JP2002299197A - Mass production support apparatus and system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a production system which is free of human errors and in which manufacturing devices installed on a manufacturing line can be controlled to be in a constant state. SOLUTION: A device manager 9 measures data about a device, and sends the data to a mass production support system server 1 by using a device manager terminal 8. The mass production support system server 1 receives the data from the device manager terminal 8 and determines statistically based on the received data, whether there is a sign of abnormality in the device. If it is determined that there is a sign of abnormality, abnormality information notifying the sign of abnormality is sent to the device manager terminal 8.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mass production support device and a mass production support system for smoothly controlling a production line provided with a plurality of production devices.

[0002]

2. Description of the Related Art In recent years, in a semiconductor device manufacturing process, it has been required to improve yield and secure device reliability. In order to meet these demands, it is indispensable not only to process technology but also to appropriately control equipment used in each step and to smoothly control the entire production line.

[0003] Conventionally, in order to appropriately control each manufacturing apparatus in a manufacturing line, specifications, manufacturing process charts, and the like are issued and used on paper. That is, the line operator who operates the manufacturing apparatus operates the manufacturing apparatus according to these specifications and the manufacturing process schedule.

[0004]

However, when there is a change in the contents of the above-mentioned specifications and manufacturing process charts, the updated specifications and manufacturing process charts are issued and used until they are used. It took time. As a result, it was not possible to immediately cope with the discovered problem, resulting in a decrease in the line operation rate.

[0005] In the inspection process in the production line,
In many cases, the line operator subjectively judges the quality of the product based on the inspection result, so that there is a high possibility that a human judgment error occurs. In addition, it is difficult to control the production line smoothly, because a difference occurs in the judgment due to a difference in the experience of the line operator or the like.

Accordingly, it is an object of the present invention to provide a mass production support apparatus and a mass production support system capable of promptly responding to a trouble and improving the operation rate of a production line.

Another object of the present invention relates to a mass production support apparatus and a mass production support system capable of smoothly controlling a production line without human error.

[0008]

According to a first aspect of the present invention, there is provided a mass production support apparatus for controlling a production state of a production line provided with a plurality of production apparatuses. Receiving means, a determining means for statistically determining whether or not there is a sign of abnormality in the manufacturing apparatus based on the data received by the receiving means, and the determining means determines that there is a sign of abnormality. In some cases, the mass production support device includes a transmission unit that transmits abnormality information that indicates a sign of abnormality.

According to a seventh aspect of the present invention, there is provided a mass production support system including a terminal provided on a production line and a mass production support device for controlling a production state of the production line based on data from the terminal. Input means for transmitting data to the mass production support device, and the mass production support device has a receiving means for receiving data from the terminal, and an abnormality in the manufacturing apparatus based on the data received by the receiving means. Determination means for statistically determining whether or not there is a sign of abnormality, and transmission means for transmitting abnormality information for notifying a sign of abnormality when the determination means determines that there is a sign of abnormality. It is a feature of mass production support system.

[0010] As described above, according to the first and seventh aspects of the present invention, the mass production support apparatus receives data from a terminal and determines whether or not there is a sign of abnormality in the manufacturing apparatus based on the received data. If the determination is made statistically and it is determined that there is a sign of abnormality, trouble information can be prevented from being transmitted beforehand, because abnormality information for notifying the sign of abnormality is transmitted to the terminal.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing a schematic configuration of a mass production support system according to an embodiment of the present invention. In one embodiment of the present invention, a description will be given of a semiconductor device manufacturing process as an example.

This mass production support system includes a mass production support system server 1, a system engineer terminal 2, a line worker terminal 4, a line manager terminal 6, a device manager terminal 8, a sales terminal 10, and a manager terminal 12. here,
The mass production support system server 1, the system engineer terminal 2, the line worker terminal 4, the line manager terminal 6, the device manager terminal 8, the sales terminal 10, and the manager terminal 12 are each mass-produced via, for example, a LAN (Local Area Network). Connected to support system server 1. In one embodiment of the present invention, each terminal is connected to the mass production support system server 1 via an intranet (registered trademark).

In one embodiment of the present invention, a case where one line worker terminal 4 is connected to the mass production support system server 1 will be illustrated and described for convenience. The number of installations of 4 is not limited to this. Also, the number of terminals other than the line worker terminal 4 is not limited to the above-described example.

Each terminal can browse various files stored in the mass production support system server 1 via the intranet, and can also perform display based on information sent from the mass production support system server 1. Terminal. In one embodiment of the present invention, each terminal is, for example, a personal computer.

