculating means for collecting work results performed in the desired manufacturing equipment, and an inspection for collecting inspection results of quality or characteristics of products in a desired manufacturing process of the manufacturing line Equipment for comparing the work results in the desired manufacturing equipment collected by the result management calculation means and the equipment work history management calculation means with the manufacturing conditions in the desired manufacturing equipment prepared by the manufacturing condition management calculation means The presence or absence of abnormality is evaluated, and the inspection result of the quality or characteristics of the product in the desired manufacturing process collected by the inspection result management calculation means and the above By comparing the inspection specifications of the quality or characteristics of the product in the desired manufacturing process prepared by the calculation means for manufacturing condition management, the presence or absence of abnormality in the quality or characteristics of the product is evaluated, and each evaluation result is evaluated as abnormal. And a production / quality monitoring calculation means for warning each of them in case of failure. 10. Manufacturing condition management calculation means for preparing manufacturing conditions in a desired manufacturing facility installed in a desired manufacturing process of a manufacturing line and inspection specifications of product quality or characteristics in a desired manufacturing process of the manufacturing line. An equipment work history management calculating means for collecting work results performed in the desired manufacturing equipment, and an inspection for collecting inspection results of quality or characteristics of products in a desired manufacturing process of the manufacturing line Equipment for comparing the work results in the desired manufacturing equipment collected by the result management calculation means and the equipment work history management calculation means with the manufacturing conditions in the desired manufacturing equipment prepared by the manufacturing condition management calculation means The presence or absence of abnormality is evaluated, and the inspection result of the product quality or characteristics in the desired manufacturing process collected by the inspection result management calculation means and the Evaluate whether or not there is an abnormality in the product quality or characteristics by comparing it with the inspection specifications of the product quality or characteristics in the desired manufacturing process prepared by the manufacturing condition management calculation means, and store and evaluate these evaluation results. A production management calculation system, comprising: a production / quality monitoring calculation means for forming a history. 11. A manufacturing condition management calculating means for preparing manufacturing conditions in a desired manufacturing facility installed in a desired manufacturing process of a manufacturing line and inspection specifications of a product quality or characteristics in a desired manufacturing process of the manufacturing line. , An equipment work history management calculation means for collecting the work results performed in the desired manufacturing equipment, and an inspection for collecting the inspection results obtained by inspecting the quality or characteristics of the product in the desired manufacturing process of the production line with an inspection device The result management calculation means and the work results in the desired manufacturing equipment collected by the equipment work history management calculation means are compared with the manufacturing conditions in the desired manufacturing equipment prepared by the manufacturing condition management calculation means and manufactured. The quality of the product in the desired manufacturing process collected by the inspection result management calculation means is evaluated by adding a code indicating the manufacturing condition of the equipment. Or the characteristic of the product or the characteristic of the characteristic in the desired manufacturing process prepared by the calculation means for manufacturing condition control is compared to indicate the inspection item indicating whether the quality or characteristic of the product is abnormal. A production management calculation system, comprising: a production / quality monitoring calculation unit that assigns a code, evaluates the results, and stores the evaluation results to form an evaluation history. 12. A manufacturing condition management calculation means for preparing manufacturing conditions in a desired manufacturing facility installed in a desired manufacturing process of a manufacturing line and inspection specifications for product quality or characteristics in a desired manufacturing process of the manufacturing line. , An equipment work history management calculation means for collecting the work results performed in the desired manufacturing equipment, and an inspection for collecting the inspection results obtained by inspecting the quality or characteristics of the product in the desired manufacturing process of the production line with an inspection device Equipment for comparing the work results in the desired manufacturing equipment collected by the result management calculation means and the equipment work history management calculation means with the manufacturing conditions in the desired manufacturing equipment prepared by the manufacturing condition management calculation means The presence or absence of abnormality is evaluated, and the inspection result of the product quality or characteristics in the desired manufacturing process collected by the inspection result management calculation means and the The presence or absence of abnormality in the product quality or characteristics was evaluated by comparing with the inspection specification of the product quality or characteristics in the desired manufacturing process prepared by the calculation means for manufacturing condition management, and it was evaluated as abnormal in each evaluation. In this case, the production management calculation system is provided with a production / quality monitoring calculation means for inputting the details of the countermeasure and storing it as a countermeasure record. 13. The product progress management calculation means for collecting at least the product completion record of a product in a desired manufacturing process of a manufacturing line, as set forth in claim 8 or 9 or 10 or 11 or 12. Production management calculation system. 14. The evaluation result evaluated by the production / quality monitoring calculation means is provided in any one of the calculation means or in a terminal device connected to the calculation means, with information about a product name and a product type or a lot added thereto. 13. The production management calculation system according to claim 8, 9 or 10 or 11 or 12, wherein the production management calculation system is configured to display on a display means. 15. A terminal connected to any one of the calculating means or to the calculating means, with the history information regarding the evaluation result evaluated by the calculating means for production / quality monitoring, added with information about a product name and a product type or a lot. 13. The production management calculation system according to claim 8 or 9, 10 or 11 or 12, which is configured to display on a display means provided in the device. 16. The instruction content for a desired manufacturing process or manufacturing facility based on the evaluation result evaluated by the production / quality monitoring calculation means is supplied to any one of the calculation means or a terminal device connected to the calculation means. 13. The production management calculation system according to claim 8, 9 or 10 or 11 or 12, wherein the production management calculation system is configured to display on a display means provided. 17. A screen for inputting a countermeasure record for a desired manufacturing process or manufacturing facility based on the evaluation result evaluated by the production / quality monitoring calculation means is provided in any of the calculation means or the calculation means. The display means provided in the connected terminal device is configured to display the data, and the display device is provided with the display device.
The production management calculation system described in 2. 18. The evaluation result evaluated by the production / quality monitoring calculation means can be inspected by either a code indicating a manufacturing condition of a manufacturing facility or a code indicating an inspection item. The production management calculation system according to claim 11. 19. A process code for a desired manufacturing process element in a manufacturing process flow for manufacturing a product, and a standard for a process specification determined by a product type or lot of a product to be flown to a manufacturing line corresponding to the desired manufacturing process element. A code and a facility code for a facility that can be used to realize the process specifications, and the manufacturing conditions for the desired facility for manufacturing a product, the assigned process code, standard code and facility. A production management calculation system characterized by managing them in relation to each other by code.