The mass production support system server 1 is capable of receiving information sent from each terminal and transmitting information to each terminal. The mass production support system server 1 also stores an in-process management data input file (hereinafter referred to as I
PQC (In Process Quality Control) data input file), device management data input file (hereinafter EQC)
(Equipment Quality Control) data input file), electronic process sheet file, judgment program file,
Alarm information storage file, measurement data storage file,
Stores a progress information management file and condition change file.

The IPQC data input file is a file for inputting measurement data relating to a product and a product in a manufacturing stage (hereinafter, a semi-finished product). For example, measurement data such as a line width, an alignment, a sputtering film thickness, a plating film thickness, a polishing film thickness, and magnetic characteristics are input to this file. Further, the IPQC data input file has a determination button. Therefore, when the line worker 5 inputs data and presses the determination button, the determination file shown below determines whether or not there is an abnormality in the product or semi-finished product based on the input data (product or semi-finished product). Is determined to be within the standard) and whether there is a sign of abnormality in the product or semi-finished product. The data input to the IPQC data input file is stored as a measurement data storage file in a database (not shown) provided in the mass production support system server 1. Further, in response to a request from each terminal, the input data may be displayed as a trend based on the stored data.

The EQC data input file is a file for inputting data indicating the state of the manufacturing apparatus. Here, when the manufacturing apparatus is a sputtering apparatus, an etching apparatus, a coater developer, a plating apparatus, and a stepper (exposure apparatus), each apparatus manager measures data and the measurement items to be input to the EQC data input file are as follows. Shown in The apparatus manager of the sputtering apparatus measures and inputs the sputtering rate, electric characteristics (Hc, Hk), etc. of each target (Ti, Ta, NiFe, Cu, etc.). The equipment administrator of the etching equipment
The target etching rate is measured and input. The coater developer's device manager measures and inputs the coating thickness and phenomenon rate of each resist. The equipment manager of the plating measure measures and inputs the plating rate. An apparatus manager of a stepper (exposure apparatus) measures and inputs stepping accuracy, overlay accuracy, and exposure power.

The EQC data input file has a judgment button. Therefore, the device administrator 9
When the user inputs data and presses the determination button, a determination file shown below determines whether or not the device is in an abnormal state based on the input data and whether or not the device has a sign of abnormality. Is determined. The input data is
The data is stored as a measurement data storage file in a database (not shown) provided in the mass production support system server 1. Further, in response to a request from each terminal, the input data may be displayed as a trend based on the stored data.

The electronic process chart file is a file in which an electronic process chart required for the operation of the line worker 5 is stored. Specifically, conditions such as an apparatus name, an operation name, and a recipe name used in each step are clearly specified in the electronic process chart.
In addition, this electronic process chart is linked to a work standard document that specifies detailed work contents. Specifically, a link is provided to the work name part, and the work standard can be viewed by clicking the work name part.

Further, the electronic process chart is provided with entry fields for entering a work start time, a work end time, and a name of a worker in the meantime. At the start of the work, the line worker 5 inputs the work start time and the name of the person in charge in this electronic process chart, and also at the end of the work, inputs the work end time and the name of the person in charge. The data is automatically aggregated in the file.

Further, the measurement items are specified in the electronic process chart. Further, this electronic process chart is linked to the IPQC file. Therefore, line worker 5
Is the IPQC if there is a measurement item in the electronic schedule
Link to the file, input the measurement data indicated in the measurement item to this IPQC file, and click the judgment button provided in this IPQC file. here,
As measurement items, for example, items such as line width, alignment, sputtering film thickness, plating film thickness, polishing film thickness, and magnetic characteristics are displayed.

The determination program file determines whether or not the product or the semi-finished product conforms to the standard based on the measurement data on the product or the semi-finished product input to the IPQC data input file, and indicates the abnormality of the product or the semi-finished product. It is determined whether or not there is. Here, the determination of the sign of abnormality is statistically made based on a plurality of measurement data on the product or semi-finished product input to the IPQC data input file, as to whether or not there is a sign of abnormality in the product or semi-finished product. It is done by that. Specifically, whether or not there is a sign of abnormality is statistically determined by the approach determination and the tendency determination.

The approach determination is a method of determining whether or not there is an upper-limit approach tendency / lower-limit approach tendency based on a plurality of measurement data. Is a method of determining whether or not there is a sign of abnormality by determining whether or not the data is equal to or greater than a predetermined value. In one embodiment of the present invention, when two of the three consecutive data are equal to or more than 上限 of the upper limit or the lower limit, it is determined that there is a sign of abnormality.

The tendency judgment is a method of judging whether or not there is an upward tendency or a downward tendency based on a plurality of measurement data. Specifically, a plurality of data continuously rise or fall. This is a method of determining whether or not there is a sign of abnormality based on whether or not there is a sign. In one embodiment of the present invention, when seven or more data continuously rise or fall, it is determined that there is a sign of abnormality.

The judgment program file is an EQC
Based on the measurement data on the product or semi-finished product input to the data input file, it is determined whether or not the manufacturing apparatus is in an abnormal state and whether or not the manufacturing apparatus has a sign of abnormality. Here, the judgment of the sign of abnormality is made by EQ
This is performed by statistically determining whether or not there is a sign of abnormality in the manufacturing apparatus based on a plurality of measurement data on the manufacturing apparatus input to the C data input file. Specifically, similarly to the IPQC file, whether or not there is a sign of abnormality is statistically determined by the approach determination and the tendency determination.

The alarm information storage file records the abnormal information when the product or semi-finished product is judged to be abnormal by the above-mentioned judgment program and the abnormal information when it is judged that the product or semi-finished product has a sign of abnormality. File. The alarm information storage file also records abnormality information on the manufacturing apparatus as well as abnormality information on a product or a semi-finished product.

The progress management file is stored in the line worker terminal 4
This is a file for automatically summarizing the progress status of each lot based on the work start time and work end time sent from the company.

The condition change file is a file for changing the information of the electronic process chart when the state of the apparatus is changed. That is, when the change information is input to the condition change file, the change information is automatically reflected on the recipe conditions in the electronic process chart.

The system engineer 3 accesses the mass production support system server 1 by using the system engineer terminal 2 and creates the above-mentioned program files and the like in the mass production support system server 1. Is managed (server management 21).

The line worker 5 accesses the mass production support system server 1 using the line worker terminal 4, opens the electronic process chart, and confirms the operation contents. When confirming detailed work contents, link to the work standard and browse the electronic process chart. Also, the line worker 5 has a work start time,
The work ending time and the name of the person in charge are entered in the electronic schedule, and data on the product or semi-finished product is entered in the IPQC data input file based on the measurement items in the electronic schedule (data entry 22). Further, the line worker 5 checks the judgment result for the input measurement data on the line worker terminal 4 (judgment result check 23). At this time, if the determination result indicates that there is no abnormality or that there is no sign of abnormality, the line worker 5 sends the product or semi-finished product whose data has been measured to the next process according to this screen display (next process 24). . If the result of the determination is abnormal or there is a sign of abnormality, the operation is stopped and an instruction from the line manager is waited.

When an alarm display is displayed on the line manager terminal 6 (alarm display confirmation 25), the line manager 7 confirms that the alarm display is displayed (alarm display confirmation 26), and Is temporarily stopped (production line stop 27). And line manager 7
, After discussing the investigation and response, specifies the response method in the electronic schedule, and instructs the line operator 5 on the target method (response instruction 28).

The equipment manager 9 constantly checks the manufacturing equipment, measures data relating to the equipment, and inputs the data to the EQC file using the equipment manager terminal 8 (input 29 of equipment status). The judgment result based on is confirmed (judgment result check 30).

The business 11 accesses the mass production support system server 1 by using the business terminal 10 and
By opening and browsing the QC file, the EQC file, and the progress management file, the production status can always be checked (progress check 31). In addition, the business 11 can receive a completion report on the product from the mass production support system server 1 (a completion report reception 32).

When the electronic process schedule needs to be corrected, the manager 13 accesses the mass production support system server 1 using the manager terminal 12 and changes the contents of the electronic process schedule (process change instruction 33). . When the mass production support system server 1 is accessed from the manager terminal 12, a password for access is required to prevent the contents of the electronic process chart from being changed due to unauthorized access. Further, the manager 13 accesses the mass production support system server 1 by using the manager terminal 12 and opens and browses the electronic process chart, the IPQC file, the EQC file, and the progress management file, so that the production status can always be confirmed ( Progress management 34).

FIG. 2 is a flowchart for explaining a process in the automatic judgment based on the measurement data on the product or the semi-finished product.

The line worker 5 accesses the mass production support system 1 using the line worker terminal 4, and opens the electronic process chart (step S1). Then, after performing data measurement according to the measurement items specified in the electronic process chart, the IPQC input file is opened (step S2).

Next, when the measurement data is input to the IPQC input file and the judgment button is clicked, it is determined whether or not the quality of the product or the semi-finished product is abnormal based on the input data, and the product or the semi-finished product is determined. The determination program file determines whether there is a sign of an abnormality in the quality of the product (step S3). At this time, the measurement data input to the IPQC data input file is stored in a database of the mass production support system server 1, and
A trend graph is automatically created (step S4).

If the result of the determination based on the input measurement data indicates no abnormality or no sign of abnormality, it is determined that there is no abnormality or no sign of abnormality on the display unit of the line worker terminal 4. A display informing the line worker 5 is displayed on the screen (step S5). Line worker 5
Confirms this display and advances the lot (step S
6). If the determination result based on the input measurement data indicates an abnormality or a sign of abnormality, the line operator is notified that the display unit of the line worker terminal 4 is abnormal or that there is a sign of abnormality. The display is displayed on the screen, and a similar screen is also displayed on the display unit of the line manager terminal 6 (step S7). The line manager checks this display (step S8) and stops the temporary lot (step S9). This alarm information is stored in the alarm information storage file (step S10).

Next, the line manager 9 confirming the alarm display opens the alarm information storage file and confirms the alarm history (step S11). Then, the countermeasure is instructed to the line worker 5 (step S1).
2) The countermeasures are specified in the electronic process chart (step S13).

FIG. 3 is a flowchart for explaining a process in the automatic determination based on the measurement data on the manufacturing apparatus.

The device manager 9 accesses the mass production support system 1 using the device manager terminal 8, opens an EQC data input file (step S21), inputs measurement data, and clicks a judgment button to input. Based on the data thus obtained, the determination program file determines whether there is an abnormality in the state of the apparatus and whether there is a sign of abnormality in the state of the apparatus (step S22). At this time, the measurement data input to the EQC data input file is stored in a database included in the mass production support system server 1 and is automatically converted into a trend graph (step S23).

Next, if the judgment result based on the input measurement data shows no abnormality or no sign of abnormality, there is no abnormality or no sign of abnormality on the display section of the device manager terminal 8. This is displayed on the screen notifying the device administrator 9 of this fact (step S24), and the lot is advanced (step S25). If the judgment result based on the input measurement data is abnormal or indicates a sign of abnormality, the display of the device manager terminal 8 indicates that there is a problem and that there is a sign of abnormality. Is displayed on the screen (step S26). Device administrator 9
Confirms this screen display and stops the temporary lot (step S27). This alarm information is stored in the alarm information storage file (step S2).
8).

Next, the device manager 9 accesses the mass production support system server 1, opens the alarm information storage file, browses the alarm history, performs recovery of the production device, and inputs the data again to the EQC file. Perform an automatic determination. If the display of the device manager terminal 8 indicates that the device status is normal, the device manager 9 determines that the production device has returned, and makes the production device usable (step S29). If the device status is changed at the time of recovery, the device manager 9 opens the device condition change file and inputs the changed contents (step S30). The electronic process chart is changed according to the contents input to the device condition change file (step S31).

FIG. 4 is a flowchart for explaining the processing of the progress management system. The line worker 5 accesses the mass production support system server 1 at the start of the work,
The electronic process schedule is opened (step S41), and the work start time and the name of the person in charge are entered in the electronic process schedule (step S42). At the end of the work, the mass production support system server 1 is accessed and the electronic process schedule is opened. (Step S4
1) The work end time and the name of the person in charge are input to this electronic process chart (step S42).

The manager 13 accesses the mass production support system server by using the manager terminal 12 and checks the progress (step S43). Similarly, sales 11
Uses the sales terminal 10 to execute the mass production support system server 1
To check the progress (step S4
4).

Although the embodiment of the present invention has been specifically described above, the present invention is not limited to the above-described embodiment, and various modifications based on the technical idea of the present invention are possible. is there.

For example, in one embodiment described above,
Although the example in which the business 11 and the like access the mass production support system server 1 via the intranet has been described, the mass production support system server 1 may be accessed via the Internet. In addition, a user, a product delivery destination, or the like may access the mass production support system server 1 via the Internet to check the progress.

[0048]

As described above, according to the present invention, the mass production support apparatus receives data from the terminal and statistically determines whether or not there is a sign of abnormality in the manufacturing apparatus based on the received data. If it is determined that there is a sign of abnormality, the trouble information can be prevented from being transmitted beforehand because abnormality information for notifying the sign of abnormality is transmitted to the terminal. as a result,
Troubles can be dealt with promptly, and the operation rate of the production line can be improved.

Further, according to the present invention, since the status of the apparatus is automatically determined based on the data on the apparatus, there is no human judgment error and the manufacturing apparatus provided on the manufacturing line is kept in a constant state. It can be controlled. Therefore, the production line can be operated under optimal conditions.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a schematic configuration of a mass production support system according to an embodiment of the present invention.

FIG. 2 is a flowchart for explaining processing by automatic determination based on an IPQC data input file in a mass production support system server according to an embodiment of the present invention.

FIG. 3 is a flowchart for explaining processing by automatic determination based on an EQC data input file in the mass production support system server according to one embodiment of the present invention;

FIG. 4 is a flowchart for explaining processing of a progress management file in the mass production support system server according to the embodiment of the present invention;

[Explanation of symbols]

1 ... mass production support system server, 2 ... system engineer terminal, 3 ... system engineer, 4 ...
Line worker terminal, 5 ... line worker, 6 ... line manager terminal, 7 ... line manager, 8 ... device manager terminal, 9 ... device manager, 10 ...・ Sales terminal, 11 ・ ・ ・ Sales, 12 ・ ・ ・ Manager terminal, 13
···manager

Continued on the front page F term (reference) 3C100 AA29 AA57 AA62 BB33 CC08 5H223 AA05 CC08 EE06 EE30

Claims (15)

[Claims] 1. A mass production support apparatus for controlling a production state of a production line provided with a plurality of production apparatuses, a receiving means for receiving data from a terminal, and the production method based on the data received by the receiving means. Determining means for statistically determining whether or not there is a sign of abnormality in the device; and transmitting means for transmitting abnormality information for notifying of a sign of abnormality when the determining means determines that there is a sign of abnormality. A mass production support device comprising: 2. The mass production support device according to claim 1, wherein the data received by the receiving means is data relating to a product to be manufactured on the manufacturing line. 3. The mass production supporting apparatus according to claim 1, wherein the data received by the receiving means is data relating to a state of the manufacturing apparatus. 4. The method according to claim 1, wherein the determining means determines whether or not there is a sign of abnormality in the manufacturing apparatus based on whether or not the data has an upward trend or a downward trend. Mass production support equipment. 5. The method according to claim 1, wherein the determination unit determines whether the manufacturing apparatus has a sign of abnormality based on whether the data has a tendency to approach an upper limit or a lower limit. A mass production support device characterized by the following. 6. The mass production support device according to claim 1, further comprising a storage unit for storing data received by the reception unit. 7. A mass production support system comprising: a terminal provided on a production line; and a mass production support device for controlling a production state of the production line based on data from the terminal. Input means, and transmission means for transmitting data to the mass production support device, wherein the mass production support device receives data from the terminal, and receives the data from the terminal. Determining means for statistically determining whether or not there is a sign of abnormality, and transmitting means for transmitting abnormality information for notifying of a sign of abnormality when the determining means determines that there is a sign of abnormality. A mass production support system comprising: 8. The mass production support system according to claim 7, wherein the terminal further comprises a receiving means for receiving abnormality information from the mass production support system. 9. The mass production support system according to claim 8, wherein the terminal further comprises a warning unit for notifying a terminal user of an abnormality of the manufacturing apparatus based on the abnormality information received from the mass production support system. system. 10. The mass production support system according to claim 7, wherein the data received by the receiving means is data on a product to be manufactured on the manufacturing line. 11. The mass production support system according to claim 7, wherein the data received by the receiving means is data relating to a state of the manufacturing apparatus. 12. The method according to claim 7, wherein the determination means determines whether or not there is a sign of an abnormality in the manufacturing apparatus based on whether or not the data has an upward trend or a downward trend. Mass production support system. 13. The method according to claim 7, wherein the determination unit determines whether there is a sign of abnormality in the manufacturing apparatus based on whether the data has a tendency to approach an upper limit value or a lower limit value. A mass production support system characterized by: 14. The mass production support system according to claim 7, further comprising storage means for storing data received by said reception means. 15. The storage device according to claim 14, wherein the storage unit further stores a process chart indicating a manufacturing process performed by a manufacturing apparatus provided in the manufacturing line. Mass production support system characterized by the ability to browse tables.